JP2002350120A - Method for measuring thickness by x-ray and x-ray thickness measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate and simplify measuring a thickness of an object to be measured by measuring the thickness of the object from a predetermined expression on the basis of a transmission amount of X-rays of the object. SOLUTION: An X-ray thickness measuring apparatus is provided with a measurement parameter setting part 10 for setting measurement parameters, an X-ray detecting part 4 for detecting transmission X-rays which pass the object W to be measured, a data processing part for deriving transmission data y, a transmission X-ray amount calculating part for calculating the transmission X-ray amount from the transmission data, and a thickness calculating part for calculating the thickness x of the object W on the basis of the measurement parameters and the transmission X-ray amount. X-rays are irradiated from an X-ray generating part 3 to the object W present between the X-ray generating part 3 and the X-ray detecting part 4, and the transmission X-rays passing the exposed object W are detected by the X-ray detecting part 4. The thickness of the object W is calculated for each of unit transmission regions on the basis of the detected transmission X-ray amount from the predetermined expression.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to raw meat, fish,
The present invention relates to a thickness measuring method and a thickness measuring device for measuring the thickness of an object to be measured of each type such as processed foods and pharmaceuticals, and in particular, the amount of X-ray transmission when the object is irradiated with X-rays The present invention relates to a thickness measuring method and a thickness measuring device for measuring the thickness of an object to be measured from a device.

[0002]

2. Description of the Related Art Conventionally, there is known an X-ray foreign substance detecting apparatus for detecting foreign substances in an object to be measured of each type, such as raw meat, fish, processed food, and medicine. The X-ray foreign matter detection device emits X-rays from an X-ray generator to an object to be measured, and detects whether or not foreign matter is contained in the object from an X-ray transmission image transmitted through the object to be measured. I do.

In addition, as disclosed in Japanese Patent Application Laid-Open No. 9-113631,
There is an X-ray foreign matter detection device that simultaneously detects the thickness of the object to be measured as well as the foreign matter detection. This foreign matter detection device has a thickness measuring device for measuring the thickness of an inspection object near a carry-in conveyor in a box. After the thickness of the inspection object is measured by the thickness measurement device, the inspection object is transported between the X-ray irradiator and the X-ray detector, and the foreign object is detected.

However, in this foreign matter detection device, a thickness measuring device must be separately provided in the box in addition to the X-ray irradiator and the X-ray detector. Maintenance must be done independently, which imposes a heavy burden on the user.

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a method for measuring the amount of X-rays transmitted through an object to be measured. By calculating the thickness of the object to be measured from the following formula, the thickness of the object to be measured can be easily and simply measured. In particular, the thickness of the device to be measured is measured by software processing without providing a device for measuring the thickness of the device to be measured, thereby achieving space saving or miniaturization of the entire device. In addition, this eliminates the need for a thickness measuring device, and aims to prevent an increase in cost.

Another object of the present invention is to derive the measurement parameters for each object to be measured, thereby facilitating the setting of the measurement parameters, thereby facilitating further measurement of the thickness of the object to be measured. Another object is to simplify the operation.

Still another object of the present invention is to improve the accuracy of inspection for missing parts of an object to be measured by combining foreign matter detection by X-rays. The object of the present invention is to simultaneously execute the thickness measurement of the object W and the foreign matter detection. Accordingly, the object of the present invention is to shorten or speed up the processing time for detecting a foreign substance and measuring the thickness of the same object. In particular, the object of the present invention is to further reduce or speed up the processing time by performing a foreign substance detection process before measuring the thickness and determining whether or not there is a thickness measurement based on the detection result.

[0008]

Next, means for solving the above problems will be described with reference to the drawings corresponding to the embodiments. The thickness measuring method using X-rays according to claim 1, wherein the object to be measured W between the X-ray generating unit 3 and the X-ray detecting unit 4 is provided with the X-ray
X-rays are emitted from the X-ray generation unit, and the transmitted X-rays transmitted through the object to be measured are detected by the X-ray detection unit, and based on the detected transmitted X-ray amount I, the X-ray is irradiated. The thickness x of the measured object is calculated from the following equation.

(Equation 3) However, the density of I ₀ is exposure X-ray dose, I is transmitted X-ray dose, mu _m is the mass absorption coefficient, [rho is the object to be measured

According to a second aspect of the present invention, there is provided a method for measuring a thickness by X-rays, wherein the X-ray exposure is performed on the object to be measured. The object to be measured is selected, its constituent elements are extracted, and the mass absorption coefficient is derived based on the set exposure X-ray dose and the extracted constituent elements.

