JP2002196521A - Electrophotographic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To impart superior total performance with high durability and high image quality to a full color electrophotographic device with plural image carriers. SOLUTION: The electrophotographic device uses a-Si(amorphous silicon) photoreceptors as photosensitive drums (image carriers). An image of an excellent black grade can be obtained by using a high performance specified a-Si photoreceptor in a black image forming part. The formation of a full color image with very small environmental dependence and exposure memory is enabled by using photoreceptors in which each photoconductive layer contains 10-30 at.% hydrogen atoms, the characteristic energy of the trailing of an exponential function obtained from a light absorption spectrum in at least a part of the photoconductive layer on which light is incident is 50-60 meV and localized state density in the photoconductive layer is 1×1014 to <1×1016 cm-3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a full-color copying machine, a multi-color copying machine or a similar printer having a plurality of photoreceptors, and also relates to an electronic device such as a copying machine for both black and white and full color, and a printer. It relates to a photographic device. The present invention also relates to an electrophotographic light receiving member.

[0002]

2. Description of the Related Art Conventionally, a plurality of image forming units are provided, and a visible image (toner image) having a different color in each image forming unit.
And an image forming apparatus for sequentially transferring and superimposing these toner images on the same recording material, that is, a so-called color image forming apparatus has been proposed. Among them, an electrophotographic color image forming apparatus is frequently used. An image forming apparatus. In such an electrophotographic color image forming apparatus, a plurality of image forming units, generally four image forming units, are arranged side by side, and a dedicated photosensitive drum is used as an image carrier of these image forming units. Yellow (Y), magenta (M),
Cyan (C), black (Bk) visible images,
Toner images are separately formed, and toner images of respective colors are sequentially superimposed and transferred onto a recording material carried and conveyed by a recording material carrying means composed of, for example, a dielectric belt. Are collectively heated and fixed by a fixing device to obtain a required full-color image or multi-color image. This method has been tried in many ways because it enables a color image to be output at a high speed.

An example of such an electrophotographic color image forming apparatus will be briefly described with reference to FIG. In this color image forming apparatus, for example, yellow (Y), magenta (M), cyan (C) and black (B
k) has a configuration in which first to fourth four image forming units Pa, Pb, Pc and Pd capable of forming visible images (toner images) of respective colors are linearly arranged, The sections Pa to Pd are dedicated photosensitive drums 1a, 1b, 1c as image carriers.
And 1d, respectively. Each of the photosensitive drums 1a to 1d is driven to rotate in the direction of the arrow shown in the figure, and the periphery thereof is a dedicated image forming process unit, for example, a primary charger 2
a, 2b, 2c, 2d, image exposure devices 3a, 3b, 3c, 3d,
Developing units 4a, 4b, 4c, 4d, and cleaners 5a, 5b, 5
c, 5d, etc. are provided. A configuration in which a charge eliminating layer is provided before the primary charger is generally shown in FIG.

A recording material supporting means, in this example, an endlessly moving recording material carrying belt 8 is provided between a plurality of rollers in a known manner below the photosensitive drums 1a to 1d of the image forming portions Pa to Pd. And a transfer charging means 6a inside thereof.
6b, 6c and 6d are provided respectively. The right side in the drawing of the recording material carrying belt 8 is the opposite side,
That is, the fixing devices 7 are arranged on the left side in the figure. Further, the recording material supply unit and the recording material carrying belt 8
A pair of registration rollers 13 for feeding the recording material P at a time is disposed between the recording material P and the recording material P.
P is fed from the recording material supply unit via the registration roller 13 onto the recording material carrying belt 8 and is held therein. As the belt 8 moves in the direction indicated by the arrow in the drawing, it is transferred to the transfer areas of the image forming units Pa to Pd. Conveyed sequentially.

In the above configuration, the recording material P sent out from the recording material supply unit is temporarily stopped when the leading end thereof is slightly sandwiched by the registration rollers 13, and is temporarily stopped by the first image forming unit.
The paper is sent out at the same timing as the Pa image forming process, and supplied onto the recording material carrying belt 8. This first
In the image forming unit Pa, the yellow component color electrostatic latent image is scanned by scanning the photosensitive drum 1a uniformly charged by the primary charger 2a with the yellow component color image information using a laser beam or the like. It is formed. This electrostatic latent image becomes a yellow visible image by the yellow toner being adhered by the developing device 3a.

On the other hand, the recording material P is conveyed while being carried on a recording material carrying belt 8, and the operation of the transfer charging means 6a is performed in a transfer area below the photosensitive drum 1a in the first image forming portion Pa. As a result, the yellow visible image formed on the photosensitive drum 1a, that is, the toner image is transferred onto the recording material P. While the yellow toner image is being transferred onto the recording material P in this manner, a magenta component color electrostatic latent image is formed in the second image forming portion Pb, and this magenta latent image is formed by the developing device 3b. The recording material P is used as the toner image and the second image forming unit P
When the toner image is conveyed to the lower transfer area of the photosensitive drum 1b in b, the magenta toner image moves to the transfer area,
The transfer is performed in a state of being superimposed on the yellow toner image on the recording material P by the operation of the transfer medium transmitting means 6b.

[0007] In the third and fourth image forming sections Pc and Pd, cyan and black toner images are sequentially formed and recorded in the same manner as in the first and second image forming sections Pa and Pb. These toner images are sequentially multiplex-transferred onto the recording material P conveyed by the material carrying belt 8.

When the image forming process is completed, the recording material P is separated from the recording material carrying belt 8 and sent to the fixing device 7, where it is collectively fixed to obtain a desired full-color image. Further, the photosensitive drums 1a to 1d of the image forming units Pa to Pd after the transfer is completed, the residual toner is removed by the cleaners 5a to 5d, so that the next latent image formation is performed.

The image forming apparatus having the above-described structure is advantageous in speeding up since it has an image forming unit for each color, but is expensive because it has four photosensitive drums which are consumables, and has a single color (usually). Even when performing image formation of black), the four photosensitive drums rotate while being in contact with the recording material carrying belt 8 in the same manner as the drum performing image formation.
There is a disadvantage that the photosensitive drum, which has a low frequency of image formation, wears out and its life is shortened.

In recent years, with the progress of digitization, the above-mentioned color printer, which is frequently used as an output device of a computer, is required to have a high operation rate and high reliability, and reduction of replacement frequency due to abrasion of a drum is a major problem. Also, from the viewpoint of ecology, eliminating waste, that is, reducing consumables, extending the life of consumables, and increasing reliability have become our absolute issues. From another perspective, the reduction of CO ₂ , that is, the reduction of power consumption and the protection of forests, are also issues that have been clearly imposed as global standards. Specifically, the movement of reducing power consumption during standby of a heater or the like and utilizing recycled paper, non-wood pulp paper, or the like has been activated. Under these circumstances, there is a demand for not only extending the service life but also reducing and eliminating drum heaters and promoting measures to promote drum wear due to fillers used in recycled paper.

Therefore, as disclosed in Japanese Patent Application Laid-Open No. Hei 7-13399, for the purpose of shortening the copying time when forming a monochromatic image, it is set or automatically recognized whether the image to be formed is a monochrome image or a color image. Various image forming apparatuses having a function of performing a single-color image formation have been proposed as disclosed in Japanese Patent Application Laid-Open No. 5-341618.
Among proposals a to 1d, a proposal has been made to make the photosensitive drum not used for image formation non-contact with the recording material carrying belt 8.

Conventionally, an OPC drum has been used as a photosensitive drum in such an electrophotographic color image forming apparatus. OPC drums have the advantages of being mass-produced, being relatively inexpensive, and not necessarily requiring a drum heater. However, since it is an organic material, it has a disadvantage that it is easily worn, that is, has poor durability.

[0013]

Since the life of the OPC photosensitive member is shorter than the life of the main body, it is necessary to periodically replace the drum cartridge by a service person. In addition, since the developer for color development is composed of two components, a toner component and a magnetic material particle component, a service person periodically gives a magnetic material material due to a decrease or deterioration of the magnetic material particles in a developing device as the developer is used. There was a need to supply and replace.

In particular, due to the recent increase in print volume due to colorization and digitization of offices, a large number of ordinary character originals have been printed even in color copiers and color printers. Black sharpness and high durability are demanded, and there is a further demand for longer life and higher image quality of black in full color printers / full color copiers.

Accordingly, an object of the present invention is to provide a highly durable electrophotographic apparatus having a long life and high image quality.

Another object of the present invention is to provide a light receiving member suitable for use in such an electrophotographic apparatus.

[0017]

The present invention has been made to solve the above problems.

The electrophotographic apparatus of the present invention comprises a plurality of image carriers, and a yellow (Y), magenta (M), cyan (C), black (Bk) developer and a laser on the image carriers. Or a color image including a unit for developing a latent image formed by an LED, a unit for transferring the developer image on the image carrier to a recording body, and a unit for fixing the developer image on the recording body. In the electrophotographic apparatus for forming, the light receiving portion layer of the image carrier contains at least amorphous silicon (a-Si).

Also, the electrophotographic light receiving member of the present invention.
Indicates that the image carrier has a conductive support and a table of the conductive support.
Hydrogen atoms and / or silicon atoms on the surface
It is made of a non-single-crystal material containing a halogen atom, and
A photoreceptive layer having a photoconductive layer exhibiting photoconductivity and at least
An electrophotographic light-receiving member also having
10 to 30 atomic% of hydrogen atoms, and a small amount of the photoconductive layer.
At least the light absorption spectrum in the part where light enters?
The characteristic energy of the exponential function tail obtained is 5 meV or more and 6
0 meV or less, and localized state density in the photoconductive layer
Degree 1 × 10¹⁴cm^{- Three}More than 10¹⁶cm^-3Is less than
Become.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a photoconductor made of a-Si is used as a photoconductor drum of an electrophotographic color image forming apparatus. That is, a-SiC: H, a-Si
A durable number of photoconductors is 3,000,000 or more by using an a-Si photoconductor having a surface protective layer made of a hard material made of an amorphous material such as N: H, aC: H, and a-CN: H. And

In the present invention, when a constant charge is applied to an image carrier used for forming a black (Bk) image, a surface potential (chargeability) or an exposure amount required to generate a fixed amount of carrier ( (Sensitivity) of the other three image carriers is preferably 1.1 to 1.3 times, and the sensitivity is preferably 0.8 to 0.9 times.

The a-Si photoreceptor has a lower chargeability than the OPC photoreceptor, so it is difficult to use it under the same conditions as the OPC photoreceptor. In addition, since the a-Si photoconductor uses a semiconductor, the temperature dependence of chargeability is generated due to its semiconductor characteristics, and a sophisticated temperature control means is required. Therefore, in the present invention, as a light receiving member using a-Si, the photoconductive layer contains 10 to 30 atomic% of hydrogen atoms, and the light absorption spectrum of at least a part of the photoconductive layer where light is incident is obtained. Characteristic energy of the obtained exponential function tail is 50me
It is preferable to use a material having a local state density of 1 × 10 ¹⁴ cn− ³ or more and less than 1 × 10 ¹⁶ cm ⁻³ in the photoconductive layer, which has a charging property of not less than 1 × 10 ¹⁴ cn− ^{3 and} less than 1 × 10 ¹⁶ cm ^−3. However, it has been found that the temperature characteristics are reduced and the exposure memory is reduced.

