JP2002174539A - Mass flow controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve a smaller size by accomplishing a reduction in interval between the lead-in port and the lead-out port of fluid. SOLUTION: The mass flow controller which has a mounting flange part for mounting on a block through which flows fluid subjected to the control of flow rate and is provided with lead-in and lead-out paths of the fluid moving in the direction almost orthogonal to a mounting face of the mounting flange part includes a mass flow sensor which has a sensor tube provided in a path with which the fluid is taken out of the lead-in or lead-out path to be returned to the original passage to obtain the mass flow of the fluid using a thermal type measurement method in the sensor tube, a control valve which is driven receiving a control signal based on the mass flow obtained by the mass flow sensor and a set mass flow to adjust the flow rate of the fluid and a bypass tube having the lead-in and lead-out paths of the fluid formed therein.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a mass flow controller, and more particularly to a mass flow controller suitable for use in a semiconductor manufacturing process.

[0002]

2. Description of the Related Art A mass flow controller for controlling a fluid such as a process gas and a liquid material used in a semiconductor manufacturing apparatus constitutes a fluid supply system together with a filter and an on-off valve. In the fluid supply system, high performance such as reduction of degassing,
In order to reduce the cost of semiconductor manufacturing equipment, smaller ones are required. As a means of miniaturization, the connection method of each component of the fluid supply system has been changed from the conventional connection method using a pipe joint, by using a mounting flange portion at the base part of each component, to realize a common connection method. A change in direction is being realized.

However, even if this method is adopted, the mass flow controller has a gap of about 100 mm between the fluid introduction part and the fluid discharge part, and this dimension is equivalent to the on-off valve and the other parts constituting the other fluid supply system. 50m of filter
m, which is an obstacle to downsizing the fluid supply system.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the mass flow controller, and has as its object to reduce the size of the fluid supply system.
An object of the present invention is to realize a mass flow controller that can be miniaturized, for example, by narrowing an interval between a fluid inlet and an outlet.

[0005]

According to a first aspect of the present invention, there is provided a mass flow controller having a mounting flange portion for mounting on a block through which a fluid to be subjected to flow rate control flows. In a mass flow controller provided with a fluid introduction path and a derivation path directed in a direction substantially perpendicular to the mounting surface, a path for extracting fluid from a part of the introduction path or the departure path and returning the fluid to a part of the original flow path A mass flow sensor having a sensor tube provided, the sensor tube being mounted so as to extend in a direction substantially perpendicular to a mounting surface of the mounting flange portion, and obtaining a mass flow rate of the fluid using a thermal measurement method; A mass flow rate obtained by the mass flow rate sensor and a control valve that is driven in response to a control signal based on a set mass flow rate and adjusts a flow rate of the fluid. To. As a result, the fluid introduction passage and the discharge passage are directed in a direction substantially perpendicular to the mounting surface of the mounting flange portion, and the structure is increased in a direction substantially perpendicular to the mounting surface of the mounting flange portion. It is possible to shorten the longitudinal direction of the part.

A mass flow controller according to a second aspect of the present invention has a mounting flange for mounting on a block through which a fluid to be subjected to flow rate control flows, and is substantially perpendicular to a mounting surface of the mounting flange. In a mass flow controller having an introduction path and a discharge path for a fluid flowing in a direction, a mass flow sensor that obtains a mass flow rate of a fluid flowing through the introduction path using a thermal measurement method, and a mass flow rate obtained by the mass flow sensor And a control lube that is driven in response to a control signal based on the set mass flow rate and adjusts the flow rate of the fluid, wherein the introduction path and the extraction path are cylindrical bypass pipes provided in a tubular cavity. And a bypass pipe in which the introduction path and the exit path are formed in the cylindrical axis direction. Thus, the introduction path and the lead-out path are formed on the side of the mounting flange portion by one bypass pipe, and the interval between the introduction port and the discharge port of the fluid can be shortened.

According to a third aspect of the present invention, there is provided a mass flow controller having a mounting flange for mounting on a block through which a fluid to be flow-controlled is to flow, and a communication port formed on a mounting surface of the mounting flange. A mass flow controller having a fluid introduction path and a discharge path having
A mass flow sensor that obtains a mass flow rate using a thermal measurement method for a fluid flowing through the introduction path, a mass flow rate obtained by the mass flow rate sensor, and a control signal based on a set mass flow rate are driven to be driven. A solenoid valve for adjusting a flow rate, a plunger partially constituted by a non-magnetic material and having a permanent magnet provided therein, and a plunger disposed close to and surrounding the permanent magnet of the plunger. A solenoid valve having a plunger guide that sometimes acts on the permanent magnet to hold the plunger in a predetermined position, and a spherical valve head provided at one end of the plunger. Thus, the stroke of the plunger can be ensured without the interposition of a spring or the like, and the valve head is provided, so that the space can be reduced.

According to a fourth aspect of the present invention, there is provided a mass flow controller having a mounting flange portion for mounting on a block through which a fluid to be subjected to flow rate control flows, and being substantially perpendicular to a mounting surface of the mounting flange portion. A mass flow controller provided with a fluid introduction path and a discharge path directed in a direction, comprising a sensor tube provided in a path for extracting fluid from a part of the introduction path or the discharge path and returning the fluid to a part of the original flow path. The sensor tube is mounted so as to extend in a direction substantially perpendicular to the mounting surface of the mounting flange portion, and is obtained by a mass flow sensor that obtains a mass flow rate of a fluid using a thermal measurement method, and a mass flow sensor obtained by the mass flow sensor. A solenoid valve that is driven in response to a control signal based on a set mass flow rate and a set mass flow rate, and adjusts a flow rate of the fluid, a part of which is formed of a non-magnetic material. A plunger having a permanent magnet provided therein and a plunger guide disposed close to and surrounding the permanent magnet of the plunger and acting on the permanent magnet when the coil is not energized to hold the plunger at a predetermined position. And a spherical valve head provided at one end of the plunger. Thereby, since the fluid introduction path and the discharge path are directed in a direction substantially orthogonal to the mounting surface of the mounting flange, the structure increases in a direction substantially orthogonal to the mounting surface of the mounting flange, In addition to making it possible to shorten the longitudinal direction of the mounting flange, it is possible to secure the stroke of the plunger without the interposition of a spring or the like, and to provide a valve head to reduce the space. ing.

A mass flow controller according to a fifth aspect of the present invention has a mounting flange portion for mounting on a block through which a fluid to be subjected to flow control is to flow, and is substantially orthogonal to a mounting surface of the mounting flange portion. In a mass flow controller having an introduction path and a discharge path for a fluid flowing in a direction, a mass flow sensor that obtains a mass flow rate of a fluid flowing through the introduction path using a thermal measurement method, and a mass flow rate obtained by the mass flow sensor And a solenoid valve that is driven in response to a control signal based on the set mass flow rate and adjusts a flow rate of the fluid, wherein the introduction path and the extraction path are cylindrical bypass pipes provided in a tubular cavity. A bypass is formed in the cylinder axis direction, the passage being the introduction path and the lead-out path, and a corresponding valve seat integrally formed on the valve head side. Characterized in that it is constituted by a pipe. Thereby, the introduction path and the discharge path of the fluid are directed in a direction substantially orthogonal to the mounting surface of the mounting flange portion,
In addition, the introduction path and the lead-out path are constituted by one bypass pipe, and it is possible to reduce the size and shorten the fluid flow path.

