JP2002328201A - Optical member having antireflection film - Google Patents

Optical member having antireflection film

Info

Publication number
JP2002328201A
JP2002328201A JP2001130754A JP2001130754A JP2002328201A JP 2002328201 A JP2002328201 A JP 2002328201A JP 2001130754 A JP2001130754 A JP 2001130754A JP 2001130754 A JP2001130754 A JP 2001130754A JP 2002328201 A JP2002328201 A JP 2002328201A
Authority
JP
Japan
Prior art keywords
layer
refractive index
layers
silicon dioxide
optical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001130754A
Other languages
Japanese (ja)
Other versions
JP3545359B2 (en
Inventor
Takashi Mitsuishi
剛史 三石
Kenichi Niide
謙一 新出
Hitoshi Kamura
斉 嘉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP2001130754A priority Critical patent/JP3545359B2/en
Priority to AU57989/01A priority patent/AU756842B2/en
Priority to CA002355021A priority patent/CA2355021C/en
Priority to TW090120088A priority patent/TW569031B/en
Priority to KR10-2001-0051443A priority patent/KR100483679B1/en
Priority to CNB011328290A priority patent/CN1175284C/en
Priority to US09/939,664 priority patent/US6606196B2/en
Priority to HU0103482A priority patent/HUP0103482A2/en
Priority to AT01120616T priority patent/ATE349716T1/en
Priority to EP01120616A priority patent/EP1184685B8/en
Priority to PT01120616T priority patent/PT1184685E/en
Priority to ES01120616T priority patent/ES2277876T3/en
Priority to DE60125479T priority patent/DE60125479T2/en
Publication of JP2002328201A publication Critical patent/JP2002328201A/en
Application granted granted Critical
Publication of JP3545359B2 publication Critical patent/JP3545359B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an optical member in which an antireflection film is formed on a plastic substrate having good heat resistance. SOLUTION: The optical member has a plastic substrate and an antireflection film having the layer structure type of λ/4-λ/2-λ/4 or λ/4-λ/4-λ/2-λ/4 from the substrate side (wherein λ=500 nm). The λ/2 structure has a high refractive index layer and is an equivalent film to three or more layers having 1.80 to 2.40 refractive index. The layers with even numbers in the equivalent film are SiO2 layers.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プラスチック基板
に反射防止膜を有する光学部材に関し、特に、良好な耐
熱性を有する、プラスチック基板に反射防止膜を有する
光学部材に関する。
The present invention relates to an optical member having an anti-reflection film on a plastic substrate, and more particularly to an optical member having good heat resistance and having an anti-reflection film on a plastic substrate.

【0002】[0002]

【従来の技術】従来から、プラスチック基板に、反射防
止膜を形成した光学部材は良く知られている。その例と
して、特開平2−291501号公報には、二酸化チタ
ンを主成分とするλ/2の高屈折率層を有する反射防止膜
を形成した光学部材が開示されている。しかしながら、
一般的に、プラスチック基板に反射防止膜を設けた光学
部材は、蒸着時に加熱することができない等の理由で、
ガラス基板に反射防止膜を設けた光学部材と比較して耐
熱性が良好でない。そこで、更なる耐熱性を向上させた
プラスチック基板に反射防止膜を形成した光学部材が求
められていた。
2. Description of the Related Art Conventionally, optical members having an antireflection film formed on a plastic substrate are well known. For example, Japanese Patent Application Laid-Open No. 2-291501 discloses an optical member having an antireflection film having a high refractive index layer of λ / 2 containing titanium dioxide as a main component. However,
Generally, an optical member provided with an antireflection film on a plastic substrate cannot be heated at the time of vapor deposition.
Heat resistance is not good as compared with an optical member having an antireflection film provided on a glass substrate. Therefore, an optical member in which an antireflection film is formed on a plastic substrate having further improved heat resistance has been demanded.

【0003】[0003]

【発明が解決しようとする課題】本発明は前記の課題を
解決するためになされたもので、耐熱性が良好なプラス
チック基板に反射防止膜を有する光学部材を提供するこ
とにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide an optical member having an antireflection film on a plastic substrate having good heat resistance.

【0004】[0004]

【課題を解決するための手段】本発明者は、前記の課題
を解決すべく鋭意努力した結果、高屈折率層に、低屈折
率物質である二酸化ケイ素からなる層を利用して三層以
上の等価膜にするという斬新的な手段により、光学部材
の耐熱性が顕著に向上することを見出した。従来、λ/2
の高屈折率層は、反射防止特性及び生産効率性を考慮し
て、二酸化チタン、酸化ジルコニウム、酸化タンタルな
どの高屈折率蒸着物質を用いて一層構成とし、λ/2の高
屈折率層に、低屈折率物質である二酸化ケイ素からなる
層を設けることは、高屈折率層の屈折率を低下させ、反
射防止膜の反射防止特性を低下させる可能性が高いこと
から、このような構成は提案されていなかった。
As a result of the inventor's intensive efforts to solve the above-mentioned problems, the present inventors have found that three or more layers are formed on the high refractive index layer by using a layer made of silicon dioxide which is a low refractive index substance. It has been found that the novel means of forming an equivalent film significantly improves the heat resistance of the optical member. Conventionally, λ / 2
In consideration of anti-reflection properties and production efficiency, the high refractive index layer is made of a single layer using a high refractive index deposition material such as titanium dioxide, zirconium oxide, and tantalum oxide. Since the provision of a layer made of silicon dioxide, which is a low-refractive-index substance, reduces the refractive index of the high-refractive-index layer and is likely to reduce the antireflection properties of the antireflection film, such a configuration is preferred. Had not been proposed.

【0005】すなわち、本発明は、プラスチック基板
と、該プラスチック基板上に、基板側からλ/4−λ/2−
λ/4型またはλ/4−λ/4−λ/2−λ/4型(λ=500n
m) の反射防止膜とを有する光学部材であって、該λ/2
は、屈折率が1.80〜2.40である3層以上の等価膜であ
り、該等価膜の偶数層が二酸化ケイ素層である光学部材
を提供するものである。
That is, the present invention provides a plastic substrate and a λ / 4-λ / 2-
λ / 4 type or λ / 4-λ / 4-λ / 2-λ / 4 type (λ = 500n
m) and an antireflection film, wherein the λ / 2
Is an equivalent member having three or more layers having a refractive index of 1.80 to 2.40, and an even member of the equivalent film is a silicon dioxide layer.

【0006】[0006]

【発明の実施の形態】本発明において、λ/2の高屈折率
層を3層の等価膜にすれば、良好な耐熱性及び反射防止
特性を有する光学部材が得られる。さらに、良好な耐熱
性及び反射防止特性を得る場合には、3層を超える等価
膜にすればよい。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, if the high refractive index layer of λ / 2 is made of three equivalent films, an optical member having good heat resistance and antireflection characteristics can be obtained. Furthermore, in order to obtain good heat resistance and antireflection characteristics, an equivalent film having more than three layers may be used.

