JP2002286886A - Positioning device and installation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a positioning device which will not transmit heat added to a work to a planar moving mechanism. SOLUTION: The positioning device for position-controlling of a work by moving a planar mover 12 in the planar moving mechanism is constituted by connecting a slider 32 slidably loaded on a fixed guide 34 and the planar mover 12, arranged below it by way of an insulator 36, and preventing transfer of heat added to the work loaded on the slider 32 to the planar moving mechanism.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device and a mounting device, and more particularly to a mounting device for mounting an electronic component on a substrate and a positioning device constituting the mounting device.

[0002]

2. Description of the Related Art A liquid crystal panel 1 in a liquid crystal display device shown in FIG. 8 has a display section 2 in which a large number of liquid crystal molecules are arranged in a matrix on a glass substrate 3, and an image is formed by applying a voltage to each liquid crystal molecule. Is displayed. for that reason,
A liquid crystal driver IC 8 is provided adjacent to the display unit 2. The liquid crystal driver IC 8 is bonded (mounted) by applying heat and pressure to the liquid crystal driver IC bonding portion 5 on the glass substrate 3 after applying the anisotropic conductive adhesive 9. Since a large number of electrodes 4 are formed on the liquid crystal driver IC bonding portion, it is necessary to bond the electrodes of the liquid crystal driver IC 8 to accurate positions corresponding to the electrodes 4. Therefore, the liquid crystal panel 1 is mounted on a positioning stage for positioning, and the liquid crystal driver IC 8 is bonded thereon.

In a conventional positioning stage, as shown in FIG. 9, a stage 118 is connected to a ball housing 112 of a ball screw mechanism 110, and a screw shaft 114 is driven by a servomotor 116 to form a liquid crystal panel disposed on the stage. Positioning was performed. Then, by stacking the ball screw mechanisms 110 and 120, the stage 1
18 can be independently moved in different directions to enable positioning in a horizontal plane.

[0004]

The conventional positioning device using a ball screw and a servomotor has a problem that it is difficult to reduce the size of the device. Further, when the liquid crystal panel is moved to the target position and the servomotor is stopped, residual vibration occurs, and there is a problem that the liquid crystal driver IC cannot be mounted until the liquid crystal panel stops at the target position. Further, even when the liquid crystal panel is stopped, it is necessary to continue to supply power to the servomotor in order to maintain the stop position, and there is a problem that the power consumption is large. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a positioning device that can be reduced in size, does not generate residual vibration, or consumes less power. Another object is to provide a mounting device using the positioning device.

When a liquid crystal driver IC is heated and mounted on a liquid crystal panel, heat is transferred to a plane moving mechanism including a stage on which the liquid crystal panel is mounted. As a result, there is a problem that the ball screw thermally expands or the operating characteristics of the servomotor change, thereby lowering the positioning accuracy. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide a positioning device in which heat applied to a work is not transmitted to a plane moving mechanism. Another object is to provide a mounting device using the positioning device.

[0006]

In order to achieve the above object, a positioning device according to the present invention is a positioning device for adjusting the position of a work by moving a plane moving body in a plane moving mechanism. By connecting the movably mounted slider and the planar moving body disposed below the slider via a heat insulating material, transmission of heat applied to the work mounted on the slider to the planar moving mechanism is prevented. The configuration was adopted. Thus, heat applied to the work is blocked by the heat insulating material and is not transmitted to the plane moving mechanism, so that accurate positioning can be performed.

The planar moving mechanism is constructed by connecting the planar moving body and the outer fixed frame by a deformable member, and providing a driving means for moving the planar movable body while elastically deforming the deformable member. Is preferred. Since a relatively large air pressure is required to move the plane moving body while elastically deforming the deformable member, the position of the plane moving body is not influenced by a small pressure fluctuation, and highly accurate positioning is possible. Further, when the work is moved to the target position and the supply of the compressed air is stopped, no residual vibration occurs in the work. Further, since the ball screw and the servomotor are not used, the size of the apparatus can be reduced.

A positioning device for adjusting the position of a workpiece by moving a plane moving body in a plane moving mechanism, wherein the plane moving body and an intermediate frame are connected by a first deformable member, and the first deformable member is connected to the intermediate frame. Driving means for moving the planar moving body in a first direction while elastically deforming is provided, the intermediate frame and the outer fixed frame are connected by a second deformable member, and the second deformable member is elastically deformed. Driving means for moving the intermediate frame in a second direction different from the first direction is provided, and a first slider is slidably mounted on the first fixed guide, and is moved in a direction different from the first fixed guide. By fixing the arranged second guide to the first slider, slidably mounting the second slider on the second guide, and connecting the second slider and the plane moving body via a heat insulating material. , The second slurry Was prevented with the structure of transfer to the planar moving mechanism of heat applied to the workpiece mounted on the da. Thereby, similarly to the conventional positioning device, positioning in a horizontal plane becomes possible.

