JP2002151377A5 - - Google Patents
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- Publication number
- JP2002151377A5 JP2002151377A5 JP2000339880A JP2000339880A JP2002151377A5 JP 2002151377 A5 JP2002151377 A5 JP 2002151377A5 JP 2000339880 A JP2000339880 A JP 2000339880A JP 2000339880 A JP2000339880 A JP 2000339880A JP 2002151377 A5 JP2002151377 A5 JP 2002151377A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000339880A JP2002151377A (ja) | 2000-11-08 | 2000-11-08 | 投影露光装置、投影露光方法、デバイス製造方法、半導体製造工場および露光装置の保守方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000339880A JP2002151377A (ja) | 2000-11-08 | 2000-11-08 | 投影露光装置、投影露光方法、デバイス製造方法、半導体製造工場および露光装置の保守方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002151377A JP2002151377A (ja) | 2002-05-24 |
JP2002151377A5 true JP2002151377A5 (ja) | 2007-12-27 |
Family
ID=18814887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000339880A Withdrawn JP2002151377A (ja) | 2000-11-08 | 2000-11-08 | 投影露光装置、投影露光方法、デバイス製造方法、半導体製造工場および露光装置の保守方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002151377A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4678372B2 (ja) * | 2004-06-29 | 2011-04-27 | 株式会社ニコン | 管理方法及び管理システム、並びにプログラム |
US9411223B2 (en) | 2012-09-10 | 2016-08-09 | Globalfoundries Inc. | On-product focus offset metrology for use in semiconductor chip manufacturing |
US9411249B2 (en) | 2013-09-23 | 2016-08-09 | Globalfoundries Inc. | Differential dose and focus monitor |
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2000
- 2000-11-08 JP JP2000339880A patent/JP2002151377A/ja not_active Withdrawn