JP2002241111A - Apparatus for detecting abnormality of facility for producing high pressure gaseous nitrogen - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that abnormalities may be generated also in high-pressure gaseous nitrogen due to the abnormalities of various apparatuses, such as a nitrogen gas generating device and a boost valve and that these abnormalities may pose a serious problem to an equipment which uses the gaseous nitrogen when the abnormality relates to the purity of the nitrogen gas. SOLUTION: In this abnormality detection apparatus of the high-pressure facilities for producing high-pressure gaseous nitrogen 104 by boosting gaseous nitrogen 103 by sending first compressed air 101 into a boost valve 61 which constitutes a piston 63, an oxygen densitometer 75 for measuring the concentration of gaseous oxygen contained in the high-pressure gaseous nitrogen 104 is disposed at one of places where the high-pressure gaseous nitrogen 104 of a flow channel on the downstream of the boost valve 61 is being exhausted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for detecting an abnormality in a high-pressure nitrogen gas production facility. More specifically, the present invention sends nitrogen gas and compressed air to a booster valve constituting a piston. The present invention relates to a technique for detecting an abnormality in equipment when producing high-pressure nitrogen gas.

[0002]

2. Description of the Related Art As a conventional technique relating to an abnormality detection apparatus for a nitrogen gas production facility having a high pressure, an air tank, which is the same equipment as the apparatus used in the present invention, uses compressed air produced by an air compressor. And a refrigeration air dryer, an air filter, a micro mist filter, an activated carbon filter, a nitrogen gas generator, and if necessary, a pressure increasing valve, a tank, a pressure reducing valve, a flow meter, and an outlet valve. Nitrogen gas was produced and used by passing it through an existing apparatus.

In order to more efficiently produce nitrogen gas, a heater for increasing the temperature of the compressed air is often provided upstream of the nitrogen gas generator. On the other hand, when producing high-pressure nitrogen gas, a method of sending compressed air and nitrogen gas to a pressure-intensifying valve has also been adopted.

There have been various types of nitrogen gas generators, such as a system forming a gas separation membrane, a system forming an adsorbent, and a deep cooling method. Further, a sealed nitrogen gas, liquid nitrogen, and the like have been used.

[0005]

However, such a conventional abnormality detection apparatus for a high-pressure nitrogen gas production facility has the following problems.

First, abnormalities may be observed in the high-pressure nitrogen gas produced by the nitrogen gas producing equipment due to abnormalities in various devices such as the nitrogen gas generator and the pressure intensifier valve.

Second, when the abnormality relates to the purity of nitrogen gas, it may be a fundamental problem for equipment using nitrogen gas.

Third, even when the abnormality relates to the pressure of nitrogen gas, there is a possibility that the problem becomes a fundamental problem for equipment using nitrogen gas. An object of the present invention is to solve such a problem.

[0009]

According to the present invention, a piston 63 is provided.
The pressure of the nitrogen gas 103 is increased by sending the first compressed air 101 to the pressure increasing valve 61 constituting the high pressure nitrogen gas 1.
In the abnormality detection device for the nitrogen gas producing equipment having a high pressure for producing the nitrogen gas 104, the high pressure nitrogen gas 104 is included in any place of the flow path downstream of the pressure intensifying valve 61 where the high pressure nitrogen gas 104 is discharged. An oxygen concentration meter 75 for measuring the concentration of the oxygen gas contained therein, and the concentration measured by the oxygen concentration meter 75 is a reference value or the oxygen gas contained in the nitrogen gas 103. The abnormality is determined by comparing the concentration of the pressure with the oxygen concentration meter 54 for measuring the concentration of the oxygen.
A pressure gauge 76 for measuring the pressure of the high-pressure nitrogen gas 104 is provided at any place in the downstream flow path where the high-pressure nitrogen gas 104 is discharged. The pressure measured in the step is to judge an abnormality by comparing it with a reference value. If at least one of the oxygen concentration meter 75 and the pressure gauge 76 indicates an abnormal value, an alarm is issued. By solving the above problem, the above-mentioned problem has been solved.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an abnormality detection apparatus for a nitrogen gas production facility having a high pressure according to the present invention will be described in detail with reference to the drawings. Here, FIG. 1 is a view showing the present invention, FIG. 2 is a view showing another embodiment of the present invention, and FIG. 3 is a view showing a structure of a booster valve used in the present invention. FIG.

