JP2002157704A - Magnetic head and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the difficulty of simultaneously preventing magnetic saturation in the lower part of a gap layer and improving the processing accuracy of an upper magnetic layer and the gap layer in a conventional magnetic head. SOLUTION: A Gd deciding layer 45 is formed on the upper surface of a lower magnetic pole part 41, and a gap layer 42 and an upper magnetic pole layer 43 are plated and formed through a plated substrate layer 42a above the lower magnetic pole part 41 and the Gd deciding layer 45. Since the lower magnetic pole part 41 is extended and formed below the Gd deciding layer 45, magnetic saturation on the lower magnetic pole part 41 is suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head for recording used, for example, for a floating magnetic head, and more particularly to a magnetic head capable of generating an appropriate amount of leakage magnetic flux around a gap layer. The present invention relates to a magnetic head capable of coping with a higher recording density and a method of manufacturing the same.

[0002]

2. Description of the Related Art FIG. 21 is a longitudinal sectional view of a conventional magnetic head for recording. Reference numeral 10 shown in FIG. 21 is a lower core layer formed of a magnetic material such as Permalloy.

On the lower core layer 10, a plating underlayer 11 is provided.
a is formed. On the plating base layer 11a, a Gd determining layer 21 for setting a gap depth (Gd) defined as a height direction (depth in the Y direction in the drawing) of a bonding surface between the gap layer 12 and the upper magnetic pole layer 13 described later is formed. Have been. The lower magnetic pole layer 11 is formed by plating on the plating base layer 11a. The lower magnetic pole layer 11 is
And are magnetically connected. The dimension of the lower pole layer 11 in the track width direction is smaller than that of the lower core layer 10.

On the lower magnetic pole layer 11, a gap layer 12 is formed by plating using NiP which is a non-magnetic metal.

The upper magnetic pole layer 13 is formed on the gap layer 12 by plating, and the upper magnetic pole layer 13 is magnetically connected to the upper core layer 15 on the upper surface 13e.

In the magnetic head shown in FIG. 21, since the gap layer 12 is formed of a non-magnetic metal material, the lower magnetic pole layer 11, the gap layer 12, and the upper magnetic pole layer 13 can be continuously formed by plating. become.

The Gd determining layer 21 is arranged so that the distance from the ABS surface gradually increases as the front end surface on the surface (ABS surface) facing the recording medium goes upward from above the lower core layer 10 (Z direction in the drawing). The surface is inclined. That is, as it goes toward the upper core layer 15 (Z direction in the drawing),
The length from the front end surface of the Gd determining layer 21 to the ABS surface is longer, and the contact surface between the upper magnetic pole layer 13 and the Gd determining layer 21 has a height higher than the gap depth as it faces the upper core layer 15. It is formed so as to gradually become deeper in the direction. The gap depth is regulated to L1 by the front end face of the Gd determining layer.

In order to increase the leakage flux around the gap layer 12, the area of the gap layer 12 should be reduced as much as possible. In the magnetic head of FIG. 21, the length dimension of the upper magnetic pole layer 13 is
And the volume of the upper magnetic pole layer 13 can be increased without increasing the area of the gap layer 12.

As shown in FIG. 21, the rear end of the upper magnetic pole layer 13 in the height direction (the Y direction in the drawing) has a Gd determining layer 2.
It is extended to one curved surface. That is, the area of the bonding surface between the upper core layer 15 and the upper core layer 15 that is magnetically connected to the upper magnetic pole layer 13 is larger than (gap depth × track width Tw). This area is shown in FIG.
Also, as shown in FIG. 2, the length of the upper pole layer 13 in the height direction is wider than that formed with the same length dimension as the gap depth, and the volume of the upper pole layer 13 can be increased. .

Therefore, it is possible to prevent the magnetic flux flowing through the upper core layer 15 from being excessively restricted at the joint.
The amount of magnetic flux flowing inside the upper magnetic pole layer 13 can be appropriately adjusted.

[0011]

In the magnetic head shown in FIG. 21, in order to allow a magnetic flux to flow efficiently, the upper magnetic pole layer 13 is required.
To prevent the magnetic flux from being oversaturated in the lower magnetic pole layer 11.
It is necessary to prevent the magnetic flux from being oversaturated in the magnetic field. In order to prevent oversaturation of the magnetic flux in the lower magnetic pole layer 11, it is necessary to increase the volume of the lower magnetic pole layer 11.

However, in the magnetic head shown in FIG. 21, the length in the height direction of the lower magnetic pole layer 11 is regulated by the Gd determining layer 21. Therefore, it is difficult to arbitrarily increase the volume of the lower magnetic pole layer 11, and there has been a problem that magnetic saturation occurs in the lower magnetic pole layer 11, particularly when the size of the magnetic head is reduced.

FIG. 22 is a longitudinal sectional view showing another conventional magnetic head. In the magnetic head shown in FIG. 22, a lower magnetic pole portion 30 is formed on the lower core layer 10 by grinding the lower core layer 10 to form a step.
The gap layer 31 is laminated thereon. The gap layer 31 is formed of an insulating material such as Al ₂ O ₃ or SiO ₂ . A Gd determining layer 32 is formed on the gap layer 31 at a position away from the ABS surface by a predetermined distance. The gap depth is determined by regulating the rear end in the height direction of the junction between the gap layer 31 and the upper pole layer 33 by the front end surface of the Gd determining layer 32 on the ABS side. In FIG. 22, the length of the gap depth is L1
Is set to

The front end face of the Gd determining layer 32 and the gap layer 3
The upper magnetic pole layer 33 is formed by plating on a portion between the upper Gd determining layer 32 and the ABS surface via a plating underlayer 33a. The upper pole layer 33 is magnetically connected to the upper core layer 15 on the upper surface.

In the magnetic head shown in FIG. 22, the lower core layer 10 and the lower pole layer 30 are formed of the same member, and the volume of the lower pole layer 30 can be increased. Saturation can be suppressed.

However, the magnetic head shown has the following disadvantages. 23 to 25 show a method of forming the front shape of the magnetic head shown in FIG. The process diagrams shown in FIGS. 23 to 25 are partial front views of the magnetic head.

FIG. 23 shows a state in which the gap layer 31 is formed on the entire surface of the lower core layer 10 and the upper magnetic pole layer 33 is formed on the gap layer 31 via the plating underlayer 33a. I have. In FIG. 23, the resist layer used as a frame for plating the upper magnetic pole layer 33 and the plating base layer other than the area covered by the upper magnetic pole layer 33 are removed.

In the step shown in FIG. 24, the removal of the gap layer 31 and the grinding of the upper surface of the lower core layer 10 in a region not covered by the upper magnetic pole layer 33 are performed by the first ion milling.

In the first ion milling, neutrally ionized Ar (argon) gas is used. This first
In ion milling, ion irradiation is performed from the directions of arrows S and T. In the first ion milling in this step, ions are irradiated from a direction almost perpendicular to the upper surface of the lower core layer 10.

When the lower core layer 10 is irradiated with ions from a direction almost perpendicular (arrows S and T), the gap layer 31 in a region not covered by the upper magnetic pole layer 33 is removed by a physical action. The upper surface of the lower core layer 10 in a region not covered by the upper magnetic pole layer 33 is cut into a substantially rectangular shape. A region of the lower core layer 10 covered by the upper magnetic pole layer 33 is left uncut, and a step is formed substantially at right angles on both sides thereof, and the lower magnetic pole layer 3 having substantially the same width dimension as the upper magnetic pole layer 33 is formed.
0 is formed. The gap layer 31 has the same width as that of the upper pole layer 33 and is left between the upper pole layer 33 and the lower pole layer 30.

Although not shown, the magnetic powder of the lower magnetic pole layer 30 removed by the first ion milling is
It adheres to both sides of the upper magnetic pole layer 33, the gap layer 31, and the lower magnetic pole layer 30. The second ion milling is performed because such adhesion of the magnetic powder must be appropriately removed because the recording characteristics are deteriorated.

In the second ion milling, neutrally ionized Ar (argon) gas is used as in the first ion milling. In this first ion milling, as shown in FIG. 23, ion irradiation is performed from the directions of arrow U and arrow V, and the ion irradiation is performed from the side closer to the horizontal with respect to the lower core layer.

When the ions are irradiated from the directions of the arrows U and V, the upper surface on both sides of the lower core layer 10 extending in the track width direction from the base end is cut off obliquely by the physical action, and the lower core layer 10 is inclined. Surfaces 10a, 10a are formed.

At the same time, in the second ion milling, the upper magnetic pole layer 33, the gap layer 31, and the lower magnetic pole layer 30 are formed.
The magnetic powder adhering to both side surfaces of is removed and removed.

The upper magnetic pole layer 33, the gap layer 31, and the lower magnetic pole layer 30 are formed by the second ion milling.
On both sides of the upper magnetic pole layer 33, and the track width Tw regulated by the width dimension of the upper magnetic pole layer 33 can be further reduced.

