JP2002350318A - Scanner device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scanner device which can produce a strain-free SPM image by practically using a scanning frequency and a scanning displacement range as parameters to deform 'inverse hysteresis waveform'. SOLUTION: The scanner device is provided with a tube scanner 1 formed by piezoelectric elements for scanning a probe 3 in a X-Y direction along a sample 15, a computer 12 defining parameters of both the scanning frequency and scanning displacement range, and a scanning voltage generator 11 generating a scanning voltage of the scanner 1 to allow linearly-displacement of the probe 3 depending on these parameters and nonlinearity of the piezoelectric elements in the scanner 1. This scanning voltage generator 11 generates such a scanning voltage that allows displacement of the probe 3 to be linearized depending on those parameters even if they are changed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanner device which is applied to, for example, a scanning probe microscope such as a scanning tunnel microscope or an atomic force microscope and scans a probe or a sample using a piezoelectric material.

[0002]

2. Description of the Related Art In an SPM in which an XY scanning mechanism is a piezoelectric body, scanning is performed by an "inverse hysteresis waveform" in which the scanning voltage is nonlinear so that the piezoelectric body displacement becomes linear with time, that is, linearly displaced. Sampling with no distortion by sampling and imaging at points obtained by dividing the scanning time at equal intervals
A method for obtaining a PM image is known. Such an apparatus and method are disclosed in Japanese Patent Application No. H6-261555 (JP-A-H8-1010).
1007) "Scanner device" and Japanese Patent Application H5-283
No. 014 (Japanese Patent Application No. H6-310773) "Method of Driving Piezoelectric Ceramic Actuator".

A typical conventional example will be described with reference to FIG. (1-a) is a waveform in which the scanning voltage is non-linearly displaced linearly with respect to the scanning time, and (1-b)
Indicates the displacement at that time. In each case, the horizontal axis is the scanning time. (1-c) shows the relationship between the displacement and the scanning voltage at that time as the scanning voltage on the horizontal axis and the displacement on the vertical axis.

[0004]

However, the hysteresis characteristic changes due to the difference in scanning conditions between the scanning frequency and the scanning displacement range (scan displacement amplitude). (2-a), (2-b) and (2-c) in FIG.
An example in which the scanning frequency is increased for each of (1-b) and (1-c) will be described. Also, (3-a), (3-
b) and (3-c), (1-a), (1-b), (1-
An example in which the scanning displacement range is reduced for each of c) is shown. Also in these examples, the scanning voltage is made non-linear so as to be linearly displaced with respect to the scanning time, and (1-a),
The degree of non-linearity is changed as compared with the examples of (1-b) and (1-c). (2-c) and (3-c) are converted to (1-
It is clear that the degree of nonlinearity is different from that of c).

An object of the present invention is to obtain an SPM image having no distortion by substantially transforming an "inverse hysteresis waveform" using a scanning frequency and a scanning displacement range as parameters.

[0006]

In order to achieve the above object, a scanner according to a first aspect of the present invention includes a scanning member that is scanned along a predetermined scanning path, and the scanning member. A piezoelectric body, and a scanning voltage generator for generating a scanning voltage to be applied to the piezoelectric body, distorting the piezoelectric body by applying the scanning voltage to the piezoelectric body, and displacing the scanning body, The scanning path includes a reciprocating path in which a scanning displacement component in a predetermined direction of the displacement of the scanning body reciprocates at least once in a constant scanning displacement range at a constant scanning cycle. A scanning voltage is applied to the piezoelectric body so that the scanning body is scanned along, and in a scanner device in which the relationship between the scanning voltage and the distortion of the piezoelectric body has non-linearity and hysteresis, in a reciprocal of the scanning cycle, A certain scanning frequency and The apparatus further includes a setting unit for setting a value of a parameter including a scanning displacement amplitude, which is a distance between both ends of a scanning displacement range of a reciprocating scanning displacement component, and an offset voltage of a scanning voltage. A predetermined value of the parameter is set, and the setting unit passes these values to the scanning voltage generation unit, and the scanning voltage generation unit scans based on these values and the nonlinearity and hysteresis of the piezoelectric body. A scan voltage is generated such that the displacement of the scan body with respect to time is linear, at least one of the parameter values set in the setting unit is changed to another value, and the setting unit is a scanning voltage generation unit. Receiving the changed value, the scanning voltage generator scans based on the value of the parameter including the changed value and the nonlinearity and hysteresis of the piezoelectric body. Displacement of the scanning member relative between is characterized by generating a separate scan voltage becomes linear.