A mass flow controller according to a sixth aspect of the present invention has a mounting flange for mounting on a block through which a fluid to be subjected to flow rate control flows, and is substantially perpendicular to a mounting surface of the mounting flange. In a mass flow controller including a fluid introduction path and a discharge path directed in a direction, a sensor tube provided in a path for taking out fluid from the introduction path or the discharge path and returning the fluid to the original flow path,
The sensor tube is mounted so as to extend in a direction substantially perpendicular to the mounting surface of the mounting flange portion, and a mass flow sensor that obtains a mass flow rate of the fluid using a thermal measurement method, and a mass obtained by the mass flow sensor. A flow rate and a solenoid valve that is driven in response to a control signal based on the set mass flow rate and adjusts the flow rate of the fluid, wherein a plunger partially configured of a non-magnetic material and provided with a permanent magnet therein. A plunger guide that is disposed close to and surrounds the permanent magnet of the plunger, acts on the permanent magnet when the coil is de-energized, and holds the plunger in a predetermined position; and one end of the plunger. A solenoid valve having a spherical valve head, wherein the introduction path and the exit path are cylindrical bypass pipes provided in a tubular cavity, It formed the introduction path and the outlet path and becomes passages in the cylinder axis direction, respectively, a valve seat corresponding to the valve head side, characterized in that it is constituted by a bypass pipe which is formed integrally. Thereby, since the fluid introduction path and the discharge path are directed in a direction substantially orthogonal to the mounting surface of the mounting flange, the structure increases in a direction substantially orthogonal to the mounting surface of the mounting flange, In addition to making it possible to shorten the longitudinal direction of the mounting flange, it is possible to secure the stroke of the plunger without the interposition of a spring or the like, and to provide a valve head to reduce the space. ing. In addition, the introduction path and the lead-out path are formed by one bypass pipe, and the corresponding valve seat is integrally formed on the valve head side, so that it is possible to reduce the size and shorten the fluid flow path. Has become.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a mass flow controller according to the present invention will be described with reference to the accompanying drawings. In each drawing, the same components are denoted by the same reference numerals, and redundant description will be omitted. In the present specification, three embodiments will be described. However, since the basic configuration such as the appearance is almost the same in all the embodiments, the overall configuration of the mass flow controller of the present invention will be described with reference to FIGS. explain.

FIG. 1 is a front sectional view and FIG. 4 is a bottom view.
As is apparent from the above description, in the mass flow controller of the present invention, a rectangular parallelepiped main body 2 is placed on a flat mounting flange 1, and two flange fixing bolts 111 are formed on the mounting flange 1. It has a structure in which it is screwed and fixed to the main body 2 from the two holes 11.

A cylindrical head 3 for accommodating the coil 30 is mounted on the main body 2, and four bolts are mounted on a flange 31 formed at the bottom of the head 3. 32 is implanted, and has a structure in which the head body 3 is fixed to the main body 2. O1 indicates an O-ring.

Screws 112 are screwed into the block 100 through holes 12 formed at the four corners of the mounting flange 1,
The mass flow controller is fixed.

The head body 3 has a shape in which a cylinder rises doubly from a flange portion 31. A coil 30 is housed between the double cylinders. The core 4 to be inserted is inserted. In the core 4, a screw 41 is formed on the outer periphery of the upper side from the central part 40 of a solid columnar shape,
A hole 44 is formed in the lower side from the central portion 40 by punching out the inside, a bud portion 42 opened in a bud shape is formed at a lower end portion, and a thin flange 43 is formed at a neck portion of the bud portion 42. I have.

The plunger 5 is inserted into the hole 44 of the core 4. The upper end of the plunger 5 inserted into the hole 44 of the core 4 is a cylindrical portion 51 made of a magnetic material. A permanent magnet 52 magnetized in the axial direction is press-fitted into the lower end of the plunger 5. And a holding portion 54 for holding the valve head 53.

A plunger guide 6 made of a ring-shaped magnetic material (or a permanent magnet) is provided in the bud portion 44 of the core 4. The plunger guide 6 has a ring shape with its upper and lower ends projecting inward, and in a state provided in the bud portion 44, holds the permanent magnet 52 at the center when the coil 30 is not energized. Although the plunger guide 6 is an integral type, it can be configured as shown in FIG. In other words, above and below the narrow central ring 61, the wide rings 62, 6 protruding inward from the central ring 61.
3 to form a plunger guide 6A. Here, the center ring 61 is formed of a permanent magnet magnetized in the axial direction, and the wide rings 62 and 63 are formed of a magnetic material. The plunger guide 6A also allows the coil 30
When the current is not supplied, the permanent magnet 52 can be held at the center. Further, the center ring 61 is constituted by a permanent magnet,
When the upper and lower magnetization directions of the center ring 61 are the same as the upper and lower magnetization directions of the permanent magnet 52, a force can be applied in a direction in which the plunger 5 deviates from the center of the plunger guide 6.

Inside the main body 2, cylindrical cavities having different diameters are formed. The upper cavity inside the main body 2 has a size in which the bud portion 44 of the core body 4 fits, and the valve chamber 23 is formed around the upper cavity. The flange 43 comes into contact with the upper end surface of the main body 2 and functions as a spring. An O-ring O1 is interposed between the flange 43 and the upper end surface of the main body 2. A cylindrical bypass pipe 7 shown in FIG. 5 is inserted into the lower cavity inside the main body 2.

On one lateral side of the main body 2, a concave portion for mounting the plate-shaped sensor unit 8 shown in FIG. 8 is formed, and the sensor unit 8 is shown in FIG. As described above, the main body 2 is fixed to one side surface. The communication path 2 extends from the upper and lower wall surfaces of the lower cavity inside the main body 2 to the concave portion in a direction substantially orthogonal to the wall surface.
1A and 21B are formed.

Next, the sensor unit 8 is shown in FIGS.
This will be described with reference to FIG. The sensor unit 8 has holes 81 through which bolts 113 penetrate at four corners of a plate-shaped metal piece 80, and a long hole-shaped chamber 8 in which a sensor tube 82 is provided at the center.
3 is formed, and cylindrical bottomed cavities 84 communicating with the chamber 83 are formed on both sides of the chamber 83.

In front of the chamber 83, leads 85 to which heating resistors R1 and R2 wound around the sensor tube 82 are connected.
A concave portion 86 in which is provided is formed. Heating resistor R
At both ends, the sensor tube 82 around which 1, R2 is wound is connected to a hole 91 in a cylindrical piece 90 having a hole 91 directed from the side wall toward the center and a hole 92 directed from the circular end face toward the center as shown in FIG. Inserted and fixed. The cylindrical piece 90 is inserted into the bottomed cavity 84 and is fixed to one lateral side of the main body 2 by bolts 113 as shown in FIG. The hole 92 communicates with the communication paths 21A and 21B. O2 is an O-ring.

A cover 33 having a screw formed inside is fitted into the head of the head 3, a nut 34 is mounted thereon, and an adjustment screw 35 having screws formed inside and outside. Are screwed into the screw 41 of the core 4 and the nut 34 and the screw of the lid 33 from above.

FIG. 10 is a functional block diagram of the mass flow controller. The mass flow controller controls the solenoid valve 203 so that the control unit 200 matches the set mass flow set from the input unit 201 with the actual flow obtained from the mass flow sensor 202 including the sensor unit 8 in FIG. An electric current is supplied to the coil 30 to cause the movement of the plunger 5 and control the fluid flow rate. The plunger 5 moves from the position held by the plunger guide 6. The circuit configuration of the mass flow sensor 202 may be, for example, the one described in Japanese Patent Application No. 2000-356726. In the above description, the solenoid valve is used, but another type of valve, for example, a piezo valve may be used.

Next, a first embodiment will be described. In the mass flow controller according to the first embodiment, as shown in FIG. 11, a block body 100 is formed with a fluid inlet 13 and a fluid outlet 14 in the mounting flange 1. O3 and O4 indicate O-rings.

As described above, the cylindrical bypass pipe 7 shown in FIG. 5 is inserted into the lower cavity inside the main body 2. The bypass pipe 7 shown in FIG. 5 is used in the first embodiment. FIG. 6A is a plan view of the bypass pipe 7.
And the bottom view is shown in FIG. 6 (b).

Three grooves 71 are formed on the side surface of the bypass pipe 7, and the upper end 72 and the lower end 73 of the bypass pipe 7 are formed to be smaller in diameter than the central part, so that the lower part inside the main body 2 is formed. When the bypass pipe 7 is set in the side cavity, a gap is formed around the upper end 72 and the lower end 73, and the inlet 1
It becomes a passage for raising the fluid coming from 3 into a laminar flow. The lower end 73 of the bypass pipe 7 forms a fluid introduction path 13a.

An axially extending through hole 74 is formed in the core of the bypass pipe 7. The through hole 74 has a small diameter at the upper end 72 of the bypass pipe 7 and a large diameter at the center and the lower end 73. The through hole 74 constitutes a fluid outlet path 14a.

At the head end of the bypass pipe 7, a spherical valve head 5 is provided.
A concave valve seat 75 corresponding to No. 3 is formed. At the upper end 72, a screw 76 is formed around the uppermost portion including the valve seat 75, and is screwed with a screw at a corresponding position of the main body 2. In the main body 2, a hole 22 is formed outside the side wall where the screw to be screwed with the screw 76 is formed, leading to a gap formed around the upper end 72 of the bypass pipe 7 set in the main body 2, The hole 22 forms a passage through which the fluid coming from the inlet 13 rises and reaches the valve chamber 23.
The fluid arriving at the valve chamber 23 reaches the outlet 14 through an orifice formed by the valve head 53 and the valve seat 75.

On the way to the valve chamber 23, a part of the fluid flows from the gap existing around the upper end 72 of the bypass pipe 7 to the sensor pipe 82 via the communication path 21A,
It returns to the gap existing around the lower end 73 of the bypass pipe 7 via B. As described above, according to the first embodiment, the direction in which the fluid flows is the direction substantially orthogonal to the mounting surface of the mounting flange portion 1, and the distance between the fluid inlet 13 and the outlet 14 is It can be shorter than before.

Next, a second embodiment will be described with reference to FIGS.
3 will be described. In the second embodiment, a bypass pipe 7A shown in FIG. 13 is used. The bypass pipe 7 </ b> A has the same diameter as the diameter of the lower cavity inside the main body 2, and has a cut portion 77 formed in the side surface in the vertical direction, and a through hole 74 extending in the axial direction in the core portion. Are drilled and the through holes 74
A plurality of small tubes 78 are inserted into the inside of the tube, and the flow of the fluid is configured to be laminar.

The upper and lower portions of the through hole 74 are spaces in which the thin tubes 78 do not exist, and holes 79A and 79B are formed from this space toward the side surface. Hole 79A, 79B
Are connected to communication paths 21A and 21B leading to the sensor tube 82. The other configuration of the mass flow controller according to the second embodiment is the same as that of the first embodiment.

Therefore, since the upper end 72 and the lower end 73 of the bypass pipe 7A are formed smaller in diameter than the central part, when the bypass pipe 7A is set in the lower cavity inside the main body 2, the upper end 72 and the lower end 73 are closed. A gap is formed around the portion 72 and the lower end portion 73, and the fluid arriving from the inlet 13 rises from the lower introduction passage 13a through the gap formed by the cutting portion 77 and the inner wall of the main body 2, and the upper gap is formed. To the valve chamber 23 through the hole 22.

The fluid arriving at the valve chamber 23 flows as a laminar flow through the thin tube 78 in the bypass pipe 7A through the orifice formed by the valve head 53 and the valve seat 75, and flows out through the outlet path 14a. To 14. Narrow tube 78 in bypass tube 7A
On the way, a part of the fluid flows from the hole 79A to the sensor tube 82, and returns to the bypass tube 7A via the hole 79B.

As described above, also in the second embodiment, the direction in which the fluid flows is a direction substantially perpendicular to the mounting surface of the mounting flange 1, and the fluid inlet 13 and the outlet 14 The interval can be shorter than before.

Next, a third embodiment will be described with reference to FIGS.
This will be described with reference to FIG. In the third embodiment, as shown in FIG. 15, an outlet 14 is formed at the center of the mounting flange 1A, and an inlet 13 is provided on the right side of the outlet 14.
Is drilled. O5 and O6 indicate O-rings.

In the main body 2A, a fluid passage 24 extending to the valve chamber 23 in the direction in which the inlet 13 extends is formed. The bypass pipe 7B set in the main body 2A is a first pipe.
Based on the bypass pipe 7 used in this embodiment, holes 66 and 67 are formed in the upper end 72 and the lower end 73 from the peripheral surface to the through hole 74 in the core. The other configuration of the mass flow controller according to the third embodiment is the same as that of the first embodiment.

In the mass flow controller having such a configuration, since the upper end 72 and the lower end 73 of the bypass pipe 7B are formed smaller in diameter than the central part, the bypass pipe 7B is set in the lower cavity inside the main body 2. When done
A gap is formed around the upper end 72 and the lower end 73. On the other hand, the fluid coming from the inlet 13 rises via the flow path 24 and reaches the valve chamber 23.

The fluid arriving at the valve chamber 23 descends through the orifice formed by the valve head 53 and the valve seat 75 through the through hole 74 in the bypass pipe 7B, and reaches the outlet 14. A part of the fluid arriving at the through hole 74 in the bypass pipe 7B reaches the space around the upper end portion 72 from the hole 66, and the communication path 2
It flows to the sensor pipe 82 via 1A and returns to the bypass pipe 7B via the communication path 21B. In addition, the fluid in the space around the upper end 72 descends through the groove 71 and reaches the outlet 14 from the hole 67.

According to the third embodiment as well, the direction in which the fluid flows is a direction substantially perpendicular to the mounting surface of the mounting flange 1A, and the distance between the fluid inlet 13 and the outlet 14 is smaller than in the prior art. Can be shortened.

[0040]

As described above, according to the mass flow controller of the first aspect of the present invention, the sensor pipe is mounted so as to extend in a direction substantially perpendicular to the mounting surface of the mounting flange, and the fluid introduction path is provided. And the lead-out path are directed in a direction substantially perpendicular to the mounting surface of the mounting flange, so that the structure increases in a direction substantially perpendicular to the mounting surface of the mounting flange, and the longitudinal direction of the mounting flange is increased. Can be shortened.

According to the mass flow controller of the second aspect of the present invention, the introduction path and the exit path are formed on the mounting flange side by one bypass pipe. Can be shortened.

Further, according to the mass flow controller of the third aspect of the present invention, the plunger partly made of a non-magnetic material and provided with a permanent magnet inside, and surrounds the permanent magnet of the plunger. A solenoid valve including a plunger guide that acts on the permanent magnet when the coil is de-energized and holds the plunger at a predetermined position, and a spherical valve head provided at one end of the plunger. Therefore, the stroke of the plunger can be secured without the interposition of a spring or the like, and the valve head is provided, so that the space can be reduced.

Further, according to the mass flow controller of the fourth aspect of the present invention, the fluid introduction path and the fluid exit path are directed in a direction substantially orthogonal to the mounting surface of the mounting flange, and the flow of the mounting flange is reduced. The structure is increased in a direction substantially perpendicular to the mounting surface, so that not only the longitudinal direction of the mounting flange can be shortened, but also a part is made of a non-magnetic material and a permanent magnet is provided inside. A plunger, a plunger guide disposed in close proximity to surround the permanent magnet of the plunger, and acting on the permanent magnet when the coil is de-energized to hold the plunger in a predetermined position; and provided at one end of the plunger. And a solenoid valve having a spherical valve head provided with a valve head, so that the stroke of the plunger can be secured without the interposition of a spring or the like, and the valve head is provided. Is is, it can work to small space.

According to the mass flow controller of the fifth aspect of the present invention, the fluid introduction path and the fluid exit path are directed in a direction substantially orthogonal to the mounting surface of the mounting flange portion, and one bypass is provided. The introduction path and the lead-out path are constituted by pipes, and the valve seat of the valve is formed integrally with the head of the bypass pipe, so that it is possible to reduce the size and shorten the fluid flow path.

According to the mass flow controller of the present invention, the fluid introduction path and the fluid introduction path are directed in a direction substantially perpendicular to the mounting surface of the mounting flange, and the length of the sensor tube is reduced. Since the height direction is substantially perpendicular to the mounting surface of the mounting flange, the structure is increased in a direction substantially perpendicular to the mounting surface of the mounting flange, and the longitudinal direction of the mounting flange can be shortened. Not only that, a plunger part of which is made of a non-magnetic material and in which a permanent magnet is provided, is disposed close to the plunger so as to surround the permanent magnet of the plunger. A solenoid valve having a plunger guide that acts to hold the plunger in place and a spherical valve head provided at one end of the plunger. Etc. it is possible to secure a stroke of the plunger without the intervention of the valve head is provided, it may aim small space. In addition, the introduction path and the lead-out path are formed by one bypass pipe, and the valve seat corresponding to the valve head is integrally formed with a part of the bypass pipe, so that the size and the fluid flow path can be reduced. It is possible.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a schematic configuration of a mass flow controller according to the present invention.

FIG. 2 is a side view showing a schematic configuration of a mass flow controller according to the present invention.

FIG. 3 is a plan view showing a schematic configuration of a mass flow controller according to the present invention.

FIG. 4 is a bottom view showing a schematic configuration of a mass flow controller according to the present invention.

FIG. 5 is an assembled sectional view of a main part of the mass flow controller according to the present invention.

FIG. 6 is a view showing a bypass pipe used in the first embodiment of the mass flow controller according to the present invention;
(A) is a plan view, (b) is a bottom view.

FIG. 7 is a sectional view showing another configuration example of the plunger guide of the mass flow controller according to the present invention.

FIG. 8 is a diagram showing a configuration example of a sensor unit of the mass flow controller according to the present invention, wherein (b) is a plan view,
(A) is a 1-1 sectional view of (b).

FIG. 9 is a perspective view showing a configuration example of a main part of a sensor unit of the mass flow controller according to the present invention.

FIG. 10 is a block diagram showing a configuration of a mass flow controller according to the present invention.

FIG. 11 shows a first example of the mass flow controller according to the present invention.
Sectional drawing which shows embodiment of FIG.

FIG. 12 shows a second embodiment of the mass flow controller according to the present invention.
Sectional drawing which shows embodiment of FIG.

FIG. 13 is a second view of the mass flow controller according to the present invention.
It is a figure which shows the example of a structure of the bypass pipe used for 1st Embodiment, (a) is a front view, (b) is a side view, (c) is a bottom view.

FIG. 14 is a third view of the mass flow controller according to the present invention.
Sectional drawing which shows embodiment of FIG.

FIG. 15 is a third view of the mass flow controller according to the present invention.
The bottom view of the mounting flange part used for embodiment of FIG.

[Explanation of symbols]

1, 1A Mounting flange 2, 2A body 3 Head 4 Core 5 Plunger 6, 6A Plunger guide 7, 7A, 7B Bypass pipe 8 Sensor unit 13 Inlet 13a Inlet 14 Outlet 14a Outlet 53 Valve Head 75 valve seat

Claims (6)

[Claims] 1. A mounting part for mounting on a block through which a fluid to be flow-controlled is to flow, and a fluid introduction path and a flow-out path in a direction substantially orthogonal to a mounting surface of the mounting part. A mass flow controller comprising: a sensor pipe provided in a path for taking out a fluid from a part of the introduction path or the derivation path and returning the fluid to a part of the original flow path, wherein the sensor pipe is provided with the mounting flange. A mass flow sensor that is attached so as to extend in a direction substantially perpendicular to the mounting surface of the part and obtains the mass flow rate of the fluid by using a thermal measurement method, based on the mass flow rate obtained by the mass flow sensor, and a set mass flow rate A mass flow controller comprising: a control valve that is driven in response to a control signal and adjusts a flow rate of the fluid. 2. An installation flange portion for mounting on a block through which a fluid to be subjected to a flow rate control flows, and a fluid introduction path and a flow path that are directed in a direction substantially orthogonal to a mounting surface of the mounting flange section. A mass flow sensor that obtains a mass flow rate using a thermal measurement method for a fluid flowing through the introduction path, a mass flow rate obtained by the mass flow rate sensor, and a control signal based on a set mass flow rate. Receiving and driving, having a control lube for adjusting the flow rate of the fluid, the introduction path and the exit path are cylindrical bypass pipes provided in a tubular cavity, and the introduction path in a cylindrical axial direction. A mass flow controller, wherein each of the passages serving as the lead-out paths is constituted by a bypass pipe formed. 3. A fluid introduction path and a discharge path having a mounting flange portion for mounting on a block through which a fluid related to a flow rate control object flows, and having a communication port on a mounting surface of the mounting flange portion. A mass flow controller comprising: a mass flow sensor for obtaining a mass flow rate using a thermal measurement method for a fluid flowing through the introduction path; a mass flow rate obtained by the mass flow rate sensor; and a control signal based on a set mass flow rate. A solenoid valve that is driven and adjusts the flow rate of the fluid, a plunger partly made of a non-magnetic material and having a permanent magnet provided therein, and a plunger disposed close to and surrounding the plunger permanent magnet. A plunger guide that acts on the permanent magnet when the coil is de-energized to hold the plunger in a predetermined position; Mass flow controller, characterized by comprising a solenoid valve and a valve head of spherical provided in parts. 4. A fluid introduction path and a fluid exit path in a direction substantially orthogonal to a mounting surface of the mounting flange portion for mounting on a block through which a fluid related to a flow rate control object flows. A mass flow controller comprising: a sensor pipe provided in a path for taking out a fluid from a part of the introduction path or the derivation path and returning the fluid to a part of the original flow path, wherein the sensor pipe is provided with the mounting flange. A mass flow sensor that is attached so as to extend in a direction substantially perpendicular to the mounting surface of the part and obtains the mass flow rate of the fluid by using a thermal measurement method, based on the mass flow rate obtained by the mass flow sensor, and a set mass flow rate A solenoid valve that is driven in response to a control signal and adjusts a flow rate of the fluid, wherein the plunger includes a nonmagnetic material and a permanent magnet provided therein. A plunger guide that is disposed close to and surrounds the permanent magnet of the plunger, acts on the permanent magnet when the coil is de-energized, and holds the plunger in a predetermined position; and one end of the plunger. A mass flow controller comprising: a solenoid valve having a spherical valve head. 5. A fluid introduction path and a discharge path in a direction substantially orthogonal to a mounting surface of the mounting flange portion for mounting on a block through which a fluid to be subjected to flow rate control flows. A mass flow sensor that obtains a mass flow rate using a thermal measurement method for a fluid flowing through the introduction path, a mass flow rate obtained by the mass flow rate sensor, and a control signal based on a set mass flow rate. A solenoid valve that receives and is driven and adjusts the flow rate of the fluid, the introduction path and the exit path are cylindrical bypass pipes provided in a tubular cavity, and the introduction path extends in a cylindrical axial direction. The mass flow, wherein the outlet passages are respectively formed, and the valve head side is constituted by a bypass pipe integrally formed with a corresponding valve seat. controller. 6. A fluid introduction path and a discharge path in a direction substantially perpendicular to a mounting surface of the mounting flange section, the mounting flange section having a mounting flange section for mounting on a block through which a fluid relating to a flow rate control object flows. A mass flow controller comprising: a sensor pipe provided in a path for taking out a fluid from the introduction path or the derivation path and returning the fluid to an original flow path, wherein the sensor pipe is substantially provided on a mounting surface of the mounting flange portion. A mass flow sensor that is attached so as to extend in the orthogonal direction and obtains the mass flow rate of the fluid using a thermal measurement method, and is driven by receiving a control signal based on the mass flow rate obtained by the mass flow sensor and the set mass flow rate A solenoid valve that adjusts the flow rate of the fluid, the plunger partially comprising a non-magnetic material and having a permanent magnet provided therein; A plunger guide that is disposed close to and surrounds the permanent magnet of the plunger, acts on the permanent magnet when the coil is not energized, and holds the plunger at a predetermined position; and a spherical guide provided at one end of the plunger. A solenoid valve having a valve head, wherein the introduction path and the lead-out path are cylindrical bypass pipes provided in a tubular cavity, and serve as the introduction path and the lead-out path in a cylindrical axial direction. A mass flow controller, wherein each of the passages is formed and a bypass pipe is formed integrally with a corresponding valve seat on the valve head side.