JP2002312917A - Magnetic head slider, its support, and magnetic disk device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate unloading, and to enable an instantaneous stable floating by recovering a normal floating amount even when a flow-in pad inlet end is brought into contact with a medium surface during unloading, in a magnetic head slider of a load/unload system and its support. SOLUTION: A flow-in pad 11 having a contact surface to be brought into contact with a disk surface when a magnetic disk is stopped, and a flow-out pad 13 are respectively provided in the air inlet and outlet ends of a surface opposite to the magnetic disk, a strip auxiliary pad 12 having a contact surface to be brought into contact with the disk surface when the magnetic disk is stopped is provided while having a gap between it and the flow-in pad 11 on the both outsides in the slider width direction of the flow-in pad 11, and the flow-in side tip of the contact surface of the auxiliary pad 12 is set in a position nearer to the inlet tip of the slider than to the inlet tip of the contact surface of the auxiliary pad 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider, a support thereof, and a magnetic disk drive, and more particularly to a magnetic head slider excellent in high recording density and high reliability, a support thereof, and a magnetic disk drive.

[0002]

2. Description of the Related Art In recent years, in a magnetic disk drive, demands for high reliability and a small flying height for a head-disk interface have become increasingly severe. As the surface recording density increases, the flying height required for the magnetic head slider tends to decrease. In particular, when the flying height is 30 nm or less, there is a possibility that the recording medium surface may intermittently contact or run continuously. As a solution, by using a smooth medium, the flying height at which the slider starts to contact the medium surface (magnetic disk surface) can be reduced, and intermittent contact with the medium surface can be reduced. However, if the start / stop of the disk is performed while the slider is in contact with the medium surface (contact start / stop method), the use of a smooth medium will increase the contact area between the medium surface and the slider when the disk is started. Adhesion increases. In a recent magnetic disk drive, a method of rotating a disk and floating a magnetic head slider (load unloading method) when starting the disk has been put to practical use. According to this method, the problem that the adhesive strength increases can be solved, and a smooth medium can be used.

The conventional magnetic head slider described in US Pat. No. 5,777,825 has two floating pads formed on the inflow side, a floating pad formed on the outflow side, and formed along both sides of the magnetic head slider. It is configured to include two side rails. In the above patent,
By generating a negative pressure in the area surrounded by these floating pads and side rails, the rigidity of the air film can be increased without increasing the pressing load, so that the variation in the flying height and the variation in the flying height can be reduced. However, in the load / unload method, when the conventional magnetic head slider is separated from the medium surface from a state in which it is stably flying above the medium surface (hereinafter, referred to as unload), the conventional magnetic head slider cannot Unloading cannot be performed easily because negative pressure acts on the surface.

[0004] Proceedings of the Symposium on Interface Technology
siumon Interface Technology Towards 100Gbit / in2 (TR
IB-Vol.9)) The conventional magnetic head slider described in pp1-9 has two floating pads formed on the inflow side,
A floating pad formed on the outflow side and two side rails formed along both sides of the slider are included. The center position of the negative pressure generated in a region surrounded by the floating pad and the side rail is determined. It is eccentric toward the outflow side. With this configuration, the negative pressure acts in a direction to increase the change in the slider attitude angle, so that the unloading can be easily performed.
However, when the slider is lowered on the surface of the medium rotating at high speed (hereinafter referred to as load), the air film rigidity in the pitching (front-back) direction of the conventional magnetic head slider is low, so the outflow pad outflow end is at the medium. After contact with the surface, the contact force and the moment due to the frictional force may cause forward bending, after which the inflow pad inflow end may come into contact with the medium surface. When the inflow end of the inflow pad comes into contact with the medium surface, the airflow does not flow into the air bearing surface, the levitation force is lost, and the airbag does not recover from the previous turning state.

