JP2002147695A - Container for liquid hydrogen fluoride, liquid replenishing method to the container and substrate processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a container for liquid hydrogen fluoride, a replenishing method for the container, and a substrate processor capable of easily and safely performing work for replenishing liquid hydrogen fluoride or mixed liquid containing liquid hydrogen fluoride into the container. SOLUTION: A second pipe 13 for replenishing liquid hydrogen fluoride or mixed liquid containing liquid hydrogen fluoride into the container body 3a connected to the interior of a substrate processing chamber 2 through a first pipe 11 is connected to the inside of the container body 3a, and the second pipe 13 is provided with an opening and closing valve 19 opened and closed according to the detection result of liquid storing amount detecting means 20, 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a container for liquid hydrogen fluoride containing liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride, a method for replenishing a liquid in the container, and a substrate processing method provided with the container. Related to the device.

[0002]

2. Description of the Related Art Conventionally, a CVD (chemical vaperdeposition) apparatus for forming a thin film on a semiconductor substrate or the like is well known. Among these CVD apparatuses, liquid hydrogen fluoride (hereinafter, also simply referred to as HF) is used. Some have a container to accommodate. In this container, the substrate processing chamber and HF
It is connected via a mist supply pipe, and a nitrogen gas introduction pipe for introducing nitrogen gas into the container.

HF is used for cleaning the inside of a substrate processing chamber. When nitrogen gas is introduced into a container from a nitrogen gas introduction pipe, HF is mixed with liquid hydrogen fluoride to form mist-like liquid hydrogen fluoride. The film is supplied to the substrate processing chamber together with the nitrogen gas through the mist supply pipe, and the film attached to the substrate transfer belt and the like is removed and washed.

[0004] By the way, when the liquid hydrogen fluoride in the container becomes empty or the amount thereof becomes small, the liquid hydrogen fluoride must be replenished. Conventionally, the replenishment work has been performed as follows.

When the shortage of liquid hydrogen fluoride in the container is detected by the liquid storage amount detecting means, the HF mist supply pipe and the nitrogen gas introduction pipe connected to the container are removed from the container, and the container is disconnected from the CVD apparatus. Remove and transport to refill location (liquid hydrogen fluoride source). Then, liquid hydrogen fluoride is replenished in the container. The replenishment is stopped when the liquid storage amount detecting means detects the filling of the liquid hydrogen fluoride. Then, the container replenished with the liquid hydrogen fluoride is transported again to the installation location of the CVD device, and the HF mist supply pipe and the nitrogen gas introduction pipe are connected to the container, and assembled into the CVD apparatus.

[0006]

The above-mentioned replenishment work is all performed manually by an operator, and each pipe is attached to and detached from a container, and a space between a place where the CVD apparatus is installed and a place where the CVD apparatus is replenished. It took time and effort to carry the container back and forth. In addition, since the pipe is attached and detached every time the refilling operation is performed, there is a problem that the joint member is easily bent or damaged. Further, since liquid hydrogen fluoride is a highly toxic substance, it is necessary to pay close attention to handling, especially transportation, of the container, and there is a problem in terms of safety.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has a liquid hydrogen fluoride container capable of easily and safely refilling liquid hydrogen fluoride or a mixture containing liquid hydrogen fluoride into the container. It is an object of the present invention to provide a method for replenishing a liquid and a substrate processing apparatus.

[0008]

In order to solve the above problems, according to the first aspect of the present invention, liquid hydrogen fluoride or liquid fluoride is contained in a container body connected to a substrate processing chamber via a first pipe. A second pipe for replenishing the mixed solution containing hydrogen was connected to the inside of the container body, and an on-off valve that was opened and closed based on the detection result of the liquid storage amount detection means was provided in the second pipe.
When the liquid storage amount detecting means detects a shortage of liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride, an opening / closing valve is opened, and the liquid hydrogen fluoride or the liquid hydrogen containing liquid hydrogen fluoride is mixed through the second pipe. Refill the liquid in the container body. When the liquid storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the liquid mixture containing the liquid hydrogen fluoride, the on-off valve is closed, and the liquid hydrogen fluoride or the liquid supplied into the container body from the second pipe is provided. Block the flow of the mixture containing hydrogen fluoride.

