JP2002258089A - Method of manufacturing optical waveguide and manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing an optical waveguide which manufactures the optical waveguide with a simple configuration. SOLUTION: When the optical waveguide is formed through the use of a liquid optical waveguide material as an optical waveguide formed member, the optical waveguide material is continuously discharged from an ink jet head and the optical waveguide formed member and the ink jet head are relatively moved so that the optical waveguide is manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a method and an apparatus for manufacturing an optical waveguide for confining and transmitting light.

[0002]

2. Description of the Related Art Japanese Patent Publication No. 8-12303 discloses a method for forming a polymer optical waveguide in which a polymer material is extruded from an extrusion nozzle, and the extrusion nozzle is moved to form an optical waveguide pattern.

Japanese Patent Application Laid-Open No. 2000-108216 discloses a method of manufacturing a microlens array by discharging and landing minute droplets of an optical resin material on a plate-like optical material and then curing the minute droplets. A microlens array manufacturing method is disclosed.

Japanese Patent Application Laid-Open No. 2000-21222 discloses that, for example, when an electrode layer is formed on a light incident surface of an optical waveguide made of an optical fiber and a light emitting layer is formed on this electrode layer, the light emitting layer, Discloses a technique for forming a protective film by an inkjet method.

[0005]

By the way, in the conventional method for forming an optical waveguide, an extruder is necessary because an optical waveguide is manufactured by extruding a waveguide material using an extruder. Furthermore, a heater, a mixing device, and the like for maintaining the viscosity of the waveguide material at a constant state are required, and the device must be large-scale. Further, since the polymer material is continuously extruded using the nozzle, an optical waveguide having a small diameter cannot be manufactured, and a minute optical component cannot be connected.

[0006] On the other hand, the conventional method of manufacturing a microlens array uses a inkjet head to discharge and land minute droplets of an optical resin material, and then hardens the minute droplets to form a mold or a large-scale apparatus. Without the necessity, a microlens array, which is a minute optical element, was manufactured, and an ink jet head configured to fly an optical resin material as droplets was used. Therefore, the optical resin material cannot be continuously discharged, and an optical waveguide having a continuous structure cannot be manufactured.

Japanese Patent Application Laid-Open No. 2000-21222 discloses a technique in which a light emitting layer and a protective film of a light emitting device used in combination with an optical waveguide such as an optical fiber are formed by an ink jet method. This is merely a technique relating to the formation of a light-emitting layer and a protective film of a light-emitting device, not a technique relating to the production of an optical waveguide targeted by the present invention.Moreover, it is a technique of discharging a material in the form of droplets from an inkjet head. So,
This is different from a technique of continuously discharging a material from an inkjet head as in the present invention described later.

An object of the present invention is to provide an optical waveguide manufacturing method and an optical waveguide manufacturing apparatus for manufacturing an optical waveguide with a simple configuration.

[0009]

SUMMARY OF THE INVENTION The gist of the present invention is to provide a method for forming an optical waveguide using a liquid optical waveguide material as an optical waveguide forming member, by continuously discharging the optical waveguide material from an ink jet head. In addition, the optical waveguide forming member and the ink jet head are relatively moved to manufacture the optical waveguide.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a first embodiment of the present invention will be described with reference to FIGS.

FIG. 1 is a configuration diagram of an optical waveguide manufacturing apparatus according to this embodiment.

In the head section 10 of the optical waveguide manufacturing apparatus, an ink jet head section 50 and an optical waveguide material supply section 54 are provided. The optical waveguide material is supplied to the optical waveguide material supply unit 54 from the optical waveguide material supply hose 30. The inkjet head unit 50 includes a head driving circuit 114 controlled by the control circuit 70 based on optical waveguide shape data to be formed.
Driven by The control circuit 70 includes optical components 82 a and 82 b such as a light emitting element, a light receiving element, and an optical fiber,
And the marker drawn on the substrate are detected, and the stage drive circuit 68 is controlled to move the XY stage 12 according to a previously designated path, thereby to control the optical components 82a and 82b.
An optical waveguide 80 is formed therebetween.

Next, the structure and driving method of the ink jet head unit 50 will be described.

FIG. 2 is a configuration diagram of the ink head unit according to the present embodiment.