Preferably, the guide and the slider are constituted by a roller guide mechanism. By configuring the guide with the guide rail of the roller guide mechanism and configuring the slider with the roller housing of the roller guide mechanism, the sliders can slide with low friction with each other, and highly accurate positioning can be performed. In addition, it is preferable to install a compressed air supply unit, an electropneumatic regulator for adjusting the air pressure of the compressed air, and a control unit for controlling the operation of the electropneumatic regulator as the driving unit. Thus, after the compressed air is supplied to move the stage to the target position, the stop position can be maintained by closing the electropneumatic regulator. Therefore, there is no need to continuously supply power, and power consumption can be reduced.

On the other hand, a mounting apparatus according to the present invention comprises a positioning device according to any one of claims 1 to 5 for mounting a substrate as the work, and a pressure bonding head for mounting an electronic component on the substrate. Pressure means. Thus, a mounting device having the effects of the first to third aspects can be obtained.

[0011]

Embodiments of the present invention will be described in detail with reference to the drawings. Note that what is described below is merely an embodiment of the present invention, and the present invention is not limited thereto.

First, a first embodiment will be described. FIG. 1 shows a perspective view of the positioning device according to the first embodiment. FIG. 2 shows a plan view of a positioning device according to the first embodiment and a block diagram of a driving unit. In the positioning device according to the first embodiment, the plane moving body 12 and the outer fixed frame 19 are connected by the deformable member 14, and the compressed air supply means 22 for moving the plane moving body 12 and the air pressure of the compressed air are adjusted. Electro-pneumatic regulator 24 and electro-pneumatic regulator 24
And a control unit 28 for controlling the operation of the
A linear position sensor 130 for measuring the amount of movement of the second position is installed, and the work placed on the planar moving body 12 is positioned.

The plane moving body 12 is connected to the outer fixed frame 19 via the deformable member 14. The plane moving body 12 has a thickness of 10 m
m. On the other hand, the deformable member 14 is also formed of a metal material or the like so as to be elastically deformable. The deformable member 14 is not limited to a metal material as long as it can be elastically deformed, and may be formed of another material. The deformable member 14 has one end connected to the plane movable body 12 and the other end connected to the outer fixed frame 19, and connects the planar movable body 12 and the outer fixed frame 19. The position of the outer fixed frame 19 is fixed. The deformation members 14 are installed at both ends of the planar moving body, corresponding to the X direction in FIG. 1 that is the moving direction of the planar moving body.

The bellows portion 15 is formed by bending the central portion of the deformable member 14 in the longitudinal direction. Thereby, the deformable member 14 is elastically deformed by a relatively small force, and the driving force of the planar moving body 12 can be reduced. When the bellows portion 15 is formed on the deformable member 14, a pair of deformable members are formed so as to be plane-symmetric with respect to a vertical plane along the moving direction so that the plane moving body 12 can be moved in a predetermined direction. Install. Further, as shown in FIG. 2, a notch 1 for partially reducing the cross-sectional area of the deformable member is provided at the distal end portion of the curved bellows portion 15.
6 is preferably provided. Since the rigidity is reduced at the notch 16, the driving force of the planar moving body 12 can be further reduced. The planar moving body 12, the deformable member 14, and the outer fixed frame 19 can be integrally formed by forming a through groove in a steel plate along the outer edge shape. Thereby, the plane moving mechanism can be made compact.

Further, a compressed air supply means 22 for moving the plane moving body 12, an electropneumatic regulator 24 for adjusting the air pressure of the compressed air, and a control unit 28 for controlling the operation of the electropneumatic regulator are provided. FIG. 2 shows a plan view of a positioning device according to the first embodiment and a block diagram of a driving unit. As the compressed air supply means 22, a pressure pipe for supplying compressed air to various parts of the factory may be used, or a compressor or the like may be separately installed. The pipe is branched from the compressed air supply means 22 into two parts, each of which has an electropneumatic regulator 2.
4 to the inlet side. The electropneumatic regulator 24 absorbs the pressure fluctuation of the compressed air supplied from the inlet side and adjusts the outlet side air pressure to a predetermined value according to the input voltage signal. The pipe connected to the outlet side of the electropneumatic regulator 24 is connected to the outer fixed frame 19 corresponding to the X direction in FIG.
A through hole 19a is formed in advance in a pipe connection portion of the outer fixed frame 19. Further, the plane moving body 12 is
And a metal bellows 18 is set. Metal bellows 1
Numeral 8 prevents the compressed air from leaking inside and allows the length to be expanded and contracted by a small force.

