JP2002345141A - Flat turning gear and wiring mechanism thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent entwining of a cable or tube, connected to a turning portion and production of discontinuous resistance during turning for accurate movement and positioning when power or air is supplied to an accurate turning and moving body. SOLUTION: A flat turning gear is provided with a support belt, which couples together a turning portion and a fixed portion, so that the support belt is bent in a loop between an arc-shaped guide and two guides formed on the turning portion and the fixed portion, respectively. A cable or the like is held on the support belt. Thus, when the turning portion is turned, the support belt moves smoothly along the guides. Therefore, accurate movement and positioning can be made.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plane rotating device used for a precision machine tool, a precision measuring machine, and a semiconductor exposure apparatus, and more particularly to a cable for improving the moving accuracy, positioning accuracy and cleanliness of the above-mentioned plane rotating device. The present invention relates to a wiring mechanism having a support member.

[0002]

2. Description of the Related Art Cable guides of linear moving mechanisms are widely used in fields such as output devices of computers and OA equipment, robots, machine tools, and the like. At present, pressure cannot be supplied by radio or the like, and it is necessary to rely on cables and tubes. However, the cables and tubes are entangled by the movement, and abrasion and disconnection are caused by friction and expansion and contraction. In response to this, for example, in the case of a machine tool, a cable connecting a plurality of links and supporting the cable with a certain curvature, such as a cable bearer (trade name), is used.

[0003] Further, there is a commercially available one in which a link is connected and a pin serving as a movable part is replaced with an elastic body to suppress dust and noise.

On the other hand, in a precision machine tool, a precision measuring machine, and a semiconductor exposure apparatus, it is necessary to move and position a workpiece such as a processing tool, a measuring probe, a substrate, and an optical element with high precision. Required. For this purpose, a static pressure guide device having almost no friction is used as a moving positioning device for mounting the tools, the workpiece, and the workpiece.

The static pressure guide device has a pair of opposing surfaces which move relatively to each other, for example, a movable body which is a mounting table for an object to be measured and an opposing surface of the guide guide by interposing a pressurized fluid therebetween. So that the surfaces are kept out of contact with each other,
It uses a hydrostatic bearing device and realizes highly accurate movement with a small resistance. Since the static pressure guide device has no sliding surface, there is little generation of dust and can be used in a clean room or the like.

[0006]

However, in the above cable carrier, the weight of the cable carrier itself is heavy and discontinuous resistance and vibration occur due to the connection of the link, so that the cable carrier cannot be precisely moved or moved as in a semiconductor manufacturing apparatus. It is not suitable for measuring equipment or processing equipment that requires positioning.
In particular, in order to cope with the rotation, in addition to the increase in friction due to its own weight, the rotation of the link, which originally bent only in one direction to support the cable, has to be increased to follow the cable bear along the outer circumference of the rotating body. By doing so, casters, guide rollers, and the like are added to cause the cable bearer to run stably, resulting in a large resistance. Therefore, the output required for the drive mechanism is large and large, and it is difficult to realize the accuracy required for the above-described device.

On the other hand, as shown in Japanese Patent Application Laid-Open No. 9-148031, a flexible cable is used, and the cable is three-dimensionally arranged with respect to the rotating body mechanism. However, space is required in the height direction. Not only that, a large space was needed, such as the need for a cover that covers the whole.

[0008] Japanese Patent Publication No. 60-47815,
In Japanese Patent Application Publication No. 0-238299 and the like, there is a problem that a large resistance is generated by providing a guide frame or a guide cart on a cable carrier.

[0009]

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention makes the support member an integral elastic body, prevents slippage between the guide and the support member, and enables compact and stable movement with a light load. It is characterized by the following. In particular, the cable guide is characterized in that it can handle not only rotational movement but also parallel movement.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 is a top view of a wiring mechanism of a plane rotating device according to a first embodiment of the present invention, FIG. 2 is a partially enlarged view thereof, and FIG. FIG.
FIG. 4 is a top view of the state in which the movable portion of FIG. 1 is rotated by 360 degrees.