[0005]

In the above-described conventional magnetic head slider, in the load / unload method, a negative pressure acts in the direction of pressing the slider against the medium surface during unloading, so that unloading is easy. Can not.
Further, since the rigidity of the air film in the pitching direction is low, if the inflow pad inflow end comes into contact with the medium surface during loading, it does not recover from the previously turned state.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a load / unload system that facilitates unloading, recovers a normal flying height even when the slider is turned forward during loading, and allows the slider to fly quickly and stably. is there.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a floating device having a contact surface which comes into contact with a disk surface when the magnetic disk is stopped at each of an air inflow end and an air outflow end of a surface facing the magnetic disk. A gap is provided between the magnetic head slider having the pad and the supporting body on both sides in the width direction of the slider and close to the inflow end of the slider, with the floating pad at the end on the air inflow side. This is achieved by providing an auxiliary pad having a contact surface that comes into contact with the disk surface when the magnetic disk is stopped. The contact surface shape of the auxiliary pad is desirably a strip shape (rectangular shape) having a longer axis that is narrower than the contact surface of the floating pad and that is parallel to or at an angle to the air inflow direction.

That is, assuming that the gap between the floating pad and the auxiliary pad at the end on the air inflow side is the first and second concave portions, when the disk is rotated (in a state where the slider is floated), the slider is separated by the respective gap. The first and second negative pressures are generated in a direction of attracting the pressure to the disk surface. If the sizes of the first and second concave portions are different, a difference occurs between the first and second negative pressures. Since the forces acting on the slider during unloading are these negative pressures, if there is a difference between the first and second negative pressures, the slider will tilt in the rolling direction during unloading. When the slider is inclined in the rolling direction, the slider is easily separated from the disk surface, and unloading is facilitated.

Further, if auxiliary pads are provided near the inflow end of the slider and on both sides in the width direction of the slider,
Even when the slider leans forward while tilting in the rolling direction, the auxiliary pad contacts first before the floating pad contacts the disk surface, and the floating pad does not contact the disk surface. Therefore, the airflow flows into the floating surface (between the contact surface and the disk surface) of the floating pad,
Since the flying force is secured, the flying height is restored to the normal flying height, and the slider flies instantly and stably.

[0010]

FIG. 22 shows a magnetic disk drive according to an embodiment of the present invention. This magnetic disk drive
A magnetic recording medium 3 and a driving unit 31 for rotating the magnetic recording medium 3, a magnetic head slider 1 and its support 2, a support arm 30 for positioning the magnetic head slider (hereinafter, referred to as a slider) 1, and a driving unit 32 for the magnetic head slider 1 and mounted on the slider 1 And a circuit 34 for processing the read / write signal of the magnetic head. FIG. 22A is a plan view showing a state in which the slider 1 travels and seeks while flying above the recording medium surface 3, and FIG. 22B is a side view showing the same. As the magnetic recording medium (hereinafter, referred to as a magnetic disk) 3, a smooth medium having a center line average surface roughness Ra of the medium surface (disk surface) of 1 nm or less and a center line maximum height Rp of 5 nm or less was used.

FIGS. 5 and 6 are a perspective view and a plan view, respectively, of the magnetic head slider 1 and its support 2 of the present embodiment. The support 2 includes a load beam 21, a gimbal 22, and a load protrusion (hereinafter, referred to as a dimple) 2.
3. It is composed of a tab 24 and a hook 25 used when the slider is separated from the medium surface in the process of unloading.

Hereinafter, a first embodiment of the present invention will be described with reference to FIG. In each of the embodiments described below, the overall configuration is the same as in FIGS. 22, 5, and 6, and therefore the description of the overall configuration is omitted.

FIG. 1A shows a three-dimensional perspective view of the magnetic head slider according to the first embodiment, and FIG. 1B shows the floating surface shape of the magnetic head slider. The slider 1 is a floating pad 11 (hereinafter referred to as an inflow pad) that can be a pair (two) of air bearing surfaces provided side by side in the width direction (a direction orthogonal to the air inflow direction) on the inflow side.
A pair of auxiliary pads 12 formed with a gap on both outer sides in the width direction of the two floating pads 11, and a single floating pad 1 provided on the outflow side that can be an air bearing surface
3 (hereinafter referred to as outflow pads). The auxiliary pad 12 is formed in a narrow (smaller in width than the inflow pad 11) strip extending in the air flow inflow direction. The reproducing MR is provided on the outflow end side of the outflow pad 13.
A recording / reproducing element 1b composed of an exposed part of the MR element of the head and a gap part of the recording electromagnetic induction type magnetic head is provided with a magnetic head 1c and a connection terminal 1 on the outflow end side surface of the slider 1.
d are provided respectively.