According to a second aspect of the present invention, the on-off valve is an electromagnetic valve connected to the liquid storage amount detection means via a signal line, and the liquid storage amount detection means contains liquid hydrogen fluoride or liquid hydrogen fluoride. When the shortage of the mixed liquid is detected, the electromagnetic valve is opened upon receiving this signal, and when the storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the mixed liquid containing the liquid hydrogen fluoride, the electromagnetic valve is received by receiving this signal, The valve closes. That is, the on-off valve (electromagnetic valve) is automatically opened and closed according to the detection result of the liquid storage amount detection means.

According to a third aspect of the present invention, a pipe provided with an open / close valve is connected to the inside of the container body, and the liquid storage amount detecting means detects a shortage of liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride in the container body. Is detected, the on-off valve is opened, and liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride is replenished into the container body via the pipe. That is, the replenishment operation and the stop of the replenishment operation are performed only by the opening and closing operation of the on-off valve.

According to a fourth aspect of the present invention, the on-off valve is an electromagnetic valve, and the electromagnetic valve is connected to the liquid storage amount detecting means via a signal line, and the liquid storage amount detecting means is connected to the liquid hydrogen fluoride or the liquid fluoride. When the shortage of the mixture containing hydrogen is detected, the solenoid valve is opened in response to this signal, and the liquid hydrogen fluoride or the liquid mixture containing liquid hydrogen fluoride is replenished into the container body through the pipe, and the amount of the stored liquid is increased. When the detection means detects the fullness of the liquid hydrogen fluoride or the liquid mixture containing the liquid hydrogen fluoride, the solenoid valve is closed in response to this signal, and the liquid hydrogen fluoride or the liquid hydrogen-containing mixed liquid containing the liquid hydrogen fluoride is connected through a pipe. Stop refilling the liquid into the container body.
That is, the on-off valve (electromagnetic valve) is automatically opened and closed according to the detection result of the liquid storage amount detection means.

According to a fifth aspect of the present invention, a liquid hydrogen fluoride or a mixed liquid containing the liquid hydrogen fluoride is replenished into a processing chamber in which a substrate is disposed and a container body connected via the first pipe. The second pipe was connected to the inside of the container body, and the second pipe was provided with an on-off valve that was opened and closed based on the detection result of the liquid storage amount detection unit. When the liquid storage amount detecting means detects a shortage of liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride, an opening / closing valve is opened, and the liquid hydrogen fluoride or the liquid hydrogen containing liquid hydrogen fluoride is mixed through the second pipe. Refill the liquid in the container body. When the liquid storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the liquid mixture containing the liquid hydrogen fluoride, the on-off valve is closed, and the liquid hydrogen fluoride or the liquid supplied into the container body from the second pipe is provided. Block the flow of the mixture containing hydrogen fluoride.

According to a sixth aspect of the present invention, the on-off valve is an electromagnetic valve connected to the liquid storage amount detecting means via a signal line, and the liquid storage amount detecting means contains liquid hydrogen fluoride or liquid hydrogen fluoride. When the shortage of the mixed liquid is detected, the electromagnetic valve is opened upon receiving this signal, and when the storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the mixed liquid containing the liquid hydrogen fluoride, the electromagnetic valve is received by receiving this signal, The valve closes. That is, the on-off valve (electromagnetic valve) is automatically opened and closed according to the detection result of the liquid storage amount detection means.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

In this embodiment, for example, a normal pressure CVD apparatus is shown as a substrate processing apparatus. FIG. 2 is a schematic diagram of the normal pressure CVD apparatus 1. The atmospheric pressure CVD apparatus 1 includes a substrate processing chamber 2 and a liquid hydrogen fluoride container 3 disposed in a closed chamber 4.
And The container 3 for liquid hydrogen fluoride has a normal pressure CV
It is incorporated as a component of the D device 1.

