JP2002246454A5 - - Google Patents

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Publication number
JP2002246454A5
JP2002246454A5 JP2001134121A JP2001134121A JP2002246454A5 JP 2002246454 A5 JP2002246454 A5 JP 2002246454A5 JP 2001134121 A JP2001134121 A JP 2001134121A JP 2001134121 A JP2001134121 A JP 2001134121A JP 2002246454 A5 JP2002246454 A5 JP 2002246454A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001134121A
Other languages
Japanese (ja)
Other versions
JP2002246454A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2001134121A priority Critical patent/JP2002246454A/en
Priority claimed from JP2001134121A external-priority patent/JP2002246454A/en
Priority to KR1020010077914A priority patent/KR20020046214A/en
Priority to US10/006,657 priority patent/US6678143B2/en
Priority to DE60126576T priority patent/DE60126576T2/en
Priority to AT01310328T priority patent/ATE354177T1/en
Priority to EP01310328A priority patent/EP1220311B1/en
Priority to TW090130670A priority patent/TW516155B/en
Priority to US10/198,052 priority patent/US20030107865A1/en
Publication of JP2002246454A publication Critical patent/JP2002246454A/en
Publication of JP2002246454A5 publication Critical patent/JP2002246454A5/ja
Pending legal-status Critical Current

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JP2001134121A 2000-12-11 2001-05-01 Electrostatic chuck Pending JP2002246454A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2001134121A JP2002246454A (en) 2000-12-11 2001-05-01 Electrostatic chuck
KR1020010077914A KR20020046214A (en) 2000-12-11 2001-12-10 Electrostatic chuck and method of manufacturing the same
US10/006,657 US6678143B2 (en) 2000-12-11 2001-12-10 Electrostatic chuck and method of manufacturing the same
TW090130670A TW516155B (en) 2000-12-11 2001-12-11 Electrostatic chuck and the manufacturing method thereof
AT01310328T ATE354177T1 (en) 2000-12-11 2001-12-11 ELECTROSTATIC HOLDING DEVICE AND METHOD FOR PRODUCING THE SAME
DE60126576T DE60126576T2 (en) 2000-12-11 2001-12-11 Electrostatic tensioner and method of making the same
EP01310328A EP1220311B1 (en) 2000-12-11 2001-12-11 Electrostatic chuck and method of manufacturing the same
US10/198,052 US20030107865A1 (en) 2000-12-11 2002-07-19 Wafer handling apparatus and method of manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000376599 2000-12-11
JP2000-376599 2000-12-11
JP2001134121A JP2002246454A (en) 2000-12-11 2001-05-01 Electrostatic chuck

Publications (2)

Publication Number Publication Date
JP2002246454A JP2002246454A (en) 2002-08-30
JP2002246454A5 true JP2002246454A5 (en) 2004-09-02

Family

ID=26605625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001134121A Pending JP2002246454A (en) 2000-12-11 2001-05-01 Electrostatic chuck

Country Status (1)

Country Link
JP (1) JP2002246454A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007157962A (en) * 2005-12-05 2007-06-21 Sumitomo Electric Ind Ltd Die forming tool

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