【0007】また、前記λ/2の等価膜における奇数層
は、良好な耐熱性、反射率特性を得る観点から、高屈折
率蒸着物質として知られている酸化チタン、酸化ジルコ
ニウム、酸化タンタル及び酸化ニオブ等の蒸着物質を含
有する層が好ましく、特に、TiO2 、Ta2 O5
及びNb2 O5 の中から選ばれた少なくとも1種
類の蒸着物質からなる層が好ましく、最も好ましくはN
b2 O5 の蒸着物質からなる層である。生産効率性
の観点で、奇数層は、全て同一膜組成にすることが好ま
しい。前記λ/2の高屈折率層の合成屈折率は、1.80〜2.
40の範囲であり、良好な物性を得るために、1.85〜2.25
の範囲が特に好ましく、この屈折率の範囲を満たすよう
λ/2の高屈折率層の膜構成がなされる。
The odd-numbered layers in the λ / 2 equivalent film are made of titanium oxide, zirconium oxide, tantalum oxide, and titanium oxide known as high-refractive-index deposition materials from the viewpoint of obtaining good heat resistance and reflectance characteristics. A layer containing a deposition material such as niobium is preferable, and in particular, TiO2, Ta2O5
And a layer composed of at least one kind of deposition material selected from Nb2O5, and most preferably N2O5.
b2 O5 is a layer made of a deposition material. From the viewpoint of production efficiency, it is preferable that all the odd layers have the same film composition. The combined refractive index of the high refractive index layer of λ / 2 is 1.80 to 2.
It is in the range of 40, and to obtain good physical properties, 1.85 to 2.25
Is particularly preferable, and the film configuration of the high refractive index layer of λ / 2 is made so as to satisfy this refractive index range.

【0008】本発明において、λ/2の高屈折率層上に形
成されるλ/4層は、二酸化ケイ素層が形成される。λ/2
の高屈折率層の下に形成されるλ/4層は、良好な反射防
止特性及び耐熱性を得るために2層以上の等価膜にする
ことが好ましい。その膜構成は、二酸化ケイ素層と、酸
化チタン、酸化ジルコニウム、酸化タンタル及び酸化ニ
オブ等の高屈折率蒸着物質よりなる層からなる2層等価
膜、二酸化ケイ素層と、酸化ニオブよりなる層との2層
等価膜が好ましい。また、生産効率の点から、前記λ/4
の等価膜を作製する蒸着原料と、前記λ/2の等価膜を作
製する蒸着原料とは同じ蒸着原料を用いると好ましい。
In the present invention, a silicon dioxide layer is formed as the λ / 4 layer formed on the λ / 2 high refractive index layer. λ / 2
The λ / 4 layer formed below the high refractive index layer is preferably an equivalent film of two or more layers in order to obtain good antireflection characteristics and heat resistance. The film configuration is composed of a silicon dioxide layer, a two-layer equivalent film composed of a layer composed of a high-refractive-index deposition material such as titanium oxide, zirconium oxide, tantalum oxide, and niobium oxide, a silicon dioxide layer, and a layer composed of niobium oxide. A two-layer equivalent film is preferred. Further, from the viewpoint of production efficiency, the λ / 4
It is preferable to use the same vapor deposition material for producing the equivalent film as described above and the vapor deposition material for producing the λ / 2 equivalent film.

【0009】この酸化ニオブ層を形成するには、100%
の酸化ニオブを蒸着物質として使用してイオンアシスト
法により形成する方法又は酸化ニオブ、酸化ジルコニウ
ム及び酸化イットリウムの粉末、又は更に酸化アルミニ
ウムを加えた粉末を焼結し、得られた焼結体から混合酸
化物の蒸気を発生させ、発生した蒸発物を基板上に析出
させる方法で行うと好ましい。また、蒸発物を基板上に
析出させる方法では、焼結体の混合割合は、良好な膜物
性を得るために、蒸着組成物全量を基準にして、酸化ニ
オブが60〜90重量%、酸化ジルコニウムが5〜20
重量%、酸化イットリウムが5〜35重量%であること
が好ましい。さらに、酸化アルミニウムを加える場合に
は、酸化ニオブ、酸化ジルコニウム及び酸化イットリウ
ム合計に対して0.3〜7.5重量%を添加することが
好ましい。
To form this niobium oxide layer, 100%
Of niobium oxide as a deposition material by an ion-assisted method or by sintering powder of niobium oxide, zirconium oxide and yttrium oxide, or further adding aluminum oxide, and mixing from the obtained sintered body It is preferable to use a method in which a vapor of an oxide is generated and the generated evaporant is deposited on a substrate. In the method of depositing the evaporant on the substrate, the mixing ratio of the sintered body is such that niobium oxide is 60 to 90% by weight and zirconium oxide is based on the total amount of the deposition composition in order to obtain good film properties. Is 5-20
% By weight and yttrium oxide is preferably from 5 to 35% by weight. Further, when adding aluminum oxide, it is preferable to add 0.3 to 7.5% by weight based on the total of niobium oxide, zirconium oxide and yttrium oxide.

【0010】本発明の光学部材は、プラスチック基板と
反射防止膜との間に下地層が設けられていると好まし
く、下地層の材質としては、二酸化ケイ素層または金属
ニオブが好ましく、金属ニオブが特に好ましい。また、
膜厚としては、二酸化ケイ素層の場合は、膜強度等の点
から0.1 λ〜5λで、金属ニオブの場合は、膜の透明性
確保等の点から0.005 λ〜0.015 λが好ましい。下地層
の材質を金属ニオブとすると、プラスチック基板と反射
防止膜の密着性、耐熱性、耐衝撃性及び耐摩耗性に優
れ、金属特有の吸収率が少ない等の利点を有している。
この金属ニオブ(Nb層)の形成は、イオンアシスト法で
行なうことが好ましい。前記イオンアシスト法を実施す
る際によるイオン化ガスは、成膜中の酸化防止の点から
アルゴン(Ar)を用いるのが好ましい。これにより膜
質の安定と、光学式膜厚計での制御が可能となる。
In the optical member of the present invention, it is preferable that an underlayer is provided between the plastic substrate and the antireflection film. As the material of the underlayer, a silicon dioxide layer or niobium metal is preferable, and niobium metal is particularly preferable. preferable. Also,
In the case of a silicon dioxide layer, the thickness is preferably from 0.1 λ to 5 λ from the viewpoint of film strength and the like. When the material of the underlayer is made of niobium metal, it has advantages such as excellent adhesion between the plastic substrate and the antireflection film, excellent heat resistance, impact resistance, and abrasion resistance, and low absorptivity specific to metal.
The formation of the metal niobium (Nb layer) is preferably performed by an ion assist method. It is preferable to use argon (Ar) as an ionization gas for performing the ion assist method from the viewpoint of preventing oxidation during film formation. This makes it possible to stabilize the film quality and control with an optical film thickness meter.

【0011】さらに、プラスチック基板と下地層との密
着性確保及び蒸着物質の初期膜形成状態の均一化を図る
ために、下地層を形成する前にイオン銃前処理を行なっ
てもよい。イオン銃前処理におけるイオン化ガスは 酸
素、アルゴンなどを用いることができ、出力で好ましい
範囲は、加速電圧が50V〜200V、加速電流が50
mA〜150mAである。
Further, in order to ensure the adhesion between the plastic substrate and the underlayer and to make the state of forming the initial film of the deposition material uniform, an ion gun pretreatment may be performed before the underlayer is formed. Oxygen, argon, or the like can be used as the ionized gas in the ion gun pretreatment.
mA to 150 mA.

