JP2002217273A5 - - Google Patents
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- Publication number
- JP2002217273A5 JP2002217273A5 JP2001010833A JP2001010833A JP2002217273A5 JP 2002217273 A5 JP2002217273 A5 JP 2002217273A5 JP 2001010833 A JP2001010833 A JP 2001010833A JP 2001010833 A JP2001010833 A JP 2001010833A JP 2002217273 A5 JP2002217273 A5 JP 2002217273A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001010833A JP2002217273A (ja) | 2001-01-18 | 2001-01-18 | 縦型バッチ処理装置並びに移載機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001010833A JP2002217273A (ja) | 2001-01-18 | 2001-01-18 | 縦型バッチ処理装置並びに移載機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002217273A JP2002217273A (ja) | 2002-08-02 |
| JP2002217273A5 true JP2002217273A5 (https=) | 2008-03-13 |
Family
ID=18878076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001010833A Withdrawn JP2002217273A (ja) | 2001-01-18 | 2001-01-18 | 縦型バッチ処理装置並びに移載機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002217273A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100946442B1 (ko) * | 2002-10-10 | 2010-03-10 | 하이디스 테크놀로지 주식회사 | 기판 적재용 카세트 |
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2001
- 2001-01-18 JP JP2001010833A patent/JP2002217273A/ja not_active Withdrawn