JP2002264026A - Abrasive cloth - Google Patents

Abrasive cloth

Info

Publication number
JP2002264026A
JP2002264026A JP2001066565A JP2001066565A JP2002264026A JP 2002264026 A JP2002264026 A JP 2002264026A JP 2001066565 A JP2001066565 A JP 2001066565A JP 2001066565 A JP2001066565 A JP 2001066565A JP 2002264026 A JP2002264026 A JP 2002264026A
Authority
JP
Japan
Prior art keywords
aggregate
polishing cloth
polishing
base material
abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001066565A
Other languages
Japanese (ja)
Inventor
Rokuro Yuki
六郎 幸
Mitsunobu Imoto
光信 井本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIHON KENSHI CO Ltd
Original Assignee
NIHON KENSHI CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIHON KENSHI CO Ltd filed Critical NIHON KENSHI CO Ltd
Priority to JP2001066565A priority Critical patent/JP2002264026A/en
Publication of JP2002264026A publication Critical patent/JP2002264026A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an abrasive product having ductile resistance and durability and not occurring clogging of holes irrespective of types of base plates having different thickness. SOLUTION: Block assemblies 2 of abrasive including glue are fixed on a surface of a base material. A clearance between the assemblies 2 next to each other is 1-4 mm. The assembly 2 has a size of 4-200 nm<2> and height dimension of 0.5-5 mm. Arranging angles θ of the assemblies 2 are the same inclination within 5-60 deg.. A hook-and-loop fastener is attached to a base material rear face 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はプリント配線基板な
どのバイブレーション研磨に有効使用される研磨布に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing cloth effectively used for vibration polishing of a printed circuit board or the like.

【0002】[0002]

【従来の技術】プリント配線基板の穴あけやメッキ後で
は表面にバリやメッキのこぶ、或いは突起などが形成さ
れることがあり、これを取除くべくベルト方式、ホイー
ル方式或いはバイブレーション方式などで研磨して取除
くことが行われる。特に薄物基板の場合、基板の伸び或
いは反りが発生し易く、この伸びや反り対策の研磨方式
としてはバイブレーション方式が有効とされるものとな
っている。
2. Description of the Related Art After drilling or plating a printed wiring board, burrs, plating bumps, or projections may be formed on the surface. To remove these, a belt method, a wheel method, a vibration method, or the like is used. Removal is performed. In particular, in the case of a thin substrate, extension or warpage of the substrate is apt to occur, and a vibration method is effective as a polishing method for measures against the elongation or warpage.

【0003】[0003]

【発明が解決しようとする課題】上記バイブレーション
方式には通常の研磨布、不織布研磨材が使用されるもの
となっているが、耐久性、耐延性、防穴詰まり、面出し
等々で夫々れ一長一短がある。静電砂付きの研磨布は基
材上に接着剤を介して研磨材を静電砂付にて一層に固着
させたもので、研磨性能面で評価できるものの研磨材層
が単層であり、且つ切り粉の排除がスムースに行え得な
いため、耐久性に欠ける問題点があり耐延性でも課題が
あり、且つアニマルスクラッチが発生することもある。
また、不織布にて研磨材を接着剤により固着させた不織
布研磨材は、その構造上多層構造体故に、耐久性に優位
性があるものの、切れ味の問題及び切れ止みによる研磨
力回復のためにドレッシングを屡々必要とするほか、研
磨中に発生するバフカスによる穴詰まり問題が発生し、
研磨対象PWB(プリント配線基板)に限定される問題
を抱えている。本発明はバイブレーション研磨方式に於
いて、厚みの異なる基板の種類に関係なく、耐延性、耐
久性があり、且つ穴詰まりの発生を生じさせない研磨製
品を提供するものである。
In the above-mentioned vibration method, ordinary polishing cloths and non-woven cloth abrasives are used. There is. Abrasive cloth with electrostatic sand is one in which the abrasive is fixed on the substrate with an electrostatic sand through an adhesive, and the abrasive layer can be evaluated in terms of polishing performance, but the abrasive layer is a single layer, In addition, since chips cannot be removed smoothly, there is a problem that durability is lacking, there is a problem with ductility, and animal scratches may occur.
The nonwoven fabric abrasive, in which the abrasive is fixed with an adhesive by a nonwoven fabric, has superiority in durability due to its multilayer structure, but it is dressed for the problem of sharpness and the recovery of the polishing power due to the cut end. In addition to the above, often there is a problem of clogging due to buffing generated during polishing,
There is a problem limited to the PWB (printed wiring board) to be polished. An object of the present invention is to provide a polishing product which has ductility and durability and does not cause clogging of holes in a vibration polishing method, regardless of the types of substrates having different thicknesses.