【0012】本発明の光学部材において、反射防止膜の
形成方法は、通常の真空蒸着法、イオンアシスト法等を
用いることができる。本発明の光学部材に用いるプラス
チック基板としては、特に限定されず、例えば、メチル
メタクリレート単独重合体、メチルメタクリレートと1
種以上の他のモノマーとの共重合体、ジエチレングリコ
ールビスアリルカーボネート単独重合体、ジエチレング
リコールビスアリルカーボネートと1種以上の他のモノ
マーとの共重合体、イオウ含有共重合体、ハロゲン含有
共重合体、ポリカーボネート、ポリスチレン、ポリ塩化
ビニル、不飽和ポリエステル、ポリエチレンテレフタレ
ート、ポリウレタン等が挙げられる。
In the optical member of the present invention, as a method for forming the antireflection film, a usual vacuum deposition method, an ion assist method, or the like can be used. The plastic substrate used for the optical member of the present invention is not particularly limited. For example, methyl methacrylate homopolymer, methyl methacrylate and 1
Copolymers with at least one other monomer, diethylene glycol bisallyl carbonate homopolymer, copolymers of diethylene glycol bisallyl carbonate with one or more other monomers, sulfur-containing copolymers, halogen-containing copolymers, Examples thereof include polycarbonate, polystyrene, polyvinyl chloride, unsaturated polyester, polyethylene terephthalate, and polyurethane.

【0013】本発明の光学部材は、前記プラスチック基
板と前記下地層との間に、硬化被膜を有してもよい。硬
化被膜としては、通常、金属酸化物コロイド粒子と有機
ケイ素化合物よりなるコ−ティング組成物を硬化たもの
が一般的に用いられる。前記金属酸化物コロイド粒子と
しては、例えば、酸化タングステン(WO3)、酸化亜
鉛(ZnO)、酸化ケイ素(SiO2)、酸化アルミニ
ウム(Al2O3)、酸化チタニウム(TiO2)、酸化
ジルコニウム(ZrO2)、酸化スズ(SnO2)、酸化
ベリリウム(BeO)又は酸化アンチモン(Sb2 O
5)等が挙げられ、単独又は2種以上を併用することが
できる。
The optical member of the present invention may have a cured film between the plastic substrate and the underlayer. As the cured coating, a cured coating of a metal oxide colloid particle and an organosilicon compound is generally used. As the metal oxide colloid particles, for example, tungsten oxide (WO3), zinc oxide (ZnO), silicon oxide (SiO2), aluminum oxide (Al2O3), titanium oxide (TiO2), zirconium oxide (ZrO2), tin oxide ( SnO2), beryllium oxide (BeO) or antimony oxide (Sb2O)
5) and the like, and these can be used alone or in combination of two or more.

【0014】本発明の光学部材において、好ましい態様
としては、例えば以下に示す構成(a)〜(c)が挙げ
られる。
In the optical member of the present invention, preferred embodiments include, for example, the following structures (a) to (c).

【表1】 [Table 1]

【0015】[0015]

【表2】 [Table 2]

【0016】[0016]

【表3】 [Table 3]

【0017】[0017]

【実施例】以下、実施例により本発明をさらに詳細に説
明するが、本発明はこれらの実施例に限定されるもので
はない。なお、実施例1〜6における光学部材は、以下
に示す試験方法により、諸物性を測定した。 (1)視感透過率 プラスチックレンズの視感透過率Yは、両面に反射防止
膜を有するプラスチックレンズをサンプルとして、日立
分光光度計U−3410を用い測定した。 (2)視感反射率 プラスチックレンズの視感反射率Zは、両面に反射防止
膜を有するプラスチックレンズをサンプルとして、日立
分光光度計U−3410を用い測定した。 (3)密着性 プラスチックレンズの表面に剃刀にて1mm×1mmの
升目を100個作成し、升目上にセロハンテープを貼
り、一気にテープをはがし、残った升目の数で評価し
た。表中、残った升目の数/100で記載した。 (4)耐摩耗性 プラスチックレンズの表面にスチールウールにて1kg
f/cm2 の荷重をかけ、20ストローク擦り、表面状
態により以下の基準で評価した。 UA:殆ど傷なし A:細い傷数本あり B:細い傷多数、太い傷数本あり C:細い傷多数、太い傷多数あり D:殆ど膜はげ状態
EXAMPLES The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples. The physical properties of the optical members in Examples 1 to 6 were measured by the following test methods. (1) Luminous transmittance The luminous transmittance Y of the plastic lens was measured using a plastic lens having an antireflection film on both surfaces as a sample and using a Hitachi spectrophotometer U-3410. (2) Luminous Reflectance The luminous reflectance Z of the plastic lens was measured using a Hitachi spectrophotometer U-3410 using a plastic lens having an antireflection film on both surfaces as a sample. (3) Adhesion 100 squares of 1 mm x 1 mm were formed on the surface of the plastic lens with a razor, a cellophane tape was stuck on the squares, the tape was removed at a stretch, and the number of remaining squares was evaluated. In the table, it is described by the number of remaining cells / 100. (4) Abrasion resistance 1kg of steel wool on the surface of plastic lens
A load of f / cm 2 was applied, rubbed for 20 strokes, and evaluated according to the following criteria according to the surface condition. UA: Almost no scratch A: Several fine scratches B: Many fine scratches, several thick scratches C: Many fine scratches, many thick scratches D: Almost peeling state

【0018】(5)耐熱性 プラスチックレンズをドライオーブンで1時間加熱し、
クラックの発生温度を測定した。加熱温度は、50℃よ
り始め、5℃づつ上げて、クラックを発生する温度を調
べた。 (6)耐アルカリ性 プラスチックレンズをNaOH水溶液10%に1時間浸
漬し、表面状態により以下の基準で評価した。 UA:殆ど変化なし A:点状の膜はげ数個あり B:点状の膜はげが全面にあり C:点状のはげが全面、面状のはげ数個あり D:殆ど全面膜はげ (7)耐衝撃性 中心厚2.0mmで、レンズ度数0.00のレンズを作
製してFDAで定められているドロップボールテストを
行い、○:合格、×:不合格とした。
(5) Heat resistance The plastic lens is heated in a dry oven for one hour,
The crack generation temperature was measured. The heating temperature was started from 50 ° C. and increased by 5 ° C. at a time, and the temperature at which cracks were generated was examined. (6) Alkali Resistance A plastic lens was immersed in a 10% NaOH aqueous solution for 1 hour, and evaluated according to the following criteria according to the surface condition. UA: Almost no change A: There are several point-like film bale B: Point-like film bale is on the entire surface C: Point-like bale is all over, there are several planar bale D: Almost all the film bale (7 ) Impact resistance A lens having a center thickness of 2.0 mm and a lens power of 0.00 was manufactured and subjected to a drop ball test defined by the FDA.