A belt conveyor 5 is provided in the substrate processing chamber 2, and a substrate 6 is transported by the belt conveyor 5. Above the belt conveyor 5, a source gas supply head 7 is provided so as to face the belt conveyor 5. The source gas supply head 7 includes a source gas supply pipe 8.
Is connected to a source gas supply source (gas cylinder) installed at a place different from the place where the atmospheric pressure CVD apparatus 1 is installed. A heater 9 is disposed below the source gas supply head 7 with the belt conveyor 5 interposed therebetween.

Further, an HF mist supply head 10 facing the belt conveyor 5 from above the belt conveyor 5 is disposed in the substrate processing chamber 2. The HF mist supply head 10 is connected to the inside of the liquid hydrogen fluoride container 3 via an HF mist supply pipe 11.

Three pipes are connected in the liquid hydrogen fluoride container 3, and a HF mist supply pipe 11 as a first pipe, an HF replenishment pipe 13 as a second pipe,
Further, a nitrogen gas introduction pipe 12 as a third pipe is connected.

Next, referring to FIG. 1, details of the closed chamber 4 and the liquid hydrogen fluoride container 3 disposed therein will be described.

The rectangular parallelepiped container body 3a of the liquid hydrogen fluoride container 3 is made of a material having HF resistance, such as fluororesin or polyethylene, and contains liquid hydrogen fluoride therein.

In the container body 3a, a HF mist supply pipe 11 connected to the HF mist supply head 10 and a nitrogen gas introduction pipe 12 connected to a nitrogen gas source are connected via a connection member 14. I have.

The connecting member 15 is provided in the container body 3a.
Is connected to the HF supply pipe 13 connected to the HF supply source. The HF replenishing pipe 13 is provided with an electromagnetic valve 19, and the opening and closing of the electromagnetic valve 19 connects and disconnects the HF supply source and the inside of the container body 3a. In addition, CV
When there are a plurality of D apparatuses 1 and a plurality of liquid hydrogen fluoride containers 3, an HF replenishing pipe 13 is connected between each liquid hydrogen fluoride container 3 and the HF supply source.

The container main body 3a has a storage amount detecting means 2 for detecting the storage amount of the liquid hydrogen fluoride contained therein.
0 and 21 are provided. Liquid storage amount detecting means 20, 21
For example, as shown in FIG. 4, a cylindrical housing 26 having a conical prism 28 at the tip, a light emitting element 27a such as a light emitting diode, and a light receiving element 27b such as a phototransistor are embedded toward the prism 28. A reflector 29 is provided.

The liquid hydrogen fluoride is supplied to the liquid storage amount detecting means 20, 2
If it does not reach 1, as shown in FIG. 4A, the light emitted from the light emitting element 27a is refracted twice by the conical surface of the prism 28, enters the light receiving element 27b, is converted into a current, and is output. As shown in FIG. 4B, when the liquid hydrogen fluoride reaches the liquid storage amount detecting means 20 and 21, the conical surface of the prism 28 is surrounded by the liquid hydrogen fluoride, and the refractive index of light changes. Therefore, the light emitted from the light emitting element 27a passes through the prism 28 or is refracted in a direction different from that in FIG. 4A, and does not enter the light receiving element 27b.

The liquid storage amount detecting means 20 is provided for detecting the filling of the liquid hydrogen fluoride, and the liquid storage amount detecting means 21 is provided for detecting the shortage of the liquid hydrogen fluoride.
Each of the storage amount detection means 20 and 21 is connected to a signal line a,
b, connected to the electromagnetic valve 19 via the control means 30 and the signal line c, and when the liquid storage amount detecting means 21 detects the shortage of liquid hydrogen fluoride, the control means 30 receives this signal and normally closes. The solenoid s of the solenoid valve 19 at the position is excited to open the solenoid valve 19. Then, at the time of replenishment, when the liquid storage amount detecting means 20 detects the fullness of the liquid hydrogen fluoride, the control means 30 receives this signal and sets the solenoid portion s of the electromagnetic valve 19 to the non-excited state to close the electromagnetic valve 19. I do.