The slider 1 is a negative pressure utilizing type slider in which floating forces of different negative pressures are generated in the concave portion 14 between the pair of inflow pads 11 and the concave portions 141 and 142 between the inflow pad 11 and the auxiliary pad 12, respectively. . Since a floating force of a positive pressure for floating the slider is generated on both sides of the concave portion 14 by the inflow pad 11, the floating force of the sum of the negative pressure and the positive pressure and the pressing load are balanced, and a stable floating posture can be maintained. .

FIGS. 2, 3 and 4 show the inflow pad 11 and the auxiliary pad 1 of the magnetic head slider according to the present embodiment, respectively.
2 and a perspective view of the outflow pad 13 are shown. The pad surface 112 which comes into contact with the medium surface when the disk of each of these pads stops.
The contact surface (hereinafter referred to as a contact surface) is higher than the slider step surface 114 by a step δs (step depth), and a recess surface 116 is formed at a position lower than the contact surface 112 by a step δr (recess depth). Have been.
The bottom surfaces of the recesses 14, 141, 142 are recessed surfaces 11
It is 6. A side rail 117 extending from the outside of the rear end of the inflow pad 11 to the outflow side has a step surface 114.
And the side rail 117 having the same height as the step surface 114 from the rear end of the auxiliary pad 12 is formed to be elongated toward the outflow side. Step surface 114
The wall between the contact surface 112 and the contact surface 112 forms a step 113, and the wall between the step surface 114 and the recess 116 forms a step 115.

The leading end of the contact surface 112 of the inflow pad 11 is located at a position retracted by L111 from the leading end of the inflow side of the step surface 114 of the slider.
Of the contact surface 112 is located at a position retracted by L121 from the inflow side tip of the step surface 114 of the slider. Make L121 almost 0 or L121
By setting <L111, when the inflow end of the slider 1 comes into contact with the medium surface, the slider 1 always comes into contact with the contact surface 112 of the auxiliary pad 12, but does not contact the contact surface 112 of the inflow pad 11.

The contact surface 11 of the auxiliary pad 12
2 is larger than L111 in the front-rear direction of the slider, the contact surface 1 of the auxiliary pad 12
Twelve floating variations due to processing variations can be reduced.

The slider 1 has recesses 14, 141,
By changing the size of 142, the negative pressures generated in the concave portions 14, 141, 142 have different sizes. Since the flying attitude in the rolling direction needs to be parallel to the medium surface, when the size of the concave portion 141 is larger than the concave portion 142, the inflow pads 11 provided on both sides of the concave portion 141 are provided.
The contact surface 112 of the auxiliary pad 12 and the contact surface 112 of the auxiliary pad 12 are large, and the contact surface 112 of the inflow pad 11 and the contact surface 112 of the auxiliary pad 12 provided on both sides of the recess 142 are small.

The effects of the magnetic head slider of this embodiment and its support will be described with reference to FIGS. 7, 8 and 9. FIG.

FIG. 7A is a side view of the magnetic head slider according to the present embodiment during flying traveling, and FIG. 7B is a front view thereof. The dimple 23 acts as a load application point for applying a load F pressed from the load beam portion 21 to the slider 1. The dimple 23 is provided so that a restoring force acts on the slider 1 with three degrees of freedom in translation (up and down), pitching (back and forth), and rolling (seek) directions with the dimple 23 as a fulcrum.
Position (Xp, Yp) of dimple 23 which is a load application point
Is expressed as a dimensionless value of Xp = xp / L for the pitching direction and Yp = yp / w for the rolling direction. Where xp is the distance between the inflow end of the slider 1 and the dimple 23, yp is the distance between the end of the slider 1 in the width direction and the dimple 23, L is the length of the slider 1 in the longitudinal direction (inflow direction), and w is the slider. 1 is the length in the width direction (direction perpendicular to the inflow direction).

