JP2002170210A - Magnetoresistive magnetic head, and electromagnetic transduction characteristic measurement method and device therefor - Google Patents

Magnetoresistive magnetic head, and electromagnetic transduction characteristic measurement method and device therefor

Info

Publication number
JP2002170210A
JP2002170210A JP2000365770A JP2000365770A JP2002170210A JP 2002170210 A JP2002170210 A JP 2002170210A JP 2000365770 A JP2000365770 A JP 2000365770A JP 2000365770 A JP2000365770 A JP 2000365770A JP 2002170210 A JP2002170210 A JP 2002170210A
Authority
JP
Japan
Prior art keywords
magnetic field
shield
head
magnetic
magnetoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000365770A
Other languages
Japanese (ja)
Other versions
JP2002170210A5 (en
Inventor
Koji Kataoka
宏治 片岡
Takayoshi Otsu
孝佳 大津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2000365770A priority Critical patent/JP2002170210A/en
Publication of JP2002170210A publication Critical patent/JP2002170210A/en
Publication of JP2002170210A5 publication Critical patent/JP2002170210A5/ja
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a shield form and a measuring method capable of increasing measuring accuracy. SOLUTION: The shapes of shields 1 and 2 are designed such that the direction of a magnetic field effectively applied on a magneto-resistance effect element 3 is perpendicular to a medium opposite surface 4. Alternatively, a problem is solved by carrying out measuring with the angle θ of an applied magnetic field inclined such that the direction of a magnetic field effectively applied on the magneto-resistance effect element 3 is perpendicular to the medium opposite surface 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、シールド型磁気抵
抗効果型磁気ヘッドに関し、特に再生ヘッド用シールド
を記録ヘッドと分離させていることを特徴とした磁気ヘ
ッドに於いて、再生ヘッドとして用いる磁気抵抗効果素
子の電磁変換特性の測定を、効率よく且つ高精度で行う
ことのできるシールド形状と測定方法及び測定装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shield type magnetoresistive head, and more particularly to a magnetic head characterized in that a read head shield is separated from a write head. The present invention relates to a shield shape, a measuring method, and a measuring device capable of efficiently and highly accurately measuring an electromagnetic conversion characteristic of a resistance effect element.

【0002】[0002]

【従来の技術】磁気抵抗効果型磁気ヘッドの電磁変換特
性の測定方法には、特開2000-163722号公報
に示される様にヘッドの磁気抵抗効果素子の面に平行な
方向から外部磁界を印加することを測定手段とした方法
が一般的に知られている。この測定方法は、磁気ヘッド
を記録媒体上に浮上させる必要がないことから、磁気抵
抗効果素子を用いた全ての生産ラインに適用できる優れ
た検査手段である。よって、磁気ヘッドの生産ラインで
は、この原理を用いて、外部から印加した磁界の大きさ
に対応した再生出力の大きさにより、磁気ヘッドの電磁
変換特性の良否判定を行っている。
2. Description of the Related Art As a method for measuring the electromagnetic conversion characteristics of a magnetoresistive head, an external magnetic field is applied from a direction parallel to the surface of the magnetoresistive element of the head as shown in Japanese Patent Application Laid-Open No. 2000-163722. In general, a method using measurement as a measuring means is known. This measurement method is an excellent inspection means that can be applied to all production lines using a magnetoresistive element because it is not necessary to float the magnetic head above the recording medium. Therefore, in the production line of the magnetic head, using this principle, the quality of the electromagnetic conversion characteristics of the magnetic head is determined based on the magnitude of the reproduction output corresponding to the magnitude of the magnetic field applied from the outside.

【0003】近年の磁気記録再生装置の高記録密度化に
対応して、再生ヘッドの高感度化が求められ、出力電圧
の高精度な測定が必要とされてきている。最近の発明者
等による研究の結果として、外部から印加した磁界の向
きと実際に磁気抵抗効果素子に入っている磁界の向きが
必ずしも一致しないことが明らかとなった。更にその原
因はシールドの形状に起因しており、特に磁気抵抗効果
素子を挟む2つのシールドの長さの違いによるところが
大きい。
In response to the recent increase in recording density of a magnetic recording / reproducing apparatus, the sensitivity of a reproducing head has been required to be higher, and a highly accurate measurement of an output voltage has been required. As a result of recent research by the present inventors, it has become clear that the direction of a magnetic field applied from the outside does not always match the direction of a magnetic field actually entering the magnetoresistive element. Further, the cause is caused by the shape of the shield, and is largely caused by a difference in the length of the two shields sandwiching the magnetoresistive element.

【0004】磁気抵抗効果型磁気ヘッドのシールド形状
は、積層プロセスを採用する製造上の理由から、先に成
膜する下部シールドを長く、後に成膜する上部シールド
を下部シールドよりも短くすることが知られている。ま
た、記録再生兼用型磁気ヘッドの場合、記録ヘッド用コ
イルへ通電することにより発生した磁界が下部シールド
へ与える影響を少なくするために、下部シールドを上部
シールドよりも短くしたものも知られている。これら
は、製造プロセス上もしくは記録ヘッドと再生ヘッドと
の関係に立った視点からのシールド形状であり、これま
で磁気抵抗効果型磁気ヘッドの電磁変換特性を測定評価
する視点に立ったシールド形状の記述はされていない。
[0004] The shield shape of the magnetoresistive head is designed so that the lower shield formed first is longer and the upper shield formed later is shorter than the lower shield because of a manufacturing process employing a lamination process. Are known. Also, in the case of a recording / reproducing type magnetic head, there is also known a type in which the lower shield is shorter than the upper shield in order to reduce the influence of the magnetic field generated by energizing the recording head coil on the lower shield. . These are the shield shapes from the viewpoint of the manufacturing process or from the viewpoint of the relationship between the recording head and the reproducing head, and the description of the shield shape from the viewpoint of measuring and evaluating the electromagnetic conversion characteristics of the magnetoresistive head. Has not been.

【0005】更に、特開2000-163722号公報
に示されるような測定方法で、その測定精度を向上させ
るためには、磁気ヘッドに印加する外部磁界の方向では
なく、実効的に磁気抵抗効果素子に作用する磁界の方向
を考慮する必要があるが、特開2000-163722
号公報ではシールドの形状に伴う実効的な印加磁界方向
についての記述はなされていない
Further, in order to improve the measurement accuracy by a measuring method as disclosed in Japanese Patent Application Laid-Open No. 2000-163722, it is necessary to use not a direction of an external magnetic field applied to a magnetic head but an effective magnetoresistive element. It is necessary to consider the direction of the magnetic field acting on the
Does not describe the effective applied magnetic field direction accompanying the shape of the shield

【0006】[0006]

【発明が解決しようとする課題】磁気抵抗効果型磁気ヘ
ッドの電磁変換特性を測定する上で、上記の様に上下シ
ールドのどちらか一方が長く、他方が短い従来構造ヘッ
ドでは、シールド長さの非対称性から、磁気抵抗効果素
子へ実効的に作用する磁界の向きは媒体とヘッドとの相
対運動方向へ傾斜するため、実使用時の媒体からヘッド
へ入る磁界の向きと異なってしまい、ヘッド素子として
の特性を測る上で入力磁界の条件が一致しない。このこ
とは、実際の装置での再生出力と外部磁界印加による再
生出力との対応がとれず、ヘッド検査工程での精度低下
をもたらしてしまうこととなる。つまり、シールドの形
状によって測定精度が低下し、正確な測定及び選別がで
きない。
In measuring the electromagnetic conversion characteristics of the magnetoresistive head, one of the upper and lower shields is longer and the other is shorter in the conventional structure head as described above. Because of the asymmetry, the direction of the magnetic field that effectively acts on the magnetoresistive effect element is inclined in the direction of the relative movement between the medium and the head, and therefore differs from the direction of the magnetic field that enters the head from the medium in actual use. The conditions of the input magnetic field do not match in measuring the characteristics as As a result, the reproduction output from the actual device cannot be correlated with the reproduction output due to the application of an external magnetic field, resulting in a decrease in accuracy in the head inspection process. That is, the measurement accuracy is reduced by the shape of the shield, and accurate measurement and sorting cannot be performed.

【0007】本発明の目的は、上記課題を解決し、測定
精度を向上させるシールド形状及び測定方法を提供する
ことにある。
An object of the present invention is to provide a shield shape and a measuring method which solve the above problems and improve the measuring accuracy.

【0008】[0008]

【課題を解決するための手段】上記の測定精度低下の課
題は、磁気抵抗効果素子へ入る実効的な磁界の向きが媒
体対向面と直角となる様に、シールド形状を設計するこ
とによって解決される。
The above-mentioned problem of the reduction in measurement accuracy is solved by designing the shield shape such that the direction of the effective magnetic field entering the magnetoresistive element is perpendicular to the medium facing surface. You.

【0009】また、製造プロセス上及びその他の理由に
よりシールド形状を従来型から変更できない場合は、磁
気抵抗効果素子へ実効的に作用する磁界の向きが媒体対
向面と直角となる様に印加磁界角度を傾けて測定するこ
とによって解決される。
When the shield shape cannot be changed from the conventional type due to a manufacturing process or other reasons, the applied magnetic field angle is set so that the direction of the magnetic field effectively acting on the magnetoresistive element becomes perpendicular to the medium facing surface. It is solved by tilting and measuring.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施例を図面を用
いて詳細に説明する。
Embodiments of the present invention will be described below in detail with reference to the drawings.

【0011】図1は、本発明の特徴を最も良く表してい
る磁気抵抗効果型磁気ヘッドの断面図である。シールド
1及びシールド2に挟まれた磁気抵抗効果素子3に、媒
体対向面4と直角となる方向から外部磁界5印加するこ
とにより、磁気抵抗効果素子3の電磁変換特性を測定す
る一般的な測定方法を示している。
FIG. 1 is a sectional view of a magneto-resistance effect type magnetic head which best illustrates the features of the present invention. A general measurement for measuring the electromagnetic conversion characteristics of the magnetoresistive element 3 by applying an external magnetic field 5 to the magnetoresistive element 3 sandwiched between the shields 1 and 2 from a direction perpendicular to the medium facing surface 4. The method is shown.

【0012】この場合、長い方のシールドの長さをh
1、短い方のシールドの長さをh2とした時、h2/h
1を0.8〜1.0とすると、媒体対向面と直角となる方
向と磁気抵抗効果素子3部分での磁界の向きとのなす角
度θは、図2に示す様に1°以下となり、実使用時に媒
体から入る磁界の向きと略同じとなる。
In this case, the length of the longer shield is h
1. When the length of the shorter shield is h2, h2 / h
Assuming that 1 is 0.8 to 1.0, the angle θ between the direction perpendicular to the medium facing surface and the direction of the magnetic field in the magnetoresistive element 3 becomes 1 ° or less as shown in FIG. It is almost the same as the direction of the magnetic field that enters from the medium during actual use.

【0013】また、製造プロセス上及びその他の理由に
よりh2/h1を0.8以下としなければならない場
合、媒体対向面と直角となる方向からの磁界印加では角
度θは第2図に示している様に大きくなるが、その様な
シールドとした場合でも図3に示す様に外部磁界5の印
加角度を、媒体とヘッドとの相対運動方向へ傾けること
により、角度θを略ゼロとすることができる。
When h2 / h1 must be set to 0.8 or less for the manufacturing process and other reasons, the angle θ is shown in FIG. 2 when a magnetic field is applied from a direction perpendicular to the medium facing surface. Even if such a shield is used, the angle θ can be made substantially zero by inclining the applied angle of the external magnetic field 5 in the direction of relative movement between the medium and the head as shown in FIG. it can.

【0014】図4は、h2/h1を変えた場合に、角度
θをゼロとするために必要な印加磁界傾け角度φであ
る。h2/h1がゼロに近づく程印加磁界を傾ける必要
があり、例えば、h2/h1=0.5の時はφ=10°
傾ければ、媒体対向面と直角となる方向と磁気抵抗効果
素子3部分での磁界の向きとのなす角度θ=0となる。
FIG. 4 shows the applied magnetic field tilt angle φ required to make the angle θ zero when h2 / h1 is changed. It is necessary to incline the applied magnetic field as h2 / h1 approaches zero. For example, when h2 / h1 = 0.5, φ = 10 °
If it is inclined, the angle θ between the direction perpendicular to the medium facing surface and the direction of the magnetic field in the magnetoresistive element 3 is 0.

【0015】図5に磁気ヘッドへの印加磁界を傾ける機
能を備えた磁気抵抗効果型磁気ヘッドの電磁変換特性測
定装置の機能概略を示す。磁気抵抗効果型磁気ヘッド1
0を挟む様に永久磁石または電磁石等の磁界印加をおこ
なう設備11と12を有する。磁界印加を行う設備は必
ずしも2つ必要ではなく、図6の様に11または12の
片方のみで磁界印加を行っても良いし、2つ以上の複数
個を用いたもの、C型コアやE型コア等を用いて、その
ギャップ中に磁気ヘッドを挟む方法や、それらを用いた
ギャップからの漏洩磁界でもよい。これら磁界印加を行
う設備からヘッドへ作用させる磁界は、静磁界,動磁界
のどちらでも良く、パルス波,サイン波,三角波など磁
界の種類を問わない。
FIG. 5 schematically shows the function of an electromagnetic conversion characteristic measuring device of a magnetoresistive effect type magnetic head having a function of inclining a magnetic field applied to the magnetic head. Magnetoresistive magnetic head 1
Equipment 11 and 12 for applying a magnetic field such as a permanent magnet or an electromagnet so as to sandwich 0 are provided. Two facilities for applying a magnetic field are not necessarily required, and a magnetic field may be applied to only one of 11 or 12, as shown in FIG. A method using a mold core or the like to sandwich the magnetic head in the gap, or a leakage magnetic field from the gap using them may be used. The magnetic field applied to the head from the equipment for applying the magnetic field may be either a static magnetic field or a dynamic magnetic field, and may be any type of magnetic field such as a pulse wave, a sine wave, and a triangular wave.

【0016】本測定装置は磁気抵抗効果型磁気ヘッド1
0の媒体と相対運動をなす方向に、前記の磁界印加設備
か磁気ヘッドのどちらかを図5の様に回転または図7の
様にスライドさせる等、磁気ヘッド10に対する物理的
な相対位置を変化させる機能を有することにより、磁気
ヘッド10へ印加される磁界の向きを媒体と相対運動を
なす方向に傾けることができることを特徴としている。
This measuring apparatus is a magnetoresistive head 1
The physical relative position with respect to the magnetic head 10 is changed, for example, by rotating either the magnetic field applying equipment or the magnetic head as shown in FIG. 5 or sliding as shown in FIG. By having a function of causing the magnetic head 10, the direction of the magnetic field applied to the magnetic head 10 can be inclined in a direction in which the magnetic head 10 makes a relative motion with the medium.

【0017】本測定方法は ウエハ、スライダー、ヘッ
ドアセンブリ、ヘッドスタックアセンブリ、サーボトラ
ックライタ、ディスクドライブといった磁気抵抗効果素
子を用いた全ての製造工程の検査に用いることができる
ことは明らかである。
It is apparent that the present measuring method can be used for inspection of all manufacturing processes using a magnetoresistive element such as a wafer, a slider, a head assembly, a head stack assembly, a servo track writer, and a disk drive.

【0018】また、設備での磁界の方向及び強さの確認
はホール素子、磁気抵抗素子等の磁気センサーを用い
て、常時行う機能を有しても良い。
Further, the function of confirming the direction and strength of the magnetic field in the equipment may be always performed by using a magnetic sensor such as a Hall element or a magnetoresistive element.

【0019】[0019]

【発明の効果】本発明は、外部磁界を印加することによ
り磁気抵抗効果素子の電磁変換特性を測定する場合にお
いて、磁気抵抗効果素子へ実効的に作用する磁界の向き
を、実使用時すなわちディスクドライブ等に搭載した時
の様に記録媒体から受ける信号磁界の向きと略同じとす
ることができる為、電磁変換特性を精度良く正確に測定
することができる。
According to the present invention, when the electromagnetic conversion characteristics of a magnetoresistive element are measured by applying an external magnetic field, the direction of the magnetic field that effectively acts on the magnetoresistive element can be determined in actual use, that is, in a disk. Since the direction of the signal magnetic field received from the recording medium can be made substantially the same as when mounted on a drive or the like, the electromagnetic conversion characteristics can be measured accurately and accurately.

【0020】本発明により、磁気ヘッドのシールド形状
によって解決した場合は、従来の電磁変換特性測定器を
何の変更もせずに開発機や生産ラインに適用することが
できるため、大幅なる設備投資の必要が避けられる。
According to the present invention, when the solution is solved by the shield shape of the magnetic head, the conventional electromagnetic conversion characteristic measuring instrument can be applied to a development machine or a production line without any change, so that a large capital investment is required. The need is avoided.

【0021】また、プロセス上又は設計上の観点からど
うしてもシールド形状が変更できない場合は磁界印加の
方向を変える機能を有した電磁変換特性測定装置を用い
ることによって、開発機や生産ラインに適用でき、精度
良く測定された製品を提供することができる。
If the shield shape cannot be changed from the viewpoint of process or design, it can be applied to a development machine or a production line by using an electromagnetic conversion characteristic measuring device having a function of changing the direction of magnetic field application. A product measured with high accuracy can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】媒体対向面と直角となる方向から磁界を印加し
た時のシールド型磁気抵抗効果型磁気ヘッドの断面図で
ある。
FIG. 1 is a sectional view of a shielded magnetoresistive head when a magnetic field is applied from a direction perpendicular to a medium facing surface.

【図2】図1の状態でシールド長さを変えた時の磁気抵
抗効果素子へ実効的に作用する磁界角度θを表している
図である。
FIG. 2 is a diagram illustrating a magnetic field angle θ that effectively acts on a magnetoresistive element when a shield length is changed in the state of FIG. 1;

【図3】印加磁界を媒体とヘッドとの相対運動方向へ傾
けた時のシールド型磁気抵抗効果型磁気ヘッドの断面図
である。
FIG. 3 is a cross-sectional view of a shielded magnetoresistive magnetic head when an applied magnetic field is inclined in a direction of relative movement between the medium and the head.

【図4】図3の状態で磁気抵抗効果素子へ実効的に作用
する磁界角度θがゼロとなる印加磁界傾け角度φを示す
図である。
4 is a diagram showing an applied magnetic field tilt angle φ at which a magnetic field angle θ that effectively acts on a magnetoresistive element in the state of FIG. 3 becomes zero.

【図5】磁界印加角度変更機能を有する電磁変換特性測
定装置機能概略の第1の例を示す図である。
FIG. 5 is a diagram illustrating a first example of a schematic function of an electromagnetic conversion characteristic measuring device having a magnetic field application angle changing function.

【図6】磁界印加角度変更機能を有する電磁変換特性測
定装置機能概略の第2の例を示す図である。
FIG. 6 is a diagram illustrating a second example of a schematic function of an electromagnetic conversion characteristic measuring device having a function of changing a magnetic field application angle.

【図7】磁界印加角度変更機能を有する電磁変換特性測
定装置機能概略の第3の例を示す図である。
FIG. 7 is a diagram showing a third example of the function of an electromagnetic conversion characteristic measuring device having a magnetic field application angle changing function.

【符号の説明】 1:シールド1、2:シールド2、3:磁気抵抗効果素
子、4:媒体対向面、5:外部印加磁界、h1:シール
ド1の長さ、h2:シールド2の長さ、θ:媒体対向面
と直角となる方向と磁気抵抗効果素子先端部分の磁界の
向きとのなす角、φ:媒体対向面と直角となる方向と外
部印加磁界の向きとのなす角、10:磁気抵抗効果型磁
気ヘッド、11:磁界印加設備1、12:磁界印加設備
2、
[Description of Signs] 1: Shield 1, 2: Shield 2, 3: Magnetoresistance effect element, 4: Media facing surface, 5: Externally applied magnetic field, h1: Length of shield 1, h2: Length of shield 2, θ: the angle between the direction perpendicular to the medium facing surface and the direction of the magnetic field at the tip of the magnetoresistive element, φ: the angle between the direction perpendicular to the medium facing surface and the direction of the externally applied magnetic field, 10: magnetic Resistance effect type magnetic head, 11: magnetic field applying equipment 1, 12: magnetic field applying equipment 2,

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】媒体対向面と直角となる方向に沿って、第
1のシールド用磁性体と、磁気抵抗効果素子と、第2の
シールド用磁性体とが配置され、前記媒体対向面と直角
となる方向に外部から磁界を印加した時、前記磁気抵抗
効果素子部分での磁界の向きが、前記外部印加磁界の向
きと略同じとなる様にした磁気抵抗効果型磁気ヘッド。
1. A magnetic body for a first shield, a magnetoresistive element, and a magnetic body for a second shield are arranged along a direction perpendicular to the medium facing surface, and are perpendicular to the medium facing surface. A magnetoresistive effect type magnetic head in which the direction of the magnetic field at the magnetoresistive element portion is substantially the same as the direction of the externally applied magnetic field when a magnetic field is externally applied in the following direction.
【請求項2】媒体対向面と直角となる方向に沿って、第
1のシールド用磁性体と、磁気抵抗効果素子と、第2の
シールド用磁性体とが配置された磁気抵抗効果型磁気ヘ
ッドに於いて、 前記第1のシールド用磁性体と前記第2のシールド用磁
性体との長さの比が0.8〜1.0であることをと特徴と
する請求項1に記載の磁気抵抗効果型磁気ヘッド。
2. A magnetoresistive magnetic head in which a first shield magnetic body, a magnetoresistive element, and a second shield magnetic body are arranged along a direction perpendicular to the medium facing surface. 2. The magnetic device according to claim 1, wherein a length ratio of the first shield magnetic body to the second shield magnetic body is 0.8 to 1.0. Resistance effect type magnetic head.
【請求項3】媒体対向面と直角となる方向に沿って、第
1のシールド用磁性体と、磁気抵抗効果素子と、第2の
シールド用磁性体とが配置された磁気抵抗効果型磁気ヘ
ッドで、前記第1のシールド用磁性体と前記第2のシー
ルド用磁性体の長さが異なる磁気抵抗効果型磁気ヘッド
に於いて、前記磁気抵抗効果素子部分での磁界の向きが
媒体対向面と略直角となる様に、外部印加磁界を媒体と
ヘッドとの相対運動方向へ傾けたことを特徴とした磁気
抵抗効果素子の電磁変換特性測定方法。
3. A magnetoresistive magnetic head in which a first shield magnetic body, a magnetoresistive element, and a second shield magnetic body are arranged along a direction perpendicular to the medium facing surface. In a magnetoresistive head having a first shield magnetic body and a second shield magnetic body having different lengths, the direction of the magnetic field in the magnetoresistive element portion is different from the medium facing surface. A method for measuring electromagnetic conversion characteristics of a magnetoresistive element, wherein an externally applied magnetic field is inclined in a direction of relative movement between a medium and a head so that the magnetic field becomes substantially a right angle.
【請求項4】磁気抵抗効果素子部分での磁界の向きが、
実際に使用する時の入力磁界の向きと略同等となる様
に、外部印加磁界を媒体とヘッドとの相対運動方向へ傾
けたことを特徴とした磁気抵抗効果素子の電磁変換特性
測定方法。
4. The direction of a magnetic field in a magnetoresistive element is
A method for measuring electromagnetic conversion characteristics of a magnetoresistive element, wherein an externally applied magnetic field is tilted in a direction of relative movement between a medium and a head so that the direction of an input magnetic field when actually used is substantially the same.
【請求項5】請求項3、又は請求項4に記載の機能を備
えた磁気抵抗効果型磁気ヘッドの電磁変換特性測定装
置。
5. An apparatus for measuring electromagnetic conversion characteristics of a magneto-resistance effect type magnetic head having a function according to claim 3.
JP2000365770A 2000-11-28 2000-11-28 Magnetoresistive magnetic head, and electromagnetic transduction characteristic measurement method and device therefor Pending JP2002170210A (en)

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JP2002170210A5 JP2002170210A5 (en) 2005-10-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113838483A (en) * 2020-06-23 2021-12-24 西部数据技术公司 Read head sensor with balanced shield design

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113838483A (en) * 2020-06-23 2021-12-24 西部数据技术公司 Read head sensor with balanced shield design
US11557317B2 (en) 2020-06-23 2023-01-17 Western Digital Technologies, Inc. Read head sensor with balanced shield design

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