JP2002343203A - Method of manufacturing for vacuum valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing for providing a highly reliable vacuum valve preventing lifting and slanting during brazing between parts, preventing a partial load between a fixed side electrode and a movable side electrode due to for example lifting or slanting of the fixed side electrode, suppressing deformation of the electrodes and dispersion of contact resistance, and stably maintaining favorable mechanical and electrical performance. SOLUTION: A fitting size for fitting a fixed side electrode rod 4 in a hole of a fixed side end plate 2, a movable side electrode rod 5 in a hole of a bellows 6 or a bellows shield 10, the fixed side electrode rod 4 in a hole of the fixed side electrode 7, or the movable side electrode rod 5 to a hole of the movable side electrode 8 is used as a fitting size for a transition fit, and brazing is carried out after being assembled by press-in.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vacuum valve, and more particularly to a method for fitting components of a vacuum valve.

[0002]

2. Description of the Related Art FIG.
It is sectional drawing which shows the conventional vacuum valve shown by Unexamined-Japanese-Patent No. 12 publication. In the figure, reference numeral 1 denotes an insulating container made of a cylindrical alumina ceramic or the like. Reference numeral 2 denotes a fixed end plate and reference numeral 3 denotes a movable end plate. The fixed and movable end plates 2 and 3 are coaxially attached to both end surfaces of the insulating container 1 by brazing. The assembling is performed mainly using a silver brazing material, and the fixed-side end plate 2 has a fixed-side electrode rod 4.
However, the movable-side electrode bar 5 is brazed to the movable-side end plate 3 via a bellows 6. The bellows 6 is made of thin stainless steel in a bellows shape, and allows the movable electrode bar 5 to move while maintaining vacuum tightness. 7, 8
Are a fixed-side electrode and a movable-side electrode which are brazed to the fixed-side electrode rod 4 and the movable-side electrode rod 5 and are arranged to face each other. 9 is a shield and 10 is a bellows shield, which is disposed so as to cover the inner surface of the insulating container 1 and the bellows 6 to prevent the inner surface of the insulating container 1 and the bellows 6 from being contaminated by metal vapor generated by an arc. I have.

[0003] The vacuum valve is composed of the above-mentioned parts, and the fitting dimensions of each part are 0 to 0 on the male side so that a person can easily assemble.
-0.2mm, +0.2 to +0.05 for female part
The tolerance was set within a range of mm, and the gap was set to be at least 0.05 mm or more. In addition, a foil brazing material is inserted between the components, or a wire brazing material is wound around the components, and the brazing material is melted by brazing in a furnace to perform joining.

[0004]

Since the conventional vacuum valve employs a wide fitting tolerance (clearance fit) as described above, it is necessary to transport the vacuum valve into the furnace or to move the vacuum valve in the furnace. In some cases, tilting or floating occurs due to vibration and generation of gas dissolved in the brazing material when the brazing material is melted.

FIG. 11 is a sectional view showing a vacuum valve in which the fixed electrode rod 4 is brazed to the fixed end plate 2 in an inclined state. In this case, since the fixed side electrode 7 and the movable side electrode 8 are in one contact, the contact resistance increases, and the electrical / mechanical performance such as the deformation of the electrode rod and the damage of the electrode due to the multiple opening and closing operations. Serious failure occurs. conventionally,
In order to prevent this, the vacuum valve must be assembled by partially brazing the fixed side and the movable side, and then inspecting the tilt and floating using visual or measuring instruments, and discarding any defective products. Was trying to secure.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and does not cause lifting or tilting at the time of brazing between parts, and maintains good mechanical and electrical performance stably. An object of the present invention is to provide a manufacturing method capable of obtaining a highly reliable vacuum valve.

[0007]

According to a first method of the present invention, a fixed end plate and a movable end plate are hermetically joined to both ends, respectively. A fixed-side electrode rod having a fixed-side electrode disposed therein, and a movable-side electrode rod having a movable-side electrode that is disposed in the insulating container and that can be brought into contact with and separated from the fixed-side electrode, is provided on the fixed-side end plate. The fixed-side electrode rod is hermetically bonded to the movable-side end plate, and the movable-side electrode rod is hermetically bonded to the movable-side end plate via a bellows shield and a bellows. When airtightly joining
The fitting dimension for fitting the fixed electrode rod into the hole of the fixed end plate is the fitting dimension of the intermediate fit, and after being assembled by press-fitting, it is hermetically joined by brazing.