However, in the step shown in FIG.
When the gap layer 31 in a region not covered by the upper magnetic pole layer 33 is removed by ion milling, the upper surface of the upper magnetic pole layer is simultaneously ground, and the height of the upper magnetic pole layer 33 is reduced.

In particular, the gap layer 31 formed of an insulating material such as Al ₂ O ₃ or SiO ₂ has a low milling rate.
Accordingly, the time required to grind the gap layer 31 by ion milling becomes long, during which the amount of shaving on the upper surface of the upper pole layer 33 increases, and the height dimension of the upper pole layer 33 decreases. .

As the height of the upper pole layer 33 decreases, the volume of the upper pole layer 33 decreases,
3, magnetic saturation tends to occur.

The height of the resist layer used when plating the upper magnetic pole layer 33 is determined by the upper magnetic pole layer 33.
Is determined in consideration of the amount of shaving of the upper surface of the substrate. If the upper surface of the upper magnetic pole layer 33 has a large shaving amount, the upper magnetic pole layer 33 needs to be formed higher in advance, and the height dimension of the resist layer needs to be increased. However, as the height dimension of the resist layer increases, the dimensional accuracy of exposure and development decreases,
The track width cannot be reduced.

The present invention has been made to solve the above-mentioned conventional problems, and it is intended to suppress the magnetic saturation of the lower layer of the gap layer by plating the gap layer and the upper magnetic pole layer on the upper surface of the Gd determining layer. It is an object of the present invention to provide a magnetic head having a structure capable of performing the above-described operations and a method of manufacturing the same.

[0031]

According to the present invention, there is provided a lower core layer, a gap layer formed on the lower core layer or a lower magnetic pole formed on the lower core layer, and a gap layer formed on the lower core layer. In a magnetic head having an upper magnetic pole layer having a width dimension shorter than the lower core layer and an upper core layer formed on the upper magnetic pole layer, a height direction is higher than a surface facing a recording medium. A Gd determining layer that determines the depth (gap depth) of the height direction of the junction flat surface between the gap layer and the upper pole layer, wherein the gap layer is formed on the lower core layer or the lower layer. The Gd determining layer is formed over the magnetic pole portion, and the upper magnetic pole layer is laminated on the gap layer.

In the present invention, the gap layer and the upper magnetic pole layer are formed from the lower core layer or the lower magnetic pole portion to the Gd determining layer. Then
In particular, when the lower magnetic pole portion is formed on the lower core layer, the area of a region where the lower magnetic pole portion and the lower core layer are magnetically connected increases. Therefore, magnetic saturation in the lower part of the gap layer can be suppressed.

Further, the lower core layer, the lower magnetic pole portion,
When the gap layer, the upper magnetic pole layer, and the upper core layer are made of a material that can be formed by plating, in a manufacturing method of the present invention described below, the lower core layer, the lower magnetic pole portion,
When the gap layer and the upper pole layer are ground using a method such as ion milling, a difference in milling rate can be hardly generated, which is preferable.

That is, the lower core layer, the lower magnetic pole portion, the gap layer, and the upper magnetic pole layer can be accurately processed. Further, a decrease in the volume of the upper magnetic pole layer during milling can be suppressed.

The gap layer is made of, for example, NiP, NiP
d, NiW, NiMo, NiCu, Au, Pt, Rh,
It can be made of the nonmagnetic metal material selected from one or more of Pd, Ru, and Cr.

In the present invention, a plating underlayer made of a conductive material is formed on the lower core layer or the lower magnetic pole portion and the Gd determining layer, and the gap layer and the plating layer are formed on the plating underlayer. Preferably, the upper magnetic pole layer is formed.

The plating underlayer is made of, for example, C
u, Au, Pd, Rh, Ru, Pt, NiLu, Ni
P, NiPd, NiW, NiB, NiMo, Ir, Ni
It can be made of one of Fe and Ni.

Further, when the upper magnetic pole layer is formed using a magnetic material having a higher saturation magnetic flux density than the magnetic material forming the upper core layer, the upper magnetic pole layer is further formed on the gap layer. It is preferable that a closer layer has a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density, because the recording magnetic field can be concentrated near the gap layer and the recording density can be improved.

Further, when the lower magnetic pole portion is laminated on the lower core layer, and the lower magnetic pole portion is formed of a magnetic material having a higher saturation magnetic flux density than a magnetic material forming the lower core layer, Further, when the lower core layer and the lower magnetic pole portion have a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density as the layer is closer to the gap layer, the recording magnetic field is concentrated near the gap layer. This is preferable because the recording density can be improved.

The method of manufacturing a magnetic head according to the present invention comprises the steps of (a)
Forming a lower core layer made of a magnetic material; and (b)
On the lower core layer, at a position away from the surface facing the recording medium of the lower core layer by a predetermined distance in the depth direction in the height direction, a flat surface for joining the gap layer and the upper magnetic pole layer is formed. G that determines the depth (gap depth) in the height direction
forming a d determining layer using a non-magnetic material;
(C) forming a resist layer on the lower core layer and the Gd determining layer; and (d) overlapping a groove near the surface of the resist layer facing the recording medium with the Gd determining layer. (E) plating a gap layer made of a non-magnetic material from above the lower core layer to above the Gd determining layer in the groove portion;
(F) plating the upper pole layer with a magnetic material on the gap layer in the groove, and (g)
Removing the resist layer; (h) forming a coil layer on the back side in the height direction from the Gd determining layer, the gap layer, and the upper pole layer; and (i) forming the coil layer and the coil layer. Forming an upper core layer made of a magnetic material on the upper magnetic pole layer, and magnetically joining the upper core layer and the upper magnetic pole layer, and the upper core layer and the lower core layer. It is a feature.

In the present invention, in the step (b),
The Gd determining layer is formed on the lower core layer, and in the steps (e) and (f), the gap layer and the upper pole layer are formed in a region from the lower core layer to the Gd determining layer. It is formed by plating.

That is, since the length of the lower core layer in the height direction can be extended on the lower surface of the Gd determining layer, magnetic saturation in the lower layer of the gap layer can be suppressed.

In the present invention, in the step (e), the gap layer may be made of, for example, NiP, NiPd, N
iW, NiMo, NiCu, Au, Pt, Rh, Pd,
It can be formed using the nonmagnetic metal material selected from one or more of Ru and Cr.

In the step (e), a plating base layer made of a conductive material is formed in the groove, on the lower core layer and on the Gd determining layer, and on the plating base layer. Preferably, the gap layer is formed.

The plating underlayer is made of, for example, Cu, Au,
Pd, Rh, Ru, Pt, NiLu, NiP, NiP
d, NiW, NiB, NiMo, Ir, NiFe, Ni
It can be formed using any one of the above.

In the present invention, between the steps (g) and (h), (j) particles incident from a normal direction of the surface of the lower core layer at a predetermined angle from the gap layer, It is preferable that the method further includes a step of shaving the upper magnetic pole layer and adjusting a width dimension of the gap layer and the upper core layer to be a track width dimension.

Further, in the present invention, between the step (g) and the step (j), (k) particles incident at a predetermined angle from a normal line direction of the surface of the lower core layer are used. Preferably, the method further includes a step of shaving the surface of the lower core layer and forming a lower magnetic pole portion having a smaller width dimension than the lower core layer below the gap layer.

When the lower magnetic pole portion is formed below the gap layer, the magnetic flux of the recording magnetic field can be concentrated near the gap layer, and the recording density can be improved.

In the present invention, in the step (k), that is, in the step of forming the lower magnetic pole portion below the gap layer, only the lower core layer may be ground, and the gap layer is not ground. Yes. Therefore, the amount of shaving of the upper surface of the upper magnetic pole layer in the step of forming the lower magnetic pole portion can be suppressed, and the height dimension of the upper magnetic pole layer can be suppressed from being reduced. That is, the volume of the upper pole layer can be maintained, and magnetic saturation in the upper pole layer can be suppressed.

Further, if the amount of shaving of the upper surface of the upper magnetic pole layer can be reduced, the necessity of increasing the height of the upper magnetic pole layer immediately after plating is reduced, so that the height of the resist layer can be reduced. Can be reduced. Therefore, the dimensional accuracy of exposure and development of the resist layer is increased, and the track width can be reduced.

Further, if it is possible to prevent a substantial difference in the milling rate between the lower core layer, the gap layer, and the upper magnetic pole layer, in the step (j), the gap layer and the upper The pole layer can be processed accurately, and a magnetic head having a highly accurate track width can be manufactured.

In the step (a), the lower core layer is formed as having a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density as a layer closer to the surface of the lower core layer. In the step (k), when the lower magnetic pole portion is formed so as to have a higher saturation magnetic flux density than the lower core layer, the recording magnetic field can be concentrated near the gap layer to improve the recording density. It is preferred.

Further, in the step (f), when the upper magnetic pole layer is formed using a magnetic material having a larger saturation magnetic flux density than the magnetic material forming the upper core layer, the upper magnetic pole layer is further formed. Even if a layer closer to the gap layer has a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density, the recording magnetic field can be concentrated near the gap layer and the recording density can be improved. Is preferred.