The closed chamber 4 in which the liquid hydrogen fluoride container 3 is disposed is provided with an openable / closable door 4a.
An interlock mechanism is provided between the solenoid valve 19 and the solenoid valve 19 so as to close the solenoid valve 19 when the door 4a is open and to prevent the door 4a from opening when the solenoid valve 19 is open. As the interlock mechanism, for example, the door 4a
An electric lock is provided in conjunction with opening and closing of the electromagnetic valve 19, and when the electromagnetic valve 19 is open, the electric lock operates to lock the door 4a. When the electric lock is not operated, the electromagnetic valve 19 opens. A mechanism for preventing switching is used.

Next, the operation of the atmospheric pressure CVD apparatus 1 of the present embodiment configured as described above will be described.

The substrate 6 conveyed by the belt conveyor 5 below the source gas supply head 7 receives the source gas from the source gas supply head 7 and is disposed below the belt conveyor 5. Heated by the heater 9. Thus, the source gas is decomposed and reacted on the substrate 6 to form a thin film on the substrate 6.

While such a film forming process is repeatedly performed, a film is deposited and deposited on portions other than the substrate 6. Therefore, in a state where the substrate 6 is not present in the processing chamber 2, nitrogen gas is introduced into the liquid hydrogen fluoride container 3 from the nitrogen gas introduction pipe 12 and mixed with the liquid hydrogen fluoride in the container 3 (bubbling).
Then, the mist-like liquid hydrogen fluoride is ejected from the HF mist supply head 10 together with the nitrogen gas through the HF mist supply pipe 11 to remove and clean the film adhered to the transport belt and the like.

Next, the operation of replenishing the liquid hydrogen fluoride container 3 with liquid hydrogen fluoride will be described with reference to FIG.

When the liquid storage amount detecting means 21 attached to the lower part of the container body 3a detects the shortage of liquid hydrogen fluoride,
This detection signal is sent to the control means 30 via the signal line b, and the control means 30 excites the solenoid s of the solenoid valve 19 which is normally in the closed position via the signal line c, and
Open. Thereby, liquid hydrogen fluoride is replenished from the HF supply source into the container body 3a through the HF replenishing pipe 13. Then, when the liquid level of the liquid hydrogen fluoride rises and the liquid storage amount detecting means 20 detects the fullness of the liquid hydrogen fluoride,
This detection signal is sent to the control means 30 via the signal line a, and the control means 30 closes the solenoid valve 19 via the signal line c with the solenoid s of the solenoid valve 19 in a non-excited state.
Thereby, the container body 3 via the HF replenishing pipe 13
Replenishment of liquid hydrogen fluoride into a is cut off. Then, the liquid hydrogen fluoride is used for cleaning the inside of the processing chamber 2 and the amount of the stored liquid decreases, and when the liquid storage amount detecting means 21 detects the shortage of the liquid hydrogen fluoride again, the above-described operation is repeated.

As described above, the liquid hydrogen fluoride is automatically supplied into the container body 3a by the detection of the liquid storage amount detecting means 21, and
In addition, since the replenishment is automatically stopped by the detection of the liquid storage amount detecting means 20, the operator does not need to perform any work at the time of the replenishment work, and the time required for the replenishment work can be greatly reduced as compared with the conventional case. . Further, since the refilling operation can be performed while the container 3 is incorporated in the CVD apparatus 1, it is not necessary to attach and remove various pipes, so that the pipes and the connecting members (joints) are not damaged, and the container 3 is transported. Therefore, the safety in the refilling operation is significantly improved as compared with the conventional case. Further, since the electromagnetic valve 19 and the liquid storage amount detecting means 20 for detecting the fullness are linked, the container body 3
By preventing the liquid hydrogen fluoride from being excessively supplied into the container a, leakage from the container and damage to the container can be prevented.

Further, since the container 3 is housed in the closed chamber 4, even if liquid hydrogen fluoride leaks due to damage of the container 3 or breakage of the piping, etc., the spread of liquid hydrogen fluoride is suppressed, and It can be shielded from the space where people are and can secure safety. When the damaged container 3 is replaced or the inside of the closed chamber 4 is cleaned, the door 4a is opened and the work is performed. At this time, when the door 4a is opened, the electromagnetic valve 19 is closed. An interlock mechanism is provided to prevent the door 4a from opening when the solenoid valve 19 is opened. Therefore, the supply of liquid hydrogen fluoride is stopped reliably, and the container 3 is kept in a state where safety is ensured. Can be replaced.