[0007] The scanner device having the above-described structure is adapted to set parameters (scan frequency / scan displacement amplitude) according to the set parameters.
Since the scanning voltage is output such that the displacement becomes linear with respect to the scanning time, the scanning can be performed linearly without distortion even if the parameters are changed.

According to a second aspect of the present invention, the reciprocating path of the scanning body is in a plane, the scanning body is two-dimensionally scanned, and the parameters of the setting unit are the reciprocating scanning of the reciprocating path. It is characterized by further including the direction of the displacement component.

According to the scanner device having the above configuration, a scanning voltage is output so that the displacement becomes linear with respect to the scanning time in accordance with the set parameters (scanning frequency, scanning displacement amplitude, direction of reciprocating scanning displacement component). Therefore, even if the direction of the reciprocating scanning displacement component is changed in addition to the parameters of the scanning frequency and the scanning displacement amplitude, it is possible to perform linear scanning without distortion.

In the scanner device according to a third aspect of the present invention, as described above, the predetermined values of the parameters are set in the setting section, and as described above, the setting section sets the predetermined values in the scanning voltage generating section. As described above, the scanning voltage generating unit generates a scanning voltage in which the displacement of the scanning body with respect to the scanning time is linear based on these values and the nonlinearity and hysteresis of the piezoelectric body, After scanning the scanning body along the reciprocating path based on the value of the parameter, the scanning voltage generating unit generates a scanning voltage such that the scanning displacement amplitude of the reciprocating path decreases with time and becomes 0 in a predetermined time. Generated, and as described above, the scanning voltage generation unit generates a scan voltage based on the parameter value including the changed value and the nonlinearity and hysteresis of the piezoelectric body. Before generating another scanning voltage at which the displacement of the scanning body becomes linear, the scanning voltage generating unit increases the scanning displacement amplitude, which has become 0 at a predetermined time, with time, and the another scanning voltage. Is applied to generate a scanning voltage that becomes equal to the scanning displacement amplitude of the scanning body scanned at a predetermined time.

A scanning voltage generating section generates a scanning voltage based on a value of a predetermined parameter, whereby the scanning body is scanned along a predetermined reciprocating path. In the course of this scanning, when the scanning voltage generator generates another scanning voltage based on the changed parameter value, the scanning displacement amplitude is set to zero once, and the scanning is performed without damaging the probe and the sample. Can be continued.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A scanner according to an embodiment of the present invention will be described with reference to FIGS. First, a scanner device according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 4 and FIG.

FIG. 1 is a diagram showing a configuration of an example in which the scanner device of the present embodiment is applied to a scanning probe microscope (SPM). The tube scanner 1 has a cylindrical piezoelectric body, and is displaced in the XY two-dimensional directions. A Z-scanner 14 is provided at its free end, and supports the probe 3 used as a scanning body via the probe displacement detecting unit 2.
Scanning is performed along a predetermined scanning path in the dimensional direction. The X scanning voltage, which is the scanning voltage in the X direction, and the Y scanning voltage, which is the scanning voltage in the Y direction, are output from the scanning voltage generator 11 and applied to the tube scanner 1. In the scanning voltage generator 11, the scanning voltage is supplied from the microcomputer 10 to the X table 6, Y
Based on the voltage data string written in Table 9, D / A
The signals are sequentially converted into analog signals by the amplifiers 4 and 7,
Is output as a continuous scanning voltage. Tip 3
6A, for example, as shown in FIG. 6A, the X component of the displacement of the probe 3 reciprocates at least once at a constant scanning cycle within a constant scanning displacement range, and the Y component of the displacement moves in one direction. (For example, a reciprocating path that changes in a positive direction). The computer 12 used as a setting unit has a function of setting parameters relating to scanning conditions, and includes parameters such as a scanning frequency, which is the reciprocal of a scanning cycle, and a scanning displacement amplitude, which is a distance between both ends of a scanning displacement range. Is entered. The input parameter values are passed to the microcomputer 10.

