JP2002191163A5 - - Google Patents
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- Publication number
- JP2002191163A5 JP2002191163A5 JP2000388444A JP2000388444A JP2002191163A5 JP 2002191163 A5 JP2002191163 A5 JP 2002191163A5 JP 2000388444 A JP2000388444 A JP 2000388444A JP 2000388444 A JP2000388444 A JP 2000388444A JP 2002191163 A5 JP2002191163 A5 JP 2002191163A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000388444A JP2002191163A (ja) | 2000-12-21 | 2000-12-21 | リニアモータ及びこれを駆動源とする駆動装置 |
GB0130246A GB2374469B (en) | 2000-12-21 | 2001-12-18 | Linear motor sytem and driving apparatus driven by same |
KR1020010081600A KR100834485B1 (ko) | 2000-12-21 | 2001-12-20 | 리니어 모터 및 이것을 구동원으로 하는 구동 장치 |
US10/022,265 US6700228B2 (en) | 2000-12-21 | 2001-12-20 | Linear motor system and driving apparatus driven by same |
DE10163283A DE10163283B4 (de) | 2000-12-21 | 2001-12-21 | Antriebsvorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000388444A JP2002191163A (ja) | 2000-12-21 | 2000-12-21 | リニアモータ及びこれを駆動源とする駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002191163A JP2002191163A (ja) | 2002-07-05 |
JP2002191163A5 true JP2002191163A5 (US20070244113A1-20071018-C00138.png) | 2008-02-14 |
Family
ID=18855176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000388444A Pending JP2002191163A (ja) | 2000-12-21 | 2000-12-21 | リニアモータ及びこれを駆動源とする駆動装置 |
Country Status (5)
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4594093B2 (ja) * | 2002-12-26 | 2010-12-08 | 株式会社アイエイアイ | 駆動装置 |
JP4521221B2 (ja) * | 2004-05-18 | 2010-08-11 | 日本トムソン株式会社 | 可動マグネット型リニアモータを内蔵したスライド装置 |
DE102004051829A1 (de) * | 2004-10-25 | 2006-05-04 | Bosch Rexroth Mechatronics Gmbh | Linearführungs-Vorschubmodul mit Führungskörper sowie Ausleger hierfür |
EP1732197B1 (de) * | 2005-06-09 | 2015-06-10 | Alois Jenny | Linearmotor mit integrierter Führung |
JP2007060763A (ja) * | 2005-08-23 | 2007-03-08 | Star Seiki Co Ltd | リニア倍速駆動装置及び成形品取出機 |
KR20070056702A (ko) * | 2005-11-30 | 2007-06-04 | 엘지전자 주식회사 | 리니어 압축기 |
JP5006579B2 (ja) * | 2006-05-31 | 2012-08-22 | 日本トムソン株式会社 | 可動マグネット型リニアモータを内蔵したスライド装置 |
CN101517887B (zh) * | 2006-09-29 | 2012-01-11 | Thk株式会社 | 多台交流线性电动机的控制方法、多台交流线性电动机驱动装置和多台交流线性电动机系统 |
CN101785175A (zh) * | 2007-10-25 | 2010-07-21 | 三洋电机株式会社 | 发电装置 |
JP2009136065A (ja) * | 2007-11-29 | 2009-06-18 | Canon Inc | 平面モータおよびそれを用いたステージ |
TWI479777B (zh) * | 2010-10-18 | 2015-04-01 | Hon Hai Prec Ind Co Ltd | 音圈馬達 |
CZ309404B6 (cs) * | 2011-05-04 | 2022-11-30 | České vysoké učení technické v Praze | Vzpěra, zvláště suvná nebo otočná vzpěra výrobních strojů |
KR101289094B1 (ko) * | 2011-07-29 | 2013-07-23 | 삼성전기주식회사 | 선형 모터 |
KR101210255B1 (ko) | 2012-01-02 | 2012-12-11 | 주식회사 져스텍 | 아날로그 홀 센서를 적용한 리니어 모터 시스템 |
DE102016106621A1 (de) * | 2016-04-11 | 2017-10-12 | Weber Maschinenbau Gmbh Breidenbach | Vorrichtung, Transportmover und Transportmoversystem |
CN105720782A (zh) * | 2016-04-21 | 2016-06-29 | 哈尔滨理工大学 | 一种能够在平面内旋转和自由移动的直线电机 |
TWI714379B (zh) * | 2019-12-04 | 2020-12-21 | 東佑達自動化科技股份有限公司 | 具有散熱效果的滑台裝置及其製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61293741A (ja) * | 1985-06-21 | 1986-12-24 | Hiroshi Teramachi | テ−ブル移送装置 |
US6357359B1 (en) * | 1990-10-23 | 2002-03-19 | Kent R. Davey | Integrated high speed maglev system utilizing an active lift |
JPH0716300B2 (ja) * | 1991-08-28 | 1995-02-22 | 孝一 村上 | 他励磁形リニアパラメトリックモータ |
KR0152892B1 (ko) * | 1995-02-11 | 1998-12-15 | 이희종 | 원통형 리니어 모터의 1차측 고정자 구조 |
JPH1198811A (ja) * | 1997-09-24 | 1999-04-09 | Canon Inc | リニアモータ、これを用いたステージ装置や露光装置、ならびにデバイス製造方法 |
JP2000312464A (ja) * | 1999-04-26 | 2000-11-07 | Okuma Corp | 複合リニアモータ |
JP2001025229A (ja) * | 1999-07-06 | 2001-01-26 | Nippon Thompson Co Ltd | 可動コイル型リニアモータを内蔵したスライド装置 |
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2000
- 2000-12-21 JP JP2000388444A patent/JP2002191163A/ja active Pending
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2001
- 2001-12-18 GB GB0130246A patent/GB2374469B/en not_active Expired - Fee Related
- 2001-12-20 US US10/022,265 patent/US6700228B2/en not_active Expired - Fee Related
- 2001-12-20 KR KR1020010081600A patent/KR100834485B1/ko not_active IP Right Cessation
- 2001-12-21 DE DE10163283A patent/DE10163283B4/de not_active Expired - Fee Related