JP2002341248A5 - - Google Patents

Claims (9)

In a microscope system capable of moving the objective lens for observing the observation object relative to the stage for placing the observation object in the optical axis direction,
Detecting means for detecting a contact state corresponding to non-contact and contact between the observation object and the objective lens, and outputting a signal according to the contact state;
Based on the output of the detection means, it is a determination means for determining that the contact state between the observation object and the objective lens has exceeded a predetermined value and outputting an overcontact signal. Threshold setting means for setting a threshold value as a judgment criterion for judgment, and a comparator for comparing the set threshold value with the output of the detection means, wherein the threshold value setting means is connected to the observation object. In a state where the objective lens is separated, a determination unit that resets a threshold value based on the output of the detection unit, and a relative movement of the stage and the objective lens in response to the overcontact signal Control means for controlling
A microscope system comprising: The determination means detects a first separation state in which the observation object and the objective lens are separated by a predetermined distance or more to generate a first separation state signal, and the objective lens for the observation object Comprising a state detection means for detecting a second separation state in which is focused and generating a second separation state signal;
The microscope according to claim 1, wherein the threshold value setting means resets the threshold value based on an output of the detection means in response to one of the first and second separation state signals. system. The threshold value setting means, when the first and second separation state signals are not generated for a predetermined period, returns the threshold value to a preset initial value after the lapse of the period. Item 3. The microscope system according to Item 2. The microscope system according to claim 1, wherein the detection unit includes a pressure sensor that detects a contact pressure corresponding to non-contact and contact between the observation object and the objective lens. The microscope system according to claim 1, wherein the detection unit includes a capacitance sensor that detects a capacitance corresponding to non-contact and contact between the observation object and the objective lens. The microscope system according to claim 5, wherein the objective lens has an end portion facing the observation object, and the capacitance sensor is provided at an end portion of the objective lens. The detection means includes a pressure sensor that detects a contact pressure corresponding to non-contact and contact between the observation object and the objective lens, and the initial value of the predetermined value depends on the thickness and conductivity of the sample. 2. The microscope system according to item 1, which is set in advance. In a microscope system provided with a stage control unit in which an objective lens for observing the observation object can be relatively moved in the optical axis direction with respect to the stage for placing the observation object,
A contact detection sensor that is attached to the tip of the objective lens and detects contact between the objective lens and the observation object;
Control means for controlling at least the stage control unit by a contact determination unit for determining a contact state between the objective lens and the observation object from a detection signal of the contact detection sensor;
A first memory and a second memory connected to the contact determination unit;
A value obtained by adding a constant pressurization amount to the first offset amount corresponding to the first output signal of the contact detection sensor for preventing over-contact is stored in the first memory as a first default value;
The threshold value is a value obtained by adding the constant pressurization amount to the output signal of the contact detection sensor in a state where the observation object and the objective lens are separated from each other, and the latest threshold value is stored in the second memory. Are stored in sequence at regular intervals.
In the stage control unit so as to be below the latest threshold stored in the second memory The microscope system, wherein the stage is controlled and controlled by the control means so that a contact pressure between the observation object and the contact detection sensor is not more than a certain level. The microscope system according to claim 1, wherein the first memory is a fixed memory, and the second memory is a variable memory.