In FIG. 1, reference numeral 1 denotes an air compressor for producing compressed air. Although not specifically shown in FIG. 1, the air compressor comprises a compressor main body and an electric motor, and an air intake formed in the compressor main body. The atmosphere 91 is sucked in from the air.

Further, a pipe is connected to the air compressor 1, and the pipe is connected to an air tank 2 for storing compressed air, a refrigeration air dryer 3 for drying the compressed air by freezing, and a compressed air. By installing an air filter 4 for removing foreign matter in the air, a micro mist filter 5 for removing small foreign matter in the compressed air, and an activated carbon filter 6 for removing an unpleasant odor in the compressed air, the dried foreign matter is removed. After the first compressed air 101 passes through a compressed air on-off valve 81 for opening and closing the flow path, a pressure reducing valve 82 for reducing the pressure, and a pressure gauge 83 for measuring the pressure, the pressure increasing valve 61 is a pressure increasing valve. 61 SUP port 62
sent to a. Similarly, the second compressed air 102 from which foreign matter has been removed by drying is sent to the nitrogen gas generator 51. In this case, the pressure of the first compressed air 101 is adjusted to a pressure lower than the pressure of the nitrogen gas 103 generated by the nitrogen gas generator 51 by the function of the pressure reducing valve 82.

The micro mist filter 5 has a differential pressure gauge 7 for judging dirt, a drain valve 9 for discharging generated drain, and a drain collected when a certain amount or more of drain is collected in the micro mist filter 5. Is connected to an auto drain trap 8 that discharges water. Therefore, the replacement of the filter element, not shown, is properly managed, and the accumulated drain can be discharged. Here, the first compressed air 101 and the second compressed air 102 are branched and supplied from the same pipe.

Further, from the point where the first compressed air 101 and the second compressed air 102 are branched, a pipe for supplying another compressed air is branched to operate various pneumatic devices such as an air cylinder and an air motor. You may make it do.
In this case, the branch is not only one line, but also two lines,
It can be operated with three lines or more if possible.

Although not specifically shown in FIG. 1, the lower portions of these devices 2, 3, 4, and 6 are generated by exposing water vapor in compressed air. The drain drain valve or the auto drain trap for discharging the drain may be connected to both or only one of them. It is also conceivable that one or both of the drain valve 9 and the automatic drain trap 8 connected to the micro mist filter 5 are not provided. Further, the air tank 2 may be integrated with the air compressor 1 or may be located elsewhere.

Here, the refrigeration air dryer 3 exposes water vapor by cooling to dry compressed air. However, other methods such as a method using a hollow fiber and a method using a desiccant may be used. In any case, by providing a dryer for drying the compressed air, a problem due to moisture is prevented from occurring in subsequent various devices.

The performance of each of the filters 4, 5, and 6 will be described in more detail. The air filter 4 has a capability of removing a large foreign substance of 3 μm or more existing in compressed air. It is desirable that the activated carbon filter 6 has a capability of removing a small foreign substance of 0.01 μm or more existing in the compressed air, and the activated carbon filter 6 has a capability of removing an odor in the compressed air.

However, the capacity of the air filter 4 and the micro mist filter 5 does not need to be limited to 3 μ and 0.01 μ, but two types of filters 4 and 5 having considerably different capacities can be continuously used. It is important.

On the other hand, as the nitrogen gas generator 51, there are various methods such as a method forming a gas separation membrane, a method forming an adsorbent, and a deep cooling method. In this case, although not specifically described in FIG. 1, a gas separation membrane constituted by a hollow fiber or the like is used, and the oxygen-rich gas 95 is separated and discharged from the compressed air and remains. The IN port 62c of the pressure-intensifying valve 61 serving as a pressure-intensifying means
A nitrogen gas on-off valve 52 for opening and closing a flow path, a pressure gauge 53 for measuring pressure, and an oxygen concentration meter 54 for measuring oxygen concentration.
After that, it is supplied. The oxygen-rich gas 95 can be used as oxygen gas. Other examples of the nitrogen gas generator 51 include a device in which nitrogen gas is sealed in a cylinder, liquid nitrogen, and the like.