【0019】実施例1〜6基板A及びハ−ドコ−ト層A層の作製 ガラス製容器に、コロイダルシリカ(スノ−テックス−
40、日産化学)90重量部、有機ケイ素化合物のメチ
ルトリメトキシシラン81.6重量部、γ−グリシドキ
シプロピルトリメトキシシラン176重量部、0.5N
塩酸2.0重量部、酢酸20重量部、水90重量を加え
た液を、室温にて8時間攪拌後、室温にて16時間放置
して加水分解溶液を得た。この溶液に、イソプロピルア
ルコ−ル120重量部、n−ブチルアルコ−ル120重
量部、アルミニウムアセチルアセトン16重量部、シリ
コ−ン系界面活性剤0.2重量部、紫外線吸収剤0.1
重量部を加え、室温にて8時間攪拌後、室温にて24時
間熟成させコ−ティング液を得た。アルカリ水溶液で前
処理したプラスチックレンズ基板(素材:ジエチレング
リコ−ルビスアリルカ−ボネ−ト、屈折率1.50、中
心厚2.0mm、レンズ度数0.00、これを以下、
「基板A」という場合がある。)を、前記コーティング
液の中に浸漬させ、浸漬終了後、引き上げ速度20cm
/分で引き上げたプラスチックレンズを120℃で2時
間加熱して硬化膜を形成した。その後、表1〜6に記載
したイオン加速電圧、照射時間の条件でArガスを用い
て、イオン銃処理を行いイオンアシスト法にて硬化被膜
としてハードコート層(以下、「A層」と記載する場合
がある)を形成した。
Examples 1 to 6 Preparation of Substrate A and Hard Coat Layer A In a glass container, colloidal silica (Snotex®) was used.
40, Nissan Chemical) 90 parts by weight, 81.6 parts by weight of methyltrimethoxysilane as an organosilicon compound, 176 parts by weight of γ-glycidoxypropyltrimethoxysilane, 0.5N
A solution obtained by adding 2.0 parts by weight of hydrochloric acid, 20 parts by weight of acetic acid, and 90 parts by weight of water was stirred at room temperature for 8 hours, and then left at room temperature for 16 hours to obtain a hydrolysis solution. To this solution, 120 parts by weight of isopropyl alcohol, 120 parts by weight of n-butyl alcohol, 16 parts by weight of aluminum acetylacetone, 0.2 parts by weight of a silicone-based surfactant, and 0.1 part of an ultraviolet absorber
The mixture was stirred at room temperature for 8 hours and then aged at room temperature for 24 hours to obtain a coating liquid. Plastic lens substrate pretreated with an aqueous alkali solution (material: diethylene glycol bisallyl carbonate, refractive index 1.50, center thickness 2.0 mm, lens power 0.00,
It may be referred to as “substrate A”. ) Is immersed in the coating solution, and after the immersion, the lifting speed is 20 cm.
The heated plastic lens was heated at 120 ° C. for 2 hours to form a cured film. Thereafter, an ion gun treatment is performed using Ar gas under the conditions of the ion acceleration voltage and irradiation time described in Tables 1 to 6, and a hard coat layer (hereinafter, referred to as “A layer”) is formed as a cured film by an ion assist method. May be formed).

【0020】下地層及び反射防止膜の作製 次に、ハードコートA層の上に、表1〜3に示した条件
のイオンアシスト法にて、表1〜3に示した第1層〜第
8層からなる機能膜を形成し、プラスチックレンズを得
た。得られたプラスチックレンズについて上記(1)〜
(7)を評価し、それらの結果を表1〜6に示した。
尚、表中、λは照射光の波長で、λ=500nmを示
す。なお、実施例1〜6におけるλ/4及びλ/2の合成屈
折率は、表8に記載した。
Preparation of Underlayer and Antireflection Film Next, the first to eighth layers shown in Tables 1 to 3 were formed on the hard coat A layer by the ion assist method under the conditions shown in Tables 1 to 3. A functional film composed of layers was formed to obtain a plastic lens. About the obtained plastic lens, the above (1)-
(7) was evaluated, and the results are shown in Tables 1 to 6.
In the table, λ is the wavelength of the irradiation light, and λ = 500 nm. Table 8 shows the combined refractive index of λ / 4 and λ / 2 in Examples 1 to 6.

【0021】[0021]

【表4】 [Table 4]

【0022】[0022]

【表5】 [Table 5]

【0023】[0023]

【表6】 [Table 6]

【0024】実施例7〜24及び比較例1〜6 実施例7〜24及び比較例1〜6に関しては、以下の評
価方法で物性を評価した。 (1)蒸着組成物の溶融状態 蒸着時の溶融状態を次の基準で判定した。 UA:スプラッシュの発生が無い A:スプラッシュの発生が少ない B:スプラッシュが頻繁に発生する C:スプラッシュが常時発生する (2)微細粒子の付着状態 スプラッシュ等によるレンズ面の微細粒子の付着状態を
次の基準で判定した。 UA:全く認められず A:1〜5箇所以内 B:6〜10箇所 C:11箇所以上 (3)耐アルカリ性試験 NaOH10重量%水溶液にレンズを入れ、30分後、60
分後にその表面の膜ハゲやレンズ面の荒れの発生を以下
の基準にて判定した。 UA:点状ハゲがほとんどない A:全体的に小さな0.1mm以下の点状ハゲ又は直径0.3mm
程度の点状ハゲが少しある。 B:Aよりもハゲの密度が高く、大き目のハゲの割合が
高い C:全体的に0.3mm程度のハゲが占めるか、小さいハゲ
の密度が高い D:一目見て全体が白いと感じる程度にハゲが密に出て
いる。これ以下は全てDとする。 (4)耐擦傷性試験 ♯0000のスチールウールにより表面を往復回数で1
0回こすって耐擦傷性を次の基準で判定した。 UA:殆ど傷なし A:わずかに傷がつく B:多く傷がつく C:膜の脹れが生じる
Examples 7 to 24 and Comparative Examples 1 to 6 The physical properties of Examples 7 to 24 and Comparative Examples 1 to 6 were evaluated by the following evaluation methods. (1) Melting state of vapor deposition composition The melting state at the time of vapor deposition was determined according to the following criteria. UA: No splash generated A: Less splash generated B: Splash generated frequently C: Splash constantly generated (2) Attachment state of fine particles The attached state of fine particles on the lens surface due to splash etc. is as follows. Judgment was made based on the following criteria. UA: Not recognized at all A: Within 1 to 5 places B: 6 to 10 places C: 11 or more places (3) Alkali resistance test A lens was placed in a 10% by weight aqueous solution of NaOH, and after 30 minutes, 60
After one minute, the occurrence of film baldness on the surface and roughness of the lens surface was determined according to the following criteria. UA: almost no point bald A: small point bald of 0.1 mm or less overall or 0.3 mm in diameter
There is a little point baldness. B: The bald density is higher than that of A, and the ratio of large baldness is higher. C: The bald of about 0.3 mm occupies the entirety or the density of small balds is higher. D: The whole looks white at first glance. Bald is coming out densely. Below this is all D. (4) Scratch resistance test 1 surface reciprocation with # 0000 steel wool
Rubbing was performed 0 times and the scratch resistance was determined according to the following criteria. UA: Almost no damage A: Slightly scratched B: Many scratches C: Bloat of membrane occurs

【0025】(5)密着性試験 JIS―Z―1522に従い、ゴバン目を10×10個
作りセロファン粘着テープにより剥離試験を3回行い、
残ったゴバン目を数えた。 (6)視感反射率 日立製作所製U−3410型自記分光光度計を用い、視
感反射率Yを求めた。 (7)視感透過率 日立製作所製U−3410型自記分光光度計を用い、視
感透過率Zを求めた。 (8)吸収率 100%より視感透過率と視感反射率を引いた値を吸収
率として求めた。 (9)耐熱性試験 蒸着膜形成直後の反射防止膜を有する光学部材をオーブ
ンで1時間加熱し、クラックの発生の有無を調べた。加
熱温度は、50℃より始め、5℃づつ上げて、クラック
が発生する温度を調べた。また、経時的な耐熱性試験
を、蒸着膜形成直後の反射防止膜を有する光学部材を2
ケ月間屋外暴露し、その後、前記した耐熱性試験と同じ
方法により評価を行った。
(5) Adhesion test According to JIS-Z-1522, 10 × 10 gobangs are made and a peeling test is performed three times with a cellophane adhesive tape.
The remaining Goban eyes were counted. (6) Luminous Reflectance The luminous reflectance Y was determined using a U-3410 type self-recording spectrophotometer manufactured by Hitachi, Ltd. (7) Luminous transmittance The luminous transmittance Z was determined using a U-3410 type self-recording spectrophotometer manufactured by Hitachi, Ltd. (8) Absorbance The value obtained by subtracting the luminous transmittance and the luminous reflectance from 100% was determined as the absorptivity. (9) Heat resistance test The optical member having the antireflection film immediately after the formation of the vapor-deposited film was heated in an oven for 1 hour, and the presence or absence of cracks was examined. The heating temperature was started from 50 ° C. and increased in steps of 5 ° C., and the temperature at which cracks occurred was examined. In addition, a heat resistance test with time was performed on the optical member having the antireflection film immediately after the formation of the deposited film.
It was exposed outdoors for a period of five months, and then evaluated by the same method as the heat resistance test described above.