According to a third aspect of the present invention, there is provided a method for measuring a thickness by an X-ray according to the first or second aspect.
The object to be measured is composed of a plurality of types of the composition elements, sets the irradiation X-ray dose for irradiating the object to be measured, selects the object to be measured, and sets the plurality of types of the composition. An element is extracted, and a mass absorption coefficient of each composition element is derived and averaged based on the set exposure X-ray dose and the extracted each composition element.

[0011] X-ray thickness measuring apparatus according to claim 4, the measurement parameters consisting of density ρ of exposure X-rays I ₀ and the object to be measured for at least the mass absorption coefficient of the DUT mu _m and the object to be measured A measurement parameter setting unit 10 to be set;
An X-ray generation unit 3 that irradiates the object under test with X-rays of the set exposure X-ray amount; and an X-ray detection unit that detects transmitted X-rays transmitted through the object under test. 4, and the transmission data y based on the transmission X-rays obtained from the X-ray detection unit.
And a transmission X from the transmission data
A transmission X-ray calculation unit that calculates a dose I; and a thickness calculation unit that calculates a thickness x of the DUT based on the set measurement parameters and the transmission X-ray dose. And

According to a fifth aspect of the present invention, there is provided an X-ray thickness measuring apparatus.
In the X-ray thickness measuring apparatus according to the aspect, the thickness calculating unit includes:
The thickness of the object to be measured is calculated by the following equation.

(Equation 4) However, the density of I ₀ is exposure X-ray dose, I is transmitted X-rays, x is the measured object thickness, mu _m is the mass absorption coefficient, [rho is the object to be measured

[0013] The X-ray thickness measuring apparatus according to the sixth aspect is the fourth aspect.
6. The X-ray thickness measuring apparatus according to claim 5, further comprising a foreign substance detection unit configured to detect a foreign substance in the measured object from the transmission data.

According to a seventh aspect of the present invention, there is provided an X-ray thickness measuring apparatus according to the sixth aspect.
In the X-ray thickness measuring apparatus according to the aspect, the thickness calculating unit includes:
The thickness of the object is calculated only when the foreign object is not detected in the object by the foreign object detector.

[0015] The X-ray thickness measuring apparatus according to the eighth aspect is the fourth aspect.
In the X-ray thickness measuring apparatus according to any one of to 7, the object parameter storage unit 12 in which a plurality of types of constituent elements constituting the object are associated with each of the objects,
An X-ray wavelength corresponding to the exposure X-ray dose to the object, and a mass absorption coefficient storage unit 13 in which the mass absorption coefficient based on each of the constituent elements of the object is stored, The parameter setting unit, while calling the corresponding each composition element from the set DUT,
The mass absorption coefficient is derived for each of the corresponding composition elements from the mass absorption coefficient storage unit based on each of the corresponding composition elements and the corresponding X-ray wavelength, and is averaged.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described. FIG. 1 is a perspective view showing the appearance of the X-ray thickness measuring device 1. The X-ray thickness measuring device 1 is provided in a part of the transport line, and detects the thickness x of the workpiece W sequentially transported at a predetermined interval. This X-ray thickness measuring device 1
A transport unit 2, an X-ray generation unit 3 and an X-ray detection unit 4 are provided inside the apparatus main body, and a display unit 5 is located on an upper front surface 1 of the apparatus main body.
a.

The transport unit 2 includes, for example, raw meat, fish, processed food,
It transports the object to be measured W of each kind, such as a medicine, and is constituted by, for example, a belt conveyor horizontally arranged with respect to the apparatus body. The transport unit 2 carries out the object to be measured W loaded from the carry-in port 2a to the carry-out port 2b at a predetermined transfer speed set in advance by driving the drive motor 6.

The X-ray generator 3 detects foreign matter in the transport path of the object W to be transported, and is provided above the belt conveyor 2 at a predetermined height. The X-ray detector 4 is provided inside the belt conveyor 2 so as to face the X-ray generator 3.

