JP2002296198A - Illuminating device in curved surface property inspection apparatus - Google Patents

Illuminating device in curved surface property inspection apparatus

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Publication number
JP2002296198A
JP2002296198A JP2001096697A JP2001096697A JP2002296198A JP 2002296198 A JP2002296198 A JP 2002296198A JP 2001096697 A JP2001096697 A JP 2001096697A JP 2001096697 A JP2001096697 A JP 2001096697A JP 2002296198 A JP2002296198 A JP 2002296198A
Authority
JP
Japan
Prior art keywords
light
hue
illumination
unit
illuminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001096697A
Other languages
Japanese (ja)
Other versions
JP4038993B2 (en
Inventor
Hatsuo Mese
初夫 目瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2001096697A priority Critical patent/JP4038993B2/en
Publication of JP2002296198A publication Critical patent/JP2002296198A/en
Application granted granted Critical
Publication of JP4038993B2 publication Critical patent/JP4038993B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an illuminating device in a curved surface property inspection apparatus that can secure a lower illuminating angle necessary for improvement of inspection accuracy even if an illuminating device is made small-sized. SOLUTION: The inspection apparatus 10 includes a main illuminating part 11 arranged over the surface of an assembled board 110 carried in with a predetermined clearance H for illuminating the surface of the board 110 by a plurality of color lights, each light having a different illuminating angle from each other, a color camera 12 for separately imaging each color light reflected off the surface of the board 110 which the color lights illuminate, and a compensatory illuminating part 13 for illuminating the surface of the board 110 by one of the color lights from a side direction of the board 110 at a lower illuminating angle than that of the main illuminating part 11.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、例えば、はんだの
傾斜角度を検査する実装基板検査装置のような曲面性状
検査装置の照明装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lighting device for a curved surface property inspection apparatus such as a mounting board inspection apparatus for inspecting a tilt angle of solder.

【0002】[0002]

【従来の技術】従来、はんだの傾斜角度を検査する実装
基板検査装置としては特公平6−1173号公報に掲げ
るものが知られており、この実装基板検査装置100
は、図9に示すように、カラーハイライト方式のはんだ
検査装置であり、搬入した被検査対象物である実装基板
110の表面上に所定クリアランスHをもって配置さ
れ、実装基板110の表面への各色相光の照射角度が異
なるように、3色の色相光を照射する3色照明部120
と、実装基板110の表面上に照射した各色相光の反射
光を色相光別に撮像するカラーカメラ130と、3色照
明部120で照射する各色相光を合成することで白色光
となるように、3色照明部120で照射する各色相光の
光量を調整する光量調整部140と、カラーカメラ13
0で得られた撮像パターンから実装基板110の表面上
のはんだの傾斜角を検出する画像処理部150とを有し
ている。
2. Description of the Related Art Conventionally, as a mounting board inspection apparatus for inspecting a tilt angle of a solder, one disclosed in Japanese Patent Publication No. 6-1173 is known.
As shown in FIG. 9, is a solder tester of the color highlight system, which is arranged with a predetermined clearance H on the surface of the mounting substrate 110 which is the object to be inspected, and A three-color illumination unit 120 that irradiates three hue lights so that the hue light irradiation angles are different.
Then, the color camera 130 that captures the reflected light of each hue light irradiated on the surface of the mounting substrate 110 for each hue light and the hue light irradiated by the three-color illumination unit 120 are combined to be white light. A light amount adjustment unit 140 that adjusts the amount of each hue light emitted by the three-color illumination unit 120;
And an image processing unit 150 that detects the inclination angle of the solder on the surface of the mounting substrate 110 from the imaging pattern obtained in step S0.

【0003】3色照明部120は、リング状の3つの蛍
光灯で構成してあり、赤色相光を照射する20Wの赤色
(R)蛍光灯121と、この赤色蛍光灯121の下段に
設けられ且つ緑色相光を照射する30Wの緑色(G)蛍
光灯122と、この緑色蛍光灯122の下段に設けられ
且つ青色相光を照射する30Wの青色(B)蛍光灯12
3とを有している。
The three-color illuminating unit 120 is composed of three ring-shaped fluorescent lamps, and is provided below the red fluorescent lamp 121 with a 20 W red (R) fluorescent lamp 121 for emitting red phase light. And a 30 W green (G) fluorescent lamp 122 for emitting green phase light, and a 30 W blue (B) fluorescent lamp 12 provided below the green fluorescent lamp 122 and emitting blue phase light
And 3.

【0004】このような実装基板検査装置100では、
被検査対象物である実装基板110が順次搬送されるた
め、3色照明部120及び実装基板110間は最低でも
20mmのクリアランスHを確保する必要がある。
In such a mounting board inspection apparatus 100,
Since the mounting substrate 110 to be inspected is sequentially transported, it is necessary to secure a clearance H of at least 20 mm between the three-color illumination unit 120 and the mounting substrate 110.

【0005】また、実装基板110の表面上のはんだ状
態の検査精度をよくするためには照射角度を低くする必
要があり、この照射角度を低くする方法として、図9に
示すように最下段の青色蛍光灯123の外形寸法を大き
くする方法がとられている。
Further, in order to improve the inspection accuracy of the solder state on the surface of the mounting board 110, it is necessary to lower the irradiation angle. As a method for lowering the irradiation angle, as shown in FIG. A method of increasing the outer dimensions of the blue fluorescent lamp 123 is adopted.

【0006】30Wの青色蛍光灯123の外形寸法をφ
220mmと大きくすることで、クリアランスHが20
mmであることを考慮すると、最下段の青色蛍光灯12
3の照射角度範囲は15度になる。
The external dimensions of the 30 W blue fluorescent lamp 123 are φ
By increasing it to 220 mm, the clearance H becomes 20
mm, the lowermost blue fluorescent lamp 12
The irradiation angle range of No. 3 is 15 degrees.

【0007】このように、最下段の青色蛍光灯123の
照射角度範囲を15度にすることで、実装基板110の
表面上のはんだ状態を高い精度で検査することができ
る。
As described above, by setting the irradiation angle range of the lowermost blue fluorescent lamp 123 to 15 degrees, the solder state on the surface of the mounting substrate 110 can be inspected with high accuracy.

【0008】ここで、一般的な実装基板検査装置におけ
る照射角度及び照射領域の関係について説明する。図1
2の(1)、(2)は一般的な実装基板検査装置におけ
る照射角度及び照射領域の関係を示す説明図である。
Here, the relationship between the irradiation angle and the irradiation area in a general mounting board inspection apparatus will be described. Figure 1
2 (1) and (2) are explanatory diagrams showing the relationship between the irradiation angle and the irradiation area in a general mounting board inspection apparatus.

【0009】図12の(1)、(2)において、実装基
板110上には、はんだ付けで実装部品111が実装さ
れているが、実装基板検査装置が実装基板110の表面
に色相光を照射して、その反射光に応じてはんだ検査を
実行する場合、実装基板110上のはんだ112のA領
域からE領域までの照射領域は、その色相光の照射角度
によって異なる。
In (1) and (2) of FIG. 12, the mounting component 111 is mounted on the mounting substrate 110 by soldering, and the mounting substrate inspection apparatus irradiates the surface of the mounting substrate 110 with hue light. When the solder inspection is performed in accordance with the reflected light, the irradiation area of the solder 112 on the mounting board 110 from the area A to the area E differs depending on the irradiation angle of the hue light.

【0010】例えば照射角度を60度とした場合にはA
領域のみを照射、照射角度を45度とした場合にはA領
域からB領域までを照射、照射角度を30度とした場合
にはA領域からC領域までを照射、照射角度を15度と
した場合にはA領域からD領域までを照射、照射角度を
0度とした場合にはA領域からE領域まで照射すること
ができる。つまり、照射角度が低ければ低いほど、その
色相光を照射する領域は広くなるため、そのはんだの検
査精度は著しく高くなることがわかる。
For example, if the irradiation angle is 60 degrees, A
When only the region is irradiated, when the irradiation angle is 45 degrees, the region A to the region B is irradiated. When the irradiation angle is 30 degrees, the region A to the region C is irradiated, and the irradiation angle is 15 degrees. In this case, irradiation can be performed from the region A to the region D, and when the irradiation angle is set to 0 degree, irradiation can be performed from the region A to the region E. In other words, it can be seen that the lower the irradiation angle is, the larger the area to be irradiated with the hue light is, and therefore the inspection accuracy of the solder is significantly increased.

【0011】しかしながら、近年、実装基板検査装置1
00の小型化に伴い、その実装基板検査装置100に使
用される照明装置の小型化も進んでいる。図10は、こ
のような小型化した照明装置を使用した従来の実装基板
検査装置の概略構成を示す説明図である。尚、図9に示
す実装基板検査装置と同一の構成については同一符号を
付すことで、その構成及び動作の説明については省略す
る。
However, recently, the mounting board inspection apparatus 1
As the size of the illumination device used in the mounting board inspection apparatus 100 has been reduced, the size of the illumination device has also been reduced. FIG. 10 is an explanatory diagram showing a schematic configuration of a conventional mounting board inspection device using such a downsized lighting device. Note that the same components as those of the mounting board inspection apparatus shown in FIG. 9 are denoted by the same reference numerals, and description of the configurations and operations is omitted.

【0012】図10に示す実装基板検査装置100A
は、光量調整部140及び画像処理部150の他に、実
装基板110の表面上を、所定クリアランスHでX−Y
軸方向に移動する3色照明部120A及びカラーカメラ
130Aを有している。
A mounting board inspection apparatus 100A shown in FIG.
In addition to the light amount adjustment unit 140 and the image processing unit 150, the X-Y
It has a three-color illumination unit 120A and a color camera 130A that move in the axial direction.

