JP2002343049A - Negative pressure slider having floating height regulating mechanism - Google Patents
Negative pressure slider having floating height regulating mechanismInfo
- Publication number
- JP2002343049A JP2002343049A JP2001147207A JP2001147207A JP2002343049A JP 2002343049 A JP2002343049 A JP 2002343049A JP 2001147207 A JP2001147207 A JP 2001147207A JP 2001147207 A JP2001147207 A JP 2001147207A JP 2002343049 A JP2002343049 A JP 2002343049A
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- pressure slider
- movable portion
- slider
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は磁気ディスク装置用
の負圧スライダに係わり、特に記録・再生時にのみ負圧
力を増やすことにより磁気ヘッドとディスク間の隙間を
低減することが出来る浮上量制御型の負圧スライダに関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a negative pressure slider for a magnetic disk drive, and more particularly to a flying height control type in which a gap between a magnetic head and a disk can be reduced by increasing a negative pressure only during recording / reproducing. Related to a negative pressure slider.
【0002】[0002]
【従来の技術】磁気ディスク装置の高記録密度化を図る
ために、磁気ヘッドを備えた磁気ヘッドスライダと回転
する磁気ディスク間の隙間として定義される浮上量を狭
小化することが重要である。2. Description of the Related Art In order to increase the recording density of a magnetic disk drive, it is important to reduce a flying height defined as a gap between a magnetic head slider having a magnetic head and a rotating magnetic disk.
【0003】浮上量の狭小化が進むにつれ、磁気ディス
ク装置の動作時に磁気ヘッドスライダが磁気ディスクと
接触する可能性が増大する。両者の接触状態が極めて劣
悪な場合には、磁気ヘッドスライダがクラッシュし、磁
気ディスク上の記録情報が破壊される可能性がある。As the flying height becomes narrower, the possibility that the magnetic head slider contacts the magnetic disk during the operation of the magnetic disk device increases. If the contact state between the two is extremely poor, the magnetic head slider may crash and the recorded information on the magnetic disk may be destroyed.
【0004】記録・再生時のみ浮上量を狭小化し、それ
以外の時は浮上量を大きくすることで、高記録密度化と
信頼性を両立する従来技術として、特開平5−2506
43号公報に記載のものがある。A conventional technique for achieving both high recording density and reliability by reducing the flying height only at the time of recording / reproducing and increasing the flying height at other times is disclosed in JP-A-5-2506.
No. 43 is disclosed.
【0005】特開平5−250643公報では、スライ
ダの流出端にピエゾ素子を配し、そのピエゾ素子と一体
で磁気ヘッドを設け、バイアス電圧でピエゾ素子を伸縮
することで、ピエゾ素子と磁気ヘッドを浮上面より突出
させ、磁気ディスクと磁気ヘッドの隙間を調整する方法
が開示されている。In Japanese Patent Laid-Open Publication No. Hei 5-250643, a piezo element is arranged at an outflow end of a slider, a magnetic head is provided integrally with the piezo element, and the piezo element is expanded and contracted by a bias voltage to connect the piezo element and the magnetic head. There is disclosed a method of adjusting the gap between the magnetic disk and the magnetic head by projecting from the air bearing surface.
【0006】また、特開平3−144979号公報で
は、スライダに圧電要素を組み込み、圧電要素のたわみ
を利用することで、スライダ自体を湾曲させて隙間を調
整する方法が開示されている。Further, Japanese Patent Application Laid-Open No. 3-144799 discloses a method of incorporating a piezoelectric element into a slider and using the deflection of the piezoelectric element to bend the slider itself to adjust the gap.
【0007】[0007]
【発明が解決しようとする課題】前記特願平5−250
643号公報に開示されたスライダは、流出端に設けた
ピエゾ素子の伸縮により、ピエゾ素子と一体化した磁気
ヘッドを伸縮させ、磁気ヘッドとディスク間の隙間を調
整できる。SUMMARY OF THE INVENTION The aforementioned Japanese Patent Application No. Hei 5-250
In the slider disclosed in Japanese Patent No. 643, the magnetic head integrated with the piezo element can be expanded and contracted by the expansion and contraction of the piezo element provided at the outflow end, and the gap between the magnetic head and the disk can be adjusted.
