JP2002164197A - X-ray generator - Google Patents

X-ray generator

Info

Publication number
JP2002164197A
JP2002164197A JP2000359926A JP2000359926A JP2002164197A JP 2002164197 A JP2002164197 A JP 2002164197A JP 2000359926 A JP2000359926 A JP 2000359926A JP 2000359926 A JP2000359926 A JP 2000359926A JP 2002164197 A JP2002164197 A JP 2002164197A
Authority
JP
Japan
Prior art keywords
tube
voltage
ray
current
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000359926A
Other languages
Japanese (ja)
Inventor
Takuya Domoto
拓也 堂本
Hiroshi Takano
博司 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Healthcare Manufacturing Ltd
Original Assignee
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Medical Corp filed Critical Hitachi Medical Corp
Priority to JP2000359926A priority Critical patent/JP2002164197A/en
Publication of JP2002164197A publication Critical patent/JP2002164197A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray generator capable of simply and more exactly detecting a tube current even in an X-ray generator using a grounded-plate X-ray tube. SOLUTION: DC voltage outputted from a high voltage generator which generates DC high voltage is supplied to a grounded-plate X-ray tube to emit X-rays. A tube current detecting loop is provided between a positive terminal and an earth terminal of the high voltage generator of the X-ray generator, and a current flowing in the tube current detecting loop is detected to detect a current flowing in the grounded-plate X-ray tube. The current flowing in the tube current detecting loop is detected by providing a Hall element type current detector, a resistor, which detects voltage drop, or the like in this loop, and the value detected by these is amplified to detect the tube current.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、陽極接地型X線管
を使用したX線発生装置に関し、特に該X線管に流れる
電流(以下、管電流と称す)を容易に検出できる機能を
有したX線発生装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray generator using a grounded anode X-ray tube, and more particularly, to a device capable of easily detecting a current flowing through the X-ray tube (hereinafter referred to as a tube current). X-ray generator.

【0002】[0002]

【従来の技術】X線発生装置は、被検体の診断部位にX
線を照射するためにX線を発生させるもので、X線を放
射するX線管と、このX線管に印加する直流高電圧(以
下、管電圧と称す)を発生する高電圧発生器とから成
る。前記高電圧発生器は、JIS Z4702(日本工業標準調
査会:医用X線高電圧装置通則、日本規格協会発行、19
99年9月27日制定)に記載されているように、中性点接
地方式の高電圧発生器が主に用いられてきた。X線高電
圧装置は前記JIS Z 4702に記載されている試験方法に基
づいて試験し、管電圧,管電流の誤差はそれぞれ±10%
以下,±20%以下と決められている。
2. Description of the Related Art An X-ray generator is used to apply X-rays to a diagnosis site of a subject.
An X-ray tube that emits X-rays for irradiating X-rays, and a high-voltage generator that generates a DC high voltage (hereinafter, referred to as a tube voltage) applied to the X-ray tube; Consists of The high voltage generator is based on JIS Z4702 (Japanese Industrial Standards Committee: General rules for medical X-ray high voltage equipment, published by Japan Standards Association, 19
As described in (September 27, 1999), a neutral voltage high voltage generator has been mainly used. X-ray high-voltage equipment is tested according to the test method described in JIS Z 4702, and the error of tube voltage and tube current is ± 10% each.
Below, it is determined to be ± 20% or less.

【0003】一方、X線発生装置の大容量化と高耐電圧
化に伴い、例えば特開平08-315758号公報に記されてい
るような陽極接地型X線管が用いられるようになってき
た。陽極接地型X線管とは、陽極の回転ロータを接地す
ることにより、陽極の設計自由度が増し、放熱設計が容
易となり、放熱効率を飛躍的に向上させることが可能と
なる。したがって、大容量のX線管が可能となる。
On the other hand, with the increase in capacity and withstand voltage of the X-ray generator, for example, a grounded anode X-ray tube described in Japanese Patent Application Laid-Open No. 08-315758 has been used. . With the anode grounded X-ray tube, by grounding the rotating rotor of the anode, the degree of freedom in designing the anode is increased, the heat radiation design is facilitated, and the heat radiation efficiency can be drastically improved. Therefore, a large-capacity X-ray tube becomes possible.