When rotating the magnetic disk, the slider 1 balances the pressing load F at the position of the dimple 23, the total Q1 of the positive pressure generated in each pad, and the total Q2 of the negative pressure generated from the recess, in the pitching direction and the rolling direction. While the pitching attitude angle .theta.p, the rolling attitude angle .theta.r, the inflow end floating amount h1, and the outflow end floating amount h2 are kept constant. The pitching attitude angle θp is an angle between the contact surface 112 and the medium surface in the slider longitudinal section, and the rolling attitude angle θr is an angle between the contact surface 112 and the medium surface in the slider width direction cross section.

The negative pressure generated from the recess 141 is Q
2 in, contact surface 112 of inflow pad 11 and contact surface 11 of auxiliary pad 12 provided on both sides of recess 141
The positive pressure generated from the contact surface 112 of the inflow pad 11 and the contact surface 112 of the auxiliary pad 12 provided on both sides of the concave portion 142 are represented by Q1in. Recess 14
Assuming that the negative pressure generated from 2 is Q2out, Q2in and Q2
out is different, but Q2in-Q1in and Q2out-Q1out have substantially the same value.

FIG. 8A shows a side view of the magnetic head slider according to the present embodiment at the time of unloading, and FIG. 8B shows a front view thereof. In the process of unloading, tab 2
4 and the dimple 23 and the slider 1 separate,
When the hook 25 is in contact with the load beam portion 21 and separates the slider from the medium surface, the external forces acting on the slider are only negative pressures Q2in and Q2out. Since the slider 1 of the present embodiment has a gradient in the magnitude of the negative pressure in the rolling direction as described above, the rolling posture angle θr of the slider 1 increases, and the timing of contact with the hook 25 is shifted. That is, since the two hooks 25 contact one by one instead of two, the unloading becomes easy.

FIGS. 9A and 9B are side views of the magnetic head slider of the present embodiment at the time of loading. In the process of loading, when the tab 24 is lifted, the dimple 23 and the slider 1 are separated, and the hook 25 is in contact with the load beam portion 21 and the slider is lowered at high speed onto the medium surface rotating at high speed, If an air film is not sufficiently formed between the slider and the medium, and no floating force is acting on the slider, after the outflow pad outflow end contacts the medium surface, the slider is turned forward by the moment due to the contact force and frictional force. Therefore, the inflow pad inflow end may come into contact with the medium surface. The slider 1 according to the present embodiment comes into contact with the auxiliary pad 12 even when turning forward, but does not contact the inflow pad 11. Therefore, the airflow flows into the floating surface of the inflow pad 11, and the floating force is secured, so that the normal floating amount is recovered, and the stable floating instantaneously occurs.

FIG. 9C is a side view of the conventional magnetic head slider when it is loaded. After the outflow pad outflow end of the conventional slider 1 comes into contact with the medium surface, when the front end is turned by a moment due to the contact force and frictional force, the inflow end of the flying pad 11 comes into contact with the medium surface.
As a result, the airflow does not flow into the air bearing surface, so that the unusual green color is not secured, and the floating pad 11 remains turned forward.
End of the media is in continuous contact with the medium surface.

FIG. 11 shows another flying surface shape (hereinafter referred to as ABS1) of the magnetic head slider of the present embodiment.
FIG. 10 shows the flying surface shape (hereinafter, referred to as ABS0) of a conventional magnetic head slider.

FIG. 12 shows that the flying height h2 of the outflow end under the innermost, innermost, and outermost conditions of the disk at the rated rotation of the disk is set to an altitude of 0 using the ABS1 and ABS0.
2 shows the results calculated for m and an altitude of 3000 m. The calculation is as follows: pressing load F26.5 mN, dimple position Yp
0.5 is constant, and in the ABS ABS1, when the ratio of the step depth δs to the recess depth δr is δs / δr: 0.15 and the dimple position Xp is 0.5, δs / δr: 0.1
23 and Xp: 0.085, the floating surface shape ABS0
Then, δs / δr: 0.15, dimple position Xp: 0.
In the case of 5, the test was performed for the three types.

