JP2002243936A - Optical filter and method for manufacturing optical filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical filter optimum for fast rotation in which the deposition time of films can be decreased and the weight balance is easily obtained. SOLUTION: The optical filter is manufactured by dividing one sheet of planar transparent substrate which transmits light into a plurality of regions, fixing an interference filter layer consisting of a dielectric multilayered film formed on another substrate for film deposition to the respective regions, and then removing the substrate for film deposition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical filter used for color separation in, for example, a projection TV, an image pickup apparatus, and the like, and a method for manufacturing the optical filter.

[0002]

2. Description of the Related Art As a configuration of a projection TV or the like,
A time-division color method is known. In this time-division color method, a substantially disc-shaped optical filter on which a different interference filter film is formed at a predetermined angle of a transparent substrate is rotated, and a light source controls each interference filter film. It utilizes the fact that it is separated into RGB colors when passing. As a method of manufacturing the optical filter, for example, a method of sequentially forming an interference filter film corresponding to each color on a single transparent substrate at a predetermined angle, or a method of forming an interference filter film corresponding to each color substantially on a transparent substrate A method is used in which a film is formed on the entire surface of a glass substrate having the same shape, the glass substrate is cut at predetermined angles, and the glass substrate is attached to a transparent substrate.

[0003]

However, in the method of sequentially forming a film, three types of film forming steps are required to obtain one optical filter. Therefore, the same type of interference filter film is formed on the entire surface of the glass substrate. There is a problem that the film formation time is about three times as long as the case of forming a film. Further, in the method of forming the same type of interference filter film on the entire surface of another glass substrate, although the film formation time can be reduced, it is difficult to balance the weight of the cut glass substrate. And the life of the motor is shortened.

The present invention has been made in view of the above-mentioned conventional drawbacks,
The purpose of the present invention is to eliminate these drawbacks, and it is an object of the present invention to obtain an optical filter that can shorten the film forming time, easily balance the weight, and is optimal for high-speed rotation.

The objects and novel features of the invention will become more fully apparent from the following description read in conjunction with the accompanying drawings. However, the drawings are merely for explanation and do not limit the technical scope of the present invention.

[0006]

In order to achieve the above-mentioned object, the present invention divides a single plate-shaped transparent substrate which transmits light into a plurality of regions, and separately forms the transparent substrate on a film-forming substrate. An optical filter is formed by fixing an interference filter layer composed of a body multilayer film to each region and then removing the film-forming substrate.

In addition, an optical filter is formed by forming the interference filter layer into a shape corresponding to an optical path.

Further, an optical filter is constructed by providing a protective member for covering the interference filter layer.

(A) forming a film-forming base layer on a film-forming substrate; (b) forming an interference filter layer on the film-forming base layer; and (c) forming the interference filter layer on the film-forming base layer. Cutting the entire film forming substrate to form an interference filter portion; and (d) forming the interference filter portion at a predetermined position on the transparent substrate in a direction in which the interference filter layer of the interference filter portion faces the transparent substrate. And (e) peeling off the film-forming base layer and the film-forming substrate after the interference filter portion is fixed to the transparent substrate, thereby producing an optical filter. Is composed.

Further, (a) a step of forming a film-forming base layer on a film-forming substrate; (b) a step of forming an interference filter layer on the film-forming base layer; Cutting the entire film forming substrate to form an interference filter portion; and (d) forming the interference filter portion at a predetermined position on the transparent substrate in a direction in which the interference filter layer of the interference filter portion faces the transparent substrate. And (e) peeling off the interference filter layer and the film-forming base layer after the interference filter portion is fixed to the transparent substrate, thereby forming an optical filter manufacturing method. are doing.

In addition, (a) a step of forming a film-forming base layer on a film-forming substrate, (b) a step of forming an interference filter layer on the film-forming base layer, and (c) a step of forming the interference filter layer Forming an interference filter portion by cutting the substrate together with the film-forming substrate; and (d) forming the interference filter portion at a predetermined position on the transparent substrate so that the interference filter layer of the interference filter portion faces the transparent substrate. And (e) removing the film-forming base layer after the interference filter section is fixed to the transparent substrate, thereby forming the optical filter manufacturing method.