【0013】この3色照明部120Aは、リング状の3
つの蛍光灯で構成してあり、赤色相光を照射する9Wの
赤色蛍光灯121Aと、この赤色蛍光灯121Aの下段
に設けられ且つ緑色相光を照射する9Wの緑色蛍光灯1
22Aと、この緑色蛍光灯122Aの下段に設けられ且
つ青色相光を照射する9Wの青色蛍光灯123Aとを有
している。
The three-color illumination unit 120A has a ring-shaped
A 9 W red fluorescent lamp 121A configured to emit red phase light, and a 9 W green fluorescent lamp 1 provided below the red fluorescent lamp 121A and configured to emit green phase light.
22A and a 9-W blue fluorescent lamp 123A that is provided below the green fluorescent lamp 122A and emits blue phase light.

【0014】また、同様に、このような実装基板検査装
置100Aにおいては、被検査対象物である実装基板1
10が順次搬送されるため、3色照明部120A及び実
装基板110間は最低でも20mmのクリアランスHを
確保する必要がある。
Similarly, in such a mounting board inspection apparatus 100A, the mounting board 1 to be inspected is mounted.
10 are sequentially conveyed, it is necessary to secure a clearance H of at least 20 mm between the three-color illumination unit 120A and the mounting board 110.

【0015】9Wの青色蛍光灯123Aの外形寸法φを
120mm、クリアランスを20mmとすると、最下段
の青色蛍光灯123Aの照射角度は26度になる。
Assuming that the outer diameter φ of the 9W blue fluorescent lamp 123A is 120 mm and the clearance is 20 mm, the irradiation angle of the lowermost blue fluorescent lamp 123A is 26 degrees.

【0016】そして、実装基板110の表面上を、X−
Y軸方向に3色照明部120A及びカラーカメラ130
Aを移動可能にすることで、実装基板100上の表面上
のはんだ状態を検査することができる。
The surface of the mounting board 110 is
The three-color illumination unit 120A and the color camera 130 in the Y-axis direction
By making A movable, the state of solder on the surface of the mounting board 100 can be inspected.

【0017】また、従来の実装基板検査装置100Aに
使用される3色照明部120Aは、リング状の蛍光灯で
構成しているため、さらなる3色照明部120Aの小型
化は難しい。
Further, since the three-color illumination unit 120A used in the conventional mounting board inspection apparatus 100A is formed of a ring-shaped fluorescent lamp, it is difficult to further reduce the size of the three-color illumination unit 120A.

【0018】そこで、図11に示す実装基板検査装置1
00Bは、3色照明部をリング状の蛍光灯ではなく、赤
色LED121B、緑色LED122B及び青色LED
123Bで構成する3色LED照明部120Bにするこ
とで、照明装置の小型化を図っている。この場合、3色
LED照明部120Bのケース外形寸法φを100m
m、クリアランスHを20mmとすると、青色LED1
23Aの照射角度は26度となる。
Therefore, the mounting board inspection apparatus 1 shown in FIG.
00B is a red LED 121B, a green LED 122B, and a blue LED instead of a three-color illuminating unit that is a ring-shaped fluorescent lamp.
The size of the lighting device is reduced by using a three-color LED lighting unit 120B composed of 123B. In this case, the case outer diameter φ of the three-color LED lighting unit 120B is set to 100 m.
m, clearance H is 20 mm, blue LED1
The irradiation angle of 23A is 26 degrees.

【0019】[0019]

【発明が解決しようとする課題】しかしながら、上記し
た従来の実装基板検査装置100(100A,100
B)に使用される照明装置によれば、例えば3色照明部
120Aや3色LED部120B等の照明装置を小型化
すると、その色相光の照射角度を低くすることができな
いために、その照射領域が狭くなることから、実装基板
表面上の検査精度が下がるという問題点があった。
However, the above-described conventional mounting board inspection apparatus 100 (100A, 100A)
According to the lighting device used in B), for example, if the lighting device such as the three-color lighting unit 120A and the three-color LED unit 120B is downsized, the irradiation angle of the hue light cannot be reduced. Since the area becomes smaller, there is a problem that the inspection accuracy on the surface of the mounting substrate is reduced.

【0020】本発明は上記の問題点を解消するためにな
されたものであり、その目的とするところは、照明装置
を小型化したとしても、検査精度向上に必要な低い照射
角度を確保することができる曲面性状検査装置の照明装
置を提供することである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to secure a low irradiation angle necessary for improving the inspection accuracy even if the illumination device is downsized. It is an object of the present invention to provide an illuminating device for a curved surface property inspection device that can perform the above.

【0021】[0021]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明に係る曲面性状検査装置の照明装置は、被
検査対象物の表面に、この表面への照射角度を異ならせ
て複数の色相光を照射する照明手段と、被検査対象物の
表面上に照射された各色相光の反射光を色相光別に撮像
する撮像手段とを有して、撮像手段で得られた色相光別
の撮像パターンから被検査対象物の曲面の傾斜角度を検
出する曲面性状検査装置の照明装置であって、照明手段
が、照射する複数の色相光のうち、一つの色相光を、照
明手段による被検査対象物の表面への照射角度よりも低
い照射角度で、被検査対象物の側面方向から被検査対象
物の表面に照射する補償用照明手段を有するものであ
る。
In order to achieve the above object, an illumination device for a curved surface property inspection apparatus according to the present invention comprises a plurality of illumination devices provided on a surface of an inspection object with different irradiation angles to the surface. Illuminating means for irradiating the hue light, and imaging means for imaging the reflected light of each hue light illuminated on the surface of the inspection object for each hue light, and for each hue light obtained by the imaging means. An illumination device of a curved surface property inspection device for detecting an inclination angle of a curved surface of an object to be inspected from an imaging pattern of the object, wherein the illumination means emits one hue light among a plurality of hue lights to be irradiated by the illumination means. It has a compensation illumination means for irradiating the surface of the inspection object from the side surface direction of the inspection object at an irradiation angle lower than the illumination angle of the inspection object surface.

【0022】被検査対象物とは、例えば実装基板検査装
置における実装基板に相当するものである。また、照明
手段は、例えば実装基板に色相光を照射する主照明部に
相当するものである。また、撮像手段は、例えばカラー
カメラ若しくは白黒カメラに相当するものである。
The inspection object corresponds to, for example, a mounting board in a mounting board inspection apparatus. The illuminating unit corresponds to, for example, a main illuminating unit that irradiates hue light to the mounting board. Further, the image pickup means corresponds to, for example, a color camera or a black and white camera.

【0023】また、補償用照明手段は、照明手段が照射
する複数の色相光のうち、一つの色相光を、照明手段に
よる被検査対象物の表面への照射角度よりも低い照射角
度で、被検査対象物の側面方向から被検査対象物の表面
に照射する、例えば補償用照明部に相当するものであ
る。また、照明手段による被検査対象物表面への照射角
度は、例えば26度以上であり、補償用照明手段による
被検査対象物表面への照射角度は、例えば26度未満で
ある。
[0023] The compensating illumination means may emit one hue light of the plurality of hue lights emitted by the illumination means at an irradiation angle lower than the irradiation angle of the illumination means on the surface of the inspection object. The illumination unit irradiates the surface of the inspection target object from the side surface direction of the inspection target object, for example, corresponds to a compensation illumination unit. The irradiation angle on the surface of the inspection object by the illumination unit is, for example, 26 degrees or more, and the irradiation angle on the surface of the inspection object by the compensation illumination unit is, for example, less than 26 degrees.

【0024】かかる構成により、補償用照明手段によ
り、照明手段が照射する複数の色相光のうち、一つの色
相光を、照明手段による被検査対象物の表面への照射角
度よりも低い照射角度で、被検査対象物の側面方向から
被検査対象物の表面に照射することができて、照明手段
が小型化したとしても、被検査対象物表面上の検査精度
向上に必要な低い照射角度を得ることができる。
With this configuration, the compensation illuminating means emits one of the plurality of hue lights illuminated by the illuminating means at an irradiation angle lower than the illuminating angle of the illuminating means on the surface of the inspection object. It is possible to irradiate the surface of the object to be inspected from the side direction of the object to be inspected, and to obtain a low irradiation angle required for improving the inspection accuracy on the surface of the object to be inspected, even if the illumination means is downsized. be able to.

【0025】また、本発明に係る曲面性状検査装置の照
明装置は、補償用照明手段を、照明手段による色相光の
照射方向に昇降可能に移動させる移動手段を有し、この
移動手段は、被検査対象物を搬入する際には、補償用照
明手段を上昇させると共に、被検査対象物の搬入後は、
補償用照明手段を下降させるものである。
Further, the illumination device of the curved surface property inspection apparatus according to the present invention has a moving means for moving the compensating lighting means so as to be able to move up and down in the direction of irradiation of the hue light by the lighting means. When bringing in the inspection object, raise the compensation lighting means, and after bringing in the inspection object,
The compensation illumination means is lowered.

【0026】移動手段は、補償用照明手段を昇降可能に
移動させる、例えば補償用昇降駆動部に相当するもので
ある。
The moving means corresponds to, for example, a compensating elevating drive unit for moving the compensating lighting means so as to be able to move up and down.

【0027】かかる構成により、被検査対象物を搬入す
る際には、補償用照明手段を上昇させると共に、被検査
対象物の搬入後は、補償用照明手段を下降させることが
できるために、被検査対象物の搬入を円滑に行うことが
できる。
With this configuration, when the inspection object is carried in, the compensation illumination means can be raised, and after the inspection object is carried in, the compensation illumination means can be lowered. The inspection object can be carried in smoothly.