[0054]

FIG. 1 is a partial longitudinal sectional view showing the structure of a magnetic head according to the present invention, and FIG. 2 is a partial front view of the magnetic head shown in FIG. FIG. 1 is a partial cross-sectional view of the magnetic head shown in FIG.

The magnetic head shown in FIG. 1 is an inductive head for recording. In the present invention, a reproducing head (MR head) utilizing the magnetoresistance effect is stacked under the inductive head. Good.

Reference numeral 40 shown in FIGS. 1 and 2 denotes a lower core layer formed of a magnetic material such as permalloy. When a reproducing head is laminated below the lower core layer 40, a shield layer for protecting the magnetoresistive element from noise may be provided separately from the lower core layer 40, or No lower layer, lower core layer 4
0 may function as an upper shield layer of the reproducing head.

As shown in FIGS. 1 and 2, a magnetic core 44 is formed on the lower core layer 40, and the magnetic core 44 is exposed on the surface facing the recording medium. In this embodiment, the magnetic core 44 is a track width regulating portion formed with a track width Tw. The track width Tw is set to 0.
The thickness is preferably 7 μm or less, more preferably 0.5 μm or less.

In the embodiment shown in FIGS. 1 and 2, the magnetic core 44 has a laminated structure of a lower magnetic pole portion 41, a plating underlayer 42a, a gap layer 42, and an upper magnetic pole layer 43. The height direction of the lower magnetic pole portion 41 (Y in the drawing)
Direction) is Gd from the surface facing the recording medium.
It is equal to the distance L2 to the front edge of the determining layer 45.

As shown in FIGS. 1 and 2, the lower magnetic pole portion 4 having a smaller width than the lower core layer 40 is formed on the lower core layer 40 near the surface facing the recording medium.
1 is formed. The lower magnetic pole part 41 includes the lower core layer 4.
0 and magnetically connected. The lower magnetic pole portion 41 may be formed of the same material as the lower core layer 40 or a different material. Further, either a single-layer film or a multilayer film may be used. The height of the lower magnetic pole portion 41 is, for example, about 0.2 to 0.5 μm.

At a position on the lower magnetic pole portion 41 which is away from the surface facing the recording medium by a predetermined distance toward the back in the height direction,
A Gd determining layer 45 made of an insulating material such as a resist is formed. The Gd determining layer 45 is provided behind the gap layer 42 and the upper magnetic pole layer 43. The distance from the surface facing the recording medium to the front edge of the Gd determining layer 45 is L
2.

A non-magnetic gap layer 42 is laminated on the front end face of the Gd determining layer 45 from above the lower magnetic pole portion 41 via a plating underlayer 42a. The gap layer 42 is formed of a non-magnetic metal material, and is formed by plating on the plating underlayer 42a.

The plating underlayer 42a is made of Cu, Au, P
d, Rh, Ru, Pt, NiLu, NiP, NiPd,
It is formed by a film forming process such as a sputtering method using a nonmagnetic metal material such as NiW, NiB, NiMo, and Ir. However, the thickness of the plating base layer 42a is 15 to 30.
Since the magnetic core 44 is very thin, even when formed using a magnetic metal material such as NiFe or Ni, the magnetic characteristics of the magnetic core 44 are not significantly affected.

In this embodiment, NiP is selected as a non-magnetic metal material for forming the gap layer 42,
The content of P in NiP is 11% by mass or more and 14% by mass or less. In this case, the gap layer 42 can be in a non-magnetic state.

Alternatively, if the content of P in the NiP measured by high frequency plasma emission analysis is 12.5% by mass or more and 14% by mass or less,
Even if heat of 0 ° C. or more is applied, the gap layer 42 is more preferable because the nonmagnetic state can be stably maintained.

The gap layer 42 is made of NiP, NiP
d, NiW, NiMo, NiCu, Au, Pt, Rh,
It may be formed of a single-layer film or a multi-layer film of the nonmagnetic metal material selected from one or more of Pd, Ru, and Cr. The height of the gap layer 42 is, for example, about 0.08 to 0.15 μm.

Next, on the gap layer 42, an upper magnetic pole layer 43 that is magnetically connected to an upper core layer 46 described later is formed by plating. The upper magnetic pole layer 43 is formed of the upper core layer 4.
6 may be formed of the same material, or may be formed of a different material. Further, either a single-layer film or a multilayer film may be used. The height of the upper magnetic pole layer 43 is, for example, about 2.0 to 3.0 μm.

As described above, if the gap layer 42 is formed of NiP, which is a metal material, the gap layer 42 and the upper magnetic pole layer 43 can be continuously formed by plating.

In the present invention, the magnetic core 44 is not limited to the above laminated structure. For example, the magnetic core 44 may be formed of a two-layer film including the gap layer 42 and the upper magnetic pole layer 43 without the lower magnetic pole portion 41.

The lower magnetic pole portion 41 and the upper magnetic pole layer 43 constituting the magnetic core 44 may be formed of the same material as or different from the core layer to which the respective magnetic pole layers are magnetically connected. In order to improve the recording density, the lower magnetic pole portion 41 and the upper magnetic pole layer 43 facing the gap layer 42 have a higher saturation magnetic flux density than that of the core layer to which each magnetic pole layer is magnetically connected. It is preferable to have Since the lower magnetic pole portion 41 and the upper magnetic pole layer 43 have high saturation magnetic flux densities, the recording magnetic field can be concentrated near the gap and the recording density can be improved. The lower magnetic pole part 4
When the lower core layer 1 and the lower core layer 40 are formed of the same material and the same member, it is preferable to use a material having a high saturation magnetic flux density.

In FIGS. 1 and 2, the saturation magnetic flux density changes at the boundary A between the lower magnetic pole portion 41 and the lower core layer 40. However, the saturation magnetic flux density may change in the lower magnetic pole portion 41 at a boundary A1 shown by a dashed line, or the lower core layer 40 (the lower core layer 40 in FIGS. 1 and 2).
The saturation magnetic flux density may change at a boundary A2 indicated by a dashed line in the lower layer portion 40d). When the saturation magnetic flux density changes at the boundary line A1 in the lower magnetic pole portion 41, the upper layer portion 40c and the lower layer portion 40c of the lower core layer 40 are changed.
When the saturation magnetic flux density changes at the position where the boundary of d and the boundary line A1 overlap and the boundary line A2 in the lower core layer 40 changes, the boundary between the upper layer portion 40c and the lower layer portion 40d of the lower core layer 40 and the boundary line A2 is the position where they overlap.

The Gd determining layer 45 is such that the distance from the ABS surface gradually increases as the front end surface on the side facing the recording medium (ABS surface) goes upward (in the Z direction in the figure) from above the lower core layer 40. The surface is inclined. The depth (gap depth) of the junction flat surface G between the gap layer 42 and the upper pole layer 43 in the height direction is regulated to L1 by the front end surface of the Gd determining layer 45.

As shown in FIG. 1, the upper magnetic pole layer 43 and the Gd
The contact surface with the determining layer 45 is formed so as to gradually become deeper in the height direction than the gap depth toward the upper core layer 46 located above (in the Z direction in the drawing). That is, the length from the front end surface of the Gd determining layer 45 to the ABS surface becomes longer toward the upper core layer 46 direction (Z direction in the drawing).

As shown in FIG. 1, the upper magnetic pole layer 43 has a rear end portion on the height direction side (Y direction in the drawing) having a Gd determining layer 45.
On the curved surface. That is, the area of the joint surface between the upper core layer 46 and the upper core layer 46 that is magnetically connected on the upper magnetic pole layer 43 is larger than (gap depth × track width Tw). Therefore, the upper core layer 4
6 can be suppressed from being constricted at the joint surface, and the magnetic flux easily flows inside the upper magnetic pole layer 43, so that the magnetic flux is saturated before reaching the gap layer 42. Can be prevented.

That is, in the present embodiment, the leakage magnetic flux can be reliably generated from around the gap layer 42, and accurate recording can be performed even when the recording frequency is increased.

In order to increase the leakage magnetic flux around the gap layer 42, the area of the gap layer 42 should be as small as possible. In this embodiment, the length dimension of the upper surface of the gap layer 42 (the flat surface G bonded to the upper pole layer 43) from the front end surface of the Gd determining layer 45 to the surface facing the recording medium (ABS surface) is L1. Is regulated as follows:
The area of the gap layer 42 does not become too large.

In the present embodiment, the gap layer 42 and the upper magnetic pole layer 43 are separated from the lower magnetic pole portion 41 by the Gd determining layer 45.
It is plated over. As shown in FIG. 1, in the present embodiment, lower magnetic pole portion 41 is not only magnetically connected to lower core layer 40 on its lower surface, but also on lower side in the height direction.
(In FIG. 1, the upper layer portion 40c of the lower core layer 40). That is, the area of the region where the lower magnetic pole portion 41 and the lower core layer 40 are magnetically connected increases. Therefore, magnetic saturation in the lower part of the gap layer can be suppressed.