The X-ray generating section 3 has a configuration in which a cylindrical X-ray tube 8 provided inside a metal box 7 is immersed in insulating oil (not shown). Is irradiated on the anode target to generate X-rays. The X-ray tube 8 is provided such that its longitudinal direction Y is orthogonal to the transport direction X of the workpiece W. The X-rays generated by the X-ray tube 8 are directed toward the lower X-ray detection unit 4 through a slit (not shown) along the longitudinal direction Y to form a substantially triangular screen and emit the screen.

The X-ray detector 4 detects X-rays transmitted through the object W when the object W is irradiated with the X-rays, and detects the amount of transmitted X-rays. Output an electric signal corresponding to.

Although not shown, the X-ray detector 4 includes a plurality of (for example, several hundreds) linearly arranged in a direction Y orthogonal to the transport direction X of the workpiece W transported on the belt conveyor 2, for example. ), And an array of line sensors including a photodiode and a scintillator provided on the photodiode. In the X-ray detection unit 4 having such a configuration, when X-rays are emitted from the X-ray generation unit 3 to the workpiece W, the transmitted X-rays transmitted through the workpiece W are scintillated. Receive and convert to light. Further, the light converted by the scintillator is received by a photodiode disposed below the scintillator. Each photodiode converts the received light into an electric signal. The electric signal has a level corresponding to the intensity of the received X-ray,
The X-ray detection unit 4 outputs this electric signal to the data processing unit.

FIG. 2 is a schematic block diagram showing the electrical configuration of the X-ray thickness measuring device 1. X-ray thickness measuring device 1
1 includes a measurement parameter setting unit 10, a measurement parameter storage unit 11, a control unit 20 including a CPU 21, various memories 22, 23, and the like, and a display unit 5 for outputting calculation results, in addition to the configuration of FIG. It is schematically configured.

The measurement parameter setting section 10 is constituted by a push button or a touch panel, and sets each parameter used for thickness measurement. The measurement parameter, a constituent element of the workpiece W, by the density [rho, the exposure X-ray dose I _0, the mass absorption coefficient mu _m, X-ray detection unit 4 which irradiates the workpiece W performance of the workpiece W The correction coefficient A and the like.

The measurement parameter storage unit 11 includes an object parameter storage unit 12, a mass absorption coefficient storage unit 13, a correction coefficient storage unit 14, an X-ray wavelength storage unit 15, and a setting parameter memory 16.

As shown in FIG. 3, the object parameter storage unit 12 stores the composition elements and their densities (ρ ₁ , ρ ₂ , ρ ₃ , ρ ₄ ...) are stored in the data table. In addition, when the composition element includes the DUT W composed of a plurality of types, the DUT parameter storage unit 12 as shown in FIG. 4 is used. The composition element subfield is a field in which all element symbols are arranged, and the composition element for each device under test W (A, I, U, D,...) Has a bit in the data item of the composition element symbol. Selected in the information. For example, the measured object W (A) is
It is a substance composed of H and Li.

When an operator selects and inputs an object W to be measured in the measurement parameter setting section 10, the CPU 21
The composition element of the DUT W selected from the DUT parameter storage unit 12 shown in FIG. 3 or FIG.

Although not shown, the X-ray wavelength storage unit 15 stores the exposure X-ray dose I inputted numerically by the measurement parameter setting unit 10.
₀ is a data table corresponding to the X-ray wavelength at that time. When the operator sets an exposure X-ray dose I ₀ numerically input by the measurement parameter setting unit 10, the corresponding X-ray The wavelength is called and stored in the setting parameter memory 16.

Although not shown, the correction coefficient storage unit 14 stores X
This is a data table corresponding to the number of lines of the line sensor constituting the line detection unit 4. When the operator selects and sets the model of the X-ray generation unit 3 provided in the apparatus main body by the measurement parameter setting unit 10, the CPU 21 , The corresponding correction coefficient A is called and stored in the setting parameter memory 16.

As shown in FIG. 5, the mass absorption coefficient storage unit 13 is a data table in which the vertical axis (column) is composed of the constituent elements and the horizontal axis (row) is the X-ray wavelength. This data table 13
Indicates a mass series coefficient table for various substances of X-rays published in a scientific chronological table.

[0030] Data items crossing of each column and each row is stored in advance the mass absorption coefficient mu _m. And CPU
By a command from the 21, setting parameters X-ray wavelength and a constituent element stored in the memory 16 is called, with reference to the data table 13, the row and column directions and there is mass absorption coefficient mu _m crossed extracted Is done. The extracted mass absorption coefficient mu _m is stored in the set parameter memory 16.

The control section 20 is generally constituted by a CPU 21 for controlling the whole apparatus and executing various arithmetic processing, a program storage section 22 composed of a ROM or the like, and a data memory 23 composed of a RAM or the like. This control unit 20
Is functionally composed of a data processing unit, a transmitted X-ray dose calculation unit, and a thickness calculation unit. These are execution programs stored in the program storage unit 22,
It can be executed by the CPU 21.

The data processing section performs a predetermined number of lines (for example, 480 lines) from the X-ray detection section 4 by A / D conversion.
Is transmitted in a unit transmission region (unit area: for example, 1 cm).
² ) is converted into transmission data y (i) (where i =
1,2, ..., n. n is the number of unit areas). Each transmission data y
Have transmission levels and coordinate values of 0 to 255 gradations, and are stored in the data memory 23 via the CPU 21 in units of one device under test W.

The transmitted X-ray dose calculator multiplies each transmitted data y stored in the data memory 23 by the correction coefficient A to calculate a transmitted X-ray dose I for each transmitted data y (i). Each transmitted X-ray dose data I is stored in the data memory 23 via the CPU 21 in units of one DUT W.

The thickness calculating section calculates the thickness of the measured object for each unit transmission area of the measured object. In the calculation, the following equation is used.

[0035]

(Equation 5)

Where I ₀ is the X-ray exposure, I is the transmitted X-ray dose, μ is the X-ray absorption coefficient [1 / cm], ρ is the density of the object to be measured [g / cm ³ ], and x is the object to be measured. It is the thickness of the object [cm].

The X-ray absorption coefficient μ [1 / cm] changes when the density ρ [g / cm ³ ] differs even for the same substance. Therefore, the X-ray absorption coefficient μ [1 / cm] is changed to the density ρ [g / c
m ³ ] divided by the mass absorption coefficient μ _m (μm = μ / ρ) [cm
² / g]. Therefore, the above equation (1) becomes as follows.

[0038]

(Equation 6)

Here, since the transmitted X-ray dose I is the product y (i) A of the transmission data y (i) of each unit transmission area obtained from the X-ray generation unit 3 and the correction coefficient A, the above-mentioned (2) The expression is as follows.

[0040]

(Equation 7)

When the equation (3) is modified with respect to the thickness x, the following equation is obtained.

[0042]

(Equation 8)

The display unit 5 is composed of a display or the like.
The calculation result in the control unit 20 is displayed so as to be visible.

Next, the operation of the present embodiment will be described. As shown in the flowchart of FIG.
T100), input processing (ST200), measurement processing (ST
300), arithmetic processing (ST400), output processing (ST5)
00).

The initial setting (ST100) will be described. As shown in the flow of FIG. 7, when the operator presses the model selection button of the X-ray detection unit 4 in the measurement parameter setting unit 10, the model name is displayed on the display screen of the measurement parameter setting unit 10. Select the installed model (ST10
1) In response to a command from the CPU 21, the corresponding correction coefficient A is called (ST102) and stored in the setting parameter memory 16 (ST103).

Next, the process proceeds to an input process (ST200). In the input process, as shown in the flow of FIG. 8, the operator operates the measurement parameter setting unit 10 to
The exposure amount of X-rays I ₀ is set to numeric input to exposure to (S
T201). When the exposure X-ray dose I ₀ for exposure is set, C
In response to a command from the PU 21, the corresponding X-ray wavelength is called from the X-ray wavelength storage unit 15 (ST202).

Next, the operator sets the measurement parameter setting unit 1
When the DUT selection button is pressed at 0, the DUT name is displayed on the display screen of the measurement parameter setting unit 10. When an object W to be measured is selected and determined from these, the composition element and the density ρ of the selected object W are stored in the object parameter storage unit 12 shown in FIG. It is called (ST203). Then, by referring to the data table of the mass absorption coefficient storage unit 13, the mass absorption coefficient mu _m the composition element X-ray wavelength intersect is extracted (ST 204). The set measurement parameters (mass absorption coefficient μ _m , density ρ of DUT W) are stored in set parameter memory 16 (ST205).

Next, the process proceeds to a measurement process (ST300). As shown in FIG. 9, when the operator presses the measurement start button (ST301), the conveyor 2 operates, and the DUT W is transported between the X-ray generation unit 3 and the X-ray detection unit 4. Come. Then, in response to a command from the CPU 21, X
From line generator 3, X-ray of the exposure X-rays I ₀ set is exposure (ST 302).

The object to be measured W passes through a substantially triangular screen formed by exposure X-rays. The emitted X-rays pass through the object to be measured W that passes immediately below the X-ray generation unit 3. The transmitted X-ray is detected by the X-ray detector 4 as an electric signal (ST3).
03). The detected electric signal is converted by the data processing unit into transmission data y for each unit transmission area (ST3).
04).

Next, the processing shifts to the arithmetic processing (ST400). In the arithmetic processing, the thickness of each transmission region of the measured object is calculated based on the above equation (4). The calculation result is displayed on the display unit 5 (ST500). In FIG.
The image of the height x of the device under test W developed on the display unit 5 is shown. FIG. 2B is a cross-sectional view taken along line AA of FIG.

Next, a second embodiment of the present invention will be described. In the present embodiment, the control unit 20 further functionally includes a thickness determination unit that determines whether the measured thickness x of the unit transmission region of the device under test W is within a predetermined range. Configuration.

In the thickness determining section, an upper threshold value, a lower threshold value, or both an upper threshold value and a lower threshold value of the thickness x of the workpiece W are set. If an upper threshold is set,
The effective range is less than the upper threshold. When the lower threshold is set, the effective range is equal to or higher than the lower threshold. When both the upper threshold and the lower threshold are set, the effective range is from the lower threshold to the upper threshold.

In addition, the thickness determination section determines whether or not
That is, the upper limit threshold of the number of thickness data x determined to be out of the specified thickness is set. Thereby, it is determined whether the measured object W is out of the specified thickness.

Next, the operation of this example will be described with reference to the flowchart shown in FIG. The process from the initial setting (ST100) to the calculation process (ST400) is the same as that of the third embodiment, and thus the description is omitted. As shown in FIG. 11, the arithmetic processing (S
At T400), thickness data x is calculated for each unit transmission region, and then thickness determination is performed for each thickness data x. In the thickness determination, as shown in FIG.
The thickness data x out of the effective range of the thickness is counted. (ST501).

When it is determined that the count value is smaller than the set value (the upper limit threshold of the number of thickness data x) (ST50)
2-NO), the DUT W is determined to be non-defective. (ST5
02). When it is determined that the count value is equal to or greater than the set value (ST502-YES), it is determined that there is a portion protruding from the measured object W beyond the set value, and the product is determined to be out of stock, and NG processing is performed (ST503).

In this embodiment, since the thickness is determined based on the transmission data obtained from the X-rays, the quality of the measured object is determined based on the thickness of the measured object without providing a separate thickness determining device. Sorting becomes possible.

In the above-described embodiment, the input processing (ST200) has been described using the DUT parameter storage unit 12 shown in FIG. 3. However, in the case of the DUT parameter storage unit 12 shown in FIG. As shown in FIG. 13, after the X-ray wavelength is set (ST202), when the operator selects the DUT with the measurement parameter setting unit 10, C
The PU 21 stores the DUT parameter storage unit 12 shown in FIG.
, A plurality of composition elements and their densities are extracted (ST213). Then, reading the X-ray wavelength, for each composition element extracted, with reference to the mass absorption coefficient storage unit 13, extracts the mass absorption coefficient mu _m (ST21
4). Then, averaging the mass absorption coefficient mu _m for each extracted composition elements. Similarly, the extracted densities are averaged (ST215). Then, in the measurement parameter memory,
Irradiation X-ray dose I _0, averaged mass absorption coefficient mu _m and stores the averaged density ρ (ST216).

As a result, even in the object W composed of a plurality of composition elements, the optimum mass absorption coefficient μ for the object W is obtained.
_m can be calculated, and the accuracy of the thickness measurement of the measured object W is improved.

The DUT parameter storage unit 12 shown in FIG.
I decided to memorize a plurality of constituent elements,
As in the data table of the DUT parameter storage unit 12 shown in FIG. 14, weights corresponding to the amounts of the constituent elements constituting each DUT W are further given by bit information,
The weight average of the mass absorption coefficient mu _m may be calculated in ST215.

Thus, even if the amount of each of the constituent elements of the DUT composed of a plurality of constituent elements is different, weighting is performed in advance to further optimize the mass of the DUT. it is possible to calculate the absorption coefficient mu _m,
The accuracy of the thickness measurement of the workpiece W is further improved.