Further, a method of manufacturing an optical filter is constituted by forming the same type of interference filter layer for each of the film forming substrates.

Further, the method for manufacturing an optical filter is constituted such that the film-forming substrate is made of a hydrophilic material and the film-forming base layer is made of a hydrophobic plastic material.

In addition, a method for manufacturing an optical filter is constituted by increasing the bonding strength between the film forming substrate and the film forming base layer and weakening the bonding strength between the film forming base layer and the interference filter layer. ing.

Further, the method for manufacturing an optical filter is constituted by the fact that the film-forming base layer is a photosensitive resist.

Further, a method for manufacturing an optical filter is constituted by forming the interference filter layer after patterning the film-forming base layer into a predetermined shape.

[0017]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIGS. 1 to 3 show a method of manufacturing an optical filter and an optical filter according to a first embodiment of the present invention. In FIG. 1, reference numeral 1a denotes a film-forming substrate made of a plate-like hydrophilic material such as glass. Numeral 3 is a film-forming base layer made of a hydrophobic plastic such as fluorinated polyimide or acrylic plastic, 5a, 5b, 5c is an interference filter layer made of a dielectric multilayer film, 7 is an optical adhesive, and 31 is light such as glass. Is a substantially disc-shaped transparent substrate that transmits light.

In the drawings showing the manufacturing process of FIG. 1, (a)
To form a film-forming base layer 3 on the film-forming substrate 1a, and (b)
Then, the interference filter layer 5a corresponding to each color of RGB is formed by a method such as ion-assisted vapor deposition. In (c), the film-forming base layer 3 and the interference filter layer 5a formed on the film-forming substrate 1a are cut into a required size and shape together with the film-forming substrate 1a to form the interference filter portion 11a. . (D)
Then, the interference filter portion 11a is turned upside down so that the interference filter layer 5a faces the transparent substrate 31, and the interference filter portion 11a is placed on a predetermined portion of the transparent substrate 31 via the optical adhesive 7. Is fixed. (E)
Then, the film forming base layer 3 and the film forming substrate 1a are separated from each other, and the unnecessary film forming substrate 1a is removed. By repeating the above steps (a) to (e) three times, all the interference filter layers 5a, 5b, 5c of RGB can be fixed on the transparent substrate 31, and the first embodiment of the present invention can be fixed. The optical filter is completed.

Here, the film forming substrate 1a (or 1b,
1c) and the film-forming base layer 3 are made of a hydrophilic material and a hydrophobic material, respectively, so that their mutual bonding strength is weak,
Conversely, the deposition base layer 3 and the interference filter layer 5a (or 5
b, 5c) have a high bonding strength because their surfaces are physically and firmly fixed by the ion assist effect, and the interference filter layer 5a (or 5b, 5c) and the transparent substrate 3
1 is made of a hydrophilic material, and therefore has good adhesion, and can easily obtain high bonding strength by using an optical adhesive. The interference filter layer 5a (or 5b, 5c) can be easily formed on the transparent substrate 31 by utilizing this difference in bonding strength.
At a predetermined location. In particular, at the time of transfer, the formed interference filter layer 5a (or 5b,
c) is the interference filter unit 11a (or 11b, 11b).
film forming substrate 1a (or 1b, 1c) constituting c)
As a result, the shape is reliably maintained, so that the interference filter layer 5a is formed on the deposition substrate 1a (or 1b, 1c).
(Or 5b, 5c) can be fixed on the transparent substrate 31 in a state where the film is formed.

As described above, in the first embodiment of the present invention, a plurality of interference filter layers (interference filter portions 11a, 11b, 11c) corresponding to each color of RGB can be formed at one time. Compared to the case of sequentially forming a film on one transparent substrate, the film forming time can be substantially reduced, and it is not necessary to fix a heavy film-forming substrate to the transparent substrate. An optical filter which is easy and suitable for high-speed rotation can be obtained.