The lower core layer 40, the lower magnetic pole 41,
Since the gap layer 42 and the upper magnetic pole layer 43 are made of a material that can be formed by plating, in the manufacturing method of the present invention described below,
When the lower core layer 40, the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43 are ground using a milling method such as ion milling, a difference in the milling rate hardly occurs.

Therefore, the lower core layer 40 and the lower magnetic pole 4
1. The gap layer 42 and the upper pole layer 43 can be accurately processed. Further, since a decrease in the volume of the upper pole layer 43 during milling can be suppressed, magnetic saturation in the upper pole layer 43 can also be prevented.

As shown in FIG. 1, the height of the magnetic core 44 is
On the lower core layer 40 in the rear direction (Y direction in the drawing).
Indicates that the coil layer 49 is spirally wound with the insulating base layer 48 interposed therebetween.
Is formed. The insulating base layer 48 is made of, for example, AlO,
Al_TwoO_Three, SiO_Two, Ta_TwoO _Five, TiO, AlN, Al
SiN, TiN, SiN, Si_ThreeN_Four, NiO, WO, W
O_ThreeBN, CrN, SiON
It is preferably formed of an insulating material made of such a material.

Further, the gap between the conductors of the coil layer 49 is filled with an insulating layer 50. Insulating layer 50
Represents AlO, Al ₂ O ₃ , SiO ₂ , Ta ₂ O ₅ , TiO,
AlN, AlSiN, TiN, SiN, Si ₃ N ₄ , Ni
It is preferable to be selected from at least one of O, WO, WO ₃ , BN, CrN, and SiON.

As shown in FIG. 2, the insulating layer 50 is formed on both sides of the magnetic core 44 in the track width direction (the X direction in the drawing), and the insulating layer 50 is formed on the surface facing the recording medium.

As shown in FIG. 1, the second
Is spirally wound.

As shown in FIG. 1, the second coil layer 53
Is covered with an insulating layer 52 made of an organic material such as a resist or polyimide.
The upper core layer 46 made of an alloy or the like is patterned by, for example, a frame plating method.

As shown in FIG. 1, the distal end 46a of the upper core layer 46 is magnetically connected to the upper magnetic pole layer 43, and the proximal end 46b of the upper core layer 46 is connected to the lower core layer 40. It is formed on a lifting layer 56 made of a magnetic material such as a NiFe alloy on the upper side so as to be magnetically connected. The lifting layer 56 may not be formed. In this case, the base end 46b of the upper core layer 46 is directly connected to the lower core layer 40.

In the magnetic head shown in FIG. 1, two coil layers are laminated, but two or more coil layers may be laminated, or a single layer may be formed. When the coil layer is formed as a single layer, for example, on the lower core layer 40, the rear of the magnetic core 44 in the height direction is filled with the insulating layer 50, and the coil layer is formed on the insulating layer 50. . Alternatively, the second coil layer 53 shown in FIG. 1 is not formed, and the upper core layer 46 is formed along the insulating layer 50. When two or more coil layers are stacked, the distance from the surface facing the recording medium to the lifting layer 56 is shortened, and the inductance is reduced by setting the short magnetic path length.
Recording characteristics during high-frequency recording can be improved.

Further, the tip end surface 46c of the upper core layer 46 is
It is not exposed on the surface facing the recording medium, but is formed to recede in the height direction (Y direction in the figure) from the surface facing the recording medium. Tip surface 46c of the upper core layer 46
Is formed so as to recede from the surface facing the recording medium in the height direction, thereby making it possible to appropriately reduce the occurrence of side fringing, and to manufacture a magnetic head capable of coping with a future increase in recording density. can do.

However, the tip end surface 46c of the upper core layer 46 may be exposed on the surface facing the recording medium.

As shown in FIG. 1, the tip end surface 46c of the upper core layer 46 gradually increases in the height direction (Y direction in the figure) from the lower core layer 40 side to the upper core layer 46 side (Z direction in the figure). It may be formed by an inclined surface or a curved surface that becomes deep.

When the tip surface 46c is formed as a curved surface that gradually becomes deeper in the height direction from the lower core layer 40 side to the upper core layer 46 side, the curved surface may be formed in a convex shape or a concave shape. It may be formed in a shape.

Further, a tip end surface 46c of the upper core layer 46 is formed.
May be formed in a curved shape that gradually recedes in the height direction as it goes in the track width direction.

When the tip surface 46c of the upper core layer 46 is formed in a curved shape in the track width direction, there is no corner between the tip surface 46c and the side surface, and magnetic flux leakage between the upper core layer 46 and the upper pole layer 43 is reduced. Further, it is possible to further reduce the occurrence of side fringing.

However, the tip surface 46c of the upper core layer 46
May be formed in a plane parallel to a surface facing the recording medium.

As shown in FIG. 2, insulating layers 55 are formed on both sides of lower core layer 40. Also, as shown in FIG.
The upper surface 40a of the lower core layer 40 extending from the base end of the lower magnetic pole portion 41 may be formed so as to extend in a direction parallel to the track width direction (X direction in the drawing).
The inclined surfaces 40b, 40b which are inclined in a direction away from 6 may be formed. The inclined surface 4 is provided on the upper surface of the lower core layer 40.
By forming Ob and 40b, occurrence of side fringing can be reduced more appropriately.

As shown in FIG. 2, the width of the upper core layer 46 at the end joined to the upper magnetic pole layer 43 is larger than the width of the upper magnetic pole layer 43 in the track width direction. You can see that. Thereby, the magnetic flux from the upper core layer 46 can efficiently flow to the upper magnetic pole layer 43, and the recording characteristics can be improved.

In the portion where the upper core layer 46 and the magnetic core 44 overlap, the width of the upper core layer 46 in the track width direction is about 2 to 2.5 times the width of the magnetic core 44 in the track width direction. Preferably, there is. Within this range, when the upper core layer 46 is formed on the magnetic core 44, the upper surface of the magnetic core 44 can easily be reliably overlapped within the width dimension of the upper core layer 46. The magnetic flux can efficiently flow through the upper magnetic pole layer 43.

FIG. 3 is a partially enlarged cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a second embodiment of the present invention.

In the magnetic head shown in FIG. 3, the lower core layer 40 and the lower magnetic pole portion 41 are formed using magnetic materials having different compositions. The saturation magnetic flux density of the magnetic material used for forming the lower magnetic pole portion 41 is higher than the saturation magnetic flux density of the magnetic material used for forming the lower core layer 40.

Further, the lower magnetic pole portion 41 is formed as a laminate of two layers having different saturation magnetic flux densities, that is, a first lower magnetic pole portion 41a and a second lower magnetic pole portion 41b. The second lower magnetic pole portion 41b near the gap layer 42 is formed using a magnetic material having a higher saturation magnetic flux density than the first lower magnetic pole portion 41a.

The length dimension of the lower magnetic pole portion 41 in the height direction (Y direction in the drawing) is set at G from the surface facing the recording medium.
It is equal to the distance to the front edge of the d determining layer 45. The upper core layer 57 and the upper pole layer 43 are formed using magnetic materials having different compositions. The saturation magnetic flux density of the magnetic material used to form the upper magnetic pole layer 43 is
Is larger than the saturation magnetic flux density of the magnetic material used to form.

Further, the upper magnetic pole layer 43 is formed as a laminate of two layers having different saturation magnetic flux densities, that is, a first upper magnetic pole layer 43a and a second lower magnetic pole portion 43b. The first upper magnetic pole layer 43a at a position near the gap layer 42 is formed using a magnetic material having a higher saturation magnetic flux density than the second upper magnetic pole layer 43b.

The magnetic head according to the present embodiment has a gap layer 4
2, the saturation magnetic flux density increases. Accordingly, the magnetic flux density of the magnetic flux flowing through the upper core layer 57 and the upper magnetic pole layer 43 and the magnetic flux flowing through the lower core layer 40 and the lower magnetic pole portion 41 is as follows.
It becomes higher as approaching the gap layer 42, and the leakage flux generated near the gap layer 42 also increases. That is,
It is possible to provide a magnetic head that can cope with high recording density.

In the present embodiment, the upper core layer 57
Is formed to be exposed on the surface facing the recording medium. However, similarly to FIG. 1, the front end surface 57c does not need to be exposed and formed on the surface facing the recording medium.

Behind the magnetic core 44, a Gd determining layer 45 made of an organic insulating material such as a resist is formed. The Gd determining layer 45 has a surface facing the recording medium (ABS).
The front end surface on the (surface) side is a curved surface that is inclined such that the distance from the ABS surface gradually increases as it goes upward (in the Z direction in the figure) from above the lower core layer 40. Gap layer 42
And the depth (gap depth) of the junction flat surface G of the first upper magnetic pole layer 43a in the height direction is regulated to L1 by the front end surface of the Gd determining layer 45.

