JP2002191163A5 - - Google Patents

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Publication number
JP2002191163A5
JP2002191163A5 JP2000388444A JP2000388444A JP2002191163A5 JP 2002191163 A5 JP2002191163 A5 JP 2002191163A5 JP 2000388444 A JP2000388444 A JP 2000388444A JP 2000388444 A JP2000388444 A JP 2000388444A JP 2002191163 A5 JP2002191163 A5 JP 2002191163A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000388444A
Other languages
Japanese (ja)
Other versions
JP2002191163A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000388444A priority Critical patent/JP2002191163A/ja
Priority claimed from JP2000388444A external-priority patent/JP2002191163A/ja
Priority to GB0130246A priority patent/GB2374469B/en
Priority to KR1020010081600A priority patent/KR100834485B1/ko
Priority to US10/022,265 priority patent/US6700228B2/en
Priority to DE10163283A priority patent/DE10163283B4/de
Publication of JP2002191163A publication Critical patent/JP2002191163A/ja
Publication of JP2002191163A5 publication Critical patent/JP2002191163A5/ja
Pending legal-status Critical Current

Links

JP2000388444A 2000-12-21 2000-12-21 リニアモータ及びこれを駆動源とする駆動装置 Pending JP2002191163A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000388444A JP2002191163A (ja) 2000-12-21 2000-12-21 リニアモータ及びこれを駆動源とする駆動装置
GB0130246A GB2374469B (en) 2000-12-21 2001-12-18 Linear motor sytem and driving apparatus driven by same
KR1020010081600A KR100834485B1 (ko) 2000-12-21 2001-12-20 리니어 모터 및 이것을 구동원으로 하는 구동 장치
US10/022,265 US6700228B2 (en) 2000-12-21 2001-12-20 Linear motor system and driving apparatus driven by same
DE10163283A DE10163283B4 (de) 2000-12-21 2001-12-21 Antriebsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000388444A JP2002191163A (ja) 2000-12-21 2000-12-21 リニアモータ及びこれを駆動源とする駆動装置

Publications (2)

Publication Number Publication Date
JP2002191163A JP2002191163A (ja) 2002-07-05
JP2002191163A5 true JP2002191163A5 (US20070244113A1-20071018-C00138.png) 2008-02-14

Family

ID=18855176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000388444A Pending JP2002191163A (ja) 2000-12-21 2000-12-21 リニアモータ及びこれを駆動源とする駆動装置

Country Status (5)

Country Link
US (1) US6700228B2 (US20070244113A1-20071018-C00138.png)
JP (1) JP2002191163A (US20070244113A1-20071018-C00138.png)
KR (1) KR100834485B1 (US20070244113A1-20071018-C00138.png)
DE (1) DE10163283B4 (US20070244113A1-20071018-C00138.png)
GB (1) GB2374469B (US20070244113A1-20071018-C00138.png)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4594093B2 (ja) * 2002-12-26 2010-12-08 株式会社アイエイアイ 駆動装置
JP4521221B2 (ja) * 2004-05-18 2010-08-11 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置
DE102004051829A1 (de) * 2004-10-25 2006-05-04 Bosch Rexroth Mechatronics Gmbh Linearführungs-Vorschubmodul mit Führungskörper sowie Ausleger hierfür
EP1732197B1 (de) * 2005-06-09 2015-06-10 Alois Jenny Linearmotor mit integrierter Führung
JP2007060763A (ja) * 2005-08-23 2007-03-08 Star Seiki Co Ltd リニア倍速駆動装置及び成形品取出機
KR20070056702A (ko) * 2005-11-30 2007-06-04 엘지전자 주식회사 리니어 압축기
JP5006579B2 (ja) * 2006-05-31 2012-08-22 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置
CN101517887B (zh) * 2006-09-29 2012-01-11 Thk株式会社 多台交流线性电动机的控制方法、多台交流线性电动机驱动装置和多台交流线性电动机系统
CN101785175A (zh) * 2007-10-25 2010-07-21 三洋电机株式会社 发电装置
JP2009136065A (ja) * 2007-11-29 2009-06-18 Canon Inc 平面モータおよびそれを用いたステージ
TWI479777B (zh) * 2010-10-18 2015-04-01 Hon Hai Prec Ind Co Ltd 音圈馬達
CZ309404B6 (cs) * 2011-05-04 2022-11-30 České vysoké učení technické v Praze Vzpěra, zvláště suvná nebo otočná vzpěra výrobních strojů
KR101289094B1 (ko) * 2011-07-29 2013-07-23 삼성전기주식회사 선형 모터
KR101210255B1 (ko) 2012-01-02 2012-12-11 주식회사 져스텍 아날로그 홀 센서를 적용한 리니어 모터 시스템
DE102016106621A1 (de) * 2016-04-11 2017-10-12 Weber Maschinenbau Gmbh Breidenbach Vorrichtung, Transportmover und Transportmoversystem
CN105720782A (zh) * 2016-04-21 2016-06-29 哈尔滨理工大学 一种能够在平面内旋转和自由移动的直线电机
TWI714379B (zh) * 2019-12-04 2020-12-21 東佑達自動化科技股份有限公司 具有散熱效果的滑台裝置及其製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61293741A (ja) * 1985-06-21 1986-12-24 Hiroshi Teramachi テ−ブル移送装置
US6357359B1 (en) * 1990-10-23 2002-03-19 Kent R. Davey Integrated high speed maglev system utilizing an active lift
JPH0716300B2 (ja) * 1991-08-28 1995-02-22 孝一 村上 他励磁形リニアパラメトリックモータ
KR0152892B1 (ko) * 1995-02-11 1998-12-15 이희종 원통형 리니어 모터의 1차측 고정자 구조
JPH1198811A (ja) * 1997-09-24 1999-04-09 Canon Inc リニアモータ、これを用いたステージ装置や露光装置、ならびにデバイス製造方法
JP2000312464A (ja) * 1999-04-26 2000-11-07 Okuma Corp 複合リニアモータ
JP2001025229A (ja) * 1999-07-06 2001-01-26 Nippon Thompson Co Ltd 可動コイル型リニアモータを内蔵したスライド装置

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