JP2002305081A5 - - Google Patents

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Publication number
JP2002305081A5
JP2002305081A5 JP2002022983A JP2002022983A JP2002305081A5 JP 2002305081 A5 JP2002305081 A5 JP 2002305081A5 JP 2002022983 A JP2002022983 A JP 2002022983A JP 2002022983 A JP2002022983 A JP 2002022983A JP 2002305081 A5 JP2002305081 A5 JP 2002305081A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002022983A
Other languages
Japanese (ja)
Other versions
JP4096568B2 (ja
JP2002305081A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002022983A priority Critical patent/JP4096568B2/ja
Priority claimed from JP2002022983A external-priority patent/JP4096568B2/ja
Publication of JP2002305081A publication Critical patent/JP2002305081A/ja
Publication of JP2002305081A5 publication Critical patent/JP2002305081A5/ja
Application granted granted Critical
Publication of JP4096568B2 publication Critical patent/JP4096568B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002022983A 2001-01-31 2002-01-31 統合マスクの組立装置および組立方法並びに有機ｅｌ素子の製造方法。 Expired - Fee Related JP4096568B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002022983A JP4096568B2 (ja) 2001-01-31 2002-01-31 統合マスクの組立装置および組立方法並びに有機ｅｌ素子の製造方法。

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-23475 2001-01-31
JP2001023475 2001-01-31
JP2002022983A JP4096568B2 (ja) 2001-01-31 2002-01-31 統合マスクの組立装置および組立方法並びに有機ｅｌ素子の製造方法。

Publications (3)

Publication Number Publication Date
JP2002305081A JP2002305081A (ja) 2002-10-18
JP2002305081A5 true JP2002305081A5 (esLanguage) 2005-08-11
JP4096568B2 JP4096568B2 (ja) 2008-06-04

Family

ID=26608626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002022983A Expired - Fee Related JP4096568B2 (ja) 2001-01-31 2002-01-31 統合マスクの組立装置および組立方法並びに有機ｅｌ素子の製造方法。

Country Status (1)

Country Link
JP (1) JP4096568B2 (esLanguage)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101936677B1 (ko) * 2012-07-03 2019-01-09 엘지디스플레이 주식회사 측정용 트레이와 이의 구동방법 그리고 측정용 트레이를 갖는 증착장치와 이를 이용한 측정방법
JP6108544B2 (ja) * 2013-06-17 2017-04-05 新東エスプレシジョン株式会社 マスク製造装置
JP6878032B2 (ja) * 2017-02-10 2021-05-26 株式会社ジャパンディスプレイ 蒸着マスク固定装置

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