According to a second method of the present invention, in the first method, the shape of the hole of the fixed-side end plate into which the fixed-side electrode rod is fitted is elliptical or chrysanthemum. The fitting dimension of the elliptical or chrysanthemum-shaped small-diameter portion and the fixed-side electrode rod is the fitting dimension of the intermediate fit.

A third method of manufacturing a vacuum valve according to the present invention is the method according to the first method or the second method, wherein the fixed electrode rod is press-fitted into a hole of the fixed end plate to perform positioning. Airtight joining is performed by brazing.

In a fourth method of manufacturing a vacuum valve according to the present invention, in joining the fixed electrode rod to the hole of the fixed electrode or the movable electrode rod to the hole of the movable electrode, After fixing the fixed-side electrode rod to the hole of the fixed-side electrode, or the movable-side electrode rod to the hole of the movable-side electrode, the fitting dimension to be fitted is the fitting size of the intermediate fit, and then assembled by press-fitting. It is joined by brazing.

In a fifth method of manufacturing a vacuum valve according to the present invention, when the movable electrode rod is hermetically joined to the bellows or the bellows shield hole, the movable electrode rod is connected to the bellows or the bellows shield hole. The fitting dimension to be fitted to is set to the fitting dimension of the intermediate fit, and after assembling by press fitting, airtight joining is performed by brazing.

In a sixth aspect of the method of manufacturing a vacuum valve according to the present invention, in the fifth aspect, the shape of the hole of the bellows or the bellows shield into which the movable-side electrode rod is fitted is made oval or chrysanthemum, The fitting dimension of the elliptical or chrysanthemum-shaped small-diameter portion and the movable-side electrode rod is the fitting dimension of the intermediate fit.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a vacuum valve, wherein the brazing of the press-fitting portion and the vacuum sealing are simultaneously performed in any one of the first to sixth methods.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, an embodiment of a method for manufacturing a vacuum valve of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a vacuum valve according to Embodiment 1 of the present invention. In the drawing, reference numeral 1 denotes an insulating container made of a cylindrical alumina ceramic or the like in which a fixed-side end plate 2 and a movable-side end plate 3 are hermetically joined to each other by brazing, and 4 is disposed in the insulating container 1 and has a fixed side. The fixed-side electrode rod having the electrode 7 is hermetically joined to the fixed-side end plate 2 by brazing. Reference numeral 5 denotes a movable electrode rod having a movable electrode 8 which is disposed in the insulating container 1 and can be brought into contact with and separated from the fixed electrode 7, and is hermetically joined to the movable end plate 3 via a bellows 6 by brazing. . The bellows 6 is made of bellows made of thin stainless steel, and holds the movable electrode bar 5 movably while keeping the inside of the insulating container 1 vacuum-tight. 9 is a shield disposed on the inner surface of the insulating container 1 and 10 is a bellows 6
The bellows shield is provided so as to cover the inner surface of the insulating container 1 and prevents the inner surface of the insulating container 1 and the bellows 6 from being contaminated by metal vapor generated by the arc.

The present inventors have paid attention to the fact that the conventional vacuum valve applies a wide fitting tolerance (clearance fit) as described above, and thus causes inclination and floating. Various studies have been made on fitting for obtaining a vacuum valve of stable quality.

First, the fixed electrode rod 4 is inserted into the hole of the fixed end plate 2.
An experimental study was carried out on the interference fit when fitting. When the interference fit is selected, the tolerance of the fitting portion of the fixed electrode rod inserted into the fixed end plate is +33 to +17.
μm (φ30 to 50n6 JIS B 0401-1,
JIS B 0401-2), and the fitting tolerance of the hole of the fixed end plate with the fixed electrode rod is +16 to 0 μm.
(Φ30-50H6JIS B0401-1, JIS
B 0401-2). Therefore, the minimum gap of the fitting portion is −33 μm {the minimum tolerance of the hole of the fixed side end plate (0) −the maximum tolerance of the fixed side electrode rod (+33)}, and the maximum is −1 μm {the hole of the fixed side end plate. Maximum tolerance of (+1
6) -Minimum tolerance of fixed electrode rod (+17)｝.