【0008】しかし、そもそもピエゾ素子と磁気ヘッド
を一体化して形成すること自体が難しく、その点につい
て何ら配慮されていない。However, it is difficult to integrally form the piezo element and the magnetic head in the first place, and no consideration is given to this point.
【0009】また前記特開平3−144979号公報で
は、スライダに圧電要素を組み込み、圧電要素のたわみ
を利用することで、スライダ自体を湾曲させて隙間を調
整する方法が開示されている。Japanese Patent Application Laid-Open No. 3-144799A discloses a method in which a piezoelectric element is incorporated into a slider and the gap is adjusted by bending the slider itself by using the deflection of the piezoelectric element.
【0010】近年、スライダは益々小型化する傾向にあ
り、圧電要素をスライダに組み込むことは極めて困難に
なっており、簡単な構成で浮上量を調整する手段が望ま
れている。In recent years, sliders have been increasingly miniaturized, and it has become extremely difficult to incorporate a piezoelectric element into the slider. Therefore, means for adjusting the flying height with a simple configuration has been desired.
【0011】本発明は上記のような要望に鑑みてなされ
たもので、簡単な構成で浮上量を調整でき、記録・再生
時のみ浮上量を狭小化することで、高記録密度化と高信
頼性を両立することができる負圧スライダを提供するこ
とを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned demands. The flying height can be adjusted with a simple structure, and the flying height is reduced only during recording / reproducing, thereby achieving high recording density and high reliability. It is an object of the present invention to provide a negative pressure slider capable of satisfying both requirements.
【0012】[0012]
【課題を解決するための手段】上記課題を解決するため
に本発明は、磁気ヘッドを備えた負圧スライダであっ
て、前記負圧スライダの空気流出端に前記スライダの高
さ方向に伸縮可能な可動部を有し、前記可動部が伸長し
た時に、前記可動部の端面が前記負圧スライダの浮上面
より引っ込んでいることを特長とする負圧スライダとし
た。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a negative pressure slider provided with a magnetic head, wherein the slider can expand and contract in the height direction of the slider at the air outflow end of the negative pressure slider. A negative pressure slider characterized in that the movable portion has a movable end, and when the movable portion is extended, the end face of the movable portion is retracted from the floating surface of the negative pressure slider.
【0013】また、磁気ヘッドを備えた負圧スライダで
あって、前記負圧スライダの空気流出端に前記スライダ
の高さ方向に伸縮可能な可動部を有し、前記可動部が伸
長した時に、前記可動部の端面が前記負圧スライダの浮
上面より引っ込んでおり、前記可動部が伸長していない
時は、前記可動部の端面は前記負圧スライダの負圧溝面
と略同一面にあることを特長とする負圧スライダとし
た。A negative pressure slider provided with a magnetic head, further comprising a movable portion at the air outflow end of the negative pressure slider which can expand and contract in the height direction of the slider. When the end surface of the movable portion is retracted from the floating surface of the negative pressure slider and the movable portion is not extended, the end surface of the movable portion is substantially flush with the negative pressure groove surface of the negative pressure slider. Thus, a negative pressure slider is provided.
【0014】更に、磁気ヘッドを備えた負圧スライダで
あって、前記負圧スライダの空気流出端に前記スライダ
の高さ方向に伸縮可能な可動部を有し、前記可動部が伸
長した時に、前記可動部の端面が前記負圧スライダの浮
上面より引っ込んでおり、前記可動部が伸長していない
時に、前記可動部の端面は前記負圧スライダの負圧溝面
と略同一面にあり、かつ前記磁気ヘッドが記録・再生を
行うことを特長とする負圧スライダとした。Furthermore, a negative pressure slider provided with a magnetic head, further comprising a movable portion at the air outflow end of the negative pressure slider which can expand and contract in the height direction of the slider. The end surface of the movable portion is retracted from the floating surface of the negative pressure slider, and when the movable portion is not extended, the end surface of the movable portion is substantially flush with the negative pressure groove surface of the negative pressure slider, A negative pressure slider characterized in that the magnetic head performs recording and reproduction.
【0015】[0015]
【発明の実施の形態】以下、図面を参照して本発明の実
施形態を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0016】図1は本発明による負圧スライダの実施形
態を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of a negative pressure slider according to the present invention.