The probe displacement detector 2 detects the displacement of the probe 3 and outputs a displacement signal to the Z controller 13. The Z control unit 13 outputs to the Z scanner 14 a Z servo signal for expanding and contracting the Z scanner so as to trace the surface of the sample 15.
An SPM image of the surface of the sample 15 is constructed by collecting Z control data at a constant sampling interval during the two-dimensional scanning.

There is nonlinearity and hysteresis in the relationship between the scanning voltage and distortion of the piezoelectric body of the tube scanner 1. For this reason, a non-linear “reverse hysteresis waveform” scanning voltage is applied to the tube scanner 1 such that the displacement of the probe 3 becomes linear with respect to time. The microcomputer 10 includes:
A function formula necessary to generate a scan voltage having an “inverse hysteresis waveform” is stored. The stored formulas are the following formulas 1 to 6.

The displacement d of the probe 3 (displacement of the tube scanner 1) can be approximated by an n-th order equation using a scanning voltage E, which is a voltage applied to the piezoelectric body, as a variable.
There coefficient _{a n} of the function formula ^{_{d = a 3 E 3 + a}} 2 E 2 + a 1 E + a 0 ... 1 1 Formula displacement d- applied voltage E such that linear, scan frequency freq, different scanning voltage amplitude _{E pp} because it has a value, the coefficients _{a n,} scanning frequency freq and the scan voltage function formula a ₃ = _F 3 to the amplitude _{E pp} was variable _{(freq, E pp) ... 2} a 2 = F 2 (freq, E pp) ... 3 a ₁ = F ₁ (freq, E _pp ) 4 a ₀ = F ₀ (freq, E _pp ) 5 The scanning displacement amplitude d _pp has different values at the scanning frequency freq and the scanning voltage amplitude E _pp . , Scanning displacement amplitude d
The _pp, scanning frequency freq and the scan voltage amplitude _{E p p} a as a variable function expression _{d pp = F 4 (freq,} E pp) ... 6 computer 12 to the scanning frequency freq, the values of parameters including the scanning displacement amplitude _{d pp} When input, microcomputer 1
Pass these values to 0. The microcomputer 10 calculates the scanning voltage amplitude E _pp from the equation (6). In addition, the required E
a _{3 to} a ₀ are obtained from _pp from Equations 2 to 5. Found a
₃ ~a ₀ a By substituting the equation (1), displacement in the set condition - scanning voltage characteristics. Next, microcomputer 1
In the case of 0, a voltage data string is created from the equation (1) showing the displacement-scanning voltage characteristic so that the displacement d is at equal intervals on the time axis, and stored in the X table 6 and the Y table 9. At this time, when creating the Y double 9, a table is created based on the scanning frequency in the Y direction. The Y scanning frequency is
This is a frequency obtained by dividing the X scanning frequency by the number of lines.

When the storage of the voltage data strings in the X table 6 and the Y table 9 is completed, scanning is started. When scanning is started, data is transferred from the X table 6 to the D / A 5 at an appropriately adjusted cycle based on the scanning frequency freq. As described above, this data is sequentially converted into an analog signal here, and output as an X scanning voltage via the amplifier 4. The Y scanning voltage is output in the same manner as the X scanning voltage, but the scanning frequency is different as described above. The scanning frequency of the Y scanning voltage is the scanning frequency freq of the X scanning voltage / the number of scanning lines L, where L is the number of scanning lines. That is, fr
Based on the scanning frequency equal to eq / L, data is transferred from the Y table 9 to the D / A 8 at a properly adjusted cycle. The scanning voltage at this time is as shown in FIG. When this scanning voltage is applied to the tube scanner 1, the displacement of the probe 3 becomes linear.

When the value of at least one of the parameters set in the computer 12 is changed to another value, the scanning is performed based on the values of these parameters and the equations (1) to (6) in the same manner as described above. Tip 3 against time
A scanning voltage is generated such that the displacement becomes linear. That is, the scanning frequency freq, if you change the scanning displacement amplitude d _pp displacement of the probe 3 with respect to the scanning time can be linear.

