JP2002283362A - Microlens array, method for manufacturing the same and optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microlens array having a shading layer provided thereto at an accurate position, a method for manufacturing the same and an optical device. SOLUTION: The method for manufacturing the microlens array includes a process for forming second layers 126 on a member having a first layer 120 and shading layers 122 and provided with a plurality of recessed parts 124. The bottom parts of the recessed parts 124 are formed to the first layer 120. The shading layers 122 surround the recessed parts 124 to form at least a part of the inside surfaces thereof. The surfaces of the second layers 126 are formed so as to have lens surfaces at every recessed part 124.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a microlens array, a method for manufacturing the same, and an optical device.

[0002]

BACKGROUND OF THE INVENTION Heretofore, a microlens array constituted by arranging a plurality of minute lenses has been applied to, for example, a liquid crystal panel. A black matrix may be provided on the microlens array. The black matrix is formed by using a lithography technique. However, the alignment accuracy required for the formation of the black matrix has become strict with the improvement in image quality, and the conventional method could not meet the requirement.

An object of the present invention is to solve such a conventional problem, and an object of the present invention is to provide a microlens array in which a light-shielding layer is provided at an accurate position, a method of manufacturing the same, and an optical device. is there.

[0004]

(1) In a method of manufacturing a microlens array according to the present invention, a method for manufacturing a microlens array, comprising a first layer and a light-shielding layer and a plurality of concave portions formed on a member, Forming two layers, wherein the bottom of each recess is
The light-shielding layer is formed of the first layer, the light-shielding layer surrounds each of the recesses, forms at least a part of an inner surface of each of the recesses, and has a lens surface for each of the recesses on the surface of the second layer It is formed as follows.

According to the present invention, since the light-shielding layer forms at least a part of the inner surface of the recess, the light-shielding layer can be formed at an accurate position with respect to the recess. Since the lens surface is formed in each concave portion, the lens surface and the light-shielding layer can be accurately positioned.

(2) In this method of manufacturing a microlens array, both the first and second layers may be light transmitting layers.

(3) In this method of manufacturing a microlens array, a surface of an opening end of the concave portion may be formed of the light-shielding layer.

(4) In this method of manufacturing a microlens array, a second layer precursor is provided in the concave portion to form the second layer, and the surface of the light-shielding layer is formed of the second layer. The affinity for the precursor is low, and the surface of the light-shielding layer repels the second layer precursor, so that the surface of the second layer precursor is also a convex surface for each concave portion. Good.

According to this, the surface of the second layer precursor that has been repelled on the surface of the light-shielding layer has a curved surface.

(5) In this method of manufacturing a microlens array, the second layer precursor may be provided by an ink jet method in a state in which the second layer precursor is raised from the open end of each concave portion.

(6) In this method of manufacturing a microlens array, the second layer precursor may be provided in each concave portion in a gel state, and then liquefied by applying energy.

(7) In this method of manufacturing a microlens array, the gel-like second layer precursor may be provided in the recess by a squeegee at a height not exceeding the opening end.

(8) In this method of manufacturing a microlens array, the second layer may be formed by inserting a lens body having the lens surface into each concave portion.

(9) In this method of manufacturing a microlens array, a third layer is formed on the second layer, and the third layer and the light-shielding layer are integrally formed with the first and second layers. The method further includes separating from the second layer, transferring the shape of the lens surface formed on the second layer to the third layer, and using the third layer as at least a part of a microlens array. Is also good.

(10) A microlens array according to the present invention is manufactured by the above method.

(11) The microlens array according to the present invention has a light-shielding layer having a plurality of openings formed therein and a light-transmitting layer having a plurality of lens surfaces formed therein. Each opening of the layer is formed adjacent to the outer periphery of each lens surface.

According to the present invention, the lens surface and the light-shielding layer are accurately positioned.

(12) In this microlens array, the lens surface may be a convex lens surface.

(13) In this microlens array, the lens surface may be a concave lens surface.

(14) The microlens array further includes a first layer, wherein the light-shielding layer is formed on the first layer, and a member comprising the first layer and the light-shielding layer is provided. A recess may be formed, the light-transmitting layer may be formed in the recess as a second layer, and the first layer may be a light-transmitting layer.

(15) In this microlens array, the light-shielding layer may be formed on the light-transmitting layer.

(16) An optical device according to the present invention has the microlens array.

(17) The optical device may further include a light source.

(18) The optical device may further include an image pickup device.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1A to 3
(C) is a figure explaining the manufacturing method of the microlens array concerning a 1st embodiment to which the present invention is applied.

(Master) FIG. 1A shows a master 10. The master 10 is provided with a first layer precursor 22 (FIG. 2).
(Refer to (A)). The master 10 has a plurality of convex portions 12 formed thereon. Convex part 12
Has an inverted shape of the concave portion 28 formed in the first layer 26 (see FIG. 2C). A concave portion 14 is formed between adjacent convex portions 12. At least a part of the surface of the convex portion 12 (for example, the surface of the tip portion) may be a curved surface. The curved surface may be any of a spherical surface, an aspherical surface (an elliptical surface, a paraboloid, etc.) and a cylindrical surface.

