JP2002246454A5 - - Google Patents
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- JP2002246454A5 JP2002246454A5 JP2001134121A JP2001134121A JP2002246454A5 JP 2002246454 A5 JP2002246454 A5 JP 2002246454A5 JP 2001134121 A JP2001134121 A JP 2001134121A JP 2001134121 A JP2001134121 A JP 2001134121A JP 2002246454 A5 JP2002246454 A5 JP 2002246454A5
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Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001134121A JP2002246454A (en) | 2000-12-11 | 2001-05-01 | Electrostatic chuck |
KR1020010077914A KR20020046214A (en) | 2000-12-11 | 2001-12-10 | Electrostatic chuck and method of manufacturing the same |
US10/006,657 US6678143B2 (en) | 2000-12-11 | 2001-12-10 | Electrostatic chuck and method of manufacturing the same |
TW090130670A TW516155B (en) | 2000-12-11 | 2001-12-11 | Electrostatic chuck and the manufacturing method thereof |
AT01310328T ATE354177T1 (en) | 2000-12-11 | 2001-12-11 | ELECTROSTATIC HOLDING DEVICE AND METHOD FOR PRODUCING THE SAME |
DE60126576T DE60126576T2 (en) | 2000-12-11 | 2001-12-11 | Electrostatic tensioner and method of making the same |
EP01310328A EP1220311B1 (en) | 2000-12-11 | 2001-12-11 | Electrostatic chuck and method of manufacturing the same |
US10/198,052 US20030107865A1 (en) | 2000-12-11 | 2002-07-19 | Wafer handling apparatus and method of manufacturing the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000376599 | 2000-12-11 | ||
JP2000-376599 | 2000-12-11 | ||
JP2001134121A JP2002246454A (en) | 2000-12-11 | 2001-05-01 | Electrostatic chuck |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002246454A JP2002246454A (en) | 2002-08-30 |
JP2002246454A5 true JP2002246454A5 (en) | 2004-09-02 |
Family
ID=26605625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001134121A Pending JP2002246454A (en) | 2000-12-11 | 2001-05-01 | Electrostatic chuck |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002246454A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007157962A (en) * | 2005-12-05 | 2007-06-21 | Sumitomo Electric Ind Ltd | Die forming tool |
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2001
- 2001-05-01 JP JP2001134121A patent/JP2002246454A/en active Pending