Based on the functions of the above equations 1 to 6, the scanning voltage
Was derived, but individual differences and changes over time of the tube scanner 1
In order to correct the characteristic variation caused by the
By multiplying one or more equations by a coefficient k,
To correct the variation in the characteristics of the
Is also possible. Coefficient k that multiplies functions 1 to 6₁~ K ₆
Can be arbitrarily set from the computer 12.

In this embodiment, the turning point of the scanning voltage is changed suddenly. Scan by SPM and sampling of SPM measurement in the section displaced linearly,
Needless to say, it is possible to construct an M image, and to perform a prescan to stabilize a displacement loop during scanning before actually starting measurement. FIG. 3 shows an example in which the section of the X scan voltage (a) with rounded turning points and the X displacement during scanning (b), which is linearly displaced in the forward path and the return path, is set as the SPM measurement sampling section.

It is needless to say that the scanning voltage waveform is not limited to a continuous waveform that is repeated a plurality of times, but may be a single reciprocating waveform.

Further, when the scan is finished, so as to return to the scanning displacement center point, add the overscan scanning the scan voltage, scanning frequency freq, according to the scanning voltage amplitude E _pp, variably overscan voltage width Vover It is also possible. Furthermore, the overscan voltage width is
Needless to say, it can be calculated by the function formula Vover = F ₅ (freq, E _pp )... 7 using the scanning frequency freq and the scanning voltage amplitude E _pp as variables.

It goes without saying that the scanning voltage waveform may have a waveform which is not limited to a one-to-one cycle.

In FIG. 4, an overscan voltage is provided when scanning is completed only once, and the ratio of the forward and return cycles is set to one.
6: 1 Y scanning voltage, Y displacement during scanning, forward SPM
An example is shown as a measurement sampling section.

Further, the scanning voltage generator 11 can perform an empty scanning operation to cancel the creep of the piezoelectric body so as to return to the scanning displacement center point before the start of scanning or after the end of scanning. . For example, the blank scan may be a scan that converges the amplitude from the maximum amplitude to 0 while scanning at a constant frequency.

In this embodiment, a two-dimensional scanner is used. However, it goes without saying that the present invention can be applied not only to a one-dimensional scanner but also to a three-dimensional scanner.

Although equation (1) is a cubic equation, it is needless to say that the equation can be a quadratic equation or a quartic or higher equation in order to obtain a more accurate approximation equation.

Further, parameters of a function expression for obtaining coefficients
With the scanning frequency freq and the scanning voltage amplitude E_ppMade
Changes the scanning frequency to the scanning period T and the scanning voltage amplitude to
Amplitude d _ppFunction can be replaced with
Needless to say.

Further, the open equation parameters to determine the coefficients a _n, the scanning frequency freq, the use of parameters other than the scan voltage range E _pp, for example, the offset voltage of the scanning voltage for displacing shifting the piezoelectric element from the origin Vo
It goes without saying that ffset can be applied.

In this embodiment, the voltage data string is
Stored in X table 6 and Y table 9
It is needless to say that if the calculation processing is fast, it is possible to output the result calculated in real time to the D / A 5 and 9 without going through the table.

In the present embodiment, the function formula is stored in the microcomputer 10 and the arithmetic processing is performed. However, it is also possible to store the function formula in the computer 12 and perform the arithmetic processing.
Needless to say, it is also possible to store the function formula in hardware such as A and perform the arithmetic processing.

In the present embodiment, the linearity is improved by multiplying one or more of the equations (1) to (6) by a coefficient k to thereby correct the dispersion of the characteristics of the piezoelectric scanner. , the same effect is multiplied by a coefficient k ₇ to function 7 expression is not to say it is line.

To further improve the linearity, instead of simply multiplying the coefficients k ₁ to k ₇ by the equations 1 to 7,
It goes without saying that Equations (7) to (7) can be transformed into an arbitrary function.

Further, in order to correct variations in characteristics caused by individual differences and changes over time of the tube scanner 1, a sample having a known surface shape such as a mesh shape is used as a calibration sample. Prepare,
It By SPM measurement, or correcting the coefficient k ₁ to k _7, it is possible or corrected by deforming the 1-7 formula, also automatically possible to perform the correction and the measurement Needless to say, this is possible.