【0017】図示するように、本実施形態の負圧スライ
ダ1は、空気流入端2、空気流出端3、浮上面4、可動
部5、空気流出端3と可動部5をつなぐ導電層14を備
えて構成される。本実施例において可動部5は、バルク
のピエゾ素子から構成されている。ピエゾ素子の大きさ
は、幅が0.8mm、厚さが0.04mm、高さが0.29mmである。
ここで浮上面4は、不図示の磁気ディスクと対向した際
に、磁気ディスクと最も近接して空気力を発生する一対
の流入パッド6、7とセンタパッド10、磁気ディスク
からさらに離れたステップ軸受け面8と11、ステップ
軸受け面より更に磁気ディスク面から離れ負圧力を発生
する負圧溝面9を備える。センタパッド10は再生用磁
気ギャップ12と記録用磁気ギャップ13を備える。As shown in the drawing, the negative pressure slider 1 of the present embodiment includes an air inflow end 2, an air outflow end 3, a floating surface 4, a movable portion 5, and a conductive layer 14 connecting the air outflow end 3 and the movable portion 5. It is configured with. In this embodiment, the movable section 5 is composed of a bulk piezo element. The size of the piezo element is 0.8 mm in width, 0.04 mm in thickness, and 0.29 mm in height.
Here, the air bearing surface 4 is a pair of inflow pads 6, 7 and a center pad 10 that generate air force closest to the magnetic disk when facing the magnetic disk (not shown), and a step bearing further away from the magnetic disk. The surfaces 8 and 11 are provided with a negative pressure groove surface 9 which is further away from the magnetic disk surface than the step bearing surface and generates a negative pressure. The center pad 10 includes a reproducing magnetic gap 12 and a recording magnetic gap 13.
【0018】流入パッド6、7とセンタパッド10から
ステップ軸受け面8、11までの深さは150nmであり、
流入パッド6、7とセンタパッド10から負圧溝面9ま
での深さは1μmである。負圧スライダ1の長さは1.25m
m、幅は1.0mm、厚さは0.3mmである。The depth from the inflow pads 6, 7 and the center pad 10 to the step bearing surfaces 8, 11 is 150 nm,
The depth from the inflow pads 6, 7 and the center pad 10 to the negative pressure groove surface 9 is 1 μm. The length of negative pressure slider 1 is 1.25m
m, width 1.0 mm, thickness 0.3 mm.
【0019】図2は本発明による負圧スライダの裏面
(サスペンション取付け面)から見た平面図である。負
圧スライダ裏面には、書き込み磁界を発生するコイル1
5が設けられている。このコイル部材15が設けられて
いる面と図1で示した浮上面4はほぼ平行となる。ま
た、このコイルに電流を流すための導体16と外部から
の電気的接点となる電極パッド17が設けられている。FIG. 2 is a plan view of the negative pressure slider according to the present invention as viewed from the back surface (suspension mounting surface). On the back of the negative pressure slider, a coil 1 for generating a write magnetic field is provided.
5 are provided. The surface on which the coil member 15 is provided is substantially parallel to the air bearing surface 4 shown in FIG. Further, a conductor 16 for supplying a current to the coil and an electrode pad 17 serving as an electrical contact from the outside are provided.
【0020】サスペンション(不図示)上に配線された
導体と電極パッド17が電気的に接続され記録・再生信
号の送受信が行われる。一般に電極パッド17は空気流
出端3上に露出する形態で備えられる場合が多いが、本
発明では空気流出端から導電層14を介して可動部5が
備えられるため、電極パッド17を空気流出端に形成す
ることは難しく、負圧スライダ裏面に形成する形態とし
た。また、同様の理由でコイル部材15もスライダ裏面
に形成した。上記形態とすることで、電極パッド17と
サスペンション上の導体間の電気的接続を容易に行うこ
とができる。A conductor wired on a suspension (not shown) is electrically connected to the electrode pads 17 to transmit and receive recording / reproducing signals. Generally, the electrode pad 17 is often provided so as to be exposed on the air outflow end 3. In the present invention, since the movable portion 5 is provided from the air outflow end via the conductive layer 14, the electrode pad 17 is connected to the air outflow end 3. Since it is difficult to form the negative pressure slider, it is formed on the back surface of the negative pressure slider. Further, for the same reason, the coil member 15 was also formed on the back surface of the slider. With the above configuration, electrical connection between the electrode pad 17 and the conductor on the suspension can be easily performed.