【0026】基板A及びハ−ドコ−トA層の作製 実施例1〜6と同様の方法で基板A及びハ−ドコ−ト層
Aを作製した。基板B及びハ−ドコ−トB層の作製 ガラス製容器に、有機ケイ素化合物のγ−グリシドキシ
プロピルメトキシシラン142重量部を加え、撹拌しな
がら、0.01N塩酸1.4重量部、水32重量部を滴
下した。滴下終了後、24時間撹拌を行いγ−グリシド
キシプロピルトリメトキシシランの加水分解溶液を得
た。この溶液に、酸化第二スズ−酸化ジルコニウム複合
体ゾル(メタノール分散、全金属酸化物31.5重量
%、平均粒子径10〜15ミリミクロン)460重量
部、エチルセロソルブ300重量部、さらに滑剤として
シリコーン系界面活性剤0.7重量部、硬化剤としてア
ルミニウムアセチルアセトネート8重量部を加え、充分
に撹拌した後、濾過を行ってコーティング液を得た。さ
らに、アルカリ水溶液で前処理したプラスチックレンズ
基板〔HOYA(株)製、眼鏡用プラスチックレンズ
(商品名:EYAS)、屈折率1.60以下、この基板
を「基板B」と言う場合がある。〕を、前記コーティン
グ液の中に浸漬させ、浸漬終了後、引き上げ速度20c
m/分で引き上げたプラスチックレンズを120℃で2
時間加熱してハ−ドコ−ト層(以下この層を「B層」と
言う場合がある)を形成した。
Preparation of Substrate A and Hardcoat A Layer A substrate A and a hardcoat layer A were prepared in the same manner as in Examples 1 to 6. Preparation of Substrate B and Hard Coat B Layer To a glass container, 142 parts by weight of an organosilicon compound, γ-glycidoxypropylmethoxysilane, are added, with stirring, 1.4 parts by weight of 0.01 N hydrochloric acid, water 32 parts by weight were added dropwise. After completion of the dropwise addition, the mixture was stirred for 24 hours to obtain a hydrolysis solution of γ-glycidoxypropyltrimethoxysilane. In this solution, 460 parts by weight of a stannic oxide-zirconium oxide composite sol (methanol dispersion, 31.5% by weight of all metal oxides, average particle diameter of 10 to 15 millimicrons), 300 parts by weight of ethyl cellosolve, and as a lubricant 0.7 parts by weight of a silicone-based surfactant and 8 parts by weight of aluminum acetylacetonate as a curing agent were added, sufficiently stirred, and then filtered to obtain a coating liquid. Furthermore, a plastic lens substrate pretreated with an alkaline aqueous solution [HOYA CORPORATION, plastic lens for eyeglasses (trade name: EYAS), refractive index 1.60 or less, this substrate may be referred to as “substrate B”. Is immersed in the coating solution, and after the immersion, a lifting speed of 20 c
Plastic lens raised at m / min.
Heating was performed for a time to form a hard coat layer (hereinafter, this layer may be referred to as "B layer").

【0027】基板C及びハ−ドコ−トC層の作製 ガラス製容器に有機ケイ素化合物のγ−グリシドキシプ
ロピルトリメトキシシラン100重量部を加え、撹拌し
ながら0.01規定塩酸1.4重量部、水23重量部を
添加した。その後、24時間撹拌を行いγ−グリシドキ
シプロピルトリメトキシシランの加水分解物を得た。次
に微粒子状無機物として、酸化チタン、酸化ジルコニウ
ム、酸化ケイ素を主体とする複合体微粒子ゾル(メタノ
ール分散、全固形分20重量%、平均粒子径5〜15ミ
リミクロン、核微粒子の原子比Ti/Si=10、被覆
部分の核部分に対する重量比0.25)を用い、その2
00重量部をエチルセロソルブ100重量部、滑剤とし
てのシリコーン系界面活性剤0.5重量部、硬化剤とし
てのアルミニウムアセチルアセトネート3.0重量部と
混合した後、前述したγ−グリシドキシプロピルトリメ
トキシシランの加水分解物に加え、充分に撹拌した後、
濾過を行ってコーティング液を作製した。さらに、アル
カリ水溶液で前処理したプラスチックレンズ基板〔HO
YA(株)製、眼鏡用プラスチックレンズ(商品名:テ
スラリッド)、屈折率1.71、以下この基板を「基板
C」と言う場合がある〕を、前述の方法で作製したコー
ティング液の中に浸漬させ、浸漬終了後、引き上げ速度
20cm/分で引き上げたプラスチックレンズを120
℃で2時間加熱してハードコート層(以下、このハ−ド
コ−ト層を「C層」と言う場合がある)を形成した。
Preparation of Substrate C and Hard Coat C Layer 100 parts by weight of the organosilicon compound γ-glycidoxypropyltrimethoxysilane was added to a glass container, and 1.4 parts by weight of 0.01 N hydrochloric acid was added with stirring. And 23 parts by weight of water. Thereafter, stirring was carried out for 24 hours to obtain a hydrolyzate of γ-glycidoxypropyltrimethoxysilane. Next, as a particulate inorganic substance, a composite particulate sol mainly composed of titanium oxide, zirconium oxide and silicon oxide (methanol dispersion, total solid content 20% by weight, average particle diameter 5 to 15 millimicron, atomic ratio Ti / Si = 10, and the weight ratio of the coated portion to the core portion was 0.25).
After mixing 00 parts by weight with 100 parts by weight of ethyl cellosolve, 0.5 part by weight of a silicone surfactant as a lubricant, and 3.0 parts by weight of aluminum acetylacetonate as a curing agent, the above-mentioned γ-glycidoxypropyl was mixed. After adding to the hydrolyzate of trimethoxysilane and stirring thoroughly,
Filtration was performed to prepare a coating liquid. Furthermore, a plastic lens substrate [HO, pretreated with an aqueous alkali solution]
A plastic lens for eyeglasses (trade name: Teslalid), manufactured by YA Corporation, having a refractive index of 1.71, hereinafter this substrate is sometimes referred to as “substrate C”] was used in the coating liquid prepared by the method described above. After immersion, the plastic lens pulled up at a pulling speed of 20 cm / min.
C. for 2 hours to form a hard coat layer (hereinafter, this hard coat layer may be referred to as "C layer").

