JP2002314221A - Treating chamber and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To propose a treating chamber capable of; firstly, preventing a leakage or discharge accident to the exterior, secondly, reducing welding troubles with less welding, thirdly, improving a dimensional accuracy, fourthly, being manufactured without taking a time, labor hours and man-hours, fifthly, having excellent appearance, and sixthly, being simply and easily manufactured regardless of an operator; and to provide a method for manufacturing the same. SOLUTION: In this treating chamber and the method for manufacturing the same, the peripheral edge of a resin plate 12 is engaged fixedly with a mounting groove 13 of a joiner 14, and an adhesive 17 and welding 18 are auxiliarily used in combination. At least 6 resin plates 12 are used. The joiner 14 is made of a resin of the same type as that of the plate 12, and at least 12 joiners 14 are used. The treating chamber 6 is assembled in a box-like state, and the resin plates 12 for forming the front and rear, the left and right and the upper and lower surfaces are connected to each other by the joiners 14. The joiners 14 are disposed in respective corner lines to form an overall frame, and the ends of the adjacent joiners 14 are connected to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a processing chamber and a method for manufacturing the same. That is, the present invention relates to a processing chamber in which processing using a fluid such as a liquid or a gas is performed, and a method of assembling and manufacturing the processing chamber.

[0002]

2. Description of the Related Art << Technical Background >> In a processing chamber of this kind, processing using a fluid such as a liquid or a gas is performed inside. For example, in a processing chamber used in a manufacturing process of a printed wiring board, a liquid such as a heated developing solution, a corrosive liquid, or a stripping liquid is jetted onto the printed wiring board material inside the processing chamber. Is chemically treated. The injected liquid flows down, is collected, and stored in the lower liquid tank. The liquid used for processing inside the processing chamber is made of an acidic or alkaline chemical, and is harmful or dangerous to the human body. Such liquid is scattered in the upper part of the processing chamber, and is filled with generated harmful gases, odors, vapors, and the like.

<Regarding Conventional Example> A processing chamber of this type has a box shape having six front, rear, left, right, and upper and lower surfaces. FIGS. 4A and 4B are front (side, flat) cross-sectional views of a main part of a conventional processing chamber of this type, and FIG. 4A shows one example, FIG. 4B shows another example, and FIG. 3) The figure shows still another example. First, FIG.
FIG. 1A shows a typical example of a conventional processing chamber 1 of this type, in which resin plates 2 are joined by butt welding 3. In other words, the flat resin plate 2 forming the front, rear, left, right, and upper and lower surfaces of the flat resin plate 2 is abutted between the orthogonal and adjacent ends, and the welding 3 is formed on the inner and outer corner lines between the two. Applied and joined together. Also, FIG.
As in the processing chamber 1 shown in FIGS. 2B and 3C, the processing chamber 1 is used in addition to the butt welding 3 described above and further joined by employing a fitting structure. That is, a pair of fitting projections 4 and fitting recesses 5 are cut and formed between the ends of the resin plates 2 which are orthogonal and adjacent to each other.
Was used.

[0004]

[Problem to be Solved by the Invention] <Regarding First Problem> The following problems have been pointed out in such a conventional example. First, a problem has been pointed out that a liquid for processing in the inside A of the processing chamber 1 and gases such as generated toxic gas, odor, and vapor leak or flow out to the outside B. That is, the processing chamber 1 of the conventional example of this type has
As shown in FIGS. (1), (2), (3), etc., since the resin plates 2 were joined by butt welding 3, the joining strength and the degree of sealing depend on the welding 3. Cracks, cracks, cracks, gaps, etc. are liable to occur in the weld 3 depending on the reliability or due to a change with time, and the liquid in the inside A and the gas such as toxic gas, odor, and evaporation are transferred to the outside B. Leaks and spills often occurred. Such leakage and spill accidents are harmful and dangerous to the human body, deteriorate the working environment, corrode and damage other machines and equipment, and may cause pollution problems.

<< Second Problem >> Secondly, in this kind of conventional example, it is common practice to increase the amount of welding 3 used for joining to increase the joining strength and the degree of sealing. . However, due to the temperature difference between the inside and outside during use, the difference in strain stress between the inside and outside welds 3 increases, and rather, the above-described cracks, cracks, cracks, gaps and the like at the first point occur, and the above-mentioned leakage and outflow occur. The problem of causing an accident was pointed out. That is, in order to improve the bonding strength and the degree of sealing by the welding 3, the welding 3 is repeatedly and frequently used in the processing chamber 1 of this type of conventional example. However, when the amount of the welding 3 is increased in this manner, the temperature difference between the inside A of the processing chamber 1 using the heated liquid and the outside B of the processing chamber 1 causes the welding 3 of the corner line portion on the inside A side to be increased. And the weld 3 of the corner line portion on the side of the external B increases the difference in strain stress. Due to this, cracks, cracks, cracks, gaps, and the like are easily generated in the increased amount of welding 3 against the intention, and the liquid in the inside A of the processing chamber 1 and the gas such as toxic gas, odor, and vapor are generated. It has been pointed out that an accident that leaks or flows out of the processing chamber 1 outside B may occur.

<< Third Problem >> Thirdly, problems have been pointed out also regarding the overall dimensional accuracy and strength of the processing chamber 1. That is, due to the difference between the strain stresses of the inner and outer welds 3 described above, the bonded resin plate 2 is inclined inward or outward, and the dimensional accuracy of the entire processing chamber 1 is degraded and the strength is reduced. There was sometimes. Therefore, it was pointed out that various problems, such as the above-described leakage and spill accidents, and the vulnerability to vibration and shock, occur. Furthermore,
The resin plate 2 is more easily bent, bent, and warped than a metal plate or the like.
In addition, the processing chamber easily expands and contracts under the influence of temperature and the like, and from this aspect, the dimensional accuracy of the entire processing chamber is degraded, the strength is reduced, and the processing chamber may even be damaged. As a result, various problems have occurred, such as occurrence of the above-described leakage or outflow accident, and the inability to withstand the pressure of the liquid collected and stored in the lower portion of the inside A of the processing chamber 1.

