JP2002189008A - Nondestructive inspecting method and device, and data determining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To more accurately detect exfoliated parts in a coating than conventionally. SOLUTION: On the basis of measurement data, which indicates temperature changes with time, an evaluation value is computed using T*=(T-T2)/(T1-T2), where temperature is T; its evaluation value is T*; and temperatures at two different times are T1 and T2 (T1>T2). On the basis of the evaluation value, it is determined whether exfoliation has occurred in the coating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-destructive inspection method and apparatus for detecting peeling of a coating on a member constituted by applying a coating (film) on the surface of a base material.
Further, the present invention relates to a data determination device used for this.

[0002]

2. Description of the Related Art There is known a nondestructive inspection apparatus for detecting peeling of a coating applied to a base material surface by using an infrared thermography method. This non-destructive inspection device detects coating peeling based on the following principle.

[0003] The term "peeling" as used herein means a state in which the coating is not sufficiently adhered to the base material and a gap is formed between the two.

When a surface layer of a member (hereinafter referred to as a subject) having a surface coated thereon is heated from the outside, the heat applied from the outside is transmitted to the base material via the coating material. However, in a portion where the coating is peeled off from the base material, heat conduction to the base material is not performed well. That is, the heat conduction characteristics between the coating and the base material are different between the peeled part and the sound part (the part where the coating is in close contact with the base material and no separation occurs). In the healthy part, since the coating is in close contact with the base material, heat conduction between the coating material and the base material is performed relatively smoothly. On the other hand, in the peeling portion, heat is hardly transmitted because the coating is separated from the base material. For this reason, at the peeling portion, the heat remains accumulated in the coating (that is, high temperature). Therefore, in this heated state, by measuring the surface temperature distribution of the subject, the high-temperature portion can be detected as the peeled portion.

[0005] In an actual apparatus, heating is generally performed by irradiating infrared rays.

[0006] In an actual apparatus, it is general to judge whether or not it is a peeling portion based on a temperature at a certain point after the heating is stopped.

[0007]

The prior art described above simply discriminates between the sound part and the peeled part based on the temperature difference (temperature unevenness) between the sound part and the peeled part.

However, the cause of the temperature unevenness is not only the peeling of the coating. For example, uneven temperature may occur due to uneven heating. The heating unevenness occurs, for example, due to a change in the heating intensity for each inspection, or due to a change in the heating intensity for each location due to the arrangement of the heaters, even if the heating intensity of the heater is constant. In addition, temperature unevenness may occur due to variations in the thickness of the coating. In a part where the coating is thick, even if this is a sound part, the temperature may be at the same level as the peeled part. For this reason, it has been difficult in some cases to accurately detect a peeled portion in a measurement under a condition where temperature unevenness is likely to occur due to a factor other than the peeling of the coating.

In view of the above, the present invention has been made in view of the above, and provides a nondestructive inspection apparatus and method capable of detecting a peeled portion more accurately, and a data discriminating apparatus used for the same. The purpose is to:

[0010]

As a result of various studies, the present inventor has determined that the temperature at the measurement point is T, the evaluation value of this temperature is T ^*, and the temperatures at two different times are: When T1 and T2, and T1> T2, T ^*
= (T−T2) / (T1−T2) When the evaluation value is calculated, the evaluation value is not affected by unevenness in heating or the variation in the thickness of the coating. I noticed that it was possible to determine whether or not there had occurred. Considering the calculation accuracy of the evaluation value, it is preferable that T1 and T2 be as different as possible.

The present invention has been made based on such findings.

According to a first aspect of the present invention, there is provided a data judging device, which is used in a non-destructive inspection device for detecting a portion of a member formed by applying a coating on a base material surface where a coating is peeled off. In the discriminating apparatus, the temperature at the measurement point is defined as T based on measurement data indicating a time-dependent change in temperature at a desired measurement point on the surface of a member to be inspected (hereinafter, referred to as an “object”), When the evaluation value of the temperature is T ^* , the temperatures at two different times are T1 and T2, and T1> T2, T ^*
= (T−T2) / (T1−T2), based on the evaluation value calculating means for calculating the evaluation value, and whether or not the coating has peeled off at the measurement point based on the evaluation value calculated by the evaluation value calculating means. It is characterized by comprising a determining means for determining whether

[0013] According to a second aspect of the present invention, there is provided a data determination apparatus.
The method according to claim 1, wherein the measurement data is obtained after the heating is stopped.

According to a third aspect of the present invention, there is provided a data determination device,
In claim 2, the temperature T1 is a maximum temperature, and the temperature T2 is a minimum temperature.

According to a fourth aspect of the present invention, there is provided a data determination apparatus comprising:
2. The apparatus according to claim 1, further comprising a correction unit having correction data prepared in advance for a member having the same shape as the subject and having a known peeling state, and correcting the measurement data based on the correction data. Further, the evaluation value calculation means calculates the evaluation value based on the corrected measurement data corrected by the correction means.

According to a fifth aspect of the present invention, there is provided a data determining apparatus comprising:
5. The method according to claim 1, wherein the determination unit has a predetermined reference value and a predetermined determination time, and the evaluation value is such that the coating value is peeled off at a measurement point larger than the reference value at the determination time. Is determined to have occurred.

According to a sixth aspect of the present invention, there is provided a data determination apparatus comprising:
5. The method according to claim 1, wherein the determination unit has reference data indicating a change over time of a predetermined evaluation value and a predetermined determination period, and indicates a change over time of the evaluation value calculated by the evaluation value calculation unit. 6. Evaluation value data, in the determination period, it is determined that the coating is not peeling off at the measurement points that match within a predetermined range with the reference data, and that the coating is determined to be peeling off at the measurement points that do not match It is characterized by being.

According to a seventh aspect of the present invention, there is provided a data judging device comprising:
In claim 1 or 4, a plurality of positions are set as the measurement point, the determination means has a predetermined determination time, the evaluation value, at the determination time,
At a measurement point higher than the other measurement points, it is determined that the coating is peeled off.

[0019] According to an eighth aspect of the present invention, there is provided a data determination apparatus comprising:
5. The measurement point according to claim 1, wherein a plurality of positions are set as the measurement points, the determination unit has a predetermined determination period, and evaluation value data indicating a temporal change of the evaluation value is stored in the determination period. In the method, it is characterized in that it is determined whether or not the coating has peeled off by comparing with evaluation value data indicating a temporal change of the evaluation value at another measurement point.

According to a ninth aspect of the present invention, there is provided a data judging device comprising:
5. The method according to claim 1, wherein the determining unit is configured to determine a temporal change rate of the evaluation value at the measurement point based on evaluation value data indicating a temporal change of the evaluation value calculated by the evaluation value calculating unit. Evaluation value change rate), and determines whether or not the coating has peeled off at the measurement point based on the magnitude of the evaluation value change rate calculated by the differential calculation means. It is characterized by that.

According to a tenth aspect of the present invention, in the ninth aspect, the determination means has a predetermined reference value and a predetermined determination time, and the measurement data is obtained when the temperature falls. In the above case, the evaluation value change rate is determined to determine that the coating is peeled off at a measurement point smaller than the reference value at the determination time.

According to an eleventh aspect of the present invention, in the data judging device according to the ninth aspect, the judging means has reference data indicating a change with time of a predetermined evaluation value change rate and a predetermined judgment period, The evaluation value change rate data indicating the change over time of the evaluation value change rate calculated by the differential operation means determines that the coating has not peeled off at the measurement points that coincide with the reference data within a predetermined range during the determination period. However, at the measurement points that do not match, it is determined that the coating has peeled off.

According to a twelfth aspect of the present invention, in the ninth aspect, a plurality of positions are set as the measurement points, and the determination means has a predetermined determination time, and Is the case at the time of the temperature drop, the evaluation value change rate at the measurement point is lower than the other measurement points at the determination point, it is determined that peeling of the coating occurs at the measurement point I do.

According to a thirteenth aspect of the present invention, in the data judging device according to the ninth aspect, a plurality of positions are set as the measuring points, the judging means has a predetermined judging period, and By comparing the evaluation value change rate data indicating the change over time of the change rate with the evaluation value change rate data indicating the change over time of the evaluation value change rate at another measurement point in the determination period, coating peeling occurs. Or not.

According to a fourteenth aspect of the present invention, there is provided a non-destructive inspection apparatus for detecting a portion of a member formed by applying a coating on a base material surface where a coating is peeled off. A heating unit for heating a member to be targeted (hereinafter, referred to as an “object”); and a surface of the object when the temperature increases during heating by the heating unit or when the temperature decreases after the heating is stopped. 14. A temperature observation means for observing a temporal change in temperature at a desired measurement point, and a data judgment device according to any one of claims 1 to 13 for judging data observed by said temperature observation means. It is characterized by.

According to a fifteenth aspect of the present invention, there is provided a non-destructive inspection method for detecting a portion of a member formed by applying a coating on a base material surface where a coating is peeled off. On the basis of measurement data indicating a temporal change in temperature at a desired measurement point on the surface of a target member (hereinafter, referred to as an “object”),
When the temperature at the measurement point is T, the evaluation value of the temperature is T ^*, and the temperatures at two different times are T1 and T2, and when T1> T2, T ^* = (T−T2) / (T
An evaluation value is calculated by 1-T2), and it is determined based on the evaluation value whether or not the coating has peeled off at the measurement point.

A nondestructive inspection method according to a sixteenth aspect of the present invention is the nondestructive inspection method according to the fifteenth aspect, wherein the measurement data after heating is stopped is used.

A seventeenth aspect of the present invention is the nondestructive inspection method according to the sixteenth aspect, wherein the temperature T1 is a maximum temperature and the temperature T2 is a minimum temperature.

According to a eighteenth aspect of the present invention, in the nondestructive inspection method according to the fifteenth aspect, correction data is prepared in advance for a member having the same shape as the object and having a known peeling state, and based on the correction data. Correcting the measurement data, and calculating the evaluation value based on the corrected measurement data after the correction.

According to a nineteenth aspect of the present invention, in the nondestructive inspection method according to the fifteenth or eighteenth aspect, the evaluation value is determined at a predetermined judgment point at a measuring point larger than a predetermined reference value. It is characterized in that it is determined that peeling has occurred.

According to a twentieth aspect of the present invention, in the nondestructive inspection method according to the fifteenth or eighteenth aspect, the evaluation value data indicating a temporal change of the evaluation value is stored in a predetermined evaluation period during a predetermined judgment period. It is characterized in that it is determined that the coating has not peeled off at a measurement point that matches within a predetermined range with reference data indicating the time-dependent change of, and that the coating has peeled off at a measurement point that does not match.

According to a twenty-first aspect of the present invention, in the nondestructive inspection method according to the fifteenth or eighteenth aspect, a plurality of the measurement points are set, and the evaluation value is higher than other measurement points at a predetermined judgment time. It is characterized in that it is determined that the coating has peeled off at the measurement point that is higher.

