JP2002267600A - Reflecting characteristic measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily identify flaws or the like on the surface of a sample. SOLUTION: An imaging light source 21 of an imaging illumination part 20 is arranged in the outside vicinity of an illumination opening 17 of an integrating sphere 10, composed of a light source having directivity, and illuminates the sample 8 arranged in a sample opening 14 from the direction inclined by a specified angle relative to a normal 14n on the opening surface of the sample opening 14, through the illumination angle 17. An imaging optical system 31 of an imaging part 30 forms an image of a sample 8 arranged in the sample opening 14 on the light receiving surface of an area sensor 32 through an imaging opening 16, and forms the image of a range containing a part of the sample opening 14. The area sensor 32 is formed by two-dimensionally arranging a photoelectric conversion element such as a plurality of CCDs for example, operated based on a control signal from a control part 50, and outputs an electric signal corresponding to the intensity of light received as an imaging signal.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection characteristic measuring apparatus such as a spectrophotometer, and more particularly to a reflection characteristic measuring apparatus capable of suitably positioning a measurement site of a sample.

[0002]

2. Description of the Related Art When measuring the reflection color of a specific portion of a sample using a colorimeter such as a tristimulus direct reading colorimeter or a spectrocolorimeter, a specific portion targeted at a sample opening of the device is used. Since it is important to accurately determine the position, conventionally, FIG.
A colorimeter having a finder optical system as shown in FIG.

[0003] In the colorimeter of FIG. 12, an opening 10 of a mask plate 102 arranged at a sample opening 101 of an integrating sphere 100 is provided.
2a and the sample 103 are illuminated by the finder light source 104. The finder optical system 110 is the imaging lens 1
11 and a reflecting mirror 112, and an image of the sample 103 is formed by the imaging lens 111 on the screen 1 via the reflecting mirror 112.
13 is imaged. This screen 113 is disposed near the surface of the apparatus main body, and outside the screen 113,
A lid 114 is provided to prevent external light from entering the device during measurement. The control unit 115 turns on the finder light source 104 via the light emitting circuit 116 when detecting the opening of the lid 114, turns off the finder light source 104 when detecting the closing of the lid 114, and presses a measurement switch (not shown). Then, the colorimetric light source 105 is turned on via the light emitting circuit 117, and the light receiving unit 118 receives the reflected light of the component inclined by 8 ° with respect to the normal to the opening surface of the sample opening 101.
The colorimetric value is obtained based on the received light data from the camera.

[0004] In this colorimetric device, the user can operate the lid 11
By opening the screen 4 and viewing the screen 113 from outside the apparatus main body, the positional relationship between the opening 102a of the mask plate 102 and the sample 103 in the opening can be confirmed.

[0005]

When ordinary visual observation is performed on a sample, not only the observation site on the sample is illuminated, but also a region wider than the observation site including its peripheral region is illuminated. Is done. For this reason, particularly in the case of a highly translucent sample such as paper or plastic, illumination light that has entered the peripheral region and passed through the inside of the sample is visually observed from the observation site. Therefore, in order to obtain a colorimetric value correlated with the visual observation in the colorimetric apparatus of FIG. 12, the opening 102a of the mask plate 102 that regulates the illumination area in accordance with the visual observation.
Must be larger than the measurement area within a range that allows other conditions (for example, if the opening is too large, a small sample cannot be pressed and held against the opening).

In this case, the aperture 10 in the colorimeter of FIG.
The positioning of the sample 103 with respect to 2a is performed by the user with an estimate of the position and size of the measurement area, so that it is difficult to perform positioning with high accuracy.

Therefore, instead of the screen 113, CC
It is conceivable to provide an image sensor such as D and a monitor, image the sample 103 with the image sensor, and display the sample image on the monitor. In this case, by displaying an index indicating the measurement area together with the sample image on the monitor, positioning can be performed accurately and easily even when the illumination area is larger than the measurement area.

On the other hand, in order to accurately perform colorimetry, it is necessary to set a measurement area while avoiding scratches or the like on the surface of the sample.

However, in the colorimeter of diffuse illumination / 8 ° light receiving (so-called d / 8 geometry) using the integrating sphere shown in FIG. 12, since the finder light source 104 is also arranged in the integrating sphere 100, Since the illumination for confirmation is also diffuse illumination, even if there is unevenness due to a scratch on the surface of the sample, a shadow due to the unevenness hardly occurs. Therefore, the screen 11
In both cases of visual confirmation by 3 and confirmation by image display by an image sensor, it is very difficult to confirm a scratch or the like on the sample surface.

An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a reflection characteristic measuring device capable of easily identifying a flaw or the like on a sample surface.

[0011]

According to the first aspect of the present invention, there is provided a measuring illumination means for illuminating a sample from various directions for measurement,
Light-receiving means for receiving reflected light from the sample illuminated by the measuring illumination means and outputting a light-receiving signal corresponding to the light intensity; and a reflection characteristic of the sample based on the light-receiving signal output from the light-receiving means. A reflection characteristic measuring device for determining the image quality, comprising: an image forming illumination means for illuminating the sample from a specific direction for image formation; and a display means for displaying an image of the sample illuminated by the image forming illumination means. It is characterized by.

According to this structure, when the sample is illuminated from multiple directions by the measurement illumination means, no shadow is produced even if there are irregularities such as scratches on the surface of the sample. When the sample is illuminated from a specific direction by the method, a shadow is generated if there is unevenness on the sample surface. Therefore, the image of the sample illuminated by the image forming illumination means is displayed on the display means. Can be detected.
Therefore, it is possible to always perform measurement with high accuracy by positioning the measurement area while avoiding irregularities such as scratches.

According to a second aspect of the present invention, in the reflection characteristic measuring apparatus according to the first aspect, there is provided an image pickup means for electrically picking up an image of the sample illuminated by the image forming illumination means, and the display means is provided with the image pickup means. The sample image picked up by the means is electrically displayed.

According to this structure, the sample illuminated from the specific direction by the image forming illumination means is electrically imaged, and the image of the sampled image is electrically displayed, so that the sample surface has irregularities. Then, a shadow is generated, and the shadow is picked up and electrically displayed on the display means, so that the unevenness of the sample surface can be easily detected by the density of the image.

According to a third aspect of the present invention, in the reflection characteristic measuring apparatus according to the second aspect, there is provided an image processing means for performing a process for enhancing the density of the sample image picked up by the image pickup means and displaying the processed image on the display means. It is characterized by that.

According to this configuration, since the process of emphasizing the density of the sample image picked up by the image pickup means is performed and the image is electrically displayed on the display means, the density of the shadow caused by the unevenness on the sample surface is emphasized. As a result, irregularities on the sample surface can be detected more reliably.

According to a fourth aspect of the present invention, in the reflection characteristic measuring apparatus according to the second or third aspect, light reflected from the measurement area on the sample is guided to the light receiving means so that the size of the measurement area can be changed. An optical system, optical system driving means for changing the size of the measurement area by driving the light receiving optical system, and detecting the driving state of the light receiving optical system to determine the size of the measurement area, And a display control means for displaying an index corresponding to the size of the measurement area on the display means.

According to this configuration, when the light receiving optical system is driven, the size of the measurement area on the sample is changed, and the reflected light from the measurement area is guided to the light receiving means by the light receiving optical system. The driving state of the optical system is detected, the size of the measurement area is determined, and an index corresponding to the determined size of the measurement area is displayed on the display means, so that the measurement area whose size is changed is displayed. This makes it possible to make a clear distinction, whereby the sample can be positioned accurately.

According to a fifth aspect of the present invention, in the reflection characteristic measuring apparatus according to the fourth aspect, the display control means writes the sample image and the index together with the display means at a magnification corresponding to the size of the measurement area. It is characterized by being displayed.

According to this configuration, since the sample image and the index are displayed together on the display means at a magnification corresponding to the size of the measurement area, for example, when the measurement area has a predetermined size, it is displayed at the same magnification. When the measurement area is equal to or smaller than the predetermined size, the sample image and the index can be easily viewed by, for example, enlarging and displaying the image twice.

According to a sixth aspect of the present invention, in the reflection characteristic measuring apparatus according to the fourth or fifth aspect, a mask plate having an opening for determining an illumination area on the sample from the illumination means for measurement can be replaced. And whether the size of the illumination area determined by the opening of the mask plate held by the holding means matches the size of the measurement area determined by the light receiving optical system. Determining means for performing a determination, wherein the image forming illumination means illuminates at least an area including an opening of the mask plate held by the holding means, and the imaging means is held by at least the holding means. An image of an area including an opening of the mask plate, wherein the determination unit makes the determination based on a driving state of the light receiving optical system and imaging information of the opening of the mask plate by the imaging unit. It is characterized in that the at it.

According to this configuration, the mask plate having an opening for determining an illumination area on the sample from the illumination means for measurement is exchangeably held by the holding means, and the measurement area determined by the light receiving optical system is exchanged. It is determined whether or not the size of the illumination area determined by the opening of the mask plate held by the holding means matches the size of.

At this time, at least a region including the opening of the mask plate is illuminated by the image forming illumination means,
Since at least the region including the opening of the mask plate is imaged by the imaging means, the opening size can be determined by imaging the opening of the illuminated mask plate. On the other hand, since the size of the measurement area can be determined based on the driving state of the light receiving optical system, whether the size of the illumination area matches the size of the measurement area is determined based on both determination results. Is suitably determined.

At the time of measuring the reflection characteristics, a dark calibration and a white calibration, which will be described later, are generally performed. , Must be measured under the same conditions. Therefore, if a mask plate that matches the measurement area determined by the light receiving optical system is held, the conditions are the same as those of the dark calibration and the white calibration, and the measurement result suitable for the visual observation is obtained. May be determined.

According to a seventh aspect of the present invention, in the reflection characteristic measuring apparatus according to the sixth aspect, when the determination means determines that the size of the illumination area is incompatible with the size of the measurement area, A warning means for giving a warning to that effect is provided.

According to this configuration, when it is determined that the size of the illumination area is inconsistent with the size of the measurement area, a warning to that effect is issued. It is possible to prevent the measurement from being performed in a state where the mask plate is not held.

According to an eighth aspect of the present invention, in the reflection characteristic measuring apparatus according to the first aspect, there is provided a finder optical system for guiding light from the sample illuminated by the image forming illumination means to the display means, and the display means is provided. Are characterized by comprising a screen that can be viewed from outside the apparatus main body.

According to this structure, the light from the sample illuminated by the image forming illuminating means is guided to the screen which can be viewed from outside the apparatus main body. Is projected on the screen, so that irregularities on the sample surface can be detected based on the shadow. Therefore, it is possible to always perform measurement with high accuracy by positioning the measurement area while avoiding irregularities such as scratches.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing the functions of a spectral colorimeter as an embodiment of a reflection characteristic measuring apparatus according to the present invention, and FIG. is there.

As shown in FIG. 2, this spectral colorimetric device
It comprises a colorimeter 1 and a personal computer (PC) 2, both of which have a predetermined signal interface (for example,
It is connected via a cable 3 conforming to the Universal Serial Bus interface). The PC 2 includes an operation unit 4 including a keyboard and a mouse, and a monitor 5,
As shown in FIG. 1, by reading and executing the measurement control program stored in the recording medium 6, measurement is performed by the control unit 7 in accordance with the procedure of the program based on an operation signal input via the operation unit 4. The operation is performed.

The measurement control program stored in the recording medium 6 has a graphical user interface. As will be described later, for example, when a switch displayed as an icon on the monitor 5 is clicked with the mouse of the operation unit 4, , The operation signal indicating that the switch is turned on is input to the control unit 7.

The colorimeter 1 includes, for example, an integrating sphere 10, an imaging illumination unit 20, and an imaging unit 3 inside a device body having a rectangular parallelepiped shape.
0, a light receiving unit 40, a control unit 50, and the like.

The integrating sphere 10 has a high diffusivity on its inner wall 11,
A hollow sphere coated with a high-reflectance white diffuse reflection paint such as magnesium oxide or barium sulfate. A light source 12 such as a xenon flash lamp is provided inside, and the light from the light source 12 is reflected multiple times on an inner wall 11. To generate diffused light. The light emitting circuit 13 supplies power to the light source 12 to cause the light source 12 to emit light.

FIG. 1 is a side sectional view of the integrating sphere 10. The integrating sphere 10 has a sample opening 14 formed at the lower end thereof.
A light-receiving opening 15 formed in a direction inclined by 8 ° with respect to a normal 14n of the opening surface of the sample opening 14, and an imaging opening 16 formed in a position close to the normal 14n. ,
And an illumination opening 17 formed in the side surface.

Immediately outside the sample opening 14 of the integrating sphere 10, a mask plate holding portion 1a for holding a mask plate 18 is provided. This mask plate holding portion 1a is for exchangeably holding a mask plate 18 having openings of different sizes.

A shielding plate is provided near the light source 12 as shown in FIG. 1 so that light from the light source 12 does not directly irradiate the sample opening 14.

The illuminating unit 20 for imaging includes an imaging light source 21 and a light emitting circuit 22. The imaging light source 21 is disposed near the outside of the illumination opening 17 of the integrating sphere 10 and has directivity (in this embodiment, for example, a white LED).
Through the illumination opening 17 from the direction inclined by a predetermined angle (for example, about 40 ° in the present embodiment) with respect to the normal 14n of the opening surface of the sample opening 14.
This is for illuminating the sample 8 arranged in the sample 4. The light emitting circuit 22 supplies power to the imaging light source 21 to cause the light source 21 to emit light.

The imaging section 30 comprises an imaging optical system 31 and an area sensor 32. The imaging optical system 31 forms an image of the sample 8 arranged in the sample opening 14 through the imaging opening 16 on the light receiving surface of the area sensor 32, and forms an image of a range including the portion of the sample opening 14. Form an image. The area sensor 32 includes a plurality of photoelectric conversion elements arranged two-dimensionally, such as a CCD two-dimensional image sensor, operates based on a control signal from the control unit 50, and operates according to the intensity of light received as an image signal. It outputs an electric signal.

The light receiving section 40 includes a light receiving optical system 41, a lens driving section 42, and a sample dispersing section 43. In the present embodiment, the light receiving optical system 41 is composed of, for example, one convex lens, and is arranged so that its optical axis coincides with a direction inclined by 8 ° with respect to a normal 14n of the opening surface of the sample opening 14. Through the light receiving opening 15, the component 15a in the direction of the optical axis out of the reflected light from the sample 8 is received and focused, and guided to the entrance opening of the spectroscopic section 43 for the sample, and is movable in the optical axis direction. It is arranged. The lens driving section 42 is composed of, for example, a motor, and moves the light receiving optical system 41 in the optical axis direction based on a control signal from the control section 50.

When the light receiving optical system 41 moves, the size of the range of the reflected light from the sample 8 guided to the sample spectroscope 43 changes. For example, the sample 8 in which the light receiving optical system 41 focuses the parallel light from the sample 8 on the light receiving surface of the sample spectral unit 43.
When it is located at a predetermined distance from, the light receiving optical system (lens)
The reflected light from a range substantially equal to the size of 41 is guided to the sample spectral unit 43. When the light receiving optical system 41 approaches the sample 8 from the predetermined distance, reflected light from a smaller range is guided to the sample spectral unit 43. That is, the size of the measurement area can be changed by moving the light receiving optical system 41 in the optical axis direction via the lens driving unit 42.

An encoder (not shown) for outputting a pulse signal at a constant interval according to the moving distance of the light receiving optical system 41 is attached to the lens driving unit 42. An optical sensor (not shown) such as a photo interrupter that outputs an ON signal as a detection signal when the light receiving optical system 41 is located at the reference position is provided. The memory of the control unit 50 stores the number of pulse signals output from the encoder when the light receiving optical system 41 moves from the reference position to a predetermined position (for example, three types of positions in the present embodiment).

After returning the light receiving optical system 41 to the reference position based on the ON signal from the optical sensor, the control unit 50 counts the number of pulse signals output from the encoder to determine the amount of movement of the light receiving optical system 41. Is detected, the light receiving optical system 41 is moved by the number of stored pulse signals via the lens driving unit 42, and the measurement area is reduced to a small size (for example, 4 mm in this embodiment) and a medium size (for example, 8 m in this embodiment).
m) and large size (for example, 25 mm in this embodiment).

The sample dispersing unit 43 focuses the light by the light receiving optical system 41, disperses the light incident through the entrance aperture for each wavelength, and outputs a reflected light spectral intensity signal corresponding to the light intensity for each wavelength. For example, it is configured by a reflective or transmissive diffraction grating and a plurality of photoelectric conversion elements that receive light dispersed by the diffraction grating for each wavelength.

In place of the integrating sphere 20, an optical fiber 44 is provided.
Are provided. This optical fiber 44
The reference light splitting unit 45 uses the diffused light in the integrating sphere 20 as the reference light.
Lead to. The reference light splitting unit 45 splits the reference light guided by the optical fiber 44 for each wavelength, and outputs a reference light spectral intensity signal corresponding to the light intensity for each wavelength. The configuration includes, for example, a reflection-type or transmission-type diffraction grating, and a plurality of photoelectric conversion elements that receive light dispersed by the diffraction grating for each wavelength.

By the integrating sphere 10 and the light receiving section 40, d /
A colorimeter 1 of eight geometries is configured.

The control unit 50 includes, for example, a CPU, three A /
It includes a D converter, a memory, an electronic circuit, and the like, and controls the operation of each unit of the colorimeter 1 based on a control signal from the control unit 7 of the PC 5 connected via the cable 3. One of the three A / D converters converts an image signal input from the area sensor 32 into a digital value of a predetermined bit (for example, 8 bits in the present embodiment). , 45 are converted into digital values of predetermined bits (for example, 16 bits in the present embodiment).

The control section 7 of the PC 5 sets the size of the measurement area, determines whether or not the opening of the mask plate matches the size of the set measurement area, and determines whether the determination result is incompatible. It has functions such as displaying a warning on the monitor 5, setting a display magnification on the monitor 5 according to the size of the set measurement area, and enhancing a captured image. These functions will be described later.

Next, the determination of the opening size of the mask plate with respect to the size of the set measurement area will be described with reference to FIG. 3A to 3C, the upper part is a side cross-sectional view near the sample opening 14 of the integrating sphere 10, the center is a plan view of the sample opening 14 from the center of the integrating sphere 10, and the lower part is a mask. 3 shows a detection signal of a mark indicating the opening size of the plate 18. In addition, hatched regions surrounded by broken lines in the center plan view show a large-sized measurement region 8a, a medium-sized measurement region 8b, and a small-sized measurement region 8c, respectively.

The mask plate 18 has a large opening 18a shown in FIG. 3A, a medium opening 18b shown in FIG.
Three types each having a small-sized opening 18c shown in FIG. 3C are prepared in advance so that the user can insert the mask plate 18 having the opening corresponding to the measurement area into the mask plate holding portion 1a. Has become.

When a large measurement area 8a is set as shown in FIG. 3A, a mask plate 18 having a large opening 18a is used.
When the medium-sized measurement area 8b is set as shown in FIG. 3B, a mask plate 18 having a medium-sized opening 18b is used, and as shown in FIG. When the measurement area 8c is set, the small opening 18c
Is used.

As shown in FIGS. 3A to 3C, the mask plate 1
8 are strip-shaped marks 18d, 1 whose lengths in the AA 'direction are set in accordance with the opening size, respectively.
8e and 18f (shown by oblique lines in the figure) are attached. In the present embodiment, the mask plate 18 is coated with, for example, black paint so as to be hardly affected by dirt, and only the marks 18d, 18e, and 18f are coated with, for example, white paint.

The control section 7 uses the image pickup signals output from the area sensor 32 to generate the marks 18d, 18e, 18f.
The light amount (for example, image data G) of the pixel row along the AA ′ line passing through
Since the / D conversion is performed, for example, binarization is performed at T = 127) to obtain a detection signal shown in the lower part of FIGS. Then, the opening size of the arranged mask plate 18 is determined based on the number L of pixels corresponding to the length of the mark. this is,
For example, preset values L1 and L2 (L1 <L2) are stored, and if L <L1, it is determined that the opening 18a is a large size. If L1 <L <L2, the opening 18b is a medium size.
And if L2 <L, it is determined that the opening 18c is small.

On the other hand, the control unit 7 can determine the size of the set measurement area based on the number of pulse signals output from the lens driving unit 42. Therefore, it is determined whether or not the size of the measurement area and the opening size of the mask plate 18 are compatible. If the determination result is inconsistent, a warning message is displayed on the monitor 5.

As described above, the size of the measurement area and the mask plate 1
It is determined whether or not the aperture size is compatible with the aperture size 8 and a warning message is displayed on the monitor 5 when the determination result is inconsistent. Exchange can be prompted. As a result, it is possible to prevent an erroneous measurement from being performed while the incompatible mask plate 18 is arranged.

Further, by encouraging the replacement of the mask plate 18 with the opening size corresponding to the size of the measurement area, an illumination area sufficiently larger than the measurement area is always obtained. The value can be obtained reliably.

The mask plate holding portion 1a is
a, 18b, and 18c are rotatably held in a turret type of plate-shaped body, and the sample plate opening 1 is rotated by rotating the mask plate.
4 may be switched.

Next, the display magnification on the monitor according to the size of the set measurement area will be described with reference to FIG.
FIGS. 4A to 4C are diagrams for explaining the display magnification of the sample image on the monitor.

The 8-bit digital image data R, G, B obtained by A / D-converting the analog image signal output from the area sensor 32 in the control unit 50 is sent to the control unit 7 of the PC 2 via the cable 3. Sent. And
As shown in FIGS. 4A to 4C, the control unit 7 displays the indices 5a, 5b, and 5c indicating the set measurement areas on the monitor 5 so as to be superimposed on the image of the sample 8.

At this time, the control section 7 calculates the average value M of the light amount levels of the image data G. When M ≧ 127, the image of the sample 8 is regarded as bright and the indices 5a, 5b, 5c are displayed in black. When <127, the image of sample 8 is assumed to be dark and index 5
a, 5b, and 5c are displayed in white. Therefore, regardless of the brightness of the image of the sample 8, the indices 5a, 5b, and 5c can be easily viewed, and thereby the sample can be easily positioned.

The display magnification of the sample image and the index on the monitor 5 is such that the set measurement area has a large size (for example, 25%).
mm), the size is doubled, the size is doubled for a medium size (for example, 8 mm), and the size is tripled for a small size (for example, 4 mm). With this, if the size of the measurement area is small,
Since the display is enlarged and displayed on the monitor 5, the positioning can be performed accurately regardless of the size of the measurement area.

Next, with reference to FIG. 5, the process of enhancing the picked-up sample image will be described. 5A to 5E are diagrams for explaining the emphasis processing.

In this embodiment, since the sample 8 is illuminated by the imaging light source 21 having directivity from a direction of about 40 ° with respect to the normal 14n of the opening surface of the sample opening 14, the sample surface is damaged. If there is unevenness due to, for example, a shadow is generated, and as shown in FIG. 5A, the unevenness portion 81 can be identified by the density of the image in the display image on the monitor 5.

Here, in the display image on the monitor 5, x and y coordinates are set with the direction in which a shadow is generated, that is, the direction including the optical axis of the illumination light from the imaging light source 21 as the x axis. For example, the image data G represented by the x and y coordinates set in this way is, as shown in FIG.
The level has dropped at the location of.

When the emphasis processing switch is turned on, the control section 7 outputs the image data R, G, B as shown in FIG.
Among them, for example, differential image data dG / dx in the x-axis direction of the image data G is obtained, and as shown in FIG. 5D, E times the differential image data dG / dx is used as the original image data. , The enhanced image data (G
+ E · dG / dx). Here, E is the degree of emphasis, for example, E = 4.

As a result, as shown in FIG. 5D, image data in which the level change is emphasized is obtained. At the time of image display, enhanced image data (R + E · dG / dx), (B +
E · dG / dx), and an image is displayed based on the enhanced image data. Accordingly, as shown in FIG. 5E, the display image on the monitor 5 on which the emphasis processing has been performed is an image in which the uneven portions 81 are emphasized as compared with FIG. 5A.

As described above, since the image data obtained by imaging by the imaging unit 30 is subjected to the emphasis processing and displayed on the monitor 5, irregularities such as scratches on the surface of the sample 8 can be emphasized and displayed. Although it is difficult to view the image with a normal image, it is possible to detect a minute flaw or the like that has an adverse effect on the accuracy of colorimetry without overlooking it.

In the present embodiment, the calculation of the differential image data dG / dx is performed for every pixel row for each pixel in the y-axis direction, but a predetermined plurality of pixels (for example, 2 to 4 pixels)
You may thin out each time.

Next, the operation of the colorimeter 1 configured as described above will be described. When the light source 12 is turned on based on a control signal input from the control unit 7 of the PC 5 to the light emitting circuit 13 via the control unit 50, the sample 8 is diffusely illuminated.
Then, of the reflected light from the sample 8, the sample opening 14
The component 15a in the direction inclined by 8 ° with respect to the normal 14n of the aperture surface of the light incident on the light receiving optical system 41, is focused by the light receiving optical system 41 and is incident on the sample spectral unit 43, and the reflected light spectral intensity signal is It is sent to the control unit 7 of the PC 2 via the control unit 50.

On the other hand, when the light source 12 is turned on, the diffused light in the integrating sphere 10 enters the incident end of the optical fiber 44,
The light is guided by the optical fiber 44, enters the reference spectroscopy unit 45 as reference light, and the reference light spectral intensity signal is sent to the control unit 7 of the PC 2 via the control unit 50.

The spectral reflectance of the sample 8 is obtained by the control unit 7 based on the reflected light spectral intensity signal and the reference light spectral intensity signal simultaneously obtained by turning on the light source 12 and displayed on the monitor 5.

Next, a description will be given of a calibration generally performed conventionally in a colorimeter. First, dark calibration will be described. Normally, in a colorimeter, since there is stray light other than the dark current of the photoelectric conversion element and the light to be measured from the sample, even if the reflectance of the sample having a reflectance of 0% is measured, a minute level offset is generated. Output is not 0%. The stray light includes, for example, light from a light source for illuminating the sample that directly reaches the photoelectric conversion element, and light scattered by an optical system such as a lens.

In order to remove the extra output due to the dark current, stray light, or the like, dark calibration is performed before or periodically measuring the reflection characteristics, and the result is used as a dark calibration value by the control unit 50.
In the memory. Then, when performing white calibration and sample measurement, the offset dark calibration value is subtracted from the spectral intensity signals output from the spectral units 43 and 45.

In the dark calibration, the sample opening 1 of the integrating sphere 10 was used.
4 is provided with an optical trap. The light trap has a box shape with an opening, and the inner wall is coated with black paint.
When the diffused light from 0 enters, the light intensity of the component incident on the sample spectroscopy unit 43 among the reflected light becomes a sufficiently low value.

When the dark calibration switch is clicked with a mouse on the icons displayed on the monitor 5 of the PC 2 in a state where the optical trap is arranged in the sample opening 14 of the integrating sphere 10, the light source 12 emits light, Beam splitting unit 4
3, 45, the dark spectral intensity signal I ₁ (λ) and the reference light spectral intensity signal I ₂ (λ) are output, and the control unit 7 calculates the dark calibration value d (λ) as follows: d (λ) = I ₁ (λ ) / I ₂ (λ), and the calculated dark calibration value d (λ)
Is stored in the memory of the control unit 50.

Next, white calibration will be described. The white calibration is for calibrating the reflectance of the integrating sphere 10 and is performed using a calibration white plate. The calibration white plate has a known spectral reflectance (for example, W (λ) in the present embodiment), for example, a white surface, for example, “JIS Z 8722 Measuring method of color-reflection and transmission object color Section 4.3.4. "Is a plate having a white surface.

Then, with the calibration white plate placed in the sample opening 14 of the integrating sphere 10, for example, the monitor 5 of the PC 2
When the white calibration switch is clicked with the mouse among the icons displayed in the light source 12, the light source 12 emits light and the spectral unit 4
The white spectral intensity signal I ₁ (λ) and the reference light spectral intensity signal I ₂ (λ) are output from 3, 45, and the white calibration coefficient k (λ) is obtained by the control unit 50 as follows: k (λ) = W (λ) / [I ₁ (λ) / I ₂ (λ) −d (λ)], and the calculated white calibration coefficient k (λ)
Is stored in the memory of the control unit 50.

Such a calibration operation may be performed, for example, every predetermined number of measurements or every predetermined time.
By performing the dark calibration, even if the amount of stray light changes due to a temporal change or disturbance of the light source 12, the influence due to the change can be properly removed, thereby preventing an error from occurring. Further, by performing the white calibration, even when the sensitivity of the spectroscopic units 43 and 45 and the reflection characteristics of the inner wall 11 of the integrating sphere 10 change due to a change over time or an environmental change, the influence of the change can be appropriately removed. This can prevent an error from occurring.

In this embodiment, by controlling the position of the light receiving optical system 41, the size of the measurement area can be increased.
Since it is possible to set three types of medium size and small size, the measurement area is set to each size and the corresponding aperture 18 is set.
Dark calibration and white calibration are performed with the mask plate 18 provided with the mask plates 18a, 18b, and 18c held in the mask plate holding unit 1a, and the calibration results are stored in the memory of the control unit 50, respectively.

Next, a measurement procedure in this spectrocolorimeter will be described with reference to FIGS. FIG. 6 is a flowchart of the main routine of the measurement procedure.

When the measurement control program stored in the recording medium 6 is read by the control unit 7 of the PC 2 and the execution of the program is started, first, a measurement area is set (# 100). For this setting, for example, icons representing the large-size measurement area, the medium-size measurement area, and the small-size measurement area are displayed on the monitor 5 to urge the user to make a setting. Then, the operation is performed by moving the light receiving optical system 41 from the reference position via the lens driving unit 42 to a position corresponding to the measurement area represented by the icon.

Next, mask confirmation processing is performed (# 1).
05). FIG. 7 is a flowchart of a mask confirmation processing subroutine.

In FIG. 7, first, the imaging light source 21 is turned on, the area sensor 32 is turned on, and the imaging operation is started (# 200). Subsequently, the light amount of a pixel row (line AA 'shown in FIG. 3) passing through the marks 18d, 18e, and 18f provided on the mask plate 18 is binarized by a predetermined threshold T to obtain a detection signal ( (# 205), the number L of pixels corresponding to the length of the mark is calculated (# 210), and the number L of pixels is calculated.
Is compared with a threshold (# 215).

If L <L1, it is determined that the opening 18a has a large size (# 220). If L1 <L <L2, it is determined that the opening 18b has a medium size (# 225).
If <L, it is determined that the opening 18c has a small size (# 2).
30).

Next, the size of the set measurement area is determined by checking the position of the light receiving optical system 41 (# 235), and whether or not the size of the measurement area matches the opening size of the mask plate is determined. Is determined (# 240).

If it is not suitable (N in # 240)
O), a warning message such as "Please change to the correct mask plate" is displayed on the monitor 5 (# 245),
Returning to the first step, # 200, this subroutine is continued.

On the other hand, if the size of the measurement area matches the opening size of the mask plate (YES in # 240), if a warning is displayed on monitor 5, this is deleted (# 2).
50) After the light source 21 for imaging is turned off and the area sensor 32 is turned off (# 255), this subroutine is terminated and the process returns to the main routine.

Returning to FIG. 6, following # 105, the monitor 5
It is determined whether or not the “end switch” icon has been turned on by clicking the mouse (# 110), and when turned on (YES in # 110), the measurement control program ends.

On the other hand, if the "end switch" is not turned on (NO in # 110), it is then determined whether or not the "finder switch" icon on the monitor 5 has been turned on by clicking the mouse (# 115). If not turned on (NO in # 115), the routine proceeds to # 140, and if the "finder switch" is turned on (YE in # 115).
S) Then, the imaging light source 21 is turned on, the area sensor 32 is turned on, and the imaging operation is started (# 12).
0).

Next, it is determined whether or not the "highlight switch" icon has been turned on by clicking the mouse (# 125). If it has not been turned on (N in # 125)
O), proceeding to # 135, if the "highlight display switch" is turned on (YES in # 125), the emphasis processing is performed (# 130).

FIG. 8 is a flowchart of the emphasis processing subroutine. First, the original image data G is differentiated in the x-axis direction to obtain differential image data dG / dx (# 300).
The obtained differential image data dG / dx is multiplied by a predetermined emphasis degree E, and then added to each of the original image data R, G, and B to obtain enhanced image data (G + EdG / dx), (R + EdG / Dx),
(B + E · dG / dx) is obtained (# 305). This process
This is performed for all pixels, and the process returns to the main routine.

Returning to FIG. 6, following # 130, display processing is performed (# 135). FIG. 9 is a flowchart of the display processing subroutine.

First, the average value M of the light amount levels of the original image data G is determined (# 400), and this value M is compared with 127 (# 405). If M ≧ 127 (YE is determined in # 405)
S), a black index corresponding to the measured diameter is inserted into the image (#
410) On the other hand, when M <127 (N in # 405)
O), a white index corresponding to the measured diameter is inserted into the image (# 415), and the image is displayed on the monitor 5 (# 42).
0), and return to the main routine.

Returning to FIG. 6, following # 135, the monitor 5
It is determined whether the "measurement switch" icon has been turned on by clicking the mouse (# 140), and if not turned on (NO in # 140), the process returns to # 110.

On the other hand, when the "measurement switch" is turned on (YES in # 140), the light source 21 for imaging is turned off and the area sensor 32 is turned off (# 145).
Next, the light source 12 is turned on to perform the measurement processing of the sample 8 (# 150), and the process returns to # 110.

As described above, according to the present embodiment, the imaging light source 21 composed of a light source having directivity allows the sample light source 21 to be tilted from the direction inclined by a predetermined angle with respect to the normal 14n of the opening surface of the sample opening 14. Since the sample 8 arranged in the opening 14 is illuminated, a shadow is formed if irregularities such as scratches are present on the sample surface. Therefore, the area sensor 32 passes through the imaging opening 16 formed near the normal 14n. When the image is taken, the unevenness can be easily identified by the density of the taken sample image.

Further, according to the present embodiment, since the control section 7 performs the emphasizing process on the sample image picked up by the area sensor 32, the difference in shading of the image can be increased. Irregularities on the sample surface can be reliably identified. Therefore, the measurement can be performed while avoiding the unevenness of the sample surface, whereby high-precision measurement can be reliably performed.

Further, according to the present embodiment, since the index indicating the measurement area is displayed on the monitor 5, the sample 8 can be easily positioned with respect to the opening of the mask plate 18.

Further, according to the present embodiment, the sample image and the index indicating the measurement area are enlarged three times when the measurement area is small, and enlarged twice when the measurement area is medium. , The mask plate 18
The positioning of the sample 8 with respect to the opening can be more reliably performed.

Further, according to the present embodiment, it is determined whether or not the mask plate 18 held by the mask plate holding portion 1a conforms to the selected measurement area. Since the warning is displayed, it is possible to prevent a meaningless measurement from being performed on a mask plate different from the dark calibration or the white calibration.

The present invention is not limited to the above-described embodiment, but may employ the following modifications.

(1) In the above embodiment, the spectroscopic colorimeter is used. However, the present invention is not limited to this. It may be something. According to this aspect, the reflectance of the sample at a specific wavelength can be measured.

(2) In the above embodiment, the personal computer 2 is provided. However, the present invention is not limited to this, and a stand-alone spectral colorimetric device having a display unit such as an LCD may be used.

(3) In the above embodiment, the light receiving optical system 41
Is constituted by one lens, and is disposed so as to be movable in the optical axis direction, but is not limited to this. For example, the light receiving optical system 41 may be configured by a zoom lens including a plurality of lenses. A plurality of lenses having different focal lengths may be configured to be switchable by the turret.

(4) In the above embodiment, the sample 8 is imaged by the imaging unit 30, but the invention is not limited to this. FIG.
Is a configuration diagram showing a modified embodiment including a finder optical system and a screen in place of the image pickup unit, and the same components as those in FIG. 1 and the conventional FIG. 12 are denoted by the same reference numerals.

Also in this embodiment, the sample light source 21 having directivity is used to arrange the sample placed in the sample opening 14 from the direction inclined by a predetermined angle with respect to the normal 14n of the opening surface of the sample opening 14. 8 is illuminated, and if irregularities such as scratches are present on the specimen surface, a shadow is produced. Therefore, the irregularities can be identified by the shadow of the specimen image projected on the screen 113. Measurement can be performed while avoiding surface irregularities.

In this embodiment, since there is no imaging unit,
As shown in FIG. 11, by separately providing a means for identifying the opening size of the mask plate 18, it is possible to judge the suitability between the size of the measurement area and the opening size of the mask plate.

As shown in FIGS. 11A to 11C, marks 19a and 19b are provided at predetermined positions on the mask plate 18. Then, as shown in FIG. 11A, white marks 19a and 19b are provided in the large-sized opening 18a.
As shown in FIG. 11B, a black mark 19a and a white mark 19b are provided in the middle size opening 18b.
As shown in (c), black marks 19a and 19b are provided in the small-sized opening 18c. Further, FIG.
As shown in the figure, reflective optical sensors 51a and 51b are provided so as to face the marks 19a and 19b, respectively.

In this configuration, the reflection type optical sensor 51
a, 51b to control the level of the received light signal
0, it is possible to detect the opening size of the mask plate 18 held by the mask plate holding portion 1a, and thereby, as in the above embodiment, the size of the measurement area and the mask It can be determined whether or not the size of the plate matches the opening size.

(5) Embodiments and Modifications (4)
1 and 10, a lid member 19 for closing the illumination opening 17 is provided as shown by a broken line in FIG.
When the measurement is performed, the illumination opening 17 may be closed. According to this embodiment, it is possible to prevent the diffusion of the illumination light from being lowered due to the provision of the illumination opening 17.

[0110]

As described above, according to the first aspect of the present invention, the sample is illuminated from the specific direction by the image forming illumination means. Thus, by displaying the image of the illuminated sample on the display means, it is possible to detect irregularities on the sample surface. Therefore, by positioning the measurement area while avoiding irregularities such as scratches, the measurement can always be performed with high accuracy.

According to the second aspect of the present invention, the sample illuminated by the image forming illumination means is electrically imaged, and the image of the sample is electrically displayed. Irregularities on the sample surface can be easily detected.

According to the third aspect of the present invention, since the process of emphasizing the density of the picked-up sample image is performed and displayed on the display means, the density of the shadow caused by the unevenness on the sample surface is emphasized. That is, irregularities on the sample surface can be detected more reliably.

According to the fourth aspect of the present invention, the size of the measurement area is determined by detecting the driving state of the light receiving optical system, and an index corresponding to the determined size of the measurement area is also displayed on the display means. With this configuration, the measurement area whose size is changed can be clearly distinguished, whereby the sample can be accurately positioned.

According to the fifth aspect of the present invention, since the sample image and the index are displayed together on the display means at a magnification corresponding to the size of the measurement area, the sample image and the index can be easily viewed. Become.

According to the sixth aspect of the present invention, the mask plate provided with the opening for determining the illumination area on the sample from the illumination means for measurement is exchangeably held, and the size of the measurement area determined by the light receiving optical system is changed. On the other hand, whether or not the size of the illumination area determined by the held aperture of the mask plate is appropriate is determined based on the driving state of the light receiving optical system and the imaging information of the aperture of the mask plate by the imaging means. Since the determination is made based on the information, it is possible to appropriately determine whether or not the data is compatible.

According to the seventh aspect of the invention, when it is determined that the size of the illumination area is incompatible with the size of the measurement area, a warning to that effect is issued. It is possible to prevent a measurement that is not suitable for visual observation from being performed in a state where the size of the illumination area is not sufficiently large with respect to the size.

According to the invention of claim 8, since the light from the sample illuminated by the image forming illumination means is guided to a screen which can be viewed from outside the apparatus main body, the sample illuminated from a specific direction. Since the shadow generated by the presence of the unevenness on the surface is projected on the screen, the unevenness of the sample surface can be detected by displaying the image of the illuminated sample on the screen. Therefore, by positioning the measurement area while avoiding irregularities such as scratches, the measurement can always be performed with high accuracy.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating functions of a spectrocolorimeter as one embodiment of a reflection characteristic measuring apparatus according to the present invention.

FIG. 2 is a diagram showing a device configuration of the spectral colorimetric device.

3 (a) to 3 (c), the upper part is a side sectional view near the sample opening of the integrating sphere, the center is a plan view of the sample opening from the center of the integrating sphere, and the lower part is the mask plate. 3 shows a detection signal of a mark indicating an opening size.

FIGS. 4A to 4C are diagrams for explaining a display magnification of a sample image on a monitor.

FIGS. 5A to 5E are diagrams illustrating an emphasis process.

FIG. 6 is a flowchart of a main routine of a measurement procedure.

FIG. 7 is a flowchart of a mask confirmation processing subroutine.

FIG. 8 is a flowchart of an emphasis processing subroutine.

FIG. 9 is a flowchart of a display processing subroutine.

FIG. 10 is a configuration diagram illustrating a modified example including a finder optical system and a screen instead of an imaging unit.

FIGS. 11A to 11D are diagrams for explaining means for identifying the opening size of the mask plate.

FIG. 12 is a diagram illustrating a conventional colorimeter including a finder optical system.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Colorimeter 1a Mask board holding part (holding means) 2 Personal computer (PC) 5 Monitor (display means) 7 Control part (image processing means, display control means, determination means,
Warning means) 10 integrating sphere (illumination means for measurement) 12 light source 18 mask plate 20 illumination part for imaging 21 illumination light source (illumination means for image formation) 30 imaging part (display means) 32 area sensor 40 light receiving part (light receiving means) 41 light receiving optical system 42 lens driving unit (optical system driving unit) 43 sample dispersing unit 50 control unit 110 finder optical system 113 screen (display unit)

 ──────────────────────────────────────────────────続 き Continuing on the front page F term (reference) 2G020 AA08 CC02 DA12 DA13 DA22 DA23 DA36 2G059 AA02 BB08 EE02 EE12 EE13 FF01 GG03 HH02 JJ05 JJ16 JJ17 KK04 LL04 MM01 MM03 MM09 MM10 PP02 2G035 BB04 BD06 DA15

Claims (8)

[Claims] An illumination device for measurement for illuminating a sample from multiple directions for measurement, a light reflected from the sample illuminated by the illumination device for measurement is received, and a light reception signal corresponding to the light intensity is output. A reflection characteristic measuring device for determining a reflection characteristic of a sample based on a light receiving signal output from the light receiving unit, wherein an image forming illumination unit illuminates the sample from a specific direction for image formation; Display means for displaying an image of the sample illuminated by the image forming illumination means. 2. The reflection characteristic measuring apparatus according to claim 1, further comprising: an imaging unit for electrically imaging the sample illuminated by the image forming illumination unit, wherein the display unit is imaged by the imaging unit. A reflection characteristic measuring device for electrically displaying a sample image. 3. The reflection characteristic measuring apparatus according to claim 2, further comprising an image processing means for performing a process for emphasizing the shading of the sample image picked up by said image pickup means and displaying it on said display means. Reflection characteristic measuring device. 4. A light-receiving optical system according to claim 2, wherein the light reflected from the measurement area on the sample is guided to the light-receiving means so that the size of the measurement area can be changed. Optical system driving means for changing the size of the measurement area by driving the light receiving optical system; and detecting the driving state of the light receiving optical system to determine the size of the measurement area, and determining the size of the determined measurement area. And a display control means for displaying an index corresponding to the index on the display means. 5. The reflection characteristic measuring apparatus according to claim 4, wherein the display control means displays the sample image and the index on the display means at a magnification corresponding to the size of the measurement area. A reflection characteristic measuring device, characterized in that: 6. The reflection characteristic measuring apparatus according to claim 4, wherein the masking plate having an opening for determining an illumination area on the sample from the illumination unit for measurement is exchangeably held. Determining means for determining whether or not the size of the illumination area determined by the opening of the mask plate held by the holding means matches the size of the measurement area determined by the light receiving optical system. Wherein the image forming illumination means illuminates at least an area including an opening of the mask plate held by the holding means, and the imaging means comprises at least an opening of the mask plate held by the holding means. Wherein the determination unit performs the determination based on a driving state of the light receiving optical system and imaging information of the opening of the mask plate by the imaging unit. Reflection characteristic measuring apparatus according to claim. 7. The reflection characteristic measuring device according to claim 6, wherein when the determination unit determines that the size of the illumination area is incompatible with the size of the measurement area, a warning to that effect is issued. A reflection characteristic measuring device comprising a warning means for performing the warning. 8. The reflection characteristic measuring apparatus according to claim 1, further comprising a finder optical system for guiding light from the sample illuminated by the image forming illumination means to the display means, wherein the display means is provided outside the apparatus main body. A reflection characteristic measuring device comprising a screen visible from above.