Next, a third embodiment of the present invention will be described. In the present embodiment, the control unit 20 of the above-described first and second embodiments functionally includes a foreign object detection unit that detects the presence or absence of a foreign object in the measured object W (including the surface). Configuration. The foreign matter detection unit has a predetermined transmission threshold value set, and compares the transmission data y with the transmission threshold value R to perform inspection processing of foreign matter mixed into the workpiece W.

Next, the operation of this embodiment will be described. FIG. 15 shows a foreign object detection process (S
T700). FIG. 16 is a flowchart in which a foreign object detection process (ST700) is added to the second embodiment. As shown in the flow of FIG. 15 and FIG.
This foreign matter detection processing (ST700) is performed in the measurement processing (ST3).
00) and the arithmetic processing (ST400).

This foreign matter detection processing (ST700) is the same as that shown in FIG.
As shown in the flow of FIG. 7, based on the transmission data y corresponding to the transmission level of the X-ray transmitted through the object W, foreign matter such as metal, glass, stone, and bone is mixed into the object W. It is determined whether or not there is (ST701). If the transmission data y is equal to or larger than the transmission threshold value R (ST702-YES), it is determined that foreign matter has entered, and NG processing is performed (ST703).
That is, a selection signal indicating that the device under test W is defective is output to the outside, and image data obtained by directly developing the input data into an image is output to the display unit 5 via an image processing unit (not shown). When the transmission level of the transmission data y based on the transmitted X-ray dose I is abnormally low, that is, when the transmission level is lower than the transmission threshold value R (ST702-NO), it is determined that there is no foreign substance, and the process proceeds to the arithmetic processing (ST400).

In this embodiment, the provision of the foreign matter detection section allows the foreign matter detection and the thickness measurement to be executed simultaneously based on the same transmission data y. Also, according to the result of the foreign object detection, the thickness calculation process (ST400) is performed only when it is determined that there is no foreign object, and the thickness measurement of the object W that is determined to have the foreign object is not performed.
Is improved.

[0065]

As described above, in the X-ray thickness measuring apparatus according to the present invention, the thickness of the object to be measured is calculated from a predetermined formula based on the amount of X-ray transmission of the object to be measured. It is possible to easily and easily measure the thickness of an object. In particular, by performing thickness measurement by software processing without providing a thickness measurement device for the object to be measured, it is possible to achieve space saving or miniaturization of the entire apparatus. In addition, this eliminates the need for a thickness measuring device, and can prevent an increase in cost.

Further, by deriving the measurement parameters for each object to be measured, the setting of the measurement parameters can be facilitated. This also makes it possible to easily and easily measure the thickness of the object to be measured.

Further, by combining the foreign matter detection by X-rays, it is possible to improve the accuracy of the inspection for the missing parts of the measured object. Further, it is possible to simultaneously execute the thickness measurement and the thickness measurement of the object W based on the transmitted X-ray dose of the same object W. As a result, it is possible to shorten or speed up the processing time for detecting a foreign substance and measuring the thickness of the same object. In particular, by performing foreign matter detection processing before thickness measurement and determining the presence or absence of thickness measurement based on the detection result, it is possible to further shorten or speed up the processing time.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an external appearance of an X-ray foreign matter detection device according to the present invention.

FIG. 2 is a block diagram showing an electrical configuration of the X-ray foreign matter detection device according to the present invention.

FIG. 3 is a diagram showing an example of an object parameter storage unit of the X-ray foreign matter detection device according to the present invention.

FIG. 4 is a diagram showing another example of the measured object parameter storage section of the X-ray foreign matter detection device according to the present invention.

FIG. 5 is a diagram showing a mass absorption coefficient storage unit of the X-ray foreign matter detection device according to the present invention.

FIG. 6 is an overall processing flowchart of a first embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 7 is a flowchart of an initial setting of the first embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 8 is a flowchart of input processing of the first embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 9 is a flowchart of a measurement process of the first embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 10 is a diagram illustrating an example in which the height of an object to be measured is displayed on a display unit.

FIG. 11 is an overall processing flowchart of a second embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 12 is a flowchart of a determination process of the X-ray foreign matter detection device according to the second embodiment of the present invention.

FIG. 13 is a flowchart of the input processing of the second embodiment of the X-ray foreign matter detection device according to the present invention.

FIG. 14 is a diagram showing another example of the measured object parameter storage unit of the X-ray foreign matter detection device according to the present invention.