As shown in FIG. 1B, a light-shielding material 16 is provided on the master 10 (the surface on which the convex portions 12 are formed).
For example, using a squeegee 18, the light-shielding material 1
6 is provided.

As the light-shielding material 16, various materials can be used as long as they are durable and have no light transmittance. For example, a material obtained by dissolving a black dye or a black pigment in a solvent together with a binder resin is used as the light-shielding material 16. The solvent is not particularly limited to its type, and water or various organic solvents can be used. As the organic solvent, for example, propylene glycol monomethyl ether acetate, propylene glycol monopropyl ether, methoxymethyl propionate, ethoxyethyl propionate, ethyl cellosolve, ethyl cellosolve acetate, ethyl lactate,
One or a mixed solution of one or more of ethyl pyruvate, methyl amyl ketone, cyclohexanone, xylene, toluene, butyl acetate and the like can be used.

The light-shielding material 16 comprises a second layer precursor 34
(See FIG. 3A). For example, the light-blocking material 16 may contain a fluorine element. By containing the fluorine element, the surface free energy can be reduced, and the affinity with other materials can be reduced. The inclusion of the fluorine element in the light-shielding material 16 is performed, for example, by replacing a part of the hydrogen element of the material constituent molecules with the fluorine element.

As shown in FIG. 1C, the light shielding material 16
Is provided between the convex portions 12 (the concave portions 14), the solvent of the light-shielding material 16 is removed as shown in FIG. For example,
Evaporate the solvent. Then, the light-shielding layer 20 is formed while the solid content (solute) of the light-shielding material 16 is left between the protrusions 12. It is preferable that the solid content (solute) is left so as to avoid the protrusions 12. By doing so, it is possible to prevent solids from adhering to the concave portions 28 of the first layer 26. Convex part 12
If the surface has the property of having low affinity with the light-shielding material 16, it is easy to leave solids while avoiding the protrusions 12.

(First Layer and Light-Shielding Layer) Next, FIG.
As shown in (A), the shape of the master 10 is transferred to the first layer precursor 22. In the present embodiment, the first layer precursor 22 is a light transmitting layer. The first layer precursor 22 is preferably a liquid or liquefiable substance. By being in a liquid state, it is easy to fill the first layer precursor 22 between the protrusions 12. As the liquid substance, a substance that can be cured by applying energy can be used, and as the liquefiable substance, a plastic substance can be used.
The first layer precursor 22 is preferably a resin. As the resin, a resin having energy curability or a resin having plasticity is easily obtained, and is preferable.

As the resin having energy curability,
Desirably, it can be cured by applying at least one of light and heat. For the use of light and heat, a general-purpose exposure apparatus, a heating apparatus such as a bake furnace or a heater can be used, and the equipment cost can be reduced. As the resin having energy curability, for example, an acrylic resin, an epoxy resin, a melamine resin, a polyimide resin, or the like can be used. In particular, an acrylic resin is preferable because it can easily be cured by irradiation with light by using various commercially available precursors and photosensitive agents (photopolymerization initiators). Specific examples of the basic composition of the photocurable acrylic resin include a prepolymer or oligomer,
Monomers and photopolymerization initiators. Examples of the prepolymer or oligomer include acrylates such as epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, spiroacetal acrylates, epoxy methacrylates, urethane methacrylates, polyester methacrylates, and polyethers. Methacrylates such as methacrylates can be used.

As the monomer, for example, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidone, carbitol acrylate, tetrahydrofurfuryl acrylate, isovol Monofunctional monomers such as nyl acrylate, dicyclopentenyl acrylate and 1,3-butanediol acrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, neopentyl glycol diacrylate,
Bifunctional monomers such as neopentyl glycol dimethacrylate, ethylene glycol diacrylate, polyethylene glycol diacrylate, pentaerythritol diacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate,
Polyfunctional monomers such as pentaerythritol triacrylate and dipentaerythritol hexaacrylate can be used.

As the photopolymerization initiator, for example, 2,2-
Acetophenones such as dimethoxy-2-phenylacetophenone, butylphenones such as α-hydroxyisobutylphenone and p-isopropyl-α-hydroxyisobutylphenone, p-tert-butyldichloroacetophenone, p-tert-butyltrichloroacetophenone, α, halogenated acetophenones such as α-dichloro-4-phenoxyacetophenone, benzophenone,
Benzophenones such as N, N-tetraethyl-4,4-diaminobenzophenone; benzyls such as benzyl and benzyldimethylketal; benzoins such as benzoin and benzoin alkyl ether; 1-phenyl-1,2
Oximes such as -propanedione-2- (o-ethoxycarbonyl) oxime, 2-methylthioxanthone,
-Xanthones such as chlorothioxanthone, and radical generating compounds such as Michler's ketone and benzyl methyl ketal can be used.

If necessary, a compound such as an amine may be added to prevent curing inhibition by oxygen, or a solvent component may be added to facilitate coating. The solvent component is not particularly limited, and various organic solvents, for example, propylene glycol monomethyl ether acetate, methoxymethyl propionate, ethoxyethyl propionate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, etc. Available. These materials are preferable because they have good releasability from silicon or quartz, which is excellent as a material of the master 10 in that high-precision etching is possible.