【0028】下地層及び反射防止膜の作製 次に、ハードコートA層、B層又はC層の上に、表4〜
表7に示した条件で、表4〜表7に示した多層膜からな
る機能膜を形成し、プラスチックレンズを得た。得られ
たプラスチックレンズについて上記(1)〜(7)を評
価し、それらの結果を同表に示した。なお、表中、λは
照射光の波長で、λ=500nmを示す。実施例7〜1
2に関しては、表中の組成物Aに関し、イオンアシスト
法を用いずに膜を形成した。また、実施例13〜18に
おける蒸着組成物Aより形成された膜及び実施例19〜
24における酸化ニオブ層に関しては、膜形成の際、酸
素:アルゴンが9:1の割合で、320A及び140m
Aの条件でイオンアシストを使用した。また、実施例2
5〜27に関しては、高屈折率として酸化チタンを用
い、イオンアシスト法を用いずに膜を形成した。
Preparation of Underlayer and Antireflection Film Next, on the hard coat A layer, B layer or C layer,
Under the conditions shown in Table 7, functional films consisting of the multilayer films shown in Tables 4 to 7 were formed, and plastic lenses were obtained. The above plastic lenses were evaluated for the above (1) to (7), and the results are shown in the same table. In the table, λ is the wavelength of the irradiation light, and λ = 500 nm. Examples 7-1
Regarding the composition No. 2, a film was formed on the composition A in the table without using the ion assist method. Moreover, the film formed from the vapor deposition composition A in Examples 13 to 18 and Examples 19 to
Regarding the niobium oxide layer in No. 24, when forming the film, the ratio of oxygen: argon was 9: 1, 320 A and 140 m.
Under the condition A, ion assist was used. Example 2
Regarding 5 to 27, films were formed without using the ion assist method, using titanium oxide as a high refractive index.

【0029】表4及び5における実施例7〜18に記載
されている組成物Aとは、Nb2O5粉末、ZrO2
粉末、Y2 O3 粉末を混合し、300kg/cm2
でプレス加圧し、焼結温度1300℃で焼結して得られ
た3成分系蒸着組成物A(重量%、Nb2 O5:Zr
O2:Y2 O3 =76%〜90%:16.6%〜5
%:7.4%〜5%)を用いてなる膜を意味する。実施
例1〜27に関する等価膜のλ/4、λ/2の合成屈折率
は、表8に記載した通りである。
The compositions A described in Examples 7 to 18 in Tables 4 and 5 are Nb2O5 powder, ZrO2
Powder, Y2O3 powder, and mix at 300 kg / cm 2
Pressurized and sintered at a sintering temperature of 1300 ° C. to obtain a three-component vapor-deposition composition A (% by weight, Nb 2 O 5: Zr
O2: Y2O3 = 76% to 90%: 16.6% to 5
%: 7.4% to 5%). The combined refractive indices of λ / 4 and λ / 2 of the equivalent films in Examples 1 to 27 are as described in Table 8.

【0030】比較例1及び2は、高屈折率蒸着物質とし
て酸化タンタルを用い、二酸化ケイ素からなる下地層、
酸化タンタル層及び二酸化ケイ素層よりなるλ/4の二層
等価膜、λ/2の酸化タンタル層、λ/4の二酸化ケイ素層
を形成した。比較例3は、基板C、ハードコート層C
を、さらに、高屈折率蒸着物質として酸化タンタルを用
い、二酸化ケイ素からなる第3層、酸化タンタル層及び
二酸化ケイ素層よりなるλ/4の二層等価膜、λ/2の酸化
タンタル層、λ/4の二酸化ケイ素層を形成した。
In Comparative Examples 1 and 2, tantalum oxide was used as a high-refractive-index deposition material, and an underlayer made of silicon dioxide was used.
A λ / 4 two-layer equivalent film composed of a tantalum oxide layer and a silicon dioxide layer, a λ / 2 tantalum oxide layer, and a λ / 4 silicon dioxide layer were formed. Comparative Example 3 shows that the substrate C and the hard coat layer C
Further, using tantalum oxide as a high refractive index deposition material, a third layer of silicon dioxide, a two-layer equivalent film of λ / 4 composed of a tantalum oxide layer and a silicon dioxide layer, a tantalum oxide layer of λ / 2, / 4 silicon dioxide layer was formed.

【0031】比較例4及び5は、高屈折率蒸着物質とし
て酸化チタンを用い、二酸化ケイ素からなる下地層、酸
化チタン層及び二酸化ケイ素層よりなるλ/4の二層等価
膜、λ/2の酸化チタン層、λ/4の二酸化ケイ素層を形成
した。比較例6は、基板C、ハードコート層Cを、さら
に、高屈折率蒸着物質として酸化チタンを用い、二酸化
ケイ素からなる第3層、酸化チタン層及び二酸化ケイ素
層よりなるλ/4の二層等価膜、λ/2の酸化チタン層、λ
/4の二酸化ケイ素層を形成した。これら比較例1〜6に
関しては、イオンアシスト法は用いずに膜を形成した。
その結果、比較例1は、実施例22と比べ、比較例2は
実施例23と比べ、比較例3は実施例24と比べ耐熱性
に劣るものだった。
In Comparative Examples 4 and 5, titanium oxide was used as a high-refractive-index deposition material. A titanium oxide layer and a λ / 4 silicon dioxide layer were formed. In Comparative Example 6, a substrate C and a hard coat layer C were further used, and titanium oxide was used as a high-refractive-index deposition material, and a third layer composed of silicon dioxide, a two-layer of λ / 4 composed of a titanium oxide layer and a silicon dioxide layer. Equivalent film, λ / 2 titanium oxide layer, λ
/ 4 silicon dioxide layer was formed. Regarding Comparative Examples 1 to 6, films were formed without using the ion assist method.
As a result, Comparative Example 1 was inferior to Example 22, Comparative Example 2 was inferior to Example 23, and Comparative Example 3 was inferior to Example 24 in heat resistance.

【0032】[0032]

【表7】 [Table 7]

【0033】[0033]

【表8】 [Table 8]

【0034】[0034]

【表9】 [Table 9]

【0035】[0035]

【表10】 [Table 10]

【0036】[0036]

【表11】 [Table 11]

【0037】[0037]

【表12】 [Table 12]

【0038】[0038]

【発明の効果】以上詳細に説明したように、本発明の反
射防止膜を有する光学部材は、良好な視感反射率、視感
透過率、密着性、耐摩耗性、耐アルカリ性及び耐衝撃性
を維持しつつ、さらに耐熱性が向上している。
As described above in detail, the optical member having the antireflection film of the present invention has good luminous reflectance, luminous transmittance, adhesion, abrasion resistance, alkali resistance and impact resistance. And the heat resistance is further improved.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 嘉村 斉 東京都新宿区中落合2丁目7番5号 ホー ヤ株式会社内 Fターム(参考) 2K009 AA02 AA06 AA09 AA15 BB11 CC03 CC09 CC42 DD03 DD07 4F100 AA17C AA17D AA17E AA20B AA20C AA20E AA21D AA21E AH02B AH06B AK01A AK45A AR00B AS00C AT00A BA05 BA07 BA10A BA10E EJ53B GB90 JJ03 JK12B JN18C JN18D JN18E JN30 JN30C JN30D JN30E YY00C YY00D YY00E  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hitoshi Kamura 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo F-term in Hoya Corporation (reference) 2K009 AA02 AA06 AA09 AA15 BB11 CC03 CC09 CC42 DD03 DD07 4F100 AA17C AA17D AA17E AA20B AA20C AA20E AA21D AA21E AH02B AH06B AK01A AK45A AR00B AS00C AT00A BA05 BA07 BA10A BA10E EJ53B GB90 JJ03 JK12B JN18C JN18D JN18E JN30 JN30Y JNY00N

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 プラスチック基板と、該プラスチック基
板上に、基板側からλ/4−λ/2−λ/4型またはλ/4−λ
/4−λ/2−λ/4型(λ=500nm) の反射防止膜とを
有する光学部材であって、該λ/2の層は、屈折率が1.80
〜2.40である3層以上の等価膜であり、該等価膜の偶数
層が二酸化ケイ素層である反射防止膜を有する光学部
材。
1. A plastic substrate and a λ / 4-λ / 2-λ / 4 type or λ / 4-λ on the plastic substrate from the substrate side.
An optical member having a / 4-λ / 2-λ / 4 type (λ = 500 nm) antireflection film, wherein the λ / 2 layer has a refractive index of 1.80.
An optical member having an anti-reflection film in which three or more equivalent films of up to 2.40, and an even number of the equivalent films are silicon dioxide layers.
【請求項2】 前記λ/2の等価膜の奇数層は、酸化チタ
ン、酸化ニオブ及び酸化タンタルの中から選ばれた少な
くとも1種類の金属酸化物からなる層である請求項1記
載の反射防止膜を有する光学部材。
2. The antireflection method according to claim 1, wherein the odd layer of the λ / 2 equivalent film is a layer made of at least one metal oxide selected from titanium oxide, niobium oxide and tantalum oxide. An optical member having a film.
【請求項3】 前記λ/2の等価膜の奇数層は、酸化ニオ
ブからなる層である請求項1記載の反射防止膜を有する
光学部材。
3. The optical member having an antireflection film according to claim 1, wherein the odd layer of the equivalent film of λ / 2 is a layer made of niobium oxide.
【請求項4】 前記λ/2の層の下に形成されるλ/4層
が、2層以上の等価膜である請求項1〜請求項3のいず
れか1項記載の反射防止膜を有する光学部材。
4. The antireflection film according to claim 1, wherein the λ / 4 layer formed below the λ / 2 layer is an equivalent film of two or more layers. Optical members.
【請求項5】 前記λ/4の層は、前記λ/2の層の奇数層
及び偶数層で用いる金属酸化物層より構成される請求項
4記載の反射防止膜を有する光学部材。
5. The optical member having an anti-reflection film according to claim 4, wherein the λ / 4 layer is formed of a metal oxide layer used as an odd layer and an even layer of the λ / 2 layer.
【請求項6】 前記λ/4の等価膜が、酸化ニオブからな
る層と、二酸化ケイ素層とから構成される請求項4記載
の反射防止膜を有する光学部材。
6. The optical member having an antireflection film according to claim 4, wherein the equivalent film of λ / 4 is composed of a layer made of niobium oxide and a silicon dioxide layer.
【請求項7】 プラスチック基板と反射防止膜との間に
下地層が設けられた請求項1〜6のいずれか1項記載の
反射防止膜を有する光学部材。
7. An optical member having an antireflection film according to claim 1, wherein a base layer is provided between the plastic substrate and the antireflection film.
【請求項8】 前記下地層が、金属ニオブからなる請求
項7記載の反射防止膜を有する光学部材。
8. An optical member having an antireflection film according to claim 7, wherein said underlayer is made of metal niobium.
【請求項9】 プラスチック基板上に、下地層と、λ/4
−λ/2−λ/4型の反射防止膜とが設けられ、下地層(第
1層)及びλ/4(第2〜3層)−λ/2(第4〜6層)−
λ/4(第7層)の第1〜7層からなる構成で、 第1層が、屈折率1.43〜1.47の二酸化ケイ素層、 第2層が、屈折率2.04〜2.37の高屈折率層、 第3層が、屈折率1.43〜1.47の二酸化ケイ素層、 第4層が、屈折率2.04〜2.37の高屈折率層、 第5層が、屈折率1.43〜1.47の二酸化ケイ素層、 第6層が、屈折率2.04〜2.37の高屈折率層、 第7層が、屈折率1.43〜1.47の二酸化ケイ素層であり、
λ/4(第2〜3層)の合成屈折率が1.65〜1.80、λ/2
(第4〜6層)の合成屈折率が1.85〜2.25であり、前記
高屈折率層が、酸化チタン、酸化ニオブ及び酸化タンタ
ルの中から選ばれた少なくとも1種類の金属酸化物より
構成される反射防止膜を有する光学部材。
9. An underlayer and a λ / 4 on a plastic substrate.
A λ / 2-λ / 4 type antireflection film is provided, and a base layer (first layer) and λ / 4 (second to third layers); λ / 2 (fourth to sixth layers);
λ / 4 (seventh layer) composed of first to seventh layers, wherein the first layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, the second layer is a high refractive index layer having a refractive index of 2.04 to 2.37, The third layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, the fourth layer is a high refractive index layer having a refractive index of 2.04 to 2.37, the fifth layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, and the sixth layer is A high refractive index layer having a refractive index of 2.04 to 2.37, the seventh layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47,
The combined refractive index of λ / 4 (second and third layers) is 1.65 to 1.80, λ / 2
(The fourth to sixth layers) have a combined refractive index of 1.85 to 2.25, and the high refractive index layer is made of at least one metal oxide selected from titanium oxide, niobium oxide and tantalum oxide. An optical member having an antireflection film.
【請求項10】 プラスチック基板上に、下地層と、λ
/4−λ/2−λ/4型の反射防止膜とが設けられ、下地層
(第1層)及びλ/4(第2〜3層)−λ/2(第4〜8
層)−λ/4(第9層)の第1〜9層からなる構成で、 第1層が、屈折率1.43〜1.47の二酸化ケイ素層、 第2層が、屈折率2.04〜2.37の高屈折率層、 第3層が、屈折率1.43〜1.47の二酸化ケイ素層、 第4層が、屈折率2.04〜2.37の高屈折率層、 第5層が、屈折率1.43〜1.47の二酸化ケイ素層、 第6層が、屈折率2.04〜2.37の高屈折率層、 第7層が、屈折率1.43〜1.47の二酸化ケイ素層、 第8層が、屈折率2.04〜2.37の高屈折率層、 第9層が、屈折率1.43〜1.47の二酸化ケイ素層であり、
λ/4(第2〜3層)の合成屈折率が1.65〜1.80、λ/2
(第4〜8層)の合成屈折率が1.85〜2.25であり、前記
高屈折率層が、酸化チタン、酸化ニオブ及び酸化タンタ
ルの中から選ばれた少なくとも1種類の金属酸化物より
構成される反射防止膜を有する光学部材。
10. A plastic substrate, comprising: a base layer;
/ 4-λ / 2-λ / 4 type antireflection film is provided, and an underlayer (first layer) and λ / 4 (second to third layers) −λ / 2 (fourth to eighth layers) are provided.
Layer) -λ / 4 (ninth layer), wherein the first layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, and the second layer is a high refractive index having a refractive index of 2.04 to 2.37. The third layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, the fourth layer is a high refractive index layer having a refractive index of 2.04 to 2.37, the fifth layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, Six layers are high refractive index layers having a refractive index of 2.04 to 2.37, a seventh layer is a silicon dioxide layer having a refractive index of 1.43 to 1.47, an eighth layer is a high refractive index layer having a refractive index of 2.04 to 2.37, and a ninth layer is A silicon dioxide layer having a refractive index of 1.43 to 1.47,
The combined refractive index of λ / 4 (second and third layers) is 1.65 to 1.80, λ / 2
(The fourth to eighth layers) have a combined refractive index of 1.85 to 2.25, and the high refractive index layer is made of at least one metal oxide selected from titanium oxide, niobium oxide and tantalum oxide. An optical member having an antireflection film.
【請求項11】 プラスチック基板上に、下地層と、λ
/4−λ/2−λ/4型の反射防止膜とが設けられ、下地層
(第1層)及びλ/4(第2〜4層)−λ/2(第5〜7
層)−λ/4(第8層)の第1〜8層からなる構成で、 第1層が、膜厚0.005λ〜0.015λ、屈折率1.40〜1.47の
金属ニオブ層、 第2層が、屈折率1.43〜1.47の二酸化ケイ素層、 第3層が、屈折率2.04〜2.37の高屈折率層、 第4層が、屈折率1.43〜1.47の二酸化ケイ素層、 第5層が、屈折率2.04〜2.37の高屈折率層、 第6層が、屈折率1.43〜1.47の二酸化ケイ素層、 第7層が、屈折率2.04〜2.37の高屈折率層、 第8層が、屈折率1.43〜1.47の二酸化ケイ素層であり、
λ/4(第2〜4層)の合成屈折率が1.65〜1.80、λ/2
(第5〜7層)の合成屈折率が1.85〜2.25であり、前記
高屈折率層が、酸化チタン、酸化ニオブ及び酸化タンタ
ルの中から選ばれた少なくとも1種類の金属酸化物より
構成される反射防止膜を有する光学部材。
11. An underlayer and a λ on a plastic substrate.
/ 4-λ / 2-λ / 4 type antireflection film is provided, and an underlayer (first layer) and λ / 4 (second to fourth layers) −λ / 2 (5 to 7
Layer) -λ / 4 (eighth layer), wherein the first layer is a metal niobium layer having a thickness of 0.005λ to 0.015λ and a refractive index of 1.40 to 1.47, and the second layer is A silicon dioxide layer having a refractive index of 1.43 to 1.47, a third layer being a high refractive index layer having a refractive index of 2.04 to 2.37, a fourth layer being a silicon dioxide layer having a refractive index of 1.43 to 1.47, and a fifth layer being a refractive index of 2.04 to A high refractive index layer with a refractive index of 2.37, a sixth layer is a silicon dioxide layer with a refractive index of 1.43 to 1.47, a seventh layer is a high refractive index layer with a refractive index of 2.04 to 2.37, and an eighth layer is a dioxide layer with a refractive index of 1.43 to 1.47. A silicon layer,
The combined refractive index of λ / 4 (second to fourth layers) is 1.65 to 1.80, λ / 2
(The fifth to seventh layers) have a combined refractive index of 1.85 to 2.25, and the high refractive index layer is made of at least one metal oxide selected from titanium oxide, niobium oxide and tantalum oxide. An optical member having an antireflection film.
JP2001130754A 2000-08-29 2001-04-27 Optical member having antireflection film Expired - Fee Related JP3545359B2 (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
JP2001130754A JP3545359B2 (en) 2001-04-27 2001-04-27 Optical member having antireflection film
AU57989/01A AU756842B2 (en) 2000-08-29 2001-08-14 Optical element having antireflection film
CA002355021A CA2355021C (en) 2000-08-29 2001-08-14 Optical element having antireflection film
TW090120088A TW569031B (en) 2000-08-29 2001-08-16 Optical element having antireflection film
KR10-2001-0051443A KR100483679B1 (en) 2000-08-29 2001-08-24 Optical element having antireflection film
US09/939,664 US6606196B2 (en) 2000-08-29 2001-08-28 Optical element having antireflection film
CNB011328290A CN1175284C (en) 2000-08-29 2001-08-28 Optical element with anti-reflection film
HU0103482A HUP0103482A2 (en) 2000-08-29 2001-08-28 Optical element having an antireflection film
AT01120616T ATE349716T1 (en) 2000-08-29 2001-08-29 OPTICAL ELEMENT WITH ANTI-REFLECTIVE COATING
EP01120616A EP1184685B8 (en) 2000-08-29 2001-08-29 Optical element having anti-reflection film
PT01120616T PT1184685E (en) 2000-08-29 2001-08-29 Optical element having anti-reflection film
ES01120616T ES2277876T3 (en) 2000-08-29 2001-08-29 OPTICAL ELEMENT THAT HAS AN ANTI-REFLECTIVE FILM.
DE60125479T DE60125479T2 (en) 2000-08-29 2001-08-29 Optical element with anti-reflection coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001130754A JP3545359B2 (en) 2001-04-27 2001-04-27 Optical member having antireflection film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004027584A Division JP3547738B2 (en) 2004-02-04 2004-02-04 Optical member having antireflection film