Therefore, although not specifically described in FIG. 1, an oxygen pipe is connected downstream of the oxygen-rich gas 95, and the oxygen-rich gas 95 flowing through the oxygen pipe 95 has a pressure which can be used as oxygen gas. 05MPa to 0.3M
A pressure-intensifying valve for increasing the pressure to Pa and an oxygen-rich gas 95 for which the pressure has been increased.
It is also conceivable to arrange the oxygen tanks for storing all the components in the order described.

Incidentally, it is desirable to increase the pressure of the oxygen gas to 0.05 MPa to 0.3 MPa. The reason is that the oxygen gas cannot be even supplied to the place where it is used unless it reaches a certain pressure.

In this case, a drain valve for discharging drain containing oil generated from the oxygen-rich gas 95 and accumulated in the oxygen tank is preferably provided below the oxygen tank. By doing in this way, it is also possible to easily take out the pressurized oxygen from the oxygen tank.

Next, the structure of the pressure increasing valve 61 as the pressure increasing means 61 will be described. First, the first compressed air 10
SUP port 62a for receiving the first compressed air 1
EXH port 62b for discharging nitrogen gas 103
Port 62c for receiving the high pressure nitrogen gas 10
OUT port 62d for discharging the P.4 is formed.

Here, as seen in FIG.
Reference numeral 1 denotes a pressure-intensifying valve main body 62 including a chamber A 62A, a central portion 62B, and a chamber 62C, a piston 63 including a piston 63A, a piston rod 63B, and a piston filter 63C, a governor 64, a switching valve 65, and four sets. Check valve 66
A, 66B, 66C, and 66D.
Here, a piston rod 63B is formed slidably in the center of a central portion 62B of the pressure-intensifying valve body 62, and a governor 64, a switching valve 65, and four sets of check valves 66A, 66B, 66C, 66D. And various pipes are housed therein.

The piston 63 has a piston 63A.
While the piston operates the full stroke of the chamber 62A, the piston filter 63C is arranged to operate the full stroke of the chamber 62C. That is, the stroke of the chamber A 62A and the stroke of the chamber B 62C are set to be the same.

Further, during the operation of the piston 63A inside the chamber 62A, the piston 63A
The driving chamber 62A on the opposite side of the piston rod 63B and the pressure-intensifying chamber 62AB on the piston rod 63B side are divided into two. When the piston filter 63C operates the chamber 62C, the piston filter 63C removes the chamber 62C from the piston rod 62C. The drive chamber B 62CB on the side opposite to the drive chamber 63B and the pressure increasing chamber B 62CA on the piston rod 63B side are divided.

The pressure increasing valve 61 shown in FIG. 3 has the same cross-sectional area of the piston 63A and the cross-sectional area of the piston filter 63C. On the other hand, although not specifically described in FIG. 3, as another structure of the pressure increasing valve 61, the sectional area of the piston 63 </ b> A and the sectional area of the piston filter 63 </ b> C are different.
A check valve 66A connected to the IN port 62c and a check connected to the OUT port 62d are exchanged so that the booster chamber A 62AB is used as the drive chamber B 62CB and the drive chamber B 62CB is used as the booster chamber A 62AB. The valve 66C is connected to the pressure-intensifying chamber a 62AB, and the IN port 62c is connected.
By connecting the check valve 66B connected to the pump port 66D and the check valve 66D connected to the OUT port 62d to the pressure-intensifying chamber 62CA, it is possible to change the pressure characteristic and the charging characteristic mainly on the flow rate characteristic.