The ink-jet head 122 applies electrostatic force to the optical waveguide member 142 by an electric field formed by applying a voltage mainly between the ejection electrode 134 and the control electrode 144 to discharge the optical waveguide member 142 by electrostatic attraction. Method is used. The ejected optical waveguide material 142 adheres onto the substrate 56 through the opening 146 to form an optical waveguide. In the present embodiment, as the optical waveguide material 142, a material in which transparent fine particles of about 0.01 to 3 μm are dispersed in a liquid transparent resin solvent is used. A combination of materials of the transparent fine particles and the transparent resin solvent is selected so that the transparent fine particles are charged in the transparent resin solvent, and a transparent resin solvent having a high insulating property is used. The charged transparent fine particles form the discharge electrode 134.
The optical waveguide material 142 is drawn out by an electric field formed between the control electrode 144 and the optical waveguide 142. Further, the inkjet head 122 according to the present embodiment is also characterized in that transparent fine particles charged by the action of an electric field are aggregated at the tip of the discharge electrode 134, concentrated, and discharged.

The optical waveguide material 142 is guided from the optical waveguide material tank to the ink jet head 122 and is distributed so as to flow uniformly in the optical waveguide material flow path. The ejection electrode 134 is connected to a variable bias power supply 124, and a voltage applying means including a bias power supply 128 and a pulse power supply 130. A bias power supply 128 is provided between the projecting electrode 134 and the control electrode 144.
And a voltage from the pulse power supply 130 is applied. The pulse power supply 130 is driven by the drive circuit 62 based on a signal modulated by the data conversion circuit 66 according to data corresponding to a desired optical waveguide shape, and outputs a pulse voltage. When the electric field strength formed between the ejection electrode 134 and the control electrode 144 exceeds the critical electric field strength due to the sum of the bias voltage from the bias power supply 128 and the voltage from the pulse power supply 130 superimposed according to the recording signal, the optical waveguide Lumber 142
Is discharged from the discharge electrode 134. While the electric field exceeding the critical electric field intensity is applied, the optical waveguide member 142 is continuously discharged. The optical waveguide material 142 that has protruded from the ejection electrode 134 passes through the opening 146 provided in the control electrode 144 and reaches the substrate 56 on which a clad portion serving as a base has been formed in advance. The optical waveguide material 142 that has passed through the opening 146 is supplied from the variable bias power supply 124 to the control electrode 14.
XY stage 1 grounded by the voltage applied to
2 and reaches the substrate 56.
The continuously ejected optical waveguide material 142 is applied on the substrate 56 according to a desired path as the XY stage 12 moves. The optical waveguide material 146 applied on the substrate 56 is irradiated with ultraviolet rays or heat-treated, and the transparent resin solvent is cured to form a core of the optical waveguide. By making the refractive indices of the cured transparent resin solvent and the transparent fine particles substantially equal, an optical waveguide with less loss can be formed. When the formed core may be contaminated, or when the numerical aperture of the optical waveguide is set to a predetermined value, a clad material may be applied so as to further cover the core.

As the transparent fine particles, polycarbonate,
A transparent resin such as polystyrene or acrylic can be used. Further, as the transparent resin solvent, an ultraviolet curable resin whose refractive index is adjusted can be used.

Guide electrodes 136a and 136b, which are grounded, are provided on both sides of the discharge electrode 134 to reduce the influence of disturbance. The tip of the discharge electrode 134 is rounded with a radius of curvature of 30 to 60 μm so that the electric field is concentrated at the tip of the discharge electrode 134 so that the optical waveguide material 142 is formed.
And the transparent fine particles are easily aggregated at the discharge electrode 134.

According to information such as the material and thickness of the substrate 56,
By controlling the voltage values applied to the variable bias power supply 124 and the pulse power supply 130 in accordance with the distance between the surface of the substrate 56 and the inkjet head unit 50, the thickness of the optical waveguide to be formed can be kept constant. The voltage correction circuit 64 used as the voltage control means is made of a material of the substrate 56.
The voltage applied by the variable bias power supply 124 is corrected based on information such as the thickness, and the voltage value applied to the pulse power supply 130 is calculated. The data conversion circuit 66 that has received the data of the optical waveguide shape drives the drive circuit 62 for a predetermined time to discharge the optical waveguide material. The bias voltage is 2-3 kV and the pulse voltage is 200-1000 V depending on the manufacturing conditions.
It is desirable to adjust between. Variable bias power supply 12
4. The head drive circuit 1 includes a pulse power supply 130, a data conversion circuit 66, a drive circuit 62, and a voltage correction circuit 64.
14.