<< Fourth Problem >> Fourthly, as described above, the processing chamber 1 of this type in the prior art has a high dependence on the welding 3 for the joining between the resin plates 2, and moreover, In order to increase the amount of No. 3, it was often pointed out that the troublesome welding work was repeatedly performed repeatedly and repeatedly, and that the production required time, labor and man-hours. That is, in the conventional processing chamber 1, the front and rear, left and right, and upper and lower surfaces of the resin plate 2 are assembled by abutting the adjacent corner line portions and joining them all by welding 3. Therefore,
It was pointed out that it took time, labor, and man-hours to manufacture, resulting in high costs.

<Fifth Problem> Fifth, problems have been pointed out in the aesthetic and appearance aspects of the conventional processing chamber 1 of this type. That is, in the conventional processing chamber 1, the welding 3 for joining is applied to the corner line portion on the outer side, and it is necessary to perform chamfering, and the traces and scratches are left behind, and the beauty and appearance It was pointed out that was easily damaged. Then, as described above, in the conventional processing chamber 1,
Such welding 3 is repeatedly performed to increase the amount, and the weight of marks and scratches is large and conspicuous, and the appearance and appearance are impaired. Further, the above-mentioned deviation of the dimensional accuracy has also been a cause of impairing the beauty and appearance.

<Sixth Problem> Sixth, as described above, the processing chamber 1 of this type in the related art has a high degree of dependence on the welding 3 for joining between the resin plates 2 and has a high reliability. Relied on personal skills and experience. That is, whether or not the welding 3 is performed without the above-mentioned cracks, cracks, cracks, gaps and the like depends on the personal skill difference and the experience difference of the worker, and the quality is unstable. The problem was pointed out. Immediately after such welding 3, the quality of the surface 3
There was a drawback that it was not possible to judge just by observing the appearance alone.

<< About the conventional example shown >> It should be noted that the first, second, third, fourth, fifth, and sixth problems described above are the same as those in FIG.
Regarding the processing chamber 1 of this type of the conventional example shown in FIGS. 1 (a), 1 (b), and 3 (c), there are differences in the weights, but they were all pointed out in common. That is, in the general processing chamber 1 in which only the butt welding 3 shown in FIG. 4A is performed, each problem is particularly remarkably pointed out.
Also, in the processing chamber 1 to which the fitting structures shown in FIGS. 4 (2) and 3 (3) are added, the fitting structure only performs a supplementary function. First, leakage and outflow accidents still occur. Secondly, a large amount of welding 3 has been performed, and thirdly, dimensional accuracy and strength have been slightly improved, but this has not been a fundamental solution. Fourth, time, labor, and Fifth, traces and scratches of the weld 3 remained, and sixth, the problem of the reliability of the weld 3 was pointed out similarly.

<Regarding the Present Invention> In view of such circumstances, the present invention has been made as a result of the inventor's earnest research efforts in order to solve the above-mentioned problems of the prior art, and the resin forming each surface has been developed. The plates are fitted and fixed in the mounting grooves of the joiner that forms the frame by arranging them at each corner line, and the auxiliary adhesive is used together with welding, so that the resin plates use the joiner. And is assembled in a box shape as a whole. Accordingly, the present invention firstly prevents leakage and outflow accidents to the outside, secondly, the weight of the weld 3 is low and the adverse effects of the weld are reduced, and thirdly, dimensional accuracy and strength are improved. Fourth, a processing chamber and a method for manufacturing the same that require no manufacturing time, labor and man-hours, fifth, have excellent aesthetics and appearance, and sixth, can be manufactured easily, easily, and stably without individual differences. The purpose is to do.

[0012]

Means for Solving the Problems << Regarding each claim >> The technical means of the present invention for solving such problems is as follows. First, claim 1 is as follows. That is, processing using a fluid such as a liquid or a gas is performed inside the processing chamber of the first aspect. A plurality of flat plate-shaped resin plates and a plurality of joiners for joining between the resin plates formed with mounting grooves for the resin plates are used. Making a shape. Claim 2 is as follows. That is, the processing chamber according to the second aspect is the processing chamber according to the first aspect, wherein the resin plate has a peripheral end provided in a mounting groove of the joiner.
Fitted and fixed. The joiner has a prismatic shape,
The entire frame is formed, and the mounting groove is formed in the longitudinal direction.

Next, claim 3 is as follows. That is, in the processing chamber according to the third aspect, in the processing chamber according to the second aspect, the resin plate is made of vinyl chloride or polypropylene, and has a square or rectangular shape. The joiner is made of the same kind of resin as the resin plate, has a square pillar shape, and has the mounting groove formed linearly on at least two surfaces. The resin plate is fitted and fixed to the mounting groove of the joiner by using an adhesive or welding in an auxiliary manner. Claim 4 is as follows. That is, in the processing chamber according to the fourth aspect, in the processing chamber according to the third aspect, at least six resin plates are used and form six surfaces of front, rear, left, right, and up and down. At least twelve such joiners are used, are arranged at each corner line portion, and the ends between adjacent joints are joined in an orthogonal positional relationship. Claim 5 is as follows. That is, the processing chamber of this claim 5 is
In the processing chamber according to the fourth aspect, the processing chamber is used in a process of manufacturing a printed wiring board. Then, inside the processing chamber, the liquid such as a developing solution, a corrosive liquid, a stripping liquid, and other chemical liquids is jetted to the printed wiring board material,
While the surface of the printed wiring board material is chemically treated,
Thereafter, the injected liquid flows downward and is collected.