【0004】[0004]

【課題を解決するための手段】本発明の研磨布は基材の
表面に接着剤を含む研磨材のブロック状集合体を固着さ
せたものとなし、集合体と集合体の隣接する隙間間隔を
1mm〜4mmとし、且つ集合体の一つの大きさを4m
〜200mm、高さ寸法を0.5mm〜5mmと
するほか、集合体の配列角度θを5゜〜60゜の範囲に
於ける同一傾斜角度となし、また基材裏面に面ファスナ
ーを装着させたことを特徴とする。このさい、集合体の
全平面積と基材平面積との比率を44%〜86%とする
ことが好ましく、研磨材としてはアルミナ、炭化珪素、
ダイヤモンド及びその混合物とするのであり、また集合
体の形状には角型、菱型、丸型、楕円型などとなすので
ある。なお、集合体の接着剤としてはフェノール樹脂、
エポキシ樹脂及びその混合樹脂の使用が好適である。
A polishing cloth according to the present invention comprises a substrate having a block-shaped aggregate of an abrasive containing an adhesive fixed to a surface of a base material, and a gap between adjacent aggregates between the aggregates. 1 mm to 4 mm, and one size of the aggregate is 4 m
m 2 to 200 mm 2 , the height dimension is 0.5 mm to 5 mm, the arrangement angle θ of the assembly is the same inclination angle in the range of 5 ° to 60 °, and a surface fastener is provided on the back surface of the base material. It is characterized by being attached. At this time, the ratio of the total plane area of the aggregate to the plane area of the base material is preferably set to 44% to 86%, and alumina, silicon carbide,
Diamond and a mixture thereof are used, and the shape of the aggregate is a square, a rhombus, a round, an ellipse, or the like. In addition, as the adhesive of the aggregate, phenol resin,
The use of epoxy resins and their mixed resins is preferred.

【0005】[0005]

【発明の実施の形態】図1は本発明に係る研磨布の斜視
図、図2は図1のX−X線断面図である。1は綿織物、
合成織物、或いはこれらの混紡織物、若しくはフィルム
などの基材であり、該基材1上に対し接着剤を含む研磨
材のブロック状集合体2を固着させたものとなす。
FIG. 1 is a perspective view of a polishing cloth according to the present invention, and FIG. 2 is a sectional view taken along line XX of FIG. 1 is cotton fabric,
A base material such as a synthetic woven fabric, a blended woven fabric, or a film thereof, and a block-shaped aggregate 2 of an abrasive containing an adhesive is fixed on the base material 1.

【0006】このさい、上記ブロック状集合体2は1つ
の平面視大きさを4mm〜200mmとなすのであ
り、且つその肉厚高さ寸法は0.5mm〜5mmとなす
のであり、また隣り合う集合体2,2の隙間間隔sは1
mm〜4mmとなすのである。なお、上記集合体2,2
・・・は一定に定められた形態の群体に形成されるよう
になされるのであり、即ち本発明では傾斜角度θを5゜
〜60゜となした集合体に形成したものである。
[0006] This again, the block-like aggregate 2 is than form one planar view size and 4 mm 2 to 200 mm 2, and its thickness height dimensions are of eggplant with 0.5 mm to 5 mm, or next The gap s between the matching aggregates 2 and 2 is 1
mm to 4 mm. The above-mentioned aggregates 2, 2
.. Are formed in a group having a fixed form, that is, in the present invention, they are formed into an aggregate having an inclination angle θ of 5 ° to 60 °.

【0007】ここに集合体2,2・・・の構成は、エポ
キシ樹脂、フェノール樹脂、或いは両者の混合物とアル
ミナ、炭化珪素、ダイヤモンド及び又はその混合物など
の研磨材と、炭酸カルシウムや珪酸塩などの無機粉末の
混合物からなるものであって、角型、菱型、丸型、楕円
型などの形状となすと共に、各集合体2,2・・・の一
つの大きさは4mm〜200mmで、且つその肉厚
高さtを0.5mm〜5mmとなすのである。
Here, the aggregates 2, 2,... Are composed of an epoxy resin, a phenol resin, or a mixture of both, an abrasive such as alumina, silicon carbide, diamond and / or a mixture thereof, calcium carbonate, silicate, and the like. be made of a mixture of the inorganic powder, square, rhombic, round, with formed shape, such as elliptical, one size of each assembly 2, 2 is 4 mm 2 to 200 mm 2 And the thickness t is 0.5 mm to 5 mm.