When the tight fit tolerance is applied, unlike the case where a wide fitting tolerance is applied, the fixed fitting is firmly restrained. The rod does not float or tilt. However, since the oil and fats such as lubricants cannot be used for the components of the vacuum valve, the friction increases, so it becomes difficult to press-fit the fittings. The parts deformed during insertion in tight fits with many overlaps. As a result, most of the interference fits were deformed.

Next, an experimental study was conducted on the intermediate fit. When the intermediate fitting tolerance is selected, the tolerance of the fitting portion of the fixed-side electrode with the fixed-side end plate is ± 12.5 μm (φ
30-50 js7 JIS B 0401-1, JIS
B 0401-2), and the tolerance of the hole of the fixed side end plate with the fixed side electrode rod is +25 to 0 μm (φ30 to 50H).
7 JIS B 0401-1, JIS B 0401
-2). Therefore, the minimum clearance of the fitting portion is −12.5 μm ｛the minimum tolerance of the hole in the fixed end plate (0).
-The maximum tolerance of the fixed-side electrode rod (+12.5)}, and the maximum is 37.5 μm {the maximum tolerance of the hole of the fixed-side end plate (+2).
5)-The minimum tolerance of the fixed electrode rod (-12.5)}.

Unlike the case where a wide fitting tolerance is applied, even when the intermediate fitting tolerance is applied, the effect of preventing a floating / tilting due to vibration at the time of conveyance or the like is effective if a small restraining force is obtained. Therefore, the maximum gap size in this case is 37.
Even in the case of 5 μm, no floating or tilting of the fixed electrode rod 4 occurred. In addition, since oils and fats cannot be used, friction increases, and parts may be deformed at the time of insertion depending on tolerances. However, in the minimum gap size of -12.5 μm in this case, deformation which causes a problem does not occur. Was. From the above results, the fixed-side end plate 2 of the vacuum valve and the fixed-side electrode rod 4
The optimum range of the gap size for the interfitting is the size of the intermediate fit, with the minimum being -12.5 μm and the maximum being 37.5.
μm, and can be applied within that range.

In this embodiment, when the fixed electrode rod 4 is hermetically joined to the hole of the fixed end plate 2, the two are set to a fitting size of an intermediate fit, assembled by press fitting, and then hermetically joined by brazing. did. Although it is difficult to insert the fixed-side electrode rod 4 having such a component size into the hole of the fixed-side end plate 2 by manual power, it is easily and efficiently used, for example, by using mechanical pressure by a small press machine. Could be inserted. The subassembly assembled by inserting the ring-shaped brazing material foil in the insertion stage was transported to the furnace and brazed and joined, but the fixed-side electrode rod 4 did not float or tilt at all. In addition to obtaining stable products in terms of quality, there was no defective waste products, and the yield was improved. In addition, work efficiency has been improved such that inspection after brazing is not required.

Embodiment 2 FIG. 2 and 3 are front views showing a fixed-side end plate of a vacuum valve according to Embodiment 2 of the present invention. In the drawings, reference numeral 2a denotes an oval hole of the fixed-side end plate 2, and 2b denotes a fixed side plate. It is a chrysanthemum-shaped hole of the end plate 2. The dimension of the small diameter of the ellipse in the elliptical hole 2a of the fixed-side end plate 2 is set to an intermediate fit dimension with the fixed-side electrode rod. In the chrysanthemum-shaped hole 2b of the fixed-side end plate 2, the small-diameter portion of the chrysanthemum is set to an intermediate fit with the fixed-side electrode rod.

Also in the second embodiment, the method of hermetically joining the fixed electrode rod 4 to the holes 2a and 2b of the fixed end plate 2 is the same as that of the first embodiment. By making the shape of the hole such an elliptical shape and a chrysanthemum shape and setting the small diameter of each of the holes to an intermediate fit size with the fixed side electrode rod 4, the pressure at the time of inserting the fixed side electrode rod 4 is reduced. There is an effect that the assembly work can be performed simply and efficiently by a simpler press machine because it is smaller than in the first embodiment. The fixed-side electrode rod 4 did not float or tilt with respect to the fixed-side end plate 2, and a stable high-quality electrode rod was obtained.