According to a twenty-second aspect of the present invention, there is provided the nondestructive inspection method according to the fifteenth or eighteenth aspect, wherein a plurality of the measurement points are set, and evaluation value data indicating a temporal change of the evaluation value is obtained.
During a predetermined determination period, it is determined whether or not the coating has peeled off by comparing with evaluation value data indicating a temporal change of the evaluation value at another measurement point.

According to a twenty-third aspect of the present invention, there is provided the nondestructive inspection method according to the fifteenth or eighteenth aspect, wherein a temporal change rate of the evaluation value at the measurement point is based on evaluation value data indicating a temporal change of the evaluation value. (Hereinafter referred to as “evaluation value change rate”)
Is calculated, and it is determined whether or not the coating is peeled off at the measurement point based on the magnitude of the evaluation value change rate.

According to a twenty-fourth aspect of the present invention, in the non-destructive inspection method according to the twenty-third aspect, when the measured data is for a temperature decrease, the evaluation value change rate is determined at a predetermined judgment time. At a measurement point smaller than a predetermined reference value, it is determined that peeling of the coating has occurred.

According to a twenty-fifth aspect of the present invention, in the nondestructive inspection method according to the twenty-third aspect, the evaluation value change rate data indicating the time-dependent change of the evaluation value change rate is determined in a predetermined determination period. It is determined that the coating has not peeled off at the measurement points that match within a predetermined range with reference data indicating the change with time of the evaluation value change rate, and it is determined that the coating has peeled off at the measurement points that do not match. And

According to a twenty-sixth aspect of the present invention, in the non-destructive inspection method according to the twenty-third aspect, when the plurality of measurement points are set, and the measurement data is for a temperature decrease, the evaluation value change rate is determined in advance. At the determined determination point, it is determined that the coating is peeled off at the measurement point lower than the other measurement points.

According to a twenty-seventh aspect of the present invention, there is provided the nondestructive inspection method according to the twenty-third aspect, wherein a plurality of the measurement points are set, and the evaluation value change rate data indicating the change with time of the evaluation value change rate is determined in advance. During the determination period, it is characterized in that it is determined whether or not the coating has been peeled off by comparing with evaluation value change rate data indicating a change with time of the evaluation value change rate at another measurement point.

According to a twenty-eighth aspect of the present invention, there is provided a computer-readable recording medium storing a program for causing a computer to execute the non-destructive inspection method according to any one of the fifteenth to twenty-seventh aspects. .

A twenty-ninth aspect of the present invention is a computer program for causing a computer to execute the nondestructive inspection method according to any one of the fifteenth to twenty-seventh aspects.

[0041]

Embodiments of the present invention will be described below with reference to the drawings.

[Principle of the Invention] The present invention relates to a method for coating a material (hereinafter referred to as an "object") based on measurement data indicating a change with time in temperature at a desired measurement point on the surface of the member to be inspected. When it is determined whether or not the film is peeled, not the temperature T itself in the measurement data but its evaluation value T
^The basic feature is that ^* is calculated and used for judgment.

The following equation (1) is used to calculate the evaluation value T ^* . When the evaluation value T ^* is expressed as a percentage, the following equation (2) is used. Equations (1) and (2) are equivalent; in both equations, T1 and T2 are the temperatures at two different times, and T1> T2. T ^* = (T−T2) / (T1−T2) Equation (1) T ^* = (T−T2) / (T1−T2) × 100 [%] Equation (2)

The temperature T on the surface of the subject is affected by uneven heating and uneven coating thickness, resulting in uneven temperature.
By the calculation of Expressions (1) and (2), the evaluation value T ^* cancels out the temperature unevenness caused by these. Therefore, the determination accuracy can be improved.

Although the temperatures T1 and T2 are temperatures at different points in the measurement data as described above, considering the calculation accuracy of the evaluation value T ^* , it is preferable that T1 and T2 are as different as possible. For example, one of the following combinations is used. (1) The maximum temperature is T1 and the minimum temperature at the time of cooling is T2. (2) During the cooling period, the temperature at the earlier point is considerably higher than the temperature at the later point. Therefore, the temperature at an earlier point in the temperature drop period, such as near the time when the heating is stopped (at the time when the heating is stopped or immediately after the heating is stopped) or when a short time has elapsed since the heating was stopped, is set to T
The temperature at a later point in the temperature dropping period, such as a point in time when a sufficient time has elapsed after stopping the heating or a point in time when the temperature is stabilized after the stopping of the heating is T2.

FIG. 1 shows measurement data 1 to 4 representing the change over time of the surface temperature T when the heating intensity is changed for the same measurement point in the subject. At this time, at a timing shown by the characteristic line 5, the infrared flash is turned on / off for a short time to irradiate the subject with infrared light for a short time, and the temperature is measured every Δt from the heating start time (infrared flash on time) t0. As a result, measurement data 1 to 4 are obtained. Measurement data 1 represents the change over time of the temperature at the reference heating intensity, measurement data 2 represents the change over time of the temperature when the heating intensity is reduced by 10% from the reference, and measurement data 3
Represents the temporal change of the temperature when the heating intensity is decreased by 5% from the reference, and the measurement data 4 represents the temporal change of the temperature when the heating intensity is increased by 5% from the reference.

FIG. 2 shows the measured data 1 to 4 shown in FIG.
Are shown as evaluation value data 11 to 14. in this case,
An evaluation value for the temperature T at each time point after the heating is stopped, using the temperature T1 at the time point when the heating is stopped (off time after the infrared flash is turned on for a short time) and the temperature T2 at the time point t2 when a sufficient time has elapsed after the heating was stopped. T ^* is calculated. However, FIG.
In the equation, the evaluation value T ^* is calculated by the above equation (2), and is expressed as a percentage.

In the case of the infrared flash, since heating is extremely short, it can be said that the heating stop time t1 is immediately after the heating is stopped.

In FIG. 2, the evaluation value data 11 corresponds to the measurement data 1 at the reference heating intensity, and represents a temporal change of the evaluation value T ^* with respect to the temperature T at each time point after the heating is stopped.
Similarly, the evaluation value data 12 corresponds to the measurement data 2 when the heating intensity is reduced by 10%, and the temperature T at each time point after the heating is stopped.
Represents the change over time of the evaluation value T ^* with respect to. The evaluation value data 13 corresponds to the measurement data 3 when the heating intensity is reduced by 5%, and the evaluation value T ^* for the temperature T at each time point after stopping the heating ^.
Represents the change over time. The evaluation value data 14 corresponds to the measurement data 4 when the heating intensity is increased by 5%, and represents a temporal change of the evaluation value T ^* with respect to the temperature T at each time point after the heating is stopped.

These measurement data 1 to 4 and evaluation value data 1
From comparison with 1 to 14, it can be seen that the temperature T depends on the heating intensity, but the evaluation value T ^* hardly depends.

FIG. 3 shows measurement data showing the temporal change of the surface temperature in a portion (heating unevenness portion) where heating unevenness is intentionally caused by arranging the heaters for the same healthy subject. 6 and measurement data 7 representing a change with time of the surface temperature in a portion where there is no unevenness in heating (healthy portion).
Is shown. In this case, the measurement data 6 and 7 are obtained by measuring the temperature every Δt from the heating stop time (the infrared flash OFF time) t1. At the timing shown by the characteristic line 5, the infrared flash is turned on / off for a short time to irradiate the subject with infrared light for a short time.

FIG. 4 shows the measured data 6 and 7 shown in FIG.
Are shown in the evaluation value data 16 and 17 corresponding to. Also in this case, using the temperature T1 at the heating stop time t1 and the temperature T2 at the time t2 when sufficient time has elapsed after the heating stop, the evaluation value T ^* for the temperature T at each time after the heating stop is calculated by the above-described equation (2). )
Is calculated in percent notation. In FIG. 4, the evaluation value data 16 corresponds to the measurement data 6 in the uneven heating portion, and the evaluation value T ^* for the temperature T at each time point after the heating is stopped ^.
Represents the change over time. The evaluation value data 17 corresponds to the measurement data 7 in the healthy part, and represents a temporal change of the evaluation value T ^* with respect to the temperature T at each time point after stopping the heating.

Further, FIG. 5 shows measurement data 8 representing the temporal change of the surface temperature in the peeled portion and the temporal change of the surface temperature in the healthy portion when the same specimen having the peeled portion and the healthy portion is uniformly heated. The measurement data 9 is shown. Also in this case, at the timing shown by the characteristic line 5, the infrared flash is turned on / off for a short time to irradiate the subject with infrared light for a short time, and the heating is stopped (time when the infrared flash is turned off) t.
The measured data 8 and 9 are obtained by measuring the temperature from 1 to Δt.

FIG. 6 shows the measured data 8 and 9 shown in FIG.
Are evaluation value data 18 and 19 corresponding to. in this case
Also, the temperature T1 at the heating stop time t1 and a sufficient time after the heating is stopped.
Using the temperature T2 at the time t2 when
Evaluation value T for temperature T at each time point^*Is calculated by the above equation (2).
Is calculated in percent notation. In FIG. 6, the evaluation value
Data 18 corresponds to the measured data 8 at the peeled part,
Evaluation value T for temperature T at each point after thermal shutdown^*Over time
It represents a change. Evaluation value data 19 is
The temperature T at each point after the heating was stopped, corresponding to the measurement data 9
Evaluation value T for ^*Represents the change over time.

From the measured data 6 to 9 and the evaluation value data 16 to 19, the following can be understood. (1) The temperature T in the uneven heating portion changes with time differently from the sound portion, and shows a change with time close to the peeled portion. Therefore, in this state, the uneven heating portion may be erroneously determined as the peeled portion. (2) The change with time of the evaluation value T ^* in the uneven heating portion almost coincides with the healthy portion, and is largely different from the peeled portion. (3) The evaluation value T ^* in the peeled part is large in almost all time zones as compared with the healthy part. (4) The evaluation value T ^{* at the} peeled portion gradually decreases with time over halfway as compared with the sound portion. (5) Therefore, by utilizing the differences (2) to (4), the peeled portion can be clearly distinguished from the uneven heating portion as well as the sound portion, and the determination accuracy is increased.

The above description is about the elimination of the influence of the uneven heating. The same can be said for the variation in the coating thickness ^. By using the evaluation value T ^* instead of the temperature T, the peeled part can be made a sound part. Of course, it can be clearly distinguished from the portion where the coating thickness is thick, and the judgment accuracy is improved.

Therefore, by using the evaluation value T ^* or the evaluation value change rate (δT ^* / δt: the temporal change rate of the evaluation value T ^* ), it is not affected by the uneven heating and the variation of the coating thickness. It can be determined whether or not it is a peeling portion.

Evaluation value T ^* or evaluation value change rate δT ^* /
When making a determination using δt, there are a determination of comparing with a reference value or reference data and a determination of not using these.