A housing 1001 is supplied with air from an air supply source (not shown) through a tube (not shown), and a rotor 100 is provided through internal piping and a throttle (not shown) in the housing 1001.
2. Air is blown to the surface opposing the thrust plates 1003 and 1004, and the rotating plate 1011 is rotated by the thrust plate 1003 which is the rotating part of the static pressure gas bearing that supports the rotor 1002 and the thrust plates 1003 and 1004 in a non-contact manner. A ring 1012 is fixed, and a measuring instrument 1014 is fixed to the rotating ring 1012 via a flange 1013.

A stainless steel support belt 101a, b serving as a wiring guide is fixed to the rotating ring 1012 so as to be sandwiched between the blocks 102a, b. The cover 1016 is bent in a loop shape and supported by a fixed plate 1015. Along with the fixed block 1017a, b also supported by the fixed plate 1015
It is fixed so as to be sandwiched between a and b.

Outer peripheral surface of rotating ring 1012 and cover 1
016 serves as a guide for the support belts 101a and 101b, and a portion of the side surface of the rotary ring 1012 where the support belts 10la and 10b are in contact has a friction coefficient of 0.8 to 0.8.
The polyurethane bush 104 of 2.2 is attached to prevent slippage of the support belt and the ring.

After the lead wire 1014a of the measuring instrument 1014 is once fixed to the rotating ring 1012 by the cable clamp 1018, it is appropriately fixed to the support belt 101a by the binding band 102, and fixed to the fixed block 103a by the cable clamp 1019. It is connected to the outside. The upper surface 1011a of the rotating plate 1011 and the fixed plate 1015 where friction with the support belt is expected.
A resin plate 1020, 1021 such as tetrafluoroethylene resin (Teflon (registered trademark)) is stuck or applied to the upper surface 1015a of the support belt. Tape 1
022 is applied to reduce friction.

A housing 1001 of the hydrostatic bearing is fixed to a base 1023 via a motor housing 1005, and a fixing ring 1015 is fixed to the base 1023 via a support member 1024 such as a pillar.

A motor rotor 1006 and an encoder disk 1009 are attached to the thrust plate 1004. The rotating body is driven by a motor coil 1007 fixed to a motor flange 1008, and the position is detected by an encoder detection head 1010. .

The rotating plate 1011 is driven by the driving mechanism.
Is rotated in the direction of the arrow, the lead wire of the measuring instrument 1014 moves together with the support belt 101a. As the support belt 101a rotates, the support belt 101a separates from the cover 1016, which is the outer guide, and comes into contact with the polyurethane bush 104 on the inner surface of the rotating ring 1012, and winds around without slipping. On the other hand, the belt 101b is a rotating ring 1
012 and comes into contact with the cover 1016 and rotates 360 degrees to reach the state shown in FIG.

Since the lead wire 1014a moves together with the belt 101a, the lead wire 1014a can rotate without entanglement and with a small resistance.

Incidentally, when the friction between the support belt 101b and the rotating ring 1012 is very small and slippage occurs, as shown in FIG. 15, the belt 101b separates from the rotating ring and the other belt 101a (or the lead wire). 1014a or the cover 1016), which causes resistance during rotation, and in some cases, leads to troubles in which the lead wires are entangled or caught.

Although two stainless steel belts are used for the description, one stainless steel belt may be used, and it is needless to say that a plurality of lead wires from a measuring instrument can be used. Further, the rotation angle in the present embodiment exceeds 360 degrees and can be up to about 370 to 380 degrees.

(Second Embodiment) FIG. 5 shows an upper half of a plan view when a toothed support belt according to a second embodiment of the present invention is used, and FIG. 6 is a partially enlarged view of FIG. FIG. 7 shows a longitudinal sectional view. FIG. 9 is an upper half of a plan view of the state in which the movable portion of FIG. 5 is rotated by 360 degrees.