The gap layer 42 is made of NiP, NiP
d, NiW, NiMo, NiCu, Au, Pt, Rh,
It is formed of a single-layer film or a multilayer film of the non-magnetic metal material selected from one or more of Pd, Ru, and Cr.

Also in this embodiment, the gap layer 42 and the upper magnetic pole layer 43 are separated from the lower magnetic pole portion 41 by the Gd determining layer 45.
The upper portion is formed by plating via a plating base layer 42a. As shown in FIG. 3, in the present embodiment, lower magnetic pole portion 41 has lower core layer 4 on its lower surface.
Not only is it magnetically connected to the lower core layer 40 but also on the side surface on the far side in the height direction. That is, the area of the region where the lower magnetic pole portion 41 and the lower core layer 40 are magnetically connected increases. Therefore,
Magnetic saturation in the lower part of the gap layer can be suppressed.

The lower core layer 40, the lower magnetic pole 41,
Since the gap layer 42 and the upper magnetic pole layer 43 are made of a material that can be formed by plating, in the manufacturing method of the present invention described below,
When the lower core layer 40, the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43 are ground using a method such as ion milling, a difference in milling rate hardly occurs.

Therefore, the lower core layer 40 and the lower magnetic pole 4
1. The gap layer 42 and the upper pole layer 43 can be accurately processed. Further, since a decrease in the volume of the upper pole layer 43 during milling can be suppressed, magnetic saturation in the upper pole layer 43 can also be prevented.

The lower magnetic pole portion 41 and the upper magnetic pole layer 43
May be formed as a stack of three or more layers whose saturation magnetic flux density increases as approaching the gap layer 42.

FIG. 4 is a partially enlarged cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a third embodiment of the present invention.

In the magnetic head shown in FIG. 4, a Gd determining layer 45 made of an organic insulating material such as a resist is formed on the lower core layer 40 behind the magnetic core 44. The magnetic head shown in FIG.
3 differs from the magnetic head shown in FIG. 3 in that the lower magnetic pole portion is not formed.

In this embodiment, the gap layer 42 and the upper magnetic pole layer 43 are formed on the lower core layer 40 from the Gd determining layer 45.
The upper portion is formed by plating via a plating base layer 42a. As shown in FIG. 4, in the present embodiment, the lower layer of the plating underlayer 42a is a lower core layer having a large volume. Accordingly, magnetic saturation in the lower layer portion of the gap layer 42 can be suppressed.

The Gd determining layer 45 is such that the distance from the ABS surface gradually increases as the front end surface on the surface (ABS surface) facing the recording medium goes upward from above the lower core layer 40 (Z direction in the drawing). The surface is inclined. The depth (gap depth) of the junction flat surface G between the gap layer 42 and the upper pole layer 43 in the height direction is regulated to L1 by the front end surface of the Gd determining layer 45.

The gap layer 42 is made of NiP, NiP
d, NiW, NiMo, NiCu, Au, Pt, Rh,
It is formed of a single-layer film or a multilayer film of the non-magnetic metal material selected from one or more of Pd, Ru, and Cr.

The lower core layer 40, the gap layer 42,
Since the upper magnetic pole layer 43 is made of a material that can be plated,
In the manufacturing method of the present invention described below, the lower core layer 40,
When the gap layer 42 and the upper magnetic pole layer 43 are ground using a method such as ion milling, a difference in milling rate hardly occurs.

Therefore, the lower core layer 40, the gap layer 4
2. The upper magnetic pole layer 43 can be processed accurately. Further, since a decrease in the volume of the upper pole layer 43 during milling can be suppressed, magnetic saturation in the upper pole layer 43 can also be prevented.

In this embodiment, the upper core layer 57
Is formed to be exposed on the surface facing the recording medium. However, similarly to FIG. 1, the front end surface 46c does not have to be exposed and formed on the surface facing the recording medium.

In the magnetic head shown in FIGS. 1 to 4,
The plating base layer 42a is formed from the lower magnetic pole portion 41 or the lower core layer 40 to the front end face of the Gd determining layer 45. That is, the plating base layer 42a is formed only in a region where the gap layer 42 and the upper pole layer 43 are stacked. However, as in the magnetic head according to the fourth embodiment of the present invention shown in FIG. 5, the plating underlayer 42a extends from the lower magnetic pole portion 41 to the entire surface of the Gd determining layer 45 and further to the coil layer (FIG. (Not shown).

In the present invention, a plating underlayer is not necessarily required to form the gap layer 42 and the upper magnetic pole layer 43 by plating.

In the magnetic head according to the fifth embodiment of the present invention shown in FIG. 6, the Gd determining layer 58 is formed of a non-magnetic metal material such as Cu. Therefore, the gap layer 42 is directly formed on the lower magnetic pole portion 41 and the Gd determining layer 58.
In addition, the upper magnetic pole layer 43 can be formed by plating. Note that a plating underlayer may be formed on the lower surface of the upper magnetic pole layer 43.

In the present invention, the Gd determining layer can be formed using an inorganic material. The sixth embodiment of the present invention shown in FIG.
In the magnetic head according to the embodiment, the Gd determining layer 59 is formed of an inorganic insulating material such as SiO ₂ or Al ₂ O ₃ .

The Gd determining layer 59 made of an inorganic insulating material is arranged such that the front end surface on the side facing the recording medium (ABS surface) moves upward from above the lower core layer 40 (Z direction in the drawing). It is an inclined surface whose distance from the surface gradually increases. The depth (gap depth) of the junction flat surface G between the gap layer 42 and the upper magnetic pole layer 43 in the height direction is regulated to L1 by the front end surface of the Gd determining layer 43.

When the Gd determining layer 59 is formed of an inorganic insulating material, the processing of the Gd determining layer 59 can be performed accurately, and a change in the gap depth L1 and the thickness of the gap layer 42 can be suppressed.

In the present invention, even if the Gd determining layer is formed by using an organic insulating material, the Gd determining layer 5 shown in FIG.
9, the surface facing the recording medium (ABS
As the front end surface on the (surface) side goes upward from above the lower core layer 10 (in the Z direction in the drawing), a Gd determining layer can be formed that becomes an inclined surface whose distance from the ABS surface gradually increases.

In the magnetic head shown in FIGS. 5 to 7, the tip end surface 57c of the upper core layer 57 is exposed on the surface facing the recording medium. However, similarly to FIG. 1, the front end surface 57c does not need to be exposed and formed on the surface facing the recording medium.

In the magnetic heads shown in FIGS. 5 to 7, also in the gap layer 42, NiP, NiPd, NiW, N
iMo, NiCu, Au, Pt, Rh, Pd, Ru, C
It is formed of a single-layer film or a multilayer film of the nonmagnetic metal material selected from one or more of r.

In the magnetic head shown in FIGS. 5 to 7,
The gap layer 42 and the upper magnetic pole layer 43 are
The plating is formed on the Gd determining layer 45 from above. The lower magnetic pole portion 41 has a lower core layer 4 on its lower surface.
In addition to being magnetically connected to the lower core layer 40, it is also magnetically connected to the lower core layer 40 (the upper layer portion 40c of the lower core layer 40 in FIGS. 5 to 7) on the side surface on the far side in the height direction. That is, the area of the region where the lower magnetic pole portion 41 and the lower core layer 40 are magnetically connected increases. Therefore,
Magnetic saturation in the lower part of the gap layer can be suppressed.

Also in the magnetic head shown in FIGS. 5 to 7, the lower core layer 40, the lower magnetic pole portion 41, the gap layer 4
2. Since the upper magnetic pole layer 43 is made of a material that can be formed by plating, the lower core layer 4
0, lower magnetic pole 41, gap layer 42, upper magnetic pole 43
When grinding using methods such as ion milling,
There is little difference in milling rate.

Therefore, the lower core layer 40 and the lower magnetic pole 4
1. The gap layer 42 and the upper pole layer 43 can be accurately processed. Further, since a decrease in the volume of the upper pole layer 43 during milling can be suppressed, magnetic saturation in the upper pole layer 43 can also be prevented.

In the magnetic head according to the embodiment of the present invention shown in FIGS. 1 to 7 described above, the gap layer 42 is formed using a non-magnetic metal material which can be formed by plating.
However, in the present invention, the gap layer 42 is made of Al ₂ O ₃
It may be formed by using a non-magnetic insulating material such as or SiO _2. In this case, the Gd determining layer 4 is formed on the lower core layer 40.
After forming 5, 58, 59, the lower core layer 40 and Gd
The gap layer 42 is formed on the determining layers 45, 58, and 59 by a sputtering method using a nonmagnetic insulating material. Further, a plating underlayer is formed on the gap layer 42, a resist layer is patterned, and the upper magnetic pole layer 43 is formed by plating.

The gap layer 4 is located on the lower core layer 40 and deeper than the Gd determining layers 45, 58, 59 in the height direction.
2 may be extended to serve as an insulating layer for insulating the lower core layer 40 and the coil layer 49.