【0028】また、本発明に係る曲面性状検査装置の照
明装置は、照明手段で照射する各色相光を合成すること
で白色光になるように照明手段で照射する各色相光の光
量を調整する光量調整手段を有し、この光量調整手段
が、照明手段及び補償用照明手段が照射する各色相光を
合成することで白色光になるように、補償用照明手段で
照射する色相光の光量を調整する補償用光量調整手段を
有するようにした。
Further, the illumination device of the curved surface property inspection apparatus according to the present invention adjusts the amount of each hue light irradiated by the illumination means so as to become white light by synthesizing each hue light irradiated by the illumination means. Light amount adjusting means, and the light amount adjusting means adjusts the light amount of the hue light irradiated by the compensation illuminating means so that the hue light illuminated by the compensating illuminating means becomes white light by combining the respective hue lights illuminated by the illuminating means and the compensating illuminating means A compensation light amount adjusting means for adjusting is provided.

【0029】光量調整手段は、照明手段で照射する各色
相光を合成することで白色光となる、つまりホワイトバ
ランスをとるように、照明手段で照射する各色相光の光
量を調整する主照明光量制御部に相当するものである。
また、補償用光量調整手段は、補償用照明手段で照射す
る色相光の光量を調整する、例えば補償用照明光量制御
部に相当するものである。
The light amount adjusting means is a main illumination light amount for adjusting the light amount of each hue light irradiated by the illuminating means so that white light is obtained by synthesizing the respective hue lights illuminated by the illuminating means so as to obtain a white balance. It corresponds to a control unit.
The compensation light amount adjusting means adjusts the light amount of the hue light irradiated by the compensation lighting means, and corresponds to, for example, a compensation illumination light amount control unit.

【0030】かかる構成により、照明手段及び補償用照
明手段が照射する各色相光を合成することで白色光にな
るように、補償用照明手段で照射する色相光の光量を調
整することができるために、常にホワイトバランスを確
保することができる。
With this configuration, the amount of hue light emitted by the compensation lighting means can be adjusted so that the respective hue lights emitted by the lighting means and the compensation lighting means are combined into white light. In addition, the white balance can always be ensured.

【0031】また、本発明に係る曲面性状検査装置の照
明装置は、補償用光量調整手段が、照明手段の照射領域
を複数分割し、これらの領域毎に、照明手段及び補償用
照明手段で照射する各色相光の合成で白色光になるよう
に、補償用照明手段で照射する光の光量を調整するよう
にした。
Further, in the illumination device of the curved surface property inspection apparatus according to the present invention, the compensation light amount adjusting means divides the irradiation area of the illumination means into a plurality of areas, and irradiates each of these areas with the illumination means and the compensation illumination means. The amount of light irradiated by the compensation illumination means is adjusted so that white light is obtained by combining the respective hue lights.

【0032】照射領域とは、例えば照明装置を実装基板
検査装置に使用した場合、実装基板内の検査領域に相当
するものである。
The irradiation area corresponds to an inspection area in a mounting board when, for example, an illumination device is used in a mounting board inspection apparatus.

【0033】かかる構成により、照明手段の照射領域を
複数分割し、これら領域毎に、照明手段及び補償用照明
手段で照射する各色相光の合成で白色光となるように、
補償用照明手段で照射する色相光の光量を調整すること
ができるために、これら領域毎にホワイトバランスを確
保することができる。
With this configuration, the irradiation area of the illumination means is divided into a plurality of areas, and for each of these areas, white light is obtained by combining respective hue lights irradiated by the illumination means and the compensation illumination means.
Since the amount of hue light irradiated by the compensation illumination means can be adjusted, white balance can be ensured for each of these areas.

【0034】また、本発明に係る曲面性状検査装置の照
明装置は、補償用照明手段が光ファイバを有し、この光
ファイバを通じて被検査対象物の表面に色相光を照射す
るようにした。
In the illumination device of the curved surface property inspection apparatus according to the present invention, the compensation illumination means has an optical fiber, and the surface of the inspection object is irradiated with hue light through the optical fiber.

【0035】かかる構成により、その照射角度をフレキ
シブルに変更することができる。
With this configuration, the irradiation angle can be flexibly changed.

【0036】また、本発明に係る曲面性状検査装置の照
明装置は、照明手段が、第1色相光を照射する第1発光
体と、第2色相光を照射する第2発光体と、第3色相光
を照射する第3発光体とを有し、補償用照明手段が、第
3発光体が照射する第3色相光と同一の色相光を、第3
発光体による被検査対象物の表面への照射角度よりも低
い照射角度で、被検査対象物の表面に照射する補償用発
光体を有する。
In the illumination device of the curved surface property inspection apparatus according to the present invention, the illumination means may include a first illuminant for irradiating the first hue light, a second illuminant for irradiating the second hue light, and a third illuminant. A third illuminant for irradiating the hue light, and the compensating illumination means emits the same hue light as the third hue light emitted by the third illuminant to the third
There is a compensation illuminant that irradiates the surface of the inspection object with an irradiation angle lower than the irradiation angle of the illuminant on the surface of the inspection object.

【0037】そして、照明手段を、第1色相光を照射す
る第1発光体と、この第1発光体の下段に設けられ且つ
第2色相光を照射する第2発光体と、この第2発光体の
下段に設けられ且つ第3色相光を照射する第3発光体と
で構成にしてもよい。
The illuminating means includes a first luminous body for irradiating the first hue light, a second luminous body provided below the first luminous body and irradiating the second hue light, and a second luminous body. A third light-emitting body that is provided at the lower part of the body and emits the third hue light may be used.

【0038】そして、前記第1発光体は、例えば赤色蛍
光灯、第2発光体は緑色蛍光灯、第3発光体は青色蛍光
灯、補償用発光体は青色LED若しくは青色蛍光灯に相
当するものである。
The first luminous body corresponds to, for example, a red fluorescent lamp, the second luminous body corresponds to a green fluorescent lamp, the third luminous body corresponds to a blue fluorescent lamp, and the compensation luminous body corresponds to a blue LED or a blue fluorescent lamp. It is.

【0039】かかる構成により、照明手段が小型化し
て、第3発光体では高い照射角度でしか照射できない箇
所であっても、補償用発光体が第3色相光を実装基板表
面上の検査精度向上に必要な低い照射角度で照射するこ
とができる。
With this configuration, the illuminating means is reduced in size, and even in a place where the third illuminant can irradiate only at a high irradiation angle, the compensation illuminant can improve the inspection accuracy of the third hue light on the surface of the mounting board. Irradiation at a low irradiation angle required for

【0040】また、本発明に係る曲面性状検査装置の照
明装置は、第1色相光は赤色相光、第2色相光は緑色相
光、第3色相光は青色相光であるようにした。
In the illumination device of the curved surface property inspection apparatus according to the present invention, the first hue light is red hue light, the second hue light is green hue light, and the third hue light is blue hue light.

【0041】かかる構成により、カラーハイライト方式
に採用することができる。
With this configuration, it is possible to adopt a color highlight system.

【0042】また、本発明に係る曲面性状検査装置の照
明装置は、被検査対象物の表面に、この表面への照射角
度を異ならせて光を照射する照明手段と、被検査対象物
の表面上に照射された各光の反射光を個別に撮像する撮
像手段とを有して、撮像手段で得られた撮像パターンか
ら被検査対象物の曲面の傾斜角度を検出する曲面性状検
査装置の照明装置であって、撮像手段を白黒カメラで構
成し、照明手段が、照射角度が異なる複数の同一色発光
体で構成された主照明部と、この主照明部による被検査
対象物の表面への照射角度よりも低い照射角度で、被検
査対象物の側面方向から被検査対象物の表面に照射し且
つ主照明部の同一色発光体と同色相光の発光体で構成さ
れた補償用照明部とを有し、主照明部の各同一色発光体
を点灯装置の切換部の切換により順次点灯させると共
に、照射角度が一番低い同一色発光体の照射時に、補償
用照明部の発光体を照射するようにしたものである。
Further, the illumination device of the curved surface property inspection apparatus according to the present invention comprises an illumination means for irradiating the surface of the object to be inspected with light at different irradiation angles to the surface, and a surface of the object to be inspected. An image pickup means for individually picking up reflected light of each light irradiated thereon, and an illumination of a curved surface property inspection apparatus for detecting an inclination angle of a curved surface of an object to be inspected from an image pickup pattern obtained by the image pickup means An imaging unit comprising a black-and-white camera, wherein the illuminating unit comprises a main illuminating unit composed of a plurality of same-color illuminants having different irradiation angles, and the main illuminating unit illuminating the surface of the inspection object. A compensation lighting unit that irradiates the surface of the object to be inspected from the side direction of the object to be inspected at an irradiation angle lower than the irradiation angle, and is composed of the same color light emitter and the same hue light emitter as the main illumination unit. Switching of the lighting device for each same color illuminant of the main lighting section Together are sequentially turned on by switching, upon irradiation of the low irradiation angle is the most the same color light emitter, in which so as to irradiate the light emitting body of the compensation lighting unit.

【0043】かかる構成により、同一色発光体に、例え
ば赤色発光体(赤色LED等)を使用するようにすれ
ば、撮像手段に白黒カメラを使用するようにしても、カ
ラーハイライト方式と同様の効果を奏し得る。
With this configuration, if a red light emitter (red LED or the like) is used as the light emitter of the same color, a black and white camera may be used as the image pickup means. It can be effective.