It is very effective to control the characteristic energy (Arpack tail; Eu) of the exponential function tail of the photoreceptor. In general, the subgap light absorption spectrum of a-Si is roughly divided into two parts. That is, the portion where the absorption coefficient α changes exponentially, that is, linearly with respect to the photon energy hν (exponential function tail or Urbach tail; Eu), and the portion where α shows a gentler dependence on hν. .

The above-mentioned linear region corresponds to light absorption due to optical transition from the tail level on the valence band side to the conduction band in a-Si, and the exponential exponential relationship between the absorption coefficient α and hν in the linear region. Dependency is expressed by the following equation.

Α = α · exp (hν / Eu) The logarithm of both sides is 1nα = (1 / Eu) · hν + α1 (where α1 = 1nα), and the reciprocal of the characteristic energy Eu (1 / Eu) Represents the inclination of the straight line portion. Since Eu corresponds to the characteristic energy of the exponential energy distribution of the tail order on the valence band side, a small Eu means that the tail level on the valence band side is small. As a method of measuring the state of the localized level in such a band gap, generally, deep level spectroscopy, isothermal capacity transient spectroscopy, photothermal deflection spectroscopy, photoacoustic spectroscopy, constant photocurrent method, etc. are used. ing. Above all, constant photocurrent method (Constant P
hotocurrentMethod:, hereafter abbreviated as "CPM")
It is useful as a simple method for measuring a subgap light absorption spectrum based on the localized level of a-Si: H.

As shown in FIG. 2, by separately driving a system of a black (Bk) unit using an a-Si photosensitive member, high-speed printing and copying of a black original can be performed. That is, by enabling both full-color and high-speed black and white in one electrophotographic apparatus, space can be saved, and further, no maintenance of the photoconductor is enabled.

[0027]

The present invention and its effects will be described below with reference to examples. The present invention is not limited to these. Example 1 A light receiving member for electrophotography using a-Si used in the present invention will be described.

<Layer Structure> FIGS. 3 (a) to 3 (d) are schematic structural diagrams for explaining an example of a preferred layer structure of the electrophotographic light-receiving member of the present invention. The light receiving member 200 for electrophotography shown in FIG. 3A has a light receiving layer 202 provided on a conductive support 201 as a light receiving member. The light-receiving layer 202 is made of, for example, at least one of a hydrogen atom and a halogen atom, and a-Si (H, X) which is one of non-single-crystal materials containing a silicon atom. The conductive layer 203 is provided. FIG.
The electrophotographic light-receiving member 200 shown in FIG. 2B has a light-receiving layer 20 on a conductive support 201 for a light-receiving member.
2 are provided. The light receiving layer 202 is made of, for example, a-Si
A photoconductive layer 203 having photoconductivity made of (H, X);
And an amorphous silicon-based surface layer 204. FIG.
An electrophotographic light receiving member 200 shown in (c) has a light receiving layer 202 on a conductive support 201 as a light receiving member.
Is provided. The light receiving layer 202 is made of, for example, a-Si
(H. X), a photoconductive layer 203 having photoconductivity
And an amorphous silicon-based surface layer 204 and an amorphous silicon-based charge injection blocking layer 205. FIG.
An electrophotographic light receiving member 200 shown in (d) has a light receiving layer 20 on a conductive support 201 for a light receiving member.
2 are provided. The light receiving layer 202 is
3 has an a-Si (H, X) charge generation layer 206 and a charge transport layer 207, and an amorphous silicon-based surface layer 204.

Reference numeral 210 denotes a free surface. Surface layer 2
An upper injection blocking layer may be provided between the photoconductive layer 203 and the photoconductive layer 203.

<Film Forming Apparatus / Method> The light receiving member for electrophotography used in the present invention uses an RF-PCVD method using a high frequency RF band as shown in FIG. 4 or a VHF frequency band as shown in FIG. V
It is manufactured by an apparatus using the HF-PCVD method. The configuration of the manufacturing apparatus in the RF-PCVD method shown in FIG. 4 is as follows.

This apparatus is roughly classified into a deposition apparatus (310)
0), a source gas supply device (3200), a reaction vessel (3200)
111) is constituted by an exhaust device (not shown) for reducing the pressure in the inside. A cylindrical support (3112), a heater for heating the support (3113), and a source gas introduction pipe (311) are provided in a reaction vessel (3111) in the deposition apparatus (3100).
4) is installed, and a high-frequency matching box (3)
115) are connected.

The raw material gas supply device (3200) includes SiH ₄ ,
Gas cylinders for raw materials such as GeH ₄ , H ₂ , CH ₄ , B ₂ H ₆ , PH ₃ (3
221 to 226) and valves (3231 to 236, 3
241-3246, 3251-3256) and mass flow controllers (3211-216), and each raw material gas cylinder is connected to a gas introduction pipe (3114) in a reaction vessel (3111) via an auxiliary valve (3260). .

The formation of a deposited film using this apparatus can be performed, for example, as follows. First, the reaction vessel (31
11), a cylindrical support (3112) is set inside, and the inside of the reaction vessel (3111) is evacuated by an exhaust device (not shown). Subsequently, the temperature of the cylindrical support (3112) is controlled to a predetermined temperature of, for example, 200 ° C. to 350 ° C. by the support heating heater (3113).

A source gas for forming a deposited film is supplied to a reaction vessel (31).
11), the raw material gas cylinder valve (32
31-236), a leak valve of the reaction vessel (311
7) is closed, and a gas inflow valve (3241 to 246) and a gas outflow valve (325)
1-3256), confirm that the auxiliary valve (3260) is open, and firstly, the main exhaust valve (3118).
To open the reaction vessel (3111) and gas pipe (311
6) Exhaust.

Next, the reading of the vacuum gauge (3119) was about 1 × 1.
When the pressure becomes 0 ^-2 Pa, the auxiliary valve (3260) and the gas outflow valves (3251 to 256) are closed. afterwards,
Each raw material gas is introduced from the raw gas cylinder (3221 to 226) by opening the raw gas cylinder valve (3231 to 236), and each gas pressure is adjusted to 0.2 MPa (2 kg / cm ² ) by the pressure regulator (3261 to 266). I do. Next, gradually open the gas inflow valves (3241 to 246),
Each raw material gas is supplied to a mass flow controller (3211 to 311).
216).

After the preparation for film formation is completed as described above, each layer is formed in the following procedure. Cylindrical support (3
When 112) reaches a predetermined temperature, necessary ones of the gas outflow valves (3251 to 256) and the auxiliary valve (3260) are gradually opened, and the raw material gas cylinder (32) is opened.
A predetermined gas is supplied from a gas introduction pipe (311 to 213-226).
4) and introduced into the reaction vessel (3111). Next, a mass flow controller (3211-216)
Is adjusted so that each source gas has a predetermined flow rate. At that time, the pressure in the reaction vessel (3111) was 1.5 ×
10 ² Pa gauge to be equal to or less than the predetermined pressure (311
Adjust the opening of the main valve (3118) while watching 9). When the internal pressure stabilizes, the frequency of 13.56 MHz
An RF power source (not shown) is set to a desired power, and the reaction vessel (311) is passed through a high-frequency matching box (3115).
Glow discharge is generated by introducing RF power into 1). The raw material gas introduced into the reaction vessel is decomposed by the discharge energy, and a deposited film containing silicon as a main component is formed on the cylindrical support (3112). After the desired film thickness is achieved, the supply of the RF power is stopped, the gas outflow valve is closed, the flow of the source gas into the reaction vessel is stopped, and the formation of the deposited film is completed.

By repeating the same operation a plurality of times, a light receiving layer having a desired multilayer structure is formed.

When forming each layer, all gas outflow valves of gases other than the necessary source gas are closed, and each gas is supplied to the reaction vessel (3111).
The gas outflow valves (3251 to 256) are closed in order to avoid remaining in the piping from the gas outflow valves (3251 to 256) to the reaction vessel (3111).
The auxiliary valve (3260) is opened, the main exhaust valve (3118) is fully opened, and the system is once evacuated to a high vacuum as needed.

In order to make the film uniform, it is also effective to rotate the cylindrical support (3112) at a predetermined speed by a driving device (not shown) during the layer formation. is there.

Further, it goes without saying that the above-mentioned source gas type and valve operation are changed according to the production conditions of each layer.

Next, a method of manufacturing an electrophotographic light-receiving member formed by a high-frequency plasma CVD method using a frequency in the VHF band (hereinafter abbreviated as "VHF-PCVD") will be described.

By connecting the deposition apparatus (4100) shown in FIG. 5 to the source gas supply apparatus (3200) instead of the deposition apparatus (3100) by the RF-PCVD method in the manufacturing apparatus shown in FIG. An electrophotographic light-receiving member manufacturing apparatus by the PCVD method can be obtained.

This apparatus is roughly classified into a reaction vessel (411)
1), a source gas supply device (3200), and an exhaust device (not shown) for reducing the pressure inside the reaction vessel. In the reaction vessel (4111), a cylindrical support (4112), a heater for heating the support (4113), a raw material gas introduction pipe (not shown), and an electrode (4115) are installed. (411
6) is connected. Further, the inside of the reaction vessel (4111) is connected to an exhaust device (not shown) through an exhaust pipe (4121).

The source gas supply device (3200) is made of SiH ₄ ,
Raw material gas cylinders such as GeH ₄ , H ₂ , CH ₄ , B ₂ H ₆ , PH ₃ (32
21 to 2226) and valves (3231 to 236, 32)
41-3246, 3251-256) and a mass flow controller (3211-216),
Each raw material gas cylinder is connected to a gas introduction pipe (not shown) in the reaction vessel (4111) via an auxiliary valve (3260). The space (4130) surrounded by the cylindrical support (4112) forms a discharge space.

The formation of a deposited film in this apparatus by the VHF-PCVD method can be performed as follows.

First, a cylindrical support (4112) is set in a reaction vessel (4111), and a motor (4) for rotating the support is installed.
120) to rotate the cylindrical support (4112),
The inside of the reaction vessel (4111) is exhausted through an exhaust pipe (4121) by an exhaust device (not shown) (for example, a diffusion pump),
The pressure in the reaction vessel (4111) is adjusted to, for example, 0.1 Pa or less. Subsequently, the heater for heating the support (411)
According to 3), the cylindrical support (4112) is, for example, 200
It is heated and maintained at a predetermined temperature of from 350C to 350C.

A source gas for forming a deposited film is supplied to a reaction vessel (41).
To make the gas flow into 11), the valve (3
231 to 236), confirm that the leak valve (not shown) of the reaction vessel is closed, and check the gas inflow valve (3241 to 246) and the gas outflow valve (325).
1-3256), confirm that the auxiliary valve (3260) is open, and firstly, the main exhaust valve (not shown)
Is opened to exhaust the inside of the reaction vessel (4111) and the gas pipe.

Next, a vacuum gauge (not shown) reads about 1 × 1.
When the pressure becomes 0 ^-2 Pa, the auxiliary valve (3260) and the gas outflow valves (3251 to 256) are closed.

Thereafter, the raw material gas cylinders (3221-32)
26) Each raw material gas is supplied to the raw material gas cylinder valve (323)
1-3236) is opened and introduced, and the pressure regulator (3261) is introduced.
~ 3266) to make each source gas pressure 0.2Mpa (2Kg / c
m ² ). Next, gas inflow valves (3241 to 3241)
246) is gradually opened, and each source gas is introduced into the mass flow controllers (3211 to 216).

After the preparation for film formation is completed as described above, each layer is formed on the cylindrical support (4112) as follows.

When the cylindrical support (4112) reaches a predetermined temperature, the gas outflow valves (3251 to 256)
Are gradually opened, and the auxiliary valve (3260) is gradually opened, and a predetermined raw material gas is supplied from the raw material gas cylinder (3221 to 226) through a gas introduction pipe (not shown) to the discharge space in the reaction vessel (4111). (4130).
Next, the mass flow controller (3211-216)
Is adjusted so that each source gas has a predetermined flow rate. At that time, the pressure in the discharge space (4130) was 1.5 ×
Adjust the opening of the main exhaust valve (not shown) while watching the vacuum gauge (not shown) so as to obtain a predetermined pressure of 10 ² Pa or less.

When the pressure is stabilized, for example, the frequency 5
A VHF power supply (not shown) of 00 MHz is set to a desired power, and VHF power is introduced into the discharge space (4130) through the high frequency matching box (4116) to generate a glow discharge. Thus, in the discharge space (4130) surrounded by the cylindrical support (4112), the introduced source gas is excited by the discharge energy and dissociated, and a predetermined deposited film is formed on the cylindrical support (4112). Is done. At this time, the cylindrical support is rotated at a desired rotation speed by a support rotation motor (4120) in order to achieve uniform layer formation.

After the desired film thickness is formed, the supply of VHF power is stopped, the gas outflow valve is closed to stop the flow of the source gas into the reaction vessel, and the formation of the deposited film is completed. By repeating the same operation a plurality of times, a light receiving layer having a desired multilayer structure is formed.

When forming each layer, all the gas outflow valves other than the necessary source gas are closed, and each source gas is supplied into the reaction vessel (4111) and the gas outflow valves (3251 to 256). To reaction vessel (4
To avoid remaining in the pipe leading to 111),
The gas outflow valves (3251 to 256) are closed, the auxiliary valve (3260) is opened, and the main exhaust valve (not shown) is fully opened to temporarily exhaust the system to a high vacuum as needed. It goes without saying that the above-mentioned source gas type and valve operation are changed according to the conditions for forming each layer.

In any of the RF-PCVD method and the VHF-PCVD method, the temperature of the support at the time of forming the deposited film is preferably 200 ° C. to 350 ° C., more preferably 230 ° C. to 330 ° C., and still more preferably. Is 250 ° C. or higher 310
It is below ° C.

When forming the photoconductive layer, Eu and DOS
In order to change in the layer thickness direction, for example, in addition to the above-described operation, an operation of continuously changing the ratio of the SiH ₄ flow rate and the discharge power and an operation of continuously changing the substrate temperature may be performed as necessary. Good.

The heating method of the support may be a heating element having a vacuum specification, for example, an electric resistance heating element such as a winding heater of a sheath heater, a plate heater, or a ceramic heater, or a heat source such as a halogen lamp or an infrared lamp. A radiation lamp heating element, a heating element using a liquid, a gas, or the like as a heating medium, and a heating element by a heat exchange means can be considered. As the surface material of the heating means, metals such as stainless steel, nickel, aluminum, and copper, ceramics, heat-resistant polymer resins, and the like can be used.

In addition to the above, a method is also used in which a heating-only container is provided in addition to the reaction container, and after heating, the support is transferred into the reaction container in a vacuum.

The size and shape of the electrode (3115) provided in the discharge space in the VHF-PCVD method may be any as long as they do not disturb the discharge. However, in practice, a cylindrical shape having a diameter of 1 mm or more and 10 cm or less is preferable. . At this time, the length of the electrode can be arbitrarily set as long as the electric field is uniformly applied to the support.

The electrode may be made of any material as long as at least its surface has conductivity.
Metals such as Al, Cr, Mo, Au, In, Nb, Te, V, Ti, Pt, Pb, and Fe, alloys thereof, and glass or ceramics whose surfaces are conductively treated are generally used.

With the above apparatus, a photoconductive layer in which the photoconductive layer of the light receiving member contains 10 to 30 atomic% of hydrogen was produced. Further, the film formation parameters are changed, and Eu (characteristic energy of an exponential function tail) obtained from a light absorption spectrum in at least a part of the photoconductive layer where light is incident is 50 me.
Those having V to 60 meV were produced.

Eu was deposited on a glass substrate (Corning Co., Ltd. 7059) and a Si wafer placed in a cylindrical sample holder using the above-mentioned film forming apparatus, and a-Si film having a thickness of 1 μm was formed under the conditions for forming a photoconductive layer. Film samples were deposited. A sample of the deposited film on a glass substrate is deposited with a comb electrode of Al,
Was measured. This measurement was performed by the CPM described above. C
PM is a method of measuring the energy level of a thin film sample by irradiating the sample with light having a varied wavelength so that the photocurrent of the thin film sample is constant. DOS (localized level density) was also measured by CPM.

In this embodiment, a spectrophotometer SS-25GD manufactured by JASCO Corporation, a current application amplifier LI-76 manufactured by NF circuit,
The evaluation was performed using a lock-in amplifier 5610B manufactured by the company. The produced photoreceptor was evaluated for its photoreceptor characteristics using NP6750 manufactured by Canon. The evaluation of the photoreceptor characteristics was performed on the temperature dependence of the potential (temperature characteristics), the sensitivity characteristics, and the exposure memory characteristics. As for the temperature characteristics, the charging ability was measured while changing the temperature of the photoreceptor from room temperature to about 45 ° C., and the change in charging ability per 1 ° C. was measured. At this time, 2 V / deg or less was judged to be acceptable. Regarding the exposure memory, the image was visually determined, and the sensitivity was determined to be the conventional one as rank 3 (practical). 1: Very good, 2: Good, 3: Practical, 4: Practical No problem, 5: Practical, slightly difficult, ranked 5 levels. In addition, when it is difficult to determine the rank, a rank between 1 and 2 is described as rank 1.5.

The results are shown in FIGS. 6 (a) to 6 (c). As shown in these figures, the produced photoconductive layer exhibited excellent temperature characteristics, sensitivity and exposure memory of Eu at 50 eV to 60 eV. In addition, it exhibited excellent characteristics in image deletion during strong exposure. Further, by changing the deposition parameters, it was subjected to the same evaluation as to the photosensitive member with varying DOS in the photoconductive layer shown in FIG. 6, 1 × 10 ¹⁴ cm ^-3 or more 1 × 10 ¹⁶ cm Below ^-3 , good results as shown in FIGS. 7 (a) and 7 (b) were obtained. The same evaluation was obtained by modifying Canon NP 6750 and exposing an image with a laser (each peak wavelength of 600 to 800 nm), and almost the same results as shown in FIGS. 6 and 7 were obtained. Example 2 A color copying machine CLC1000 (manufactured by Canon Inc., whose configuration is shown in FIG. 1) was modified, and the drums 1a to 1d were equipped with a-Si photosensitive drums. As the a-Si photosensitive member, a representative a-Si photosensitive member having a layer configuration as shown in FIG. 2C was used.

The outer diameters of the a-Si photosensitive members are each 60 mm. Photoconductor charge polarity, developer type, image writing method (image exposure: exposing the image area, background exposure:
Conditions such as exposing the non-image portion) are as shown in Table 1. As the developer, a two-component developer was used. The characteristics (charging properties and sensitivity characteristics) of the four drums were almost the same, and those having good Eu and DOS values in Example 1 were used.

[0066]

[Table 1]

In the image evaluation, an electrophotographic test chart No. 5-1 was used as a standard color chart. The black-and-white image was formed using characters (black) with a document density of 6%. The image evaluation was performed on the sharpness, fog and exposure memory of each image. The endurance characteristics were evaluated by performing A4 (horizontal) 3 million sheet-passing endurance using the above-described standard chart for color. The contents of the evaluation are the potential fluctuation during the endurance, the image density fluctuation, the fog, and the image quality after the endurance. Fog is a reflection densitometer that measures the reflectance of a recording medium before and after solid white image formation.
Evaluated by the difference (unit: [%]) between the reflectance before the solid white image formation and the reflectance after the solid white image formation of the measured value measured by TC-6DS (registered trademark: Tokyo Denshoku Co., Ltd.) It is generally desirable that the value be 2.0% or less.

The results are shown in Tables 2 and 3.

(Initial Characteristics) Good results were obtained in both color and black and white. This is because the dot reproducibility was improved by using the a-Si photoconductor.

(Durability Characteristics) Good results were obtained in both color and black and white after running 300 sheets. This is because the use of the a-Si photoreceptor improved the dot reproducibility of black and white in this case. Further, the a-Si photoreceptor hardly fluctuated in potential during durability, so that the density variation and VL (exposure potential) variation during durability were very good.

[0071]

[Table 2]

[0072]

[Table 3]

As described above, it can be seen that the use of the a-Si photosensitive member in a color image forming apparatus having a plurality of image carriers is very effective. Example 3 A color copying machine CLC1000 made by Canon (configuration is as shown in FIG. 1) was modified, and drums 1a to 1d were equipped with a-Si photosensitive drums. As the a-Si photosensitive member, a representative a-Si photosensitive member having a layer configuration as shown in FIG. 3C was used.

The outer diameters of the a-Si photosensitive members are each 60 mm. Photoconductor charge polarity, developer type, image writing method (image exposure: exposing the image area, background exposure:
Conditions such as exposing the non-image portion) are as shown in Table 4. As the developer, a two-component developer was used. The characteristics (chargeability and sensitivity characteristics) of the four drums are almost the same, and a conventional drum having Eu and DOS values different from those of the a-Si photoreceptor of the present invention is used.

[0075]

[Table 4]

In the image evaluation, an electrophotographic test chart No. 5-1 was used as a color standard chart. The black-and-white image was formed using characters (black) with a document density of 6%. The image evaluation was performed on the sharpness, fog and exposure memory of each image. The endurance characteristics were evaluated by passing 3 million A4 (horizontal) sheets of the standard color chart shown above and 60,000 sheets of A4 (horizontal) sheets in the case of the OPC photosensitive member. The contents of the evaluation are the potential fluctuation during the endurance, the image density fluctuation, the fog, and the image quality after the endurance. Fog is a solid white image based on the reflectance of a recording medium measured before and after the solid white image is formed by a reflection densitometer TC-6DS (registered trademark: manufactured by Tokyo Denshoku Co., Ltd.) before and after the solid white image formation. It is evaluated by the difference value (unit is [%]) of the reflectance after formation, and the value is 2.
It is generally desirable that it be 0 [%] or less.

As shown in Tables 5 and 6, good results were obtained in both initial characteristics and durability characteristics.

[0078]

[Table 5]

[0079]

[Table 6]

Example 4 A color copying machine CLC1000 (manufactured by Canon) having a configuration as shown in FIG. 1 was modified, and a-Si photosensitive drums were mounted on drums 1a to 1d.

An a-Si photosensitive member, a representative a-Si photosensitive member having a layer structure as shown in FIG. 2C was used.

The outer diameters of the a-Si photosensitive members are each 60 mm. Photoconductor charge polarity, developer type, image writing method (image exposure: exposing the image area, background exposure:
Conditions such as exposing the non-image portion) are as shown in Table 7. The developer used was one component. The characteristics of the four drums are
Approximately equal ones were used, and Eu and DOS used were those which showed good results in Example 1.

[0083]

[Table 7]

For image evaluation, an electrophotographic test chart No. 5-1 was used as a color standard chart. The black-and-white image was formed using characters (black) with a document density of 6%. The image evaluation was performed on the sharpness, fog and exposure memory of each image. The endurance characteristics were evaluated by performing A4 (horizontal) 3 million sheets of paper passing durability using the standard chart for color described above. The details of the evaluation include potential fluctuations during image running, image density fluctuations, fog, and image quality after running. Fog refers to the reflectance of a recording medium before and after the formation of a solid white image.
6DS (registered trademark: manufactured by Tokyo Denshoku Co., Ltd.) is evaluated by a difference value (unit is [%]) of the reflectance after the solid white image is formed before and after the solid white image is formed. The value is 2.
It is generally desirable that it be 0 [%] or less. Table 8 shows the results.
And 9.

(Initial Characteristics) Good results were obtained in both color and black and white. This is because the dot reproducibility was improved by using the a-Si photoreceptor.

(Durability Characteristics) Good results were obtained in both color and black and white after running 300 sheets. This is because the use of the a-Si photoreceptor improved the dot reproducibility of black and white in this case. Further, as shown in FIG.
With the i photoreceptor, there was almost no change in potential during the running, so that the density fluctuation and the VL (exposure potential) during the running were very good.

[0087]

[Table 8]

[0088]

[Table 9]

As described above, it can be seen that the use of the a-Si photosensitive member in a color image forming apparatus having a plurality of image carriers is very effective. In addition, even with the toner outside component, good durability was exhibited without abrasion of the drum. Example 5 A color copying machine CLC1000 made by Canon (the configuration is as shown in FIG. 1) was modified, and the drums 1a to 1d were equipped with a-Si photosensitive drums.

An a-Si photosensitive member and a representative a-Si photosensitive member having a layer structure as shown in FIG. 2C were used.

The outer diameters of the a-Si photosensitive members are each 60 mm. Photoconductor charge polarity, developer type, image writing method (image exposure: exposing the image area, background exposure:
Conditions such as exposing the non-image portion) are as shown in Table 10.
All the developing materials used were of two components. The characteristics of the four drums were almost the same, and the values of Eu and DOS which showed good results in Example 1 were used.

The 1d a-Si photoreceptor has 1.1 times, 1.2 times, and 1.3 times the chargeability and 0.8 times the sensitivity as compared with the other three photoreceptors. , 0.9 times.

[0093]

[Table 10]

[0094]

[Table 11]

For image evaluation, an electrophotographic test chart No. 5-1 was used as a standard chart for color. The black-and-white image was formed using characters (black) with a document density of 6%. The image evaluation was performed on the sharpness, fog and exposure memory of each image. The endurance characteristics were evaluated by performing A4 (horizontal) 3 million sheet-passing endurance on the color standard chart described above. The details of the evaluation include potential fluctuations during image running, image density fluctuations, fog, and image quality after running. Fog refers to the reflectance of a recording medium before and after the formation of a solid white image.
6DS (registered trademark: manufactured by Tokyo Denshoku Co., Ltd.) was evaluated by the difference between the reflectance before the solid white image formation and the reflectance after the solid white image formation (unit is [%]). It is generally desirable that the value be 2.0% or less.

FIG. 8 shows the results of image density fluctuation and fog.
(A) and (b), and FIGS. 9 (a) and (b).
FIG. 8 shows the results of E3-A to C of Table 11, and FIG. 9 shows the results of E3-D to E of Table 12. As shown in FIGS. 8 and 9, it is preferable to use the photosensitive member having the chargeability and sensitivity range of the present invention in black in order to minimize the density fluctuation in durability. This is because the use of the range of the chargeability and sensitivity characteristics of the present invention improves the reproduction of black dots, and is preferable in improving black quality and sharpness of the entire image.

[0097]

According to the present invention, an a-Si photosensitive member is used in a full-color, multi-color or black-and-white and full-color electrophotographic apparatus using a plurality of image carriers, thereby providing excellent high durability and high durability. Provides total performance of image quality to electrophotographic equipment. Further, changing the characteristics of the photoconductor in a photoconductor for Bk (black), which is particularly frequently used, improves the total balance, improves the quality of a black-and-white image, and improves the durability stability.
Further, the photoconductive layer contains a certain amount of hydrogen atoms,
By using an electrophotographic light-receiving member having u and Dos, improvements in exposure memory, temperature dependency, sensitivity and the like can be realized.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view illustrating an embodiment of an electrophotographic apparatus including a plurality of image forming units.

FIG. 2 is a schematic explanatory view illustrating another embodiment of an electrophotographic apparatus including a plurality of image forming units.

FIG. 3 is a schematic explanatory view for explaining an example of a preferred layer configuration of the electrophotographic light-receiving member of the present invention.

FIG. 4 is a schematic explanatory view of an electrophotographic light-receiving member manufacturing apparatus by a glow discharge method using an RF band high frequency for manufacturing a light-receiving layer.

FIG. 5 is a schematic explanatory view of an electrophotographic light-receiving member manufacturing apparatus by a glow discharge method using a high frequency in a VHF band for manufacturing a light-receiving layer.

FIG. 6 is a view showing a relationship among characteristic energy (Eu) of Urbach Til of a photoconductive layer in an electrophotographic light receiving member, temperature characteristics, a sensitivity evaluation rank, and an exposure memory rank.

FIG. 7 is a diagram showing the relationship among the local density of state (DOS) of the photoconductive layer in the photoreceptor member for electrophotography, the temperature characteristic, the sensitivity evaluation rank, and the exposure memory rank.

FIG. 8 is a diagram showing the relationship between chargeability, density fluctuation, and fog in the photoreceptor of the present invention.

FIG. 9 is a diagram showing the relationship between sensitivity characteristics, density fluctuation, and fog in the photoreceptor of the present invention.

[Explanation of symbols]

 1a to 1d Photoreceptor 2a to 2d Primary charger 3a to 3d Image exposure device 4a to 4d Developing device 5a to 5d Cleaner 6a to 6d Transfer charging unit 7 Fixing device 8 Recording material carrying belt 9 Conveyance path for black and white document 13 Registration roller 200 Light receiving member 201 Conductive support 202 Light receiving layer 203 Photoconductive layer 204 Surface layer 205 Charge injection blocking layer 206 Charge generation layer 207 Charge transport layer 210 Free surface 3100, 4100 Deposition device 3111, 4111 Reaction vessel 3112, 4112 Cylindrical Support 3113, 4113 Heater for heating the support 3114 Source gas introduction pipe 3115, 4116 High frequency matching box 3116 Source gas piping 3117 Reaction vessel leak valve 3118 Main exhaust valve 3119 Vacuum gauge 3200 Source gas supply device 3211 to 3216 Mass flow controller 3221-226 Raw material gas cylinder 3231-236 Raw material gas cylinder valve 3241-246 Gas inflow valve 3251-256 Gas outflow valve 3260 Auxiliary valve 3261-266 Pressure regulator 4115 Electrode 4120 Support rotating motor 4121 Exhaust pipe 4130 Discharge space

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[Procedure amendment]

[Submission date] January 26, 2001 (2001.1.2)
6)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Name of invention

[Correction method] Change

[Correction contents]

[Title of the Invention] Electrophotographic apparatus

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] Claim 3

[Correction method] Change

[Correction contents]

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0001

[Correction method] Change

[Correction contents]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a full-color copying machine, a multi-color copying machine, or a similar printer having a plurality of photoconductors. It relates to a photographic device.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Deleted

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0019

[Correction method] Deleted

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0022

[Correction method] Change

[Correction contents]

The a-Si photoreceptor has a lower chargeability than the OPC photoreceptor, so it is difficult to use it under the same conditions as the OPC photoreceptor. In addition, since the a-Si photoconductor uses a semiconductor, the temperature dependence of chargeability is generated due to its semiconductor characteristics, and a sophisticated temperature control means is required. Therefore, in the present invention, the image carrier is composed of a conductive support, and a non-single-crystal material containing hydrogen atoms and / or halogen atoms on the surface of the conductive support with silicon atoms as a host, and At least a photoreceptive layer having a photoconductive layer exhibiting photoconductivity, the photoconductive layer contains 10 to 30 atomic% of hydrogen atoms, and a light absorption spectrum of at least a part of the photoconductive layer where light is incident. Wherein the characteristic energy of the exponential function tail obtained from is not less than 50 meV and not more than 60 meV, and the density of localized states in the photoconductive layer is not less than 1 × 10 ¹⁴ cn ^{-3 and} less than 1 × 10 ¹⁶ cm ^-3. It has been found that it is preferably a receiving member, whereby the charging characteristics are improved, the temperature characteristics are reduced, and the exposure memory is reduced.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Kunimasa Kawamura 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term in Canon Inc. (Reference) 2H030 AA03 AB02 BB02 BB63 BB71 2H068 DA24 DA31 DA37

Claims (3)

[Claims] An image carrier comprising a plurality of image carriers, yellow (Y), magenta (M), cyan (C), black (Bk)
Means for developing a latent image formed by a laser or an LED on the image carrier with the developer, means for transferring the developer image on the image carrier to a recording medium, and development on the recording medium. An electrophotographic apparatus for forming a color image, comprising: means for fixing a developer image, wherein the light receiving portion layer of the image carrier contains at least amorphous silicon (a-Si). apparatus. 2. A surface potential (chargeability) when a constant charge is applied to an image carrier used for forming a black (Bk) image.
Alternatively, the exposure amount (sensitivity) required to generate a certain amount of carriers is as follows: chargeability: 1.1 times or more and 1.3 times or less Sensitivity: 0.8 times or more 2. The electrophotographic apparatus according to claim 1, wherein the magnification is 0.9 or less. 3. The image carrier comprises a conductive support, and a non-single-crystal material containing a hydrogen atom and / or a halogen atom based on a silicon atom on a surface of the conductive support, and A photoreceptive layer having a photoconductive layer exhibiting photoconductivity, wherein the photoconductive layer has a content of 10 to 30 atomic%.
Containing hydrogen atoms of, the characteristic energy of the exponential function tail obtained from the light absorption spectrum in at least the light incident portion of the photoconductive layer is 5 meV or more and 60 meV or less,
And the local density of states in the photoconductive layer is 1 × 10 ¹⁴ cm ^−3.
3. The electrophotographic apparatus according to claim 1, wherein the electrophotographic light-receiving member has a size of 10 < ¹⁶ cm < ^-3 > or less.