JP2002213943A - System and method for measuring surface property - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the surface property of a measured object more accurately in a short time compared with the prior art, by using properly a measuring condition in the measurement. SOLUTION: A range for conducting premeasurement for a face to be measured is determined at first by aligning by vidual observation or a coordinate value (S21). Then, an outline for the premeasuring range is measured in a measuring condition (rough sampling pitch and fast measuring speed) for outline measurement (S22). Then, an outline shape of a surface of the object to be measured is displayed on screen based on premeasured data obtained by the premeasurement (S23). The range for carrying out regular measurement is selected and determined based on the displayed premeasured data (S24) on the screen. Then, the roughness of the regular measurement range is measured under the condition for measuring the roughness (fine sampling pitch.slow measuring speed) (S25). Regular measurement data provided by this manner is displayed (S26) on the screen.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture measuring device for detecting and displaying the surface texture of an object to be measured, and more particularly, to a surface texture measuring system capable of designating a measurement range of the main measurement from preliminary measurement data. About the method.

[0002]

2. Description of the Related Art The surface properties of an object are in the order of small change.
It is called roughness, undulation, contour (shape) and the like. The surface texture measuring device detects the surface texture of such an object with high accuracy using a contact type or non-contact type detector. For example, there is a surface texture measuring device using a contact-type detector (a stylus) that can measure a full stroke of 0.5 mm at a resolution of several thousandths. Such a high-resolution measuring instrument has a plurality of measurement ranges with different magnifications, and the measurement range can be selected so that the range to be measured can be displayed with as large an amplitude as possible. Among such surface texture measuring instruments, there is a dual-purpose measuring instrument capable of measuring both roughness and contour.

[0003]

However, in the case of a dual-purpose measuring instrument, a problem may arise because the number of data points required for roughness analysis and contour analysis is different. That is, although a large number of data points is required for analyzing the roughness of the object surface, the contour analysis requires less data points than the roughness analysis.

FIG. 7 is a flow chart of a method for measuring roughness in a conventional dual-purpose measuring instrument, and FIG. 8 shows details of a method for acquiring data points. For example, when simultaneously measuring the roughness of a part of the area A of the measured object having a total length W of 50 mm and the contour of the entire measured object, first, a range to be measured of the measured object 6 is selected (S11). Next, roughness measurement is performed on the entire selected measurement range under the measurement conditions for roughness measurement (S12). Then, the obtained measurement data is displayed on the screen (S13). In this case, assuming that the cut-off length λc is 0.8 mm and the sampling pitch Pr is 0.5 μm, the total number of data points to be acquired is 50/0. 0005 = 100,000 points / 5
The number of data becomes enormous, that is, 0 mm, which imposes an unnecessary load on the data processing system. In addition, since the measurement conditions are for measuring roughness, measurement at a lower measurement speed is required, and as a result, the time required for the entire measurement is increased. As described above, although the target area of the roughness measurement is a part of the surface of the measurement object, there is a waste that the contour of the entire measurement object is measured at the fine sampling pitch Pr for the roughness measurement. I will.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and provides a surface texture which can realize the surface texture measurement of a measured object more accurately and in a shorter time by appropriately using measurement conditions at the time of measurement. It is an object to provide a measurement system and method.

[0006]

According to the present invention, there is provided a surface texture measuring system for performing a contour measurement for an arbitrary preliminary measurement range of a surface to be measured as a preliminary measurement under measurement conditions for contour measurement. Means for displaying the preliminary measurement data obtained by the measurement on the screen, means for selecting / determining an arbitrary main measurement range based on the preliminary measurement data displayed on the screen, and roughness for the main measurement range as the main measurement. It is characterized by comprising: means for performing roughness measurement under measurement conditions for measurement; and means for displaying main measurement data obtained by the main measurement on a screen.