As shown in FIG. 12, the flying height change from the innermost circumference to the outermost circumference of the slider of the slider having the ABS ABS1 according to the embodiment of the present invention, and the flying height change due to the atmospheric pressure change around the slider. As for the slider of the present invention, the slider is as small as the conventional slider. In particular, for air bearing surface shape ABS1, δs / δr = 0.15 and Xp = 0.05
In the case of 85, the change in the flying height due to the change in air pressure is 0.3 nm or less. Xp = 0.08 for the ABS1
In the case of No. 5, when the slider 1 is inclined forward and comes into contact with the medium surface, it comes into contact with the auxiliary pad 12 and the floating pad 11
Does not contact, the air flow enters the air bearing surface, the levitation force is secured, and the normal levitation amount is restored.

FIG. 13A shows a conventional ABS of the ABS.
0, and FIG. 13B shows the pressure distribution under the innermost circumference condition in the above calculation for the air bearing surface shape ABS1 according to the embodiment of the present invention. Arrows indicate the direction of inflow of the air flow, and portions that appear to rise from the paper surface indicate positive pressure. As illustrated, a negative pressure is generated in the concave portion 142 of the ABS 1.

FIG. 14 shows the flying surface shape of a magnetic head slider according to a second embodiment of the present invention. As shown in FIG. 14, the floating surface shape of the present embodiment is such that the center line in the longitudinal direction of the contact surface 112 of the auxiliary pad 12 (in other words, the side surface in the longitudinal direction of the contact surface 112) is angled to the inflow side end of the slider. It is provided to be inclined so as to form α. As a result, the side surface on the air inflow side of the contact surface 112 of the auxiliary pad 12 in the longitudinal direction faces the corners at both ends in the width direction on the inflow side of the slider 1, and the width direction end of the contact surface 112 of the auxiliary pad 12 One of the portions is parallel to the inflow end of the slider, and the other is parallel to the air inflow direction of the slider.
The end of the contact surface 112 of the auxiliary pad 12 parallel to the inflow end of the slider is located closer to the inflow end of the slider than the inflow end of the flying pad 11, and is parallel to the air inflow direction of the slider. The end is located outside the widthwise outside end of the floating pad 11. Also, the recess 14
As shown in FIG. 14, most of the components 1 and 142 are located downstream of the auxiliary pad 12 in the airflow direction.

When the slider is turned forward, the tip of the contact surface 112 of the auxiliary pad 12 comes into contact with the medium surface, but when the slider is turned forward, the slider is simultaneously inclined in the rolling direction. Therefore, in the case of the first embodiment, there is a possibility that the corner portion of the contact surface 112 of the auxiliary pad 12 outside the tip portion may contact the medium surface at a point.

The angle α is set to such an angle that the slider is turned forward while being inclined in the rolling direction, so that when the corner of the contact surface 112 of the auxiliary pad 12 comes into contact with the medium surface, it is contacted not by a point but by a line. I have. Since the auxiliary pads 12 are arranged in such positions and directions,
When the slider leans forward while tilting in the rolling direction, the contact surface 112 of the auxiliary pad 12 comes into contact with the medium surface at a line on the side (side along the long axis). For this reason, the contact area becomes larger and the contact stress becomes smaller than when the corner portion of the contact surface 112 contacts at a point.
Therefore, it does not cause fatal damage to the medium surface. Also,
By lapping the periphery of the contact surface 112 of the auxiliary pad 12 and chamfering the corner formed by the contact surface 112 and the step 113, damage to the medium surface can be further reduced.

FIG. 15 shows the flying surface shape of a magnetic head slider according to a third embodiment of the present invention. In the slider 1 of the present embodiment, one floating pad 11 is provided on the inflow side, and a pair of strips is formed on both outer sides of the floating pad 11 in the width direction of the slider with a gap between the floating pad 11 and the slider. The auxiliary pad 12 is formed in the shape of a circle, and one floating pad 13 is provided on the outflow side. The slider 1 of this configuration differs from the slider of the first embodiment shown in FIG. 1 in that the two inflow pads 11 of the first embodiment are connected and become one, and The slider 1 in the form of
There is an effect similar to that of the slider of the embodiment.