Except for the support belt portion and the rotating ring portion, the configuration is the same as that of the first embodiment. For simplicity, only one support belt will be described.

A toothed support belt 201 serving as a wiring guide is fixed to the rotating ring 212 so as to be sandwiched between the blocks 202. The toothed support belt 201 is bent in a loop shape and supported by a fixed plate 1015. It is fixed to a fixing block (not shown) which is also supported by a fixing plate 1015 along 1016, as in the first embodiment.

The outer peripheral surface of the rotary ring 212 is in the form of a toothed pulley that meshes with the toothed support belt 201 to prevent the belt from slipping on the rotary ring. The inner peripheral surface of the cover 1016 serves as a guide for the toothed belt 201 as in the first embodiment.

The state in which the lead wires of the measuring instrument are connected to the outside is also the same as in the first embodiment, and will not be described.

The rotating ring 212 is moved in the direction of the arrow in FIG.
Even if rotated by 60 degrees, as shown in FIG.
Since 01 does not slide on the rotating ring 212, high-precision rotation is possible as in the first embodiment.

It should be noted that there is no problem even if the inner periphery of the cover 1016 is toothed similarly to the rotating ring 212.

(Third Embodiment) FIG. 9 shows an upper half of a top view when a perforated support belt according to a third embodiment of the present invention is used, and FIG. 10 is a partially enlarged view of FIG. FIG.
Shows a longitudinal sectional view. FIG. 12 is an upper half of a plan view of the state in which the movable unit in FIG. 9 is rotated by 360 degrees.

Except for the belt portion and the rotating ring portion, the second embodiment is the same as the first embodiment, and the description is omitted. For simplicity, only one belt will be described.

A perforated support belt 301 serving as a wiring guide is fixed to the rotating ring 312 so as to be sandwiched between the blocks 302. The perforated support belt 301 is bent in a loop and supported by the fixed plate 1015. It is the same as that of the first embodiment fixed to a fixing block (not shown) which is also supported by a fixing plate 1015 along the cover 1016.

A protrusion 312a that meshes with the perforated belt 301 is attached to the outer peripheral surface of the rotating ring 312, and meshes with the hole 301a formed in the belt to prevent the belt from sliding on the rotating ring. . Cover 1
In the same manner as in the first embodiment, the inner peripheral surface 016 also serves as a guide for the perforated belt 301.

The state in which the lead wires of the measuring instrument 1014 are connected to the outside is also the same as in the first embodiment, and will not be described.

The rotating ring 312 is moved in the direction of the arrow in FIG.
Even if it is rotated by 60 degrees, the perforated belt 301 is not
Since it does not slip with respect to FIG. 12, it becomes as shown in FIG. 12, and high-precision rotation is possible as in the first embodiment.

It should be noted that there is no problem as in the second embodiment, even if the same projection as the rotation ring has on the inner periphery of the cover 1016.

(Fourth Embodiment) FIG. 13 is a top view of a rotary and rectilinear moving mechanism according to a fourth embodiment of the present invention.
4 shows a longitudinal sectional view.

The housing 2001, the rotor 2002,
A rotating plate 2011 and a rotating ring 2012 are fixed to a rotating portion of a hydrostatic bearing composed of thrust plates 2003 and 2004. Since a measuring instrument is fixed to the rotating ring 2012 via a flange as in the first embodiment, it is omitted in this drawing.

A rubber belt 401 is attached to the rotating ring 2012.
a and b are fixed so as to be sandwiched between the blocks 402a and b, and the rubber belts 401a and b are bent in a loop shape and the cover 201 supported by the fixing plate 2015.
Along block 6, it is fixed to fixing blocks 2017 a and b similarly supported by a fixing plate 2015 so as to be sandwiched between the blocks 403 a and 403 b.