Incidentally, the nitrogen gas ranges from 1 MPa to 1 MPa.
It is desirable to increase the pressure to 0 MPa. The reason is that if nitrogen gas is not at a certain pressure, air may be replaced with nitrogen gas to prevent oxidation, resin products may be foamed with nitrogen gas, or the flavor and color of food may be reduced. Even if nitrogen gas is sealed in the pack with shavings, tea, black tea, or coffee to retain the scent, the purpose cannot be achieved, and in some cases, it may be desirable to use it in a closed cylinder. Therefore, depending on the purpose of use, the pressure may be slightly higher than the atmospheric pressure, and in consideration of the fact that it is sealed in an ultra-high pressure cylinder, 20 MPa may be considered. As one utilization method, when nitrogen gas is used in a laser beam machine, if the pressure of the nitrogen gas is 1.5 MPa, an effect of smoothing the cut during processing can be expected.

A tank 71 disposed downstream of the pressure increasing valve 61 is provided with a pressure increasing nitrogen 97
Although not specifically shown in FIG. 1 at the lower bottom of the tank 71, it is generated by being exposed from the high-pressure nitrogen gas 104 and is formed in the tank 71. It is conceivable to provide a drain valve for discharging drain containing oil accumulated in the tank to the outside.

An oxygen concentration meter 75 for measuring the oxygen concentration of the high-pressure nitrogen gas 104 and a pressure gauge 76 for measuring the pressure of the high-pressure nitrogen gas 104 stored in the tank 71 are provided downstream of the tank 71. , A pressure reducing valve 72 for reducing the pressure of the high-pressure nitrogen gas 104 stored in the tank 71 to a pressure required when the nitrogen gas 104 is specifically used as the pressure-increasing nitrogen 97,
A flow meter 73 for measuring the amount of flowing nitrogen and an outlet valve 74 for opening and closing the flow of the pressurized nitrogen 97 are provided.

Here, the SUP port 62a of the pressure increasing valve 61
Immediately before the pressure gauge 83 for measuring the pressure of the first compressed air 101, immediately before the IN port 62c, a pressure gauge 53 for measuring the pressure of the nitrogen gas 103 and an oxygen concentration meter 54 for measuring the oxygen gas concentration, High pressure nitrogen gas 1 immediately after tank 71
An oxygen concentration meter 75 for measuring the oxygen gas concentration and a pressure gauge 76 for measuring the pressure are provided. In this case, these devices 53, 54, 75, 76, 83 and various on-off valves 5
It is also conceivable to use an electric type including an electromagnetic type or connect a control device (not shown) so that 2, 74 and 81 can be automatically controlled together.

When the nitrogen gas generator 51 is liquid nitrogen or the like that does not require compressed air, the second compressed air 102
No circuit is required. Regarding the positions of the oximeter 75 and the pressure gauge 76 for measuring the high-pressure nitrogen gas 104,
The pressure may be between the pressure increasing valve 61 and the tank 71. Furthermore,
Pressure gauges 53 and 83 and oxygen concentration meter 54 immediately before the pressure increasing valve 61
May not be provided partially or entirely.

The method and apparatus for producing a high-pressure nitrogen gas according to the present invention are configured as described above, and the operation thereof will be described below.

First, when the power supply of the electric motor is turned on and the air compressor 1 is operated, the air 91 is sucked from the air intake, and compressed air is produced. Therefore, the produced compressed air is stored in a closed air tank 2. In this case, although not specifically shown, various pneumatic devices are operated at the end of any branched pipe to require compressed air, or the pressure increasing valve 61 and the nitrogen gas generator 51 are provided. When the pressure-enhanced nitrogen 95 is required at the end of the piping, or when the pressure-enhanced oxygen is required at the end of the oxygen piping through which the oxygen-rich gas 95 flows, the compressed air flows out of the air tank 2 and the refrigeration air dryer. 3
By passing through the air filter 4, the micro mist filter 5, and the activated carbon filter 6, the first compressed air 101, the second compressed air 102, and other compressed air from which foreign matter has been removed by drying can be obtained. I have. At first, the compressed air on-off valve 81, the nitrogen gas on-off valve 51, and the outlet valve 74 are closed.

