JP2002148035A - Online film thickness measuring method and device thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an online film thickness measuring method and a device thereof that can measure an accurate film thickness even if an irregular change is provided on a band-like film formed substance on which a thin film is formed. SOLUTION: Transmission degree of light at the same points on a base film 1, which are on a front point and a back point of a place where a magnetic substance layer 5 is formed on the base film 1, is measured by measuring instruments 6, 7, and both measured values of the measuring instruments 6, 7 are compared to be computed by a computer 9. Thereafter, accurate film thickness of the magnetic substance layer 5 is calculated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an on-line film for online measurement of the thickness of a thin film formed on a belt-like material such as a magnetic layer formed on a running base film by a film forming apparatus. The present invention relates to a method and an apparatus for measuring a thickness.

[0002]

2. Description of the Related Art In general, when a magnetic tape such as a digital video tape is manufactured, the thickness of a magnetic layer formed on a running base film by a film forming apparatus is required to be uniform. It is necessary to keep track of the thickness of the magnetic layer formed in the film process.

Conventionally, in a film forming process, online measurement of a film thickness of a thin film formed on a running base film has been performed by an online film thickness measuring device shown in an operation explanatory view of FIG. .

In FIG. 5, reference numeral 1 denotes a base film made of polyethylene terephthalate having a thickness of about 10 μm, which is driven by feed rollers 2 and 3 at a feed speed of about 300 m / min and passes through a film forming apparatus 4. A magnetic layer of iron oxide having a thickness of about 300 nm formed on the base film 1 having passed through the film forming apparatus 4. This is a measuring device for determining the thickness of the magnetic layer 5 on the base film 1 on which the magnetic layer 5 has been formed by passing through the film forming apparatus 4 from the characteristics of the base film 1.

[0005]

However, according to the above-mentioned conventional on-line film thickness measuring apparatus, when there is an irregular change in a band-shaped film-forming object such as a base film, it is not detected, so that it is not detected. The film thickness of the magnetic layer and the like formed on the substrate could not be measured accurately.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to provide an online film thickness measuring method and an online film thickness measuring method capable of accurately measuring the thickness of a thin film generated by a film forming apparatus online. Things.

[0007]

In order to solve the above-mentioned problems, the present invention measures the state of a strip-shaped film-forming object before passing through a film-forming apparatus, and converts the state of the band-shaped film-forming object into a film-forming apparatus. After the thin film is formed on the band-shaped film-forming object, the state of the same place as that of the measurement point of the band-shaped film-forming object is measured. This is an online film thickness measurement method for online measuring the thickness of a thin film formed on a film object, and can accurately measure the film thickness of a film generated by a film forming apparatus online.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the first aspect of the present invention, a state of a band-shaped film-forming object before passing through a film-forming apparatus is measured, and the band-shaped film-forming object is passed through the film-forming apparatus. By measuring the state of the same location as the measurement point of the band-shaped film-forming object after forming a thin film on the band-shaped film-forming object, the amount of change in both the measured values, on the band-shaped film-forming object, This is an online film thickness measurement method for online determination of the thickness of a thin film formed on a thin film, based on the change in the state of the thin film before and after the thin film is formed on the thin film. Determining the film thickness has the effect that the film thickness of the thin film can be accurately measured even for irregular changes in the band-shaped film formation object.

According to a second aspect of the present invention, there is provided a measuring device for measuring a state of a strip-shaped film-forming object before and after the band-shaped film-forming object passes through the film-forming apparatus. A measuring machine for measuring the feed amount of the band-shaped film-forming object traveling through the film apparatus, and the state of the band-shaped film-formed object before and after passing through the film-forming device from the measured feed amount of the band-shaped film-formed object. A control device for controlling a measurement timing of a measuring device for measuring, a storage device for storing a measurement value of a state of the band-shaped film-forming object before passing through the film formation device, a measurement value stored in the storage device, and a film formation device 2. The online film according to claim 1, further comprising: a computer for comparing the measured value of the state of the band-shaped object after the passage and calculating the film thickness of the thin film formed on the band-shaped object. An apparatus for performing a thickness measurement method, and a measuring device for measuring a feed amount of the band-shaped film-forming object,
With the control device that controls the measurement timing of the measuring machine,
This has the effect of measuring and comparing the state of the same portion of the band-shaped film formation object before and after passing through the film formation apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment) FIG. 1 is an explanatory view of an operation for measuring the state of a base film before film formation in an apparatus for performing an on-line film thickness measuring method according to an embodiment of the present invention, and FIG. FIG. 3 is an explanatory diagram illustrating an operation of forming a magnetic layer on a base film in an apparatus that performs the online film thickness measuring method according to the embodiment. FIG. 3 is a diagram illustrating an apparatus that performs the online film thickness measuring method according to the embodiment of the present invention. FIG. 4 is an explanatory view of an operation for measuring a state of a base film after film formation. FIG. 4 is a diagram showing a film thickness of a magnetic layer formed on a base film in an apparatus for performing an online film thickness measuring method according to an embodiment of the present invention. FIG. 5 is an operation explanatory diagram for measuring the same. The same reference numerals are given to the same portions as those in FIG.