Embodiment 3 FIG. FIG. 4 is an enlarged sectional view showing a fitting portion between a fixed-side end plate and a fixed-side electrode rod of a vacuum valve according to Embodiment 3 of the present invention, and 11 is a wire brazing material. The dimensions of the fixed-side electrode rod 4 and the fixed-side end plate 2 are set to intermediate fit dimensions. However, the fixed-side electrode rod 4 has no locking portion by a step, and the positioning is performed by fixing the fixed-side electrode rod 4 to the fixed side. This is performed by press-fitting a hole of the end plate 2 to a specified position. The fixed-side electrode rod 4 is fitted and restrained to the fixed-side end plate 2 and is held at the press-fitted position. In this case, a wire brazing material 11 is used as the brazing material, wound around two fixed electrode rods, and brazed in a furnace.

In the third embodiment, since there is no need to provide the positioning step provided on the fixed electrode rod 4, the step of processing the step is eliminated, and the processing of the electrode rod is simplified. At the same time, since there is no step in the fixed-side electrode rod 4, which is an energizing path, electric resistance can be reduced, and heat generated at the electrode contact portion can be efficiently transmitted to the outside of the vacuum valve.
The heat radiation effect is improved.

Embodiment 4 FIG. 5 is an enlarged cross-sectional view showing a fitting part of a fixed electrode rod and a fixed electrode, and a fitting part of a movable electrode rod and a movable electrode of a vacuum valve according to Embodiment 4 of the present invention. 12 is a brazing filler metal.

Various studies have been made on the fitting of the fixed-side electrode rod and the hole of the fixed-side electrode and the fitting of the movable-side electrode rod and the hole of the movable-side electrode. Similarly, the optimum gap size range is the size of the intermediate fit. I understand. The fixed-side electrode rod 4 was inserted into the hole of the fixed-side electrode 7 and the movable-side electrode rod 5 was inserted into the hole of the movable-side electrode 8 by press-fitting and assembled by brazing, and then joined by brazing. In conventional assembly with a wide fitting gap, in addition to lifting and tilting during transportation etc., the gas generated when the brazing material is melted when brazing in a furnace, the weight of a small electrode is light, so The electrodes tended to float and tilt easily, but these could be completely prevented by setting the intermediate fit dimensions and pressing the electrode rod into the electrodes.

Embodiment 5 FIG. FIG. 6 is an enlarged sectional view showing a fitting portion of a movable-side electrode rod, a bellows shield, and a bellows of a vacuum valve according to Embodiment 5 of the present invention. 12 is a brazing filler metal.

Various studies have been made on the fitting of the movable electrode rod, the bellows shield and the hole of the bellows.
Similarly, it has been found that the range of the optimum gap size is the size of the intermediate fit. The movable-side electrode rods 5 each having an intermediate fit were assembled by press-fitting the holes of the bellows shield 10 and the bellows 6. In this case, since the bellows shield 10 is sandwiched between the step portion of the movable electrode bar 5 and the bellows 6, a conventional wide fitting gap may be used. The movable-side subassembly assembled in this manner was transported to the furnace and brazed and hermetically bonded. However, stable and high-quality products were obtained without any lifting or tilting.

Embodiment 6 FIG. 7 and 8 are front views each showing the shape of the bellows of the vacuum valve according to the sixth embodiment of the present invention on the movable electrode side, and FIG.
Is an oval hole of the bellows 6, and 6b is a chrysanthemum-shaped hole of the bellows. The size of the small diameter portion of the ellipse in the elliptical hole 6a of the bellows 6 is set to an intermediate fit size with the movable-side electrode rod. Further, in the chrysanthemum-shaped hole 6b of the bellows 6, the small diameter of the chrysanthemum is set to an intermediate fit dimension with the movable electrode rod.