When the nitrogen gas on-off valve 52 is opened, the second compressed air 102 sent to the nitrogen gas generator 51 separates the nitrogen gas 103 and separates the oxygen-rich gas 9.
5 and the separated nitrogen gas 103 is supplied to the pressure increasing valve 6
It is sent to the IN port 62c formed in the first port.

The nitrogen gas 103 is fed from the IN port 62c formed in the pressure increasing valve 61,
The check valves 66A and 66B communicate with the pressure-intensifying chambers 62AB and 62CA.

Next, after opening the compressed air on-off valve 81 to flow the first compressed air 101 to the pressure increasing valve 61, the outlet valve 7
When the valve 4 is opened, the first compressed air 101 is supplied to the drive chamber 62CB via the governor 64 and the switching valve 65. Then, the first compressed air 101 in the drive chamber 62CB
Then, the nitrogen gas 103 in the pressure intensifying chamber 62AB acts on the piston 63 to increase the pressure of the nitrogen gas 103 in the pressure intensifying chamber 62CA. Therefore, the nitrogen gas 103 increased in pressure by the operation of the piston 63 is sent from the check valve 66D to the OUT port 62d formed in the pressure increasing valve 61.

When the piston 63 reaches the end of the stroke, the switching valve 65 switches the driving chamber 62CB to exhaust,
The driving chamber 62AA is switched to the supply state. Then
The piston 63 is inverted, and the pressure of the nitrogen gas 103 in the booster chamber 62AB is increased by the pressure of the booster chamber 62CA and the drive chamber A 62AA.
Send to UT port 62d. In this manner, by repeating the above, the IN port formed on the pressure increasing valve 61 is connected to the OUT port 62d formed on the pressure increasing valve 61.
The high-pressure nitrogen gas 104 having a higher pressure than the port 62c is continuously produced.

In this case, the O formed in the pressure increasing valve 61
The pressure of the UT port 62d can be arbitrarily set by operating the handle of the governor 64 mechanism that feeds back the pressure. The same operation as described above is also performed when the cross-sectional areas of the pistons 63A and 63C are changed and the positions of the pressure-intensifying valve 62AB and the drive chamber 62CA are interchanged.

By always keeping the pressure of the nitrogen gas 103 higher than the pressure of the first compressed air 101, the first compressed air 101 leaks toward the nitrogen gas 103 in the pistons 63A and 63C. Thus, high-purity high-pressure nitrogen gas 104 can be obtained without any problem.

The reason why the pressure of the nitrogen gas 103 is increased in this way is that if the nitrogen gas 103 is not at a certain pressure, even if the air is replaced with nitrogen gas to prevent oxidation, the resin product can be replaced with nitrogen gas. This is because even if foaming is used, even if nitrogen gas is sealed in a pack of shaved knots, tea, black tea or coffee in order to maintain the flavor, color and aroma of the food, the object cannot be achieved. In addition, nitrogen gas 10
This is because it is more convenient to transport 3 in a cylinder.

Finally, the high-pressure nitrogen gas 104 increased in pressure by the pressure-intensifying valve 61 is stored in the tank 71 so that pulsation is generated in the process of supplying the increased-pressure nitrogen 97 to the equipment to be used. It is preventing. Further, after the high-pressure nitrogen gas 104 from the tank 71 is reduced to a pressure suitable for use as the increased-pressure nitrogen 97 by the pressure reducing valve 72,
It is designed to be used as pressurized nitrogen 97 via a flow meter 73 and an outlet valve 74.

On the other hand, the oxygen-rich gas 95 discharged from the nitrogen gas generator 51 is fed into an oxygen pipe connected to the nitrogen gas generator 51, although not specifically shown in FIG. It is also conceivable that the pressure is increased to a predetermined pressure, stored in a single oxygen tank, and used as pressure-increasing oxygen if necessary.

Here, the pressure of the nitrogen gas 103 immediately before flowing into the pressure increasing valve 61 is measured by the pressure gauge 53, the pressure of the first compressed air 101 is measured by the pressure gauge 83, and the results are compared with each other. The pressure of one compressed air 101 is 10
If it is confirmed that the pressure is higher than the pressure of 3, the signal may be sent to the various on-off valves 52, 74 and 81 to close them. Furthermore, by measuring the pressure of the high-pressure nitrogen gas 104 with the pressure gauge 76 and comparing it with a reference value, it is possible to check for an abnormality such as breakage of the pressure-intensifying valve 61 and intrusion of air.