【0044】また、本発明に係る曲面性状検査装置の照
明装置は、被検査対象物が実装基板であって、被検査対
象物の曲面の傾斜角度が、実装基板に実装された実装部
品におけるはんだの傾斜角度である。
Further, in the illumination device of the curved surface property inspection apparatus according to the present invention, the object to be inspected is a mounting substrate, and the inclination angle of the curved surface of the object to be inspected is the soldering angle of the mounting component mounted on the mounting substrate. Is the inclination angle.

【0045】かかる構成により、照明装置を小型化した
としても、検査精度向上に必要な低い照射角度を確保す
ることができる実装基板検査装置の照明装置が提供でき
る。
With this configuration, it is possible to provide an illumination device for a mounting board inspection device capable of securing a low irradiation angle required for improving inspection accuracy even if the illumination device is downsized.

【0046】[0046]

【発明の実施の形態】以下、本発明に係る曲面性状検査
装置としての実装基板検査装置の照明装置の実施の態様
について、図面を参照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a lighting device of a mounting board inspection apparatus as a curved surface property inspection apparatus according to the present invention will be described below with reference to the drawings.

【0047】図1に示すように本発明に係る曲面性状検
査装置としての実装基板検査装置10は、カラーハイラ
イト方式の実装基板検査装置であって、搬入した被検査
対象物である実装基板110の表面上に所定クリアラン
スHをもって配置され、実装基板110の表面への各色
相光の照射角度が異なるように、複数の色相光を照射す
る照明手段である主照明部11と、実装基板110の表
面上に照射した各色相光の反射光を色相光別に撮像する
撮像手段であるカラーカメラ12と、主照明部11が照
射する複数の色相光のうち、一つの色相光を、主照明部
11による実装基板110の表面への照射角度よりも低
い照射角度で、実装基板110の側面方向から実装基板
110の表面に照射する補償用照明手段である補償用照
明部13とを有している。
As shown in FIG. 1, a mounting board inspection apparatus 10 as a curved surface property inspection apparatus according to the present invention is a mounting board inspection apparatus of a color highlight system, and is a mounted board 110 which is a loaded inspection object. The main illuminating unit 11, which is an illuminating unit that irradiates a plurality of hue lights so as to irradiate a plurality of hue lights onto the surface of the mounting board 110 at different angles, and A color camera 12 which is an imaging means for imaging the reflected light of each hue light illuminated on the surface for each hue light, and one hue light among a plurality of hue lights illuminated by the main illuminating unit 11; And a compensation illuminating unit 13 that illuminates the surface of the mounting substrate 110 from the side direction of the mounting substrate 110 at an irradiation angle lower than the irradiation angle of the surface of the mounting substrate 110 by There.

【0048】主照明部11は、赤色相光を照射する第1
発光体としての赤色発光体である赤色蛍光灯11Aと、
この赤色蛍光灯11Aの下段に設けられ且つ緑色相光を
照射する第2発光体としての緑色発光体である緑色蛍光
灯11Bと、この緑色蛍光灯11Bの下段に設けられ且
つ青色相光を照射する第3発光体としての青色発光体で
ある青色蛍光灯11Cとを有している。
The main illuminator 11 is a first illuminator for irradiating red phase light.
A red fluorescent lamp 11A that is a red light emitter as a light emitter,
A green fluorescent lamp 11B which is provided below the red fluorescent lamp 11A and is a green luminous body as a second luminous body which radiates green phase light, and is provided below the green fluorescent lamp 11B and radiates blue phase light And a blue fluorescent lamp 11C, which is a blue light emitter as a third light emitter.

【0049】補償用照明部13は、青色蛍光灯11Cか
ら実装基板110の表面に対する青色相光の照射角度よ
りも低い照射角度で、実装基板110の側面方向から実
装基板110の表面に照射する補償用発光体である補償
用LED13Aを有している。尚、この補償用LED1
3Aは、最下段の蛍光灯で照射する色相光と同一とする
ために、最下段の蛍光灯が青色蛍光灯11Cであること
から、青色LEDで構成してある。
The compensating illumination unit 13 irradiates the surface of the mounting substrate 110 from the side of the mounting substrate 110 at an irradiation angle lower than the irradiation angle of the blue phase light from the blue fluorescent lamp 11C to the surface of the mounting substrate 110. LED 13A, which is a luminous body for use. The compensation LED 1
3A is constituted by a blue LED since the lowermost fluorescent lamp is a blue fluorescent lamp 11C in order to make it the same as the hue light emitted by the lowermost fluorescent lamp.

【0050】また、実装基板検査装置10は、その内部
に搬入した被検査対象物である実装基板110を載置す
る照射領域である検査領域14を有し、この検査領域1
4は、中央領域14Aと複数の外周領域(分割領域)1
4Bとに分割されていて、この検査領域14内を主照明
部11及びカラーカメラ12から成るカメラ照明部15
が検査領域14のX−Y軸方向に移動するようにしてあ
る。
The mounting board inspection apparatus 10 has an inspection area 14 which is an irradiation area on which a mounting board 110 which is an object to be inspected carried in is placed.
4 is a central area 14A and a plurality of outer peripheral areas (divided areas) 1
4B, and a camera illumination unit 15 including the main illumination unit 11 and the color camera 12 within the inspection area 14.
Move in the X-Y axis direction of the inspection area 14.

【0051】また、この検査領域14内に載置した実装
基板110及び主照明部11間の所定クリアランスH
は、実装基板110の搬入及び搬出を円滑にすべく20
mmとしている。
Further, a predetermined clearance H between the mounting board 110 placed in the inspection area 14 and the main illuminating section 11 is set.
Is used to facilitate loading and unloading of the mounting substrate 110.
mm.

【0052】また、補償用照明部13は、検査領域14
を囲むように配置され、後述する移動手段である補償用
昇降駆動部の駆動に応じて昇降可能とし、その上昇時に
おいては補償用照明部11を20mm上昇させるように
している。つまり、実装基板検査装置10内に実装基板
110を搬入又は搬出する際には補償用照明部13を上
昇させ、実装基板検査装置10の検査領域14内に実装
基板110を搬入した後は、補償用照明部13を下降さ
せるものである。
Further, the compensation illumination unit 13 includes an inspection area 14.
Are arranged so as to be able to move up and down in response to the driving of a compensating elevating drive unit, which is a moving means to be described later, and when ascending, the compensating illumination unit 11 is raised by 20 mm. In other words, when loading or unloading the mounting board 110 into or from the mounting board inspection apparatus 10, the compensation illumination unit 13 is raised, and after loading the mounting board 110 into the inspection area 14 of the mounting board inspection apparatus 10, compensation is performed. The lighting unit 13 is lowered.

【0053】図4は実装基板検査装置10内部の概略構
成を示すブロック図である。この実装基板検査装置10
は、カラーカメラ12及び主照明部11で構成するカメ
ラ照明部15を検査領域14内のX−Y軸方向に移動さ
せるカメラ照明駆動部16と、カメラ照明部15の位置
を制御するカメラ照明位置制御部17と、このカメラ照
明部15に電力を供給するカメラ照明駆動電源部18
と、カメラ照明部15内の主照明部11に電力を供給す
る主照明電源部19と、主照明部11の光量を調整すべ
く、主照明電源部19を制御する光量調整手段である主
照明光量制御部20と、補償用照明部13を昇降させる
移動手段である補償用昇降駆動部21と、この補償用昇
降部21に電力を供給する補償用昇降駆動電源部22
と、補償用照明部13に電力を供給する補償用照明電源
部23と、補償用照明部13の光量を調整すべく、補償
用照明電源部23を制御する補償用光量調整手段である
補償用照明光量制御部24と、画像メモリを含みカラー
カメラ12で撮像したカラーカメラ信号に対して様々な
画像処理を施す画像処理部25と、様々な情報を記憶す
るメモリ部26と、この実装基板検査装置10全体を制
御するCPU27とを有している。
FIG. 4 is a block diagram showing a schematic configuration inside the mounting board inspection apparatus 10. This mounting board inspection device 10
Is a camera illumination drive unit 16 that moves a camera illumination unit 15 composed of a color camera 12 and a main illumination unit 11 in the X-Y axis direction within the inspection area 14, and a camera illumination position that controls the position of the camera illumination unit 15. A control unit 17 and a camera illumination drive power supply unit 18 for supplying power to the camera illumination unit 15
A main illumination power supply 19 for supplying electric power to the main illumination unit 11 in the camera illumination unit 15; and a main illumination which is a light amount adjusting unit for controlling the main illumination power supply unit 19 to adjust the light intensity of the main illumination unit 11. A light amount control unit 20, a compensation elevation drive unit 21 which is a moving unit for elevating and lowering the compensation illumination unit 13, and a compensation elevation drive power supply unit 22 for supplying power to the compensation elevation unit 21
A compensating illumination power supply unit 23 for supplying power to the compensating illumination unit 13, and a compensating light amount adjusting unit for controlling the compensating illumination power supply unit 23 to adjust the light amount of the compensating illumination unit 13. An illumination light amount control unit 24, an image processing unit 25 including an image memory and performing various image processing on a color camera signal captured by the color camera 12, a memory unit 26 storing various information, and a mounting board inspection And a CPU 27 for controlling the entire apparatus 10.

【0054】画像処理部25は、カメラ照明部15のカ
ラーカメラ12で、基準となる白色基準板を撮像し、こ
のカラーカメラ信号に基づいて白色基準板のホワイトバ
ランス(RGBバランス)を測定する。なお、画像処理
部25はホワイトバランス(RGBバランス)の測定の
みならず、いろいろな画像処理を行うものである。
The image processing unit 25 captures an image of a reference white reference plate by the color camera 12 of the camera illumination unit 15 and measures the white balance (RGB balance) of the white reference plate based on the color camera signal. The image processing unit 25 performs not only the measurement of white balance (RGB balance) but also various image processing.