In addition to the above, a CCD camera 26 for photographing the work placed on the stage is provided. Further, a control unit 28 for controlling the positioning of the work is installed.
The control unit 28 includes an image processing unit 28a that detects the initial position of the work from the image data of the CCD camera, a calculation unit 28b that calculates the direction and amount of movement of the stage, a memory 28c that stores the calibration result of the positioning device,
And an output unit 28d that outputs a control voltage to the electropneumatic regulator 24.

Further, a linear position sensor 130 for measuring the moving amount of the plane moving body 12 is provided. Specifically, while installing the main scale 131 on the outer fixed frame 19,
The slider 132 is mounted on the plane moving body 12 so as to be movable along the main scale 131. FIG. 3 is an explanatory diagram of a typical optical linear position sensor as a digital linear position sensor. A light source 133 and a lens 134 are provided on one side of the slider 132 with the main scale 131 interposed therebetween, and the index scale 1 is provided on the other side.
35 and the light receiving element 136 are installed. The main scale 131 and the index scale 135 are formed with slits 131a and 135a, respectively. Although the pitch of the slits is about 8 μm, the resolution can be increased by providing slits having different phases. With the above configuration, the light receiving element 136 detects a change in the amount of transmitted light through the main scale 131 and the index scale 135, and calculates the amount of movement of the slider from the number of changes and the slit pitch. In addition to the optical type, a laser type or magnetic type linear position sensor can be used.

The positioning device according to the first embodiment configured as described above is used as follows. In the following, a liquid crystal driver IC is mounted on a liquid crystal panel as a work.
Is described as an example, but other workpieces can be positioned in the same manner, and the application of the present invention is not limited to the following.

Prior to the mounting work of the liquid crystal driver IC,
Calibrate the positioning device. First, the input voltage value of one electropneumatic regulator 24 is set step by step,
The movement amount of the plane moving body 12 is measured by the linear position sensor 130. From the result, a relational expression between the input voltage value of the electropneumatic regulator and the moving amount of the plane moving body is obtained. The above relational expression is stored in the memory 28c in the control unit 28, and the calculation unit 2
8b.

Next, a mounting operation is performed. First, the liquid crystal panel is mounted on the stage formed on the plane moving body 12, the liquid crystal driver IC is set at a predetermined position, and an anisotropic conductive adhesive is applied. Then, the liquid crystal panel is photographed by the CCD camera 26. The image data is transmitted to the control unit 28, and the image processing unit 28a detects the initial position of the liquid crystal panel. Based on this position information, the calculation unit 28b calculates the moving direction and the moving amount of the planar moving body. Here, the calculation unit reads the relational expression between the input voltage value of the electropneumatic regulator and the movement amount of the planar moving body from the memory 28c, and obtains the input voltage value of the electropneumatic regulator 24 corresponding to the target movement amount. Then, the output unit 28d outputs a voltage corresponding to the input voltage value calculated by the calculation unit 28b to the electropneumatic regulator 24 corresponding to the upstream side in the moving direction of the planar moving body. The electropneumatic regulator 24 increases the air pressure on the outlet side according to the input voltage. The air pressure causes the planar moving body 12 to be pushed and moved.

Although positioning can be performed by the above operation, feedback control is performed for more precise positioning. First, the linear moving object 12 is detected by the linear position sensor 130.
In the movement process of the above, the movement amount is sequentially measured and transmitted to the control unit 28. Next, the calculation unit 28b compares the initially determined target movement amount with the current movement amount. At the same time, the relational expression between the input voltage value of the electropneumatic regulator and the movement amount of the plane moving body is read from the memory 28c, and the input voltage value is determined so as to approach the target movement amount. It is preferable to adopt a PID control operation (proportional-integral-differential operation) for the control operation so that the moving amount matches the target value as soon as possible. And output unit 2
8d outputs to the electropneumatic regulator 24 a voltage corresponding to the input voltage value determined by the calculation unit 28b. The above operation is repeated to move the planar moving body to the target position.

The CCD camera 26 used for detecting the initial position of the liquid crystal panel can be used as a moving amount measuring means. In that case, the plane moving body 12
The amount of movement of the liquid crystal panel is measured directly, not the amount of movement. Specifically, the moving process of the liquid crystal panel is photographed one by one,
The image is transmitted to the control unit 28. And the image processing unit 2
At 8a, the position of the liquid crystal panel is detected. Further, the moving amount of the liquid crystal panel is calculated by the calculating unit 28b from the position information. Thereafter, in the same manner as described above, the calculation unit compares the target movement amount obtained first and the current movement amount, and determines the input voltage value of the electropneumatic regulator 24. Further, the output unit 28
d outputs the corresponding voltage. Thus, the CCD camera 2 installed to detect the initial position of the liquid crystal panel
By using 6 for feedback control, it is not necessary to newly install a movement amount measuring means, and the manufacturing cost of the positioning device can be reduced. Plane moving body 12
When the vehicle reaches the target position, the electropneumatic regulator 24 is closed to maintain the stop position. Next, the pressure bonding head is lowered to bond the liquid crystal driver IC to the liquid crystal panel. At this time, bonding is performed by heating and pressing with a pressure head that has been heated in advance.

By using the positioning device according to the first embodiment configured as described above as described above, high-precision positioning is possible and the device can be downsized. In this respect, the conventional positioning device using a ball screw and a servomotor has a problem that it is difficult to reduce the size of the device. However, the positioning device according to the first embodiment includes a compressed air supply unit that connects the planar moving body and the outer fixed frame with a deformable member, moves the planar movable body while elastically deforming the deformable member, and an air pressure of the compressed air. And a control unit for controlling the operation of the electro-pneumatic regulator, and a linear position sensor for measuring the amount of movement of the planar moving body. Since a relatively large air pressure is required to move the plane moving body while elastically deforming the deformable member, the position of the plane moving body is not influenced by a small pressure fluctuation, and highly accurate positioning is possible. As a result, while a stage movable amount of about ± 200 μm can be ensured, a positioning error can be suppressed to a submicron order.

Further, the positioning device according to the first embodiment includes:
Since a ball screw and a servomotor are not used unlike the conventional positioning device, the device can be downsized. Further, when the stage is stopped at the target position, no residual vibration is generated on the stage. In a conventional positioning device using this point servo motor, residual vibration occurs on the stage due to residual vibration when the servo motor is stopped.
Since the stage did not stop at the target position during the settling time, it was not possible to start mounting. However, in the positioning device according to the first embodiment, a relatively large air pressure is required to move the planar moving body.
The position of the planar moving body is not influenced by the minute pressure fluctuation, and no residual vibration is generated in the planar moving body when the supply of the compressed air is stopped. Therefore, no residual vibration is generated on the stage, and the mounting operation can be started immediately.

In addition, since the positioning device according to the first embodiment has a configuration in which a linear position sensor for measuring the moving amount of the planar moving body is provided, an accurate moving amount can be output. If a strain gauge is attached to a deformable member and used as a measure of the movement of the point work, the heat that has heated the work during mounting is also transmitted to the strain gauge,
In some cases, an accurate amount of distortion may not be output. However, if a linear position sensor that measures the amount of movement of the plane moving body in a non-contact manner is installed, transmission of heat that has heated the work to the amount of movement measurement means is prevented, and the amount of movement measurement means is affected by heat. And an accurate movement amount can be output. Therefore, high-precision positioning performance can be maintained. In addition, since the linear position sensor is relatively inexpensive, the manufacturing cost of the positioning device can be kept low. In addition, since the measurement time of the linear position sensor is short, the sampling interval for feedback control can be shortened, and quick positioning can be performed.

On the other hand, the positioning device according to the first embodiment
Since it has the compressed air supply means, the electropneumatic regulator, and the control unit, the stop position can be maintained by closing the electropneumatic regulator after supplying the compressed air to move the stage to the target position. In the conventional positioning device using the servomotor, it is necessary to continue the feedback control in order to maintain the stop position, and it is necessary to continuously supply the electric power. However, in the positioning device according to the first embodiment, the stop position is maintained only by closing the electropneumatic regulator, and there is no need to continue control. Therefore, it is not necessary to continuously supply power, and power consumption can be reduced. .

Next, a second embodiment will be described. The positioning device according to the second embodiment is different from the linear moving sensor 130 in the first embodiment in that
2 is provided with a displacement sensor for measuring the amount of movement. The description of the same configuration as that of the first embodiment is omitted.

FIG. 4 is an explanatory view of a typical laser displacement meter using a triangulation formula as a displacement sensor. The laser displacement meter 140 includes a semiconductor laser light emitting element 143 and a light projecting lens 144 in a casing 141 thereof, and a light receiving lens 145 and a position detecting element (PSD) 1.
46 is provided. The position detecting element 146 is formed by attaching electrodes to both ends of an elongated semiconductor photoelectric conversion element. On the other hand, the plane moving body 12 is provided with a reflection surface 142 for reflecting the laser light. Light emitting element to reflective surface 142
, The position detection element 146 receives the reflected light. When the reflection surface moves to the position 142a together with the plane moving body 12, the position of the reflected light received by the position detection element 146 changes. Position detecting element 146
Is the current I ₁ that is inversely proportional to the distance from the reflected light to both ends,
Since I ₂ is output, the reflection surface 14 is calculated from the ratio of I ₁ and I _2.
2 can be detected. The resolution is 1-1
Thus, the moving amount of the planar moving body 12 can be calculated. Note that the laser displacement meter is an optical displacement sensor, and a light emitting diode other than a semiconductor laser can be used as the light emitting element 143. In addition to the optical type, a capacitance type, an eddy current type and an ultrasonic type displacement sensor can be used.