Further, both the nitrogen gas 103 produced by the nitrogen gas generator 51 and the high-pressure nitrogen gas 104 after the nitrogen gas 103 has passed through the pressure increasing valve 61 and the tank 71 are converted by the oxygen concentration meters 54 and 75. By measuring and comparing the oxygen concentration, if the two are almost the same concentration, there is no abnormality in the pressure increasing valve 61 or the tank 71 and the tank 71
When the oxygen concentration of the high-pressure nitrogen gas 104 after passing through the high pressure is high, an abnormality such as leakage has occurred in the pressure increasing valve 61 or the tank 71, so that the various on-off valves 52, 74, 8
It is also conceivable to manually close 1 or to close it by sending a signal. In addition, high pressure nitrogen gas 1
By measuring only the oxygen concentration of 04 with the oxygen concentration meter 75 and comparing it with the reference value, it is possible to check the pressure increasing valve 61 and sometimes the nitrogen gas generator 51 for abnormality.

It should be further emphasized that the feature of the present invention is that the first compressed air 101 is used as an energy source for increasing the pressure of the nitrogen gas 103 into a high-pressure nitrogen gas 104. Therefore, the booster valve 6
1 has a SUP port 62a for receiving the first compressed air 101 and an EXH port 6 for discharging the first compressed air 101.
2b and an IN port 62c for receiving the nitrogen gas 103 and an OUT port 62d for discharging the high-pressure nitrogen gas 104. This makes it possible to produce the high-pressure nitrogen gas 104 without wasting the expensive nitrogen gas 103 wastefully.

On the other hand, when the use of the pressurized nitrogen 97 is stopped, the outlet valve 74, the compressed air on-off valve 81, and the nitrogen gas on-off valve 52 must be closed in the order described to improve purity and pressure. It is necessary to produce high nitrogen gas.

Here, when either the oxygen concentration meter 75 or the pressure gauge 76 disposed downstream of the pressure increasing valve 61 indicates an abnormal value, an alarm such as a buzzer or a patrol light is issued, or the May be stopped.

FIG. 2 shows another embodiment of the present invention. In this case, the difference between this alternative embodiment and the embodiment shown in FIG.
And the second compressed air 102 are separated into separate air compressors 1 and 2
That is what is created in 1.

That is, the first compressed air 101 starts from the air compressor 1 and has an air tank 2 for storing the compressed air, a refrigeration air dryer 3 for drying the compressed air by freezing it, and foreign matter in the compressed air. The filter is produced by passing through an air filter 4 for removing air, a micro mist filter 5 for removing small foreign matter in the compressed air, and an activated carbon filter 6 for removing an unpleasant odor in the compressed air, and is the same as the embodiment shown in FIG. Is sent to the pressure increasing valve 61 in the same manner.

The second compressed air 102 starts from the air compressor 21, an air tank 22 for storing the compressed air, a refrigeration air dryer 23 for drying the compressed air by freezing it, and foreign matter in the compressed air. , A micro mist filter 25 for removing small foreign matter in the compressed air, and an activated carbon filter 26 for removing an odor in the compressed air.

The nitrogen gas generator 51, the pressure intensifier valve 51, and the subsequent devices are the same as those of the previously described embodiment, and therefore, detailed description is omitted.

Regarding the air compressor 21, the air tank 22, the refrigeration air dryer 23, the air filter 24, the micro mist filter 25, and the activated carbon filter 26, apart from their abilities, they have almost the same functions. You can think of it as

As described above, the reason why the first compressed air 101 and the second compressed air 102 are to be produced separately by the two air compressors 1 and 21 is that the flow rate and the pressure of the first compressed air 101 and the second compressed air 102 are different. Is easily controlled according to the situation.

[0055]

As is apparent from the above description, the present invention has the following effects.