【0055】カメラ照明位置制御部17は検査領域14
内の中央領域14A及び分割領域14Bを位置データと
して保持しており、この位置データをカメラ照明駆動部
16に設定することで、カメラ照明部11の各領域への
正確な移動を可能としている。
The camera illumination position control unit 17 controls the inspection area 14
The central area 14A and the divided area 14B are stored as position data, and by setting the position data in the camera illumination drive section 16, the camera illumination section 11 can be accurately moved to each area.

【0056】メモリ部26は、後述するが、CPU27
を介して分割領域14Bの位置データと、各分割領域1
4Bでのホワイトバランスがとれた補償用照明部13の
光量とを、夫々対応づけて記憶している。
The memory unit 26 includes a CPU 27, which will be described later.
, The position data of the divided area 14B and each divided area 1
The light amount of the compensation illumination unit 13 with the white balance at 4B is stored in association with each other.

【0057】次に、本実施の形態に示す実装基板検査装
置10の動作について説明する。
Next, the operation of the mounting board inspection apparatus 10 according to the present embodiment will be described.

【0058】図3は本実施の形態に示す実装基板検査装
置10の動作状態を示す説明図である。図3において実
装基板検査装置10は、補償用昇降駆動部21を通じ
て、補償用照明部13を所定クリアランスHまで上昇さ
せ、実装基板110を検査領域14内に搬入した後、こ
の補償用照明部13を下降する。
FIG. 3 is an explanatory diagram showing an operation state of the mounting board inspection apparatus 10 shown in this embodiment. In FIG. 3, the mounting board inspection apparatus 10 raises the compensation illumination unit 13 to a predetermined clearance H through the compensation elevation drive unit 21, and carries the mounting board 110 into the inspection area 14. Descend.

【0059】そして、実装基板検査装置10は、検査領
域14内に搬入した実装基板110の表面上をカメラ照
明部15がX−Y軸方向に移動し、このカメラ照明部1
5内の主照明部11が実装基板110の表面を照射す
る。
In the mounting board inspection apparatus 10, the camera illuminating unit 15 moves in the XY axis direction on the surface of the mounting board 110 carried into the inspection area 14, and the camera illuminating unit 1
5 illuminates the surface of the mounting substrate 110.

【0060】さらに、補償用照明部13は、主照明部1
1が照射する青色相光を、主照明部11による実装基板
110の表面への照射角度よりも低い照射角度で、実装
基板110の側面方向から実装基板110の表面に照射
する。
Further, the compensating illumination unit 13 includes the main illumination unit 1
The blue phase light emitted by the light emitting device 1 is emitted from the side surface of the mounting substrate 110 to the surface of the mounting substrate 110 at an irradiation angle lower than the irradiation angle of the main illumination unit 11 onto the surface of the mounting substrate 110.

【0061】図3に示す補償用照明部13においては、
一方側の照射角度が15度、他方側の照射角度が6度に
なり、実装基板110表面上の実装部品111における
はんだ112の傾斜角度の検査精度向上に必要な低い照
射角度を得ることができる。
In the compensation illumination section 13 shown in FIG.
The irradiation angle on one side is 15 degrees and the irradiation angle on the other side is 6 degrees, so that a low irradiation angle required for improving the inspection accuracy of the inclination angle of the solder 112 in the mounting component 111 on the surface of the mounting board 110 can be obtained. .

【0062】このように本実施の形態によれば、主照明
部11の青色蛍光灯11Cが照射する青色相光と同一の
青色相光を、主照明部11による実装基板110の表面
への照射角度よりも低い照射角度で、実装基板110の
側面方向から実装基板110の表面に照射する補償用照
明部13を設けるようにしたので、主照明部11が小型
化したとしても、実装基板110表面上の実装部品11
1におけるはんだ112の傾斜角度の検査精度向上に必
要な低い照射角度を得ることができる。
As described above, according to the present embodiment, the same blue-phase light as the blue-phase light emitted by blue fluorescent lamp 11C of main illuminator 11 is applied to the surface of mounting substrate 110 by main illuminator 11. Since the compensating illumination unit 13 that irradiates the surface of the mounting substrate 110 from the side surface direction of the mounting substrate 110 at an irradiation angle lower than the angle is provided, even if the main illumination unit 11 is downsized, the surface of the mounting substrate 110 can be reduced. Upper mounted component 11
1, a low irradiation angle required for improving the inspection accuracy of the inclination angle of the solder 112 can be obtained.

【0063】しかしながら、本実施の形態に示す実装基
板検査装置10は、図2に示すように検査領域14内の
中央領域14Aと分割領域14Bとでは、補償用照明部
13で照射する色相光の影響を受ける率が異なり、分割
領域14Bでは補償用照明部13で照射する色相光の影
響を大きく受けるため、その補償用照明部13で照射す
る青色相光の影響を強く受けることで、画面が青色にな
ってしまう。
However, as shown in FIG. 2, the mounting board inspection apparatus 10 according to the present embodiment, in the central area 14A and the divided area 14B in the inspection area 14, The influence rate is different, and the divided area 14B is greatly affected by the hue light radiated by the compensation lighting unit 13. Therefore, the screen is strongly affected by the blue hue light radiated by the compensation lighting unit 13, so that the screen becomes dark. It turns blue.

【0064】そこで、本実施の形態に示す実装基板検査
装置10においては、検査領域14内の分割領域14B
でホワイトバランスがとれるように、図5に示すような
ホワイトバランス調整処理が行われている。
Therefore, in the mounting board inspection apparatus 10 according to the present embodiment, the divided area 14B in the inspection area 14
The white balance adjustment processing as shown in FIG. 5 is performed so that the white balance can be obtained.

【0065】図5は本実施の形態に示す実装基板検査装
置10におけるホワイトバランス調整処理に関わるCP
U27の処理動作を示すフローチャートである。
FIG. 5 shows a CP relating to the white balance adjustment processing in the mounting board inspection apparatus 10 according to the present embodiment.
It is a flowchart which shows the processing operation of U27.

【0066】図5に示すホワイトバランス調整処理はC
PU27を介して行われ、実装基板検査を実行する前に
基準となる各分割領域14Bでのホワイトバランスがと
れた補償用照明部13の光量を、分割領域14Bの位置
データと対応づけてメモリ部26に記憶する処理も行わ
れる。
The white balance adjustment processing shown in FIG.
Before the mounting board inspection is performed, the light amount of the compensation illuminating unit 13 in which the white balance is obtained in each divided area 14B, which is performed via the PU 27, is associated with the position data of the divided area 14B in the memory unit. 26 is also performed.

【0067】図5においてCPU27は、補償用昇降駆
動部21を通じて補償用照明部13を所定クリアランス
Hまで上昇させる(ステップS11)。そして、この所
定クリアランスHから実装基板検査装置10内の検査領
域14に白色基準板を搬入した後(ステップS12)、
補償用昇降駆動部21を通じて補償用照明部13を下降
させる(ステップS13)。
In FIG. 5, the CPU 27 raises the compensation illumination unit 13 to a predetermined clearance H through the compensation elevation drive unit 21 (step S11). After the white reference plate is carried into the inspection area 14 in the mounting board inspection apparatus 10 from the predetermined clearance H (Step S12),
The compensating illumination unit 13 is lowered through the compensating elevating drive unit 21 (step S13).

【0068】次に、CPU27は、主照明光量制御部2
0及び主照明電源部19を通じて、主照明部11を標準
点灯する(ステップS14)。尚、主照明部11の標準
点灯とは、標準の光量で赤色蛍光灯11Aの赤色相光、
緑色蛍光灯11Bの緑色相光及び青色蛍光灯11Cの青
色相光を夫々照射させるものである。
Next, the CPU 27 controls the main illumination light amount control unit 2.
The standard lighting of the main lighting unit 11 is performed through the main power supply unit 0 (step S14). Note that the standard lighting of the main lighting unit 11 is a standard amount of light and a red phase light of the red fluorescent lamp 11A,
The green phase light of the green fluorescent lamp 11B and the blue phase light of the blue fluorescent lamp 11C are respectively radiated.

【0069】さらに、CPU27は、補償用光量制御部
24及び補償用照明電源部23を通じて、補償用照明部
13を標準点灯する(ステップS15)。尚、補償用照
明部13の標準点灯とは、標準の光量で補償用LED1
3Aの青色相光を照射させるものである。
Further, the CPU 27 turns on the compensation illuminating section 13 as standard through the compensation light quantity control section 24 and the compensation illuminating power supply section 23 (step S15). The standard lighting of the compensation illumination unit 13 means that the compensation LED 1 has a standard light amount.
3A is irradiated with blue phase light.

【0070】次に、CPU27は、カメラ照明位置制御
部17で検査領域14の中央領域14Aに相当する位置
データを検索し、この位置データをカメラ照明駆動部1
6に設定することで、カメラ照明部15を中央領域14
Aに移動させる(ステップS16)。
Next, the CPU 27 searches the camera illumination position control section 17 for position data corresponding to the central area 14A of the inspection area 14, and stores this position data in the camera illumination drive section 1.
6, the camera illumination unit 15 is moved to the central area 14.
A is moved to A (step S16).

【0071】CPU27は、カメラ照明部15のカラー
カメラ12を通じて、中央領域14Aにおける白色基準
板を撮像し、このカラーカメラ信号に画像処理を施すこ
とで、この中央領域14Aでのホワイトバランスを測定
する(ステップS17)。
The CPU 27 captures an image of the white reference plate in the central area 14A through the color camera 12 of the camera illuminating section 15 and performs image processing on the color camera signal to measure the white balance in the central area 14A. (Step S17).