As the resin having plasticity, for example, a resin having thermoplasticity such as a polycarbonate resin, a polymethyl methacrylate resin, and an amorphous polyolefin resin can be used. Such a resin is plasticized by heating it to a temperature equal to or higher than the softening point to form a liquid, and is provided on the master 10 as shown in FIG. And the first
The step of spreading the layer precursor 22 is performed. For example, the first
The first layer precursor 22 is spread to a predetermined area by bringing the master 10 and the substrate 24 into close contact with each other via the layer precursor 22.

The substrate 24 may have at least the function required to spread the first layer precursor 22. One surface of the substrate 24 may be flat, and in that case, the flat surface may be in close contact with the first layer precursor 22. When the substrate 24 is part of a microlens array, it is not particularly limited as long as it satisfies optical properties such as light transmittance required for the microlens array and characteristics such as mechanical strength. But, for example,
It is possible to use quartz or glass, or a plastic substrate or film of polycarbonate, polyarylate, polyether sulfone, polyethylene terephthalate, polymethyl methacrylate, amorphous polyolefin, or the like. If the substrate 24 is peeled in a later step, the substrate 24 may not have light transmittance.

If necessary, when the master 10 and the substrate 24 are brought into close contact with each other via the first layer precursor 22, the first layer precursor 22 is provided via at least one of the master 10 and the substrate 24. May be pressurized. By pressurizing, the time required for the first layer precursor 22 to spread can be shortened, so that workability is improved, and filling of the first layer precursor 22 between the protrusions 12 formed on the master 10 is ensured. Becomes

In the example shown in FIG. 2A, the first layer precursor 22 was placed on the master 10 and the substrate 24 and the master 10 were brought into close contact with each other. Instead of this method, the first layer precursor 22 is placed on the substrate 24, and the master 10 is placed thereon.
0, the first layer precursor 22 may be provided, and the first layer precursor 22 may be further spread by the substrate 24 and the master 10. Further, the first layer precursor 22 may be provided on both the master 10 and the substrate 24 in advance.

Through the above steps, a layer composed of the first layer precursor 22 is formed between the master 10 and the substrate 24 as shown in FIG. Then, a solidification process corresponding to the first layer precursor 22 is performed. For example, when a photo-curable resin is used, light is irradiated under predetermined conditions. Thus, the first layer 26 is formed. In addition, the first with a photocurable substance
When the layer 26 is formed, at least one of the substrate 24 and the master 10 needs to have optical transparency. Alternatively, when a resin that has been plasticized by heating to a softening point or higher is used as the first layer precursor 22,
It can be solidified by cooling.

Next, as shown in FIG. 2C, the first layer 26 is peeled from the master 10. Further, the light-shielding layer 20 is peeled off from the master 10 together with the first layer 26. It is preferable that the releasability between the first layer 26 (or the first layer precursor 22) and the master 10 (especially the convex portion 12) is high (for example, low affinity or low adhesion). Further, it is preferable that the releasability between the first layer 26 (or the first layer precursor 22) and the light-shielding material 16 (or the light-shielding layer 20) is low (for example, the affinity or the adhesion is high). Further, it is preferable that the releasability between the master 10 (especially the concave portion 14) and the light-shielding material 16 (or the light-shielding layer 20) is high (for example, low affinity or low adhesion).

Thus, the first layer 26 and the light-shielding layer 20
Can be obtained. In this member, a plurality of concave portions 28 are formed. The recess 28 is formed in the first layer 2
6 and an opening of the light-shielding layer 20. The bottom of the recess 28 is formed of the first layer 26. The concave portion 28 has an inverted shape of the convex portion 12 described above. At least a part (for example, a bottom surface) of the concave portion 28 may be the lens surface 30. The lens surface 30 shown in FIG.
Is a concave surface (concave lens surface). The lens formed by the lens surface 30 may be a spherical lens, an aspherical lens (an elliptical surface, a paraboloid, or the like), or a cylindrical lens.

The light-shielding layer 20 surrounds each recess 28. The light-shielding layer 20 is formed so as to avoid the lens surface 30. The light-shielding layer 20 forms at least a part of the inner surface of each recess 28. In the example shown in FIG. 2C, the surface of the opening end of the recess 28 is formed of the light-shielding layer 20.

(Second Layer) As shown in FIG. 3A, a second layer precursor 34 is provided on a member composed of the first layer 26 and the light-shielding layer 20. For example, the second layer precursor 34 is provided in the recess 28. In addition, as the second layer precursor 34,
A material that can be selected as the first layer precursor 22 described above can be used. In the present embodiment, the second layer precursor 34 has optical transparency.

The surface of the light-shielding layer 20 is coated with the second layer precursor 3
In the case where the affinity for the second layer precursor 4 is low, the second layer precursor 34 is
The light is repelled from the surface of the light-shielding layer 20 and enters the recess 28.
The second layer precursor 34 is formed by an inkjet method.
It may be provided in each recess 28. In that case, recess 2
The second layer precursor 34 is provided so as to overflow from No. 8.
The second layer precursor 34 is repelled by the light-shielding layer 20 and accumulates so as to rise in the region of the concave portion 28. For example, due to surface tension, the surface of the second layer
Draw a lens surface (convex surface) every 8th.