In the ink jet head of this embodiment, the positions of the discharge electrode 134 and the control electrode 144 are fixed, and the discharge condition of the optical waveguide member 142 is hardly dependent on the distance from the substrate 56. . The electric field strength received by the optical waveguide member 142 after passing through the opening 146 of the control electrode 144 changes depending on the distance from the substrate 56, but the electric field that drives the optical waveguide member 142 toward the substrate 56 is formed. The size has little effect on the formation of the optical waveguide. Therefore, if the XY stage is moved at a constant speed while maintaining a constant distance from the substrate, an optical waveguide having a constant thickness can be formed. However, the distance between the substrate and the inkjet head is measured when the distance between the inkjet head and the substrate varies greatly with the movement of the XY stage (vertical vibration on the inkjet head side) or when the substrate has irregularities. It is also possible to provide a distance measuring means to make the bias power supply 126 variable, and to control the voltage applied by the bias power supply 126 according to the distance. Alternatively, control may be performed using a driving device in the Z direction so that the distance is constant. When controlling the voltage, the bias voltage and the pulse voltage may be increased almost in proportion to the distance.
It is desirable to adjust between V. However, it is desirable that the pulse voltage is small because the response speed of ON / OFF is improved. By using the variable bias power supply 124,
The magnitude of the pulse voltage generated by the pulse power supply 130 is reduced. Further, by using the control electrode 144, the distance between the ejection electrode 134 and the control electrode 144 can be reduced, and the output voltage of the bias power supply 128 and the pulse power supply 130 can be reduced.

FIG. 3 is a configuration diagram of the optical waveguide material supply section 54 according to the present embodiment. The optical waveguide material flow rate adjusting device 106 including a pressurizing device such as a pump and a valve supplies the optical waveguide material 142 stored in the optical waveguide material tank 100 to the inkjet head unit 50. Most of the optical waveguide material that has not been discharged is transported and collected to the optical waveguide material tank 100 by the optical waveguide material transport device 102, and is reused.

In the ink jet head of the present embodiment, while the pulse voltage is applied to the discharge electrode 134, the ink forms a string and continuously flies. Therefore, by moving the XY stage at a constant speed, the optical waveguide can be formed with a constant thickness. Therefore, as compared with the case where the minute droplet is caused to fly, irregularities on the surface of the optical waveguide are less likely to occur, and an optical waveguide with small light loss can be manufactured. In addition, when an optical waveguide is formed by discharging and applying only a liquid serving as an optical waveguide core, the wettability of the substrate is strongly affected. It spreads thinly and does not form a three-dimensional core. On the other hand, if wettability is poor, the core is rounded due to surface tension. However, in the ink jet head of this embodiment, the transparent fine particles dispersed in the transparent resin solvent are aggregated and discharged by the action of the electric field. Therefore, the ratio of the liquid transparent resin solvent in the optical waveguide material reaching the substrate is small, and the optical waveguide material is not easily affected by the wettability between the substrate and the optical waveguide material, so that the optical waveguide can be formed stably.

In this embodiment, the viscosity of the optical waveguide material
By adjusting the surface tension, the discharge speed of the optical waveguide material, and the moving speed of the stage, an optical waveguide having a width of 5 μm to 100 μm could be manufactured. Therefore, a single mode thin optical waveguide to a multimode optical waveguide can be manufactured, and a single mode optical fiber and a core diameter of 50 μm can be manufactured.
It is also possible to connect to a multimode fiber of m, 62.5 μm.

In the present embodiment, the optical waveguide is formed by moving the waveguide forming substrate. However, the optical waveguide may be drawn and formed on the substrate by moving the ink jet head. In particular, when a long optical fiber is used as at least one optical component, it is desirable to move the ink jet head.

Next, a second embodiment of the present invention will be described with reference to FIGS.

FIG. 4 is a configuration diagram of an optical waveguide manufacturing apparatus according to the present embodiment.

The head section 10 of the optical waveguide manufacturing apparatus includes an ink jet head section 50 and an ink jet head section 5.
1a, 51b, an optical waveguide material supply unit 54, optical waveguide material supply units 55a, 55b, an ultraviolet irradiation optical fiber 164a,
164b and 164c. Optical waveguide material supply unit 5
4 is an optical waveguide material supply hose 30, and the optical waveguide material supply sections 55a and 55b are optical waveguide material supply hoses 31a and 3b.
An optical waveguide material is supplied from 1b. The inkjet head unit 50, the inkjet head units 51a and 51b
Driven by a head drive circuit controlled by a control circuit based on the optical waveguide shape data to be formed. The control circuit includes optical components 8 such as a light emitting element, a light receiving element, and an optical fiber, which are installed on the substrate 56 based on an image captured by the camera 16.
The position of 2a, 82b or a marker drawn on the substrate is detected, and the stage drive circuit is controlled to move the XY stage 12 so as to form the optical waveguide 80 according to a previously specified path. With respect to the traveling direction of the XY stage 12,
The rotary stage 14 is arranged such that the inkjet head unit 50 and the inkjet head units 51a and 51b are arranged in a straight line.
To rotate the head unit 10.