Next, claim 6 is as follows. That is, the method of manufacturing a processing chamber according to claim 6 relates to a method of manufacturing a processing chamber in which processing using a fluid such as a liquid or a gas is performed inside. First, six resin plates made of vinyl chloride or polypropylene, each having a rectangular or rectangular flat plate shape, and a rectangular column shape made of the same type of resin as the resin plate, and mounting grooves are formed on at least two surfaces in a longitudinal direction. And twelve joiners linearly formed in the directions. Next, 2
Each of the four resin plates is fixed to the outer peripheral end thereof by fitting the four joiners to the mounting groove while using an adhesive or welding together, and the end between the adjacent joiners is fixed. Join the parts. In addition, the remaining four resin plates are positioned in a rectangular tube shape with the joiners interposed at the respective corner line portions and the adjacent members are orthogonal to each other. At the same time, it is fixed to the four interposed joiners by using an adhesive or welding by being fitted into a mounting groove, thereby joining the four resin plates. At this time, the resin plate has a dimensional relationship in which both end portions of the corner line are exposed from the joiner. Thereafter, for one of the resin plates having the joiner fitted and fixed to the outer peripheral end thereof as described above, the four resin grooves forming the rectangular tube shape as described above with respect to the mounting grooves of the four joiners. The exposed one end of the plate is fixed by using an adhesive and welding together by fitting, thereby joining the five resin plates and joining the ends between the opposing joiners. I do. Then, with respect to the other one resin plate in which the joiner is fitted and fixed to the outer peripheral end portion as described above, the mounting grooves of the four joiners are changed to the four rectangular resin plate-shaped resin plates as described above. The other exposed end is fixed by fitting together with an adhesive or welding, and the end between the opposing joiners is joined. Thus, a box-shaped processing chamber in which the joined resin plates form six surfaces of front, rear, left, right, and upper and lower and the joiner is arranged at each corner line portion to form an entire framework is assembled. Be characterized.

<< Function >> The present invention is configured as described above, and is as follows. In this processing chamber and its manufacturing method, the peripheral end of the resin plate is fitted and fixed in the mounting groove of the joiner, and at this time, an adhesive or welding is used in an auxiliary manner. The resin plate is made of vinyl chloride or polypropylene, and at least six resin plates are used. The joiner is made of the same type of resin, and has at least 12 mounting grooves formed in the longitudinal direction.

The processing chamber is manufactured, for example, as follows. First, on the outer edge of the two resin plates,
The joiner is fitted and fixed in the mounting groove, and the remaining 4
The two resin plates are fitted and fixed in the mounting grooves of the interposed joiner, and are joined in a rectangular tube shape. Then, one of the exposed ends of the rectangular tubular resin plate is fitted and fixed to and joined to the joiner mounting groove of one of the resin plates, and then, the joiner mounting of the other one of the resin plates is performed. The other exposed end of the rectangular tubular resin plate is fitted and fixed to and joined to the groove. The processing chamber is assembled in a box shape in this way, for example,
The resin plates forming the left, right, upper and lower surfaces are joined by a joiner, and the joiner is arranged at each corner line portion to form an entire skeleton, and ends between adjacent ones are joined. The processing chamber is used, for example, in a manufacturing process of a printed wiring board, in which a fluid such as a liquid or a gas is jetted, subjected to a chemical treatment, and then flows down and is collected.

Therefore, in this processing chamber, firstly, the resin plate on each surface is joined to the mounting groove by use of a joiner and is fixed to the mounting groove, and an adhesive and welding are used together. The joint strength and the degree of sealing are improved. Thus, leakage or outflow of a fluid such as a liquid or a gas is prevented. Second, the joining between the resin plates is achieved by fitting and fixing,
Ancillary, low weight and low volume. Thus, the adverse effects of the difference in strain stress between the inner and outer welds, such as the occurrence of cracks, cracks, cracks, gaps, etc., are small. Third, since the welding weight is low, the joined resin plate does not tilt due to the difference in strain stress between the inner and outer welds, and the resin plate is bent, bent, warped, expanded and contracted. It is easy to do, but the framed joiner exerts a reinforcing function. Therefore, it has excellent dimensional accuracy and strength. Fourth, since the resin plates are joined and assembled in a box shape by fitting and fixing, and the weight of welding is low, the production time, labor and man-hours are reduced. Fifth, since the joiner arranged at the corner line serves as an accent for the entirety and the amount of welding is small, there are no traces or scratches on the chamfered finish. Therefore, it has excellent appearance and appearance. Sixth,
Due to the work of fitting and fixing the resin plate, it can be easily and easily manufactured without being affected by differences in skills and experiences of workers.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS << About Drawings >>
This will be described in detail based on an embodiment of the invention shown in the drawings. 1, 2, 3, and the like are provided for describing an embodiment of the present invention. FIG. 1 is a front (side, flat) cross-sectional view of a main part for describing a processing chamber and a method of manufacturing the same according to an embodiment of the present invention. (1) Figure shows the left part of one example, (2) Figure shows the center part of one example,
(3) Figure shows the right part of one example, (4) Figure shows another example,
Fig. 5 shows still another example, and Fig. 6 is a front sectional view of various joiners. FIG. 2 is an overall schematic perspective view of an example of the entire processing chamber. FIG. 3 is a schematic explanatory view of an example of a method for manufacturing a processing chamber. (1) FIG. 3 shows the first step, (2) shows the next step, and (3).
The figure shows the final step. FIG. 5 is a side sectional view of a processing chamber used in a manufacturing process of the printed wiring board, and FIG. 6 is a plan explanatory view of the printed wiring board.

<< Process for Producing Printed Wiring Board C >> The processing chamber 6 is subjected to a process using the liquid D in the inside A, and is used, for example, in the process for producing the printed wiring board C. First, the manufacturing process of the printed wiring board C will be outlined with reference to FIGS. Inside the processing chamber 6 in the same manufacturing process, the printed wiring board material E
A liquid D such as a developing solution, a corrosive solution, a stripping solution, another chemical solution, or a washing solution is sprayed, and the surface of the printed wiring board material E is subjected to a chemical treatment and a cleaning treatment. The jetted liquid D flows down to the lower part and is collected later. More specifically, in the manufacturing process of the printed wiring board C, in the inside A of each processing chamber 6, the spray pipes 9 are sequentially supplied to the printed wiring board material E conveyed by the wheels 8 of the conveyor 7 or the rollers. A processing liquid D, for example, a chemical solution such as a developing solution, a corrosive solution (etching solution), and a rinsing solution, or a washing solution is sprayed from the spray nozzle 10, and the printed wiring board material E is subjected to chemical processing and cleaning processing. The circuit F is formed on the surface of the printed wiring board E. Each processing chamber 6
In the above, after the liquid D is sprayed on the surface of the printed wiring board material E, it flows down to the liquid tank 11 formed at the lower part, collects,
It is stored and, in many cases, is further pumped to the spray pipe 9 for circulation. In addition, the liquid tank 11 may be of a type built in the lower part of the inside A of the processing chamber 6 as shown in the drawing, or a type provided outside the processing chamber 6. The manufacturing process of the printed wiring board C is as described above.

<< Resin Plates 12, 15 and the Like of Processing Chamber 6 >> Next, the resin plates 12, 15 and the like of the processing chamber 6 of the present invention will be described with reference to FIGS. As described above, in the processing chamber 6 serving as a chamber, processing using the liquid D is performed in the inside A, and a plurality of flat resin plates 12 and mounting grooves 13 for the resin plates 12 are formed. Become,
A plurality of joiners 14 for joining between the resin plates 12 are used, and form an assembling box. First, the resin plate 12 will be described in detail. The resin plate 12 is made of vinyl chloride, polypropylene, or another resin, and usually has a square or rectangular shape. A peripheral end portion is fitted and fixed in the mounting groove 13 of the joiner 14, and at least six sheets are used, and six front / rear, left / right, and upper / lower surfaces of the processing chamber 6, that is, a front wall, a rear wall, both side walls, and a ceiling. , Floor, etc. The processing chamber 6 is, for example, 500 mm long × 600 mm wide ×
The length is about 1,000 mm. In the example of FIG.
As the resin plate 12, two sheets forming left and right surfaces, two sheets forming front and rear surfaces, and two sheets forming upper and lower surfaces are used. Further, in the example of FIG. 2, a resin plate 15 for intermediate partitioning of the processing chamber 6 is used.
Is divided into right and left. Needless to say, these resin plates 12 and 15 are prepared and used in various sizes and numbers according to the shape, size and structure of the processing chamber 6, and have notches, openings, holes and the like as appropriate. Attached and formed (not shown). The resin plates 12, 15 and the like have this configuration.

<< Joiner 14 of Processing Tank 6 >> Next, the joiner 14 will be described in detail with reference to FIGS. The joiner 14 is made of the same type of resin as the resin plate 12, has a square pillar shape or another prism shape, and has attachment grooves 13 linearly formed on at least two surfaces in the longitudinal direction. Then, at least twelve are used, arranged at each corner line portion of the processing chamber 6, and adjacent ends are joined in an orthogonal positional relationship to form a framework of the entire processing chamber 6. .

More specifically, the joiner 14 is made of the same vinyl chloride, polypropylene, or other resin as the resin plates 12 and 15, and often has a long rectangular column shape. And this Joiner 1
On the surface of No. 4, an attachment groove 13 is formed linearly along the longitudinal direction while being located at the center in the transverse direction. In the examples shown in FIGS. 1 (1), (2), (3), and (4) of FIG. 1, mounting grooves 13 are respectively formed on four surfaces of a joiner 14 having a quadrangular prism shape. The resin plates 12 and 15 can be fitted and fixed. Also, in the example of FIG. 5 (5), mounting grooves 13 are formed on two opposing surfaces, and from two directions,
The resin plates 12 and 15 can be fitted and fixed. FIG.
FIG. 6 (6) shows such various types of mounting grooves 13 formed in the joiner 14, and as shown in the figure, four surfaces, three surfaces, two opposing surfaces, and two adjacent surfaces. For example, the cancellation groove 13 can be formed in various modes.

FIG. 1 (1), FIG. 2 (2), FIG.
As shown in the figure, in the mounting groove 13 where the resin plates 12 and 15 are not fitted and fixed, that is, in the unused mounting groove 13,
A cover member 16 for closing the eye is fitted and fixed. Of course,
Regarding the unused mounting groove 13, such a cover member 1
It is also possible not to fit and fix 6. Such a joiner 14 is arranged at least on each corner line, that is, on each ridge line in the box-shaped processing chamber 6. The ends of the joiners 14 are in contact with each other in a positional relationship orthogonal to each other, and are joined by bonding or the like.

Further, one joiner 14 may be formed by linearly bonding and joining a plurality of joiners 14 such as two. Further, as shown in FIG. 2, when a resin plate 15 for an intermediate partition plate is used, the joiner 14
Are used more than twelve. Also, Joiner 1
4 is, for example, 8 mm long × 8 mm wide × length, and the length is set substantially in accordance with the dimensions of the resin plates 12 and 15. Many are slightly shorter than the dimensions of the plates 12 and 15. Joiner 14 is configured as described above.

<< Adhesive 7 and Weld 18 >> Next, the adhesive 17 and the weld 18 will be described with reference to FIG. An adhesive 17 and a welding 18 are used in an auxiliary manner for fitting and fixing the resin plates 12 and 15 to the mounting groove 13 of the joiner 14. First, when the resin plates 12 and 15 are fitted and fixed in the mounting grooves 13 of the joiner 14, the adhesive 17 is applied to the mounting grooves 13 in advance, and then the resin plates 1 and 15 are applied.
It is conceivable to fit and fix the 2 and 15 in the mounting groove 13 and adhere and fix them. After fitting the resin plates 12 and 15 into the mounting grooves 13, the resin plate 1 made of the same kind of resin is fixed.
It is conceivable to apply a weld 18 in a fillet shape having a substantially triangular cross section on the fitting edge line between the joiners 2 and 15 and the joiner 14.
This welding 18 is carried out by blowing hot air to the same location while approaching the tip of the welding rod made of the same resin to the same location. When the resin plates 12 and 15 are made of vinyl chloride, the above-described bonding using the adhesive 17 is performed. However, the welding 18 may be additionally used, or the adhesive 17 may be used. Instead of bonding, only the weld 18 may be applied. On the other hand, the resin plate 12,
If 15 is made of polypropylene, only weld 18 is performed. The adhesive 17 and the welding 18 are implemented in this way.

<< Manufacturing Method >> Next, an example of such a manufacturing method of the processing chamber 6 will be described with reference to FIG. First, the resin plate 12 and the joiner 14 are prepared. That is, in the form of a square or rectangular plate,
Six resin plates 12 made of vinyl chloride or polypropylene
₁ , 12 ₂ , 12 ₃ , 12 ₄ , 12 ₅ , 12 _6, and a rectangular column, made of the same kind of resin as the resin plate 12, and having at least two surfaces with mounting grooves 13 linearly formed in the longitudinal direction. Twelve joiners 14 are prepared.

Then, as shown in the left and right portions of FIG. 3A, the four resin plates 12 ₁ , 12 ₂ , each having four joiners 1 with respect to the outer peripheral end thereof.
4 is fixed to the mounting groove 13 by using the adhesive 17 and the welding 18 (not shown) together. At the same time, the ends between the four adjacent joiners 14 are joined by bonding or the like. Further, as shown in the center portion of FIG. 3A, the remaining four resin plates 12 ₃ , 12 ₄ , 1
2 _5, 12 _6, respectively while interposed Joyner 14 to each corner line portions, in relation between those adjacent orthogonal,
Position it in a square tube shape. At the same time, the four interposed joiners 14 are fitted into the mounting grooves 13 by
The adhesive 17 and the welding 18 (not shown) are used and fixed together, so that the four resin plates 12 ₃ , 12 ₄ , 12 ₅ , 12
₆ are joined. At this time, the resin plates 12 ₃ , 12 ₄ , 1
2 _5, 12 _6, both end sides of the corner line, from each Joyner 14, in exposed dimensional relationship. That is,
Resin plates 12 ₃ , 12 fixed and joined in a square tubular shape
₄ , 12 ₅ , and 12 ₆ have both ends of the four corner lines,
Each is exposed from the joiner 14 at the center. Of course, the rectangular cylindrical resin plates 12 ₃ , 12 ₄ , 12 ₅ , 12 ₆
Is exposed over the entire circumference.

Thereafter, as shown in the left part of FIG. 3B, the four joiners 1 are provided at the outer peripheral end as described above.
The four resin plates 12 ₃ , 12 ₄ , 1 of the rectangular tube shape as described above are inserted into the mounting grooves 13 of the four joiners 14 with respect to _one of the resin plates 121 to which the 4 is fitted and fixed.
2 _5, 12 ₆ exposed one end portion side of, fitted and by fixing with a combination of adhesive 17 or welding 18 (not shown). Thus, the five resin plates 12 ₁ , 12 ₂ , 12 ₃ , 1
2 _4, 12 ₅ while is joined. Simultaneously, the opposing adjacent Joiner 14 mutual, i.e. the resin plate 12 ₁ side 4
Book joiner 14 and rectangular cylindrical resin plates 12 ₃ , 1
In between 2 _{4, 12} 5, 12 4 of ₆ side joiner 14, a portion led to the opposite adjacent in corners are joined by bonding or the like. On the other hand, in this step, 4 Joiner 14 fitted and fixed to the other of the one of the resin plate 12 ₂ has a present on the outer peripheral edge portion, as shown in the right part of (2) of FIG. 3, To it Have been.

[0029] Then, as shown in (3) figure 3, Joiner 14 of four outer peripheral end portion is fixed for the other one of the resin plate 12 ₂ fitted by the aforementioned, four Joiner the mounting groove 13 of the 14, four resin plate ₁₂ 3 single resin plate 12 ₁ with angled tubular is joined by the _above, 12 _4, 12 5, 12 ₆ exposed other end of the Then, it is fixed by using an adhesive 17 and a welding 18 (not shown) together. Simultaneously, the opposing adjacent Joiner 14 mutual, i.e. a four Joiner 14 of the resin plate 12 ₂ side, the resin plate ₁₂ 3 forming a rectangular tube, 12
_{4, 12} 5, 12 in between ₆ side of the four joiner 14, a portion led to the opposite adjacent in adjacent portions are joined by bonding or the like. Such steps ,,,,
, The processing chamber 6 is assembled. That is, the joined six resin plates 12 ₁ , 12 ₂ , 12 ₃ ,
12 ₄ , 12 ₅ , and 12 _{6 form} the front, rear, left, right, and up and down, and 12 joiners 14 are arranged at each corner line to form the entire framework. The processing chamber 6 to be made is manufactured. One example of the manufacturing method is as described above.

<< Actions and the Like >> The present invention is configured as described above. Then, it becomes as follows.
In the processing chamber 6 and its manufacturing method, as shown in FIGS. 1, 2, and 3, the peripheral ends of the plurality of resin plates 12, 15 are fitted into the mounting grooves 13 of the plurality of joiners 14. At the same time, the adhesive 17 and the welding 18 are used together in an auxiliary manner. The resin plates 12 and 15 have a rectangular or rectangular flat plate shape and are made of vinyl chloride or polypropylene, and at least six are used. The joiner 14 has a prismatic shape such as a quadrangular prism shape, is made of the same kind of resin as the resin plates 12 and 15, and has at least 12 mounting grooves 13 linearly formed in at least two longitudinal directions. Can be

The processing chamber 6 is, for example, as shown in FIG.
Manufactured as described. First, two resin plates 12₁, 1
2₂The four outer joiners 14
Is fitted and fixed in the mounting groove 13. Along with the rest
Four resin plates 12₃, 12₄, 12₅, 12₆The interposition
Fitting into the mounting groove 13 of the joined joiner 14
Is positioned and joined in a rectangular tube shape in an orthogonal relationship
(Refer to FIG. 3 (1)). After that, one of the trees
Fat plate 12₁In contrast, the four joiners 1 at the outer peripheral end
The four resin plates 1 joined in a square tubular shape to the four mounting grooves 13
2₃, 12₄, 12 ₅, 12₆Exposed one end side
Are fixed and joined (see FIG. 3 (2)). So
Then, the other one resin plate 12₁About its perimeter
In the mounting groove 13 of the four joiners 14 at the end,
Four bonded resin plates 12₃, 12₄, 12₅, 12
₆Attach the other exposed end of the
(See FIG. 3 (3)).

The processing chamber 6 is, for example,
Assembled and manufactured in a box shape. And back and forth, left and right,
Resin plate 12 forming upper and lower six surfaces₁, 12₂, 12₃,
12 ₄, 12₅, 12₆Each other uses Joiner 14
Are joined together. Joiner 14 is at each corner
Lined together to form the entire skeleton, between adjacent
Are joined in an orthogonal positional relationship. And where
The processing using the liquid D is performed in the interior A of the science room 6. An example
For example, as shown in FIG. 5 and FIG.
Used in the manufacturing process of wiring board C and printed
Developing solution, corrosive solution, stripper, other
A liquid D such as a chemical solution or a washing liquid is jetted, and the surface is chemically treated.
And cleaning. The injected liquid D is supplied to the processing chamber 6.
It flows down to the bottom and is collected.

<< Each Advantage >> Now, in the processing chamber 6 and its manufacturing method, the following first, second, and
Third, fourth, fifth and sixth are as follows. First, the resin plates 12 and 15 on the respective surfaces of the processing chamber 6 are not simply brought into contact with each other, but are fixed to the mounting grooves 13 by using dedicated jointers 14. The gap is joined, and an adhesive 17 and a weld 18 are also used in combination. Therefore, the processing chamber 6 has improved bonding strength and airtightness, and prevents the fluid in the inside A, that is, the liquid D, toxic gas, odor, vapor, and other gases from leaking and flowing out to the outside D. Is done.

Secondly, such joining between the resin plates 12 and 15 is achieved by fitting and fixing the joiner 14 to the mounting groove 13, and the welding 18 is merely used in an auxiliary manner. Absent. As described above, the processing chamber 6 includes the welding 18
Is low and the amount of welding is small (compare FIG. 1 of the present invention with FIG. 4 of the conventional example), so that the adverse effects of the strain stress difference between the inner and outer welds 18, such as cracks, cracks, cracks, The influence of the occurrence of a gap or the like is small. Also from this aspect, the above-mentioned leakage and outflow are prevented.

Third, since the weight of the weld 18 is low, it is possible that the difference in strain stress between the inner and outer welds 18 causes the joined resin plate 12 to be inclined inward or outward. Will be resolved. The resin plates 12 and 15 are more likely to bend, bend, and warp than metal plates and the like, and are more likely to expand and contract under the influence of temperature. It functions as a framework for holding the resin plates 12 and 15 and reinforces the whole. As a result, the processing chamber 6 has improved overall integrity and toughness, and has excellent dimensional accuracy and strength. Of course, this also prevents the above-mentioned leakage and outflow.

Fourth, the processing chamber 6 has a resin plate 1 on each side.
By fitting 2 into the mounting groove 13 of the joiner 14, the resin plates 12 and 15 are joined to each other, and can be efficiently assembled in a box in a short time. Also, welding 18
Weight is low, and there is no need to repeat the troublesome welding 18 operation. Therefore, from these aspects, the processing chamber 6 does not require time, labor, and man-hours for manufacturing.

Fifth, the processing chamber 6 has square pillar-shaped joiners 14 arranged at each corner line portion, and serves as an overall accent. At the same time, since a large amount of the welding 18 is not applied to each corner line portion, no traces or scratches of the chamfered finish remain. Therefore, from these aspects, this processing chamber is excellent in appearance and appearance.

Sixth, the processing chamber 6 has resin plates 12 and 1.
5 is manufactured by advancing the work of fitting the joiner 14 into the mounting groove 13. Therefore, it is easily manufactured by a simple operation without being affected by differences in personal skills and experiences of workers.

In the illustrated example described above, the processing chamber 6
Although the processing using the liquid D is performed in the inside A of the present invention, the present invention is not limited to this. It is possible. That is, the present invention is widely applicable to the processing chamber 6 in which the processing using the fluid such as the liquid D or the gas is performed in the inside A. As a typical example of the process using gas, a drying process in which hot air is injected can be considered.

[0040]

<< Features of the present invention >> As described above, the processing chamber and the method for manufacturing the same according to the present invention form a skeleton by arranging resin plates forming each surface at each corner line portion. Being fitted and fixed in the mounting groove of the joiner, and using an adhesive or welding in combination, the resin plates are joined together using the joiner, and the whole is assembled in a box shape , Is characterized. Therefore, the following effects are exhibited.

<< First Effect >> First, accidents in which the fluid inside the processing chamber, that is, liquid, toxic gas, odor, steam, hot air, and other gases leak or leak to the outside are prevented, and safety is improved. Is improved. In other words, in this processing chamber, the resin plates are joined by using a special joiner, and the fixing and fitting to the mounting grooves are mainly used for joining, and additionally, the adhesive and the welding are also used together. , Joined. That is, the joining strength and the degree of sealing are greatly improved as compared with a case where the end portions of the resin plate are simply abutted and the corner line portions are joined by welding as in the above-described conventional example. The end portions of the resin plate are not directly abutted, but are entirely fitted in the mounting grooves of a dedicated joiner interposed therebetween, so that the joining strength and the degree of sealing are greatly improved.

Therefore, the influence of the reliability of the welding and the change with time is small, and even if cracks, cracks, cracks, gaps, etc. occur in the welding, the influence is small. Therefore, the fluid inside the processing chamber, that is, harmful to the human body
Accidental leakage or outflow of dangerous acidic or alkaline liquids, toxic gases, odors, steam, hot air, or other gases is prevented. Therefore, the situation where the working environment is deteriorated does not occur, the other machines and facilities are not corroded or damaged, and the danger of the occurrence of pollution problems is avoided, so that the safety is improved.

<< Second Effect >> Secondly, the weight of welding is low, and the adverse effect of the difference in strain stress between inside and outside due to welding is reduced. That is, in this processing chamber, the joining between the resin plates is achieved by fitting and fixing to the joiner, and the welding is merely used in an auxiliary manner. Compared to the above-described conventional example of this type in which the joining between the resin plates was achieved by welding and the welding was repeated and repeated to increase the amount of welding, the welding weight was lower, and the welding amount was lower. Will be greatly reduced. Therefore, even if the difference in strain stress increases between the inside and outside of the processing chamber due to the temperature difference between the inside and outside of the processing chamber, and cracks, cracks, cracks, gaps, etc. occur in the welding, such adverse effects may occur. Influence is small, and from this aspect,
After the leakage and spill from the inside of the processing chamber to the outside,
Is prevented.

<< Third Effect >> Third, the processing chamber is excellent in overall integrity and toughness, and dimensional accuracy and strength are improved.
First, in this processing chamber, since the welding weight is low as described above, the joined resin plates are inclined inward and outward due to the difference in the strain stress between the inside and outside welding, as in the above-described conventional example. This is resolved. Thus, from this aspect, the processing chamber is excellent in overall integrity and toughness, and dimensional accuracy and strength are maintained.

Further, the resin plate is easily bent, bent, and warped, and easily expands and contracts under the influence of temperature and the like. Therefore,
In this processing chamber, such a resin plate is fitted and fixed to a joiner that is arranged at each corner line portion and functions as an entire framework, that is, a joiner that functions as a column or a beam. . Thus, as compared with the conventional example of this type described above, in which only the resin plate was used and the members were joined together without a skeleton, in this processing chamber, a joiner that reinforces the whole as a skeleton was used. Since the resin plates are joined, they have excellent overall integrity and toughness, and greatly improve dimensional accuracy and strength. Therefore, a situation in which the resin plate cannot withstand expansion and contraction and breaks or cannot withstand the pressure of the liquid collected and stored inside is avoided, and of course, the above-mentioned leakage from the inside of the processing chamber to the outside and outflow accident are also prevented. It is also resistant to vibration and shock.

<< Fourth Effect >> Fourthly, this processing chamber takes time to manufacture. Efficient manufacturing can be achieved in a short time without any labor and man-hours. That is, the processing chamber is manufactured and assembled in a box shape as a whole by performing an operation of fitting the resin plate into the mounting groove of the joiner. That is, unlike the prior art of the type described above, the welding weight is high, and it is not necessary to repeatedly use and perform complicated welding operations repeatedly. Welding is performed only with a low weight, and the number and amount of welding are small. Therefore, compared to the above-described conventional example, the time required for manufacturing the processing chamber is reduced.
Work and man-hours are greatly reduced, and significant cost reduction is realized.

<Fifth Effect> Fifth, this processing chamber is also excellent in beauty and appearance. That is, in this processing chamber, the resin plates are joined by using a joiner, and the straight joiner at the corner line portion serves as an accent, and is excellent in beauty and appearance. And, as in the above-described conventional example, a large amount of welding for joining is not applied to the corner line portion on the outer side, so that the chamfer finish is not required, and the marks and scratches remain. Thus, the beauty and appearance are not impaired. Only a small amount of welding is performed in this processing chamber. Further, as described above, the deviation of the dimensional accuracy is eliminated, and the aesthetics and appearance are improved from this aspect.