FIG. 16 shows the flying surface shape of a magnetic head slider according to a fourth embodiment of the present invention. In the slider 1 of the present embodiment, one floating pad 11 is provided on the inflow side, and a pair of strips is formed on both outer sides of the floating pad 11 in the width direction of the slider with a gap between the floating pad 11 and the slider. The auxiliary pad 12 is formed in the shape of a circle, and a pair of floating pads 13 are provided on both outer sides on the outflow side. The slider 1 according to the present embodiment also has the same effect as the slider according to the first embodiment.

FIG. 17 shows the flying surface shape of a magnetic head slider according to a fourth embodiment of the present invention. FIG. 17A is a plan view of the air bearing surface shape of the present embodiment, and FIG. 17B is a cross-sectional view taken along line A-AA of FIG. In the present embodiment, in the air bearing surface shape of the first embodiment, a minute projection 12a is formed on the contact surface 112 of the strip-shaped auxiliary pad 12 provided on both sides of the inflow pad 11, and the contact surface 112 Surface roughness,
1 is larger than the surface roughness of the contact surface 112. If the height H12a of the minute projection 12a is defined as the height from the step surface 114, H12a ≦ δs. With this configuration, when the auxiliary pad 12 comes into contact with the medium surface, the true contact area is reduced, so that the contact force, the frictional force, and the moment due to them are reduced. Therefore, slider vibration due to contact with the smoothing medium is reduced,
The slider and the medium surface are not catastrophically damaged.

FIGS. 18A to 18D show an example of a method of applying the lithography technique to the minute projections 12a of the magnetic head slider according to the fifth embodiment. (A) First, the flying surface (contact surface 1) of the magnetic head slider on which the flying pads 11 and the auxiliary pads 12 are formed.
12 and a photoresist surface 12b on the step surface 114).
Is applied, and the mask 12c is overlaid and exposed. (B) After exposure, the mask 12c is removed and development is performed to remove the photoresist 12b in a non-photosensitive portion (the contact surface 112 of the auxiliary pad 12). (C) Perform ion beam etching. Alumina titanium carbide is used for the current slider material. A large amount of the soft aluminum phase is etched by the ion beam etching, and the hard titanium carbide phase remains as the minute projection 12a. The height H12a of the minute projection 12a is controlled by the etching time. (D) The photoresist 12b is removed.

FIGS. 19A and 19B show the sixth embodiment of the present invention.
The flying surface shape of the magnetic head slider according to the embodiment is shown. FIG. 19A shows a plan view of the floating surface shape of the present embodiment, and FIG. 19B shows BB of FIG. 19A.
4 shows a cross section taken along line B. The floating surface shape of the present embodiment is the same as the floating surface shape of the first embodiment.
Auxiliary pads 15 are provided on both sides of the auxiliary pad 15, and minute projections 15a are formed on the contact surface 112 of the auxiliary pad 15, and the surface roughness of the contact surface 112 is compared with the surface roughness of the contact surface 112 of the inflow pad 11. It is a big one.
If the height H15a of the minute projection 15a is defined as the height from the step surface 114, H15a ≦ δs. With this configuration, when the auxiliary pad 12 comes into contact with the medium surface, the true contact area is reduced, so that the contact force, the frictional force, and the moment due to them are reduced. Therefore, even if the magnetic spacing (the distance from the read / write element 1b to the magnetic film in the medium) is not increased, the slider vibration due to the contact with the smooth medium is reduced, and the slider and the medium surface are fatally damaged. Will not be affected.

FIG. 20 shows the flying surface shape of a magnetic head slider according to a seventh embodiment of the present invention. The floating surface shape of the present embodiment is different from the floating surface shape of the first embodiment in that auxiliary pads 16 are provided at both end corners of the outflow end of the outflow pad 13.
2 are formed on the contact surface 112.
Are made larger than the surface roughness of the contact surface 112 of the inflow pad 11. Micro projection 16a
Is defined as the height from the step surface 114, H16a ≦ δs. The effect of the slider 1 of this embodiment having this configuration is the same as the effect of the sixth embodiment. The cross section taken along line B-BB of FIG. 20 is the same as FIG. 19B.