【0008】而して、上記構成の基材1の裏面側には、
面ファスナーnを形成してなる下基材3を、ウレタン樹
脂を使用して一体に固着させたものとなしてある。ここ
に、上記面ファスナーnの形成は、研磨布の張替え脱着
を容易ならしめる上で著効を奏せしめるのである。
[0008] Thus, on the back side of the substrate 1 having the above structure,
The lower substrate 3 formed with the surface fastener n is integrally fixed using a urethane resin. Here, the formation of the hook-and-loop fastener n has a remarkable effect in facilitating the replacement and removal of the polishing pad.

【0009】本考案品ではバフカスの原因となる不織布
を使用することなく、基材上に接着剤を含む研磨材層の
集合体を固着させることにより、研磨材層を単層から多
層となすのである。一方、隣り合う集合体2と集合体2
との隙間間隔sが1mm未満であると、研磨作業中に於
ける切り粉の排出がスムースに行えないのであり、これ
に対し隙間間隔を広げすぎると集合体の消耗が速くな
り、この点に関し本発明者らの数多の実験結果から4m
mまでとしたものが、好成績を得られることが解った。
他方、切れ味を出す為には単位面積当たりの荷重を大き
くするために集合体の平面積を小ならしめれば良く、こ
れに対し研磨持続性を良好ならしめるには集合体の平面
積を大ならしめると良いが、本発明者らの数多の実験結
果から4mm〜200mmで且つその高さ寸法を
0.5mm〜5mmの範囲に設定したものが好成績を得
られることが解った。
In the present invention, the abrasive layer is formed from a single layer to a multi-layer by fixing the aggregate of the abrasive layer containing the adhesive on the substrate without using the nonwoven fabric which causes buffing. is there. On the other hand, adjacent aggregate 2 and aggregate 2
If the gap s is less than 1 mm, the chips cannot be discharged smoothly during the polishing operation. On the other hand, if the gap is too wide, the aggregates are consumed more quickly. 4m from our experimental results
It was understood that good results could be obtained for those up to m.
On the other hand, in order to obtain sharpness, the flat area of the aggregate should be reduced in order to increase the load per unit area. On the other hand, in order to improve polishing sustainability, the flat area of the aggregate should be increased. not occupy the good, it was found that and from many experimental results by the present inventors in 4 mm 2 to 200 mm 2 that sets the height dimension in the range of 0.5mm~5mm obtain a good result.

【0010】なお、上記の如き集合体に形成したさい、
各集合体を一定に定められた角度を備えた配列にしない
と、被切削材に対する当たりムラを生じさせる問題があ
るのであり、本発明者らの数多の実験結果から傾斜角θ
を5゜〜60゜の範囲となしたものが、好成績を得られ
ることが解った。
In forming the above-mentioned aggregate,
If each of the assemblies is not arranged with a fixed angle, there is a problem of causing uneven contact with the cut material.
It was found that good results were obtained when the angle was within the range of 5 to 60 degrees.

【0011】[0011]

【実施例】エポキシ樹脂100重量%と炭化珪素の粒度
600を85重量%、及び珪酸塩8重量%の混合物を作
成し、これを集合体の大きさ寸法3.5mm角のブロッ
ク状集合体となし、集合体と隣接する集合体との隙間間
隔sは1.5mm、肉厚高さtは1mm、また各集合体
の傾斜角度θを水平より右上がり方向へ15゜の角度と
なるようにして、ポリエステルと綿混紡基材上に成型接
着した後、最終硬化温度130℃で2時間硬化させた。
硬化後、所定のサイズ(例100mm*710mm)に
成る様裁断する。これと裏面に雌型ファスナーを形成し
た下基材の起毛部分でない面にウレタン樹脂を塗布し、
両者を加圧接着させた。上記製品をバイブレーション方
式研磨機のパッド面上に雄型面ファスナーと係合装着さ
せて使用した。研磨布の張替え脱着が容易にでき、研磨
作用効果は次の通りであった。初めにペレット表面の軽
ドレッシング調整を行った以降は、中間の研磨面ドレッ
シングを一切行う事無しに、数千枚の基板研磨加工(プ
リント基板のバリ取り)を以下の通り実現できた。 (a) 穴辺の損傷無しに初期→中期→後期の加工表面
に異差無く均等整面状態を可能にした。 (b) 50μm/500巾(0.25mm厚基板)以
下の伸びに押さえる事を可能にした。 (c) 穴詰まり問題の解消を可能にした。
EXAMPLE A mixture of 100% by weight of an epoxy resin, 85% by weight of a particle size 600 of silicon carbide and 8% by weight of a silicate was prepared, and this was used as a block-like aggregate having a size of 3.5 mm square. None, the gap s between an assembly and an adjacent assembly is 1.5 mm, the thickness t is 1 mm, and the inclination angle θ of each assembly is 15 ° from the horizontal to the right. Then, after being molded and adhered on a polyester / cotton blend substrate, it was cured at a final curing temperature of 130 ° C. for 2 hours.
After curing, it is cut into a predetermined size (eg, 100 mm * 710 mm). Apply urethane resin to the non-brushed surface of the lower substrate with a female fastener formed on the back and this,
Both were pressure-bonded. The above product was used by engaging it with a male surface fastener on the pad surface of a vibration type polishing machine. The polishing cloth could be easily reattached and detached, and the polishing effect was as follows. After the light dressing adjustment of the pellet surface was performed first, thousands of substrates could be polished (deburring of printed circuit boards) as described below without any intermediate polishing surface dressing. (A) It is possible to achieve a uniform surface state without any difference in the initial → middle → late processing surfaces without damage to the hole side. (B) It is possible to suppress elongation of 50 μm / 500 width (0.25 mm thick substrate) or less. (C) The problem of hole clogging can be solved.