Next, another embodiment of the present invention will be described with reference to FIGS.

The same components as those of the optical filter according to the first embodiment of the present invention are denoted by the same reference numerals, and description thereof will be omitted.

The optical filter according to the second embodiment of the present invention shown in FIGS. 4 to 7 is mainly different from the optical filter according to the first embodiment of the present invention in that the film-forming base layer has a predetermined shape. Patterning.

FIG. 4 shows a manufacturing process of the optical filter according to the second embodiment. Compared with the manufacturing process of the optical filter according to the first embodiment, (a) the film-forming base layer is used. A patterning step has been added. (A) The patterning of the film-forming base layer causes the film-forming base layer 3 to have a step in its cross-sectional shape. A step is generated in the cross-sectional shape of the interference filter layer 5a thus formed, and (e)
The interference filter layer 5a at the time when the process is completed has almost the same shape as the patterned film-forming base layer 3.

FIG. 5 shows an example of patterning of the film-forming base layer 3, and FIG.
FIG. 7 shows an example of an optical filter manufactured by the above method.

As described above, in the optical filter according to the second embodiment of the present invention, the same effect as that of the optical filter according to the first embodiment of the present invention can be obtained, and the optical path of the light source can be obtained. Since the interference filter layer having a shape corresponding to the shape of the optical filter can be formed, waste of material can be reduced, the number of interference filter portions manufactured in one film formation can be increased, and the size and weight of the optical filter can be reduced. Can be achieved.

The optical filter of the third embodiment of the present invention shown in FIG. 8 is mainly different from the optical filters of the first and second embodiments of the present invention in that an interference filter portion is fixed to a transparent substrate. After that, the interference filter layer and the film-forming base layer are separated.

The steps (a) to (d) are almost the same as the steps (a) to (d) of FIG. 1 or FIG. In the step of peeling the substrate 1a, the transparent substrate is not peeled between the film forming substrate 1a and the film forming base layer 3 but is peeled between the interference filter layer 5a and the film forming base layer 3. On the base 31, only the interference filter layer 5a is fixed.
Therefore, it is possible to obtain an optical filter that is lighter and has less unevenness.

Here, a method for favorably separating the interference filter layer and the film-forming base layer will be described in detail. (A) Film-forming substrate 1 made of a hydrophilic material such as glass
a) is subjected to a process of increasing the bonding strength between the film-forming substrate 1a and the film-forming base layer 3 by using HMDS (hexamethyldisilazane) or the like. The film forming base layer 3 is formed by attaching a hydrophobic plastic film. Here, although not shown, when the film-forming base layer 3 is patterned, when the patterning of the film-forming base layer 3 is completed, the bonding strength of the exposed portion of the film-forming substrate 1a is reduced. The layer formed for heightening is removed together with the deposition base layer 3. (B) Interference filter layer 5a
In the step of forming a film, the first few layers are not subjected to ion assist, and the bonding strength between the interference filter layer 5a and the film forming base layer 3 is reduced. When ion assist is not performed, since the SiO2 and TiO2 constituents of the interference filter layer 5a (dielectric multilayer film) are hydrophilic, the bonding strength with the hydrophobic film-forming base layer 3 is extremely low. Become.
As described above, the bonding strength between the film formation substrate 1a (or 1b, 1c) and the film formation base layer 3 is increased, and the film formation base layer 3
By lowering the bonding strength between the substrate and the interference filter layer 5a (or 5b, 5c), the film formation substrate 1a of FIG.
In the step of peeling (or 1b, 1c), the film-forming base layer 3 can be peeled together with the film-forming substrate 1a. It should be noted that the interference filter unit 11d of (d) (or 1
1e, 11f) in the step of fixing to the transparent substrate 31, before fixing, the fixing surface of the transparent substrate 31 is lightly immersed in a thin HF solution or the like, and the surface is covered with an H group to thereby form the interference filter layer 5a (or 5b, 5c). ) And the transparent substrate 31 can be made in a state where the bonding strength can be easily obtained.

