JP2002310611A5 - - Google Patents
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- JP2002310611A5 JP2002310611A5 JP2001110000A JP2001110000A JP2002310611A5 JP 2002310611 A5 JP2002310611 A5 JP 2002310611A5 JP 2001110000 A JP2001110000 A JP 2001110000A JP 2001110000 A JP2001110000 A JP 2001110000A JP 2002310611 A5 JP2002310611 A5 JP 2002310611A5
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- JP
- Japan
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001110000A JP4785263B2 (en) | 2001-04-09 | 2001-04-09 | measuring device |
| US10/116,924 US6842255B2 (en) | 2001-04-09 | 2002-04-05 | Interferometer and interferance measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001110000A JP4785263B2 (en) | 2001-04-09 | 2001-04-09 | measuring device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002310611A JP2002310611A (en) | 2002-10-23 |
| JP2002310611A5 true JP2002310611A5 (en) | 2008-06-19 |
| JP4785263B2 JP4785263B2 (en) | 2011-10-05 |
Family
ID=18961849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001110000A Expired - Fee Related JP4785263B2 (en) | 2001-04-09 | 2001-04-09 | measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4785263B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7106455B2 (en) | 2001-03-06 | 2006-09-12 | Canon Kabushiki Kaisha | Interferometer and interferance measurement method |
| JP4400426B2 (en) * | 2004-11-19 | 2010-01-20 | サンケン電気株式会社 | Switching power supply |
| CN104913732B (en) * | 2015-06-10 | 2017-11-03 | 中国计量科学研究院 | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser |
| DE102015119274B4 (en) * | 2015-11-09 | 2018-07-12 | Björn Habrich | Method and device for determining the spatial position of an object by means of interferometric length measurement |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4725144A (en) * | 1986-02-25 | 1988-02-16 | R & D Associates | Optic element testing method and apparatus |
| JPH08189806A (en) * | 1995-01-11 | 1996-07-23 | Fuji Xerox Co Ltd | Interference measuring method and interferometer |
| JPH08193805A (en) * | 1995-01-13 | 1996-07-30 | Fuji Xerox Co Ltd | Interferometer and method for using it |
| JPH0991732A (en) * | 1995-09-20 | 1997-04-04 | Sony Corp | Optical pickup device |
| JP3590508B2 (en) * | 1997-09-29 | 2004-11-17 | 三菱電機株式会社 | Optical system assembly adjustment device and assembly adjustment method |
| JP2002257524A (en) * | 2001-03-06 | 2002-09-11 | Canon Inc | Interferometer and interference measuring method |
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2001
- 2001-04-09 JP JP2001110000A patent/JP4785263B2/en not_active Expired - Fee Related