The shape of the holes of the bellows shield 10 and the bellows 6 is made oval or chrysanthemum as shown in FIG. 7 and FIG. By doing so, the pressure at the time of inserting the movable-side electrode rod may be smaller than that in the fifth embodiment, and the effect that the assembling work can be easily and efficiently performed by a simpler press machine can be achieved. is there. The movable electrode rod 5 did not float or tilt at all, and a stable high-quality electrode was obtained. Further, since the bellows shield 10 is sandwiched between the step portion of the movable electrode rod and the bellows, a conventional wide fitting gap may be used.

Embodiment 7 FIG. 9 is a sectional view of a vacuum valve according to Embodiment 7 of the present invention. 13 is a brazing jig. A fixed electrode rod 4 and a fixed end plate 2, a fixed electrode rod 4 and a fixed electrode 7, a movable electrode rod 5 and a movable electrode 8,
The movable-side electrode rod 5 and the bellows 6 are each set to have an intermediate fit.

The fixed electrode rod 4 and the fixed end plate 2, the fixed electrode rod 4 and the fixed electrode 7, the movable electrode rod 5 and the movable electrode 8, the movable electrode rod 5 and the bellows shield 10, and the bellows 6 Assembled by press fitting. The shield 9 uses an auxiliary fitting at a step provided in the center of the insulating container 1 and is assembled and fixed by welding or swaging. The fixed-side assembly, the movable-side assembly, and the shield assembly assembled in this manner have a ring-shaped brazing material foil disposed on both end surfaces of the insulating container 1 and a brazing jig for the movable-side end plate 3. After being transported on the substrate 13 and set in a vacuum furnace, it is heated to a temperature higher than the melting point of the brazing material and hermetically bonded with the brazing material to produce a vacuum valve.

Since the vacuum valve manufactured in this manner is assembled by press-fitting with an intermediate fit,
Since there is no fear of floating and tilting, and the fixed side electrode 7 does not fall off during brazing, brazing work at the time of partial assembly can be omitted, and air-sealing can be performed simultaneously with brazing by one brazing, and vacuum Valves can be manufactured. A highly reliable vacuum valve can be manufactured easily and efficiently.

In this embodiment, the movable side end plate 3
Although the case where the side is carried on the brazing jig 13 and brazed is shown, the fixed end plate 2 side is connected to the brazing jig 13.
It may be transported on top of and brazed,
A similar effect is achieved. In addition, in this embodiment, the case where the dimensions of the intermediate fit are applied to all the parts and the assembly is performed by press-fitting has been described.However, depending on the material of the electrode, for example, the electrode material may be formed by thermal spraying on one end of the electrode rod, In some cases, it is not always necessary to manufacture all parts by press fitting, for example, by joining due to heat generated during friction welding. The same effect can be obtained as long as one or more necessary fittings are assembled by press-fitting while applying an intermediate fit size, and then vacuum-sealed by brazing.

[0035]

According to the first method of the present invention, a fixed end plate and a movable end plate are hermetically joined to both ends, respectively, and are disposed in the insulating container. A fixed-side electrode rod having a fixed-side electrode, and a movable-side electrode rod having a movable-side electrode that is disposed in the insulating container and can be brought into contact with and separated from the fixed-side electrode, and is fixed to the fixed-side end plate. A side electrode rod is hermetically bonded to the movable side end plate, and the movable side electrode rod is hermetically bonded to the movable side end plate via a bellows shield and a bellows. At the time of joining, the fitting dimension for fitting the fixed-side electrode rod into the hole of the fixed-side end plate was set to the fitting dimension of the intermediate fit, and after assembling by press-fitting, it was air-tightly joined by brazing. For fixed electrode rod Does not occur can or inclination, there is an effect that what stable and high quality. In addition, there is an effect that the yield is improved.

According to the second method of the present invention for manufacturing a vacuum valve, in the first method, the shape of the hole of the fixed-side end plate into which the fixed-side electrode is fitted is changed to an oval or chrysanthemum shape. Since the fitting dimension between the small-diameter portion of the elliptical or chrysanthemum shape and the fixed-side electrode rod is set as the fitting dimension of the intermediate fit, it is more difficult to insert the fixed-side electrode rod than in the first method. Since the pressure is small, there is an effect that the assembling work can be performed more easily.