If a non-contact displacement sensor as described above is used, the displacement sensor itself is installed outside, and only the reflection surface is installed on a flat moving body. It is not affected by heat caused by heating.
Therefore, an accurate movement amount can be measured, and highly accurate positioning performance can be maintained. Further, since the measurement time of the displacement sensor is short, the sampling interval for feedback control can be shortened, and quick positioning can be performed.

Next, a third embodiment will be described. FIG. 5 shows a plan view of a positioning device according to the third embodiment. The positioning device according to the third embodiment connects the planar moving body 12 and the intermediate frame 42 with the first deformable member 14,
A driving means for moving the planar moving body in the X direction while elastically deforming the first deformable member 14 is provided, and a first measurement for measuring the amount of movement of the planar moving body in the X direction in a non-contact manner.
Is installed, while the intermediate frame 42 and the outer fixed frame 19 are connected by the second deformable member 44, and the second frame 44 is elastically deformed in the Y direction while the intermediate frame 42 is elastically deformed.
And a second linear position sensor 150 for measuring the amount of movement of the planar moving body in the Y direction in a non-contact manner. As the driving means, a means for supplying compressed air, an electropneumatic regulator for adjusting the air pressure of the compressed air, and a control unit for controlling the operation of the electropneumatic regulator are provided. The description of the same configuration as that of the first embodiment is omitted.

First, the plane moving body 12 and the intermediate frame 42 are connected by the first deformable member 14. The first deformation member 14 is
It is installed at both ends of the plane moving body 12 corresponding to the X direction in FIG. The intermediate frame 42 is made of a metal material or the like, and
2 is formed along the outer circumference. Further, the intermediate frame 42 and the outer fixed frame 19 are connected by the second deformation member 44. The second deformation members 44 are installed at both ends of the intermediate frame 42 corresponding to the Y direction in FIG. The XY directions in FIG. 5 are directions orthogonal to each other. The second deformable member 44 has the same shape as the first deformable member 14. As a result, the calibration results can be shared, and the algorithm for calculating the amount of stage movement can be simplified. The planar moving body 12, the first deformable member 14, the intermediate frame 42, the second deformable member 44, and the outer fixed frame 19 are integrally formed by forming a through groove in a steel plate along each outer edge shape. Can also be formed. Thereby, the plane moving mechanism can be made compact.

As means for driving the plane moving body 12 and the intermediate frame 42, a means for supplying compressed air, an electropneumatic regulator for adjusting the air pressure of the compressed air, and a control unit for controlling the operation of the electropneumatic regulator are provided. The pipe is branched into four from the compressed air supply means, and each is connected to the inlet side of the electropneumatic regulator. The piping connected to the outlet side of the electropneumatic regulator that moves the intermediate frame 42 is connected to the outer fixed frame 19 corresponding to the Y direction in FIG. On the other hand, those which directly move the plane moving body 12 are connected to both ends of the intermediate frame 42 corresponding to the X direction in FIG. A through hole is formed in the intermediate frame 42 in advance in the same manner as the outer fixed frame 19. Further, a metal bellows 48 is provided from the through hole of the outer fixed frame 19 to the intermediate frame 42.

A first linear position sensor 130 for measuring the amount of movement of the plane moving body 12 in the X direction without contact is provided. Specifically, the first main scale 131 is installed on the intermediate frame 42, and the first slider 132 is installed on the plane moving body 12 so as to be movable along the first main scale 131. On the other hand, a second linear position sensor 150 that measures the amount of movement of the planar moving body 12 in the Y direction without contact is provided. The second linear displacement sensor directly measures the amount of movement of the intermediate frame 42 in the Y direction and regards this as the amount of movement of the planar moving body 12 in the Y direction. Specifically, the second main scale 151 is installed on the outer fixed frame 19, and the second slider 152 is installed on the intermediate frame 42 so as to be movable along the second main scale 151.

The positioning device according to the third embodiment configured as described above is used as follows. The description of the same configuration as that of the first embodiment is omitted. The calibration method is the same as in the first embodiment. Next, mounting work is performed. While mounting the liquid crystal panel on the stage formed on the plane moving body 12,
The liquid crystal driver IC is set at a predetermined position. And CC
The liquid crystal panel is photographed by the D camera, and the position is detected by the image processing unit of the control unit. With this position information, the calculation unit
The moving direction and the moving amount of the plane moving body are calculated for each of the XY directions. Further, the input voltage value of the electropneumatic regulator is obtained from the relational expression obtained by the calibration. Then, the output unit outputs a voltage corresponding to the input voltage value obtained by the calculation unit to the electropneumatic regulator corresponding to the upstream side in the moving direction of the planar moving body in each of the XY directions.