Publications (2)

Publication Number Publication Date
JP2002328201A true JP2002328201A (en) 2002-11-15
JP3545359B2 JP3545359B2 (en) 2004-07-21

Family

ID=18979063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001130754A Expired - Fee Related JP3545359B2 (en) 2000-08-29 2001-04-27 Optical member having antireflection film

Country Status (1)

Country Link
JP (1) JP3545359B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004095892A1 (en) * 2003-04-24 2004-11-04 Idemitsu Kosan Co., Ltd. Organic electroluminescent device and display
JP2005274767A (en) * 2004-03-23 2005-10-06 Hoya Corp Manufacturing method of optical material
JP2009541810A (en) * 2006-06-28 2009-11-26 エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック Optical product coated with underlayer and temperature-resistant multilayer antireflection coating layer and method for producing the same
JP2010519586A (en) * 2007-02-23 2010-06-03 エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック Method for producing an optical article coated with a non-reflective or reflective coating with improved adhesion and wear resistance
US8318245B2 (en) 2007-02-23 2012-11-27 Essilor International (Compagnie Generale D'optique) Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004095892A1 (en) * 2003-04-24 2004-11-04 Idemitsu Kosan Co., Ltd. Organic electroluminescent device and display
JPWO2004095892A1 (en) * 2003-04-24 2006-07-13 出光興産株式会社 Organic electroluminescence element and display device
US7358661B2 (en) 2003-04-24 2008-04-15 Idemitsu Kosan Co., Ltd. Organic electroluminescent device and display
JP2005274767A (en) * 2004-03-23 2005-10-06 Hoya Corp Manufacturing method of optical material
JP4593949B2 (en) * 2004-03-23 2010-12-08 Hoya株式会社 Manufacturing method of optical member
JP2009541810A (en) * 2006-06-28 2009-11-26 エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック Optical product coated with underlayer and temperature-resistant multilayer antireflection coating layer and method for producing the same
JP2010519586A (en) * 2007-02-23 2010-06-03 エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック Method for producing an optical article coated with a non-reflective or reflective coating with improved adhesion and wear resistance
US8318245B2 (en) 2007-02-23 2012-11-27 Essilor International (Compagnie Generale D'optique) Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties
US8846140B2 (en) 2007-02-23 2014-09-30 Essilor International (Compagnie Generale D'optique) Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties

Also Published As

Publication number Publication date
JP3545359B2 (en) 2004-07-21

Similar Documents

Publication Publication Date Title
US6606196B2 (en) Optical element having antireflection film
US6627320B2 (en) Method for producing composition for vapor deposition, composition for vapor deposition, and method for producing optical element with antireflection film
JP3779174B2 (en) Vapor deposition composition, method of forming antireflection film using the same, and optical member
JP2002328201A (en) Optical member having antireflection film
JP3737075B2 (en) Optical member and antireflection film
JP3547738B2 (en) Optical member having antireflection film
JP2001290112A (en) Mirror coated lens made of plastic
JP2004300580A (en) Method for manufacturing vapor deposition composition, and method for manufacturing optical component having vapor deposition composition and reflection preventive film
JPH04166901A (en) Optical parts having antireflection coating
JPH081482B2 (en) Plastic mirror lenses
JPH081481B2 (en) Plastic mirror lenses
JPH03144501A (en) Antireflection film for plastic lens
JPH04110918A (en) Optical component

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20031201

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040106

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040204

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20040310

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040406

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040407

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090416

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090416

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100416

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110416

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120416

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130416

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130416

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140416

Year of fee payment: 10

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees