JP2002202821A - Method and device for fluid temperature control, and fluid supply device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device which can control fluid temperature with extremely high precision by combining multiple kinds of control styles. SOLUTION: A client supply device 100 is equipped with a 1st tank 101 containing a coolant C1, a 2nd tank 102 which contains a coolant C2, a temperature control machine 103 which controls the temperature of the coolant C in the 1st tank 101, a liquid feeding pump 104 which sends the coolant C1 in the 1st tank 101 to the 2nd tank 102, a temperature sensor 105 which detects the temperature of the coolant C2 in the 2nd tank 102, a pump control part 106 which controls the operation state of the liquid feeding pump 104 according to the detected temperature of the temperature sensor 105, and a liquid feeding pump 107 which sends the coolant C2 in the 2nd tank 102 to e.g. a machine tool 200 in case of the illustrated example.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid temperature control method, a fluid temperature control device, and a fluid supply device.
The present invention relates to a fluid temperature control technique that can be used in a fluid supply device suitable for supplying a coolant to various devices such as a machine tool.

[0002]

2. Description of the Related Art Generally, when a coolant such as cooling water or oil is supplied to a machine tool, a liquid tank containing the coolant, a temperature controller for controlling the temperature of the coolant in the liquid tank, and a liquid tank are provided. A coolant supply device having a liquid supply pump for supplying coolant in a tank to a main shaft portion or the like of a machine tool is used. In this coolant supply device, the coolant supplied to the machine tool by the liquid feed pump is heated instead of cooling the predetermined portion through the machine tool, and is thereafter recovered and returned to the liquid tank again. . Therefore, the temperature controller is configured to cool the coolant in the liquid tank in order to always keep the coolant in the liquid tank near a predetermined temperature.

[0003]

However, most of the above-mentioned temperature controllers usually have only a temperature control capability of maintaining a coolant temperature within a range of plus or minus several degrees Celsius with respect to a set temperature. When using such a temperature controller, the processing dimensions of a machine tool with extremely high machining accuracy will change due to the cooling state of each part due to the temperature fluctuation of the coolant. However, there is a problem that high working accuracy cannot be obtained.

On the other hand, there is a relatively high-precision temperature controller used for a special purpose. For example, the temperature controller can keep the coolant temperature within a range of about ± 0.5 ° C. with respect to a set temperature. There is something. However, since such a temperature controller is expensive, there is a problem that equipment cost is increased and maintenance is difficult because the structure is complicated and delicate. Especially in recent years,
In some cases, it has been required to adjust the coolant temperature with higher accuracy than the relatively high temperature adjustment accuracy described above. In such a case, currently available temperature controllers cannot cope with such cases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a method and an apparatus capable of controlling a fluid temperature with extremely high precision by combining a plurality of control modes. It is in. Another object of the present invention is to provide a method and an apparatus capable of realizing high-precision temperature control with an inexpensive and simple structure. Another object of the present invention is to realize a fluid supply device capable of supplying a fluid whose temperature is controlled with high accuracy by using the above method and apparatus.

[0006]

In order to solve the above-mentioned problems, a fluid temperature control method according to the present invention is provided with a first tank and a second tank containing a fluid, and controlling the temperature of the fluid in the first tank. ,
According to the detected temperature of the fluid in the second tank, the first
The amount of fluid movement from the tank to the second tank is controlled.

According to the present invention, the temperature of the fluid in the first tank is controlled, and the fluid is moved from the first tank to the second tank by a fluid moving amount corresponding to the detected temperature of the fluid in the second tank. Accordingly, the fluid whose temperature is controlled in the first tank is moved to the second tank with a further controlled fluid movement amount, so that the temperature of the fluid in the second tank can be controlled with higher accuracy. For example, even if the control accuracy of the fluid temperature controlled in the first tank is relatively poor and the fluid temperature fluctuates, the fluctuation of the fluid temperature in the second tank is controlled by controlling the amount of movement of the fluid to the second tank. Therefore, the fluid temperature of the second tank can be controlled with higher accuracy.

In the present invention, it is preferable to control the amount of fluid movement so that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range. According to this means, it is possible to control the fluid temperature of the second tank with a higher accuracy with respect to a predetermined target temperature or a target temperature range.