【0072】さらに、CPU27は、主照明光量制御部
20及び主照明電源部19を通じて、主照明部11の光
量を調整して、この中央領域14Aでのホワイトバラン
スをとり(ステップS18)、この中央領域14Aでの
主照明部11の現在光量を、この中央領域14Aの位置
データと対応づけてメモリ部26に記憶する(ステップ
S19)。
Further, the CPU 27 adjusts the light quantity of the main lighting section 11 through the main lighting light quantity control section 20 and the main lighting power supply section 19 to obtain a white balance in the central area 14A (step S18). The current light amount of the main illumination unit 11 in the area 14A is stored in the memory unit 26 in association with the position data of the central area 14A (step S19).

【0073】次に、CPU27は、カメラ照明位置制御
部17を通じて、ある分割領域14Bの位置データを検
索し、この位置データをカメラ照明駆動部16に設定
し、カメラ照明部15を該当分割領域14Bに移動させ
る(ステップS20)。
Next, the CPU 27 searches the position data of a certain divided area 14B through the camera illumination position control unit 17, sets this position data in the camera illumination drive unit 16, and sets the camera illumination unit 15 to the corresponding divided area 14B. (Step S20).

【0074】CPU27は、カメラ照明部15のカラー
カメラ12を通じて、該当分割領域14Bにおける白色
基準板を撮像し、このカラーカメラ信号に画像処理を施
すことで、該当分割領域14Bでのホワイトバランスを
測定する(ステップS21)。
The CPU 27 captures an image of the white reference plate in the corresponding divided area 14B through the color camera 12 of the camera illumination unit 15 and performs image processing on the color camera signal to measure the white balance in the corresponding divided area 14B. (Step S21).

【0075】さらに、CPU27は、補償用照明光量制
御部24及び補償用照明電源部23を通じて、補償用照
明部13の光量を調整して、該当分割領域14Bでのホ
ワイトバランスをとり(ステップS22)、該当分割領
域14Bでの補償用照明部13の現在光量を、該当分割
領域14Bの位置データと対応づけてメモリ部26に記
憶する(ステップS23)。尚、補償用照明部13の光
量の調整は、通常、補償用照明部13の影響で青色にな
っていることから、そのゲインを落とすことでホワイト
バランスをとることができる。
Further, the CPU 27 adjusts the light amount of the compensation illumination unit 13 through the compensation illumination light amount control unit 24 and the compensation illumination power supply unit 23, and obtains a white balance in the corresponding divided area 14B (step S22). Then, the current light amount of the compensation illumination unit 13 in the corresponding divided region 14B is stored in the memory unit 26 in association with the position data of the corresponding divided region 14B (step S23). It should be noted that the adjustment of the light quantity of the compensation lighting unit 13 is usually blue due to the influence of the compensation lighting unit 13, so that the white balance can be obtained by reducing the gain.

【0076】さらに、CPU27は、補償用照明部13
の光量を記憶していない分割領域14Bがあるか否かを
判定する(ステップS24)。光量を記憶していない分
割領域14Bがなければ、この検査領域14Aにおける
全分割領域14Bでの補償用照明部13の光量をメモリ
部27に記憶したものと判断して、この処理動作を終了
する。
Further, the CPU 27 operates the compensation illumination unit 13.
It is determined whether or not there is a divided area 14B that does not store the light quantity (step S24). If there is no divided area 14B in which the light quantity is not stored, it is determined that the light quantity of the compensation illumination unit 13 in all the divided areas 14B in the inspection area 14A is stored in the memory unit 27, and this processing operation is ended. .

【0077】また、CPU27は、補償用照明部13の
光量を記憶していない分割領域14Bが未だ残っている
のであれば、次の分割領域14Bにカメラ照明部15を
移動すべく、ステップS20に移行する。
If the divided area 14B in which the light amount of the compensation illumination unit 13 is not stored still remains, the CPU 27 proceeds to step S20 to move the camera illumination unit 15 to the next divided area 14B. Transition.

【0078】このように図5に示すホワイトバランス調
整処理によれば、白色基準板を基準にして検査領域14
内の各分割領域14Bでのホワイトバランスがとれた補
償用照明部13の光量をメモリ部26に記憶することが
できる。
As described above, according to the white balance adjustment processing shown in FIG. 5, the inspection area 14 is determined based on the white reference plate.
The light amount of the compensation illumination unit 13 with the white balance in each of the divided areas 14 </ b> B can be stored in the memory unit 26.

【0079】このように本実施の形態によれば、白色基
準板を基準にして検査領域14内の各分割領域14Bで
のホワイトバランスがとれた補償用照明部13の光量
を、分割領域14Bの位置データと対応づけてメモリ部
26に記憶するようにしたので、実装基板検査実行時に
おいては、カメラ照明部15が分割領域14Bに移動し
た場合には、このメモリ部26に記憶した、該当分割領
域14Bに対応する光量に基づいて補償用照明部13の
光量を調整することで、補償用照明部13を設けたこと
によるホワイトバランスのバラツキを補償しながら、そ
の補償動作も迅速に行うことができる。
As described above, according to the present embodiment, the light quantity of the compensation illuminating unit 13 in which the white balance is obtained in each of the divided areas 14B in the inspection area 14 is determined with reference to the white reference plate. Since the data is stored in the memory unit 26 in association with the position data, when the camera illumination unit 15 moves to the divided area 14B during the execution of the mounting board inspection, the corresponding divided data stored in the memory unit 26 is stored. By adjusting the light amount of the compensation lighting unit 13 based on the light amount corresponding to the area 14B, it is possible to quickly perform the compensation operation while compensating for variations in white balance due to the provision of the compensation lighting unit 13. it can.

【0080】本実施の形態によれば、主照明部11が照
射する青色相光と同一の青色相光を、主照明部11によ
る実装基板110表面への照射角度よりも低い照射角度
で、実装基板110の側面方向から実装基板110の表
面に照射する補償用照明部13を設けたので、主照明部
11が小型化したとしても、実装基板110表面上の実
装部品11におけるはんだ112の傾斜角度の検査精度
向上に必要な低い照射角度を得ることができる。
According to the present embodiment, the same blue-phase light as the blue-phase light emitted from main illuminating unit 11 is mounted at an irradiation angle lower than the irradiation angle of main illuminating unit 11 on the surface of mounting substrate 110. Since the compensation illumination unit 13 that irradiates the surface of the mounting substrate 110 from the side surface direction of the substrate 110 is provided, even if the main illumination unit 11 is downsized, the inclination angle of the solder 112 in the mounting component 11 on the surface of the mounting substrate 110 It is possible to obtain a low irradiation angle required for improving the inspection accuracy of the device.

【0081】尚、上記の実施の形態においては、主照明
部11を赤色蛍光灯11A、緑色蛍光灯11B及び青色
蛍光灯11Cで構成し、補償用照明部13を補償用青色
LED13Aで構成するようにしたが、図6に示すよう
に主照明部11を赤色LED31A、緑色LED31B
及び青色LED31Cで構成すれば、この実装基板検査
装置10全体を小型化することができ、上記実施の形態
と同様の効果が得られることは言うまでもない。
In the above embodiment, the main lighting section 11 is constituted by the red fluorescent lamp 11A, the green fluorescent lamp 11B and the blue fluorescent lamp 11C, and the compensating lighting section 13 is constituted by the compensating blue LED 13A. However, as shown in FIG. 6, the main illuminating unit 11 is illuminated with a red LED 31A and a green LED 31B.
With the blue LED 31C, it is needless to say that the entire mounting board inspection apparatus 10 can be reduced in size, and the same effect as in the above embodiment can be obtained.

【0082】また、上記の実施の形態においては、主照
明部11を赤色蛍光灯11A、緑色蛍光灯11B及び青
色蛍光灯11Cで構成し、補償用照明部13を補償用青
色LED13Aで構成するようにしたが、図7に示すよ
うに主照明部11を赤色LED31A、緑色LED31
B及び青色LED31Cで構成し、補償用照明部13を
光ファイバ13Bで構成し、この光ファイバ13Bを通
じて、青色ランプ13Cから青色相光を実装基板110
の表面上に照射するような構成としても、実装基板検査
装置10全体を小型化でき、さらには光ファイバ13B
を使用することから、その照射角度をフレキシブルに変
更することができ、上記実施の形態と同様の効果が得ら
れることは言うまでもない。
In the above-described embodiment, the main lighting section 11 is constituted by the red fluorescent lamp 11A, the green fluorescent lamp 11B and the blue fluorescent lamp 11C, and the compensating lighting section 13 is constituted by the compensating blue LED 13A. However, as shown in FIG.
B and a blue LED 31C, and the compensating illumination unit 13 is composed of an optical fiber 13B.
In this configuration, the entire mounting board inspection apparatus 10 can be downsized, and the optical fiber 13B
Is used, it is needless to say that the irradiation angle can be flexibly changed, and the same effect as in the above embodiment can be obtained.