The depth (gap depth) in the height direction of the flat junction surface between the gap layer 42 and the upper magnetic pole layer 43 is as follows:
It is regulated by the front end surfaces of the Gd determining layers 45, 58, 59.

Even in a magnetic head in which the gap layer 42 is formed using a nonmagnetic insulating material, the gap layer 42 and the upper magnetic pole layer 43 are formed from the lower magnetic pole portion 41 or the lower core layer 40 on the Gd determining layers 45, 58, 59. The magnetic saturation in the lower layer of the gap layer 42 can be suppressed.

FIGS. 8 to 19 are a series of manufacturing process charts for explaining a method of manufacturing a magnetic head according to the present invention.

In the step shown in FIG. 8, a Gd determining layer 45 made of an ultraviolet curable resin or the like is formed on a predetermined portion of the lower core layer 40 made of a magnetic material. The lower core layer 40 has a structure in which an upper layer 40c and a lower layer 40d are stacked. The magnetic material forming the upper layer portion 40c is:
The saturation magnetic flux density is higher than the magnetic material forming the lower layer portion 40d. Note that the lower core layer 40 may be formed as a single-layer structure having a high saturation magnetic flux density.

For example, the Gd determining layer 45 is formed by forming a resist layer made of an ultraviolet curable resin into a rectangular shape as shown in FIG. 8 and then performing post-baking (heat treatment) to cause the resist layer to droop. As shown in FIG. 9, the lower core layer 4 is formed on the front end face of the Gd determining layer 45 formed of the resist layer.
A curved surface is formed which is inclined so as to gradually move away from the surface (ABS surface) facing the recording medium from 0 in the Z direction in the figure. After the heat treatment, the Gd determining layer 45 is irradiated with ultraviolet rays to be cured. In addition, from the front end face of the Gd determining layer 45, A
The length L1 of the portion where the junction flat surface of the upper pole layer and the gap layer up to the BS surface is to be formed, and the gap depth G
d is determined. Note that the total length Ld of the Gd determining layer is 3.0.
６6.0 μm.

Next, the lower core layer 40 and the Gd determining layer 45
A plating underlayer 42a is formed thereon by using a sputtering method or the like. Further, a resist layer 61 is applied and formed on the lower core layer 40 as shown in FIG. The Gd determining layer 4 has a predetermined length dimension in the track width direction (the X direction in the drawing).
The groove 6 formed with a predetermined width smaller than the width of the groove 5
1a is formed. The groove 61a is formed at a position overlapping the front end face of the Gd determining layer 45. The plating base layer 42a is exposed inside the groove 61a.

Next, the gap layer 42 and the upper pole layer 4
3 is continuously formed by plating. The plating underlayer 42a, the gap layer 42, and the upper magnetic pole layer 43 are
The layers are stacked from above on the Gd determining layer 45.

In the process of FIG. 10, the thickness t1 of the plating base layer 42a is 15 to 30 nm, the thickness t2 of the gap layer 42 is 0.15 μm, and the thickness t3 of the upper pole layer 43 is 4.0 μm. It is. The rear end of the plating base layer 42a, the rear end of the gap layer 42, and the rear end of the upper pole layer 43 are stacked on the Gd determining layer 45, and the rear ends of these layers rise in the Z direction in the figure. .

The thickness t4 of the resist layer 61 must be at least larger than the sum of the thicknesses of the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43 in the completed magnetic head shown in FIG. Must. In the present embodiment, the thickness dimension t4 of the resist layer 61 is 4.
5 to 5.5 μm.

The plating underlayer 42a is made of, for example, Cu, A
u, Pd, Rh, Ru, Pt, NiLu, NiP, Ni
Pd, NiW, NiB, NiMo, Ir, NiFe, N
i can be formed.

The non-magnetic metal material which can be formed by plating to form the gap layer 42 includes NiP, NiPd, NiW, N
iMo, NiCu, Au, Pt, Rh, Pd, Ru, C
It is preferable to select one or more of r.

When the nonmagnetic metal material for forming the gap layer 42 is NiP, in order to make the gap layer 42 a nonmagnetic layer, P of NiP measured by high-frequency plasma emission analysis is used. It is preferable that the content be 11% by mass or more and 14% by mass or less.

When the content of P in NiP measured by high-frequency plasma emission analysis is set to 12.5% by mass or more and 14% by mass or less, NiP is not affected by heat treatment at 200 ° C. or more. It is more preferable because the magnetic state is stably maintained.

When the magnetic head shown in FIG. 3 is manufactured, the upper magnetic pole layer 43 is formed as a two-layer film composed of the first upper magnetic pole layer 43a and the second upper magnetic pole layer 43b. When the first upper magnetic pole layer 43a is formed of a magnetic material having a higher saturation magnetic flux density than the second upper magnetic pole layer 43b, and the upper magnetic pole layer 43 is formed as a multilayer film having a higher saturation magnetic flux density as being closer to the gap layer 42, It is easy to concentrate the magnetic flux flowing from the core layer 57 in the vicinity of the gap, and it is possible to improve the recording density. Also,
The upper magnetic pole layer 43 may be formed as a multilayer film of three or more layers.

After the gap layer 42 and the upper magnetic pole layer 43 are formed by plating, the resist layer 61 is removed. After removing the resist layer 61, a new resist layer is formed on the lower core layer 40, the upper magnetic pole layer 43, and the Gd determining layer 45 by coating. At the rear end of the newly formed resist layer in the height direction (Y direction in the drawing), a hole is formed by exposure and development. In this hole, a lift layer 56 made of a magnetic material is formed by plating.

The step shown in FIG. 11 shows a state in which the resist layer is removed, and the plating underlayer 42a in a region not covered by the upper magnetic pole layer 43 and the gap layer 42 is removed by etching. On the upper side, a plating underlayer 42a, a gap layer 42, and an upper magnetic pole layer 43 are laminated near a surface which is a surface facing the recording medium (ABS surface), and is located in a position away from the surface which becomes the ABS surface in a height direction. A lifting layer 56 is formed.

Next, the lower core layer 40 is ground by ion milling to form the lower magnetic pole portion 41. Steps of forming the lower magnetic pole portion 41 are shown in FIGS. FIG.
Process drawings shown in FIGS. 2 to 14 are partial front views of the magnetic head.

FIG. 12 is a partial front view of the magnetic head in the step shown in FIG. As can be seen from FIG.
The dimension of the determining layer 45 in the track width direction is larger than the dimension of the gap layer 42 and the upper magnetic pole layer 43 in the track width direction.

In the step shown in FIG. 13, the upper portion 40c of the lower core layer 40 on both sides in the track width direction from the region covered by the upper magnetic pole layer 43 is cut by the first ion milling.

In the first ion milling, neutrally ionized Ar (argon) gas is used. This first
In ion milling, ion irradiation is performed from the direction of arrow S and the direction of arrow T, and the angle θ1 of this ion irradiation is preferably in the range of 0 to 40 °. That is,
In the first ion milling in this step, the upper surface of the lower core layer 41 is irradiated with ions from a direction nearly perpendicular. As a result, a step is formed substantially at right angles in the upper layer portion 40c of the lower core layer 40, and a protrusion having a width substantially equal to the width of the upper pole layer 43 is formed below the gap layer 42. The portion becomes the lower magnetic pole portion 41.

In this embodiment, the first ion milling is performed up to the boundary 40e between the upper layer 40c and the lower layer 40d of the lower core layer 40. Accordingly, the saturation magnetic flux density changes at the boundary A between the lower magnetic pole portion 41 and the lower core layer 40.

When the first ion milling is performed deeper than the boundary line 40e between the upper layer portion 40c and the lower layer portion 40d of the lower core layer 40, the boundary indicated by the chain line in the lower magnetic pole portion 41 in FIGS. A magnetic head whose saturation magnetic flux density changes at the line A1 is obtained.

Further, the first ion milling is performed on the lower core layer 4.
0 and the lower core layer 40d in FIG. 1 and FIG.
In FIG. 1 and FIG. 2, a magnetic head whose saturation magnetic flux density changes at a boundary A2 indicated by a dashed line is obtained.

When the lower core layer 40 has a single-layer structure having a high saturation magnetic flux density, the lower core layer 40 and the lower magnetic pole portion 41 have the same saturation magnetic flux density.

The front shape of the lower magnetic pole portion 41 changes depending on the ion irradiation angle θ1 in the first ion milling. When the ion irradiation angle θ1 is performed by a substantially vertical method, the front surface of the lower magnetic pole portion 41 is changed. Although the shape is a rectangular shape, when the ion irradiation angle θ1 has a certain angle, both side surfaces of the lower magnetic pole portion 41 are inclined surfaces, and the front shape of the lower magnetic pole portion 41 is more basic than the upper surface. A trapezoidal shape with a large end width is used.

Although not shown, the upper layer portion 4 of the lower core layer 40, which has been removed by the first ion milling, is not shown.
The magnetic powder of 0c adheres to both sides of the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43.

Such adhesion of the magnetic powder must be appropriately removed because it degrades the recording characteristics, and furthermore, the inclined surfaces 40b, 40 effective for suppressing the write fringing.
Second ion milling is performed to form b in the lower core layer 40.

In the second ion milling, neutral ionized Ar (argon) is used as in the first ion milling.
Gas is used. In this secondary ion milling, as shown in FIG. 14, ion irradiation is performed from the direction of arrow U and the direction of arrow V. The angle θ2 of this ion irradiation is 5
Preferably it is in the range of 0 ° to 75 °. That is, the first ion milling (the ion irradiation angle θ1 is 0 °
The ions are irradiated from a more oblique direction as compared with (deg) to 40 ° (deg).

When ions are irradiated from the directions of arrows U and V, the upper surface on both sides of the lower core layer 40 extending in the track width direction from the base end of the lower magnetic pole portion 41 is slanted off by a physical action. Inclined surface 40 on core layer 40
b, 40b are formed.

At the same time, in the second ion milling,
Magnetic powder attached to both side surfaces of the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43 is scraped off and removed. By removing the magnetic powder, no magnetic short circuit occurs between the upper magnetic pole layer 43 and the lower magnetic pole portion 41.

In the present invention, both sides of the upper magnetic pole layer 43 are also shaved by the primary ion milling and the secondary ion milling, and the track width Tw regulated by the width dimension of the upper magnetic pole layer 43 becomes smaller. It is possible to manufacture a magnetic head capable of coping with the narrowing of the track in increasing the recording density.

In the present embodiment, in the first ion milling step shown in FIG. 13, upper layer portion 40c of lower core layer 40 is formed in a region other than the region covered by gap layer 42 and upper pole layer 43. All have been removed. Then, as shown in FIGS. 1 and 2, the lower core layer 40 and the lower magnetic pole portion 41 of the completed magnetic head are formed of magnetic materials having different compositions. Since the saturation magnetic flux density of the magnetic material forming the lower magnetic pole portion 41 is larger than the saturation magnetic flux density of the magnetic material forming the lower core layer 40, the recording magnetic field is concentrated near the gap layer 42,
It is possible to improve the recording density.

In the steps shown in FIGS. 13 and 14, in order to form the lower magnetic pole portion 41 below the gap layer 42, only the lower core layer 40 needs to be ground, and the gap layer 42 does not need to be ground. . Therefore, the amount of shaving of the upper surface of the upper magnetic pole layer 43 in the step of forming the lower magnetic pole portion 41 can be suppressed, and the height dimension of the upper magnetic pole layer 43 can be suppressed from being reduced. That is, the volume of the upper pole layer 43 can be maintained, and magnetic saturation in the upper pole layer 43 can be suppressed.

In the present embodiment, for example, the height t5 of the upper magnetic pole layer 43 after the step shown in FIG. 14 is reduced by 0.7 μm from the height before ion milling.
It is 3 μm. In the above-described conventional method of manufacturing a magnetic head, the present invention provides a method of manufacturing the upper magnetic pole layer 43 in comparison with a case where the height of the upper magnetic pole layer after the end of the ion milling is 1.5 μm smaller than before the ion milling. It can be seen that the effect of reducing the amount of shaving on the upper surface of is high.

Further, if the amount of shaving on the upper surface of the upper magnetic pole layer 43 can be reduced, the necessity of increasing the height dimension of the upper magnetic pole layer 43 immediately after plating is reduced.
The height dimension of the resist layer 61 in the process shown in FIG. Therefore, the dimensional accuracy of exposure and development of the resist layer 61 is increased, and the track width can be reduced.

Further, the lower core layer 40 and the lower magnetic pole portion 4
1, the gap layer 42 and the upper magnetic pole layer 43 are formed using a material that can be formed by plating.
0, a substantial difference in milling rate between the lower magnetic pole portion 41, the gap layer 42, and the upper magnetic pole layer 43 can be prevented. Therefore, in the step shown in FIG. 14, the gap layer 42 and the upper magnetic pole layer 43 can be accurately processed,
A magnetic head having a highly accurate track width dimension Tw can be manufactured.

The lower magnetic pole portion 4 after the step shown in FIG.
The height t6 of 1 is, for example, 0.30 μm.

FIG. 15 is a partial longitudinal sectional view of the magnetic head in the step shown in FIG. 12, and FIG. 16 is a partial perspective view of the magnetic head in the step shown in FIG. In FIG. 16, the lower magnetic pole portion 41 is formed in a region below the plating base layer 42a from the surface facing the recording medium to the front edge of the Gd determining layer 45. Next, in the step shown in FIG. 17, the lower core layer 4
An insulating base layer 48 made of an insulating material is formed by sputtering from above the zero and further from the lifting layer 56 in the height direction.

Then, as shown in FIG.
A coil layer 49 is spirally patterned thereon. The coil layer 49 is formed so that the magnetic core 44 is located closer to the lower core layer 40 than the bonding surface 44a shown in FIG.

Next, in the step shown in FIG.
The upper part is covered with an insulating layer 50. At this time, the insulating layer 50 also covers the magnetic core 44 and the lifting layer 56.

In this embodiment mode, the insulating layer 50 is formed by sputtering with an inorganic material. The inorganic material includes Al
It is preferable to select one or more of ₂ O ₃ , SiN, and SiO ₂ .

Then, as shown in FIG. 18, the surface of the insulating layer 50 is polished by using the CMP technique or the like, and the magnetic core 44 is polished.
To the BB line where the surface is exposed. FIG. 19 shows this state. In the present embodiment, the surface of the coil layer 49 is not exposed on the same plane as the surface of the insulating layer 50. The height dimension t6 of the upper magnetic pole layer 43 after the CMP is 2.
1 μm.

The insulating layer 50 is formed by the above-described CMP method.
Is flattened and formed on the same plane as the joint surface 44a of the magnetic core 44.

Next, as shown in FIG.
The second coil layer 53 is spirally patterned on the zero. The first coil layer 49 and the second coil layer 53 are electrically connected to each other via respective winding central portions. Further, the second coil layer 53 is covered with an insulating layer 52 formed of an organic insulating material such as a resist or polyimide, and the upper core layer 46 is patterned on the insulating layer 52 by an existing method such as a frame plating method. I do.

As shown in FIG. 20, the upper core layer 46 is formed in contact with the magnetic core 44 at its tip end 46a.
Further, it is formed at the base end portion 46b in magnetic contact with the lifting layer 56 formed on the lower core layer 40.

When the magnetic head of FIG. 3 is formed, the lower core layer 40 is formed as having a three-layer structure having different saturation magnetic flux densities in the step shown in FIG.
In the steps shown in FIG. 3 and FIG. 14, ion milling is performed for an appropriate milling time to form the lower magnetic pole portion 41 having the first lower magnetic pole portion 41a and the second lower magnetic pole portion 41b.

Further, when forming the magnetic head of FIG. 4, the steps shown in FIGS. 13 and 14 can be omitted.

In forming the magnetic head of FIG. 5, in the step shown in FIG. 9, after forming the Gd determining layer 45 on the lower core layer 40, the lower core layer 40 and the Gd determining layer 45 are formed.
A plating base layer 42a is formed on the
A gap layer 42 and an upper magnetic pole layer 43 are formed by plating by laminating a resist layer on 2a, and a region of the plating base layer 42a located on the back side in the height direction of the Gd determining layer 45 is left.

In the step shown in FIG. 9, when the Gd determining layer 58 is formed on the lower core layer 40 using a non-magnetic metal material such as Cu, the gap layer 42 and the upper magnetic pole can be formed without forming a plating underlayer. The layer 43 can be continuously plated to form the magnetic head of FIG.

When forming the magnetic head shown in FIG. 7, in the step shown in FIG. 8, the Gd determining layer 59 having the shape shown in FIG. 7 is formed by patterning using an inorganic insulating material.

[0181]

According to the magnetic head of the present invention described in detail above, the height direction of the flat junction surface between the gap layer and the upper magnetic pole layer is located deeper in the height direction than the surface facing the recording medium. Gd that determines the depth (gap depth) of
A determining layer is provided, and the gap layer and the upper magnetic pole layer are formed from the lower core layer or the lower magnetic pole portion to the Gd determining layer, so that the lower surface of the gap layer has a large volume. Magnetically connected to the lower core layer, or when the lower magnetic pole portion is formed on the lower core layer, the lower magnetic pole portion is magnetically connected to the lower core layer on a lower surface thereof. Not only that, but also on the side face on the back side in the height direction, it is magnetically connected to the lower core layer. That is, the area of the region where the lower magnetic pole portion and the lower core layer are magnetically connected increases.

Accordingly, magnetic saturation in the lower layer of the gap layer can be suppressed. Moreover, since the lower core layer, the lower magnetic pole portion, the gap layer, the upper magnetic pole layer, and the upper core layer are made of a material that can be formed by plating, the lower core layer, the lower magnetic pole portion, the gap layer, When the upper magnetic pole layer is ground using a method such as ion milling, a difference in milling rate hardly occurs.

Therefore, the lower core layer, the lower magnetic pole portion, the gap layer, and the upper magnetic pole layer can be accurately processed.

In the step of forming the lower magnetic pole portion below the gap layer, the present invention does not require grinding of the gap layer, so that the upper magnetic pole layer is formed in the step of forming the lower magnetic pole portion. Reduce the amount of shaving on the top,
The height dimension of the upper magnetic pole layer can be suppressed from being reduced. That is, the volume of the upper pole layer can be maintained, and magnetic saturation in the upper pole layer can be suppressed.

Further, if the shaving amount of the upper surface of the upper magnetic pole layer can be reduced, the necessity of increasing the height of the upper magnetic pole layer immediately after plating is reduced, so that the height of the resist layer can be reduced. Can be reduced. Therefore, the dimensional accuracy of exposure and development of the resist layer is increased, and the track width can be reduced.

[Brief description of the drawings]

FIG. 1 is a partial longitudinal sectional view of a magnetic head according to a first embodiment of the present invention;

FIG. 2 is a partial front view of the magnetic head according to the first embodiment of the present invention;

FIG. 3 is a partial vertical cross-sectional view of a magnetic head according to a second embodiment of the present invention around a surface facing a recording medium;

FIG. 4 is a partial vertical cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a third embodiment of the present invention;

FIG. 5 is a partial vertical cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a fourth embodiment of the present invention;

FIG. 6 is a partial vertical cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a fifth embodiment of the present invention;

FIG. 7 is a partial vertical cross-sectional view of the vicinity of a surface facing a recording medium of a magnetic head according to a sixth embodiment of the present invention;

FIG. 8 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention;

FIG. 9 is a process chart of an embodiment of the method of manufacturing a magnetic head according to the present invention;

FIG. 10 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 11 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 12 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 13 is a process drawing of an embodiment of a method for manufacturing a magnetic head according to the present invention,

FIG. 14 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 15 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 16 is a process drawing of an embodiment of the method for manufacturing a magnetic head according to the present invention,

FIG. 17 is a process drawing of an embodiment of the method of manufacturing a magnetic head according to the present invention,

FIG. 18 is a process drawing of an embodiment of a method for manufacturing a magnetic head according to the present invention,

FIG. 19 is a process drawing of an embodiment of a method of manufacturing a magnetic head according to the present invention,

FIG. 20 is a process drawing of an embodiment of a method of manufacturing a magnetic head according to the present invention,

FIG. 21 is a partial vertical cross-sectional view of the vicinity of a surface of a conventional magnetic head facing a recording medium,

FIG. 22 is a partial vertical cross-sectional view of the vicinity of a surface of a conventional magnetic head facing a recording medium,

FIG. 23 is a process chart of a conventional magnetic head manufacturing method.

FIG. 24 is a process chart of a conventional magnetic head manufacturing method,

FIG. 25 is a process chart of a conventional magnetic head manufacturing method,

[Explanation of symbols]

 Reference Signs List 40 Lower core layer 41 Lower magnetic pole part 42 Gap layer 42a Plating underlayer 43 Upper magnetic pole layer 44 Magnetic core 45, 58, 59 Gd determining layer 46 Upper core layer 56 Lifting layer G Joint flat surface

Claims (18)

[Claims] 1. A lower core layer, a gap layer formed on the lower core layer or a lower magnetic pole portion formed on the lower core layer, and a width dimension of the lower core layer on the gap layer A magnetic head having an upper magnetic pole layer formed shorter than the upper magnetic pole layer and an upper core layer formed on the upper magnetic pole layer, wherein the gap layer is provided on the back side in the height direction from the surface facing the recording medium. A Gd determining layer for determining a depth (gap depth) of the flat surface joining to the upper magnetic pole layer in the height direction is provided, and the gap layer is formed on the lower core layer or the lower magnetic pole portion on the Gd determining layer. Wherein the upper pole layer is laminated on the gap layer. 2. The lower core layer, the lower magnetic pole portion, the gap layer, the upper magnetic pole layer, and the upper core layer,
2. The magnetic head according to claim 1, wherein the magnetic head is made of a material that can be plated. 3. The method according to claim 1, wherein the gap layer is made of NiP, NiPd,
NiW, NiMo, NiCu, Au, Pt, Rh, P
The magnetic head according to claim 1, wherein the magnetic head is made of the non-magnetic metal material selected from one or more of d, Ru, and Cr. 4. A plating base layer made of a conductive material is formed on the lower core layer or on the lower magnetic pole part and on the Gd determining layer, and the gap layer and the upper magnetic pole layer are formed on the plating base layer. Claims 1 to 3 formed
The magnetic head according to any one of the above. 5. The method according to claim 1, wherein the plating underlayer is Cu, Au, Pd,
Rh, Ru, Pt, NiLu, NiP, NiPd, Ni
The magnetic head according to claim 4, wherein the magnetic head is made of any one of W, NiB, NiMo, Ir, NiFe, and Ni. 6. The magnetic head according to claim 1, wherein the upper magnetic pole layer is formed using a magnetic material having a higher saturation magnetic flux density than a magnetic material forming the upper core layer. 7. The magnetic head according to claim 1, wherein the upper magnetic pole layer has a multilayer structure formed of a magnetic material having a higher saturation magnetic flux density as the layer is closer to the gap layer. . 8. The lower magnetic pole part is laminated on the lower core layer, and the lower magnetic pole part is formed using a magnetic material having a higher saturation magnetic flux density than a magnetic material forming the lower core layer. The magnetic head according to any one of claims 1 to 7, wherein 9. The method according to claim 1, wherein the lower core layer and the lower magnetic pole part are
9. The magnetic head according to claim 1, wherein a layer closer to the gap layer has a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density. 10. A step of (a) forming a lower core layer made of a magnetic material; and (b) a height direction from a surface of the lower core layer facing the recording medium on the lower core layer. Forming a Gd determining layer for determining a depth (gap depth) in the height direction of a flat joint surface between the gap layer and the upper magnetic pole layer at a predetermined distance away from the back side using a nonmagnetic material (C) the lower core layer and the Gd
Forming a resist layer on the determining layer; and (d) forming a groove near the surface of the resist layer facing the recording medium at a position overlapping the Gd determining layer.
(E) a step of plating a gap layer made of a non-magnetic material from the lower core layer to the Gd determining layer in the groove, and (f) a step of depositing a magnetic material on the gap layer in the groove. (G) removing the resist layer; and (h) placing a coil on the back side in the height direction from the Gd determining layer, the gap layer, and the upper pole layer. Forming a layer, and (i) forming an upper core layer made of a magnetic material on the coil layer and the upper magnetic pole layer, and forming the upper core layer and the upper magnetic pole layer, and the upper core layer and the lower magnetic layer. And a step of magnetically bonding the core layer. 11. In the step (e), the gap layer is made of NiP, NiPd, NiW, NiMo, NiP.
The method of manufacturing a magnetic head according to claim 10, wherein the magnetic head is formed using the nonmagnetic metal material selected from one or more of Cu, Au, Pt, Rh, Pd, Ru, and Cr. 12. In the step (e), a plating base layer made of a conductive material is formed on the lower core layer and the Gd determining layer in the groove, and on the plating base layer, The method according to claim 10, wherein the gap layer is formed. 13. The plating underlayer is made of Cu, Au, P
d, Rh, Ru, Pt, NiLu, NiP, NiPd,
13. The method of manufacturing a magnetic head according to claim 12, wherein the magnetic head is formed using any one of NiW, NiB, NiMo, Ir, NiFe, and Ni. 14. The gap layer and the upper magnetic pole between the steps (g) and (h) by (j) particles incident at a predetermined angle from a direction normal to the surface of the lower core layer. 14. The method of manufacturing a magnetic head according to claim 10, further comprising a step of cutting a layer and adjusting a width dimension of the gap layer and the upper core layer to be a track width dimension. 15. The method according to claim 15, wherein, between the step (g) and the step (j), (k) particles incident at a predetermined angle from a direction normal to the surface of the lower core layer. The method of manufacturing a magnetic head according to claim 14, further comprising a step of shaving a surface and forming a lower magnetic pole portion having a smaller width dimension than the lower core layer below the gap layer. 16. In the step (a), the lower core layer is formed as having a multilayer structure formed of a magnetic material having a larger saturation magnetic flux density as a layer closer to the surface of the lower core layer, The method according to claim 15, wherein in the step (k), the lower magnetic pole portion is formed as having a higher saturation magnetic flux density than the lower core layer. 17. The method according to claim 10, wherein, in the step (f), the upper magnetic pole layer is formed using a magnetic material having a higher saturation magnetic flux density than a magnetic material forming the upper core layer. Or a method for manufacturing a magnetic head. 18. The method according to claim 10, wherein in the step (f), the upper magnetic pole layer has a multilayer structure formed of a magnetic material having a higher saturation magnetic flux density as a layer is closer to the gap layer. 18. The method for manufacturing a magnetic head according to any one of items 17.