The optical filter of the fourth embodiment of the present invention shown in FIG. 9 is mainly different from the optical filters of the first to third embodiments of the present invention in that an interference filter portion is fixed to a transparent substrate. After that, the film-forming base layer is removed by a method such as etching.

The steps (a) to (d) are almost the same as the steps (a) to (d) of FIG. 1 or FIG. In the step of peeling the substrate 1a, the film-forming base layer 3g itself is subjected to etching or the like instead of peeling between the film-forming substrate 1a and the film-forming base layer 3g or between the film-forming base layer 3g and the interference filter layer 5a. By removing by the method, only the interference filter layer 5a is fixed on the transparent substrate 31.
Therefore, the same effect as in the third embodiment of the present invention can be obtained.

Here, a method for removing the film-forming base layer will be described in detail. (A) A film-forming base layer 3 is formed by applying an alkali-soluble positive resist or attaching a positive photosensitive film to a film-forming substrate 1a made of a hydrophilic material such as glass. Here, FIG.
As shown in (a), the film formation base layer 3 can be patterned. The (b) interference filter layer 5a is formed by vapor deposition. At this time, ion assist may be performed as long as the resist does not become insoluble. The interference filter unit 11g of (d) (or 11
h, 11i) in the step of fixing to the transparent substrate 31,
Before the fixing, the fixing surface of the transparent substrate 31 is lightly immersed in a thin HF solution or the like, and the surface is covered with an H group.
(Or 5b, 5c) and the transparent substrate 31 can be easily brought to a bonding strength. In the step (e ′) of peeling off the transparent substrate 31, the transparent substrate 31 and the interference filter portion 11 g are lightly pressed so as to be more intimately contacted with each other from the film forming substrate 1 a (or 1 b, 1 c) side. Exposure is performed, and the substrate 1a for film formation is peeled from the transparent substrate 31 by removing the film formation base layer 3g by immersing in the positive resist. Thereafter, by performing a heat treatment in a vacuum, the transparent substrate 31 and the interference filter layer 5a are
It is H-bonded and can increase the bonding strength.

The optical filter of the fifth embodiment of the present invention shown in FIG. 10 is different from the optical filters of the first to fourth embodiments of the present invention mainly in that a protective member for covering the interference filter layer is provided. It has been provided.

FIGS. 10A to 10C show the transparent substrate 3.
1, after fixing all the interference filter layers (5a, 5b, 5c, etc.) to the protective member 15a made of a heat-softening film.
Is vacuum-heated to adhere to the film-forming base layer 3 or the interference filter layers 5a, 5b, 5c to cover the interference filter layer 5a and the like. FIG. 10D shows that all the interference filter layers (5a, 5b, 5c) are formed on the transparent substrate 31.
After the liquid silicone rubber 17 is applied around the interference filter layer 5a and the like, the protective member 15b made of a plate material such as glass is covered and fixed, thereby covering the interference filter layer 5 and the like. ing.

As described above, by providing the protective member for covering the interference filter layer, even when the optical filter is rotated at a high speed, the turbulence due to the rotation can be reduced, and the generation of noise can be suppressed. In addition, the separation of the interference filter layer can be prevented. Further, the interference filter layer can be protected from dirt, dust, scratches, etc., and an optical filter having a long life can be obtained.

[0037]

As described in detail above, the present invention has the following effects.

(1) One plate-shaped transparent substrate that transmits light is divided into a plurality of regions, and an interference filter layer composed of a dielectric multilayer film separately formed on a film-forming substrate is fixed to each region. Then, since the optical filter is formed by removing the film forming substrate, a plurality of interference filter layers corresponding to each color of RGB are formed at a time, and the interference filter layer is fixed to the transparent substrate later. In this case, the time required for film formation can be substantially reduced as compared with the case where films are sequentially formed on one transparent substrate, and the interference filter layer having a small weight is fixed, so that weight balance can be easily obtained and high speed can be achieved. An optical filter suitable for rotation can be obtained.