【0083】また、上記の実施の形態においてはカラー
ハイライト方式の実装基板検査装置10について説明し
たが、カラーカメラ12ではなく、図8に示すように白
黒カメラ12Aを使用してもよい。この場合には、可動
できる主照明部11を3種類の照射角度が異なる同一色
発光体(赤色発光体)である赤色LED32A、32
B、32Cで構成すると共に、補償用照明部13を赤色
LED13Cで構成して、主照明部11の各種類の赤色
LED32A、32B、32C毎に、これら赤色LED
32A(32B、32C)を点灯する点灯装置33の切
換部34を切換接続して点灯し、照射角度が一番低い赤
色LED32Cの照射時に、補償用照明部13の赤色L
ED13Cを照射するようにすれば、白黒方式でも同様
の効果を得ることができる。
In the above embodiment, the mounting board inspection apparatus 10 of the color highlight system has been described. However, instead of the color camera 12, a monochrome camera 12A as shown in FIG. In this case, the movable main illuminating unit 11 is provided with red LEDs 32A, 32 which are the same color illuminants (red illuminants) having three different irradiation angles.
B, 32C, the compensating illumination unit 13 is constituted by a red LED 13C, and for each type of red LED 32A, 32B, 32C of the main illumination unit 11, these red LEDs are
The switching unit 34 of the lighting device 33 for lighting the 32A (32B, 32C) is switched on and turned on, and when the red LED 32C having the lowest irradiation angle is irradiated, the red L of the compensation lighting unit 13 is turned on.
By irradiating the ED 13C, the same effect can be obtained even in the black and white method.

【0084】また、上記の実施の形態においては、実装
基板検査装置10に対する実装基板110の搬入又は搬
出に際しては補償用昇降駆動部21によって補償用照明
部13全体を昇降可能としたが、検査領域14内への実
装基板110を搬入することを保証するのであれば、補
償用照明部13全体ではなく、その一部、例えば図2に
示す補償用照明部13Dのみを昇降可能とするようにし
ても良い。
In the above-described embodiment, when loading or unloading the mounting board 110 into or from the mounting board inspection apparatus 10, the compensating illumination unit 13 can be moved up and down by the compensating elevating drive unit 21. If it is ensured that the mounting substrate 110 is carried into the apparatus 14, not the entirety of the compensation lighting unit 13 but only a part thereof, for example, only the compensation lighting unit 13D shown in FIG. Is also good.

【0085】また、上記の実施の形態においては補償用
照明部13を補償用LED13Aで構成するようにした
が、直管蛍光灯で構成するようにしても良い。
Further, in the above embodiment, the compensating illumination section 13 is constituted by the compensating LED 13A, but may be constituted by a straight tube fluorescent lamp.

【0086】また、上記の実施の形態においては、カメ
ラ照明部15を検査領域14のX−Y軸方向に移動可能
としたが、固定方式においても、同様の効果が得られる
ことは言うまでもない。
In the above embodiment, the camera illuminator 15 can be moved in the XY axis direction of the inspection area 14. However, it goes without saying that the same effect can be obtained even in a fixed system.

【0087】[0087]

【発明の効果】以上説明したように、本発明に係る曲面
性状検査装置の照明装置によれば、補償用照明手段によ
り、照明手段が照射する複数の色相光のうち、一つの色
相光を、照明手段による被検査対象物の表面への照射角
度よりも低い照射角度で、被検査対象物の側面方向から
被検査対象物の表面に照射することができて、照明手段
が小型化したとしても、被検査対象物表面上の検査精度
向上に必要な低い照射角度を得ることができる。
As described above, according to the illumination device of the curved surface property inspection apparatus according to the present invention, one hue light of a plurality of hue lights irradiated by the illumination means is compensated by the compensation illumination means. Even when the illumination unit can be illuminated from the side direction of the object to be inspected at a lower illumination angle than the illumination angle to the surface of the object to be inspected by the illumination unit, even if the illumination unit is downsized. In addition, a low irradiation angle required for improving the inspection accuracy on the surface of the inspection target can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る照明装置を有する曲面性状検査装
置の実施の形態としての実装基板検査装置の概略構成説
明図である。
FIG. 1 is a schematic structural explanatory view of a mounting board inspection apparatus as an embodiment of a curved surface property inspection apparatus having an illumination device according to the present invention.

【図2】同実装基板検査装置の概略構成を示す平面図で
ある。
FIG. 2 is a plan view showing a schematic configuration of the mounting board inspection apparatus.

【図3】同実装基板検査装置の動作状態を示す説明図で
ある。
FIG. 3 is an explanatory diagram showing an operation state of the mounting board inspection apparatus.

【図4】同実装基板検査装置内部の概略構成を示すブロ
ック図である。
FIG. 4 is a block diagram showing a schematic configuration inside the mounting board inspection apparatus.

【図5】同実装基板検査装置のホワイトバランス調整処
理に関わるCPUの処理動作を示すフローチャートであ
る。
FIG. 5 is a flowchart showing a processing operation of a CPU relating to white balance adjustment processing of the mounting board inspection apparatus.

【図6】本発明に係る照明装置を有する曲面性状検査装
置の他の実施の形態として実装基板検査装置の概略構成
説明図である。
FIG. 6 is a schematic structural explanatory view of a mounting board inspection apparatus as another embodiment of the curved surface property inspection apparatus having the illumination device according to the present invention.

【図7】本発明に係る照明装置を有する曲面性状検査装
置の他の実施の形態として実装基板検査装置の概略構成
説明図である。
FIG. 7 is a schematic structural explanatory view of a mounting board inspection apparatus as another embodiment of the curved surface property inspection apparatus having the illumination device according to the present invention.

【図8】本発明に係る照明装置を有する曲面性状検査装
置の他の実施の形態として実装基板検査装置の概略構成
説明図である。
FIG. 8 is a schematic structural explanatory view of a mounting board inspection apparatus as another embodiment of the curved surface property inspection apparatus having the illumination device according to the present invention.

【図9】従来の照明装置を使用した実装基板検査装置の
概略構成説明図である。
FIG. 9 is a schematic structural explanatory view of a mounting board inspection device using a conventional lighting device.

【図10】従来の照明装置(小型3色照明部)を使用し
た実装基板検査装置の概略構成説明図である。
FIG. 10 is a schematic diagram illustrating the configuration of a mounting board inspection apparatus using a conventional illumination device (small three-color illumination unit).

【図11】従来の照明装置(LED3色照明部)を使用
した実装基板検査装置の概略構成説明図である。
FIG. 11 is a schematic configuration explanatory view of a mounting board inspection device using a conventional lighting device (LED three-color lighting unit).

【図12】一般的な実装基板検査装置における色相光の
照射角度及び照射領域の関係を示し、(1)は平面図、
(2)は側面図である。
FIG. 12 shows a relationship between an irradiation angle and an irradiation area of hue light in a general mounting board inspection apparatus, (1) is a plan view,
(2) is a side view.

【符号の説明】[Explanation of symbols]

10 実装基板検査装置(曲面性状検査装置) 11 主照明部(照明手段) 11A 赤色蛍光灯(第1発光体) 11B 緑色蛍光灯(第2発光体) 11C 青色蛍光灯(第3発光体) 12 カラーカメラ(撮像手段) 13 補償用照明部(補償用照明手段) 13A 補償用LED(補償用発光体) 13B 光ファイバ 14 検査領域(照射領域) 14A 中央領域 14B 外周領域(分割領域) 15 カメラ照明部 17 カメラ照明位置制御部 18 カメラ照明駆動電源部 19 主照明電源部 20 主照明光量制御部(光量調整手段) 21 補償用昇降駆動部(移動手段) 24 補償用照明光量制御部(補償用光量調整手
段) 25 画像処理部 26 メモリ部 27 CPU 110 実装基板(被検査対象物) 111 実装部品 112 はんだ
Reference Signs List 10 mounting board inspection device (curved surface property inspection device) 11 main illumination unit (illumination unit) 11A red fluorescent lamp (first illuminant) 11B green fluorescent lamp (second illuminant) 11C blue fluorescent lamp (third illuminant) 12 Color camera (imaging means) 13 Compensation lighting section (compensation lighting means) 13A Compensation LED (compensation light emitter) 13B Optical fiber 14 Inspection area (irradiation area) 14A Central area 14B Outer circumference area (divided area) 15 Camera illumination Unit 17 Camera illumination position control unit 18 Camera illumination drive power supply unit 19 Main illumination power supply unit 20 Main illumination light amount control unit (light amount adjustment unit) 21 Compensation elevation drive unit (moving unit) 24 Compensation illumination light amount control unit (compensation light amount) Adjustment means) 25 image processing unit 26 memory unit 27 CPU 110 mounting board (inspection target) 111 mounting component 112 solder

フロントページの続き Fターム(参考) 2F065 AA36 BB05 CC26 FF04 GG07 GG12 GG23 HH02 HH18 JJ03 JJ19 MM13 NN01 QQ31 RR06 UU01 2G051 AA65 AB14 BA01 BB17 BC01 CA04 EA17 Continuation of the front page F term (reference) 2F065 AA36 BB05 CC26 FF04 GG07 GG12 GG23 HH02 HH18 JJ03 JJ19 MM13 NN01 QQ31 RR06 UU01 2G051 AA65 AB14 BA01 BB17 BC01 CA04 EA17