FIG. 21 shows an air bearing surface shape of a magnetic head slider according to an eighth embodiment of the present invention. The flying surface shape of the present embodiment is different from the flying surface shape of the second embodiment shown in FIG. 14 in that minute projections 12 a are formed on the contact surfaces 112 of the auxiliary pads 12 provided on both sides of the inflow pad 11. The surface roughness of the contact surface 112
Is larger than the surface roughness of the contact surface 112. If the height H12a of the minute projection 12a is defined as the height from the step surface 114, H12a ≦ δs. The effect of the slider 1 of this embodiment having this configuration is the same as the effect of the fifth embodiment.

In each of the above embodiments, two or one inflow pad 11 and one outflow pad 13 of the slider are provided, respectively.
And one outflow pad 13 can be similarly applied. Also in this case, the auxiliary pads 12 may be arranged on both sides of the inflow pad 11 with an interval. Also in this case, it is desirable that the distance between the inflow-side tip of the auxiliary pad 12 and the inflow-side tip of the slider be smaller than the distance between the inflow-side tip of the inflow pad 11 and the inflow-side tip of the slider.

In each of the above embodiments, the width and length of the auxiliary pads arranged on both sides of the slider need not necessarily be the same but different if the conditions described with reference to FIG. 7 are satisfied. It does not matter.

[0042]

According to the present invention, the unloading of the magnetic head slider can be facilitated, and even when the inflow pad inflow end comes into contact with the medium surface during loading, the flying height can be restored to a normal flying height, and instantaneous stable flying can be achieved. can do. Therefore, the present invention is effective in providing a magnetic head slider, a support thereof, and a magnetic disk device which are excellent in high reliability and high recording capacity.

[Brief description of the drawings]

FIG. 1 is a three-dimensional perspective view showing a floating surface shape of a magnetic head slider according to a first embodiment of the present invention.

FIG. 2 is a three-dimensional perspective view of an inflow pad of the magnetic head slider shown in FIG.

FIG. 3 is a three-dimensional perspective view of an auxiliary pad of the magnetic head slider shown in FIG. 1;

FIG. 4 is a three-dimensional perspective view of an outflow pad of the magnetic head slider shown in FIG. 1;

FIG. 5 is a three-dimensional perspective view of a support of the magnetic head slider according to the embodiment of the present invention.

FIG. 6 is a plan view of a support of the magnetic head slider shown in FIG. 5;

FIGS. 7A and 7B are a side view and a front view of the magnetic head slider and its support according to the first embodiment of the present invention during flying traveling.

FIGS. 8A and 8B are a side view and a front view of the magnetic head slider and its support according to the first embodiment of the present invention at the time of unloading.

FIG. 9 is a side view of the magnetic head slider and its support according to the first embodiment of the present invention, and a conventional magnetic head slider and its support during loading.

FIG. 10 shows a flying surface shape AB of a conventional magnetic head slider.
It is a figure showing S0.

FIG. 11 is a diagram showing another flying surface shape ABS1 of the magnetic head slider according to the first embodiment of the present invention.

FIG. 12 is a diagram showing a comparison between the flying height calculation results of the flying surface shape ABS1 of the magnetic head slider according to the first embodiment of the present invention and the flying surface shape ABS0 of the related art.

FIG. 13 is a diagram showing a pressure distribution at the time of flying of a flying surface shape ABS1 of the magnetic head slider according to the first embodiment of the present invention.

FIG. 14 is a plan view showing a floating surface shape of a magnetic head slider according to a second embodiment of the present invention.

FIG. 15 is a plan view showing a floating surface shape of a magnetic head slider according to a third embodiment of the present invention.

FIG. 16 is a plan view showing a floating surface shape of a magnetic head slider according to a fourth embodiment of the present invention.

17A and 17B are a plan view and a cross-sectional view showing the shape of the floating surface of a magnetic head slider according to a fifth embodiment of the present invention.

FIG. 18 is a cross-sectional view showing a method of forming a minute projection of the magnetic head slider shown in FIG.

FIGS. 19A and 19B are a plan view and a cross-sectional view illustrating a flying surface shape of a magnetic head slider according to a sixth embodiment of the present invention.