In the present invention, in the case where the fluid temperature in the second tank is influenced from the outside so as to change (increase or decrease) only in a predetermined direction, the fluid temperature in the first tank is
It is preferable that the temperature is set so that the fluid temperature in the second tank is changed in a direction opposite to the direction in which the fluid temperature in the second tank changes. That is, when the fluid in the second tank is under a heat receiving environment (that is, in a state receiving heat from the outside), the temperature of the temperature control for the fluid in the first tank or the temperature within the set temperature range is set. The median is the second
It is preferable that the temperature be lower than the target temperature of the fluid in the tank or the median of the target temperature range. Thereby, the fluid temperature of the second tank can be controlled. In this case, it is desirable that the upper limit of the set temperature range be equal to or less than the target temperature or the lower limit of the target temperature range. Thus, the fluid temperature of the second tank can be reliably or more quickly maintained at the target temperature or within the target temperature range. Further, when the fluid in the second tank is under a heat radiation environment (that is, in a state of releasing heat to the outside), a set temperature or a set temperature range of the temperature control for the fluid in the first tank. Is preferably higher than the median of the target temperature or the target temperature range of the fluid in the second tank. Thereby, the fluid temperature of the second tank can be controlled. In this case, it is desirable that the lower limit of the set temperature range be equal to or higher than the target temperature or the upper limit of the target temperature range. Thereby, the fluid temperature of the second tank can be reliably or more quickly maintained at the target temperature or within the target temperature range.

In the present invention, when the fluid in the second tank is in a heat receiving environment, the average value of the fluctuation range of the fluid temperature in the first tank is calculated as the target temperature of the fluid temperature in the second tank. Alternatively, it is preferable that the temperature be lower than the median of the target temperature range. In this case, it is desirable that the upper limit of the fluctuation range of the fluid temperature of the first tank is not more than the target temperature of the fluid temperature of the second tank or the lower limit of the target temperature range. When the fluid in the second tank is under a heat radiation environment,
It is preferable that the average value of the fluid temperature fluctuation range of the tank is higher than the target temperature of the fluid temperature of the second tank or the median value of the target temperature range. In this case, it is desirable that the lower limit of the fluid temperature fluctuation range of the first tank be equal to or higher than the target temperature of the fluid temperature of the second tank or the upper limit of the target temperature range.

In the present invention, the first tank is removed from the second tank.
It is preferable to control the amount of fluid movement while circulating the fluid to the tank. According to this means, from the first tank to the second tank
When controlling the temperature of the fluid in the second tank by moving the fluid to the tank, heat exchange between the first and second tanks is promoted by circulating the fluid from the second tank to the first tank. As a result, the temperature of the fluid in the second tank can be controlled more easily or more quickly.

Next, the fluid temperature control device of the present invention
Temperature control means for controlling the temperature of the fluid in the tank, fluid movement means for moving the fluid whose temperature is controlled by the temperature control means to the second tank, and temperature detection for detecting the fluid temperature of the second tank Means, and a moving amount control means for controlling a moving amount of the fluid by the fluid moving means in accordance with the temperature detected by the temperature detecting means.

In the present invention, the moving amount control means includes:
It is preferable to control the amount of fluid movement so that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range.

[0014] In the present invention, the first tank is removed from the second tank.
It is preferable to have a return path for returning the fluid to the tank.

Next, a fluid supply device according to the present invention is a fluid supply device configured to supply a fluid whose temperature is controlled, wherein a first tank and a second tank containing the fluid, and a first tank. Temperature control means for controlling the fluid temperature of the first fluid;
Fluid moving means for moving the fluid from a tank to the second tank, temperature detecting means for detecting a fluid temperature of the second tank,
Moving amount control means for controlling the amount of fluid movement from the first tank to the second tank in accordance with the temperature detected by the temperature detecting means; and fluid supply means for supplying the fluid from the second tank. It is characterized by.

In the present invention, the moving amount control means includes:
It is preferable to control the amount of fluid movement so that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range.

In the present invention, the first tank is removed from the second tank.
It is preferable to have a return path for returning the fluid to the tank.

In each of the above-mentioned inventions, the means for increasing or decreasing the amount of fluid movement according to the temperature of the fluid in the first tank, or the means for increasing or decreasing the amount of fluid movement according to the temperature of the fluid in the first tank (the amount of movement) Control function). More specifically, the second tank is moved by moving the fluid in the first tank.
When the fluid temperature of the tank is configured to decrease, when the fluid temperature of the first tank is lower than a predetermined value, the fluid movement amount is reduced below normal, and the fluid temperature of the first layer is lower than the predetermined value. When it is high, the fluid movement is increased more than usual. Conversely, when the fluid temperature in the second tank is increased by moving the fluid in the first tank, the fluid movement amount is normally set when the fluid temperature in the first tank is lower than a predetermined value. And when the fluid temperature of the first layer is higher than a predetermined value, the fluid movement amount is lower than usual.

In each of the above-mentioned inventions, the set temperature or the set temperature range or the temperature fluctuation range of the first tank is brought closer to or away from the target temperature or the target temperature range or the temperature fluctuation range of the second tank. Or means for moving the set temperature or the set temperature range or the temperature fluctuation range of the first tank closer to or away from the target temperature or the target temperature range or the temperature fluctuation range of the second tank (first unit).
(Bath temperature setting control function) is preferably provided.

[0020]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a fluid temperature control method and a fluid temperature control device according to a first embodiment of the present invention; The embodiment described below relates to a coolant supply device that supplies coolant such as cooling water, oil (including lubricating oil), or the like for a machine tool. However, the present invention is not limited to the coolant as described above. The present invention can be widely applied to a temperature control method, a temperature control device, and a supply device of a fluid including various liquids, gases, and other fluids.

FIG. 1 is a schematic configuration diagram schematically showing the overall configuration of a coolant supply device 100 of the present embodiment. The coolant supply device 100 includes a first tank 101 containing a coolant C1, a second tank 102 containing a coolant C2, a temperature controller 103 for controlling the temperature of the coolant C1 in the first tank 101, A liquid sending pump 104 for sending the coolant C1 in the tank 101 to the second tank 102;
A temperature sensor 105 for detecting the temperature of the coolant C2 in the tank 102, and a pump control unit 10 for controlling the operation state of the liquid feed pump 104 based on the temperature detected by the temperature sensor 105.
6 and a liquid feed pump 107 for sending the coolant C2 in the second tank 102 to the outside, for example, the machine tool 200 in the illustrated example.

The temperature controller 103 has a built-in refrigerator. The refrigerant cooled by the refrigerator is passed through the heat exchange section 103a, and the coolant C in the first tank 101 is cooled by the heat exchange section 103a. Has become. Liquid pump 104
Is the coolant C in the first tank 101 through the moving pipe 108.
1 is sent out to the second tank 102. First tank 101 and second tank 1
02 is provided between the second tank 102 and the second tank 102.
When the liquid level of the coolant C2 in the tank rises, the coolant flows into the first tank 1 through the return path 112 due to overflow.
It is configured to return to 01.

The pump control unit 106 includes a temperature sensor 105
When the detected temperature of the first tank 101 rises, the first tank 101 to the second tank 102
Or the amount of movement of the coolant is increased, and conversely, when the temperature detected by the temperature sensor 105 decreases, the movement of the coolant from the first tank 101 to the second tank 102 is stopped or the coolant is moved. To reduce the amount of movement.

The second tank 102 is provided with a stirrer 109 provided with a stirring means 109a such as a stirring blade for stirring the internal coolant C2. In addition, the liquid sending pump 107
The coolant C2 in the second tank 102 through the supply pipe 110
To the outside (machine tool 200). Further, the coolant is configured to return from the outside (the machine tool 200) to the second tank 102 through the collection pipe 111. Here, the temperature of the coolant returning from the machine tool 200 to the second tank 102 becomes higher than the temperature t of the coolant C2 in the second tank 102 by being heated inside the machine tool 200. The temperature of the coolant returning to the second tank 102 varies depending on the operating state of the machine tool 200. At this time, if the coolant is supplied to the cutting portion of the machine tool 200, for example, the temperature is usually about 30 ° C., but rises to 38 to 39 ° C. during heavy cutting. As described above, the second tank 10 may be changed due to a change in the external situation.
Since the amount of heat received by the coolant C2 in the second tank 2 also varies, it is necessary to control the temperature of the second tank 102 as described later.

In the present embodiment, even with only the above configuration, the temperature controller 103, the pump controller 106, the liquid feed pump 107, and the stirrer 109 are individually operated to obtain desired operation modes and objects described later. Can be achieved. In experiments conducted by the inventor, the temperature controller 10
In the case where it is a limit to keep the coolant temperature T of the first tank within the range of about ± 3 ° C. of the set temperature with the temperature control capability of 3, the coolant temperature t of the second tank is set to be ± 0.3 mm of the target temperature. It could be kept in the range of 1 to 0.2 ° C. This is an accuracy that can be sufficiently improved even when used for a machine tool having the highest level of machining accuracy at present.

In the present embodiment, a control device 113 is further provided as shown in the figure, and the temperature controller 103, the pump control unit 106, the liquid sending pump 107, and the stirrer 109 are respectively (or at least one of them) ) It may be configured to control. The control device 113 supplies a driving signal, a control signal, a driving power, and the like for each of the above-described units in a predetermined control mode. The control device 113 may be any device as long as it has the above-mentioned functions, but may be constituted by, for example, a programmable controller or an MPU (microprocessor unit).

In the present embodiment, the temperature of the coolant C1 in the first tank 101 is controlled by the temperature controller 103 so as to be maintained within an appropriate temperature range. In this case, the set temperature of the temperature controller 103 is set to T
₀ , the variation range of the temperature T of the coolant C1 is T ₀ + ΔT ₁
ＴT ₀ −ΔT ₂ . Generally, the accuracy of the control temperature of the temperature controller 103 is not high, and the temperature fluctuation of the coolant C1 is about plus or minus several degrees Celsius. As the temperature control method of a thermoregulator 103, on-off control system for on-off operation at a set temperature T ₀ or temperature from the temperature away predetermined temperature, proportional control to provide a proportional output in a predetermined temperature zone, including the set temperature T _0, In addition, any known temperature control method such as various control methods in which an integral element, a differential element, and the like are added can be used.

The coolant C whose temperature is controlled as described above
1 is moved to the second tank 102 through the moving pipe 108 by the liquid sending pump 104 which operates in the driving mode controlled by the pump control unit 106. In the second tank 102, usually, the stirrer 109 always operates to stir the coolant C2 in the tank so that the entire coolant C2 has a substantially uniform temperature. From the second tank 102, the coolant C2 is supplied to the outside (the machine tool 200) via the supply pipe 110 by the liquid sending pump 107. Normally, coolant almost equal to the supply amount returns from the outside to the second tank 102 via the recovery pipe 111. Here, it is preferable to provide a purifying means (such as a filtration filter) for purifying the coolant in the recovery path including the recovery pipe 111.

The temperature of the coolant C2 in the second tank 102 is sent from the temperature sensor 105 to the pump control unit 106, and the pump control unit 106 controls the temperature of the coolant pump C2 according to the temperature t of the coolant C2 detected by the temperature sensor 105. The operation mode is controlled. Here, for the convenience of the description to be described later, the target temperature of the coolant C2 in the second tank 102 (that is, the target temperature of the supplied coolant) is t ₀ , and the target temperature range that is the target value of the temperature variation width of the coolant C2 is t. ₀ + Δt ₁ to
Let t ₀ −Δt ₂ .

As described above, the liquid feed pump 107 continues to send the coolant C2 in the second tank 102 to the outside (the machine tool 200) through the supply pipe 110, and the coolant is collected in the second tank 102 through the collection pipe 111. In the state, the circulating coolant absorbs heat and the temperature of the coolant C2 in the second tank 102 increases. Therefore, in the present embodiment, the liquid supply pump 104 is operated according to the temperature detected by the temperature sensor 105 to control the amount of movement of the coolant C1 from the first tank 101 to the second tank 102, and the coolant in the second tank 102 is controlled. the temperature to maintain a target temperature _{t 0,} as described above, or are to be held at the target temperature range _{t 0} + _{Δt 1} ~t _{0 -Δt 2.}

At this time, the temperature is controlled by the temperature controller 103.
The controlled temperature T of the coolant C1 in the first tank 101 is:
According to the temperature control mode and temperature control capability of the temperature controller 103.
This shows the temperature fluctuations. The temperature fluctuation of the coolant C1 is
This is shown in FIG. As shown in FIG.
Normally, the set temperature T of the temperature controller 103₀Around T ₀
+ ΔT₁~ T₀−ΔT₂Coolant temperature within the range
The degree T repeatedly fluctuates up and down.