Further, another surface texture measuring system according to the present invention comprises a surface texture measuring device main body for detecting a surface texture of an object to be measured, a surface texture measuring device main body, and a surface texture measuring device main body. Control means for executing predetermined processing on the input measurement value, input means for inputting necessary information to the control means, and display means for displaying a processing result in the control means, The control means includes:
Driving the surface texture measuring device main body to measure the contour of the measurement target based on the measurement condition for the contour measurement specified for the specified preliminary measurement range of the measurement target.
Controlling to obtain preliminary measurement data, processing to display the preliminary measurement data obtained by the contour measurement on the display means, and measuring the measured data designated for the preliminary measurement data displayed on the display means. A process of driving and controlling the surface texture measuring device main body to perform roughness measurement of the object to be measured based on measurement conditions for roughness measurement specified for the main measurement range of the object, and obtaining main measurement data; Displaying the main measurement data obtained by the roughness measurement on the display unit. The input unit transmits a preliminary measurement range and a contour measurement range of the object to be measured to the control unit. And the measurement conditions for the main measurement range and the roughness measurement of the measured object with respect to the preliminary measurement data displayed on the display means, and the display means Displaying the preliminary measurement data acquired by the control means, the main measurement range designated by the input means for the preliminary measurement data, and the main measurement data acquired by the control means. And

According to the present invention, in the preliminary measurement, the contour of the measured object is acquired as preliminary measurement data using the measurement conditions for contour measurement, and the rough measurement is performed on the main measurement range selected based on the preliminary measurement data. Since the roughness measurement is performed according to the measurement conditions for the roughness measurement, the roughness measurement of the desired portion can be accurately performed, and the roughness measurement can be performed only in the region where the roughness measurement is desired. In addition, it is possible to realize a surface texture measuring system capable of eliminating an extra measuring time and reducing a load on a data processing system.

The means for selecting and determining the main measurement range includes:
The provision of the means for designating the main measurement range based on the position information on the screen with respect to the preliminary measurement data displayed on the screen makes it possible to easily designate the main measurement range.

In the case where the contour of the preliminary measurement data includes a specific shape related to the actual measurement, the means for selecting and determining the actual measurement range includes performing an outline analysis on the preliminary measurement data. Means for executing the specific shape fitting process on the preliminary measurement data, and means for specifying the main measurement range based on the specific shape portion obtained by the fitting process in the preliminary measurement data; It is desirable to have.

In addition, a storage medium for storing a series of procedural processes of the preliminary measurement and the main measurement as one piece of control information is further provided, and the control means is configured to perform the above-described procedure based on the control information stored in the storage medium. It is preferable to execute a predetermined process.

Further, the surface texture measuring method according to the present invention comprises:
Performing a contour measurement according to measurement conditions for contour measurement on an arbitrary preliminary measurement range of the surface to be measured as a preliminary measurement; displaying a preliminary measurement data obtained by the preliminary measurement on a screen; and displaying the screen. Selecting and determining an arbitrary main measurement range based on the preliminary measurement data, performing a roughness measurement on the main measurement range under the measurement conditions for roughness measurement as the main measurement, and performing the main measurement. Displaying the main measurement data to be displayed on a screen.

When the contour of the preliminary measurement data includes a specific shape related to the actual measurement, the step of selecting and determining the actual measurement range is performed by performing an outline analysis of the preliminary measurement data. Performing the fitting process of the specific shape on the measurement data, and specifying the main measurement range based on the specific shape portion obtained by the fitting process in the preliminary measurement data. Is desirable.

Further, the surface texture measuring program according to the present invention functions when measuring the surface texture of the object to be measured by externally controlling the measuring machine main body by a computer connected to the measuring machine main body so as to be capable of external control. A surface texture measurement program, wherein a step of performing contour measurement as a preliminary measurement on an arbitrary preliminary measurement range of a surface to be measured under measurement conditions for contour measurement, and displaying preliminary measurement data obtained by the preliminary measurement on a screen. Step, selecting and determining an arbitrary main measurement range based on the preliminary measurement data displayed on the screen, and performing roughness measurement on the main measurement range as the main measurement under the measurement conditions for roughness measurement. And a step of displaying main measurement data obtained by the main measurement on a screen.

The present invention is applicable to any case where the preliminary measurement and the main measurement are, for example, two-dimensional measurement and three-dimensional measurement.

[0016]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. FIG.
FIG. 2 is a schematic view of a surface texture measuring system according to an embodiment of the present invention, and FIG. 2 is a functional block diagram of a control unit of the measuring system. As shown in FIG. 1, the measuring system includes a measuring instrument main body 1 and a computer main body 2 as a control unit for controlling the measuring instrument main body 1.
, A keyboard 3, a display 4, and a mouse 5.

The measuring machine body 1 comprises a roughness profile detector 11, a detector feed unit 12, a column mechanism 13, and a Y-axis feed stage 14. Roughness contour detector 11
Is, for example, mechanically bringing a stylus into contact with the surface of the measurement object 6,
The surface irregularities of the measurement object 6 are detected while moving the stylus as necessary.

The detector feed unit 12 is a mechanism for horizontally moving the roughness contour detector 11 in the x-axis direction as shown in FIG. The detector feed unit 12 can be moved up and down in the z-axis direction by a column mechanism 13, and the Y-axis feed stage 14 sends the object 6 in the horizontal Y-axis direction orthogonal to the X-axis. be able to. Thereby, the positional relationship on the xy plane between the surface of the measurement object 6 and the stylus of the roughness profile detector 11 can be arbitrarily determined.

The drive source of the detector feed unit 12 is, for example, a servo motor, and the drive sources of the column mechanism 13 for moving the detector feed unit up and down and the Y-axis feed stage 14 are:
For example, a pulse motor can be used.

The computer main body 2 is configured, for example, as shown in FIG. That is, the measurement data input from the measuring device main body 1 is stored in a hard disk drive (hereinafter, referred to as HDD) 24 via an I / F 23 by a CPU 22 through an interface (hereinafter, referred to as I / F) 21. The measurement data is displayed on the display 4 via the CPU 22 and the display control unit 25.

On the other hand, code information and position information input from the keyboard 3 and the mouse 5 are input to the CPU 22 via the I / F 26. The CPU 22 has a ROM 27
From the microprogram stored in the
A measurement execution process, a measurement result display process, and the like are executed according to a measurement execution program, a measurement result display program, and the like stored in the RAM 28 via the / F23. CPU 22
Controls the measuring device main body 1 via the I / F 21 in the measurement execution process. The RAM 28 stores various programs and provides a work area for various processes.

Next, FIG. 3 is a flowchart showing the flow of a specific process in this embodiment, and FIG. 4 shows details of a method for acquiring data points. First, a range in which the preliminary measurement of the measured surface of the measurement object 6 is performed is determined (S21). Next, contour measurement is performed on the preliminary measurement range under measurement conditions for contour measurement (coarse sampling pitch / high measurement speed) (S22). Here, the measuring conditions for measuring the contour are, specifically, a total length of 50 m.
Assuming a surface to be measured having a size of about m, at a sampling pitch Pp: 0.05 mm, the number of obtained data points is 50 / 0.05 = 1000 points / 50 mm. Next, based on the preliminary measurement data obtained by the preliminary measurement, the contour shape of the surface of the measurement target is displayed on the screen (S2).
3).

Then, based on the preliminary measurement data displayed on the screen, a range for performing the main measurement is selected and determined (S2).
4). This selection / determination operation is specifically performed by selecting an arbitrary range on the curve of the preliminary measurement data displayed on the screen of the display 4 by an input from the mouse 5 or the keyboard 3. In this way, by specifying an arbitrary range of the curve of the preliminary measurement data displayed on the screen, the coordinates on the display screen are selected, and the selected coordinate values on the screen are converted into the actual measurement coordinate system. By converting to the coordinate values, the actual measurement range in the actual measurement coordinate system in the actual measurement is determined. Then, in this determined main measurement range, roughness measurement is performed under the measurement conditions for roughness measurement (fine sampling pitch / slow measurement speed) (S
25). Here, the measurement conditions for roughness measurement are, specifically, λc: 0.8 mm, sampling pitch Pr: 0.5
μm. For example, if the range in which the roughness is to be measured is about 10 mm, the number of data points obtained is 10 / 0.000
5 = 20,000 points / 50 mm, and the total number of data points obtained as a whole is 21,000 points, which is a very small number of data as compared with the total number of data points of 100,000 points in the conventional method. Then, the main measurement data thus obtained is displayed on a screen (S26). These processes are performed by a surface texture measurement program installed in the computer main body 2.

As described above, according to this embodiment, the conventional roughness
Compared to the contour measurement method, measurement is performed under the measurement conditions for roughness measurement only within the range where roughness measurement is required, so unnecessary large amounts of data are not acquired and the load on the data processing system is reduced. can do. Also, by measuring the roughness of only the necessary parts after measuring the entire contour,
The range in which the slow measurement speed is applied can be minimized, and the measurement time as a whole can be shortened. Furthermore, after the shape of the surface to be measured is grasped by the contour measurement, the roughness measurement range is determined based on the contour data, so that the roughness measurement location can be accurately specified. Further, when the operator specifies the roughness measurement range, the operator can easily specify the roughness measurement range while viewing the preliminary measurement data displayed on the display of the computer terminal.

In addition, by storing a series of measurement operations shown in FIG. 3 as procedural data in a storage medium of a computer main body, the same measurement operation can be automatically performed any number of times for the same kind of separately measured objects. It is also possible to make it executable. In this case, the selection and determination of the main measurement range (S24) may be manually input every time. This facilitates measurement of the roughness of the measurement object 6 in an arbitrary range.
At this time, the storage medium is not limited to the hard disk of the computer main body, but may be a floppy disk, an MO, or the like. Further, in the flowchart of FIG. 3, after the main measurement data is displayed on the screen (S26), selection of the main measurement range is performed.
The process may return to the determination step (S24). As a result, roughness measurement at a plurality of locations can be performed after one preliminary measurement, and measurement efficiency is improved.

Next, another embodiment according to the present invention will be described. This embodiment is an application of the above embodiment. The description of the same parts as those in the above-described embodiment is omitted, and the same reference numerals are given. In the above-described embodiment, the measurement method in the two-dimensional measurement has been described, but an example in which the present measurement method is applied to the three-dimensional measurement is shown. The difference of the measurement method in the three-dimensional measurement from the above-described embodiment lies in the method of setting measurement conditions at the time of roughness measurement. As shown in FIGS. 5A to 5C, in the present embodiment, after measuring the contour of the entire surface of the object under the measurement conditions for contour measurement, the roughness measurement is performed based on the data points obtained thereby. The area B is determined. And
Measurement area B set on the display screen of display 4
Is converted from the display coordinate system to the measurement area B in the measurement coordinate system, and the roughness of the measurement area B is measured by the measuring instrument body 1 under the measurement conditions for roughness measurement. The sampling pitch Px ′ in the x-axis direction and the sampling pitch Py ′ in the y-axis direction of the roughness measurement conditions are both set to a finer pitch for roughness measurement than the sampling pitches Px and Py in the preliminary measurement. By adopting such a method, not only two-dimensional roughness measurement but also three-dimensional roughness measurement can realize highly efficient and accurate shape measurement.

Next, still another embodiment according to the present invention will be described. The description of the same parts as those in the above-described embodiment is omitted, and the same reference numerals are given. This embodiment is applied when the contour of the preliminary measurement data includes a specific shape related to the main measurement.The difference between the present embodiment and the above-described embodiment is that the main measurement is performed based on the preliminary measurement data. Is to select and determine the range in which FIG.
(E) shows a procedure for selecting and determining the main measurement range from preliminary measurement data in the present embodiment. First, when the contour D of the object to be measured is obtained in the range where the preliminary measurement is performed by the preliminary measurement as shown in FIG. 7A, the contour is analyzed by performing the contour analysis as shown in FIG. D is classified into a plurality of types of shapes. More specifically, classification is performed by performing a shape fitting operation such as a circle or a straight line on the contour line D as a contour analysis, and obtaining intersections of the fitted shapes. The contour line D in the figure is composed of straight line portions A1 and A2 and an arc portion B. Then, FIG.
This measurement range is designated by selecting a specific shape portion (for example, only an arc portion or only a straight line portion) from a plurality of types of shapes classified as shown in (d) and (e). These processes are performed by a surface texture measurement program installed in the computer main body 2.