【0021】空気流出端に隣接する導電層14は、例え
ばAuをスパッタすることで形成することができる。特
にウエハ状態でスパッタ加工すれば、極めて容易に薄い
導電層を形成することができる。導電層14と可動部5
であるピエゾ素子は、例えば導電性接着剤を用いて結合
している。導電性接着剤を用いることで、ピエゾ素子の
電極の一つと導電層14の導通をとることができる。The conductive layer 14 adjacent to the air outflow end can be formed, for example, by sputtering Au. In particular, if the wafer is sputtered, a thin conductive layer can be formed very easily. Conductive layer 14 and movable part 5
Are connected using, for example, a conductive adhesive. By using a conductive adhesive, conduction between one of the electrodes of the piezo element and the conductive layer 14 can be achieved.
【0022】図3は本発明による負圧スライダ1とサス
ペンション20の接続方法を説明する斜視図である。負
圧スライダ1はサスペンション20上に接着固定されて
いる。サスペンション20上に形成された電極パッド1
8aと導電層14が導体19aを用いて電気的に接続さ
れている。先に述べたように、導電層14と可動部5で
あるピエゾ素子は導電性接着剤を用いて接着しているの
で、ピエゾ素子の導電層14との対向面に形成された電
極23a(不図示)と導電層14は電気的に接続されて
いる。従って、ピエゾ素子の電極23aとサスペンショ
ン上の電極18aとは電気的に接続されている。また、
導体19aは例えばワイヤボンディングのような方法を
用いて形成することができる。さらにサスペンション上
に形成された電極パッド18bと、可動部であるピエゾ
素子5上に形成され、かつ電極23aとは反対面に形成
された電極23bが、導体19bにより電気的に接続さ
れている。電極18aから続く導線22と電極18bか
ら続く導線21は、電圧源につながり、可動部5の電極
23a、23b間に電圧をかけることができる。電圧を
かけると可動部であるピエゾ素子5は矢印A方向に伸縮
することができる。FIG. 3 is a perspective view for explaining a method of connecting the negative pressure slider 1 and the suspension 20 according to the present invention. The negative pressure slider 1 is adhesively fixed on a suspension 20. Electrode pad 1 formed on suspension 20
8a and the conductive layer 14 are electrically connected using the conductor 19a. As described above, since the conductive layer 14 and the piezo element that is the movable portion 5 are bonded using a conductive adhesive, the electrode 23a (non-conductive) formed on the surface of the piezo element facing the conductive layer 14 is used. (Shown) and the conductive layer 14 are electrically connected. Therefore, the electrode 23a of the piezo element and the electrode 18a on the suspension are electrically connected. Also,
The conductor 19a can be formed by using, for example, a method such as wire bonding. Further, the electrode pad 18b formed on the suspension and the electrode 23b formed on the piezo element 5 which is a movable portion and formed on the surface opposite to the electrode 23a are electrically connected by the conductor 19b. A conductor 22 continuing from the electrode 18a and a conductor 21 continuing from the electrode 18b are connected to a voltage source, and a voltage can be applied between the electrodes 23a and 23b of the movable portion 5. When a voltage is applied, the piezo element 5 as a movable part can expand and contract in the direction of arrow A.
【0023】サスペンションのスライダ接着面には、ス
ライダ浮上面の裏面に形成した電極パッド17と接続す
るための電極が4つ形成されており、それぞれの電極が
電極パッド17と電気的に接続されている。いずれの電
極にも導線24がそれぞれ接続されており、記録・再生
信号の送受信ができるようになっている。On the slider bonding surface of the suspension, four electrodes are formed for connection to electrode pads 17 formed on the back surface of the slider flying surface, and each electrode is electrically connected to the electrode pad 17. I have. Conductive wires 24 are connected to each of the electrodes so that recording / reproducing signals can be transmitted and received.