The electropneumatic regulator increases the outlet pressure according to the input voltage. In the Y direction in FIG. 5, the intermediate frame 42 is first pushed and moved by air pressure. Then, the planar moving body 12 connected to the intermediate frame 42 via the deformation member 14 also moves in the Y direction. On the other hand, in the X direction, the planar moving body 12 is directly pushed and moved by air pressure. Therefore, the plane moving body 12 moves by a predetermined amount in each of the X and Y directions. When the plane moving body 12 moves, the liquid crystal panel mounted on the stage on the plane moving body also moves at the same time.

By using the positioning device according to the third embodiment configured as described above as described above, positioning in a horizontal plane becomes possible. In this regard, in the first embodiment, the positioning is performed in one direction in the first embodiment. However, in the positioning device according to the third embodiment, the work arranged on the planar moving body can be independently moved in two orthogonal directions. As a result, positioning in a horizontal plane is possible. This can replace the conventional positioning device shown in FIG.

Since the positioning device according to the third embodiment uses the positioning device according to the first embodiment in combination, all the effects of the positioning device according to the first embodiment can be exhibited. That is, it is possible to reduce the size of the device and to perform highly accurate positioning.
Further, no residual vibration is generated on the stage, and the power consumption can be further reduced.

In addition, the positioning device according to the third embodiment is provided with a first linear position sensor for measuring the amount of movement of the planar moving body in the X direction without contact, and furthermore, the amount of movement of the planar moving body in the Y direction. Was provided with a second linear position sensor for measuring the contactlessness of the second linear position. This prevents the heat that has heated the workpiece from being transmitted to the moving amount measuring unit, and the moving amount measuring unit is less affected by the heat, so that an accurate moving amount can be output. Therefore, high-precision positioning performance can be maintained.

Next, a fourth embodiment will be described.
FIG. 6 shows a perspective view of the positioning device according to the fourth embodiment. The positioning device according to the fourth embodiment includes a plane moving body 1
2 and the outer fixed frame 19 are connected by the deformable member 14 to supply compressed air for moving the plane moving body 12, an electropneumatic regulator for adjusting the air pressure of the compressed air, and control for controlling the operation of the electropneumatic regulator. A roller housing (slider) 32 slidably mounted on a fixed guide rail (fixed guide) 34 of the roller guide mechanism 30 and the planar moving body 12 disposed below the roller housing 32 via a heat insulating material. By connecting the workpieces, the work mounted on the roller housing 32 is positioned. The description of the parts having the same configuration as the above embodiments will be omitted.

Guide rail 34 of roller guide mechanism 30
Is fixed to the outer fixed frame 19 as shown in FIG. In the roller guide mechanism, a plurality of rollers roll on the surface of the guide rail, so that the roller housing can move along the guide rail without thrust. Roller guide mechanism 3
For 0, a commercially available product may be used. Further, the roller housing 32 slidably mounted on the fixed guide rail is connected to the planar moving body 12 disposed below the fixed guide rail. The connection is performed by a plurality of connection members 36. On the upper surface of the roller housing 32, a stage for mounting a work to be positioned is formed. The roller housing 32 and the planar moving body 12 disposed below the roller housing 32 are connected via a heat insulating material. Specifically, the entirety of the connecting means 36 is formed of a heat insulating material such as ceramics, or formed by sandwiching the heat insulating material in the middle thereof.

With the positioning device according to the fourth embodiment configured as described above, heat applied to the work is not transmitted to the plane moving mechanism. In this regard, in a positioning device having a plane moving mechanism configured to move the stage on which the liquid crystal panel is arranged by deformation of the deformable member, the deformable member is thermally deformed by heat transmitted to the plane moving mechanism, Alternatively, there is a problem that the elastic deformation characteristics of the deformable member change due to heat, and the positioning accuracy decreases.
However, in the positioning device according to the fourth embodiment, heat applied to the work is cut off by the heat insulating material, and is not transmitted to the plane moving mechanism. Therefore, since the deformable member 14 is hardly affected by heat, accurate positioning can be performed.

Further, in a positioning device having a plane moving mechanism configured to move a stage on which a liquid crystal panel is arranged by deformation of a deformable member, when a strain gauge is used for measuring the amount of deformation of the deformable member, An error occurs in the output of the strain gauge due to the temperature change of the deformable member. In this case, it is common to perform the measurement while applying a temperature correction due to a temperature change.To do this, a thermometer is installed to constantly monitor the temperature of the deformable member,
There is a problem that control using a correction formula is required, and the system becomes complicated. However, in the positioning device according to the fourth embodiment, heat applied to the work is cut off by the heat insulating material, and is not transmitted to the plane moving mechanism. Therefore,
Even if a strain gauge is used as a means for measuring the amount of movement of a plane moving body and this is used by bonding it to a deformable member, errors in the output of the strain gauge due to heat can be suppressed, so that accurate displacement can be output. Can be. In this case, the manufacturing cost of the positioning device can be reduced.

As the moving amount measuring means, the linear position sensor, CCD camera or displacement sensor described in the first and second embodiments can be adopted to measure the moving amount of the roller housing. In this case, an effect similar to the effect obtained by employing the movement amount measuring means described in the first embodiment and the second embodiment can be obtained. In addition,
The moving amount of the planar moving body may be measured by a linear position sensor or a displacement sensor. In this case, in addition to the above effects, the movement amount measuring means is hardly affected by heat, and a more accurate movement amount can be measured.

Next, a fifth embodiment will be described.
FIG. 7 shows a perspective view of the positioning device according to the fifth embodiment. The positioning device according to the fifth embodiment includes a plane moving body 1
2 and the intermediate frame 42 are connected by the first deformable member 14, and driving means for moving the plane moving body in the X direction while elastically deforming the first deformable member 14 is provided. Are connected by a second deformable member 44, and a driving means for moving the intermediate frame 42 in the Y direction while elastically deforming the second deformable member 44 is provided. As the driving means, a means for supplying compressed air, an electropneumatic regulator for adjusting the air pressure of the compressed air, and a control unit for controlling the operation of the electropneumatic regulator are provided. In addition, a first roller housing (first slider) 32 is slidably mounted on a first fixed guide rail (first fixed guide) 34 of the first roller guide mechanism 30. Second guide rails (second guides) 54 arranged in different directions are fixed to the first roller housing 32, and the second roller guide mechanism 50
The second roller container (second
The work mounted on the second roller housing 52 is positioned by mounting a slider (slider) 52 and connecting the second roller housing 52 and the plane moving body 12 via a heat insulating material. The description of the parts having the same configuration as the above embodiments will be omitted.

The first guide rail 34 of the first roller guide mechanism 30 is fixed to the outer fixed frame 19, and the first roller housing 32 is slidably mounted thereon. In the stacked roller guide mechanisms shown in FIG. 7, the first roller guide mechanism 30 is located on the lower side, and the second roller guide mechanism 50 is located on the upper side. Also, a second guide rail 54 arranged in a direction orthogonal to the first fixed guide rail 34
Is fixed to the first roller container 32. Note that the second guide rail 54 is not fixed to the outer fixed frame 19 or the like. Further, the second roller housing 52 is slidably mounted on the second guide rail 54. In addition, the second roller housing 52 and the planar moving body 12 are connected to each other so that they can be interlocked.
The connection is performed by a plurality of connection members 56. Note that the first roller housing 32 is not connected to the planar moving body 12. On the upper surface of the second roller housing 52, a stage for mounting a work to be positioned is formed. The roller housing 32 and the planar moving body 12 disposed below the roller housing 32 are connected via a heat insulating material. Specifically, the entirety of the connecting means 56 is formed of a heat insulating material such as ceramics, or is formed by sandwiching the heat insulating material in the middle thereof.

The positioning device according to the fifth embodiment configured as described above enables positioning in a horizontal plane. In this regard, in the fourth embodiment, the unidirectional positioning is performed. However, in the positioning apparatus according to the fifth embodiment, the work arranged on the planar moving body can be independently moved in two orthogonal directions. As a result, positioning in a horizontal plane is possible. This can replace the conventional positioning device shown in FIG. Further, in the positioning device according to the fifth embodiment, similarly to the case of the fourth embodiment, heat applied to the work is cut off by the heat insulating material, and is not transmitted to the plane moving mechanism, so that accurate positioning can be performed. it can.

As a result, a strain gauge is adopted as the means for measuring the amount of movement of the plane moving body in the X and Y directions, and
An accurate displacement can be output even when used by bonding to the deformable member and the second deformable member. In this case, the manufacturing cost of the positioning device can be reduced. As the moving amount measuring means, the linear position sensor, CCD camera or displacement sensor described in the first to third embodiments can be employed to measure the moving amount of the second roller housing in the XY directions. In this case, the same effect as the effect obtained by employing the movement amount measuring means described in the first to third embodiments can be obtained. Note that the movement amount of the plane moving body in the XY directions may be measured by a linear position sensor or a displacement sensor. In this case, in addition to the above effects, the movement amount measuring means is hardly affected by heat, and a more accurate movement amount can be measured.