The outer peripheral surface of the rotating ring 2012 and the cover 20
The inner peripheral surface of the rubber belt 401 serves as a guide for the rubber belts 401a and 401b. Since the friction coefficient of the rubber belt is large at the portion where the rotating belt 2012 and the rubber belt 401a and 401b of the cover 2016 are in contact, slippage between the belt and the ring is prevented. . In this embodiment, the width of the rubber belts 401a and 401b is increased to increase the rigidity in the direction of gravity, thereby eliminating the belt support portion of the rotating plate 2011 and eliminating the contact between the rubber belts 401a and 401b and the fixed plate 2015. To prevent the generation of dust.

After the lead wire of the measuring instrument is once fixed to the rotating ring 2012 by the cable clamp, the rubber belt 4
Since it is the same as that of the first embodiment, it is fixed to the fixing block 01a by a binding band, fixed to the fixing block 403a by a cable clamp, and connected to the outside.

The housing 2001 of the hydrostatic bearing is fixed to the slider 2021 via the motor housing 2005, and the fixing ring 2015 is attached to a support member 2020 such as a pillar.
Are fixed to the guide blocks 2022a and 2022 via the.

A motor rotor 2006 and an encoder disk 2009 are attached to the thrust plate 2004. The rotating body is driven by a motor coil 2007 fixed to a motor flange 2008, and the position is detected by an encoder detection head 2010. This is the same as in the first embodiment.

The slider 2021 is levitated by static pressure pads 2024a and 2024b fixed to the base 2025. The slider 2021 is pre-pressed by a magnet (not shown) against the floating force, and maintains a certain gap in the vertical direction. It is supported without contact. The guide block 2022a, b fixed to the base 2025 on the side surface
23a and 23b are arranged, and are restrained so as to be movable only in one direction by being sandwiched therebetween. The driving means may be a ball screw, a linear motor, or the like, but is not limited, and is omitted in the drawing.

The rotating plate 20 is rotated by the rotation driving mechanism.
The operation when the rotating member 11 is rotated is the same as that in the first embodiment. However, in this embodiment, the slider 2021 equipped with the rotating body can move perpendicularly to the plane of FIG. At that time, the belts 401a and 401b are deformed from the state shown by the two-dot chain line in FIG.

Although two support belts are used for the description, one support belt may be used, and it is needless to say that a plurality of lead wires from a measuring instrument can be used, as in the first embodiment.

The rubber belt may include a core wire or the like for reinforcement.

In this embodiment, the slider can move in only one direction, but may move in two directions of X-Y.

As described above, gas bearings having various throttles are used for the static pressure rotary bearings and the static pressure sliders in the above-described embodiments, and detailed description thereof is omitted. It is fastened by bolts or the like not shown.

In the above-described embodiment, the rotation angle is described as 360 degrees. However, it is needless to say that the rotation angle can be further limited. In this case, the belt is used depending on the situation, such as shortening the length of the belt. It is possible.

[0049]

As described above, according to the present invention,
Even when there is a rotation of a large rotation angle exceeding 360 degrees from a minute angle, wiring piping to the rotating body can be performed.
In particular, the link can be made more compact than using it, and the resistance during driving can be greatly reduced, so high-precision positioning can be realized, and not only rotation but also parallel movement can be tolerated. It is. Further, generation of dust can be prevented, so that it can be used in a wider range of fields such as a semiconductor manufacturing apparatus, a processing machine, and a measuring instrument.

[Brief description of the drawings]

FIG. 1 is a plan view of a wiring mechanism of a plane rotating device according to a first embodiment of the present invention.

FIG. 2 is a partial enlarged view of a plan view of a wiring mechanism of the plane rotating device according to the first embodiment of the present invention.

FIG. 3 is a longitudinal sectional view of a wiring mechanism of the plane rotating device according to the first embodiment of the present invention.

FIG. 4 is a plan view when the wiring mechanism of the plane rotating device according to the first embodiment of the present invention is rotated by 360 degrees;

FIG. 5 is a plan view of a wiring mechanism of a plane rotating device according to a second embodiment of the present invention.

FIG. 6 is a partially enlarged view of a plan view of a wiring mechanism of a plane rotating device according to a second embodiment of the present invention.