【0024】図4は本発明による負圧スライダ1が磁気
ディスク25上に記録・再生を行う時の動作を説明する
側面図である。記録・再生を行う際は、記録・再生用磁
気ギャップ12、13と磁気ディスク25間の隙間(浮
上量)hを狭小化したい。本発明では記録・再生時は可
動部であるピエゾ素子5への電圧の印加をやめることで
可動部の長さを自然長まで縮め、可動部が負圧溝面9と
略同一面となるようにしている。こうすることで、負圧
溝面9で発生する負圧力が増加し、スライダ浮上量が低
下する。浮上量が低下した状態で記録・再生を行うので
記録密度を高めることができる。FIG. 4 is a side view for explaining the operation when the negative pressure slider 1 according to the present invention performs recording and reproduction on the magnetic disk 25. When performing recording / reproducing, it is desired to reduce a gap (flying height) h between the recording / reproducing magnetic gaps 12 and 13 and the magnetic disk 25. In the present invention, at the time of recording / reproduction, the length of the movable portion is reduced to the natural length by stopping the application of the voltage to the piezo element 5 as the movable portion, so that the movable portion is substantially flush with the negative pressure groove surface 9. I have to. By doing so, the negative pressure generated on the negative pressure groove surface 9 increases, and the flying height of the slider decreases. Since recording / reproduction is performed with the flying height reduced, the recording density can be increased.
【0025】一方、図5は本発明による負圧スライダ1
が磁気ディスク25上に記録・再生を行っていない時の
動作を説明する側面図である。記録・再生を行っていな
い時は、負圧スライダと磁気ディスクの接触の可能性を
回避するために、浮上量を出来るだけ大きくしたい。本
発明では記録・再生を行わない時は可動部であるピエゾ
素子5へ電圧を印加することで可動部をΔsだけ伸長
し、可動部がステップ軸受け面11と略同一の高さにな
るようにしている。こうすることで、空気流出端から抜
ける空気の流量を制限でき、負圧溝面9で生じる負圧力
が減少し、負圧スライダ1の浮上量をΔhだけ増加させ
ることができる。FIG. 5 shows a negative pressure slider 1 according to the present invention.
FIG. 7 is a side view for explaining the operation when recording / reproducing is not performed on the magnetic disk 25. When recording / reproduction is not being performed, it is desired to increase the flying height as much as possible in order to avoid the possibility of contact between the negative pressure slider and the magnetic disk. In the present invention, when recording / reproducing is not performed, the movable portion is extended by Δs by applying a voltage to the piezo element 5 which is a movable portion so that the movable portion has substantially the same height as the step bearing surface 11. ing. By doing so, the flow rate of the air flowing out from the air outflow end can be restricted, the negative pressure generated on the negative pressure groove surface 9 decreases, and the flying height of the negative pressure slider 1 can be increased by Δh.
【0026】本実施例では、電圧印加時に可動部の端面
の高さがステップ軸受け面と略同一の高さになるように
したが、浮上面であるセンタパッド10より飛び出さな
いようにすれば良い。センタパッド10より飛び出して
しまうと、可動部の端面と磁気ディスク間の隙間が記録
・再生磁気ギャップと磁気ディスク間の隙間より小さく
なってしまい、装置の信頼性上好ましくない。In this embodiment, when the voltage is applied, the height of the end surface of the movable portion is made substantially the same as the height of the step bearing surface. good. If it protrudes from the center pad 10, the gap between the end face of the movable portion and the magnetic disk becomes smaller than the gap between the recording / reproducing magnetic gap and the magnetic disk, which is not preferable in terms of the reliability of the apparatus.
【0027】さらに本実施例では、記録・再生時は印加
電圧をゼロとし、記録・再生を行わない時に電圧を印加
するようにしているが、可動部には常時バイアス電圧を
加えておき、記録・再生時は設定したバイアス電圧より
電圧を下げて可動部の長さを短くし、逆に記録・再生を
行わない時はバイアス電圧より更に電圧を上げて可動部
の長さを長くするようにしても構わない。Further, in the present embodiment, the applied voltage is set to zero during recording / reproducing and the voltage is applied when recording / reproducing is not performed.・ During playback, lower the voltage than the set bias voltage to shorten the length of the movable part. Conversely, when not recording / reproducing, increase the voltage further than the bias voltage to increase the length of the movable part. It does not matter.
【0028】さらに本実施例では、可動部5としてバル
クのピエゾ素子を使用したが、薄膜形成プロセスを利用
して形成した薄膜ピエゾ素子を用いても良い。また、ピ
エゾ素子に限らず矢印A方向に伸縮する機構で負圧力の
大きさを制御できるものであれば何ら構わない。Further, in this embodiment, a bulk piezo element is used as the movable portion 5, but a thin film piezo element formed by using a thin film forming process may be used. In addition, not limited to the piezo element, any mechanism can be used as long as the magnitude of the negative pressure can be controlled by a mechanism that expands and contracts in the direction of arrow A.