On the other hand, the second tank 102 shown in FIG.
Coolant temperature t (detected by the temperature sensor 105
You. ) Is the upper limit T of the fluctuation range of the coolant temperature T.₀
+ ΔT ₁Target temperature t set higher than₀In the vicinity of
Dripping. More specifically, in the case of the present embodiment, the target temperature
t₀The lower limit t of the fluctuation range of the coolant temperature t centered on
₀−Δt₂Is the upper limit T of the fluctuation range of the coolant temperature T.₀
+ ΔT₁Is higher than.

When the temperature of the coolant temperature t of the second tank 102 rises or becomes higher than the target temperature t ₀ ,
The pump control unit 106 operates the liquid sending pump 104 to move the coolant C1 into the second tank 102,
Alternatively, when the coolant C1 is already moving to the second tank 102, the amount of movement of the coolant C1 by the liquid feed pump 104 is increased. Thereby, the coolant temperature t of the second tank 102 decreases due to the low coolant temperature T. FIG. 2C shows an example of a change with time of the movement amount L of the coolant C1 by the liquid sending pump 104. Examples shown in the illustrated solid line A, the coolant C1 in the first tank 101 and the second tank 10 only when the coolant temperature t is equal to or higher than the target temperature t ₀
2 shows the amount of coolant movement when moving to a constant speed (on / off control method). That is,
When the coolant temperature t of the second tank increases, a coolant C1 having a lower temperature T is introduced into the second tank, the coolant temperature t decreases, and when the coolant temperature t decreases, the movement of the coolant C1 is stopped. , The coolant temperature t is changed in the above-mentioned fluctuation range t ₀ + Δt _{1 to} t ₀ −Δt ₂
Can be controlled within.

In this embodiment, the first tank 101 to the second tank 101
The control of the movement amount of the coolant to the tank 102 or the temperature control of the second tank includes, in addition to the on / off control as described above, proportional control that gives a proportional movement amount in a predetermined temperature zone, and other integral and differential elements. Any known control method, such as various control methods taking into account, can be used. For example, in the example shown by the broken line B in FIG. 2 (c), (to have for example, a positive correlation) according to the vertical fluctuation of the coolant temperature t, increase or decrease the amount of movement L around the threshold L ₀ I have.

In this embodiment, as shown in FIG. 2A, the coolant temperature T of the first tank 101 varies in a range T ₀ + Δ
Since the temperature fluctuates within T _{1 to} T ₀ −ΔT ₂ , the coolant temperature T is detected, and a control signal corresponding to the coolant temperature T is transmitted from the control device 113 to the pump control based on the movement amount control function of the control device 113. By sending to the unit 106,
For example, the coolant movement amount can be increased or decreased as shown by a dotted line C in FIG. 2C with respect to a normal movement amount indicated by a broken line B in FIG. That is, when the coolant temperature T is high within the above-mentioned fluctuation range, the coolant movement amount is increased more than usual to enhance the effect of lowering the coolant temperature t of the second tank 102, and the coolant temperature T falls within the above-mentioned fluctuation range. , The coolant movement amount is reduced more than usual and the effect of lowering the coolant temperature t in the second feeding 102 is weakened, so that a more accurate temperature control of the coolant temperature t can be performed. .

In the present embodiment, the first tank temperature setting control function of the control device 113 controls the coolant temperature t of the second tank 102 with higher accuracy.
The set temperature T ₀ of the coolant temperature T of 01 or the temperature fluctuation range T ₀ + ΔT _{1 to} T ₀ −ΔT ₂ can be adjusted up and down. For example, by setting the set temperature or the temperature fluctuation range of the coolant temperature T of the first tank 101 close to the target temperature or the temperature fluctuation range of the coolant temperature t of the second tank 102, the pump control unit 106
Further, the coolant temperature t of the second tank 102 is made more accurate without increasing the control accuracy of the amount of movement of the coolant by the liquid sending pump 104, that is, the variation widths Δt ₁ and Δt ₂ that determine the temperature variation range. Can be reduced.

When the coolant temperature of the first tank is made closer to the coolant temperature of the second tank by using the first tank temperature setting control function, the second tank due to the change in the coolant temperature of the first layer is obtained.
Since the influence on the coolant temperature of the tank becomes relatively large, it is preferable that this first tank temperature setting control function is used in combination with the above-described movement amount control function.

In the present embodiment, when the liquid level in the second tank 102 rises due to the movement of the coolant by the liquid feed pump 104 as described above, the first tank 101 is returned from the second tank through the reflux path 112 by overflow. Since the coolant is recirculated, the heat exchange between the first tank 101 and the second tank 102 is increased, and the temperature of the second tank can be quickly and accurately controlled.

The fluid temperature control method, the fluid temperature control device, and the fluid supply device of the present invention are not limited to the above illustrated examples, and various changes can be made without departing from the gist of the present invention. Of course.

[0040]

As described above, according to the present invention,
The temperature of the second tank can be controlled with high accuracy without being greatly affected by the accuracy of the temperature control for the first tank. In addition, a complicated and expensive temperature control means is not required, and a simple and inexpensive configuration can be achieved.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram schematically illustrating an overall configuration of a coolant supply device according to an embodiment of the present invention.

FIG. 2 is a coolant temperature T of a first tank in the embodiment.
(A) showing the change over time of the coolant temperature, graph (b) showing the change over time of the coolant temperature t in the second tank, and graph (c) showing the change over time in the amount L of coolant transferred from the first tank to the second tank.
It is.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 100 Coolant supply apparatus (fluid supply apparatus) 101 1st tank 102 2nd tank 103 Temperature controller (temperature control means) 104 Liquid feed pump (fluid movement means) 105 Temperature sensor (temperature detection means) 106 Pump control unit (movement amount) Control means) 107 Liquid feed pump (fluid supply means) 108 Moving pipe 109 Stirrer 110 Supply pipe 111 Recovery pipe 112 Reflux path 113 Control device 200 Machine tool

Claims (9)

[Claims] 1. A first tank and a second tank for containing a fluid are provided, the temperature of the fluid in the first tank is controlled, and the first tank is controlled according to the detected temperature of the fluid in the second tank. From the second
A method for controlling a fluid temperature, comprising controlling an amount of fluid movement to a tank. 2. The fluid temperature control method according to claim 1, wherein the fluid movement amount is controlled so that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range. 3. The fluid temperature control method according to claim 1, wherein the fluid movement amount is controlled while the fluid is recirculated from the second tank to the first tank. 4. A temperature control means for controlling the temperature of the fluid in the first tank, a fluid moving means for moving the fluid, the temperature of which is controlled by the temperature control means, to a second tank;
A fluid temperature, comprising: temperature detection means for detecting a fluid temperature of a tank; and movement amount control means for controlling the amount of fluid movement by the fluid movement means according to the temperature detected by the temperature detection means. Control device. 5. The apparatus according to claim 4, wherein the moving amount control means controls the moving amount of the fluid such that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range. The fluid temperature control device according to any one of the preceding claims. 6. The fluid temperature control device according to claim 4, further comprising a return path for returning the fluid from the second tank to the first tank. 7. A fluid supply device configured to supply a fluid whose temperature is controlled, a first tank and a second tank that contain the fluid, and a temperature control unit that controls a fluid temperature of the first tank. Fluid moving means for moving the fluid from the first tank to the second tank; temperature detecting means for detecting a fluid temperature of the second tank; A fluid supply device, comprising: a movement amount control unit that controls a movement amount of a fluid from a tank to the second tank; and a fluid supply unit that supplies the fluid from inside the second tank. 8. The apparatus according to claim 7, wherein the moving amount control means controls the moving amount of the fluid such that the fluid temperature of the second tank is maintained at a predetermined target temperature or a target temperature range. The fluid supply device as described in the above. 9. The fluid supply device according to claim 1, further comprising a return path for returning the fluid from the second tank to the first tank.