(2) Since the optical filter is formed by forming the interference filter layer into a shape corresponding to the optical path, the same effect as (1) is obtained, and the space for forming the interference filter layer is wasted. And the size and weight of the optical filter can be reduced.

(3) Since the optical filter is configured by providing a protective member for covering the interference filter layer, even when the optical filter is rotated at high speed, turbulence due to rotation can be reduced. Generation of noise can be suppressed, and peeling of the interference filter layer can be prevented. In addition, dirt and dust,
An optical filter that can be protected from scratches and the like and has a long life can be obtained.

(4) forming a film-forming base layer on the film-forming substrate, forming an interference filter layer on the film-forming base layer, cutting the interference filter layer together with the film-forming substrate, Forming an interference filter portion, fixing the interference filter portion to a predetermined portion of the transparent substrate, with the interference filter layer of the interference filter portion facing the transparent substrate, and Since the optical filter is manufactured by having a step of separating the film-forming base layer and the film-forming substrate after being fixed to the transparent substrate, the same effect as (1) can be obtained. In addition, when the interference filter layer is fixed to the transparent substrate, the shape of the interference filter layer is reliably maintained by the film-forming substrate. This Can be can be, obtain a high-precision optical filter with no deflection.

(5) forming a film-forming base layer on the film-forming substrate, forming an interference filter layer on the film-forming base layer, cutting the interference filter layer together with the film-forming substrate, Forming an interference filter portion, fixing the interference filter portion to a predetermined portion of the transparent substrate, with the interference filter layer of the interference filter portion facing the transparent substrate, and Since the optical filter is manufactured by having a step of separating the interference filter layer and the film-forming base layer after being fixed to the transparent substrate, the same effect as (1) can be obtained. At the same time, it is possible to further reduce the weight and obtain an optical filter with less unevenness.

(6) forming a film-forming base layer on the film-forming substrate, forming an interference filter layer on the film-forming base layer, cutting the interference filter layer together with the film-forming substrate, Forming an interference filter portion, fixing the interference filter portion to a predetermined portion of the transparent substrate, with the interference filter layer of the interference filter portion facing the transparent substrate, and Removing the film-forming base layer after being fixed to the transparent substrate to manufacture the optical filter.
The same effect as described above can be obtained.

(7) Since an optical filter is manufactured by forming the same type of interference filter layer for each film-forming substrate, a plurality of interference filter layers can be formed at one time, and the production efficiency can be improved. Can be improved.

(8) Since the optical filter is manufactured using a film-forming substrate as a hydrophilic material and a film-forming base layer as a hydrophobic plastic material, the bonding strength between the film-forming substrate and the film-forming base layer is reduced. Further, since the peeling becomes easy, the manufacturing process is stabilized, and the product yield can be improved.

(9) The optical filter is manufactured by increasing the bonding strength between the film forming substrate and the film forming base layer and weakening the bonding strength between the film forming base layer and the interference filter layer. Since the separation between the layer and the interference filter layer is facilitated, the same effect as (8) can be obtained.

(10) Since the optical filter is manufactured by using a photosensitive resist as the film-forming base layer, the film-forming base layer 3 can be easily removed.
The same effect as (8) can be obtained.

(11) Since the optical filter is manufactured by patterning the film-forming base layer into a predetermined shape and then forming an interference filter layer, the same effect as (2) can be obtained. The interference filter layer can be processed into any shape, and the number of manufactured interference filter portions in one film formation can be increased.

[Brief description of the drawings]

FIG. 1 is a diagram showing a manufacturing process of an optical filter according to a first embodiment of the present invention.

FIG. 2 is a plan view of the optical filter according to the first embodiment of the present invention.

FIG. 3 is a front view of the optical filter according to the first embodiment of the invention.