【0029】図6は本発明の効果を具体的に説明する図
である。可動部5が負圧溝面9と同一面にある場合と、
負圧溝面9から500nmだけ飛び出した位置にある場
合の浮上量を、2.5インチディスク条件で計算した結
果である。記録・再生時、すなわち可動部5への印加電
圧がゼロの場合の浮上量は9nmであり、この時の負圧
力は3.3gである。一方、記録・再生を行わない時、
すなわち可動部へ電圧が印加された場合の浮上量は20
nmであり、負圧力は2.9gである。すなわち本実施
例では、可動部5を500nm伸縮させることにより負
圧力の大きさを0.4gf増減させ、浮上量を11nm
変化させることができる。FIG. 6 is a diagram specifically illustrating the effect of the present invention. When the movable part 5 is on the same plane as the negative pressure groove face 9;
This is the result of calculating the flying height at a position protruding from the negative pressure groove surface 9 by 500 nm under a 2.5-inch disk condition. At the time of recording / reproduction, that is, when the voltage applied to the movable portion 5 is zero, the flying height is 9 nm, and the negative pressure at this time is 3.3 g. On the other hand, when not performing recording / playback,
That is, the flying height when a voltage is applied to the movable part is 20
nm and the negative pressure is 2.9 g. That is, in the present embodiment, the magnitude of the negative pressure is increased or decreased by 0.4 gf by expanding or contracting the movable part 5 by 500 nm, and the floating amount is set to 11 nm.
Can be changed.
【0030】図7は本発明による負圧スライダ1とサス
ペンション20を組み込んだ磁気ディスク装置26の概
略構成を示す図である。本発明により記録・再生時のみ
浮上量を低下させ、記録・再生を行わない時は浮上量を
上げることができ、磁気ディスク装置の大容量化と高信
頼性化を同時に実現することが出来る。FIG. 7 is a diagram showing a schematic configuration of a magnetic disk drive 26 incorporating the negative pressure slider 1 and the suspension 20 according to the present invention. According to the present invention, the flying height can be reduced only during recording / reproduction, and the flying height can be increased when recording / reproduction is not performed, so that the capacity and reliability of the magnetic disk device can be simultaneously increased.
【0031】[0031]
【発明の効果】以上説明したように本発明によれば、簡
単な構成で浮上量を調整でき、記録・再生時のみ浮上量
を狭小化することで、高記録密度化と高信頼性を両立す
ることができるという効果がある。As described above, according to the present invention, the flying height can be adjusted with a simple structure, and the flying height is reduced only during recording / reproducing, thereby achieving both high recording density and high reliability. There is an effect that can be.
【図1】本発明による負圧スライダの斜視図である。FIG. 1 is a perspective view of a negative pressure slider according to the present invention.
【図2】本発明による負圧スライダを裏面から見た平面
図である。FIG. 2 is a plan view of the negative pressure slider according to the present invention as viewed from the back surface.
【図3】本発明による負圧スライダとサスペンションの
接続方法を示す斜視図である。FIG. 3 is a perspective view showing a method of connecting a negative pressure slider and a suspension according to the present invention.
【図4】記録・再生時の本発明による負圧スライダの側
面図である。FIG. 4 is a side view of the negative pressure slider according to the present invention during recording / reproduction.
【図5】記録・再生を行っていない時の本発明による負
圧スライダの側面図である。FIG. 5 is a side view of the negative pressure slider according to the present invention when recording / reproduction is not performed.
【図6】本発明の負圧スライダの記録・再生時と非記録
・再生時の浮上量と負圧力の違いを説明する図である。FIG. 6 is a diagram illustrating the difference between the flying height and negative pressure during recording / reproduction and non-recording / reproduction of the negative pressure slider of the present invention.
【図7】本発明による負圧スライダとサスペンションを
有する磁気ディスク装置の概略図である。FIG. 7 is a schematic diagram of a magnetic disk drive having a negative pressure slider and a suspension according to the present invention.
