JP2002341216A5 - - Google Patents
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- Publication number
- JP2002341216A5 JP2002341216A5 JP2001142813A JP2001142813A JP2002341216A5 JP 2002341216 A5 JP2002341216 A5 JP 2002341216A5 JP 2001142813 A JP2001142813 A JP 2001142813A JP 2001142813 A JP2001142813 A JP 2001142813A JP 2002341216 A5 JP2002341216 A5 JP 2002341216A5
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- optical
- tip
- retainers
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical Effects 0.000 claims 8
- 238000010894 electron beam technology Methods 0.000 claims 3
- 230000002093 peripheral Effects 0.000 claims 2
Claims (1)
中で前記複数の光学要素を収容可能な筒体であって、一端に前記筒体の中心軸線を中心とする同一円周上に外周縁を有するフランジ部を有し、前記電子線装置内の所定の位置に脱着可能に取り付けられるようになっている筒体と、
前記筒体内に収容された複数の前記光学要素と、
前記筒体に円周方向に等間隔に隔てて取り付けられた複数組の保持器であって、前記筒体の内周面より半径方向内側に突出可能な先端を有し、前記先端で前記光学要素を位置調整可能に保持する複数組の保持器と、
を組み合わせて備え、前記筒体内に前記光学要素を保持した状態で光学要素を加工可能にした電子線装置用の光学要素組立体。In an optical element assembly capable of setting an optical element with a predetermined positioning accuracy in an electron beam device,
A cylindrical body capable of accommodating the plurality of optical elements therein, having at one end a flange portion having an outer peripheral edge on the same circumference centered on a center axis of the cylindrical body, and inside the electron beam device. A tubular body adapted to be detachably attached to a predetermined position,
A plurality of the optical elements housed in the cylinder,
A plurality of sets of retainers attached to the cylinder at equal intervals in the circumferential direction, the retainers having a tip that can protrude radially inward from an inner peripheral surface of the cylinder, and the optical tip at the tip. A plurality of sets of retainers for holding the elements in an adjustable manner;
And an optical element assembly for an electron beam apparatus, wherein the optical element can be processed while holding the optical element in the cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001142813A JP3983013B2 (en) | 2001-05-14 | 2001-05-14 | Optical element assembly for electron beam apparatus, method for processing optical element assembly, and device manufacturing method using electron beam apparatus equipped with such optical element assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001142813A JP3983013B2 (en) | 2001-05-14 | 2001-05-14 | Optical element assembly for electron beam apparatus, method for processing optical element assembly, and device manufacturing method using electron beam apparatus equipped with such optical element assembly |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002341216A JP2002341216A (en) | 2002-11-27 |
| JP2002341216A5 true JP2002341216A5 (en) | 2004-12-16 |
| JP3983013B2 JP3983013B2 (en) | 2007-09-26 |
Family
ID=18989049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001142813A Expired - Lifetime JP3983013B2 (en) | 2001-05-14 | 2001-05-14 | Optical element assembly for electron beam apparatus, method for processing optical element assembly, and device manufacturing method using electron beam apparatus equipped with such optical element assembly |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3983013B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191204A (en) * | 2003-12-25 | 2005-07-14 | Kyocera Corp | Optical element assembling body, assembling method, and electron beam apparatus using the same |
| JP4614760B2 (en) * | 2004-12-24 | 2011-01-19 | 京セラ株式会社 | Electrostatic deflector and electron beam apparatus using the same |
| JP2010034075A (en) * | 2009-11-09 | 2010-02-12 | Kyocera Corp | Method of assembling optical element assembly |
| JP5789118B2 (en) | 2011-04-15 | 2015-10-07 | 津田駒工業株式会社 | Rotary joint device, machining method of rotary joint device, and spindle drive device for machine tool equipped with rotary joint device |
-
2001
- 2001-05-14 JP JP2001142813A patent/JP3983013B2/en not_active Expired - Lifetime
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