In this example, for example, when it is desired to measure the roughness of the bearing surface that was actually in contact with the shaft of the cylindrical shaft, the actually contacted portion should be in an arc shape. This is effective when determining the position of. That is, an arc portion is obtained from the preliminary measurement data by shape calculation, and only this arc portion can be used as the main measurement range of roughness. Further, in addition to selecting a specific shape portion as the main measurement range, it is also possible to select, for example, only the position of 50% at the center of the arc portion. Further, for example, when there are a plurality of linear portions, it is also possible to select from the central portion of the first linear portion to the central portion of the second linear portion. That is, it is possible to select the main measurement range based on various parameters of the shape calculation result of the contour data D (for example, in the case of a circle, a start point, an end point, a radius, a center, and the like). As the contents of these shape calculations, in addition to searching for a portion that can be approximated by a specific shape (for example, a circle) as described above, conversely, the entire preliminary measurement result is approximated by various shapes (for example, a circle, a straight line, and an ellipse) For example, the roughness of only a portion (for example, a sliding surface) approximated by a specific shape (for example, a straight line) may be measured.

As described above, according to the present embodiment, in addition to the effects of the above-described embodiment, the part to be subjected to the surface roughness analysis can be accurately determined by visual observation of the object to be measured or measurement data displayed on the screen. Even if it is not possible, after classifying multiple types of shapes that constitute the contour of the surface to be measured by contour analysis, the roughness measurement range is determined based on these classification results, so it is possible to accurately specify the roughness measurement location It works.

When the three-dimensional surface shape of the object to be measured obtained by the preliminary measurement includes a specific three-dimensional shape related to the main measurement, a plurality of surface shapes of the object to be measured are It is also possible to classify into various types of shapes (for example, spherical surface, flat surface, etc.), and to specify the main measurement range based on a specific shape portion among the classified plural types of shapes.

[0031]

As described above, according to the present invention, in the preliminary measurement, the contour of the measured object is obtained as preliminary measurement data using the measurement conditions for contour measurement, and selected based on the preliminary measurement data. Since the roughness measurement is performed on the actual measurement range under the measurement conditions for roughness measurement, it is possible to accurately measure the roughness of the desired part, and to perform the roughness measurement only on the area where the roughness measurement is desired. Since the surface measurement can be performed, it is possible to provide a surface texture measuring system and method capable of eliminating an extra measuring time and reducing a load on a data processing system.

[Brief description of the drawings]

FIG. 1 is a schematic view of a surface texture measuring system according to an embodiment of the present invention.

FIG. 2 is a functional block diagram of a control unit of the measurement system.

FIG. 3 is a flowchart illustrating a flow of a specific process according to the embodiment;

FIG. 4 is a diagram showing details of a method for acquiring data points in the present embodiment.

FIG. 5 is a diagram illustrating details of a data point acquisition method according to another embodiment of the present invention.

FIG. 6 is a diagram illustrating details of a data point acquisition method according to still another embodiment of the present invention.

FIG. 7 shows a flowchart of a roughness measuring method in a conventional dual-purpose measuring instrument.

FIG. 8 is a diagram showing details of a method for acquiring data points in the roughness measurement method shown in FIG. 7;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Measuring machine main body, 2 ... Computer main body, 3 ... Keyboard, 4 ... Display, 5 ... Mouse, 6 ... Measured object, A ... Roughness measuring range, W … Contour measurement range, Pr… Sampling pitch for roughness measurement, Pp… Sampling pitch for contour measurement.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F069 AA57 AA62 DD15 DD24 GG01 GG62 JJ07 MM32 QQ12

Claims (11)

[Claims] 1. A means for performing contour measurement on an arbitrary preliminary measurement range of a surface to be measured as a preliminary measurement under measurement conditions for contour measurement, a means for displaying preliminary measurement data obtained by the preliminary measurement on a screen, A means for selecting and determining an arbitrary main measurement range based on the preliminary measurement data displayed on the screen; and a means for performing a roughness measurement on the main measurement range as a main measurement by measuring conditions for roughness measurement. Means for displaying a main measurement data obtained by the main measurement on a screen. 2. The means for selecting and determining the main measurement range includes means for designating the main measurement range based on positional information on a screen with respect to the preliminary measurement data displayed on the screen. The surface texture measuring system according to claim 1, wherein: 3. When the contour of the preliminary measurement data includes a specific shape related to the actual measurement, the means for selecting and determining the actual measurement range includes performing an outline analysis of the preliminary measurement data. Means for performing the specific shape fitting process on the preliminary measurement data, and means for specifying the main measurement range based on the specific shape portion obtained by the fitting process in the preliminary measurement data; The surface texture measuring system according to claim 1, further comprising: 4. A surface texture measuring device main body for detecting a surface texture of an object to be measured, and controlling the surface texture measuring device main body and performing a predetermined process on a measurement value input from the surface texture measuring device main body. Control means for executing, input means for inputting necessary information to the control means, and display means for displaying a processing result in the control means, wherein the control means specifies the measurement target. The surface texture measuring device main body is driven to measure the contour of the object to be measured based on the measurement conditions for contour measurement specified for the preliminary measurement range.
A process of obtaining preliminary measurement data by controlling; a process of displaying preliminary measurement data obtained by the contour measurement on the display unit; and a process of measuring the preliminary measurement data displayed on the display unit. A process of driving and controlling the surface texture measuring device main body to perform roughness measurement of the object to be measured based on measurement conditions for roughness measurement specified for the main measurement range of the object, and obtaining main measurement data; Displaying the main measurement data obtained by the roughness measurement on the display means. The input means is for the control means to perform a preliminary measurement range and a contour measurement of the object to be measured. And inputting the measurement conditions for the main measurement range and the roughness measurement of the object to be measured with respect to the preliminary measurement data displayed on the display means. The stage displays the preliminary measurement data obtained by the control means, the main measurement range specified by the input means for the preliminary measurement data, and the main measurement data obtained by the control means. Surface texture measuring system characterized by the following. 5. The surface texture measuring system according to claim 1, wherein the preliminary measurement and the main measurement are two-dimensional measurements. 6. The surface texture measuring system according to claim 1, wherein the preliminary measurement and the main measurement are three-dimensional measurements. 7. A storage medium for storing a series of procedural processes of the preliminary measurement and the main measurement as one piece of control information, wherein the control means is configured to perform the predetermined processing based on the control information stored in the storage medium. 5. The surface texture measuring system according to claim 4, wherein the processing is performed. 8. A step of performing a contour measurement on an arbitrary preliminary measurement range of a surface to be measured as a preliminary measurement under measurement conditions for contour measurement; and a step of displaying preliminary measurement data obtained by the preliminary measurement on a screen. A step of selecting and determining an arbitrary main measurement range based on the preliminary measurement data displayed on the screen; anda step of performing a roughness measurement on the main measurement range as a main measurement using a measurement condition for roughness measurement. Displaying a main measurement data obtained by the main measurement on a screen. 9. When the contour of the preliminary measurement data includes a specific shape related to the actual measurement, the step of selecting and determining the actual measurement range includes performing an outline analysis of the preliminary measurement data. Performing the specific shape fitting process on the preliminary measurement data; anddesignating the main measurement range based on the specific shape portion obtained by the fitting process in the preliminary measurement data. 9. The method for measuring surface texture according to claim 8, comprising: 10. A series of steps including the preliminary measurement and the main measurement are stored as one piece of procedure information, and the procedure information is appropriately read out so that the series of steps can be repeatedly executed. The method for measuring surface texture according to claim 8. 11. A surface texture measuring program which functions when measuring the surface texture of a measurement object by externally controlling the measuring instrument main body by a computer connected to the measuring instrument main body so as to be capable of external control, comprising: Performing a contour measurement on an arbitrary preliminary measurement range of the surface to be measured under a measurement condition for contour measurement; displaying a preliminary measurement data obtained by the preliminary measurement on a screen; and displaying the preliminary measurement displayed on the screen. Selecting and determining an arbitrary main measurement range based on the data; performing a roughness measurement on the main measurement range under the measurement conditions for roughness measurement as the main measurement; Displaying a measurement data on a screen.