In FIGS. 1, 2, 3, and 4, reference numeral 7 denotes the base film 1 from the state of the base film 1 such as the transmittance, the thickness, and the reflection characteristics of the surface before passing through the film forming apparatus 4. Is a measuring device for measuring the state of the measuring device, 8 is a storage device for storing the measured values of the measuring device 7, and 9 is the storage device 8
The computer 10 to which the measured value of the measuring device 7 and the measured value of the measuring device 6 stored in are input. The reference numeral 10 denotes the base before and after passing through the film forming apparatus 4 based on the feed amount of the base film 1 obtained from the rotation speed of the feed roller 2. The control device controls the measurement timing of the measuring devices 6 and 7 for measuring the state of the film 1.
First, as shown in FIG. 1, the degree of light transmission of the base film 1 before forming the magnetic layer 5 before passing through the film forming apparatus 4 is measured by the measuring device 7, and the measured value is stored in the storage device 8. Remember. Next, as shown in FIG. 2, when the base film 1 sent by the feed rollers 2 and 3 passes through the film forming apparatus 4, a magnetic layer 5 made of iron oxide of about 300 nm is formed on the base film 1. A film is formed. Next, as shown in FIG. 3, the control device 10 controls the measurement timing of the measuring devices 6 and 7 based on the distance between the measuring devices 6 and 7 and the feed speed of the base film 1, and after passing through the film forming device 4. Magnetic layer 5
On the base film 1 on which is formed a film, the degree of light transmission at the same position as that measured before passing through the film forming apparatus 4 is measured by the measuring device 6. Next, as shown in FIG.
The measured value of 7 is input to the computer 9 and the thickness of the formed magnetic layer 5 is calculated based on the amount of change in both measured values.

As described above, according to the apparatus for performing the on-line film thickness measuring method of the present embodiment, the base film 1 before and after the magnetic layer 5 is formed on the base film 1 is formed.
By the control device 10 to measure the same location above
Since the measurement timing of the measuring devices 6 and 7 is controlled, even if the base film 1 has an irregular change, the film thickness of the magnetic layer 5 on the base film 1 at the measurement point is measured. The computer 9 that inputs the measured values of 7 compares the two measured values and calculates them accurately.

Although the present embodiment has been described with reference to a magnetic tape as an example, the present invention is not limited to a magnetic tape, but is also applicable to the case of measuring the thickness of a thin film formed on another belt-shaped film-forming object. It goes without saying that it is effective.

In the above description, the state of the base film 1 is measured by measuring the degree of light transmission. However, this is also the case where the thickness of the base film 1 and the reflection characteristics of the surface of the base film 1 are measured. It is also possible to measure the condition.

[0016]

As described above, according to the on-line film thickness measuring method and apparatus of the present invention, even if there is an irregular change in the strip-shaped film-forming object on which a thin film is formed, accurate measurement can be performed. The effect is obtained that the thickness of the thin film can be measured.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an operation for measuring a state of a base film before film formation in an apparatus for performing an online film thickness measurement method according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram of an operation of forming a magnetic layer on a base film in an apparatus for performing the online film thickness measuring method according to the embodiment of the present invention.

FIG. 3 is an operation explanatory diagram for measuring a state of a base film after film formation in an apparatus for performing an online film thickness measuring method according to an embodiment of the present invention.

FIG. 4 is an explanatory view of an operation for measuring the thickness of a magnetic layer formed on a base film in an apparatus for performing the online thickness measurement method according to the embodiment of the present invention.

FIG. 5 is a diagram illustrating the operation of a conventional online film thickness measuring apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 base film 2, 3 feed roller 4 film forming device 5 magnetic layer 6, 7 measuring device 8 storage device 9 computer 10 control device

Claims (2)

[Claims] 1. A thin film is formed on a band-shaped object by measuring a state of the band-shaped object before passing through the film-forming apparatus and passing the band-shaped object through a film-forming apparatus. An online film for measuring the state of the same place as the above-mentioned measurement point of the band-shaped film-formed object after the measurement, and obtaining the film thickness of the thin film formed on the band-shaped film-formed object online based on a change amount of both the measured values. Thickness measurement method. 2. A measuring device for measuring a state of a band-shaped film-forming object before and after the band-shaped film-forming object passes through the film-forming apparatus, and a band-shaped film-forming object traveling through the film-forming apparatus. The measuring timing of the measuring machine for measuring the feed amount of the film-formed object and the measuring device for measuring the state of the band-shaped film-formed object before and after passing through the film forming apparatus are controlled from the measured feed amount of the band-shaped film-formed object. A control device, a storage device for storing a measured value of the state of the band-shaped film before passing through the film forming apparatus, and a measured value stored in the storage device and a state of the band-shaped film formed after passing the film forming device. 2. An apparatus for performing the on-line film thickness measuring method according to claim 1, further comprising a computer for calculating a thickness of the thin film formed on the belt-shaped film-forming object by performing a calculation operation by comparing the measured value with the measured value.