(Effect) According to the parameters (scanning frequency / scanning displacement amplitude) relating to the set scanning conditions, a scanning voltage which makes the displacement linear with respect to the scanning time is calculated by the scanner device having the above configuration. Output
Even if the scanning conditions are changed, it is possible to perform linear scanning without distortion.

Next, a scanner according to a second embodiment will be described with reference to FIGS. 1, 5, 6, and 7. FIG. Most of the configuration of the present embodiment is basically the same as most of the configuration of the first embodiment. Note that, in the present embodiment, components that are substantially the same as the components described in the first embodiment with reference to FIG. 1 indicate the corresponding components in the first embodiment. The same reference numerals as those described above are used, and the detailed description is omitted.

The difference between the scanner device of the present embodiment and the scanner device of the first embodiment is the configuration of the scanning voltage generator. In the present embodiment, a scan voltage generator 21 for scan rotation shown in FIG. 5 is used instead of the scan voltage generator 11 shown in FIG. 1 of the first embodiment. The scan rotation scan voltage generator 21 includes:
It is used when scanning by rotating the scanning path arbitrarily in a two-dimensional scanner.

Before the rotation, as shown in FIG. 6A, it is assumed that the scanning displacement component in the lateral direction (X direction) of the displacement of the probe 3 reciprocates at a constant scanning cycle within a constant scanning displacement range. The direction of the reciprocation (scanning direction) reciprocating at a constant scanning cycle within a constant scanning displacement range due to the scan rotation is shown in FIG.
As shown in FIG. 6B, it is rotated from the X direction by a rotation angle θ (θ = 30 ° in FIG. 6B).

The parameters of the computer 12 further include the scanning direction. The rotation angle θ is used as the scanning direction.

The microcomputer 10 creates an X table from the values of the scanning frequency freq, the scanning displacement amplitude d _pp , the rotation angle θ, and the number L of scanning lines set by the computer 12 in the following procedure. First, let the scanning displacement amplitude be d
_pp × cos θ, and the frequency is freq,
Equation 1 is obtained. The voltage data string created from the obtained equation (1) is stored in the XH table 6a. Next, the scanning displacement amplitude is replaced by d _pp × sin θ, and the scanning frequency is
Replace with q / L, and calculate Equation 1 based on the value. The voltage data string created from the obtained one equation is stored in the XV table 6b.

Further, the microcomputer 10 creates a Y table in the following procedure. First, the scanning displacement amplitude is d _pp × si
Replace with nθ, and set the scanning frequency as freq to find equation 1. The voltage data string created from the obtained equation is represented by Y-
Stored in the H table 9a. Next, the scanning displacement amplitude is d
_pp × cos θ, and the scanning frequency is freq / L
And obtain an equation based on the value. 1 that I asked
The voltage data string created from the equation is stored in the YV table 9b.

The above X table 6 and Y chiple 9
Except for the above, the scanning voltage generator 21 has the same configuration as the scanning voltage generator 11 of the first embodiment, and the other description is omitted.

X tables 6a and 6b, Y table 9a,
When the storage of the voltage data string is completed in 9b, scanning is started.

When the scanning is started, the XH table 6a is set at a cycle appropriately adjusted based on the scanning frequency freq.
To the X adder 6c and from the YH table 9a to the Y adder 9c.

From the XV table 6b to the X adder 6c at a period properly adjusted based on the scanning frequency equal to freq / L, which is formed from the previously used scanning frequency freq and the number L of scanning lines. , Y-V table 9b to Y
The data is transferred to the adder 9c.

In the D / A 5, the data digitally added by the X adder 6 c is sequentially converted into an analog signal, and an X scanning voltage is output via the amplifier 4. In D / A8, Y
The data digitally added by the adder 9c is sequentially converted into an analog signal, and a Y scan voltage is output via the amplifier 7. The scanning voltage at this time is as shown in FIG.

In this embodiment, the X adder 6c,
Although the data is digitally added by the Y adder 9c, it is needless to say that the data of each table can be D / A converted and then added by an analog signal.