【0004】[0004]

【発明が解決しようとしている課題】上記したように、
管電流の測定はJIS Z 4704の管電流特性試験方法に基づ
いて測定することが決められており、陽極側の高電圧ケ
ーブルに流れる電流もしくは陽極側の高電圧整流器のア
ース側に流れる電流を測定することになっている。
SUMMARY OF THE INVENTION As described above,
The measurement of the tube current is determined based on the tube current characteristics test method of JIS Z 4704, and measures the current flowing through the high voltage cable on the anode side or the current flowing on the ground side of the high voltage rectifier on the anode side. Is supposed to.

【0005】ところが、陽極接地型のX線管には陽極側
のケーブルは存在せず、管電流の測定が不可能である。
陰極には数mA〜1A程度の直流管電流と共に,数A〜
数十Aの交流フィラメント電流が流れるため,正確な電
流の測定は困難である。また、管電流の校正を行うため
には、測定器が装置と独立している必要がある。
However, the anode-side cable does not exist in the anode grounded X-ray tube, and it is impossible to measure the tube current.
The cathode has a DC current of several mA to 1A, and several A to
Since an AC filament current of several tens A flows, it is difficult to accurately measure the current. Further, in order to calibrate the tube current, the measuring device needs to be independent of the device.

【0006】そこで、本発明は、以上のような従来装置
の問題点を解決し、陽極接地型X線管においても、管電
流の測定を簡単に、より正確にできるX線発生装置を提
供することを目的とする。
Accordingly, the present invention solves the above-mentioned problems of the conventional apparatus, and provides an X-ray generator capable of easily and more accurately measuring a tube current even in an anode grounded X-ray tube. The purpose is to:

【0007】[0007]

【課題を解決するための手段】上記目的は、直流高電圧
を発生する高電圧発生器と、この高電圧発生器の直流電
圧が印加されてX線を放射する陽極接地型X線管とから
なるX線発生装置において、前記高電圧発生器の陽極側
端子と接地端子との間に管電流検出ループを設け、この
管電流検出ループに流れる電流を検出して前記陽極接地
型X線管に流れる電流を検出することによって達成され
る。前記管電流検出ループに流れる電流は、このループ
にホール素子型電流検出器や電圧降下を発生する抵抗器
などを検出し、この検出した値を増幅して管電流を検出
するように構成する。
SUMMARY OF THE INVENTION The object of the present invention is to provide a high voltage generator for generating a DC high voltage, and a grounded anode X-ray tube which emits X-rays when the DC voltage of the high voltage generator is applied. In the X-ray generator, a tube current detection loop is provided between the anode side terminal of the high voltage generator and the ground terminal, and a current flowing through the tube current detection loop is detected so that the anode grounded X-ray tube is provided. This is achieved by detecting the flowing current. The current flowing in the tube current detection loop is configured to detect a Hall element type current detector, a resistor that generates a voltage drop, and the like in the loop, amplify the detected value, and detect the tube current.

【0008】[0008]

【発明の実施の形態】以下、本発明の実施例を添付図面
に基づいて詳細に説明する。
Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

【0009】図1は本発明によるX線発生装置の実施例
を示す全体構成のブロック図である。このX線発生装置
は、被検体の診断部位にX線を照射するもので、図1に
示すように、直流高電圧を発生する高電圧発生器1と、
この高電圧発生器1の出力電圧を印加してX線を照射す
る陽極接地型X線管2からなる。
FIG. 1 is a block diagram of the overall configuration showing an embodiment of an X-ray generator according to the present invention. This X-ray generator irradiates a diagnostic site of a subject with X-rays. As shown in FIG. 1, a high-voltage generator 1 that generates a DC high voltage;
An anode grounded X-ray tube 2 for applying an output voltage of the high voltage generator 1 to irradiate X-rays.

【0010】この例の上記高電圧発生器1は、商用交流
電源10に接続し、この交流電源10の電圧を直流電圧に変
換するコンバータ101と、コンバータ101の出力電圧を平
滑するコンデンサ102と、この直流電圧を高周波交流電
圧に変換するインバータ103と、該高周波交流電圧を昇
圧する高圧変圧器104と、この高電圧変圧器104の出力電
圧を整流する高電圧整流器105と、高電圧整流器105の正
側出力に接続して一方をアース(接地)に接続する管電流
検出ループ110とから成り、高電圧整流器105の負側出力
が陽極接地型X線管のカソード(陰極)端子に接続され
る。X線管2は、フィラメント201と、回転陽極202から
なり、フィラメント201はカソード(陰極)端子としてX
線発生装置に接続する。回転陽極はアノード(陽極)であ
り、アース(接地)に接続する。この陽極接地型のX線管
は、放熱のために大きな表面積と体積をもって回転して
いるが、陽極を接地しているため耐電圧設計が容易であ
り、直接熱容量の大きな金属シャーシなどに熱伝達率の
よい金属を接触させて、陽極の熱容量を飛躍的に上昇さ
せることができる。
The high-voltage generator 1 of this embodiment is connected to a commercial AC power supply 10 and converts a voltage of the AC power supply 10 into a DC voltage. A capacitor 102 smoothes an output voltage of the converter 101. An inverter 103 that converts this DC voltage into a high-frequency AC voltage; a high-voltage transformer 104 that boosts the high-frequency AC voltage; a high-voltage rectifier 105 that rectifies the output voltage of the high-voltage transformer 104; A tube current detection loop 110 is connected to the positive output and one is connected to ground (ground), and the negative output of the high voltage rectifier 105 is connected to the cathode (cathode) terminal of the anode grounded X-ray tube. . The X-ray tube 2 includes a filament 201 and a rotating anode 202, and the filament 201 serves as a cathode (cathode) terminal.
Connect to line generator. The rotating anode is the anode (anode) and is connected to earth (ground). This anode grounded X-ray tube rotates with a large surface area and volume for heat dissipation, but since the anode is grounded, the withstand voltage design is easy and heat transfer directly to a metal chassis with a large heat capacity. By contacting a highly efficient metal, the heat capacity of the anode can be dramatically increased.

【0011】3は本高電圧発生器1の校正を行うため、校
正時にのみ接続する管電圧/管電流計を示す。陽極接地
型X線管用の管電圧/管電流計3は、分圧器302によって
アノードとアース(A−E)間電圧、即ち管電圧を検出
し、アンプ303(a)を介して管電圧V(A-C)を出力あるい
は表示する。また、管電流検出ループ110に接続された
ホール素子型電流検出器301によって管電流を検出し、
アンプ303(b)を介して管電流I(A)を出力あるいは表示
する。
Reference numeral 3 denotes a tube voltage / tube ammeter which is connected only at the time of calibration in order to calibrate the high voltage generator 1. The tube voltage / tube ammeter 3 for the anode grounded X-ray tube detects the voltage between the anode and the earth (AE), that is, the tube voltage by the voltage divider 302, and outputs the tube voltage V ( via the amplifier 303 (a). AC) is output or displayed. Further, the tube current is detected by the Hall element type current detector 301 connected to the tube current detection loop 110,
The tube current I (A) is output or displayed via the amplifier 303 (b).

【0012】本発明は、管電流検出手段を提供するもの
であるが、本実施例によると、X線管球2のアノード202
に接続したアースから流れた電流が、X線管球2のアノ
ード202,カソード201に流れ(管電流)、高電圧発生器1
の高電圧整流器105に入り、管電流検出ループ110を通っ
てアースに抜ける管電流の流れの中で、最も測定が容易
である点を測定可能とした管電流検出ループ110を設け
たことを特徴とする
The present invention provides a tube current detecting means. According to the present embodiment, the anode 202 of the X-ray tube 2 is provided.
The current flowing from the ground connected to the X-ray tube 2 flows to the anode 202 and the cathode 201 of the X-ray tube 2 (tube current), and the high voltage generator 1
Of the tube current flowing into the high-voltage rectifier 105 and flowing to the ground through the tube current detection loop 110. To be

【0013】医用X線発生装置の管電圧,管電流の誤差
は、上記したJIS Z 4702により管電圧は±10%以下、管
電流は±20%以下とそれぞれ決められており、その製造
過程において校正を行うものと規定されている。
The tube voltage and tube current errors of the medical X-ray generator are determined to be ± 10% or less and ± 20% or less according to JIS Z 4702, respectively. It is stipulated that calibration be performed.

【0014】高電圧発生器1の校正を行うための管電圧
/管電流計3は、校正を行うときのみ接続するため、容
易に取り外しが可能な形態を持ち、通常高電圧ケーブル
を中継するなどの方法によって接続し、管電圧/管電流
を測定する。本発明における管電圧/管電流計は、従来
と同様の管電圧測定法に加えて、高電圧発生器の外側に
設けられた管電流検出ループ110の電流を検出すること
によって、管電流を容易に測定することができる。
The tube voltage / tube ammeter 3 for calibrating the high-voltage generator 1 has a form that can be easily removed because it is connected only when performing calibration, and is usually used for relaying a high-voltage cable. And the tube voltage / tube current is measured. The tube voltage / tube ammeter according to the present invention can easily detect the tube current by detecting the current of the tube current detection loop 110 provided outside the high-voltage generator, in addition to the tube voltage measurement method similar to the conventional one. Can be measured.

【0015】本実施例における管電流検出ループ110
は、配線によって高電圧整流器105の正側出力に接続し
て一方をアース(接地)に接続するのみであるが、管電圧
/管電流計3のホール素子型電流検出器301によって管電
流を検出できるため、非接触で検出でき、またアース付
近の電位であるため、取り扱いが容易である。
The tube current detection loop 110 in the present embodiment
Is connected to the positive output of the high-voltage rectifier 105 by wiring and only one is connected to the ground (ground), but the tube current is detected by the Hall element type current detector 301 of the tube voltage / tube ammeter 3. Because it is possible, it can be detected in a non-contact manner, and since the potential is near the ground, handling is easy.

【0016】図2は、本発明による第二の実施例のX線
発生装置の要部で、第一の実施例における管電流検出ル
ープ110と管電圧/管電流計3の管電流計の部分のみを示
す。
FIG. 2 shows a main part of an X-ray generator according to a second embodiment of the present invention. The tube current detection loop 110 and the tube ammeter of the tube voltage / tube ammeter 3 in the first embodiment. Only shown.

【0017】本実施例では管電流検出ループ110に電流
検出用抵抗111が挿入してある。管電流が流れることに
より、抵抗111の両端に電圧が発生する。管電流計は、
この電圧を測定することによって管電流を測定する。
In this embodiment, a current detecting resistor 111 is inserted in the tube current detecting loop 110. When the tube current flows, a voltage is generated across the resistor 111. The tube ammeter is
The tube current is measured by measuring this voltage.

【0018】管電流検出ループ110に電流検出用抵抗111
を挿入することによって、管電流計の電流検出手段をよ
り単純なものにでき、より正確で高周波特性のよいもの
とすることができる。
A current detecting resistor 111 is connected to the tube current detecting loop 110.
, The current detecting means of the tube ammeter can be made simpler, and more accurate and have good high-frequency characteristics.

【0019】図3は、本発明による第三の実施例のX線
発生装置の要部で、第一の実施例における管電流検出ル
ープ110と管電圧/管電流計3の管電流計の部分のみを示
す。この例は、第二の実施例における電流検出用抵抗11
1を、管電流計に複数内蔵した電流検出用抵抗304に置き
換え、ゲイン切り替え器306を設けて管電流の大きさに
応じて測定ゲインを切り換えることができるように構成
している。
FIG. 3 shows a main part of an X-ray generator according to a third embodiment of the present invention. The tube current detecting loop 110 and the tube ammeter of the tube voltage / tube ammeter 3 in the first embodiment. Only shown. This example corresponds to the current detection resistor 11 in the second embodiment.
1 is replaced with a plurality of current detecting resistors 304 incorporated in the tube ammeter, and a gain switch 306 is provided so that the measurement gain can be switched according to the magnitude of the tube current.

【0020】本実施例では、正確な管電流が得られると
共に、複数の電流検出用抵抗とゲイン切り替え器によっ
て、数mA〜数Aと幅広い管電流の領域において、良好
な管電流波形を得ることができる。しかし、管電圧/管
電流計は、管電圧,管電流の校正時のみ接続し、校正す
るものであり、常時接続するものではないため,管電圧
/管電流計がない場合にも、正常に動作する必要があ
る。このように、校正時以外の管電流検出ループがない
状態ではアノード端がオープンとなり、高電圧が出力さ
れる危険があるため、過電圧を防止するために電圧制限
手段112、この例ではツェナーダイオードがアノード端
と接地端の間に挿入して電流が流れるループを形成す
る。
In this embodiment, an accurate tube current can be obtained, and a good tube current waveform can be obtained in a wide range of several mA to several A by a plurality of current detecting resistors and gain switches. Can be. However, since the tube voltage / tube ammeter is connected and calibrated only when calibrating the tube voltage and tube current, it is not always connected. Need to work. As described above, in a state where there is no tube current detection loop other than at the time of calibration, the anode end is open, and there is a risk of outputting a high voltage.Therefore, in order to prevent overvoltage, the voltage limiting means 112, in this example, a zener diode is used. It is inserted between the anode terminal and the ground terminal to form a loop through which current flows.

【0021】図4は、本発明による第四の実施例のX線
発生装置の要部で、第一の実施例における管電流検出ル
ープ110と管電圧/管電流計3の管電流計の部分のみを示
す。
FIG. 4 shows a main part of an X-ray generator according to a fourth embodiment of the present invention, in which the tube current detection loop 110 and the tube ammeter of the tube voltage / tube ammeter 3 in the first embodiment are shown. Only shown.

【0022】本実施例では、第一の実施例において、電
流検出ループの接地端を管電流計の内部に接続し、管電
流計接続を容易にすることができる。この例において
も、前記第三の実施例と同様に、過電圧を防止するため
の電圧制限手段112が必須であり、アノード端と接地間
に電流が流れるループを形成する。この例では、管電流
計は第一の実施例に示すホール素子型電流検出器を用い
た構造となっているが、第三の実施例に示すような電流
検出用抵抗を用いた構造をとってもよい。
In this embodiment, in the first embodiment, the ground end of the current detection loop is connected to the inside of the tube ammeter, so that the tube ammeter can be easily connected. Also in this example, as in the third embodiment, the voltage limiting means 112 for preventing an overvoltage is essential, and a loop in which a current flows between the anode terminal and the ground is formed. In this example, the tube ammeter has a structure using the Hall element type current detector shown in the first embodiment, but it may have a structure using a current detection resistor as shown in the third embodiment. Good.

【0023】また,図1ではインバータ式高電圧装置を
示したが、あらゆるタイプのX線高電圧装置においても
同様であり、高電圧変圧器の正側出力とアース端子の間
に電流検出用ループを設けることによって実現可能であ
る。
Although FIG. 1 shows an inverter type high voltage device, the same applies to all types of X-ray high voltage devices. A current detection loop is provided between the positive output of the high voltage transformer and the ground terminal. This can be realized by providing

【0024】[0024]

【発明の効果】以上に説明したように、高電圧発生器の
陽極側端子から接地端子へ高電圧発生器から外に出てい
る管電流検出ループを設け、X線管に流れる管電流検出
を可能としたので、陽極接地型X線管を用いたX線発生
装置においても管電流の測定が容易となり、正確な管電
流であることの確認をしながらX線を照射することが可
能なX線発生装置を提供できる。
As described above, the tube current detection loop extending from the anode side terminal of the high voltage generator to the ground terminal is provided to detect the tube current flowing through the X-ray tube. Since it is possible, it is easy to measure the tube current even in an X-ray generator using an anode grounded X-ray tube, and it is possible to irradiate X-rays while confirming that the tube current is accurate. A line generator can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明によるX線発生装置の第一の実施例を示
す全体構成のブロック図。
FIG. 1 is a block diagram of an overall configuration showing a first embodiment of an X-ray generator according to the present invention.

【図2】本発明による第二の実施例のX線発生装置の要
部を示す図。
FIG. 2 is a diagram showing a main part of an X-ray generator according to a second embodiment of the present invention.

【図3】本発明による第三の実施例のX線発生装置の要
部を示す図。
FIG. 3 is a diagram showing a main part of an X-ray generator according to a third embodiment of the present invention.

【図4】本発明による第四の実施例のX線発生装置の要
部を示す図。
FIG. 4 is a diagram showing a main part of an X-ray generator according to a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…高電圧発生器、2…X線管、3…管電圧/管電流計、1
0…商用交流電源、101…コンバータ、102…コンデン
サ、103…インバータ、104…高電圧変圧器、105…高電
圧整流器、110…管電流検出ループ、111…シャント抵
抗、112…電圧制限手段、201…陰極フィラメント、202
…回転陽極、301…電流検出器、302…分圧器、303…ア
ンプ、304…シャント抵抗、305…切り替え器
1 ... High voltage generator, 2 ... X-ray tube, 3 ... Tube voltage / tube ammeter, 1
0 ... commercial AC power supply, 101 ... converter, 102 ... capacitor, 103 ... inverter, 104 ... high voltage transformer, 105 ... high voltage rectifier, 110 ... tube current detection loop, 111 ... shunt resistor, 112 ... voltage limiting means, 201 ... Cathode filament, 202
... Rotating anode, 301 ... Current detector, 302 ... Voltage divider, 303 ... Amplifier, 304 ... Shunt resistor, 305 ... Switcher

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 直流高電圧を発生する高電圧発生器と、
この高電圧発生器の直流電圧が印加されてX線を放射す
る陽極接地型X線管とからなるX線発生装置において、
前記高電圧発生器の陽極側端子と接地端子との間に管電
流検出ループを設け、この管電流検出ループに流れる電
流を検出して前記陽極接地型X線管に流れる電流を検出
することを特徴とするX線発生装置。
1. A high voltage generator for generating a DC high voltage;
An X-ray generator comprising an anode grounded X-ray tube that emits X-rays when a DC voltage of the high voltage generator is applied,
Providing a tube current detection loop between the anode terminal and the ground terminal of the high voltage generator, detecting a current flowing through the tube current detection loop and detecting a current flowing through the anode grounded X-ray tube. Characteristic X-ray generator.
JP2000359926A 2000-11-27 2000-11-27 X-ray generator Pending JP2002164197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000359926A JP2002164197A (en) 2000-11-27 2000-11-27 X-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000359926A JP2002164197A (en) 2000-11-27 2000-11-27 X-ray generator

Publications (1)

Publication Number Publication Date
JP2002164197A true JP2002164197A (en) 2002-06-07

Family

ID=18831606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000359926A Pending JP2002164197A (en) 2000-11-27 2000-11-27 X-ray generator

Country Status (1)

Country Link
JP (1) JP2002164197A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11064600B2 (en) 2017-06-08 2021-07-13 Koninklijke Philips N.V. Apparatus and system configured to correct a cathode current and a voltage between a cathode and an anode for generating X-rays
WO2022059821A1 (en) * 2020-09-18 2022-03-24 어썸레이 주식회사 Electromagnetic wave generation device and control method therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11064600B2 (en) 2017-06-08 2021-07-13 Koninklijke Philips N.V. Apparatus and system configured to correct a cathode current and a voltage between a cathode and an anode for generating X-rays
WO2022059821A1 (en) * 2020-09-18 2022-03-24 어썸레이 주식회사 Electromagnetic wave generation device and control method therefor

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