1…負圧スライダ、2…空気流入端、3…空気流出端、
4…浮上面、5…可動部、6、7、…流入端パッド、8
…ステップ軸受け面、9…負圧溝面、10…センタパッ
ド、11…ステップ軸受け面、12…再生磁気ギャッ
プ、13…記録磁気ギャップ、14…導電層、15…コ
イル、16…導体、17…スライダの電極パッド、18
a、18b…サスペンションの電極パッド、19a、1
9b…導体、20…サスペンション、21、22導線、
23a、23b…可動部の電極パッド、24…導線、2
5…磁気ディスク、26…磁気ディスク装置。1: negative pressure slider, 2: air inlet end, 3: air outlet end,
4 air bearing surface, 5 movable part, 6, 7, inflow end pad, 8
... step bearing surface, 9 ... negative pressure groove surface, 10 ... center pad, 11 ... step bearing surface, 12 ... reproduction magnetic gap, 13 ... recording magnetic gap, 14 ... conductive layer, 15 ... coil, 16 ... conductor, 17 ... Slider electrode pad, 18
a, 18b: Suspension electrode pads, 19a, 1
9b: conductor, 20: suspension, 21, 22 conductor,
23a, 23b: electrode pad of movable part, 24: conductive wire, 2
5 ... magnetic disk, 26 ... magnetic disk device.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 松本 真明 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージ事業部内 Fターム(参考) 5D042 NA02 PA01 PA05 QA01 QA10 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Masaaki Matsumoto 2880 Kozu, Odawara-shi, Kanagawa F-term in the Storage Division, Hitachi, Ltd. F-term (reference) 5D042 NA02 PA01 PA05 QA01 QA10
Claims (10)
て、前記負圧スライダの空気流出端に前記スライダの高
さ方向に伸縮可能な可動部を有し、前記可動部が伸長し
た時に、前記可動部の端面が前記負圧スライダの浮上面
より引っ込んでいることを特長とする負圧スライダ。1. A negative pressure slider provided with a magnetic head, comprising: a movable portion that can expand and contract in a height direction of the slider at an air outflow end of the negative pressure slider; A negative pressure slider, wherein an end face of the movable portion is recessed from a floating surface of the negative pressure slider.
て、前記負圧スライダの空気流出端に前記スライダの高
さ方向に伸縮可能な可動部を有し、前記可動部が伸長し
た時に、前記可動部の端面が前記負圧スライダの浮上面
より引っ込んでおり、前記可動部が伸長していない時
は、前記可動部の端面は前記負圧スライダの負圧溝面と
略同一面にあることを特長とする負圧スライダ。2. A negative pressure slider provided with a magnetic head, comprising: a movable portion that can expand and contract in a height direction of the slider at an air outflow end of the negative pressure slider; When the end surface of the movable portion is retracted from the floating surface of the negative pressure slider and the movable portion is not extended, the end surface of the movable portion is substantially flush with the negative pressure groove surface of the negative pressure slider. A negative pressure slider characterized by the following.
て、前記負圧スライダの空気流出端に前記スライダの高
さ方向に伸縮可能な可動部を有し、前記可動部が伸長し
た時に、前記可動部の端面が前記負圧スライダの浮上面
より引っ込んでおり、前記可動部が伸長していない時
に、前記可動部の端面は前記負圧スライダの負圧溝面と
略同一面にあり、かつ前記磁気ヘッドが記録・再生を行
うことを特長とする負圧スライダ。3. A negative pressure slider provided with a magnetic head, wherein the negative pressure slider has a movable portion at the air outflow end thereof which can expand and contract in the height direction of the slider, and when the movable portion is extended, The end surface of the movable portion is retracted from the floating surface of the negative pressure slider, and when the movable portion is not extended, the end surface of the movable portion is substantially flush with the negative pressure groove surface of the negative pressure slider, A negative pressure slider characterized in that the magnetic head performs recording / reproduction.
って、前記可動部がバルクのピエゾ素子であることを特
長とする負圧スライダ。4. The negative pressure slider according to claim 1, wherein said movable portion is a bulk piezo element.
って、前記可動部が薄膜のピエゾ素子であることを特長
とする負圧スライダ。5. The negative pressure slider according to claim 1, wherein said movable portion is a thin-film piezo element.
って、前記可動部の伸縮が電圧のオン・オフで制御され
ていることを特長とする負圧スライダ。6. The negative pressure slider according to claim 1, wherein expansion and contraction of the movable portion is controlled by turning on and off a voltage.