(Effects) Parameters related to scanning conditions set by the scanner device having the above configuration (scanning frequency, scanning displacement amplitude, scanning direction (rotation angle)).
The scan voltage is calculated and output such that the displacement becomes linear with respect to the scan time, so that in addition to the parameters of the scan frequency and scan displacement amplitude, even if the scan direction is changed, the scan voltage is linear without distortion. It became possible to scan.

Next, a scanner device according to a third embodiment will be described with reference to FIG.

Most of the configuration of the present embodiment is basically the same as most of the configuration of the second embodiment. In the present embodiment, the components substantially the same as the components described in the second embodiment with reference to FIG.
The same reference numerals as those used in the first embodiment denote corresponding components, and a detailed description thereof will be omitted.

The configuration of the present embodiment differs from the configuration of the second embodiment in the configuration of the scanning voltage generator 21.
Reference voltage sources 5b and 8b are connected to the D / A's 5 and 8 of the scanning voltage generator 21 of the present embodiment, respectively.

[0052] In the second embodiment, the scanning frequency freq during scanning, scanning displacement amplitude d _{p p,} if the rotation angle theta, to change parameters such as the number of scanning lines L, and in the second embodiment X- H table 6a, XV
Table 6b, YH table 9a, YV table 9
It is necessary to update two or more of b.

In the example applied to the SPM, since the probe scans the surface of the sample so as to trace it, if the scanning is suddenly changed, the probe or the sample may be damaged.

Therefore, a multiplying D / A is adopted for the D / As 5 and 8, and the probe and the sample are not damaged when the reference voltage sources 5b and 8b are in the state of 0V (the scanning displacement amplitude is 0). After a predetermined time, the XH table 6a,
The XV table 6b, the YH table 9a, and the YV table 9b are updated. After updating the table, the reference voltage source 5
b, 8b to the original voltage (restoring the scanning displacement amplitude),
The probe and the sample are moved in a predetermined time so as not to damage the sample.

The operation of the scanner device at this time will be described. For the sake of simplicity, it is assumed that the rotation angle θ is set to θ = 0 before updating the table, and the rotation angle θ is not changed when updating the table. At this time, X
The direction is the scanning direction described above regardless of before or after updating the table.

First, predetermined values of parameters including the scanning displacement amplitude d _pp 1 in the X direction and the scanning frequency freq 1 in the X direction are set in the computer 12, and these values are transferred to the scanning voltage generator 21.

Next, the scanning voltage generator 21 creates an XH table 6a and an XV table 6b based on these values and the expressions 1 to 6, and generates an X adder 6c, a D / A5, and an amplifier. A scanning voltage is generated via the line 4 so that the displacement of the probe with respect to the scanning time is linear. The reference voltage source 5b receives a predetermined initial voltage V
int. The probe is scanned along a reciprocating path based on parameters set in the computer 12.

At this time, the voltage supplied by the reference voltage source 5b
Is set to 0 V at a predetermined time t1, the scanning is accordingly performed.
The voltage generation unit 21 performs scanning displacement oscillation in the X direction of the reciprocating path.
Width d _pp1 decreases with time, and at time t1
A scanning voltage is generated so as to be zero.

Next, at least one of the parameter values set in the computer 12 is changed to another value. In this case, scanning displacement amplitude and scan frequency were changed respectively to _d pp 2, freq2. The computer 12 passes these changed values to the scan voltage generator 21. The XH table 6a and the XV table 6b are updated based on these values.
The change and the transfer of the parameter value are performed while the scan based on the scan displacement amplitude d _pp 1 and the scan frequency freq 1 is performed, respectively, even if the scan displacement amplitude d _pp 1 is performed.
May be performed during the scans that become smaller over time, or may be performed before these scans are performed.

[0060] Depending on the update of the table, scanning voltage generator 21, while reciprocating displacement in the X direction at a scanning frequency freq2, the scanning displacement amplitude increases with time from zero, the scanning displacement amplitude d _{pp 2} A scanning voltage that is equal at a predetermined time t2 is generated. At this time, the voltage supplied by the reference voltage source 5b increases from 0 V to the initial voltage Vint at time t2.