First, by measuring the oxygen concentration of the high-pressure nitrogen gas created by the pressure-intensifying valve, it has become possible to detect an abnormality in the nitrogen gas production equipment.

Second, by comparing the measurement result of the oxygen concentration with a reference value or the concentration of oxygen fed into the pressure increasing valve, the accuracy of detecting an abnormality can be further improved.

Third, by measuring the pressure of the high-pressure nitrogen gas created by the pressure-intensifying valve, and comparing the measured result with a reference value, it is possible to detect an abnormality in the nitrogen gas production equipment. became.

Fourth, an alarm is generated when at least one of the high-pressure nitrogen gas produced by the pressure-intensifying valve indicates an abnormal value based on the results of the oxygen concentration measurement and the pressure measurement.
It is now possible to automatically handle abnormalities.

[Brief description of the drawings]

FIG. 1 shows the present invention.

FIG. 2 is a diagram showing another embodiment of the present invention.

FIG. 3 is a diagram showing a structure of a pressure boosting valve used in the present invention.

[Explanation of symbols]

 1 Air compressor 2 Air tank 3 Refrigeration air dryer 4 Air filter 5 Micro mist filter 6 Activated carbon filter 7 Differential pressure gauge 8 Auto drain trap 9 Drain valve 21 Air compressor 22 Air tank 23 Refrigeration air dryer 24 Air filter 25 Micro mist filter 26 Activated carbon filter 51 Nitrogen gas generator 52 ... Nitrogen gas on-off valve 53 ... Pressure gauge 54 ... Oxygen concentration meter 61 ... Pressure increasing valve (pressure increasing means) 62 ... Pressure increasing valve main body 62A ...・ Room a 62AA ・ ・ ・ Drive room a 62AB ··· Pressure booster chamber 62B ···· Central portion 62C ··· Room B 62CA ··· Pressure booster chamber B 62CB ··· Drive chamber B 62a ··· SUP port 62b ··· EXH port 62c ····· IN port 62d ···· OUT port 63 ····· Piston 63A ···· Piston 63B ···· Piston rod 63C ···· Piston filter 64 ······ Governor 65 · ··· Switching valve 66A ··· Check valve 66B ··· Check valve 66C ··· Check valve 66D ··· Check valve 71 ····· Tank 72 ···· Pressure reducing valve 73 ······ Flow meter 74 ······ Outlet valve 75 ··········································································· Pressure reducing valve 83 ····· Pressure gauge 91 ····· Large 95 ... Oxygen-rich gas 97 ... Pressurized nitrogen 101 ... First compressed air 102 ... Second compressed air 103 ... Nitrogen gas 104 ... High-pressure nitrogen gas

Claims (4)

[Claims] 1. A high-pressure nitrogen gas (104) by increasing the pressure of a nitrogen gas (103) by sending first compressed air (101) to a pressure-intensifying valve (61) constituting a piston (63).
In the abnormality detecting device for a nitrogen gas producing facility having a high pressure, the high-pressure nitrogen gas is discharged to any place where the high-pressure nitrogen gas (104) is discharged in a flow path downstream of the pressure intensifying valve (61). An abnormality detection device for a nitrogen gas production facility having a high pressure, comprising an oxygen concentration meter (75) for measuring the concentration of oxygen gas contained in (104). 2. The concentration measured by the oximeter (75) is compared with a reference value or the concentration of an oximeter (54) for measuring the concentration of oxygen gas contained in the nitrogen gas (103). The abnormality detecting apparatus for a high-pressure nitrogen gas production facility according to claim 1, wherein the abnormality is determined by performing the following. 3. A flow path downstream of the pressure-intensifying valve (61), where the high-pressure nitrogen gas (104) is discharged.
3. The abnormality detecting device according to claim 1, further comprising a pressure gauge configured to measure a pressure of the high-pressure nitrogen gas. 4. 4. The pressure measured by the pressure gauge (76) is:
An abnormality is determined by comparing with a reference value, and an alarm is issued when at least one of the oxygen concentration meter (75) and the pressure gauge (76) indicates an abnormal value. The abnormality detecting device for a high-pressure nitrogen gas production facility according to claim 3, wherein: