JP2002187197A - Measuring method for film thickness - Google Patents

Measuring method for film thickness

Info

Publication number
JP2002187197A
JP2002187197A JP2000388721A JP2000388721A JP2002187197A JP 2002187197 A JP2002187197 A JP 2002187197A JP 2000388721 A JP2000388721 A JP 2000388721A JP 2000388721 A JP2000388721 A JP 2000388721A JP 2002187197 A JP2002187197 A JP 2002187197A
Authority
JP
Japan
Prior art keywords
film
thickness
measuring
amount
wrinkles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000388721A
Other languages
Japanese (ja)
Inventor
Takeya Nohira
剛也 野平
Akira Goto
陽 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP2000388721A priority Critical patent/JP2002187197A/en
Publication of JP2002187197A publication Critical patent/JP2002187197A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/03Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the shape of the extruded material at extrusion
    • B29C48/07Flat, e.g. panels
    • B29C48/08Flat, e.g. panels flexible, e.g. films
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/25Component parts, details or accessories; Auxiliary operations
    • B29C48/92Measuring, controlling or regulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2948/00Indexing scheme relating to extrusion moulding
    • B29C2948/92Measuring, controlling or regulating
    • B29C2948/92009Measured parameter
    • B29C2948/92114Dimensions
    • B29C2948/92152Thickness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2948/00Indexing scheme relating to extrusion moulding
    • B29C2948/92Measuring, controlling or regulating
    • B29C2948/92323Location or phase of measurement
    • B29C2948/92438Conveying, transporting or storage of articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2948/00Indexing scheme relating to extrusion moulding
    • B29C2948/92Measuring, controlling or regulating
    • B29C2948/92504Controlled parameter
    • B29C2948/92609Dimensions
    • B29C2948/92647Thickness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2948/00Indexing scheme relating to extrusion moulding
    • B29C2948/92Measuring, controlling or regulating
    • B29C2948/92819Location or phase of control
    • B29C2948/92933Conveying, transporting or storage of articles

Abstract

PROBLEM TO BE SOLVED: To provide a measuring method for a film thickness giving a good measured result by eliminating an error in on-line measuring of a film thickness by watching a wrinkle. SOLUTION: An on-line measuring method for a film thickness is equipped with a means for measuring an amount of a wrinkle of a plastic film wherein a film tension in a widthwise direction and/or a moving direction of the film is adjusted to decrease the amount of the wrinkle.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はフィルムの厚み測定
方法に関し、更に詳しくはオンラインでのフィルムの厚
み測定における誤差をしわを監視することによって解消
し、良好な測定結果を得ることのできるフィルムの厚み
測定方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring film thickness, and more particularly, to a method for measuring film thickness on-line by monitoring wrinkles for errors in film thickness measurement and obtaining good measurement results. It relates to a thickness measuring method.

【0002】[0002]

【従来の技術】ポリエステル、ポリアミド、ポリプロピ
レンなどの熱可塑性樹脂から成るフィルムの製造工程に
おいて、フィルムの幅方向の厚さを所定のプロフィール
たとえば全幅均一厚さに制御することが要求される。こ
のフィルムの厚さ調整は、通常非接触の透過型厚み計に
よって測定された厚みデータを基に制御される。
2. Description of the Related Art In the process of manufacturing a film made of a thermoplastic resin such as polyester, polyamide, or polypropylene, it is required to control the thickness of the film in a width direction to a predetermined profile, for example, a uniform thickness over the entire width. The adjustment of the thickness of the film is usually controlled based on thickness data measured by a non-contact transmission thickness gauge.

【0003】この厚み計は、走行中のフィルムを幅方向
に移動しながらポジションごとの厚みデータを測定する
ように構成されている。フィルムへのダメージを起こさ
せないために透過型の厚み計が用いられるが、透過した
物質量を受け取るのに必要なスポットが存在する。本来
このスポット内のフィルムの形状はフラットであること
が望ましいが、フィルムが高速で搬送されているので実
質的にはフラットにすることは困難であり、しわや傾き
といったものが存在するものになってしまう。
This thickness gauge is configured to measure thickness data for each position while moving a running film in the width direction. In order to prevent damage to the film, a transmission type thickness gauge is used, but there are spots necessary to receive the amount of the transmitted material. Originally, it is desirable that the shape of the film in this spot is flat, but it is difficult to make it substantially flat because the film is conveyed at high speed, and there are wrinkles and tilts. Would.

【0004】しかし、しわや傾きが入ると、スポット内
のフィルム重量が増えることとなり、透過型厚み計では
実際のフィルム厚みよりも厚くなったように指示してし
まい誤差が重畳してしまう問題が生じる。
However, if wrinkles or tilts occur, the weight of the film in the spot increases, and the transmission-type thickness gauge indicates that the film is thicker than the actual film thickness, and the error is superimposed. Occurs.

【0005】[0005]

【発明が解決しようとする課題】本発明はかかる現状に
鑑みてなされたものであり、透過型のオンライン厚み計
によるフィルムの厚み測定において、しわや傾きの影響
による測定誤差を解消することを目的としたものであ
る。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to eliminate a measurement error caused by wrinkles and inclinations in a film thickness measurement using a transmission-type online thickness gauge. It is what it was.

【0006】[0006]

【課題を解決するための手段】本発明の目的は、本発明
によれば、プラスチックフィルムのしわの量を測定する
手段を備えたオンラインでのフィルムの厚み測定方法で
あって、しわの量が低減するよう幅方向及び/又は流れ
方向のフィルムの張力を調整することを特徴とするフィ
ルムの厚み測定方法により達成できる。
According to the present invention, there is provided, in accordance with the present invention, a method for online film thickness measurement comprising means for measuring the amount of wrinkles in a plastic film, wherein the amount of wrinkles is reduced. This can be achieved by a film thickness measuring method characterized by adjusting the film tension in the width direction and / or the flow direction so as to reduce the film thickness.

【0007】[0007]

【発明の実施の形態】以下、本発明の実施形態につい
て、図面を参照しながら説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0008】図1は本発明を実施する製膜工程を模式的
に例示した模式工程図である。図1において、1はフィ
ルム、2は透過型厚み計、3はガイドロール、4はしわ
の量測定装置をそれぞれ示す。
FIG. 1 is a schematic process diagram schematically illustrating a film forming process for carrying out the present invention. In FIG. 1, 1 is a film, 2 is a transmission type thickness gauge, 3 is a guide roll, and 4 is a wrinkle amount measuring device.

【0009】以上のように構成される本発明の測定方法
において、透過型厚み計2はフィルムの走行方向と直交
する方向でフィルムの幅方向に走査し、フィルムの厚み
をオンラインで測定することができる。
In the measuring method of the present invention configured as described above, the transmission type thickness meter 2 scans the film in the width direction in a direction orthogonal to the running direction of the film to measure the film thickness online. it can.

【0010】本発明においてフィルムの厚み測定は、透
過型オンライン厚み計により行なうことが好ましく、フ
ィルムを挟んで配置された上下ヘッドにてフィルムの単
位面積あたりの重量を測定し、得られた結果からフィル
ムの厚みを求める方式のものが好ましいが、しわによっ
て厚み測定値に影響を与える厚み計にも当然応用でき
る。
In the present invention, the thickness of the film is preferably measured by a transmission-type online thickness gauge, and the weight per unit area of the film is measured by upper and lower heads arranged with the film interposed therebetween. Although a method for determining the thickness of the film is preferable, it is naturally applicable to a thickness gauge that affects the measured thickness value due to wrinkles.

【0011】このような透過型オンライン厚み計として
は、例えば放射線の透過量によってフィルムの厚みを求
める方式のもの、光の透過量によってフィルムの厚みを
求める方式のもの、超音波の透過量によってフィルムの
厚みを求める方式のものを挙げることができる。
Such transmission type online thickness gauges include, for example, a type that determines the thickness of a film by the amount of transmitted radiation, a type that determines the thickness of a film by the amount of transmitted light, and a film that determines the thickness of a film by the amount of transmitted ultrasonic waves. For obtaining the thickness of the sheet.

【0012】図2は、しわによって厚み測定値が実際よ
りも厚く誤差を生じてしまうことを説明する模式図であ
る。しわが入ったことは、画像センサからなるしわの量
測定装置4によってフィルムの幅が監視されており、フ
ィルムの幅が変更したことによって認識することができ
る。
FIG. 2 is a schematic diagram for explaining that a thickness measurement value is thicker than an actual error due to wrinkles. The width of the film is monitored by the wrinkle amount measuring device 4 including an image sensor, and can be recognized by the change in the width of the film.

【0013】本発明において、フィルムのしわの量の測
定は、例えばフィルムの幅を測定し、フィルムにしわが
無い場合のフィルムの幅と比較することによる方法、フ
ィルムのたるみを測定することによる方法、フィルムの
しわを画像として捕らえ測定することによる方法、フィ
ルムの測定部分のばたつきを測定することによる方法な
どを挙げることができる。
In the present invention, the amount of wrinkles in the film is measured, for example, by measuring the width of the film and comparing it with the width of the film when the film has no wrinkles, by measuring the sag of the film, Examples include a method of measuring wrinkles of a film as an image and measuring the flapping of a measurement portion of the film.

【0014】ここでは、画像センサを用いたしわの量測
定装置について説明するが、しわが入ることによってフ
ィルム中央がたるむことを利用したたるみ測定器を用い
たり、画像センサによって実際のしわの有無や大小を監
視する方法など、しわが検出できる方法であれば、特に
限定される必要は無い。
Here, an apparatus for measuring the amount of wrinkles using an image sensor will be described. There is no particular limitation as long as wrinkles can be detected, such as a method of monitoring the size.

【0015】実際のフィルムの幅をamm、しわの量測
定装置4によって測定したフィルムの幅をbmmとする
と、a=bであればしわがまったく入っていない状態。
a>bであればしわが入った状態といえる。そして、検
出される厚みの量は、全幅の平均でa/b倍だけ厚く測
定されてしまう。
Assuming that the actual width of the film is a mm and the width of the film measured by the wrinkle amount measuring device 4 is b mm, if a = b, no wrinkles are formed.
If a> b, it can be said that wrinkles are present. Then, the amount of the detected thickness is measured as a / b times as thick as the average of the entire width.

【0016】本発明では、プラスチックフィルムのしわ
の量を測定し、この量が許容範囲を外れた時に、しわの
量が低減するよう幅方向及び/又は流れ方向のフィルム
の張力を調整する。許容範囲は、例えばしわの量の測定
誤差の範囲とすることができる。
In the present invention, the amount of wrinkles in the plastic film is measured, and when this amount is out of the allowable range, the film tension in the width direction and / or the flow direction is adjusted so as to reduce the amount of wrinkles. The allowable range can be, for example, a range of a measurement error of a wrinkle amount.

【0017】しわの量の測定誤差の範囲は、用いるしわ
の量測定装置の方式や測定するフィルムの厚さ等により
異なるが、例えば画像センサを用いたしわの量測定装置
を用い、フィルムの厚さが5μm程度の場合では測定誤
差の範囲は0.100%である。尚、しわの量の許容範
囲として、製品フィルムの要求品質から求まる範囲とす
ることもできる。
The range of the measurement error of the wrinkle amount varies depending on the type of the wrinkle amount measurement device to be used, the thickness of the film to be measured, and the like. Is about 5 μm, the range of the measurement error is 0.100%. Incidentally, the allowable range of the amount of wrinkles may be a range determined from the required quality of the product film.

【0018】このしわの量の測定結果が許容範囲内の時
はそのまま測定を行い、許容範囲を外れた時にガイドロ
ール3の前後に設置されたニップロールの速度を調整
し、走行方向の張力を調整しなおすことによってしわの
発生を元の状況に戻すことができる。
When the result of the measurement of the amount of wrinkles is within the allowable range, the measurement is performed as it is. When the result is out of the allowable range, the speed of the nip rolls installed before and after the guide roll 3 is adjusted to adjust the tension in the traveling direction. The wrinkling can be returned to the original state by performing the wrinkling again.

【0019】更にしわの量を低減したいとき、特にしわ
をなくしたいときには、ガイドロール上に設けた幅方向
にフィルムに張力を持たせる装置を調整することによ
り、許容範囲内で正しい厚み測定をすることができる。
When it is desired to further reduce the amount of wrinkles, particularly when it is desired to eliminate wrinkles, a proper thickness measurement can be performed within an allowable range by adjusting a device provided on the guide roll for imparting tension to the film in the width direction. be able to.

【0020】[0020]

【実施例】以下、実施例によって本発明をさらに説明す
る。本発明における種々の特性値は下記の通り測定し
た。尚,本発明は、その要旨を超えない限り、以下の実
施例に限定されるものではない。
The present invention will be further described with reference to the following examples. Various characteristic values in the present invention were measured as follows. Note that the present invention is not limited to the following examples unless it exceeds the gist.

【0021】(1)フィルムの厚み 放射線透過型厚み計として、β線厚み計を用いた。(1) Film Thickness A β-ray thickness gauge was used as a radiation transmission type thickness gauge.

【0022】(2)しわの量検出装置 画像センサを用いたしわの量測定装置。本実施例では、
キーエンス社製画像センサCV−500を使用し、エッ
ジ検出機能を用いた。
(2) Wrinkle amount detecting device A wrinkle amount measuring device using an image sensor. In this embodiment,
An image sensor CV-500 manufactured by Keyence Corporation was used, and an edge detection function was used.

【0023】(3)光学式の厚み計 光学式の厚み計として、フィルムの表面の反射光と裏面
の反射光との干渉スペクトルをフーリエ変換した値とフ
ィルムの屈折率からフィルムの値を求める方式の厚み計
を用いた。本実施例では、大塚電子社製MCPD−20
00を使用した。
(3) Optical Thickness Meter As an optical thickness gauge, a method of obtaining a film value from a value obtained by Fourier transforming an interference spectrum between reflected light on the front surface and light reflected on the back surface of the film and a refractive index of the film. Was used. In the present embodiment, MCPD-20 manufactured by Otsuka Electronics Co., Ltd.
00 was used.

【0024】[実施例1]平均粒径0.6μmの炭酸カ
ルシウム粒子を0.02重量%、平均粒径0.1μmの
シリカ粒子を0.2重量%含有したポリエチレン―2,
6―ナフタレートを180℃で5時間乾燥した後、押出
機ホッパーに供給し、300℃で溶融し、T型押出ダイ
を用いて押出し、表面仕上げ0.3S、表面温度60℃
に保持したキャスティングドラム上で急冷固化せしめ
て、未延伸フイルムを得た。
Example 1 Polyethylene-2 containing 0.02% by weight of calcium carbonate particles having an average particle diameter of 0.6 μm and 0.2% by weight of silica particles having an average particle diameter of 0.1 μm.
After 6-naphthalate is dried at 180 ° C. for 5 hours, it is supplied to an extruder hopper, melted at 300 ° C., extruded using a T-type extrusion die, surface finish 0.3S, surface temperature 60 ° C.
And rapidly solidified on a casting drum held in the above-mentioned manner to obtain an unstretched film.

【0025】この未延伸フイルムを75℃にて予熱し、
更に低速、高速のロール間で14mm上方より830℃
の表面温度の赤外線ヒーターにて加熱して5.1倍に延
伸し、急冷し、続いてステンターに供給し、125℃に
て横方向に4.8倍延伸した。さらに引き続いて240
℃で10秒間熱固定した後、120℃にて横方向に1.
0%弛緩処理をし、厚み4.5μmの二軸配向フィルム
を得た。
The unstretched film is preheated at 75 ° C.
830 ° C above 14mm between low and high speed rolls
The film was stretched to 5.1 times by heating with an infrared heater having a surface temperature of, cooled rapidly, and then supplied to a stenter and stretched 4.8 times in the transverse direction at 125 ° C. Followed by 240
After heat setting at 10 ° C. for 10 seconds, 1.
After a relaxation treatment of 0%, a biaxially oriented film having a thickness of 4.5 μm was obtained.

【0026】このフィルムをガイドロール3aと3bの
間に搬送し、その間で、透過型厚み計2を用いて、オン
ラインで幅方向のプロファイルを測定した。ここで用い
た透過型厚み計としては、β線厚み計を利用した。フィ
ルムはガイドロール3aに送られる前に3000mmに
カッティングされていたが、しわの量検出装置4(画像
センサを用いたしわの量測定装置)で厚み計測定位置で
幅を測定すると2995mmであった。このとき測定誤
差は0.167%となる。このまま生産を続け、生産し
たフィルムの厚みを光学式の厚み計で測定したところ、
平均的には0.167%厚くなるはずであるが、部分的
にしわが多く、その部分で4.5±0.02μmと厚い
ところと薄いところの差ができていた。
This film was conveyed between the guide rolls 3a and 3b, and between them, the profile in the width direction was measured online using the transmission type thickness meter 2. A β-ray thickness gauge was used as the transmission type thickness gauge used here. Although the film was cut to 3000 mm before being sent to the guide roll 3a, the width was measured to be 2995 mm when measured with a wrinkle amount detection device 4 (a wrinkle amount measurement device using an image sensor) at a thickness measurement position. . At this time, the measurement error is 0.167%. Production continued as it was, and the thickness of the produced film was measured with an optical thickness gauge.
It should be 0.167% thicker on average, but there are many wrinkles in some places, and there was a difference of 4.5 ± 0.02 μm between thick and thin places.

【0027】測定誤差の許容範囲は0.100%であっ
たので、そのまま生産を続けることができず、ガイドロ
ールの前後にあるニップロールの速度を調整したとこ
ろ、しわの量検出装置4で検出したフィルムの幅が29
98mmになった。こうしたことで測定誤差は0.06
7%となり、許容範囲内となったので、生産ができるよ
うになった。このまま生産を続け、生産したフィルムの
厚みを光学式の厚み計で測定したところ、部分的なしわ
もなく、4.5±0.01μmと非常に均一なプロファ
イルのロールを得ることができた。
Since the allowable range of the measurement error was 0.100%, the production could not be continued as it was, and the speed of the nip rolls before and after the guide roll was adjusted. Film width 29
98 mm. This results in a measurement error of 0.06
It was 7%, which was within the allowable range, so production was possible. The production was continued as it was, and the thickness of the produced film was measured with an optical thickness gauge. As a result, a roll having a very uniform profile of 4.5 ± 0.01 μm was obtained without any partial wrinkles.

【0028】[0028]

【発明の効果】本発明によれば、従来製膜後にオフライ
ンで測定しなければフィルムの正確な厚みを測定できな
かったものが、オンラインで正確に測定できるようにな
り、生産性の向上、製品の高品質化に大きな寄与をなす
もので、大きな効果をそうするものである。
According to the present invention, what could not be accurately measured without measuring the film thickness off-line after film formation in the past can now be accurately measured on-line. It greatly contributes to the improvement of the quality, and has a great effect.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を実施する製膜工程を模式的に例示した
模式工程図
FIG. 1 is a schematic process diagram schematically illustrating a film forming process for implementing the present invention.

【図2】しわによって厚み測定値が実際よりも厚く誤差
を生じてしまうことを説明する模式図
FIG. 2 is a schematic diagram illustrating that a thickness measurement value is thicker than an actual error due to wrinkles.

【符号の説明】[Explanation of symbols]

1 フィルム 2 透過型厚み計 3 ガイドロール 4 しわの量測定装置 5 測定スポット Reference Signs List 1 film 2 transmission thickness gauge 3 guide roll 4 wrinkle amount measuring device 5 measurement spot

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 プラスチックフィルムのしわの量を測定
する手段を備えたオンラインでのフィルムの厚み測定方
法であって、しわの量が低減するよう幅方向及び/又は
流れ方向のフィルムの張力を調整することを特徴とする
フィルムの厚み測定方法。
An on-line film thickness measurement method comprising means for measuring the amount of wrinkles in a plastic film, wherein the film tension in the width direction and / or the flow direction is adjusted so as to reduce the amount of wrinkles. A method for measuring the thickness of a film.
【請求項2】 フィルムの厚み測定を、透過型オンライ
ン厚み計によりフィルムを挟んで配置された上下ヘッド
にてフィルムの単位面積あたりの重量を測定し、得られ
た結果からフィルムの厚みを求め、且つ、フィルムの幅
方向に移動しながらフィルムの厚みを測定する請求項1
に記載のフィルムの厚み測定方法。
2. The thickness of the film is measured by measuring the weight per unit area of the film with upper and lower heads disposed across the film using a transmission type online thickness gauge, and determining the thickness of the film from the obtained result. And measuring the thickness of the film while moving in the width direction of the film.
3. The method for measuring the thickness of a film described in 1.
【請求項3】 透過型オンライン厚み計が、放射線の透
過量によってフィルムの厚みを求める方式である請求項
2に記載のフィルムの厚み測定方法。
3. The method for measuring the thickness of a film according to claim 2, wherein the transmission-type on-line thickness meter is a method for determining the thickness of the film based on the amount of transmitted radiation.
【請求項4】 透過型オンライン厚み計が、光の透過量
によってフィルムの厚みを求める方式である請求項2に
記載のフィルムの厚み測定方法。
4. The method for measuring the thickness of a film according to claim 2, wherein the transmission type online thickness gauge is a system for determining the thickness of the film based on the amount of transmitted light.
【請求項5】 透過型厚み計が、超音波の透過量によっ
てフィルムの厚みを求める方式である請求項2記載のフ
ィルムの厚み測定方法。
5. The method for measuring the thickness of a film according to claim 2, wherein the transmission type thickness meter is a method for obtaining the thickness of the film based on an amount of transmitted ultrasonic waves.
【請求項6】 しわの量の測定が、フィルムの幅を測定
することによる請求項1〜5のいずれか1項に記載のフ
ィルムの厚み測定方法。
6. The method for measuring the thickness of a film according to claim 1, wherein the wrinkle amount is measured by measuring the width of the film.
【請求項7】 しわの量の測定が、フィルムのたるみを
測定することによる請求項1〜5のいずれか1項に記載
のフィルムの厚み測定方法。
7. The method for measuring the thickness of a film according to claim 1, wherein the amount of wrinkles is measured by measuring a sag of the film.
【請求項8】 しわの量の測定が、フィルムのしわを画
像として捕らえ測定することによる請求項1〜5のいず
れか1項に記載のフィルムの厚み測定方法。
8. The method for measuring the thickness of a film according to claim 1, wherein the amount of wrinkles is measured by measuring wrinkles of the film as an image.
【請求項9】 しわの量の測定が、フィルムの測定部分
のばたつきを測定することによる請求項1〜5のいずれ
か1項に記載のフィルムの厚み測定方法。
9. The film thickness measuring method according to claim 1, wherein the wrinkle amount is measured by measuring the flapping of a measurement portion of the film.
JP2000388721A 2000-12-21 2000-12-21 Measuring method for film thickness Pending JP2002187197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000388721A JP2002187197A (en) 2000-12-21 2000-12-21 Measuring method for film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000388721A JP2002187197A (en) 2000-12-21 2000-12-21 Measuring method for film thickness

Publications (1)

Publication Number Publication Date
JP2002187197A true JP2002187197A (en) 2002-07-02

Family

ID=18855414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000388721A Pending JP2002187197A (en) 2000-12-21 2000-12-21 Measuring method for film thickness

Country Status (1)

Country Link
JP (1) JP2002187197A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014145658A (en) * 2013-01-29 2014-08-14 Fukuoka Univ Film sample fixing method, fixing holder, and film characteristic analyzing method using them

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014145658A (en) * 2013-01-29 2014-08-14 Fukuoka Univ Film sample fixing method, fixing holder, and film characteristic analyzing method using them

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