Here, the reference value means a predetermined threshold value for the evaluation value T ^* or the evaluation value change rate δT ^* / δt, and at a predetermined judgment time, the evaluation value T ^* or the evaluation value change rate. Compare δT ^* / δt with its reference value.

The judgment time point is an arbitrary time point in the measurement data, but the evaluation value T ^* or the evaluation value change rate δT ^* / δt between the peeled part and the healthy part is as different as possible (or Period).

The reference data is the evaluation value data 11 to 1
4, 16 to 19, etc., time-series data that changes with time that is predetermined with respect to data T ^* (t) that indicates the change with time of the evaluation value T ^* , or the change with time of the evaluation value change rate δT ^* / δt. Means time-series data that changes with time and is predetermined with respect to the evaluation value change rate data δT ^* (t) / δt,
In a predetermined determination period, the evaluation value data T ^* (t) or the evaluation value change rate data δT ^* (t) / δt is compared with its reference data. Evaluation value change rate data δT ^* (t)
/ Δt is time-series data obtained by time-differentiating the evaluation value data 11 to 14, 16 to 19, and the like.

The judgment period is an arbitrary period in the measurement data, and the evaluation value data T ^* between the peeled part and the healthy part is determined ^.
(T) or evaluation value change rate data δT ^* (t) / δt
Is preferably set within a time (or period) that is as different as possible.

In the following description, the reference value for the evaluation value T ^* is REF (T ^* ), the reference value for the evaluation value change rate δT ^* / δt is REF (δT ^* ), and the evaluation value data T ^* (t)
Is reference data for REF (T ^* (t)), and reference data for evaluation value change rate data δT ^* (t) / δt is R
EF (δT ^* (t)).

When the evaluation value T ^* and the reference value REF (T ^* ) are used, the evaluation value T ^* is compared with the reference value REF (T ^* ) at a predetermined judgment time, and the coating value is measured at the measurement point according to the magnitude relation. It is determined whether or not peeling has occurred.

Evaluation value change rate δT ^* / δt and reference value REF
Also when (δT ^* ) is used, at the time of the predetermined judgment,
The evaluation value change rate δT ^* / δt is compared with a reference value REF (δT ^* ), and it is determined whether or not the coating has peeled off at the measurement point based on the magnitude relation.

The evaluation value data T ^* (t) and the reference data RE
When F (T ^* (t)) is used, the evaluation value data T ^* (t) is converted into the reference data REF (T
^* (T)) and taking the residual sum of squares, for example, to obtain the evaluation value data T ^* (t) and the reference data REF (T ^*
It is determined whether or not the coating has peeled off at the measurement point based on whether or not the curves shown by (t)) match within a predetermined range.

When the evaluation value change rate data δT ^* (t) / δt and the reference data REF (δT ^* (t)) are used, the evaluation value change rate data δT ^*
* (T) / δt is compared with reference data REF (δT ^* (t)), for example, by taking a residual sum of squares, to obtain evaluation value change rate data δT ^* (t) / δt and reference data REF (δT
^* It is determined whether or not the coating has peeled off at the measurement point based on whether or not the curves indicated by (t)) match within a predetermined range.

The reference value REF (T ^* ), the reference value RE
In the determination using F (δT ^* ), the reference data REF (T ^* (t)), and the reference data REF (δT ^* (t)), there is no influence of uneven heating or variation in coating thickness. A determination can be made.

As a judgment that does not use the reference value or the reference data, since it is generally considered that the part where the peeling has occurred is only a partial area of the surface of the subject, the evaluation values T ^* at a plurality of measurement points are different from each other. Or the evaluation value change rate δT ^* / δ
t, evaluation value data T ^* (t), evaluation value change rate δ
The determination can be made by comparing T ^* (t) / δt.

Since such a judgment method does not use a predetermined reference value or reference data, there is an advantage that the judgment result is hardly affected by room temperature or the like. It should be noted that an appropriate threshold value may be used for judging whether it is extremely small or large.

Further, correction data is prepared in advance for a member having the same shape as the object and whose peeling state is known, and the measurement data is corrected with this correction data prior to the judgment, whereby the object can be measured. Error factors such as temperature unevenness due to the shape can be removed in advance, and more accurate determination can be made.

In the judgment using the temperature T, the part which was the peeled part was evaluated as the evaluation value T ^* , the evaluation value change rate δT ^* / δt,
Evaluation value data T ^* (t), evaluation value change rate δT ^* (t) /
If it is determined that the portion is healthy by the determination using δt, it can be understood that the portion has unevenness in heating and coating thickness. Accordingly, by performing these two types of determinations on a plurality of portions, it is possible to know the distribution of uneven heating and the variation in the coating thickness.

[First Embodiment] FIG. 7 shows a configuration of a nondestructive inspection apparatus 100 according to a first embodiment of the present invention.

The non-destructive inspection apparatus 100 of this embodiment calculates the evaluation value of the temperature from the measured data during the temperature decrease and makes the judgment. Therefore, the temperature T1 at the time of stopping the heating and the sufficient time thereafter T at the time when the temperature falls and the temperature stabilizes
2, the evaluation value T ^* for the temperature T at the measurement point on the surface of the subject P is calculated as T ^* = (T−T2) / (T1−T2) × 1
The main feature of this method is that the accuracy of the determination is enhanced by calculating whether the coating has peeled off based on the evaluation value T ^* .

Another feature of the present embodiment is that, prior to the determination, the measurement data is corrected and error factors are removed in advance, thereby enabling more accurate determination.

Further, in this example, the evaluation value T ^*
Another feature is that the determination accuracy is further improved by performing the determination based on the evaluation value change rate δT ^* / δt instead of the actual value. The details will be described below.

First, the outline of the non-destructive inspection apparatus 100 of this embodiment will be described with reference to FIGS. 7, 8 and 9.

The non-destructive inspection device 100 is for non-destructively inspecting the state of the coating on a subject P constituted by applying a coating (film) on the base material surface.

As shown in FIG. 7, the nondestructive inspection apparatus 100 heats the subject P by irradiating infrared rays for a short time with the heating head 102 while the subject P is held by the holder 101. Then, the heating is stopped.

The heating head 102 has a heater (1 in FIG. 9).
02a). In this example, the heater 102
As a, an infrared source, particularly an infrared flash lamp, is employed.

In this case, the holder 101 has a five-axis actuator (see 101a in FIG. 9). The holder controller / driver 111 controls the five-axis actuator 101a in accordance with an instruction from the computer 116, which will be described later, to set or change the position or the like of the subject P to a desired state.

On the other hand, the heating head 102 is supported by a triaxial actuator (see 102b in FIG. 9). In this case, the measurer manually operates the three-axis actuator 10.
By operating 2b, the position and the like of the heating head 102 can be changed, and heating can be performed from a desired angle and position.

Further, in order to prevent light (heat) from entering from other than the heating head 102 from entering, and to make the heating as uniform as possible, the holder 101 and the periphery of the non-sample P held by the holder 101 Is surrounded by a hood 104. Further, a fan 105 is provided in the hood 104 in order to prevent the temperature (air temperature) in the space area surrounded by the hood 104 from excessively increasing and affecting the measurement.

After heating the subject P as uniformly as possible, the distribution of the surface temperature of the subject (temperatures at a plurality of measurement points) and its temporal change are photographed (measured) by the infrared camera 103 at this time. I do. The image data (measurement data) obtained by the infrared camera 103 is displayed on the video monitor 114 in real time. The data is also captured and recorded by the computer 116. And this infrared camera 1
The measurement data of No. 03 is corrected by the computer 116, the evaluation value of the temperature is calculated, and the determination is made using the evaluation value change rate, thereby detecting the peeled portion of the coating on the surface of the subject P.

That is, in this example, an evaluation value for the temperature is calculated from the corrected measurement data (corrected measurement data),
Further, the evaluation value is subjected to a time differential operation to calculate an evaluation value change rate, and a determination is made based on the evaluation value change rate.

Further, as described above, this embodiment is the computer 1
The main features of this method are that the measurement data is corrected, the evaluation value is calculated, and the peeled portion is determined using the evaluation value change rate. Therefore, the following description will focus on this characteristic portion. To

The computer 116 is a non-destructive inspection device 1
The controller 117 controls the overall operation and records data. As shown in FIG.
It comprises a storage device 118, a memory 119 and a CPU (central processing unit) 120. Further, an input device 121 such as a keyboard and a mouse, and a display device 122 using a CRT or a liquid crystal are provided.

The interface unit 117 includes the CPU 12
This is for controlling the above-described units according to an instruction from 0. Although FIG. 8 illustrates one block, in actuality, the holder controller driver 11
1, the timer 113, the infrared camera 103, and the like.

The storage device 118 stores various data, programs, measurement data, evaluation values, evaluation value change rates,
This is for holding the determination result. Computer 1
Examples of the data prepared in advance in 16 include reference object data (correction data), reference values, and determination timing (determination time or determination period).

The reference object data is a part (object P)
This is data for correcting the variation in temperature change due to the shape of the data. Specifically, for a subject (reference subject) for which it has been confirmed in advance that peeling has not occurred by various inspection methods, the temperature for each part when the same heating as in the actual measurement is performed. Is the data showing the variation of. For example, for a portion where the temperature tends to be higher than the other portion, the difference in temperature from the other portion is defined as a positive numerical value (for example, + 3 ° C.). Conversely, for a portion where the temperature tends to be lower than the other portion, the difference in temperature from the other portion is a negative value (for example, −4).
° C).

In this example, a part immediately after manufacturing is used as the reference object. However, it is not always necessary to use unused parts. For example, in a case where a part whose shape changes due to an environment or the like at the time of use is inspected for the occurrence of peeling after use for a predetermined period, the part has been used for a predetermined period (that is, the subject P It is preferable to use a reference object that has been confirmed to have the same shape change) and that no peeling has occurred.

As a reference value, a threshold value (REF (δT ^* )) of an evaluation value change rate (time change rate of the evaluation value T ^* : δT ^* / δt), which is a criterion for determining whether or not a peeled portion is present. Is used. In the present example, the reference value has a meaning as the minimum value (absolute value) of the evaluation value change rate regarded as a healthy part because the determination is performed based on the data during the temperature decrease. In other words, calculated based on the measurement data,
The temporal change rate of the evaluation value at a certain judgment timing (δT ^*
/ Δt) is smaller than this reference value (that is, a portion where the evaluation value decreases gradually), it is determined that peeling has occurred. The state of the rate of change in the evaluation value differs depending on the type of the subject (the coating material and the base material). Therefore, this reference value is prepared for each type of subject.

The judgment timing defines the time (or period) to be subjected to the differential operation for obtaining the evaluation value change rate, and the difference in the evaluation value change rate between the healthy part and the peeled part becomes sufficiently large. Time (or period). The determination timing is set according to the type of the subject, the heating temperature, the heating time, and the like.