The ink-jet head 51a is connected to the substrate 5
The transparent resin 154 for cladding is discharged onto the substrate 6, and is irradiated with ultraviolet rays by the ultraviolet irradiating optical fiber 164 a to be cured, thereby forming the cladding 157. Then, clad 15
A core material 151 containing charged transparent fine particles and made of an ultraviolet curable resin is ejected onto the substrate 7 by the inkjet head unit 50. The core material 151 is cured by irradiating ultraviolet rays with the ultraviolet irradiating optical fiber 164b.
8 is formed. Finally, the inkjet head unit 51b
As a result, the transparent resin 152 is discharged onto the core base portion 158, and the core 159 is formed by irradiating ultraviolet rays through the ultraviolet irradiation optical fiber 164c. The inkjet head unit 50 uses the electrostatic inkjet head described in the first embodiment, and the inkjet head units 51a and 51b use a piezo method or a bubble jet method. In addition to these, an inkjet system such as a so-called continuous system, such as a microdot system, a Hertz system, or a charge modulation system, may be used as the inkjet head units 51a and 51b.

The formation of the core portion in this embodiment will be described in more detail with reference to FIG.

FIG. 5 is a sectional view of the optical waveguide section.

A layer of the core substrate 158 is formed on the clad 157 by using a transparent resin containing thin transparent fine particles. In the ink jet head of the present embodiment, since the transparent fine particles dispersed in the core material are aggregated and discharged by the action of the electric field, the ratio of the liquid to the core material reaching the substrate is small, and the substrate and the optical waveguide The optical waveguide can be stably formed with a constant width and thickness without being significantly affected by wettability with the material. After the core material is cured and the core base material 158 is formed, the transparent resin 152 is discharged and cured on the core base material part 158 layer to form the core 159. Core base part 158
Since the resin contains transparent fine particles, unevenness is formed on the surface, so that the wettability with the transparent resin 152 is improved, and
The transparent resin 152 discharged above spreads on the core base portion 158 and forms a semi-cylindrical core portion due to surface tension. On the other hand, the transparent resin 152 and the transparent resin 154 for cladding are used.
The transparent resin 152 does not spread to the cladding 157 due to poor wettability with the cladding 157. Since the core base portion 158 serving as the base of the core is formed in advance by using the electrostatic ink jet that continuously discharges, the transparent resin 152 to be discharged on the core base portion 158 does not need to be continuously discharged. , Or a bubble jet (registered trademark) type ink jet head.

The formation of another core portion will be described with reference to FIG.

FIG. 6 is a sectional view of the optical waveguide section.

From the electrostatic ink jet head 50,
The core material 151 in which transparent fine particles are dispersed in a volatile solvent is discharged. The solvent discharged from the core material on the clad 157 volatilizes, and becomes a porous state composed of the transparent fine particles 150. A transparent resin 15 is added to the porous transparent fine particles 150.
When 2 is discharged, the transparent resin 152 fills the gaps between the transparent fine particles 150 by capillary action, and is irradiated with ultraviolet rays to be cured, thereby forming the core 159 of the optical waveguide. After curing the transparent resin 152, the transparent fine particles 150 and the transparent resin 1
By making the refractive indices 52 equal, light scattering by the transparent fine particles 150 can be suppressed, and a good optical waveguide can be formed. In this case, the ultraviolet irradiation optical fiber 164b
Instead of irradiating with ultraviolet rays, it is desirable to irradiate with infrared rays and heat to dry the solvent.

In the ink jet head of this embodiment, the transparent fine particles dispersed in the core material are aggregated and discharged by the action of the electric field. Therefore, the ratio of the solvent in the core material reaching the substrate is small, and the optical waveguide can be stably formed without being significantly affected by the wettability between the substrate and the optical waveguide material.

Next, a third embodiment of the present invention will be described with reference to FIGS.

FIG. 7 is a perspective view of the ink jet head according to this embodiment.