In this way, as shown in FIG.
Layer 36 can be formed. The second layer 36 is formed in the recess 28. The surface of the second layer 36 has a lens surface 38 for each recess 28. According to the present embodiment, the lens surface 38 of the second layer 36 is not formed above the light shielding layer 20. Therefore, the alignment between the light-shielding layer 20 and the lens surface 38 can be easily performed.

If necessary, as shown in FIG.
A substrate (reinforcing plate, protective plate, cover, etc.) 4 is formed on the second layer 36.
0 may be provided. Substrate 40 may be adhered to second layer 36 with adhesive 42. Adhesive 42 may be a material that can be selected as first layer 26. Substrate 40
May be formed from a material that can be selected as the substrate 24. If the second layer 36 has necessary strength such as process resistance, the substrate 40 may not be provided. Thus, a microlens array is obtained.

According to the present embodiment, the light-shielding layer 20
Since at least a part of the inner side surface of the concave portion 28 is formed, it is formed at an accurate position with respect to the concave portion 28. Since the lens surface 38 of the second layer 36 is formed in each recess 28, the lens surface 38 and the light-shielding layer 20 can be accurately positioned.

(Microlens Array) As shown in FIG. 3C, the microlens array according to the present embodiment has a second layer (light transmitting layer) 36 having a plurality of lens surfaces 38 formed thereon. Having. The lens surface 38 is a convex lens surface. The second layer 36 only needs to have a property of transmitting light, and may be transparent or colored. The light transmittance of the second layer 36 need not be 100% unless it is 0%. In the present embodiment, the material forming the second layer 36 is a resin, but may be glass as a modification. This microlens array has a light-shielding layer 20. The light-shielding layer 20 has a plurality of openings 44 formed therein. The opening 44 is formed adjacent to the outer periphery of the lens surface 38.

The microlens array according to the present embodiment has a first layer (light transmitting layer) 26. First layer 2
6 only needs to have a property of transmitting light, and may be transparent or colored. The light transmittance of the first layer 26 need not be 100% unless it is 0%. In the present embodiment, the material forming the first layer 26 is a resin, but may be glass as a modification. First layer 26
A light-shielding layer 20 is formed thereon. The light-shielding layer 20
It is formed avoiding the concave portion 28. Specifically, the inner surface of the opening 44 of the light-shielding layer 20 is a part of the inner surface of the concave portion 28.

At least a part of the inner surface of the concave portion 28 is a lens surface 30. The lens surface 30 is a concave lens surface. The second layer 36 is formed in the concave portion 28 of the first layer 26. The surface of the second layer 36 has a lens surface 38 for each recess 28. The lens surfaces 30, 38 are also interfaces between adjacent media. Lens surface 30 as an interface,
Since 38 has a convex surface facing in the opposite direction, the lens constituted by this is a biconvex lens. Note that the lens surfaces 30, 38 may be formed with substantially equal widths.

When the above-described method is applied to the manufacturing method, the resulting structure is applied to the microlens array. The present invention is not limited to the above embodiment, and various modifications are possible. Hereinafter, other embodiments will be described.

(Second Embodiment) FIGS. 4A and 4
(B) is a figure explaining the manufacturing method of the micro lens array concerning a 2nd embodiment to which the present invention is applied. The process according to this embodiment is the same as that of the first embodiment shown in FIG.
The step can be performed instead of the steps described with reference to FIG.

In the present embodiment, as shown in FIG. 4A, a second layer precursor 54 is provided in the recess 52 using the squeegee 18 or the like. For example, the second layer precursor 54 is provided so as not to exceed the surface of the light-shielding layer 20 (the opening end of the concave portion 52). The second layer precursor 54 may be in a gel state. Thereafter, energy (such as heat due to reflow) is applied to the second layer precursor 54 to liquefy it. The liquefied second layer precursor 54 is repelled by the light-shielding layer 20, as shown in FIG. 4B, so that the surface becomes the lens surface. The second layer precursor 54 cures to form a second layer.

The entire inner surface of the concave portion 52 formed in the member composed of the first layer 50 and the light-shielding layer 20 may be formed of a material having a low affinity for the second layer precursor 54. . In that case, the surface of the second layer precursor 54 can be used as a lens surface for each of the concave portions 52 by repelling the second layer precursor 54 in the concave portions 52.

Also in the present embodiment, the effects described in the first embodiment can be achieved. Further, the contents described in the first embodiment can be applied to the present embodiment.

(Third Embodiment) FIG. 5 is a diagram for explaining a method of manufacturing a microlens array according to a third embodiment of the present invention. The process according to this embodiment can be performed instead of the process described with reference to FIGS. 3A and 3B in the first embodiment.

In the present embodiment, a lens body 64 is inserted into a concave portion 62 formed in a member including the first layer 60 and the light-shielding layer 20. A second layer (light-transmitting layer) is constituted by the lens body 64 inserted into the plurality of recesses 62. The lens body 64 constituting the second layer has a lens surface 66.
Having. The lens body 64 is inserted into the concave portion 62 with the lens surface 66 disposed on the side opposite to the concave portion 62. That is, the lens surface 66 is arranged so as to be exposed from the concave portion 62. A portion of the lens body 64 located in the concave portion 62 may be formed to fit into the concave portion 62, or may be formed larger than the concave portion 62 so as to be deformable.

Also in the present embodiment, the effects described in the first embodiment can be achieved. Further, the contents described in the first embodiment can be applied to the present embodiment.

(Fourth Embodiment) FIG. 6 is a view for explaining a microlens array according to a fourth embodiment of the present invention. In the present embodiment, the shape of the concave portion 72 formed in the member composed of the first layer 70 and the light shielding layer 20 is the same as the concave portion 28 described in the first embodiment (see FIG.
(A)). The concave portion 72 of the present embodiment has a bottom surface that is a convex lens surface 74 and a wall surface rising from the bottom surface. Note that the convex lens surface 74 may be a spherical surface, an aspherical surface (an elliptical surface, a paraboloid, or the like), or a cylindrical surface.

According to the present embodiment, the convex lens surface 74 of the first layer 70 and the lens surface 78 of the second layer 76
, Constitute a concave-convex lens (a lens having one concave surface and the other surface being convex). That is, the convex lens surface 74 and the lens surface 78 are also interfaces between adjacent media, and are arranged with the convex surfaces facing in the same direction.

In this embodiment, the effects described in the first embodiment can be achieved. The other contents correspond to the contents described in the first embodiment.

(Fifth Embodiment) FIG. 7 is a view for explaining a microlens array according to a fifth embodiment to which the present invention is applied. In the present embodiment, the shape of the concave portion 82 formed in the member composed of the first layer 80 and the light-shielding layer 20 is the same as the concave portion 28 (FIG. 3) described in the first embodiment.
(A)). Lens surface 84 in recess 82
Are formed with a width smaller than the lens surface 94 of the second layer 90. Note that the lens surface 84 may be a spherical surface, an aspherical surface (an elliptical surface, a paraboloid, or the like),
It may be a cylindrical surface.

Also in the present embodiment, the effects described in the first embodiment can be achieved. The other contents correspond to the contents described in the first embodiment.

(Sixth Embodiment) FIGS. 8A to 8
(B) is a figure explaining the manufacturing method of the micro lens array concerning a 6th embodiment to which the present invention is applied. A plurality of convex portions 112 are formed on a master 110 shown in FIG. Each protrusion 112 has a flat upper end surface and a side surface that falls vertically from the upper end surface. A concave portion 114 is formed between adjacent convex portions 112.

In the present embodiment, a member having a first layer 120 and a light-shielding layer 122 and a plurality of recesses 124 is formed using the master 110. A specific method is as described in the first embodiment.
The concave portion 124 has a flat bottom surface and side surfaces rising vertically from the bottom surface, corresponding to the shape of the convex portion 112.

As shown in FIG. 8B, the second layer 126
To form For example, as shown in FIG.
24, a second layer precursor 128 is provided, and energy (for example, heat) may be applied thereto to form a curved surface as shown in FIG. 9B. The details have been described in the second embodiment. Other contents correspond to the contents described in any of the above-described embodiments. Also in the present embodiment, the effects described in the first embodiment can be achieved.

(Seventh Embodiment) FIGS. 10A to 1
FIG. 0B is a diagram illustrating a method for manufacturing a microlens array according to the seventh embodiment of the present invention.
In the present embodiment, the microlens array manufactured in the sixth embodiment is used, and a microlens array having an inverted shape thereof is manufactured.

That is, as shown in FIG. 10A, a third layer 130 is formed on the second layer 126. For example,
A third layer precursor is provided on the light-shielding layer 122 and the second layer 126, and is cured to form a third layer (light-transmitting layer) 13
0 is formed.

Then, as shown in FIG.
Layer 130 and light-shielding layer 122 are integrally separated from first and second layers 120 and 126. Thus, the lens surface 13 formed on the second layer 126 is formed on the third layer 130.
The lens surface 134 is formed by transferring the shape of FIG. The lens surface 134 is a concave lens surface.

The microlens array according to the present embodiment has a third layer 130. The third layer 130 is a light transmitting layer. The light-blocking layer 122 is formed over the third layer 130. The third layer 130 includes a plurality of lens surfaces 13.
4 are formed. A plurality of openings 136 are formed in the light shielding layer 122. Opening 136 of light-shielding layer 122
Are formed adjacent to the outer periphery of each lens surface 134.

In the present embodiment, the effects described in the first embodiment can be achieved. The other contents correspond to the contents described in the first embodiment.

(Eighth Embodiment) FIG. 11 is a view for explaining an optical device according to an eighth embodiment of the present invention. This optical device is a liquid crystal panel including a microlens array. The microlens array has a first layer 210 and a light-blocking layer 200. First layer 210
The member made of the light-shielding layer 200 includes a plurality of recesses 21.
2 are formed. The bottom of the recess 212 is the first layer 21
0, and the first layer 210 is a light transmissive layer. A plurality of openings 202 are formed in the light shielding layer 200. The micro lens array includes a plurality of lens surfaces 22.
6 having a light-transmitting layer (second layer) 220 formed thereon. Each opening 202 of the light-shielding layer 200 is
26 is formed adjacent to the outer periphery.

The first layer 210 includes a plurality of lens surfaces 212
And the light-shielding layer 200 is integrally formed. A substrate 218 is provided on a side of the first layer 210 opposite to the lens surface 212. The substrate 218 is a part of a liquid crystal panel. Light transmitting layer (second layer) 220
Are formed so as to have a lens surface 226 for each lens surface 212. Further, a light-transmitting layer (second layer) 2
20 is provided with a substrate 224 via a third layer (adhesive layer in this case) 222. The third layer 222 is also a light transmitting layer.

The lens surfaces 212 and 226 are
It can also be said that it is the interface between the zero and light transmissive layer (second layer) 220 and the medium outside thereof. Lens surface 212,
Light is incident on one of the 226 and emitted from the other. The lens surfaces 212 and 226 are located in a stacked or overlapping manner. When the microlens array is incorporated in an optical device that displays an image using a plurality of pixels, the lens surfaces 212 and 226 are arranged so as to correspond to each pixel (sub-pixel in the case of color display).

It is preferable that the normals passing through the centers of curvature of the lens surfaces 212 and 226 coincide. This normal is the optical axis. One lens surface 226 is formed to have a gentler curved surface than the other lens surface 212. For example, if the lens surfaces 212 and 226 are spherical lenses, the radius of curvature R ₁ of the lens 226 and the radius of curvature R ₂ of the lens 212 have a relationship of R ₂ <R ₁ .

According to the present embodiment, since the lens surface 226 on the light incident side is formed with a gentle curved surface,
When light enters, the incident angle i of light (the angle between the normal to the lens surface 226 and the light beam) decreases. Therefore, the amount of reflected light is reduced and more light is incident,
Brightness can be improved. Generally, when light enters an interface between two substances, some light is reflected at the interface.
It is known that the amount of reflected light increases as the refractive index difference between the two substances increases or as the incident angle of the light increases.

In the present embodiment, the first and third layers 210 and 222 are provided outside the light-transmitting layer (second layer) 220.
Are formed. The first layer 210 and the light-transmitting layer (second
) 220 and the refractive index (for example, the absolute refractive index as a refractive index with respect to vacuum) n ₁ , n ₂ , and n ₃ of the third layer 222 have a relationship of n ₁ <n ₂ n ₃ <n ₂ . By having this relationship, the third layer 2
Light incident on the light-transmitting layer (second layer) 220 from 22 enters the convex surface of the lens surface 226 and is refracted in a direction approaching the normal of the lens surface 226 (direction approaching the optical axis). Then, from the light transmitting layer (second layer) 220 to the first layer 21
Light incident on 0 is incident on the concave surface of the lens surface 212 and is refracted in a direction away from the normal of the lens surface 212 (a direction approaching the optical axis).

Such a micro lens array is mounted on a liquid crystal panel. The liquid crystal panel is a substrate 218
And a substrate (TFT substrate) 228. The common electrode 232 and the alignment film 234 are formed on the substrate 218. An individual electrode 236 and a thin film transistor 238 are provided on the substrate 228, and the alignment film 24
0 is formed. A liquid crystal 242 is sealed between the alignment films 234 and 240, and the liquid crystal 242 is driven by a voltage controlled by the thin film transistor 238.

In the microlens array, a gentle curved lens surface 226 faces the light incident direction. Therefore, a large amount of light enters the microlens array with less reflection, and is emitted while being collected. Thus, a lot of light is condensed and incident on the liquid crystal panel, and a bright image can be displayed.

(Ninth Embodiment) FIG. 12 is a view showing an image pickup apparatus as an example of an optical apparatus according to a ninth embodiment to which the present invention is applied. The imaging device has an imaging element (image sensor). For example, in the case of a two-dimensional image sensor, a light receiving unit (for example, a photodiode) 250 is provided for each of a plurality of pixels. CC
In the case of a D (Charge Coupled Device) type image sensor, the image pickup device has a transfer unit 252, and charges from the light receiving unit 250 of each pixel are transferred at high speed. The color filter 258 may be provided in the color image sensor.

A microlens array to which the present invention is applied is attached to this imaging device. The contents described in the eighth embodiment correspond to the microlens array. Light from the outside enters the gently curved lens surface 226. According to the present embodiment, since a large amount of light is condensed and enters the light receiving unit 250, a clear image can be generated. The detailed operation and effect are as described in the eighth embodiment.

(Tenth Embodiment) FIG. 13 is a view showing an optical device according to a tenth embodiment to which the present invention is applied. This optical device is a projection type display device (liquid crystal projector).

The optical device 300 has a light source 302 and a plurality of liquid crystal panels 304, 306, 308. The liquid crystal panels 304, 306, and 308 include a liquid crystal light valve (for liquid crystal shutter array) corresponding to red, a liquid crystal light valve (for liquid crystal shutter array) corresponding to green, and blue, respectively. This is a liquid crystal light valve (liquid crystal light shutter array) (for blue) corresponding to.

The liquid crystal panels 304, 306, 308
A microlens array (not shown) is attached. The contents described in any of the embodiments correspond to the microlens array.

The optical device 300 includes an illumination optical system including a plurality of integrator lenses, a color separation optical system (a light guiding optical system) including a plurality of dichroic mirrors, and a dichroic mirror surface 310 that reflects only red light. And a dichroic prism (color combining optical system) 31 having a dichroic mirror surface 312 that reflects only blue light
4 and a projection lens (projection optical system) 316.

The illumination optical system includes an integrator lens 31
8 and 320. The color separation optical system includes mirrors 322, 324, and 326, a dichroic mirror 32 that reflects blue light and green light (transmits only red light).
8. Dichroic mirror 33 that reflects only green light
0, a dichroic mirror (or a mirror that reflects blue light) 332 that reflects only blue light, and a condenser lens 33
4, 336, 338, 340 and 342.

A first polarizing plate (not shown) is bonded to the incident surface side of the liquid crystal panel 304 (the surface side where the microlens substrate is located, that is, the side opposite to the dichroic prism 314), and the light emitting surface side of the liquid crystal panel. (The surface side facing the microlens substrate, that is, the dichroic prism 31
A second polarizing plate (not shown) is joined to the (4th side). The liquid crystal panels 306 and 308 also
4 has the same configuration. These liquid crystal panels 30
4, 306 and 308 are respectively connected to a drive circuit (not shown).

In the optical device 300, the dichroic prism 314 and the projection lens 316 form the optical block 34.
4 are configured. Also, this optical block 344
And the liquid crystal panels 304, 306, and 308 fixedly installed with respect to the dichroic prism 314,
A display unit 346 is configured.

The operation of the optical device 300 will be described below.
White light (white light flux) emitted from the light source 302 passes through the integrator lenses 318 and 320. The light intensity (luminance distribution) of this white light is made uniform by the integrator lenses 318 and 320. The white light transmitted through the integrator lenses 318 and 320 is reflected by the mirror 322, and the blue light (B) and the green light (G) of the reflected light are respectively reflected by the dichroic mirror 3
The red light (R) reflected at 28 passes through the dichroic mirror 328. The red light transmitted through the dichroic mirror 328 is reflected by the mirror 324, and the reflected light is
The light is shaped by the condenser lens 334 and is incident on the liquid crystal panel 304 for red. The green light of the blue light and the green light reflected by the dichroic mirror 328 is reflected by the dichroic mirror 330, and the blue light is transmitted by the dichroic mirror 330. Dichroic mirror 330
The green light reflected by the LED is shaped by the condenser lens 336 and is incident on the liquid crystal panel 306 for green. The blue light transmitted through the dichroic mirror 330 is reflected by a dichroic mirror (or mirror) 332, and the reflected light is reflected by a mirror 326. The blue light is condensed lens 3
38, 340 and 342, and enters the blue liquid crystal panel 308.

As described above, the white light emitted from the light source 302 is color-separated into three primary colors of red, green, and blue by the color separation optical system, and is guided and incident on the corresponding liquid crystal panel. At this time, each pixel (a thin film transistor and a pixel electrode connected thereto) of the liquid crystal panel included in the liquid crystal panel 304 is subjected to switching control (on / off) by a driving circuit (driving means) that operates based on a red image signal. ), That is, modulated. Similarly, the green light and the blue light enter the liquid crystal panels 306 and 308, respectively, and are modulated by the respective liquid crystal panels, thereby forming a green image and a blue image. At this time, each pixel of the liquid crystal panel included in the liquid crystal panel 306 has:
Switching control is performed by a driving circuit that operates based on a green image signal, and switching of each pixel of the liquid crystal panel included in the liquid crystal panel 308 is controlled by a driving circuit that operates based on a blue image signal. As a result, the red light, the green light and the blue light are respectively transmitted to the liquid crystal panel 3
Images modulated for 04, 306 and 308, for red,
A green image and a blue image are respectively formed.

The image for red color formed by the liquid crystal panel 304, that is, the red light from the liquid crystal panel 304 enters the dichroic prism 314 from the surface 348, reflects on the dichroic mirror surface 310, and transmits through the dichroic mirror surface 312. Out of the light exit surface 350. A green image formed by the liquid crystal panel 306,
That is, the green light from the liquid crystal panel 306 enters the dichroic prism 314 from the surface 352 and passes through the dichroic mirror surfaces 310 and 312, respectively.
The light exits from the exit surface 350. An image for blue formed by the liquid crystal panel 308, that is, blue light from the liquid crystal panel 308 is transmitted from the surface 356 to the dichroic prism 31.
4 and is reflected by the dichroic mirror surface 312,
The light exits through the dichroic mirror surface 310 and exits from the exit surface 35.
Emitted from 0.

As described above, the light of each color from the liquid crystal panels 304, 306 and 308, that is, the liquid crystal panel 30
The images formed by 4, 306, and 308 are combined by the dichroic prism 314, thereby forming a color image. This image is projected (enlarged projection) by a projection lens 316 onto a screen 354 installed at a predetermined position.

[Brief description of the drawings]

FIGS. 1A to 1D are diagrams illustrating a method for manufacturing a microlens array according to a first embodiment of the present invention.

FIGS. 2A to 2C are diagrams illustrating a method for manufacturing a microlens array according to a first embodiment to which the present invention is applied.

FIGS. 3A to 3C are diagrams illustrating a method for manufacturing a microlens array according to the first embodiment to which the present invention is applied.

FIGS. 4A and 4B are diagrams illustrating a method for manufacturing a microlens array according to a second embodiment of the present invention.

FIG. 5 is a diagram illustrating a method for manufacturing a microlens array according to a third embodiment of the present invention.

FIG. 6 is a diagram showing a microlens array according to a fourth embodiment to which the present invention is applied.

FIG. 7 is a diagram showing a microlens array according to a fifth embodiment to which the present invention is applied.

FIGS. 8A and 8B are views showing a microlens array according to a sixth embodiment to which the present invention is applied.

FIGS. 9A and 9B are diagrams showing a microlens array according to a sixth embodiment to which the present invention is applied.

FIGS. 10A and 10B are views showing a microlens array according to a seventh embodiment to which the present invention is applied.

FIG. 11 is a diagram showing an optical device according to an eighth embodiment to which the present invention is applied.

FIG. 12 is a diagram showing an optical device according to a ninth embodiment to which the present invention is applied.

FIG. 13 is a diagram showing an optical device according to a tenth embodiment to which the present invention is applied.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 master 12 convex part 20 light-shielding layer 22 first layer precursor 26 first layer 28 concave part 30 lens surface 34 second layer precursor 36 second layer 38 lens surface 44 opening 50 first layer 52 concave part 54 second layer precursor 60 first layer 62 concave portion 64 lens body 66 lens surface 70 first layer 72 concave portion 76 second layer 78 lens surface 80 first layer 82 concave portion 84 lens surface 90 second layer 94 lens surface 110 master 112 convex portion 120 first layer 124 concave portion 126 second layer 128 second layer precursor 130 third layer 132 lens surface 134 lens surface 136 opening

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G02F 1/1335 G02F 1/1335 // B29K 105: 24 B29K 105: 24 B29L 11:00 B29L 11:00 ( 72) Inventor Atsushi Takakuwa 3-3-5 Yamato, Suwa-shi, Nagano F-term in Seiko Epson Corporation (reference) 2H042 AA09 AA15 AA21 2H091 FA29Z FA41Z FB03 FB04 LA30 4F204 AA21 AA44 AB04 AD04 AD05 AG03 AG05 AH75 EA03 EB03 EB25 EB29 EF01 EF23 EK18

Claims (18)

[Claims] 1. A method comprising: forming a second layer on a member having a first layer and a light-shielding layer and having a plurality of recesses formed therein; Wherein the light-shielding layer surrounds each recess and forms at least a part of the inner surface of each recess, and the surface of the second layer is formed so that each recess has a lens surface. Of manufacturing a microlens array. 2. The method of manufacturing a microlens array according to claim 1, wherein the first and second layers are both light-transmitting layers. 3. The method of manufacturing a microlens array according to claim 1, wherein a surface of an opening end of the recess is formed of the light-shielding layer. 4. The method of manufacturing a microlens array according to claim 3, wherein a second layer precursor is provided in the concave portion to form the second layer, and a surface of the light-shielding layer is 2 has a low affinity for the layer precursor, and the surface of the light-shielding layer repels the second layer precursor, thereby changing the surface of the second layer precursor for each recess. A method for manufacturing a microlens array having a convex surface. 5. The method of manufacturing a microlens array according to claim 4, wherein the second layer precursor is formed by an inkjet method.
A method for manufacturing a microlens array provided in a state of being raised from the opening end of each concave portion. 6. The method of manufacturing a microlens array according to claim 4, wherein the second layer precursor is provided in each recess in a gel state, and then liquefied by applying energy. Method. 7. The microlens array according to claim 6, wherein the gel-like second layer precursor is provided in the recess by a squeegee at a height not exceeding the opening end. Manufacturing method. 8. The method of manufacturing a microlens array according to claim 1, wherein the second layer is formed by inserting a lens body having the lens surface into each concave portion. A method for manufacturing a lens array. 9. The method of manufacturing a microlens array according to claim 1, wherein a third layer is formed on the second layer, and wherein the third layer and the light shielding are formed. Further comprising the steps of: integrally separating the active layer from the first and second layers; transferring the shape of the lens surface formed on the second layer to the third layer; The method for manufacturing a microlens array in which the layer of at least a part of the microlens array is used. 10. A microlens array manufactured by the method according to claim 1. Description: 11. A light-shielding layer in which a plurality of openings are formed, and a light-transmitting layer in which a plurality of lens surfaces are formed. A microlens array formed adjacent to the outer periphery. 12. The microlens array according to claim 11, wherein said lens surface is a convex lens surface. 13. The microlens array according to claim 11, wherein said lens surface is a concave lens surface. 14. The microlens array according to claim 11, further comprising a first layer, wherein said light-shielding layer is formed on said first layer, A concave portion is formed in a member composed of the first layer and the light-shielding layer; the light-transmitting layer is formed as a second layer in the concave portion; and the first layer is a light-transmitting layer. 15. The microlens array according to claim 11, wherein the light-shielding layer is formed on the light-transmitting layer. 16. An optical device having the microlens array according to claim 11. 17. The optical device according to claim 16, further comprising a light source. 18. The optical device according to claim 16, further comprising an image sensor.