FIG. 20 is a plan view showing a floating surface shape of a magnetic head slider according to a seventh embodiment of the present invention.

FIG. 21 is a plan view showing a floating surface shape of a magnetic head slider according to an eighth embodiment of the present invention.

FIG. 22 is a plan view and a side view showing the magnetic disk drive according to the embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 2 Support 3 Magnetic recording medium 11 Inflow pad 12 Auxiliary pad 12a Micro projection 13 Outflow pad 14 Depression where negative pressure is generated 15 Auxiliary pad 15a Micro projection 16 Auxiliary pad 16a Micro projection 21 Load beam section 22 Gimbal section 23 Dimple 24 Tab 25 Hook 30 Support arm 31 Drive unit for rotating magnetic recording medium 3 Drive unit for support arm 34 Recording / reproducing signal processing circuit 112 Contact surface 141, 142 Concavity where negative pressure is generated

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Jun Kun, 502 Kandachi-cho, Tsuchiura-shi, Ibaraki Pref. Machinery Research Laboratories, Hitachi, Ltd. 5D042 NA02 PA01 PA05 PA09 QA02 QA03 RA02

Claims (8)

[Claims] 1. A magnetic head having a flying pad provided with a contact surface at the air inflow end and air outflow end on a surface facing a magnetic disk when the magnetic disk is stopped. In the slider and its support, on both outer sides in the slider width direction of the floating pad on the air inflow side end, leaving a gap between the floating pad,
A magnetic head slider and a support for the magnetic head slider, further comprising an auxiliary pad having a contact surface that comes into contact with the disk surface when the magnetic disk is stopped. 2. A magnetic head slider according to claim 1, wherein a distance between an air inflow side end of a contact surface of said auxiliary pad and an air inflow side end of said slider is A, and said air inflow side end. A magnetic head slider and a support for the magnetic head slider, wherein A <B, where B is the distance between the air inflow side end of the contact surface of the floating pad of the portion and the air inflow side end of the slider. 3. The magnetic head slider according to claim 1, wherein a contact surface of the auxiliary pad has a rectangular shape, a length in a longitudinal direction thereof is L, and an end of the air inflow side end is formed. A magnetic head slider and its support, wherein L> B, where B is the distance between the air inflow end of the contact surface of the flying pad and the air inflow end of the slider. 4. The magnetic head slider according to claim 1, wherein the surface roughness of the contact surface of the auxiliary pad is equal to the contact surface of the floating pad at the air inflow side end. A magnetic head slider and a support thereof, wherein the slider is larger than the surface roughness of the magnetic head slider. 5. A magnetic head slider and a support thereof according to claim 1, wherein auxiliary pads are formed on both outer sides in the slider width direction of a floating pad at an air outflow end. The distance between the air outflow end of the contact surface of the auxiliary pad and the air outflow end of the slider is C, and the air outflow end of the contact surface of the floating pad at the air outflow end and the slider. A magnetic head slider and its support, wherein C ≦ D, where D is the distance from the outflow end of the air. 6. The magnetic head slider according to claim 5, wherein a contact surface of an auxiliary pad formed on both outer sides in a slider width direction of a floating pad at an end of the air outflow side has a surface roughness of the air outflow side. A magnetic head slider and its support, characterized in that the surface roughness is greater than the surface roughness of the contact surface of the floating pad at the end. 7. A method for manufacturing a magnetic head slider and its support according to claim 4 or 6, wherein: a. Applying a photoresist on the slider surface, overlaying a mask and exposing; b. Developing the exposed slider and removing the photoresist in unexposed areas; c. After removing the photoresist that is not exposed,
Ion beam etching the slider surface; d. Removing the photoresist remaining on the slider surface after the end of the ion beam etching. A method for manufacturing a magnetic head slider and a support thereof. 8. A magnetic disk drive comprising a magnetic disk, a magnetic head slider for reading and / or writing data to and from the magnetic disk, and a support for the magnetic head slider. 6. A magnetic disk drive, wherein the support is the magnetic head slider according to claim 1 and a support thereof.