When the scanning displacement amplitude becomes equal to d _pp 2,
The probe has a scanning displacement amplitude d _pp 2 and a scanning frequency freq 2
Are scanned such that the displacement with respect to the scanning time is linear.

Although the value of the rotation angle θ is not changed in the operation of the scanner described above, it may be changed. Needless to say, even if the value of the rotation angle θ is changed, there is no risk of damaging the probe and the sample.

The reference voltage sources 5b and 8b are constituted by D / A, and the scanning voltage amplitude E for determining the scanning displacement amplitude is determined.
Needless to say, it is possible to have a function of setting _pp .

When the parameters are changed, the Z control unit 13 is controlled so that the probe 3 is retracted from the sample 15 and the X-
It goes without saying that a similar effect can be obtained by updating the H table 6a, the XV table 6b, the YH table 9a, and the YV table 9b.

As a parameter, the scanning frequency f
req, scanning displacement amplitude d _pp , rotation angle θ,
Not only the number of scanning lines L, but also the offset voltage of the scanning voltage,
And other parameter changes during scanning
When updating the -H table 6a, the XV table 6b, the YH table 9a, and the YV table 9b, it goes without saying that the function of the present embodiment is effective.

In the present embodiment, the reference voltage source 5 is connected to the scanning voltage generator 21 of the scanner according to the second embodiment.
Although scanning is performed so that the amplitude of the scanning displacement is temporarily reduced to zero by providing b and 8b, the present invention is not limited to this. For example, a reference voltage source may be provided in the scanning voltage generator 11 of the scanner device according to the first embodiment.

(Effect) According to the parameters (scan frequency, scan displacement amplitude, scan direction) related to the set scan conditions, a scan voltage is calculated and output which makes the displacement linear with respect to the scan time. In the scanner device having the above configuration, even if parameters such as a scanning frequency, a scanning displacement amplitude, a scanning direction, and the number of scanning lines are changed during scanning, the scanning displacement amplitude is temporarily set to zero, or the probe is moved from the sample. By retreating, scanning can be continued without damaging the probe and the sample.

It should be noted that the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications and applications can be made without departing from the spirit of the invention.

[0069]

As is clear from the above description,
When the scanner device according to the present invention is used, the “inverse hysteresis waveform” can be deformed substantially using the scanning frequency and the scanning displacement range as parameters, and an SPM image without distortion can be obtained.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an example in which a scanner device according to a first embodiment of the present invention is applied to a scanning probe microscope (SPM).

2A is a graph of an X scanning voltage with respect to a scanning time of the scanner device of FIG. 1, and FIG. 2B is a graph of a Y scanning voltage with respect to a scanning time.

3A is a graph of an X scanning voltage with respect to a scanning time when the turning point is rounded and scanned by using the scanner device of FIG. 1, and FIG. 3B is a graph of an X scanning voltage with respect to the scanning time at this time.
Graph of scanning voltage.

4A is a graph of a Y scanning voltage with respect to a scanning time when an overscan voltage is provided and scanning is performed when scanning is completed only once by using the scanner device of FIG. 1, and FIG. A graph of the Y scanning voltage with respect to the scanning time at this time.

FIG. 5 is a diagram showing a configuration of a scan voltage generator for scan rotation used in a scanner device according to a second embodiment of the present invention.

FIG. 6 is a diagram illustrating a scanning path when scanning is performed using the scanner device according to the first embodiment of the present invention;
(A) is a diagram when the rotation angle θ = 0 °,
(B) is a diagram when the rotation angle θ is 30 °.

7A is a graph of an X scanning voltage with respect to a scanning time when scanning is performed along the scanning path shown in FIG. 6B, and FIG. 7B is a graph with respect to a scanning time at this time. Y
Graph of scanning voltage.

FIG. 8 is a graph when scanning is performed using a conventional scanner device, (1-a) is a graph of scanning voltage with respect to scanning time, (1-b) is a graph of displacement with respect to scanning time,
(1-c) is a graph of the displacement with respect to the scanning voltage.
(2-a), (2-b) and (2-c) correspond to (1-
3A is a graph of a scanning voltage with respect to a scanning time, a graph of a displacement with respect to a scanning time, and a graph of a displacement with respect to a scanning voltage when the scanning period is changed. (3-a), (3-
b) and (3-c) are graphs of the scanning voltage with respect to the scanning time when the scanning voltage amplitude of (1-a) is changed, respectively.
5 is a graph of a displacement with respect to a scanning time, and a graph of a displacement with respect to a scanning voltage.