In this example, as shown in FIG. 14, the determination timing is the time t0 when the heating by the heating head 102 is started.
, And t3 indicates the determination time point. In FIG. 12, t3 is 0.2 seconds after t0, but for example, from less than 0.1 seconds to about 0.4 seconds from t0,
Preferably, it is set between about 1.5 seconds and about 3.0 seconds.

The specific storage device 118 is constituted by, for example, a rewritable nonvolatile memory such as a hard disk device, a magneto-optical disk device, or a flash memory, or a combination thereof.

The memory 119 and the CPU 120 implement various functions by loading a program stored in the storage device 118 into the memory 119 and executing the program by the CPU 120. For example, the CPU 120
A function of detecting a peeled portion by analyzing data obtained by the infrared camera 103 is provided. Details of the function will be described later in the operation description.

[0097] The computer 116 may be realized by dedicated hardware.

The “data judging device” in the claims corresponds to the computer 116 in this example. “Evaluation value calculating means” and “determining means including differential calculating means” are realized by the CPU 120 executing a predetermined program. “Correction data” corresponds to reference subject data. The “correction unit” is a memory 11
9, the CPU 120, the storage device 118, and the like. The “heating unit” is realized by the heating head 102, the heating head driver 112, and the like. “Observing means” is realized by the infrared camera 103 or the like. However, the above components function in close cooperation with each other, and the correspondence described here is not strict.

Next, the operation will be described. In the following description, the measurement operation, the correction processing of the measurement data, the calculation processing of the evaluation value, and the judgment processing (including the calculation processing of the time derivative for calculating the evaluation value change rate and the comparison processing with the reference value) are described. .

First, the measuring operation will be described.

Prior to the measurement, the user holds the subject P on the holder 101. In addition, a schedule defining the operation start / stop timing / determination timing (determination time, determination period) of each unit is set in the timer 113 in advance.

Upon receiving a measurement start instruction from the user,
The CPU 120 of the computer 116 outputs a predetermined signal to the timer 113 via the interface unit 117. In response to this, the timer 113 starts operating and sends a signal to each unit according to a preset schedule. Thereafter, each unit operates mainly at timing determined based on the signal input from the timer 113. Specifically, it is as follows.

First, the heating head driver 112 irradiates infrared rays from the heating head 102 to raise the temperature of the surface of the subject P. After heating for a predetermined time, the irradiation of infrared rays is stopped. Then, the surface temperature of the subject P starts to decrease.

At this time, the infrared camera 103 moves the subject P
Of the temperature after heating on the surface of the sample (temporal change at the time of temperature decrease) is measured. The image captured by the infrared camera 103 is displayed on the video monitor 114 in real time. The data is also taken into the computer 116 and recorded as measurement data. The measurement data in this case is data indicating time-dependent changes in temperature at a plurality of measurement points, in other words, a set of time-series data of the temperature at each measurement point every time a predetermined time Δt elapses.

Next, the correction processing of the measured data, the calculation processing of the evaluation value, and the judgment processing (calculation of the rate of change of the evaluation value, comparison with the reference value) will be described in order with reference to FIG.

The CPU 120 of the computer 116 corrects the measurement data to be evaluated by comparing it with the reference object data (step S101). In this example, this correction is performed by subtracting the reference object data 21 from the measurement data 20, as shown in FIG. By performing this correction, temperature unevenness due to the shape of the subject P can be offset from the corrected measurement data 22. Therefore, in the determination process performed thereafter, the determination can be performed on the entire surface of the subject P based on the same reference regardless of the shape of each part.

Subsequently, the CPU 120 calculates the evaluation value T ^* from the temperature T at each measurement point based on the corrected measurement data 22 (step S102). Evaluation value T
^* Is calculated specifically as follows.

That is, the CPU 120 determines, for each measurement point, the temperature T1 at the time when the heating is stopped (see t1 in FIG. 12) and the temperature T2 at the time when a sufficient time has elapsed after the temperature has fallen (see t2 in FIG. 12). And the temperature T at each time point at the measurement point
^* = {(T−T2) / (T1−T2)} × 100 [%]
Is calculated, the corrected measurement data 22 (T
(T)) corresponding to evaluation value data T ^* (t) (evaluation value T
^* Change over time) is calculated.

Subsequently, the CPU 120 sets the evaluation value data T
^* Based on (t), it is determined whether or not the coating has been peeled (Step S103, Step S104).

The determination is made in two steps S103 and S104
In the first step S103, the evaluation value change rate δT
^* / Δt is calculated, and this evaluation value change rate δT ^* / δt is compared with a reference value in the next step S104. In particular,
This is performed as follows.

The CPU 120 determines the rate of change of the evaluation value (δT ^* (t3) / δ) at a predetermined judgment time point (time point after the heating is stopped after a predetermined time has elapsed from the heating start time t0) t3.
t) is, for example, the evaluation value T ^* (t3) at the simultaneous point t3 and the evaluation value T ^* (t3 +
Δt), δT ^* (t3) / δt = ｛T ^* (t3)
A time differential operation of −T ^* (t3 + Δt)｝ / Δt is performed (step S103). This differential operation is calculated for each measurement point of the subject P. As described above, the judgment time t3
Is set within a period (or period) in which the difference between the evaluation value change rate δT ^* / δt between the healthy part and the peeled part is sufficiently large or largest.

Subsequently, the CPU 120 compares the calculated evaluation value change rate (δT ^* (t3) / δt) with the reference value REF (δT
^* ) (Step S104), and it is determined whether or not each measurement point is a peeled portion. As a result of the comparison, the evaluation value change rate (δT
^A measurement point where (t3) / δt) is smaller than the reference value REF (δT ^* ) is determined to have peeled, and otherwise determined to have not peeled. Then, the determination result is graphically displayed on the video monitor 114 (or a display device provided in the computer 116). For example, a position where it is determined that peeling has occurred may be displayed by superimposing the shape of the subject P on the display.
In addition, the image is output to the printer 115 in the same manner.

FIG. 12, FIG. 13 and FIG.
The results are shown in FIG. In the figure, 5 indicates the operation timing of starting and stopping heating, t0 indicates the heating start time, and t1 indicates the heating stop time.

FIG. 12 shows some examples of corrected measurement data. In FIG. 12, the vertical axis represents the temperature T.
[° C], the horizontal axis is the elapsed time t from the heating start time t0
[S]. The corrected measurement data 30 represents the time change of the temperature in the sound part where the coating is thin, the corrected measurement data 31 represents the time change of the temperature in the sound part where the coating is thick, and the corrected measurement data 32 is the time change of the temperature in the peeled part. Indicates change.

FIG. 13 shows evaluation value data 40 to 42 calculated from the corrected measurement data 30 to 32 shown in FIG. In FIG. 13, the vertical axis represents the evaluation value T ^*.
[%], The horizontal axis is the elapsed time t from the heating start time t0
[S]. The evaluation value data 40 is an evaluation value T corresponding to the corrected measurement data 30 (a sound part where the coating is thin).
^{* Indicates} the change over time, and the evaluation data value 41 indicates the change over time of the evaluation value T ^* corresponding to the corrected measurement data 31 (healthy part where the coating is thick), and the evaluation value data 42 indicates the corrected measurement data 32 (the peeled part). ) Represents the change over time in the evaluation value T ^* .

FIG. 14 shows the evaluation value data 4 shown in FIG.
The evaluation value change rate data 50 to 52 for 0 to 42 are shown.
It was done. In FIG. 14, the vertical axis represents the evaluation value change rate.
δT ^*/ Δt, horizontal axis is elapsed time from heating start time t0
t [s]. The evaluation value change rate data 50 is the evaluation value data.
Data 40 (heavy part with thin coating)
And the evaluation value change rate data 51 is the evaluation value data 41
Shows the time derivative of (healthy part with thick coating)
The evaluation value change rate data 52 is the evaluation value data 42 (peeling
Part) is obtained by time-differentiating the same.

In the example shown in FIG. 14, the judgment time t3
Is set about 0.2 seconds after the heating stop time t1.

As shown in FIG. 6 and FIGS. 12 to 14, when the measured data is obtained when the temperature is lowered, the evaluation value T ^{* of the} peeled portion is obtained ^.
Has a slower decline than the healthy part. That is, the evaluation value change rate δT ^* / δt is small. Further, the temperature T has a relatively large difference depending on the thickness of the coating (see FIG. 12).
On the other hand, the evaluation value T ^* has a small difference depending on the thickness (FIG. 1).
3), and the evaluation value change rate δT ^* / δt also has a small difference depending on the thickness (see FIG. 14). Therefore, the evaluation value change rate δT ^*
When the determination is made based on / δt, the influence of the variation in the thickness of the coating can be eliminated, and the peeled portion can be accurately detected.

Similarly, as described above with reference to FIGS. 1 to 4, the difference in the temperature T due to the uneven heating is relatively large (see FIGS. 1 and 3), whereas the evaluation value T ^* is due to the uneven heating. The difference is small (see FIGS. 2 and 4), and the rate of change of the evaluation value is also different due to uneven heating (not shown). Therefore, when the determination is made based on the evaluation value change rate, the influence of the uneven heating can be eliminated, and the peeled portion can be accurately detected.

As described above, according to the present embodiment, the effects of uneven heating and unevenness of the coating thickness are eliminated.
The peeled portion can be detected more accurately.

In this example, the test is performed on the entire subject P, but it is not always necessary to test the entire subject P. Depending on the shape and the like of the subject P, it is conceivable that peeling is particularly likely to occur only at a certain specific position. Therefore, only the point where peeling is most likely to occur may be inspected. In this case, temperature measurement, correction, evaluation value calculation,
In principle, the calculation of the evaluation value change rate only needs to be performed for the part to be measured.

The specific contents of the arithmetic processing are described in the first section above.
It is not limited to the embodiment. For example, in the correction example shown in FIG. 11, when the reference object data 21 is defined in a direction opposite to that of the first embodiment, the reference object data 21 is added to the measurement data 20 in the correction processing. Further, instead of the measurement data 20, the reference value may be corrected by the reference object data 21. That is, the reference value may be different for each location (measurement point). With this configuration, since the correction only needs to be performed once for the reference value in advance, the number of calculation processes can be reduced, and real-time processing can be easily performed. In addition, since the determination can be performed for each finer portion, a finer peeled portion is not overlooked.

Further, the reference object data does not necessarily need to be a sample in which no peeling has occurred. It is also possible to use, as reference object data, sample data in which the state of occurrence of peeling has been accurately confirmed, and the effect of the peeling on the temperature has been specifically and accurately confirmed for each site. In this case, the correction is naturally performed so as to eliminate the influence of the existing peeling.

Although the surface temperature of the subject P is affected by the air temperature, the evaluation value T ^* of the temperature T at the measurement point is calculated from the measurement data, and the evaluation value T ^* is differentiated with respect to time to obtain the evaluation value change rate. Since δT ^* / δt is calculated, an accurate determination can be obtained in the above-described example even if the reference value REF (δT ^* ) is fixed. However, if the reference value is corrected according to the ambient temperature, more accurate determination can be made.

In this example, the position determined to have been peeled is displayed on the video monitor 114 or the like, but the output form is not limited to this. For example, the difference value itself between the evaluation value change rate and the reference value may be output. In this case, as in a thermograph, it is easy to understand if the color is changed and output according to the magnitude of the difference value.

[Modification of Judgment Method in First Embodiment (Part 1)] In the above-described embodiment, the evaluation value change rate δT ^* / δ
Although the determination as to whether or not a peeled portion has been made by comparing t with a reference value REF (δT ^* ) prepared in advance, the method of determination is not limited to this. For example, as shown in step S204 of FIG.
^* (T) / δt and reference data REF (δT
^The determination may be made by comparing (t)).

In FIG. 15, the correction processing in step S201,
Evaluation value calculation processing in step S202 and step S20
The evaluation value change rate calculation processing of No. 3 includes the correction processing (step S101), the evaluation value calculation processing (step S102), and the evaluation value change rate calculation processing (step S101) described with reference to FIG.
103).

In the case of FIG. 15, in step S204, the evaluation value change rate data δT ^* (t) / δt and the reference data REF (δT ^* (t) are obtained, for example, by taking the residual sum of squares during a predetermined judgment period. ) To determine whether or not the curves shown in the graph coincide with each other within a predetermined range, determine that the coating has not peeled off at the measuring points that match, and that the coating has peeled off at the measuring points that do not match. It is determined that there is.

[Modification of Judgment Method in First Embodiment (No. 2)] In the above-described embodiment, the judgment as to whether or not it is a peeled portion is made using the reference value. It is not limited. For example, step S in FIG.
As shown at 304, the determination may be made by comparing the evaluation value change rates at each location (a plurality of measurement points) with each other.

In FIG. 16, the correction processing in step S301,
Evaluation value calculation processing in step S302 and step S30
The evaluation value change rate calculation processing of No. 3 includes the correction processing (step S101), the evaluation value calculation processing (step S102), and the evaluation value change rate calculation (step S10) described with reference to FIG.
Same as 3).

That is, normally, it is considered that the part where the peeling has occurred is only a partial area on the surface of the subject P. Therefore,
In step S304 of FIG. 16, when the two measurement points on the surface of the subject P are X1 and X2, in this example, the measurement data is assumed to be at the time of temperature decrease. The evaluation value change rate δT ^* (X
1) / δt is the evaluation value change rate δT ^* at another measurement point X2
Measurement point X1 that is significantly smaller than (X2) / δt)
Then, it is determined that peeling has occurred.

[Modification of Judgment Method in First Embodiment (Part 3)] Also, as shown in step S404 of FIG. 17, the evaluation value change rate data at each location (a plurality of measurement points) is compared with each other, The determination may be made.

In FIG. 17, the correction processing in step S401,
Evaluation value calculation processing in step S402 and step S40
The evaluation value change rate calculation processing of No. 3 includes the correction processing (step S101), the evaluation value calculation processing (step S102), and the evaluation value change rate calculation (step S10) described with reference to FIG.
Same as 3).

In step S404 of FIG.
When two measurement points on the surface are X1 and X2, the two measurement points are X1 and X2, and the evaluation value change rate data at each is δT ^* (X1, t) / δt, δT ^* (X2,
t) / δt. Specifically, in this example, the measurement data is assumed to be at the time of temperature decrease, and therefore, during a predetermined determination period, for example, the evaluation value change rate data δT ^* (X1, t)
/ Δt to evaluation value change rate data δT ^* (X2, t) / δ
t is subtracted at each corresponding time, and the sum Σ is obtained. If the sum 著 し く is a remarkably large positive value, the measurement point X2
It is determined that the coating has peeled off.

The determination methods shown in FIGS. 16 and 17 do not use predetermined reference values or reference data, and thus have the advantage that the determination results are hardly affected by room temperature or the like. An appropriate threshold may be used to determine whether the value is extremely small or large.

Further, in practicing the present invention, it is not necessary to provide all the components of the first embodiment described above. If necessary, only a part of the configuration may be adopted.
The example is shown below using FIGS.

[Second Embodiment: Omission of Correction Processing] In the example shown in FIG. 18, the CPU 120 does not perform the correction processing, and FIG.
The evaluation value T ^* for the temperature T at the measurement point is calculated directly from the measurement data 22 (step S501). Then, C
The PU 120 calculates the evaluation value change rate δT ^* / δt (step S502), and calculates the evaluation value change rate δT ^* / δt and the reference value R.
Comparison with EF (δT ^* ) is performed (step S503).

In FIG. 18, the evaluation value calculation processing in step S501, the evaluation value change rate calculation processing in step S502, and the comparison processing in step S503 are performed in the evaluation value calculation processing (step S102) described with reference to FIG. Calculation (step S103) and comparison processing (step S10)
Same as 4).

That is, the determination is made in two steps S502,
In step S502, the evaluation value change rate δT ^* (t3) / δt at the determination time t3 is calculated in the first step S502, and in the next step S503, the evaluation value change rate δT ^* (t
3) Compare / δt with the reference value REF (δT ^* ). In this case, since the measurement data is assumed to be at the time of temperature decrease, the evaluation value change rate δT ^* (t3) / δt is equal to the reference value R.
It is determined that a peeling portion of the coating has occurred at a measurement point smaller than EF (δT ^* ).

[Modification of Judgment Method in Second Embodiment (Part 1)] In the example shown in FIG. 19, the measurement data 22 shown in FIG.
The evaluation value T ^* for the temperature T at each measurement point is calculated directly (step S601), the evaluation value change rate δT ^* / δt is calculated (step S602), and the evaluation value change rate data δT ^*.
(T) / δt is compared with the reference data REF (δT ^* (t)) (step S603).

In FIG. 19, the evaluation value calculation processing in step S601 and the evaluation value change rate calculation (time differential operation) processing in step S602 are the evaluation value calculation processing (step S102) and the evaluation value change rate calculation described in FIG. This is the same as (Step S103), and the comparison processing in Step S603 is the same as the comparison processing (Step S2
04).

That is, the CPU 120 obtains the evaluation value change rate data δT ^* (t) / δt and the reference data REF (δT
^* It is determined whether the curves shown by (t)) match within a predetermined range, and it is determined that the coating has not peeled off at the measurement points that match, and the coating is determined at the measurement points that do not match. It is determined that peeling has occurred.

[Modification of Judgment Method in Second Embodiment (Part 2)] In the example shown in FIG. 20, the measurement data 22 shown in FIG.
The evaluation value T ^* for the temperature T at each measurement point is calculated directly (step S701), the evaluation value change rate δT ^* / δt is calculated (step S702), and the evaluation value change rates δT ^* / at a plurality of measurement points. The comparison between δt is performed (step S703).

In FIG. 20, the evaluation value calculation processing in step S701 and the evaluation value change rate calculation processing in step S702 are as follows.
The evaluation value calculation process described with reference to FIG. 10 (step S1)
02) and the evaluation value change rate calculation process (step S103)
The comparison processing in step S703 is the same as that in FIG.
(Step S304).

For example, let two measurement points be X1 and X2,
The rate of change of the evaluation value in each case is expressed as δT ^* (X1) / δ
t, δT ^* (X2) / δt, the CPU 120
Compares the two evaluation value change rates with δT ^* (X1) / δt and δT ^* (X2) / δt at a predetermined determination time point t3. In this example, since the measurement data is assumed to be at the time of temperature decrease, the evaluation value change rate δT ^* (X
1) / δt is the evaluation value change rate δT ^* at another measurement point X2
Measurement point X1 that is significantly smaller than (X2) / δt)
Then, it is determined that peeling has occurred.

[Modification of Judgment Method in Second Embodiment (Part 3)] In the example shown in FIG. 21, the measurement data 22 shown in FIG.
The evaluation value T ^* for the temperature T at each measurement point is calculated directly (step S801), the evaluation value change rate δT ^* / δt is calculated (step S802), and the evaluation value change rate data δT ^* at a plurality of measurement points ^. Comparison between (t) / δt (Step S
803).

In FIG. 21, the evaluation value calculation processing in step S801 and the evaluation value change rate calculation processing in step S802 are as follows.
The evaluation value calculation process described with reference to FIG. 10 (step S1)
02) and the evaluation value change rate calculation process (step S103)
The comparison processing in step S803 is the same as that in FIG.
(Step S404).

For example, let two measurement points be X1 and X2,
The evaluation value change rate data in each case is expressed as δT ^* (X1,
t) / δt, δT ^* (X2, t) / δt, C
During a predetermined determination period, the PU 120 subtracts the evaluation value change rate data δT ^* (X2, t) / δtT ^* from the evaluation value change rate data δT ^* (X1, t) / δt for each corresponding time, And the sum 総 is obtained. In this example, the measured data is assumed to be at the time of temperature decrease,
Is extremely large and a positive value, it is determined that the coating is peeled off at the measurement point X1.

In each of the examples shown in FIGS. 18 to 21, the measured data is not corrected.
T ^* / δt and evaluation value change rate data δT ^* (t) / δtT
^{Since *} is used, the effects of uneven heating and variations in coating thickness can be eliminated, and the accuracy of peeling determination is better than in the past.

[Third Embodiment: Omission of Calculation of Evaluation Value Change Rate]
In the example shown in FIG. 22, the CPU 120 performs a correction process on the measurement data (step S901) and calculates an evaluation value T ^* (step S902), but does not calculate an evaluation value change rate and directly uses the evaluation value T ^* as a reference. A determination is made by comparing with the value REF (T ^* ) (step S903).

In FIG. 22, the correction processing in step S901 and the evaluation value calculation processing in step S902 are the same as the correction processing (step S101) and evaluation value calculation processing (step S102) described with reference to FIG.

In step S903, the evaluation value T ^* is changed to the reference value R at the judgment time point t3 as shown in FIGS.
At a measurement point larger than EF (T ^* ), it is determined that the coating has peeled off.

[Modification of Judgment Method in Third Embodiment (Part 1)] In the example shown in FIG. 23, the CPU 120 performs correction processing on the measured data (step S1001) and calculation of the evaluation value T ^* (step S1002). However, the evaluation value change rate is not calculated, and the evaluation value data T ^* (t) is compared with the reference data REF (T ^* (t)) to make a determination (step S1003).

In FIG. 23, the correction processing in step S1001 and the evaluation value calculation processing in step S1002 are the same as the correction processing (step S101) and evaluation value calculation processing (step S102) described with reference to FIG.

In step S1003, the curves indicated by the evaluation value data T ^* (t) and the reference data REF (T ^* (t)) fall within a predetermined range, for example, by taking the sum of the residual squares during a predetermined judgment period. To determine if they match,
At the coincident measurement points, it is determined that the coating has not peeled off, and at the non-matching measurement points, it is determined that the coating has peeled off.

[Modification of Judgment Method in Third Embodiment (Part 2)] In the example shown in FIG. 24, the CPU 120 performs a correction process on the measured data (step S1101), and calculates an evaluation value T ^* (step S1102). However, the evaluation value change rate is not calculated, and the evaluation values T ^* at a plurality of measurement points are compared (step S1103).

In FIG. 24, the correction processing in step S1101 and the evaluation value calculation processing in step S1102 are the same as the correction constant processing (step S101) and the evaluation value calculation processing (step S102) described with reference to FIG.

In step S1103, two measurement points are defined as X1 and X2, and the evaluation value T ^* (X
1) and T ^* (X2), the CPU 120 sets both evaluation values to T ^* (X2) at a predetermined determination time t3.
1) Compare T ^* (X2). The evaluation value T ^* (X1) at one measurement point X1 is the evaluation value T ^{* at} the other measurement point X2 ^.
At the measurement point X1 that is significantly larger than (X2), it is determined that peeling has occurred.

[Modification of Judgment Method in Third Embodiment (Part 3)] In the example shown in FIG. 25, the CPU 120 performs a correction process on the measured data (step S1201), and calculates an evaluation value T ^* (step S1202). However, the evaluation value change rate was not calculated, and the evaluation value data (t) at a plurality of measurement points was calculated.
A comparison between T ^{* s} is performed (step S1203).

In FIG. 25, the correction processing in step S1201 and the evaluation value calculation processing in step S1202 are the same as the correction processing (step S101) and evaluation value calculation processing (step S102) described with reference to FIG.

In step S1203, the two measurement points are set to X1 and X2, and the evaluation value data at each of them is T ^*.
When (X1, t) and T ^* (X2, t), the CPU 1
In the predetermined judgment period 20, for example, from the evaluation value data T ^* (X1, t) to the evaluation value data T ^* (X2, t).
Is subtracted at each corresponding time, and the sum Σ thereof is obtained. If the sum Σ is a remarkably large positive value, the measurement point X1
It is determined that the coating has peeled off.

[0162] FIGS. 22 to 25 In both examples, instead of the evaluation value change rate, performs the determination by using the evaluation value T ^* directly, uneven heating and coating thickness contained in the temperature T in the evaluation value T ^* Since the influence of the variation in the thickness is eliminated, the accuracy of the peeling determination is better than in the past.

[Fourth Embodiment: Omission of Correction Processing and Evaluation Value Change Rate Calculation] In the example shown in FIG. 26, the CPU 120 does not perform the correction processing, but directly obtains the evaluation value T for the temperature T from the measurement data 22 of FIG. ^* Is calculated (step S130)
1). Subsequently, the CPU 120 does not calculate the rate of change of the evaluation value, but makes a determination by directly comparing the evaluation value T ^* with the reference value REF (T ^* ) (step S1302).

In FIG. 26, the evaluation value calculation processing in step S1301 is the same as the evaluation value calculation processing (step S102) described with reference to FIG. 10, and the comparison processing processing in step S1302 is the same as the evaluation value calculation processing described in FIG. This is the same as the processing (step S903).

That is, in step S1302, the evaluation value T ^{* at the} judgment time t3 as shown in FIGS.
At a measurement point where is larger than the reference value REF (T ^* ), it is determined that the coating has peeled off.

[Modification of the Judgment Method in the Fourth Embodiment (Part 1)] In the example shown in FIG. 27, the CPU 120 does not perform the correction processing, but directly obtains the evaluation value T ^* for the temperature T from the measurement data 22 in FIG. It is calculated (step S1401).
Subsequently, the CPU 120 does not calculate the evaluation value change rate, but directly converts the evaluation value data T ^* into the reference data value REF (T
^* (T)) and make a determination (step S140)
2).

In FIG. 27, the evaluation value calculation processing in step S1401 is the same as the evaluation value calculation processing (step S102) described with reference to FIG. 10, and the comparison processing in step S1402 is the comparison processing (step S1402) described in FIG. This is the same as S1003).

That is, in step S1402, the evaluation value data T ^* (t) and the reference data REF (T ^* (t)) are obtained, for example, by taking a residual sum of squares during a predetermined judgment period.
It is determined whether or not the curves indicated by each other match within a predetermined range, it is determined that the coating has not peeled off at the measuring points that match, and the coating has peeled off at the measuring points that do not match. It is determined that there is.

[Modification of Judgment Method in Fourth Embodiment (
2)] In the example shown in FIG.
Is not performed, the temperature T is directly calculated from the measurement data 22 in FIG.
Evaluation value T^*Is calculated (step S1501).
Subsequently, the CPU 120 does not calculate the evaluation value change rate, and
Evaluation value T at number measurement points ^*Are compared with each other (step S
1502).

In FIG. 28, the evaluation value calculation processing in step S1501 is the same as the evaluation value calculation processing (step S102) described with reference to FIG. 10, and the comparison processing in step S1502 is the same as the comparison processing (step S1502) described in FIG. This is the same as (S1103).

That is, in step S1502, two measurement points are set to X1 and X2, and the evaluation value T
^* (X1) and T ^* (X2), the CPU 120
Compares the two evaluation values T ^* (X1) and T ^* (X2) at a predetermined determination time point t3 as shown in FIGS. The evaluation value T ^* (X1) at one measurement point X1 is
At the measurement point X1 that is significantly larger than the evaluation value T ^* (X2) at the other measurement point X2, it is determined that the peeling has occurred.

[Modification of Judgment Method in Fourth Embodiment (No. 3)] In the example shown in FIG. 29, the CPU 120 does not perform correction processing, and directly evaluates the temperature T at each measurement point from the measurement data 22 in FIG. Calculate the value T ^* (Step S1)
601). Next, the CPU 120 compares the evaluation value data T ^* at a plurality of measurement points without calculating the evaluation value change rate (step S1602).

That is, in step S1602, when the two measurement points are X1 and X2, and the evaluation value data at each is T ^* (X1, t) and T ^* (X2, t),
The PU 120, for example, converts the evaluation value data T ^* (X1, t) to the evaluation value data T ^* (X
2, t) is subtracted at each corresponding time, and the sum Σ thereof is obtained. If the sum Σ is a significantly large positive value, it is determined that the coating has peeled off at the measurement point X1.

In each of the examples of FIGS. 26 to 29, the measured data is not corrected and the rate of change of the evaluation value is not calculated, but the evaluation value T ^* or the evaluation value data T ^* is used instead of the temperature T.
Since (t) is used, the effects of uneven heating and uneven coating thickness can be eliminated, and the accuracy of peeling determination is better than in the past.

Here, the program for realizing the functions of the computer 116 is recorded on a computer-readable recording medium, and the program recorded on this recording medium is read by a computer system and executed, thereby achieving the above-described operation. Processing may be performed. Note that the “computer system” here includes an OS (operating system) and hardware (peripheral devices and the like).

The “computer-readable recording medium” refers to a portable medium such as a floppy (registered trademark) disk, a magneto-optical disk, a ROM, a CD / ROM, or a recording device such as a hard disk built in a computer system. Shall be included.

[0177] Further, the "computer-readable recording medium" refers to a communication line for transmitting a program via a communication line such as the Internet or the like for a short time.
This includes those that dynamically hold programs and those that hold programs for a certain period of time, such as volatile memories in computer systems serving as servers and clients in that case.

The above program may be a program for realizing a part of the functions described above, and may be a program for realizing the functions described above in combination with a program already recorded in the computer system. There may be.

[0179]

According to the first aspect of the present invention, the data judging device according to the present invention calculates the temperature at a certain point in time at a desired measurement point on the surface of the subject based on the measurement data indicating the temporal change of the temperature at the measurement point. When the evaluation value of the temperature is T ^* and the temperatures at two different times are T1 and T2, and T1> T2, the evaluation value is calculated by T ^* = (T−T2) / (T1−T2). Evaluation value calculation means to calculate, based on the evaluation value calculated by the evaluation value calculation means, comprising a determination means to determine whether the coating has been peeled off at the measurement point, so uneven heating and coating thickness The effect of temperature unevenness due to the variation can be eliminated, and the determination accuracy is good.

The data judging device of the invention according to claim 2 is
In Claim 1, since the measurement data is obtained after the heating is stopped, the temperature of the sample is heated once, and when the heating is stopped to perform the determination, the temperature unevenness due to the heating unevenness or the coating thickness variation is reduced. The effects can be eliminated.

The data judging device of the invention according to claim 3 is
In claim 1, since the temperature T1 is the highest temperature and the temperature T2 is the lowest temperature, the calculation accuracy of the evaluation value is good.

The data judging device of the invention according to claim 4 is
2. The apparatus according to claim 1, further comprising a correction unit having correction data prepared in advance for a member having the same shape as the subject and having a known peeling state, and correcting the measurement data based on the correction data. And, since the evaluation value calculating means calculates the evaluation value based on the corrected measurement data corrected by the correcting means, error factors such as temperature unevenness caused by the shape of the subject are removed in advance. And accurate judgment can be made.

According to a fifth aspect of the present invention, there is provided a data determination apparatus comprising:
In Claim 1, the determination means has a predetermined reference value and a predetermined determination time, and the evaluation value is:
At the time of the determination, at a measurement point larger than the reference value, it is determined that the coating is peeled off, so that accurate determination is possible.

[0184] According to a sixth aspect of the present invention, there is provided a data judging device.
5. The method according to claim 1, wherein the determination unit has reference data indicating a change over time of a predetermined evaluation value and a predetermined determination period, and indicates a change over time of the evaluation value calculated by the evaluation value calculation unit. 6. Evaluation value data, in the determination period, it is determined that the coating is not peeling off at the measurement points that match within a predetermined range with the reference data, and that the coating is determined to be peeling off at the measurement points that do not match Therefore, accurate determination is possible.

According to a seventh aspect of the present invention, there is provided a data determination apparatus comprising:
In claim 1 or 4, a plurality of positions are set as the measurement point, the determination means has a predetermined determination time, the evaluation value, at the determination time,
At the measurement points higher than the other measurement points, it is determined that the coating has peeled off, and thus no reference value is required.

[0186] The data judging device of the invention according to claim 8 is characterized in that:
5. The measurement point according to claim 1, wherein a plurality of positions are set as the measurement points, the determination unit has a predetermined determination period, and outputs evaluation value data indicating a temporal change of the evaluation value in the determination period. In step (1), it is determined whether or not the coating has peeled off by comparing with evaluation value data indicating a change with time in the evaluation value at another measurement point. Therefore, a reference value is unnecessary.

[0187] According to a ninth aspect of the present invention, there is provided a data determination apparatus comprising:
5. The evaluation unit according to claim 1, wherein the determination unit includes a differential operation unit that calculates a rate of change of the evaluation value evaluation value at the measurement point based on evaluation value data indicating a change with time of the evaluation value. Based on the magnitude of the value change rate, it is determined whether or not the coating has peeled off at the measurement point, so that accurate determination is possible.

According to a tenth aspect of the present invention, in the ninth aspect, the determination means has a predetermined reference value and a predetermined determination time, and the measurement data is obtained when the temperature falls. In the case of, the rate of change of the evaluation value is to determine that the coating is peeled off at the measurement point smaller than the reference value at the time of the determination, so that an accurate determination can be made when the temperature is lowered. is there.

In a ninth aspect of the present invention, in the ninth aspect, the deciding means has reference data indicating a predetermined time-dependent change of the evaluation value change rate and a predetermined deciding period. The evaluation value change rate data indicating the change over time of the evaluation value change rate calculated by the differential operation means determines that the coating has not peeled off at the measurement points that coincide with the reference data within a predetermined range during the determination period. However, at the measurement points that do not match, it is determined that the coating has peeled off, so that accurate determination is possible.

According to a twelfth aspect of the present invention, in the ninth aspect of the present invention, in the ninth aspect, a plurality of positions are set as the measurement points, wherein the determination means has a predetermined determination time, and Is the case of when the temperature is lowered, the rate of change of the evaluation value at the measurement point is lower than the other measurement points at the time of the determination is to determine that the coating has been peeled off, the reference value Can be determined without using.

According to a thirteenth aspect of the present invention, in the data judging device according to the ninth aspect, a plurality of positions are set as the measurement points, the judgment means has a predetermined judgment period, and By comparing the evaluation value change rate data indicating the change over time of the change rate with the evaluation value change rate data indicating the change over time of the evaluation value change rate at another measurement point in the determination period, coating peeling occurs. Since the determination is made as to whether or not the determination is made, the determination can be made without using the reference value.

The invention according to claim 14 is a non-destructive inspection apparatus, wherein the heating means for heating the object and the temperature rise during heating by the heating means or when the temperature falls after the heating is stopped are provided. The data determination device according to any one of claims 1 to 13, wherein a temperature observation unit for observing a temporal change in temperature at a desired measurement point on the surface of the subject, and data observed by the temperature observation unit are determined. , It is possible to accurately detect the peeling of the coating.

The invention according to claim 15 is a non-destructive inspection method, wherein the temperature at a measurement point at a desired measurement point on the surface of the subject is defined as T based on measurement data indicating the change with time. When the evaluation value is T ^*, and the temperatures at two different times are T1 and T2, and T1> T2, the evaluation value is calculated by T ^* = (T−T2) / (T1−T2), and the evaluation is performed. Based on the value, it is determined whether the coating has been peeled off at the measurement point,
It is possible to accurately detect the peeling of the coating by eliminating the influence of the temperature unevenness caused by the heating unevenness and the coating thickness variation.

In the nondestructive inspection method according to the sixteenth aspect of the present invention, since the measurement data after the heating is stopped is used as the measurement data, the determination is made after the subject is once heated and then stopped. In addition, it is possible to eliminate the influence of uneven temperature due to uneven heating and uneven coating thickness.

In the nondestructive inspection method according to the seventeenth aspect, in the sixteenth aspect, the temperature T1 is the highest temperature and the temperature T2 is the lowest temperature, so that the calculation accuracy of the evaluation value is good.

According to a eighteenth aspect of the present invention, in the nondestructive inspection method according to the fifteenth aspect, correction data is prepared in advance for a member having the same shape as the subject and whose peeling state is known, and based on the correction data. Therefore, the measurement data is corrected, and the evaluation value is calculated based on the corrected measurement data after the correction, so that an error factor such as temperature unevenness due to the shape of the subject can be removed in advance. Accurate judgment is possible.

The nondestructive inspection method according to the nineteenth aspect of the present invention is the nondestructive inspection method according to the fifteenth or eighteenth aspect, wherein the evaluation value is determined at a predetermined judgment time point at a measuring point larger than a predetermined reference value. Since it is determined that peeling has occurred, an accurate determination can be made.

According to a twentieth aspect of the present invention, in the non-destructive inspection method according to the fifteenth or eighteenth aspect, the evaluation value data indicating a change with time of the evaluation value is set to a predetermined evaluation value during a predetermined judgment period. It is determined that the coating has not peeled off at the measurement points that match within a predetermined range with the reference data indicating the time-dependent change of the coating, and it is determined that the coating has peeled off at the measurement points that do not match, making accurate determination possible. It is.

According to a twenty-first aspect of the present invention, in the nondestructive inspection method according to the fifteenth or eighteenth aspect, a plurality of the measurement points are set, and the evaluation value is higher than other measurement points at a predetermined judgment time. Since it is determined that the coating has peeled off at the measurement point that is higher, a reference value is not required.

A non-destructive inspection method according to a twenty-second aspect of the present invention is the non-destructive inspection method according to the fifteenth or eighteenth aspect, wherein a plurality of the measurement points are set, and
In a predetermined determination period, it is determined whether or not the coating has peeled off by comparing with evaluation value data indicating a temporal change of the evaluation value at another measurement point, so that a reference value is unnecessary.

According to a twenty-third aspect of the present invention, in the nondestructive inspection method according to the fifteenth or eighteenth aspect, the rate of change of the evaluation value at the measurement point is calculated based on the evaluation value data indicating the change over time of the evaluation value. Since it is determined whether or not the coating has peeled off at the measurement point based on the magnitude of the evaluation value change rate, accurate determination can be made.

According to a twenty-fourth aspect of the present invention, in the non-destructive inspection method according to the twenty-third aspect, when the measured data is for a temperature decrease, the evaluation value change rate is determined at a predetermined judgment time. At a measurement point smaller than a predetermined reference value, it is determined that the coating has peeled off, so that an accurate determination can be made when the temperature is lowered.

According to a twenty-fifth aspect of the present invention, in the nondestructive inspection method according to the twenty-third aspect, the evaluation value change rate data indicating the time-dependent change of the evaluation value change rate is determined in a predetermined determination period. Since it is determined that the coating has not peeled off at the measurement points that match within a predetermined range with the reference data indicating the change over time of the evaluation value change rate, it is determined that the coating has peeled off at the measurement points that do not match, so it is accurate. Determination is possible.

In the nondestructive inspection method according to the twenty-sixth aspect, in the twenty-third aspect, when the plurality of measurement points are set and the measured data is for a temperature decrease, the evaluation value change rate is determined in advance. At the determined determination point, it is determined that the coating has peeled off at the measurement point lower than the other measurement points, so that the determination can be made without using the reference value.

[0205] According to a twenty-seventh aspect of the present invention, in the nondestructive inspection method according to the twenty-third aspect, a plurality of the measurement points are set, and the evaluation value change rate data indicating the change with time of the evaluation value change rate is determined in advance. During the determination period, it is determined whether or not the coating has peeled off by comparing with the evaluation value change rate data indicating the change over time of the evaluation value change rate at other measurement points, so the determination is made without using the reference value. can do.

According to a twenty-eighth aspect of the present invention, there is provided a computer-readable recording medium storing a program for causing a computer to execute the non-destructive inspection method according to any one of the fifteenth to twenty-seventh aspects. Can be accurately determined by a computer.

The invention according to claim 29 is a computer program, which causes the computer to execute the non-destructive inspection method according to any one of claims 15 to 27, so that the computer can accurately determine the peeling of the coating. it can.

[Brief description of the drawings]

FIG. 1 is a view showing measurement data of a surface temperature when the heating intensity is changed for the same point of a subject.

FIG. 2 is a view showing evaluation value data corresponding to each measurement data shown in FIG. 1;

FIG. 3 is a view showing measurement data of a surface temperature of a healthy subject when there is uneven heating and when there is no uneven heating.

FIG. 4 is a view showing evaluation value data corresponding to each measurement data shown in FIG. 3;

FIG. 5 is a view showing measured data of surface temperature of a peeled part and a healthy part.

FIG. 6 is a diagram showing evaluation value data corresponding to each measurement data shown in FIG. 5;

FIG. 7 is a perspective view showing an outline of the nondestructive inspection apparatus according to the first embodiment of the present invention.

FIG. 8 is a diagram showing an internal configuration of the nondestructive inspection device.

FIG. 9 is a diagram showing the operation of the nondestructive inspection device.

FIG. 10 is a flowchart illustrating an outline of measurement data correction, evaluation value calculation, and determination (evaluation value change rate calculation, comparison of evaluation value change rate and reference value) in the nondestructive inspection apparatus.

FIG. 11 is a view showing the concept of measurement data correction.

FIG. 12 is a diagram showing an example of corrected measurement data.

FIG. 13 is a diagram showing an example of evaluation value data.

FIG. 14 is a diagram showing an example of evaluation value change rate data.

FIG. 15 is a flowchart showing an outline of processing when comparing evaluation value change rate data and reference data as a modification of FIG. 10;

FIG. 16 is a flowchart showing a processing outline in a case where the evaluation value change rates are compared with each other as a modification of FIG. 10;

FIG. 17 is a flowchart showing a processing outline when comparing evaluation value change rate data as a modification of FIG. 10;

FIG. 18 shows a second embodiment of the present invention in which processing for correcting measurement data is omitted from FIG. 10 (evaluation value calculation and evaluation (evaluation value change rate calculation, comparison between evaluation value change rate and reference value). 4) is a flowchart showing an outline.

FIG. 19 is a flowchart showing an outline of processing when comparing evaluation value change rate data and reference data as a modification of FIG. 18;

FIG. 20 is a flowchart showing a processing outline in a case where evaluation value change rates are compared with each other as a modification of FIG. 18;

FIG. 21 is a flowchart showing an outline of a process when comparing evaluation value change rate data as a modification of FIG. 18;

FIG. 22 shows a third embodiment of the present invention in which processing for omitting the evaluation value change rate calculation (measurement data correction, evaluation value calculation, and judgment (comparison of evaluation value and reference value)) with respect to FIG. 4 is a flowchart showing an outline.

FIG. 23 is a flowchart showing an outline of processing when comparing evaluation value data with reference data as a modification of FIG. 22;

FIG. 24 is a flowchart showing a processing outline when comparing evaluation values as a modification of FIG. 22;

FIG. 25 is a flowchart showing a processing outline when comparing evaluation value data as a modification of FIG. 22;

FIG. 26 shows a fourth embodiment of the present invention in which the measurement data correction and the evaluation value change rate calculation are omitted from FIG. 10 (evaluation value calculation and judgment (comparison of evaluation value and reference value)).
3 is a flowchart showing an outline of the process.

FIG. 27 is a flowchart showing an outline of processing when comparing evaluation value data and reference data as a modification of FIG. 26;

FIG. 28 is a flowchart showing a processing outline when comparing evaluation values as a modification of FIG. 26;

FIG. 29 is a flowchart showing an outline of a process when comparing evaluation value data as a modification of FIG. 26;

[Explanation of symbols]

P Subject 1 Measurement data at reference heating intensity 2 Measurement data at 10% decrease from reference heating intensity 3 Measurement data at 5% decrease from reference heating intensity 4 Measurement data at 5% increase from reference heating intensity 5 Infrared flash on / off Operation timing 6 Measurement data in a healthy part where heating unevenness has occurred 7 Measurement data in a healthy part where heating unevenness does not occur 8 Measurement data in a peeled part 9 Measurement data in a healthy part 11 Evaluation value data corresponding to measurement data 1 12 Measurement data 2 13 Evaluation value data corresponding to measurement data 3 14 Evaluation value data corresponding to measurement data 4 16 Evaluation value data corresponding to measurement data 6 17 Evaluation value data corresponding to measurement data 7 18 Measurement data 8 Evaluation value data corresponding to 19 corresponding to measurement data 9 Value data 20 Measurement data 21 Correction data (reference subject data) 22 Corrected measurement data 30 Corrected measurement data in a healthy part with a thin coating 31 Corrected measurement data in a healthy part with a thick coating 32 Corrected measurement data in a peeled part 40 Evaluation value data 41 corresponding to the corrected measurement data 30 Evaluation value data 42 corresponding to the corrected measurement data 31 Evaluation value data 50 corresponding to the corrected measurement data 32 Evaluation value change rate data 51 corresponding to the evaluation value data 51 Evaluation Evaluation value change rate data 52 corresponding to the value data 41 Evaluation value change rate data 52 corresponding to the evaluation value data 52 100 Non-destructive inspection apparatus 101 Holder 101a 5-axis actuator 102 Heating head 102a Heater 102b 3-axis actuator 103 Infrared light La 104 hood 105 fan 111 retainer controller driver 112 heating head driver 113 timer 114 video monitor 115 printer 116 computer 117 interface unit 118 storage unit 119 memory 120 CPU (central processing unit) 121 input device 122 display device

Continued on the front page (72) Inventor Hiroyuki Nakayama 2-1-1, Shinhama, Arai-machi, Takasago-shi, Hyogo F-term in Takasago Research Laboratory, Mitsubishi Heavy Industries, Ltd. 2G040 AA07 AB08 BA26 CA02 DA06 DA12 EA06 EA08 EB02 EC03 FA07 HA02 HA08 HA10 HA11 HA15 HA16 ZA05

Claims (29)

[Claims] 1. A member to be inspected in a data discriminating apparatus used in a nondestructive inspection device for detecting a portion where a coating has peeled off in a member constituted by applying a coating on a base material surface. (Less than,
Based on the measurement data indicating the time-dependent change of the temperature at the desired measurement point on the surface, referred to as "the subject", the temperature at a certain time at the measurement point is T, and the evaluation value of the temperature is T ^* , The temperatures at two different times are T1 and T2, and T1
> T2, T ^* = (T-T2) / (T1-T
An evaluation value calculating means for calculating an evaluation value according to 2), and a determining means for determining whether or not the coating is peeled off at the measurement point based on the evaluation value calculated by the evaluation value calculating means. Data determination device. 2. The data judging device according to claim 1, wherein the measurement data is obtained after the heating is stopped. 3. The data judging device according to claim 2, wherein the temperature T1 is a maximum temperature, and the temperature T2 is a minimum temperature. 4. A correction unit according to claim 1, wherein the correction means has correction data prepared in advance for a member having the same shape as the subject and having a known peeling state, and correcting the measurement data based on the correction data. And the evaluation value calculating means calculates the evaluation value based on the corrected measurement data corrected by the correction means. 5. The measurement method according to claim 1, wherein the determination means has a predetermined reference value and a predetermined determination time, and the evaluation value is larger than the reference value at the determination time. A data judging device for judging that the coating has been peeled off. 6. The evaluation value according to claim 1, wherein the determination means has reference data indicating a change over time of a predetermined evaluation value and a predetermined determination period, and the evaluation value calculated by the evaluation value calculation means. The evaluation value data indicating the time-dependent change of
In the determination period, it is determined that the coating is not peeled off at the measurement points that match within the predetermined range with the reference data, and it is determined that the coating is peeled off at the measurement points that do not match. Data determination device. 7. The method according to claim 1, wherein a plurality of positions are set as the measurement points, the determination means has a predetermined determination time, and the evaluation value is different from the other at the determination time. A data determination device for determining that the coating is peeled off at a measurement point higher than the measurement point. 8. The evaluation value data according to claim 1, wherein a plurality of positions are set as the measurement points, the determination means has a predetermined determination period, and indicates a temporal change of the evaluation value. In the determination period, by comparing with the evaluation value data showing the change over time of the evaluation value at other measurement points, to determine whether or not peeling of the coating has occurred, data determination characterized by the above-mentioned. apparatus. 9. The method according to claim 1, wherein the determination unit determines a temporal change rate of the evaluation value at the measurement point based on evaluation value data indicating a temporal change of the evaluation value.
A differential operation means for calculating the “evaluation value change rate”, and determining whether or not the coating has peeled off at the measurement point based on the magnitude of the evaluation value change rate. A data judging device characterized by the above-mentioned. 10. The evaluation value change rate according to claim 9, wherein the determination means has a predetermined reference value and a predetermined determination time, and when the measured data is for a temperature decrease, However, at the time of the determination, it is determined that the coating is peeled off at a measurement point smaller than the reference value. 11. The evaluation means according to claim 9, wherein said judgment means has reference data indicating a change with time of a predetermined evaluation value change rate and a predetermined judgment period, and said evaluation value change calculated by said differential operation means. The evaluation value change rate data indicating the change with time of the rate is determined that the coating is not peeled off at the measurement points that match within the predetermined range with the reference data during the determination period, and the coating is peeled off at the measurement points that do not match. A data determination device that determines that the error has occurred. 12. The method according to claim 9, wherein a plurality of positions are set as the measurement points, the determination means has a predetermined determination time, and the measurement data is for a temperature decrease. A data judging device for judging that the coating is peeled off at a measurement point at which the evaluation value change rate is lower than other measurement points at the judgment time. 13. The evaluation value change according to claim 9, wherein a plurality of positions are set as the measurement points, the determination means has a predetermined determination period, and indicates a change with time of the evaluation value change rate. The rate data, in the determination period, by comparing with the evaluation value change rate data indicating the change over time of the evaluation value change rate at other measurement points, to determine whether or not the coating peeling has occurred A data judging device characterized by the above-mentioned. 14. A non-destructive inspection apparatus for detecting a portion of a member formed by applying a coating on a surface of a base material, where a coating is peeled off, is a member to be inspected (hereinafter referred to as a “subject to be inspected”). And a heating means for heating the heating means, and a temperature change at a desired measurement point on the surface of the subject when the temperature rises during heating by the heating means or when the temperature falls after the heating is stopped. A non-destructive inspection device comprising: a temperature observation unit for observing; and a data determination device according to claim 1 for determining data observed by the temperature observation unit. 15. A non-destructive inspection method for detecting a portion of a member formed by applying a coating on a base material surface where a coating is peeled off is a member to be inspected (hereinafter referred to as a “subject to be inspected”). ")
Based on the measurement data indicating the change over time of the temperature at a desired measurement point on the surface, let T be the temperature at the measurement point,
When the evaluation value of the temperature is T ^* , the temperatures at two different times are T1 and T2, and T1> T2, T ^* =
The evaluation value is calculated by (T−T2) / (T1−T2),
A non-destructive inspection method, comprising: determining whether or not the coating has peeled off at the measurement point based on the evaluation value. 16. The nondestructive inspection method according to claim 15, wherein the data after the heating is stopped is used as the measurement data. 17. The nondestructive inspection method according to claim 16, wherein the temperature T1 is a maximum temperature, and the temperature T2 is a minimum temperature. 18. The method according to claim 15, wherein correction data is prepared in advance for a member having the same shape as the subject and whose peeling state is known, and the measurement data is corrected based on the correction data. A non-destructive inspection method, wherein the evaluation value is calculated based on the corrected measurement data after the correction. 19. The method according to claim 15, wherein the evaluation value is determined at a predetermined determination point to be at a measurement point larger than a predetermined reference value, at which the coating has been peeled. Non-destructive inspection method. 20. The evaluation value data according to claim 15 or 18, wherein the evaluation value data indicating the change over time of the evaluation value is within a predetermined range from reference data indicating the change over time of the predetermined evaluation value during a predetermined determination period. A non-destructive inspection method characterized in that it is determined that the coating has not peeled off at the measurement points that match, and that the coating has peeled off at the measurement points that do not match. 21. The method according to claim 15, wherein a plurality of the measurement points are set, and the coating value is peeled off at a measurement point at which the evaluation value is higher than other measurement points at a predetermined judgment time. A nondestructive inspection method characterized in that it is determined to have occurred. 22. The method according to claim 15, wherein a plurality of the measurement points are set, and evaluation value data indicating a change over time of the evaluation value is obtained during a predetermined determination period. A nondestructive inspection method characterized by determining whether or not the coating has peeled off by comparing with evaluation value data indicating a change with time. 23. A method according to claim 15, wherein a temporal change rate of the evaluation value at the measurement point (hereinafter referred to as an “evaluation value change rate”) is based on the evaluation value data indicating a temporal change of the evaluation value. ) Is calculated, and it is determined whether or not the coating has peeled off at the measurement point based on the magnitude of the evaluation value change rate. 24. The measurement point according to claim 23, wherein when the measurement data is for a temperature decrease, the evaluation value change rate is smaller than a predetermined reference value at a predetermined determination time. In the nondestructive inspection method, it is determined that the coating is peeled off. 25. The evaluation data change rate data according to claim 23, wherein the evaluation value change rate data indicating the change over time in the evaluation value change rate is reference data indicating a predetermined change over time in the evaluation value change rate during a predetermined determination period. A non-destructive inspection method, wherein it is determined that the coating has not peeled off at measurement points that match within a predetermined range. 26. The method according to claim 23, wherein a plurality of the measurement points are set, and when the measurement data is for a temperature decrease, the evaluation value change rate is higher than another measurement point at a predetermined determination time. A non-destructive inspection method characterized in that it is determined that the coating has peeled off at a lower measurement point. 27. The method according to claim 23, wherein a plurality of the measurement points are set, and evaluation value change rate data indicating a temporal change of the evaluation value change rate is evaluated at another measurement point during a predetermined determination period. A non-destructive inspection method characterized in that it is determined whether or not the coating has peeled off by comparing the evaluation value change rate data indicating the change with time of the value change rate. 28. A computer-readable recording medium storing a program for causing a computer to execute the nondestructive inspection method according to claim 15. A computer program for causing a computer to execute the nondestructive inspection method according to any one of claims 15 to 27.