Next, a second embodiment of the present invention will be described.

This embodiment has substantially the same structure as the first embodiment, and the same components are denoted by the same reference numerals and detailed description thereof will be omitted. That is, in the present embodiment, the operation panel 25 as shown in FIG.
The only difference from the first embodiment is that the solenoid valve 19 is opened and closed via the operation panel 25.

The operation panel 25 is provided with a supply button 31, a stop button 32, a shortage notification lamp 33, a fullness notification lamp 34, and a liquid level display lamp 35.

The shortage notification lamp 33 is connected to the storage amount detecting means 2.
1 and the shortage notification lamp 33 is turned on when the liquid storage amount detection means 21 detects a shortage of liquid hydrogen fluoride. The operator confirms this lighting and presses the supply button 31. The supply button 31 is linked to the solenoid valve 19 and the supply button 3
When 1 is pressed, the solenoid valve 19 switches to open, and liquid hydrogen fluoride is replenished from the HF supply source into the container body 3a through the HF replenishing pipe 13.

The filling notification lamp 34 is provided with the liquid storage amount detecting means 2.
When the liquid storage amount detection means 20 detects the fullness of the liquid hydrogen fluoride, the fullness notification lamp 34 is turned on. The operator confirms this lighting and presses the stop button 32. The stop button 32 is linked with the solenoid valve 19 and the stop button 3
When the button 2 is pressed, the solenoid valve 19 switches to the closed state, shuts off the HF replenishing pipe 13, and the replenishment of the liquid hydrogen fluoride into the container body 3a is stopped.

If a plurality of liquid storage amount detecting means are attached to the container main body 3a, the liquid level according to the liquid storage level in the container main body 3a can be sequentially displayed on the liquid level display lamp 35. The opening and closing timing of the solenoid valve 19 may be determined while looking at the level indicator light 35. Further, a detection result of the liquid storage amount detecting means 20 and 21 may be notified by an alarm buzzer.

Although the embodiments of the present invention have been described above, the present invention is, of course, not limited to these embodiments.
Various modifications are possible based on the technical idea of the present invention.

As the liquid storage amount detecting means, in addition to the above embodiment, for example, a float having a built-in magnet is floated on the liquid surface, and a reed switch is attached to a portion corresponding to the shortage detection position and the fullness detection position. The position of the float magnet following the liquid level may be detected by a reed switch. Alternatively, the shortage / fullness may be detected from the weight of the liquid storage amount using a means for measuring the weight of the container 3.

The liquid contained in the container 3 is as follows.
Not only liquid hydrogen fluoride, but also aqueous solution of liquid hydrogen fluoride,
A liquid mixture of liquid hydrogen fluoride and alcohol may be used, and these liquid mixtures may be used for removing a natural oxide film formed on the substrate 6, for example.

The on-off valve 19 is not limited to a solenoid valve, but may be a manual on-off valve. However, since the replenishment and the stop operation are performed automatically by using the solenoid valve linked with the liquid storage amount detecting means 20 and 21, the liquid storage amount detecting means 2 is used.
It is not necessary to constantly monitor the detection results of 0 and 21, and the replenishment is automatically stopped, so that it is possible to prevent the liquid hydrogen fluoride from overflowing from inside the container.

[0044]

According to the first aspect of the present invention, the operation of replenishing the liquid hydrogen fluoride or the mixed liquid of the liquid hydrogen fluoride in the container can be performed simply by switching the on-off valve. It takes time and can be done safely.

According to the second aspect of the present invention, since the switching of the on-off valve is automatically performed, there is no need to monitor the detection result of the liquid storage amount detecting means. It also prevents overlooking the charge.

According to the third aspect of the present invention, the operation of replenishing the liquid hydrogen fluoride or the mixed liquid of the liquid hydrogen fluoride in the container can be performed only by switching the on-off valve. Done and safe.

According to the fourth aspect of the present invention, the switching of the on-off valve is automatically performed, so that it is not necessary to monitor the detection result of the liquid storage amount detecting means. It also prevents overlooking the charge.