According to the third method of the method of manufacturing a vacuum valve of the present invention, in the first method or the second method, positioning is performed by press-fitting the fixed electrode rod into the hole of the fixed end plate. Later, airtight joining was performed by brazing, so there was no need to provide a step for positioning on the fixed electrode bar, so the number of steps could be reduced, the electrical resistance could be reduced, and the heat generated at the electrode contacts could be radiated. There is an effect of improving the effect.

According to the fourth method of the present invention for manufacturing a vacuum bulb, the fixed electrode rod is joined to the hole of the fixed electrode, or the movable electrode rod is joined to the hole of the movable electrode. In doing so, the fixed electrode rod in the hole of the fixed electrode, or the movable electrode rod in the hole of the movable electrode,
The fitting dimension of the fitting is set to the fitting dimension of the intermediate fit, and after assembling by press fitting, joining by brazing, it occurs when the electrode floats or tilts during transportation, etc., and occurs when the brazing material is melted. Floating and tilting due to gas can also be prevented, and there is an effect that a high quality product can be stably obtained.

According to the fifth method of the present invention, when the movable electrode rod is hermetically joined to the bellows or the hole of the bellows shield, the movable electrode rod is connected to the bellows or the bellows shield. The fitting dimension to be fitted into the hole is the fitting dimension of the intermediate fit, and after assembling by press-fitting, it is air-tightly joined by brazing, so that the floating and tilting of the movable side electrode rod due to transportation etc. can be prevented, There is an effect that a high quality product can be stably obtained.

According to a sixth method of manufacturing a vacuum bulb of the present invention, in the fifth method, the shape of the hole of the bellows or the bellows shield into which the movable electrode rod is fitted is made oval or chrysanthemum, Since the fitting dimension of the elliptical or chrysanthemum-shaped small-diameter part and the movable-side electrode rod is set to the fitting dimension of the intermediate fit, the pressure when inserting the fixed-side electrode rod is lower than in the fifth method. Since it is small, there is an effect that the assembling work can be performed more easily.

According to the seventh method of the present invention for manufacturing a vacuum valve, in any one of the first to sixth methods, the brazing joining and the vacuum sealing of the press-fitting portion are simultaneously performed. Since the parts are assembled by being fitted with an intermediate fit, they can be prevented from floating and tilting, and the parts can be prevented from falling off during brazing. Has the effect of being able to produce Further, the brazing work at the time of partial assembly can be omitted, and a highly reliable vacuum valve can be easily manufactured.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a vacuum valve according to Embodiment 1 of the present invention.

FIG. 2 is a front view showing an oval hole of a fixed-side end plate of a vacuum valve according to Embodiment 2 of the present invention.

FIG. 3 is a front view showing chrysanthemum-shaped holes in a fixed-side end plate of a vacuum valve according to Embodiment 2 of the present invention.

FIG. 4 is an enlarged sectional view showing a fitting portion between a fixed-side end plate and a fixed-side electrode rod of a vacuum valve according to Embodiment 3 of the present invention.

FIG. 5 is an enlarged cross-sectional view showing a fitting portion of a fixed-side electrode bar and a fixed-side electrode and a movable-side electrode bar and a movable-side electrode of a vacuum valve according to Embodiment 4 of the present invention.

FIG. 6 is an enlarged cross-sectional view showing a fitting part of a movable-side electrode rod, a bellows, and a bellows shield of a vacuum valve according to Embodiment 5 of the present invention.

FIG. 7 is a front view showing an elliptical hole of a bellows of a vacuum valve according to Embodiment 6 of the present invention.

FIG. 8 is a front view showing chrysanthemum-shaped holes of a bellows of a vacuum valve according to Embodiment 6 of the present invention.

FIG. 9 is a cross-sectional view illustrating a method for manufacturing a vacuum valve according to Embodiment 7 of the present invention.

FIG. 10 is a sectional view showing a conventional vacuum valve.