On the electrode substrate 132, a plurality of ejection electrodes 134 are formed at equal intervals. The optical waveguide material is supplied from the optical waveguide material supply port 160 to the discharge electrode 134, collected from the optical waveguide material recovery port 162, and reused. Each discharge electrode 1
The structure of 34 is the same as that of the first embodiment, and discharges the optical waveguide material using an electric field. By providing an inkjet control device for each ejection electrode 134, each ejection electrode 134 can be driven independently. The inkjet head used in the present embodiment can be manufactured by using a photolithography technique used in semiconductor manufacturing, and can precisely determine the interval and shape of the ejection electrodes. By using the inkjet head array of the present embodiment, a plurality of optical waveguides can be simultaneously formed.

FIG. 8 shows an example of a parallel optical waveguide formed by using the ink jet head of this embodiment. The laser arrays 84a and 84b and the fiber array 86 are set in advance so as to have the same height as the substrate 56. The laser arrays 84a and 84b each have six lasers arranged at a pitch of 125 μm, and the fiber arrays are also precisely arranged at a pitch of 125 μm using V-groove blocks.
Laser arrays 84a and 84b and fiber array 86 previously set using the optical waveguide array manufacturing apparatus of the present embodiment.
Between them, optical waveguide arrays 81a and 81b are formed and optically connected. A laser array 84a, 84b and a fiber array 86
Is slightly wider than the distance between the laser arrays 84a and 84b
The distance between the optical waveguides can be finely adjusted according to the distance between the optical waveguide and the fiber array 86. In the ink jet head according to the present embodiment, since the interval between the ejection portions can be accurately manufactured, the optical waveguide can be formed in accordance with the array optical element installed in advance as in the present embodiment. It can be easily manufactured as compared with the case where the position of the array optical element is adjusted according to the optical waveguide.

In the ink jet head used in this embodiment, since the optical waveguide material to be fly is charged, the landing position of the optical waveguide material is controlled by providing a deflection electrode in the flight path. You can also. In the ink jet head array, the landing position of each optical waveguide material can be finely adjusted by providing a deflection electrode for each ejection unit and controlling the deflection electrode independently.

Furthermore, the apparatus for producing an optical waveguide of the present invention is not limited to the production of an optical waveguide, but can also be applied to the production of optical components such as a cylindrical lens having a small cylindrical shape.

[0042]

According to the present invention, the optical waveguide material is continuously discharged from the ink jet head, and the optical waveguide forming member and the ink jet head are relatively moved to produce the optical waveguide. An optical waveguide can be manufactured. Further, according to the present invention, it is possible to install an optical component in advance and then fabricate an optical waveguide in accordance with the position of the optical component.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a device for manufacturing an optical waveguide of a bifurcated optical fiber according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of an ink head unit according to the first embodiment of the present invention.

FIG. 3 is a configuration diagram of an optical waveguide material supply unit according to the first embodiment of the present invention.

FIG. 4 is a configuration diagram of an optical waveguide manufacturing device according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view of an optical waveguide section for explaining a method of forming an optical waveguide core section according to a second embodiment of the present invention.

FIG. 6 is a cross-sectional view of an optical waveguide unit for explaining a second method of forming an optical waveguide core unit according to a second embodiment of the present invention.

FIG. 7 is a perspective view of an ink jet unit of an optical waveguide manufacturing device according to a third embodiment of the present invention.

FIG. 8 is a top view showing a parallel optical waveguide manufactured by using the third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Head part, 12 ... XY stage, 14 ... Rotation stage, 16 ... Camera, 20 ... Head part, 30 ... Optical waveguide material supply hose, 31a, 31b ... Optical waveguide material supply hose, 50 ... Inkjet head part, 51a, 51b ...
Ink-jet head part, 54 ... optical waveguide material supply part, 5
5a, 55b: optical waveguide material supply unit, 56: substrate, 62 ...
Voltage drive circuit, 64: Voltage correction circuit, 66: Data conversion circuit, 68: Stage drive circuit, 70: Control circuit, 80
... Optical waveguides, 81a and 81b ... Optical waveguide arrays, 82
a, 82b: optical components, 84a, 84b: laser array, 86: fiber array, 88: base, 90: V-groove block, 100: optical waveguide material tank, 102: optical waveguide material conveying device, 106: optical waveguide material flow rate Adjustment device, 11
4 head drive circuit 122 ink jet head
124: variable bias power supply, 126: bias power supply, 1
28: bias power supply, 130: pulse power supply, 132: electrode substrate, 134: discharge electrode, 136a, 136b: guide electrode, 140: spacer, 142: optical waveguide material, 14
4 Control electrode, 146 Opening, 148 Optical waveguide material channel, 150 Transparent fine particles, 151 Core material, 152 Transparent resin (base material), 154 Transparent resin for cladding, 157
... clad, 158 ... core base part, 159 ... core, 16
0: Optical waveguide material supply port, 162: Optical waveguide material recovery port, 1
64a, 164b, 164c: Optical fibers for ultraviolet irradiation.

