JP2002158205A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002158205A5 JP2002158205A5 JP2000349868A JP2000349868A JP2002158205A5 JP 2002158205 A5 JP2002158205 A5 JP 2002158205A5 JP 2000349868 A JP2000349868 A JP 2000349868A JP 2000349868 A JP2000349868 A JP 2000349868A JP 2002158205 A5 JP2002158205 A5 JP 2002158205A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000349868A JP2002158205A (ja) | 2000-11-16 | 2000-11-16 | ワークの乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000349868A JP2002158205A (ja) | 2000-11-16 | 2000-11-16 | ワークの乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002158205A JP2002158205A (ja) | 2002-05-31 |
| JP2002158205A5 true JP2002158205A5 (OSRAM) | 2007-11-08 |
Family
ID=18823193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000349868A Pending JP2002158205A (ja) | 2000-11-16 | 2000-11-16 | ワークの乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002158205A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107604556A (zh) * | 2017-10-16 | 2018-01-19 | 浙江雅力士自动化设备科技有限公司 | 缩水粘合一体机中的烘干装置 |
| JP7356368B2 (ja) * | 2020-02-10 | 2023-10-04 | 株式会社荏原製作所 | 基板乾燥装置 |
| JP7660548B2 (ja) * | 2021-12-24 | 2025-04-11 | セメス カンパニー，リミテッド | 基板処理装置及び基板処理方法 |
-
2000
- 2000-11-16 JP JP2000349868A patent/JP2002158205A/ja active Pending