FIG. 11 is a cross-sectional view showing a conventional vacuum valve in which a fixed electrode rod is inclined.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Insulating container 2 Fixed-side end plate 2a Oval hole 2b Chrysanthemum-shaped hole 3 Movable end plate 4 Fixed-side electrode rod 5 Movable-side electrode rod 6 Bellows, 6a Oval-shaped hole 6b Kiku-shaped hole 7 Fixed Side electrode 8 Movable side electrode, 9 Shield 10 Bellows shield 11 Wire brazing material 12 Brazing material 13 Brazing jig.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Satoshi Ochi 23 Kamitakano, Toyonaka-cho, Mitoyo-gun, Kagawa Prefecture Kamimori Electric Co., Ltd.

Claims (7)

[Claims] 1. An insulating container having a fixed-side end plate and a movable-side end plate hermetically bonded to both ends thereof, a fixed-side electrode rod having a fixed-side electrode disposed in the insulating container, and A movable-side electrode rod having a movable-side electrode that is disposed and can be brought into contact with and separated from the fixed-side electrode; the fixed-side electrode rod is hermetically bonded to the fixed-side end plate; In the case where the electrode rod is hermetically joined via a bellows shield and a bellows, when the fixed electrode rod is hermetically joined to the hole of the fixed end plate, the fixed electrode rod is connected to the hole of the fixed end plate. A method for manufacturing a vacuum valve, wherein a fitting dimension to be fitted to an intermediate fitting is set to a fitting dimension of an intermediate fit, assembled by press fitting, and then airtightly joined by brazing. 2. The fixed end plate for fitting the fixed electrode bar has an oval or chrysanthemum-shaped hole, and the oval or chrysanthemum-shaped small-diameter portion is fitted to the fixed electrode bar. 2. The method for manufacturing a vacuum valve according to claim 1, wherein the dimension is a fitting dimension of an intermediate fit. 3. The method of manufacturing a vacuum valve according to claim 1, wherein the fixed electrode rod is press-fitted into a hole of the fixed end plate to perform positioning, and then hermetically joined by brazing. Method. 4. An insulating container in which a fixed end plate and a movable end plate are hermetically joined at both ends, a fixed electrode rod disposed in the insulating container and having a fixed electrode, and the inside of the insulating container. A movable-side electrode rod having a movable-side electrode that is disposed and can be brought into contact with and separated from the fixed-side electrode; the fixed-side electrode rod is hermetically bonded to the fixed-side end plate; In the case where the electrode rod is hermetically joined via a bellows shield and a bellows, in joining the fixed electrode rod to the hole of the fixed electrode, or joining the movable electrode rod to the hole of the movable electrode, After fixing the fixed-side electrode rod to the hole of the fixed-side electrode, or the movable-side electrode rod to the hole of the movable-side electrode, the fitting dimension to be fitted is the fitting size of the intermediate fit, and then assembled by press-fitting. Joined by brazing A method for manufacturing a vacuum valve, comprising: 5. An insulating container in which a fixed end plate and a movable end plate are hermetically joined to both ends thereof, a fixed electrode rod having a fixed electrode disposed in the insulating container, and the inside of the insulating container. A movable-side electrode rod having a movable-side electrode that is disposed and can be brought into contact with and separated from the fixed-side electrode; the fixed-side electrode rod is hermetically bonded to the fixed-side end plate; When the electrode rod is airtightly joined to the bellows and the bellows shield via the bellows shield, and when the movable electrode rod is airtightly joined to the hole of the bellows or the bellows shield, the movable electrode rod is connected to the bellows or the bellows shield hole. A method for manufacturing a vacuum valve, wherein a fitting dimension to be fitted to an intermediate fitting is set to a fitting dimension of an intermediate fit, assembled by press fitting, and then airtightly joined by brazing. 6. A shape of a hole of a bellows or a bellows shield for fitting a movable-side electrode rod into an elliptical shape or a chrysanthemum shape, and fitting the elliptical or chrysanthemum-shaped small-diameter portion with the movable-side electrode rod. 6. The method for manufacturing a vacuum valve according to claim 5, wherein the dimension is a fitting dimension of an intermediate fit. 7. The method of manufacturing a vacuum valve according to claim 1, wherein the brazing of the press-fitting portion and the vacuum sealing are performed simultaneously.