Claims (8)

[The claims] 1. An optical waveguide manufacturing apparatus for forming an optical waveguide by using a liquid optical waveguide material as an optical waveguide forming member, comprising: an ink jet head for discharging the optical waveguide material; A moving unit that relatively moves the member and the inkjet head; and a control unit that controls the inkjet head and the moving unit. The optical waveguide member is formed while the optical waveguide member is ejected by the inkjet head. A member is relatively moved to form a core portion, and when the core portion is cured to produce an optical waveguide, the optical waveguide material is continuously discharged from the inkjet head. Optical waveguide manufacturing equipment. 2. The optical waveguide manufacturing apparatus according to claim 1, wherein the inkjet head comprises: an ejection electrode; a voltage application unit for applying a voltage to the ejection electrode; and a supply for supplying the optical waveguide material to the ejection electrode. Means, wherein the optical waveguide material contains transparent fine particles, and an electric field generated by a voltage applied to the discharge electrode is applied to the transparent fine particles to discharge the optical waveguide material. Optical waveguide manufacturing apparatus. 3. The optical waveguide manufacturing apparatus according to claim 2, further comprising: a plurality of said discharge electrodes; and said voltage applying means for independently driving said discharge electrodes. 4. An optical waveguide manufacturing apparatus for forming an optical waveguide by using a liquid optical waveguide material on an optical waveguide forming member, comprising: a first inkjet head for discharging a first optical waveguide material; A second inkjet head that discharges a second optical waveguide material, a moving unit that relatively moves the optical waveguide forming member and the first and second inkjet heads, and the first and second inkjet heads. Having an ink jet head and control means for controlling the moving means, after the first optical waveguide member is ejected by the first ink jet head, the second light guide is formed on the first optical waveguide member. In the case where an optical waveguide is manufactured by discharging a waveguide member with the second inkjet head, the first optical waveguide material is continuously discharged from the first inkjet head. Optical waveguide manufacturing apparatus according to claim. 5. The optical waveguide manufacturing apparatus according to claim 4, wherein the first optical waveguide forming material contains transparent fine particles, the first inkjet head has an electric field generating unit, and the first inkjet head has an electric field generating unit. An optical waveguide manufacturing apparatus, characterized in that the optical waveguide material is ejected from electrostatic force caused by an applied electric field, and the second inkjet head ejects droplets of the second optical waveguide material. 6. The optical waveguide manufacturing device according to claim 1, further comprising an image recognition unit, wherein the optical component or the marker on the optical waveguide forming member is removed by the image recognition unit. An optical waveguide manufacturing apparatus, characterized in that the optical waveguide is formed so as to be recognized and optically connected to the optical component. 7. An optical waveguide manufacturing method for forming an optical waveguide on a member on which an optical waveguide is to be formed using a liquid optical waveguide material, comprising: using the optical waveguide material containing transparent fine particles; The concentration of the transparent fine particles after being discharged is made higher than the concentration of the transparent fine particles in the optical waveguide material to discharge the optical waveguide member, and the light guide is formed on the optical waveguide forming member using an inkjet head. An optical waveguide manufacturing method, wherein an optical waveguide core is formed by relatively moving the optical waveguide forming member and an inkjet head while continuously discharging a waveguide material. 8. An optical waveguide manufacturing method for forming an optical waveguide on an optical waveguide forming member using a liquid optical waveguide material, wherein the optical waveguide forming member is transparent on the optical waveguide forming member using an inkjet head. While continuously discharging the first optical waveguide material containing fine particles, the optical waveguide forming member and the inkjet head are relatively moved to form an optical waveguide substrate, and then the optical waveguide substrate is removed. After curing, a second optical waveguide material having a refractive index substantially equal to that of the first optical waveguide material after curing is discharged onto the first optical waveguide material on the optical waveguide forming member. And an optical waveguide core formed by curing the second optical waveguide material.