FIG. 15 is an overall processing flowchart of a third embodiment of the X-ray foreign matter detection device according to the present invention (corresponding to the first embodiment).

FIG. 16 is an overall processing flowchart of a third embodiment of the X-ray foreign matter detection device according to the present invention (corresponding to the second embodiment).

FIG. 17 is a flowchart of a foreign object detection process of the X-ray foreign object detection device according to the third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... X-ray thickness measuring device, 3 ... X-ray generation part, 4 ... X-ray detection part 10 ... Measurement parameter setting part, 12 ... Measurement object parameter storage part 13 ... Mass absorption coefficient storage part W ... Measurement object, I ₀ : X-ray exposure, I: X-ray transmission x: Thickness of the object, μ _m : Mass absorption coefficient, ρ: Density of the object y: Transmission data

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F067 AA27 CC00 EE10 HH04 JJ03 LL03 NN02 RR12 RR24 RR29 TT06 2G001 AA01 BA11 CA01 EA08 GA01 HA01 HA13 JA13 KA03 KA11 LA11 PA11

Claims (8)

[Claims] 1. An object to be measured (W) between an X-ray generator (3) and an X-ray detector (4) is irradiated with X-rays from the X-ray generator. The transmitted X-ray transmitted through the object is detected by the X-ray detector, and the thickness (x) of the object is calculated from the following equation based on the detected transmitted X-ray amount (I). A thickness measuring method using X-rays. (Equation 1) However, the density of I ₀ is exposure X-ray dose, I is transmitted X-ray dose, mu _m is the mass absorption coefficient, [rho is the object to be measured 2. The irradiation X for irradiating the object to be measured.
Setting a dose, selecting the object to be measured, extracting its constituent elements, and deriving the mass absorption coefficient based on the set exposure X-ray dose and the extracted constituent elements. 2. The method according to claim 1, wherein the thickness is measured by X-rays. 3. The object to be measured is composed of a plurality of types of the composition elements. The irradiation X-ray dose for irradiating the object to be measured is set, and the object to be measured is selected. Extracting the plurality of types of constituent elements, deriving and averaging mass absorption coefficients for each of the constituent elements based on the set exposure X-ray dose and the extracted each of the constituent elements. X according to claim 2
A thickness measurement method using a line. 4. At least the mass absorption coefficient (μ
_m ) and a measurement parameter setting unit (10) for setting measurement parameters including an exposure X-ray dose (I ₀ ) to the object to be measured and a density (ρ) of the object to be measured. An X-ray generation unit (3) that emits X-rays of a set exposure X-ray dose, an X-ray detection unit (4) that detects transmitted X-rays transmitted through the object to be measured, A data processing unit that derives transmission data (y) based on the transmission X-ray obtained from the X-ray detection unit; and a transmission X that calculates a transmission X-ray dose (I) from the transmission data.
An X-ray thickness, comprising: a dose calculation unit; and a thickness calculation unit that calculates a thickness (x) of the measured object based on the set measurement parameters and the transmitted X-ray dose. Measuring device. 5. The apparatus according to claim 4, wherein the thickness calculating section calculates the thickness of the device under test by the following equation.
An X-ray thickness measuring apparatus as described in the above. (Equation 2) However, the density of I ₀ is exposure X-ray dose, I is transmitted X-rays, x is the measured object thickness, mu _m is the mass absorption coefficient, [rho is the object to be measured 6. The X-ray thickness measuring apparatus according to claim 4, further comprising a foreign substance detection unit that detects a foreign substance in the object to be measured from the transmission data. 7. The apparatus according to claim 6, wherein the thickness calculating section calculates the thickness of the measured object only when the foreign matter is not detected in the measured object by the foreign matter detecting section. X-ray thickness measuring device. 8. An object parameter storage section (12) in which a plurality of types of constituent elements constituting the object are associated with each of the objects, and an exposure X-ray dose corresponding to the object. A mass absorption coefficient storage unit (13) in which the mass absorption coefficient based on the X-ray wavelength and each constituent element of the measured object is stored;
And the parameter setting unit calls the corresponding respective constituent elements from the set DUT, and based on the corresponding respective constituent elements and the corresponding X-ray wavelength, the mass absorption coefficient The X-ray thickness measuring apparatus according to any one of claims 4 to 8, wherein the mass absorption coefficient is derived for each of the corresponding composition elements from a storage unit and averaged.