いて、磁気ヘッドの電極パッドが浮上面とは反対の面内
に形成されたことを特長とする負圧スライダ。7. The negative pressure slider according to claim 1, wherein the electrode pad of the magnetic head is formed in a surface opposite to the air bearing surface.
いて、前記負圧スライダと可動部の間に導電層が形成さ
れていることを特長とする負圧スライダ。8. The negative pressure slider according to claim 1, wherein a conductive layer is formed between the negative pressure slider and the movable part.
前記負圧スライダに荷重を付加するサスペンションから
なるヘッド・サスペンション・アッセンブリーにおい
て、前記可動部へ電圧を印加するための電気的接続と、
前記磁気ヘッドが記録・再生を行うための電気的接続
が、全て前記サスペンション上に形成された導電路を用
いてなされたことを特長とするヘッド・サスペンション
・アッセンブリー。9. A negative pressure slider according to claim 1, wherein:
In a head suspension assembly including a suspension for applying a load to the negative pressure slider, an electrical connection for applying a voltage to the movable portion;
A head suspension assembly characterized in that all electrical connections for recording / reproducing by the magnetic head are made using conductive paths formed on the suspension.
る磁気ディスク装置。10. A magnetic disk drive having the negative pressure slider according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001147207A JP2002343049A (en) | 2001-05-17 | 2001-05-17 | Negative pressure slider having floating height regulating mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001147207A JP2002343049A (en) | 2001-05-17 | 2001-05-17 | Negative pressure slider having floating height regulating mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2002343049A true JP2002343049A (en) | 2002-11-29 |
Family
ID=18992726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001147207A Pending JP2002343049A (en) | 2001-05-17 | 2001-05-17 | Negative pressure slider having floating height regulating mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002343049A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006085774A (en) * | 2004-09-14 | 2006-03-30 | Shinka Jitsugyo Kk | Method of detecting slider floating state, and magnetic disk apparatus using the same |
JP2006114202A (en) * | 2004-09-14 | 2006-04-27 | Shinka Jitsugyo Kk | Magnetic head assembly, magnetic disk apparatus and attitude control method of magnetic head slider |
US7180707B2 (en) * | 2003-02-25 | 2007-02-20 | Tdk Corporation | Thin-film magnetic head, head gimbal assembly, and hard disk drive |
US7369349B2 (en) | 2005-09-02 | 2008-05-06 | Hitachi Global Storage Technologies Netherlands B.V. | Data storage device with heater, and control method therefor involving different control modes |
US7385777B2 (en) | 2005-09-02 | 2008-06-10 | Hitachi Global Storage Technologies Netherlands B.V. | Data storage device with heater, and control method therefor with timing control |
US7446970B2 (en) * | 2004-09-14 | 2008-11-04 | Sae Magnetics (H.K.) Ltd. | Magnetic head assembly, magnetic disk drive and posture control method for magnetic head slider |
US7525766B2 (en) | 2004-02-19 | 2009-04-28 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head slider with groove formed in reduced-width portion of trailing pad between head and trailing edge |
-
2001
- 2001-05-17 JP JP2001147207A patent/JP2002343049A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7180707B2 (en) * | 2003-02-25 | 2007-02-20 | Tdk Corporation | Thin-film magnetic head, head gimbal assembly, and hard disk drive |
US7525766B2 (en) | 2004-02-19 | 2009-04-28 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head slider with groove formed in reduced-width portion of trailing pad between head and trailing edge |
JP2006085774A (en) * | 2004-09-14 | 2006-03-30 | Shinka Jitsugyo Kk | Method of detecting slider floating state, and magnetic disk apparatus using the same |
JP2006114202A (en) * | 2004-09-14 | 2006-04-27 | Shinka Jitsugyo Kk | Magnetic head assembly, magnetic disk apparatus and attitude control method of magnetic head slider |
US7446970B2 (en) * | 2004-09-14 | 2008-11-04 | Sae Magnetics (H.K.) Ltd. | Magnetic head assembly, magnetic disk drive and posture control method for magnetic head slider |
US7369349B2 (en) | 2005-09-02 | 2008-05-06 | Hitachi Global Storage Technologies Netherlands B.V. | Data storage device with heater, and control method therefor involving different control modes |
US7385777B2 (en) | 2005-09-02 | 2008-06-10 | Hitachi Global Storage Technologies Netherlands B.V. | Data storage device with heater, and control method therefor with timing control |
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