【0012】[0012]

【発明の効果】本発明は以上の通り構成するものであっ
て、即ち研磨布を特殊な構成のブロック状集合体となし
たものであり、且つ研磨機のパット面に対する張替え脱
着などが適宜研磨条件などに対応して臨機応変且つ簡便
に変更して遂行できるものとなる。また、ブロック状集
合体の研磨面は穴周りの損傷なしに研磨初期、中期、後
期を一貫して何らの差異のないよう基板加工表面の均等
整面状態を可能にできる。而して、0.25mm厚基板
であっても研磨時に生ずる伸びを500幅で50μm以
下に押さえることを可能にすることができた。なお、従
来の不織布研磨材で工程中に生じていたバフカス排除や
穴詰まり問題、或いはアニマルスクラッチ発生などの問
題解決を同時に可能となすほか、耐延性向上に寄与せし
めることのできた。
The present invention is constituted as described above, that is, a polishing cloth is formed into a block-shaped aggregate having a special structure, and the polishing cloth is appropriately polished and detached from the pad surface of the polishing machine. It can be performed flexibly and simply according to conditions and the like. In addition, the polished surface of the block-shaped assembly can uniformly form the substrate processing surface without any difference in the initial, middle, and late stages of polishing without any damage around the holes. Thus, even with a substrate having a thickness of 0.25 mm, the elongation caused during polishing can be suppressed to 50 μm or less with a width of 500. In addition, it was possible not only to eliminate the buff residue and to solve the problem of clogging of holes or the occurrence of animal scratches, which had occurred during the process with the conventional nonwoven fabric polishing material, but also to improve the ductility.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る研磨布の斜視図である。FIG. 1 is a perspective view of a polishing cloth according to the present invention.

【図2】図1のX−X線断面図である。FIG. 2 is a sectional view taken along line XX of FIG.

【符号の説明】[Explanation of symbols]

1 基材 2 ブロック状集合体 3 下基材 DESCRIPTION OF SYMBOLS 1 Base material 2 Block-shaped aggregate 3 Lower base material

フロントページの続き Fターム(参考) 3C058 AA09 CA01 CB02 CB03 CB07 CB10 3C063 AA03 AB07 BA03 BA08 BA24 BB02 BB03 BB04 BC03 BG08 BG14 BG21 BH12 CC02 CC19 FF08 FF20 FF23 Continued on the front page F term (reference) 3C058 AA09 CA01 CB02 CB03 CB07 CB10 3C063 AA03 AB07 BA03 BA08 BA24 BB02 BB03 BB04 BC03 BG08 BG14 BG21 BH12 CC02 CC19 FF08 FF20 FF23

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 基材の表面に接着剤を含む研磨材のブロ
ック状集合体を固着させたものとなし、集合体と集合体
の隣接する隙間間隔を1mm〜4mmとし、且つ集合体
の一つの大きさを4mm〜200mm、高さ寸法を
0.5mm〜5mmとするほか、集合体の配列角度θを
5゜〜60゜の範囲に於ける同一傾斜角度となし、また
基材裏面に面ファスナーを装着させたことを特徴とする
研磨布。
1. A block-shaped aggregate of an abrasive containing an adhesive is fixed to the surface of a base material, the gap between adjacent aggregates is 1 mm to 4 mm, and one of the aggregates One size of 4 mm 2 to 200 mm 2, in addition to the height and 0.5 mm to 5 mm, arrangement angle θ of 5 ° to 60 ° range in the same inclination angle and without the assembly, also the substrate back surface A polishing cloth, characterized in that a hook-and-loop fastener is attached to the polishing cloth.
【請求項2】 集合体の全平面積と基材平面積との比率
を44%〜86%となしたことを特徴とする請求項1記
載の研磨布。
2. The polishing cloth according to claim 1, wherein the ratio of the total plane area of the aggregate to the plane area of the base material is 44% to 86%.
【請求項3】 研磨材がアルミナ、炭化珪素、ダイヤモ
ンド及び又はその混合物であることを特徴とする請求項
1又は2記載の研磨布。
3. The polishing cloth according to claim 1, wherein the abrasive is alumina, silicon carbide, diamond and / or a mixture thereof.
【請求項4】 集合体の形状を角型、菱型、丸型、楕円
型となしたことを特徴とする請求項1,2又は3記載の
研磨布。
4. The polishing cloth according to claim 1, wherein the shape of the aggregate is square, rhombic, round, or elliptical.
【請求項5】 フェノール樹脂、エポキシ樹脂及び又は
その混合樹脂を集合体の接着剤に使用したことを特徴と
する請求項1,2,3又は4記載の研磨布。
5. The polishing cloth according to claim 1, wherein a phenol resin, an epoxy resin and / or a mixed resin thereof are used as an adhesive for the aggregate.
JP2001066565A 2001-03-09 2001-03-09 Abrasive cloth Pending JP2002264026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001066565A JP2002264026A (en) 2001-03-09 2001-03-09 Abrasive cloth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001066565A JP2002264026A (en) 2001-03-09 2001-03-09 Abrasive cloth

Publications (1)

Publication Number Publication Date
JP2002264026A true JP2002264026A (en) 2002-09-18

Family

ID=18925035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001066565A Pending JP2002264026A (en) 2001-03-09 2001-03-09 Abrasive cloth

Country Status (1)

Country Link
JP (1) JP2002264026A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114367A (en) * 1980-11-20 1982-07-16 Kuringusupooru Buarutaa Flexible grinding material and its manufacture
JPH01149263U (en) * 1988-03-31 1989-10-16
JPH0890428A (en) * 1994-09-26 1996-04-09 Disco Abrasive Syst Ltd Flexible grinding wheel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114367A (en) * 1980-11-20 1982-07-16 Kuringusupooru Buarutaa Flexible grinding material and its manufacture
JPH01149263U (en) * 1988-03-31 1989-10-16
JPH0890428A (en) * 1994-09-26 1996-04-09 Disco Abrasive Syst Ltd Flexible grinding wheel

Similar Documents

Publication Publication Date Title
US6746311B1 (en) Polishing pad with release layer
US8360823B2 (en) Splicing technique for fixed abrasives used in chemical mechanical planarization
JPH106218A (en) Abrasive product for dressing
JP2008260125A (en) Anti-loading process
KR100620773B1 (en) Anti-loading treatments
JPWO2016067857A1 (en) Abrasive material and method for producing abrasive material
TWI707743B (en) Abrasive material
JPS5924965A (en) Method of producing emery cloth and paper
JP2002264026A (en) Abrasive cloth
AU2002248225A1 (en) Anti-loading treatments
TW201715013A (en) Polishing material and polishing material manufacturing method
TWI725119B (en) Abrasive material
JP2004202668A (en) Polishing cloth
US11185959B2 (en) Flocking sanding tool and manufacturing method thereof
JP3268737B2 (en) Conditioner for polishing mat and method of manufacturing the same
JPH04269175A (en) Polishing disk and manufacture thereof
TWI737760B (en) Abrasive material
TW201620670A (en) Polishing pad and method for producing polishing pad
JP2004195593A (en) Flap type polishing roller
JP2005014135A (en) Polishing sheet
JP2006136973A (en) Abrasive cloth and paper provided with polishing projecting part of three-dimensional structure
JP4601317B2 (en) Polishing tool and manufacturing method thereof
TW202222498A (en) Polishing pad which can maintain high planarization accuracy and increase the polishing rate
WO2019123922A1 (en) Polishing material and method for manufacturing polishing material
JP2003326452A (en) Polishing pad

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20070525

RD02 Notification of acceptance of power of attorney

Effective date: 20070525

Free format text: JAPANESE INTERMEDIATE CODE: A7422

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071002

A977 Report on retrieval

Effective date: 20100204

Free format text: JAPANESE INTERMEDIATE CODE: A971007

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100216

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100622