[0048]

According to the present invention, there is provided a positioning device for adjusting the position of a work by moving a plane moving body in a plane moving mechanism,
By connecting a slider slidably mounted on a fixed guide and the planar moving body disposed below the slider via a heat insulating material, heat applied to the work mounted on the slider to the planar moving mechanism is transferred to the slider. Since the transmission is prevented, it is possible to provide a positioning device in which heat applied to the work is not transmitted to the plane moving mechanism.

[Brief description of the drawings]

FIG. 1 is a perspective view of a positioning device according to a first embodiment.

FIG. 2 is a plan view of a positioning device according to the first embodiment and a block diagram of a driving unit.

FIG. 3 is an explanatory diagram of an optical linear position sensor.

FIG. 4 is an explanatory diagram of a laser displacement meter.

FIG. 5 is a plan view of a positioning device according to a third embodiment.

FIG. 6 is a perspective view of a positioning device according to a fourth embodiment.

FIG. 7 is a perspective view of a positioning device according to a fifth embodiment.

FIG. 8 is an explanatory view of a liquid crystal panel and a liquid crystal driver IC, wherein (1) is a plan view and (2) is a front view.

FIG. 9 is a perspective view of a positioning device according to the related art.

[Explanation of symbols]

1 ... Liquid crystal panel, 2 ... Display part, 3 ... Glass substrate, 4 ... Electrode, 5 ... Liquid crystal driver IC bonding part, 8 ... Liquid crystal driver IC, 9 ... Different Electroconductive adhesive, 12: planar moving body, 14: deformable member, 1
5 ... bellows, 16 ... notch, 17 ... strain gauge, 18 ... metal bellows, 19 ... outer fixed frame, 19a ... through hole, 22 ... compressed air supply Means 24 electropneumatic regulator 26 CCD camera 28 control unit 30 roller guide mechanism 32 roller housing 34 guide rail 36 ... Connecting member, 42 ... Intermediate frame, 44 ...
... Second deformation member, 48 Metal bellows, 50
A second roller guide mechanism, 52, a second roller container,
54: second guide rail, 56: connecting member, 1
10 Ball screw mechanism, 112 Ball housing, 114 Screw axis, 116 Servo motor, 118 Stage Ball screw mechanism, 130 Linear position sensor , 131… Main scale, 131 a… Slit, 132…
Slider, 133 light source, 134 lens, 1
35 Index scale 135a Slit 136 Light receiving element 140 Laser displacement meter 141 Casing 42 Reflecting surface 14
3 Light emitting element 144 Light emitting lens 145
...... Reception lens, 146 ... Position detecting element, 150
... Second linear position sensor 151 151 Second main scale 152 Second slider

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F078 CA08 CB02 CB16 CC14 3C030 DA36 5E313 AA01 AA11 CC02 CC04 EE01 EE02 EE03 EE38 FF12 FF13 FF24 FF29 5H303 AA06 BB01 BB06 BB11 CC01 DD08 FF14 GG14

Claims (6)

[Claims] 1. A positioning device for adjusting a position of a work by moving a plane moving body in a plane moving mechanism,
By connecting a slider slidably mounted on a fixed guide and the planar moving body disposed below the slider via a heat insulating material, heat applied to the work mounted on the slider to the planar moving mechanism is transferred to the slider. A positioning device characterized by preventing transmission. 2. The planar moving mechanism is configured by connecting the planar moving body and an outer fixed frame by a deformable member, and installing driving means for moving the planar movable body while elastically deforming the deformable member. The positioning device according to claim 1, wherein: 3. A positioning device for adjusting the position of a work by moving a plane moving body in a plane moving mechanism,
A driving means for connecting the planar moving body and the intermediate frame with a first deformable member and moving the planar movable body in a first direction while elastically deforming the first deformable member is provided. A driving means for connecting the fixed frame to the fixed frame by a second deformable member and moving the intermediate frame in a second direction different from the first direction while elastically deforming the second deformable member; The first slider is slidably mounted on the guide, and the second slider is arranged in a different direction from the first fixed guide.
The guide is fixed to the first slider, the second slider is slidably mounted on the second guide, and the second slider is connected to the planar moving body via a heat insulating material, thereby forming the second slider. A positioning device, wherein transmission of heat applied to the work mounted on a slider to the plane moving mechanism is prevented. 4. The positioning device according to claim 1, wherein the guide and the slider are configured by a roller guide mechanism. 5. The apparatus according to claim 1, wherein said driving means includes a means for supplying compressed air, an electropneumatic regulator for adjusting the air pressure of the compressed air, and a control unit for controlling the operation of the electropneumatic regulator. The positioning device according to claim 2. 6. The positioning device according to claim 1, wherein a substrate is mounted as the work, and a pressing unit including a pressure bonding head for mounting an electronic component on the substrate is provided. Characteristic mounting device.