[Explanation of symbols]

d _pp scanning displacement amplitude freq scanning frequency E _pp scan voltage range θ rotation angle Voffset offset voltage 1 tube scanner 2 probe displacement detecting part 3 probe 4 amplifier 5 D / A 5b reference potential Tsugen 6 X table 6a X-H Table 6b XV table 6c X adder 7 Amplifier 8 D / A 8b Reference power source 9 Y table 9a YH table 9b YV table 9c Y adder 10 Microcomputer 11 Scan voltage generator 12 Computer 13 Z controller 14 Z scanner 15 sample 21 scan voltage generator for scan rotation

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F063 AA43 CA06 CA40 CB06 CC10 DA01 DA04 DB01 DB05 DD02 EA16 EB01 EB15 EB23 KA05 LA19 LA20 2F069 AA06 AA60 DD30 EE20 EE22 GG04 GG06 GG07 GG62 HH04 JJ07 JJ23 JJ04

Claims (3)

[Claims] 1. A scanning body scanned along a predetermined scanning path, a piezoelectric body provided with the scanning body, and a scanning voltage applied to the piezoelectric body are generated, and the scanning voltage is applied to the piezoelectric body. A scanning voltage generator for distorting the piezoelectric body to displace the scanning body, wherein the scanning path has a scanning displacement component in a predetermined direction of the displacement of the scanning body within a constant scanning displacement range. A reciprocating path that reciprocates at a constant scanning cycle or more times, wherein the scanning voltage generating unit applies a scanning voltage to the piezoelectric body so that the scanning body is scanned along the reciprocating path; In a scanner device in which there is nonlinearity and hysteresis in the relationship between scanning voltage and distortion, a scanning frequency, which is the reciprocal of the scanning period, and a scanning displacement, which is a distance between both ends of a scanning displacement range of the reciprocating scanning displacement component. Amplitude and scan voltage The apparatus further includes a setting unit for setting a value of a parameter including an offset voltage, and a predetermined value of the parameter is set in the setting unit. The setting unit sets these values in the scanning voltage generation unit. The scan voltage generating unit generates a scan voltage in which the displacement of the scan body with respect to the scan time is linear based on these values and the nonlinearity and hysteresis of the piezoelectric body, and the scan voltage set in the setting unit. A value of at least one of the parameter values is changed to another value, a setting unit passes the changed value to a scanning voltage generating unit, and the scanning voltage generating unit transmits the parameter including the changed value. And generating another scanning voltage in which the displacement of the scanning body with respect to the scanning time is linear based on the value of the piezoelectric element and the nonlinearity and hysteresis of the piezoelectric body. Turbocharger Na apparatus. 2. The reciprocating path of the scanning body is in a plane, the scanning body is scanned two-dimensionally, and the parameter of the setting unit further includes a direction of the reciprocating scanning displacement component of the reciprocating path. The scanner device according to claim 1, wherein: 3. A predetermined value of the parameter is set in the setting section as described above, and the setting section transfers these values to the scanning voltage generating section as described above. The unit generates a scanning voltage based on these values and the non-linearity and hysteresis of the piezoelectric body so that the displacement of the scanning body with respect to the scanning time becomes linear, and along a reciprocating path based on the value of the parameter. After scanning the scanning body, the scanning voltage generator generates a scanning voltage such that the amplitude of the scanning displacement of the reciprocating path decreases with time and becomes zero at a predetermined time, as described above. A scanning unit that, based on the value of the parameter including the changed value and the non-linearity and hysteresis of the piezoelectric body, displaces the scanning body linearly with respect to a scanning time. Before the generation of the scanning voltage, the scanning voltage generating unit determines that the scanning displacement amplitude, which has become 0 at a predetermined time, increases with time, and the scanning displacement amplitude of the scanning body scanned by applying the another scanning voltage. 3. The scanner device according to claim 1, wherein a scanning voltage is generated such that the scanning voltage becomes equal to a predetermined time.