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 被検査対象物の表面に、この表面への照
射角度を異ならせて複数の色相光を照射する照明手段
と、前記被検査対象物の表面上に照射された各色相光の
反射光を色相光別に撮像する撮像手段とを有して、前記
撮像手段で得られた色相光別の撮像パターンから前記被
検査対象物の曲面の傾斜角度を検出する曲面性状検査装
置の照明装置であって、 前記照明手段が、照射する複数の色相光のうち、一つの
色相光を、前記照明手段による前記被検査対象物の表面
への照射角度よりも低い照射角度で、前記被検査対象物
の側面方向から前記被検査対象物の表面に照射する補償
用照明手段を有することを特徴とする曲面性状検査装置
の照明装置。
An illumination unit configured to irradiate a plurality of hue lights onto the surface of the inspection object at different irradiation angles to the surface; An image pickup unit for picking up reflected light for each hue light, and an illuminating device of a curved surface property inspection device for detecting an inclination angle of a curved surface of the inspection object from an image pickup pattern for each hue light obtained by the image pickup unit The illumination unit emits one hue light among a plurality of hue lights to be illuminated at an irradiation angle lower than an illumination angle of the illumination unit on a surface of the inspection object, and An illumination device for a curved surface property inspection device, comprising: a compensation illumination means for irradiating a surface of the inspection target object from a side surface direction of the object.
【請求項2】 前記補償用照明手段を、前記照明手段に
よる色相光の照射方向に昇降可能に移動させる移動手段
を有し、 前記移動手段は、前記被検査対象物を搬入する際には、
前記補償用照明手段を上昇させると共に、前記被検査対
象物の搬入後は、前記補償用照明手段を下降させる請求
項1に記載の曲面性状検査装置の照明装置。
2. A moving means for moving the compensation illuminating means so as to be able to move up and down in an irradiation direction of hue light by the illuminating means, wherein the moving means, when loading the inspection object,
2. The illumination device of the curved surface property inspection device according to claim 1, wherein the compensation illumination unit is raised, and after the inspection object is carried in, the compensation illumination unit is lowered. 3.
【請求項3】 前記照明手段で照射する各色相光を合成
することで白色光になるように前記照明手段で照射する
各色相光の光量を調整する光量調整手段を有し、前記光
量調整手段が、前記照明手段及び前記補償用照明手段が
照射する各色相光を合成することで白色光になるよう
に、前記補償用照明手段で照射する色相光の光量を調整
する補償用光量調整手段を有する請求項1又は請求項2
に記載の曲面性状検査装置の照明装置。
3. A light quantity adjusting means for adjusting the light quantity of each hue light illuminated by the lighting means so as to be white light by synthesizing each hue light illuminated by the lighting means, However, a compensating light amount adjusting means for adjusting the light amount of the hue light irradiated by the compensating lighting means so that white light is obtained by combining the respective hue lights irradiated by the lighting means and the compensating lighting means. Claim 1 or Claim 2
The lighting device of the curved surface property inspection device according to 1.
【請求項4】 前記補償用光量調整手段が、前記照明手
段の照射領域を複数分割し、これらの領域毎に、前記照
明手段及び前記補償用照明手段で照射する各色相光の合
成で白色光になるように、前記補償用照明手段で照射す
る色相光の光量を調整する請求項3に記載の曲面性状検
査装置の照明装置。
4. The compensating light quantity adjusting means divides an irradiation area of the lighting means into a plurality of areas, and for each of these areas, combines the respective hue lights irradiated by the lighting means and the compensating lighting means to produce white light. The illumination device of the curved surface property inspection device according to claim 3, wherein the light amount of the hue light irradiated by the compensation illumination means is adjusted so that
【請求項5】 前記補償用照明手段は光ファイバを有
し、この光ファイバを通じて前記被検査対象物の表面に
色相光を照射する請求項1乃至請求項4のいずれかに記
載の曲面性状検査装置の照明装置。
5. The curved surface property inspection according to claim 1, wherein the compensation illumination means has an optical fiber, and irradiates the surface of the inspection object with hue light through the optical fiber. The lighting device of the device.
【請求項6】 前記照明手段が、第1色相光を照射する
第1発光体と、第2色相光を照射する第2発光体と、第
3色相光を照射する第3発光体とを有し、 前記補償用照明手段が、前記第3発光体が照射する第3
色相光と同一の色相光を、前記第3発光体による前記被
検査対象物の表面への照射角度よりも低い照射角度で、
前記被検査対象物の表面に照射する補償用発光体を有す
る請求項1乃至請求項5のいずれかに記載の曲面性状検
査装置の照明装置。
6. The illuminating means has a first illuminant for irradiating a first hue light, a second illuminant for irradiating a second hue light, and a third illuminant for irradiating a third hue light. And wherein the compensation illuminating means is configured to irradiate the third illuminant with a third illuminant.
The same hue light as the hue light, at an irradiation angle lower than the irradiation angle of the third light emitter on the surface of the inspection object,
The illumination device for a curved surface property inspection device according to any one of claims 1 to 5, further comprising a compensation light emitter that irradiates a surface of the inspection object.
【請求項7】 前記照明手段は、前記第1色相光を照射
する前記第1発光体と、この第1発光体の下段に設けら
れ且つ前記第2色相光を照射する前記第2発光体と、こ
の第2発光体の下段に設けられ且つ前記第3色相光を照
射する前記第3発光体とを有する請求項6に記載の曲面
性状検査装置の照明装置。
7. The illuminating means includes: the first illuminant for irradiating the first hue light; and the second illuminant provided below the first illuminant and irradiating the second hue light. The lighting device of the curved surface property inspection device according to claim 6, further comprising: a third light emitter provided below the second light emitter and irradiating the third hue light.
【請求項8】 前記第1色相光は赤色相光、前記第2色
相光は緑色相光、前記第3色相光は青色相光である請求
項6又は請求項7に記載の曲面性状検査装置の照明装
置。
8. The curved surface inspection apparatus according to claim 6, wherein the first hue light is red hue light, the second hue light is green hue light, and the third hue light is blue hue light. Lighting equipment.
【請求項9】 被検査対象物の表面に、この表面への照
射角度を異ならせて光を照射する照明手段と、前記被検
査対象物の表面上に照射された各光の反射光を個別に撮
像する撮像手段とを有して、前記撮像手段で得られた撮
像パターンから前記被検査対象物の曲面の傾斜角度を検
出する曲面性状検査装置の照明装置であって、 前記撮像手段を白黒カメラで構成し、 前記照明手段が、照射角度が異なる複数の同一色発光体
で構成された主照明部と、この主照明部による前記被検
査対象物の表面への照射角度よりも低い照射角度で、前
記被検査対象物の側面方向から前記被検査対象物の表面
に照射し且つ前記主照明部の前記同一色発光体と同色相
光の発光体で構成された補償用照明部とを有し、前記主
照明部の各同一色発光体を点灯装置の切換部の切換によ
り順次点灯させると共に、照射角度が一番低い前記同一
色発光体の照射時に、前記補償用照明部の前記発光体を
照射するようにしたことを特徴とする曲面性状検査装置
の照明装置。
9. An illuminating means for irradiating the surface of the object to be inspected with light at different irradiation angles to the surface, and reflecting the reflected light of each light illuminated on the surface of the object to be inspected separately. A lighting device for a curved surface property inspection device for detecting an inclination angle of a curved surface of the inspection object from an imaging pattern obtained by the imaging device. A main illuminator configured by a camera, wherein the illuminating unit is configured by a plurality of same-color illuminants having different illuminating angles, and an illuminating angle lower than an illuminating angle of the main illuminating unit on the surface of the inspection object. A compensating illumination unit configured to irradiate the surface of the inspection target object from a side surface direction of the inspection target object and to include the same color light emitter of the main illumination unit and a light emitter of the same hue light. And switching the same color illuminant of the main illumination unit to a switching unit of a lighting device. Together sequentially turned by the switching, upon irradiation of the low irradiation angle is the most the same color light emitter, the illumination device of the curved surface property inspection apparatus is characterized in that so as to irradiate the light emitter of the compensating lighting unit.
【請求項10】 前記被検査対象物が実装基板であっ
て、前記被検査対象物の曲面の傾斜角度が、前記実装基
板に実装された実装部品におけるはんだの傾斜角度であ
る請求項1乃至請求項9のいずれかに記載の曲面性状検
査装置の照明装置。
10. The object to be inspected is a mounting board, and the angle of inclination of a curved surface of the object to be inspected is an angle of inclination of a solder in a mounted component mounted on the mounting board. Item 10. An illumination device for a curved surface property inspection device according to any one of Items 9.
JP2001096697A 2001-03-29 2001-03-29 Illumination device for curved surface property inspection device Expired - Lifetime JP4038993B2 (en)

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Publication number Priority date Publication date Assignee Title
JP2006242952A (en) * 2005-02-28 2006-09-14 Wintec Co Ltd System for inspecting electronic component
JP2009122037A (en) * 2007-11-16 2009-06-04 Tsubakimoto Chain Co Appearance inspecting device of chains and appearance inspecting method using it
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CN104897691A (en) * 2014-03-06 2015-09-09 欧姆龙株式会社 Inspection apparatus
CN107886499A (en) * 2017-10-13 2018-04-06 西安工程大学 A kind of body surface detection illuminator and means of illumination
JP2018059903A (en) * 2016-10-07 2018-04-12 サムソン エレクトロ−メカニックス カンパニーリミテッド. Exterior appearance inspection device, and optical system automatic calibration method of the same
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006242952A (en) * 2005-02-28 2006-09-14 Wintec Co Ltd System for inspecting electronic component
JP2009122037A (en) * 2007-11-16 2009-06-04 Tsubakimoto Chain Co Appearance inspecting device of chains and appearance inspecting method using it
CN103217439A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Medical support detection method
CN102735186A (en) * 2012-06-25 2012-10-17 长安大学 Device and method for acquiring three-dimensional structure of road surface by utilizing digital image
CN104897691A (en) * 2014-03-06 2015-09-09 欧姆龙株式会社 Inspection apparatus
JP2018059903A (en) * 2016-10-07 2018-04-12 サムソン エレクトロ−メカニックス カンパニーリミテッド. Exterior appearance inspection device, and optical system automatic calibration method of the same
JP7070867B2 (en) 2016-10-07 2022-05-18 サムソン エレクトロ-メカニックス カンパニーリミテッド. Visual inspection equipment and its optical system automatic calibration method
CN107886499A (en) * 2017-10-13 2018-04-06 西安工程大学 A kind of body surface detection illuminator and means of illumination
CN107886499B (en) * 2017-10-13 2021-06-15 西安工程大学 Object surface detection illumination system and illumination method
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