FIG. 7 is a longitudinal sectional view of a wiring mechanism of a plane rotating device according to a second embodiment of the present invention.

FIG. 8 is a plan view when the wiring mechanism of the plane rotating device according to the second embodiment of the present invention is rotated by 360 degrees.

FIG. 9 is a plan view of a wiring mechanism of a plane rotating device according to a third embodiment of the present invention.

FIG. 10 is a partially enlarged view of a plan view of a wiring mechanism of a plane rotating device according to a third embodiment of the present invention.

FIG. 11 is a longitudinal sectional view of a wiring mechanism of a plane rotating device according to a third embodiment of the present invention.

FIG. 12 is a plan view when the wiring mechanism of the plane rotating device according to the third embodiment of the present invention is rotated by 360 degrees.

FIG. 13 is a plan view of a wiring mechanism of a plane rotating device according to a fourth embodiment of the present invention.

FIG. 14 is a longitudinal sectional view of a wiring mechanism of a plane rotating device according to a fourth embodiment of the present invention.

FIG. 15 is a plan view when the wiring mechanism of the plane rotating device according to the first embodiment of the present invention is rotated by 360 degrees.

[Explanation of symbols]

 101 Stainless belt 102 Block 103 Block 104 Polyurethane bush 1011 Rotating plate 1012 Rotating ring 1015 Fixed plate 1016 Cover

Claims (11)

[Claims] 1. A plane rotating device which is provided with a rotation driving function in a rotation mechanism section comprising a rotatable rotating body and a support mechanism on a gantry and rotates the rotating body, provided on a rotating section of the rotating mechanism. Provided with an arcuate guide provided, an arcuate guide provided on the support fixing portion, and a support belt connecting the rotating portion and the fixing portion in a form bent in a loop between the two guides. And a wiring mechanism for supplying power and air from a fixed portion to a rotating portion by holding a cable or a tube on a support belt thereof. 2. A rotating mechanism portion comprising a rotatable rotating body and a supporting mechanism on a moving mechanism movable body movable in the X-Y direction on the gantry plane, has a rotation driving function, and rotates the rotating body. An arcuate guide provided on the movable part of the rotation mechanism, an arcuate guide provided on the gantry fixing part, and a rotating part which is bent in a loop between the two guides in the planar rotating device. The support belt is connected to the fixed part and the support belt is made of an integral elastic body. The support belt holds cables and tubes, and supplies power and air from the fixed part to the rotating part. And a wiring mechanism therefor. 3. The flat rotating device according to claim 1, wherein the bearing of the rotating mechanism is a hydrostatic bearing. 4. The plane rotation device according to claim 1, wherein the rotation mechanism has a position detection function of detecting a position of the movable body. 5. The flat rotating device according to claim 1, wherein a contact surface between the support belt and the arc guide is non-slip. 6. The non-slip device according to claim 5, wherein the support belt and / or the arc guide are made of a rubber material and made of a material having a large friction coefficient.
And a wiring mechanism thereof. 7. The flat rotating device and its wiring mechanism according to claim 5, wherein the non-slip is formed by sticking or applying a rubber material to at least one of the support belt and the arc-shaped guide. . 8. The flat rotating apparatus and its wiring mechanism according to claim 5, wherein the support belt and the arc-shaped guide have irregularities that mesh with each other to prevent mechanical slippage. 9. The support belt according to claim 8, wherein the support belt is a toothed belt, and the arc-shaped guide is also toothed similarly to the belt, so that slippage between the support belt and the arc-shaped guide is mechanically prevented. And a wiring mechanism therefor. 10. The support belt is provided with a projection or a hole, and the cylindrical guide is also provided with a hole or a projection that meshes with the projection or the hole to mechanically prevent slippage between the support belt and the arc-shaped guide. The wiring mechanism for a plane rotating device according to claim 8, wherein: 11. The flat rotating device and its wiring mechanism according to claim 1, wherein a lubricating member such as a fluororesin is disposed on a sliding portion of the support belt.