<Sixth Effect> Sixth, this processing chamber can be easily and easily manufactured, and can be manufactured stably without individual differences. In other words, the processing chamber is manufactured by advancing the work of fitting the resin plate into the mounting groove of the joiner,
It is easily manufactured by simple operations without being affected by differences in personal skills and experiences of workers. In other words, as in the above-mentioned conventional example, the weight of the welding work is high, and therefore, due to the personal skill difference and experience difference of the worker,
Quality, reliability and quality are not affected. In this way, a high quality processing chamber can be stably manufactured. As described above, the effects exhibited by the present invention are remarkable and large, for example, all the problems existing in this type of conventional example are solved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a processing chamber and a method of manufacturing the same according to an embodiment of the present invention;
FIG. (1) Fig. 1 shows the left part of one example, (2) Fig. 2 shows the center part of one example, (3) Fig. 3 shows the right part of one example, and (4) Fig. 4 shows the other example. , (5) show still another example. (6) The figure is a front sectional view of various joiners.

FIG. 2 is an overall schematic perspective view of an example of a processing chamber for describing an embodiment of the present invention.

FIG. 3 is a schematic explanatory view of an example of a method for manufacturing a processing chamber, which is used for describing an embodiment of the present invention. FIG. 3A illustrates the first step, and FIG. 3B illustrates the next step. , (3) shows the final step.

FIG. 4 is a front (side, flat) cross-sectional view of a main part for explaining a processing chamber of a conventional example of this kind, and FIG.
FIG. 2B shows another example, and FIG. 3C shows another example.

FIG. 5 is a side sectional view of a processing chamber used in a manufacturing process of a printed wiring board.

FIG. 6 is an explanatory plan view of a printed wiring board.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Processing chamber (this type of conventional example) 2 Resin plate (this type of conventional example) 3 Welding (this type of conventional example) 4 Fitting convex part (this type of conventional example) 5 Fitting concave part (this type of conventional example) 6) Processing chamber 7 Conveyor 8 Wheel 9 Spray pipe 10 Spray nozzle 11 Liquid tank 12 Resin plate 12 ₁ Resin plate 12 ₂ Resin plate 12 ₃ Resin plate 12 ₄ Resin plate 12 ₅ Resin plate 12 ₆ Resin plate 13 Mounting groove 14 Joiner 15 Resin plate 16 Cover member 17 Adhesive 18 Welding A Internal B External C Printed circuit board D Liquid (fluid) E Printed circuit board material F Circuit

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3E070 AA02 AB09 BH01 DA07 FA01 FB02 JB04 JB05 KA01 KA12 KB05 KB06 KC10 VA13

Claims (6)

[Claims] 1. A processing chamber in which a process using a fluid such as a liquid or a gas is performed, wherein a plurality of flat resin plates and a mounting groove for the resin plate are formed. And a plurality of joiners for joining between the resin plates, wherein the processing chamber has an assembled box shape. 2. The processing chamber according to claim 1, wherein the resin plate has a peripheral end fitted and fixed in a mounting groove of the joiner, and the joiner forms a prism and forms an entire framework. And the mounting groove is formed in the longitudinal direction. 3. The processing chamber according to claim 2, wherein the resin plate is made of vinyl chloride or polypropylene, has a square or rectangular shape, and the joiner is made of the same type of resin as the resin plate. The mounting groove is formed linearly on at least two surfaces in a quadrangular prism shape, and an adhesive or welding is used together to assist in fitting the resin plate into the mounting groove of the joiner. Processing room. 4. The processing chamber according to claim 3, wherein at least six resin plates are used, forming six front / rear, left / right, and top / bottom surfaces, and at least 12 joiners are used. A processing chamber, wherein the processing chamber is arranged at each corner line portion, and ends between adjacent ones are joined in an orthogonal positional relationship. 5. The processing chamber according to claim 4, wherein the processing chamber is used in a manufacturing process of a printed wiring board. Inside the processing chamber, a developing solution, a corrosive solution, The liquid, such as a stripping liquid or another chemical, is ejected to chemically treat the surface of the printed wiring board material, and the ejected liquid flows down and is collected afterwards. Processing room. 6. A method of manufacturing a processing chamber in which a processing using a fluid such as a liquid or a gas is performed inside, wherein first, a rectangular or rectangular flat plate is formed of six sheets made of vinyl chloride or polypropylene. And 12 joiners each having a rectangular column shape and made of the same kind of resin as the resin plate, and having at least two surfaces with mounting grooves formed linearly in the longitudinal direction. For each of the resin plates, the four joiners are fixed to the outer peripheral end thereof by fitting them into the mounting grooves while using an adhesive or welding together, and the end between the adjacent joiners is fixed. And joining the remaining four resin plates in the form of a rectangular cylinder with the joiners interposed at each corner line while intersecting each other at right angles. Done 4
The jointer is fixed to the book joiner by using an adhesive and welding together by fitting it into a mounting groove, so that the four resin plates are joined together. , Each having a dimensional relationship exposed from the joiner. Thereafter, for one of the resin plates, to which the joiner is fitted and fixed to the outer peripheral end portion as described above, with respect to the mounting grooves of the four joiners, One of the exposed end portions of the four resin plates forming a rectangular tube as described above is fixed by fitting together with an adhesive or welding, thereby joining the five resin plates together, The ends between the opposing joiners are joined to each other, and then the mounting grooves of the four joiners are formed on the other one of the resin plates to which the joiner is fitted and fixed to the outer peripheral end as described above. Four resin plates having a rectangular tube shape as described above The other exposed end is fixed by using an adhesive and welding together by fitting, and the end between the opposing joiners is joined, so that the joined resin plate is moved forward and backward. , Left, right, up and down 6
A method for manufacturing a processing chamber, comprising forming a surface, and assembling a box-shaped processing chamber in which the joiner is arranged at each corner line portion to form an entire framework.