FIG. 4 is a diagram showing a manufacturing process of the optical filter according to the second embodiment of the present invention.

FIG. 5 is a plan view of a film-forming base layer pattern according to a second embodiment of the present invention.

FIG. 6 is a plan view of an interference filter unit according to a second embodiment of the present invention.

FIG. 7 is a plan view of an optical filter according to a second embodiment of the present invention.

FIG. 8 is a diagram showing a manufacturing process of the optical filter according to the third embodiment of the present invention.

FIG. 9 is a diagram showing a manufacturing process of the optical filter according to the fourth embodiment of the present invention.

FIG. 10 is a partial sectional view of an optical filter according to a fifth embodiment of the present invention.

[Explanation of symbols]

1a, 1b, 1c: film-forming substrate, 3, 3g: film-forming base layer, 5a, 5b, 5c: interference filter layer,
7: Optical adhesive, 11a, 11a ', 11b', 11
c ', 11ap, 11ap', 11bp ', 11c
p ', 11g, 11g', 11h ', 11i': interference filter portion, 15a, 15b: protective member, 1
7: silicon rubber, 31: transparent substrate.

Claims (11)

[Claims] 1. A plate-shaped transparent substrate that transmits light is divided into a plurality of regions, and an interference filter layer composed of a dielectric multilayer film separately formed on a film forming substrate is fixed to each region. An optical filter, wherein the substrate for film formation is removed. 2. The optical filter according to claim 1, wherein said interference filter layer is formed in a shape corresponding to an optical path. 3. The optical filter according to claim 1, further comprising a protection member that covers the interference filter layer. 4. The method for manufacturing an optical filter according to claim 1, wherein: (a) forming a film-forming base layer on a film-forming substrate; and (b) forming an interference filter layer on the film-forming base layer. (C) cutting the interference filter layer together with the film formation substrate to form an interference filter portion;
(D) fixing the interference filter portion to a predetermined portion of the transparent substrate with the interference filter layer of the interference filter portion facing the transparent substrate; and (e) fixing the interference filter portion to the transparent substrate. Separating the film-forming base layer and the film-forming substrate after being fixed to the substrate. 5. The method for manufacturing an optical filter according to claim 1, wherein: (a) forming a film-forming base layer on a film-forming substrate; and (b) forming an interference filter layer on the film-forming base layer. (C) cutting the interference filter layer together with the film formation substrate to form an interference filter portion;
(D) fixing the interference filter portion to a predetermined portion of the transparent substrate with the interference filter layer of the interference filter portion facing the transparent substrate; and (e) fixing the interference filter portion to the transparent substrate. Peeling the interference filter layer and the film-forming base layer after being fixed to the optical filter. 6. The method of manufacturing an optical filter according to claim 1, wherein: (a) forming a film-forming base layer on a film-forming substrate; and (b) forming an interference filter layer on the film-forming base layer. (C) cutting the interference filter layer together with the film formation substrate to form an interference filter portion;
(D) fixing the interference filter portion to a predetermined portion of the transparent substrate with the interference filter layer of the interference filter portion facing the transparent substrate; and (e) fixing the interference filter portion to the transparent substrate. Removing the film-forming base layer after being fixed to the optical filter. 7. The same type of interference filter layer is formed for each of the film forming substrates.
A method for producing the optical filter according to the above. 8. The substrate for film formation is made of a hydrophilic material,
The method for manufacturing an optical filter according to claim 4, wherein the film-forming base layer is made of a hydrophobic plastic material. 9. The method according to claim 5, wherein the bonding strength between the film forming substrate and the film forming base layer is increased, and the bonding strength between the film forming base layer and the interference filter layer is weakened. Manufacturing method of optical filter. 10. The method for manufacturing an optical filter according to claim 6, wherein said film-forming base layer is a photosensitive resist. 11. The optical filter according to claim 4, wherein the interference filter layer is formed after patterning the film-forming base layer into a predetermined shape. Manufacturing method.