According to the fifth aspect of the present invention, the operation of replenishing the liquid hydrogen fluoride or the mixed liquid of the liquid hydrogen fluoride in the container can be performed only by switching the on-off valve, so that it is not troublesome and the time is short. Done and safe.

According to the sixth aspect of the present invention, the switching of the on-off valve is automatically performed, so that it is not necessary to monitor the detection result of the liquid storage amount detecting means. It also prevents overlooking the charge.

According to the seventh aspect of the present invention, even if liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride leaks from the container, the spread of the liquid hydrogen fluoride or the mixture containing the liquid hydrogen fluoride is suppressed, and the replacement of the container is performed with liquid fluoride. It can be performed in a safe state in which the supply of the mixed liquid containing hydrogen or liquid hydrogen fluoride is stopped.

[Brief description of the drawings]

FIG. 1 is a perspective view of a container for liquid hydrogen fluoride according to a first embodiment of the present invention and a closed chamber accommodating the container.

FIG. 2 is a schematic diagram of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 3 is an enlarged view of an operation panel unit according to a second embodiment of the present invention.

FIG. 4 is a schematic diagram of a liquid storage amount detection unit according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus, 2 ... Processing chamber, 3 ... Container for liquid hydrogen fluoride, 3a ... Container body, 4 ... Sealed chamber, 4a ...
... door, 6 ... substrate, 11 ... first piping, 13 ... second
, A solenoid valve, 20 a liquid storage amount detecting means, 2
1 ... A liquid storage amount detecting means.

Claims (7)

[Claims] 1. A container main body containing liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride, wherein the liquid hydrogen fluoride or liquid hydrogen fluoride is introduced into a substrate processing chamber in the container main body. A first pipe for supplying a mixed liquid containing liquid hydrogen fluoride, and a liquid bottle provided with storage amount detection means for detecting a storage amount of liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride in the container body; In the hydrogen fluoride container, a second pipe for replenishing liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride in the container body is connected to the container body, and the second pipe is connected to the storage pipe. A liquid hydrogen fluoride container provided with an on-off valve that opens and closes based on a detection result of a liquid amount detection unit. 2. The on-off valve is an electromagnetic valve connected to the liquid storage amount detection means via a signal line, and the liquid storage amount detection means is a liquid hydrogen fluoride or a mixture containing the liquid hydrogen fluoride. When the shortage of the liquid is detected, the solenoid valve is opened upon receiving this signal, and when the storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the mixed liquid containing the liquid hydrogen fluoride, the signal is received. 2. The liquid hydrogen fluoride container according to claim 1, wherein the solenoid valve is closed. 3. The liquid hydrogen fluoride or the liquid hydrogen fluoride or the mixed liquid containing the liquid hydrogen fluoride contained in the container main body is detected based on a detection result of a liquid storage amount detecting means for detecting a storage amount of the liquid mixture. Detect shortage of liquid mixture containing liquid hydrogen fluoride,
In a method for replenishing liquid hydrogen fluoride into a container for liquid hydrogen fluoride, wherein liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride is replenished in the container body, a pipe provided with an on-off valve in the container body When the liquid storage amount detecting means detects a shortage of liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride in the container body,
Opening the on-off valve and replenishing the container body with liquid hydrogen fluoride or a liquid mixture containing the liquid hydrogen fluoride through the pipe, Method. 4. The on-off valve is an electromagnetic valve, which is connected to the liquid storage amount detecting means via a signal line, and wherein the liquid storage amount detecting means is the liquid hydrogen fluoride or the liquid hydrogen fluoride. When detecting the shortage of the mixed solution containing, the electromagnetic valve is opened upon receiving this signal, and the liquid hydrogen fluoride or the mixed solution containing the liquid hydrogen fluoride is replenished into the container body through the pipe, When the liquid storage amount detecting means detects that the liquid hydrogen fluoride or the liquid mixture containing the liquid hydrogen fluoride is full, the electromagnetic valve is closed upon receiving this signal, and the liquid hydrogen fluoride through the pipe is closed. 4. The method according to claim 3, wherein replenishment of the mixed liquid containing liquid hydrogen fluoride into the container body is stopped.
Liquid replenishing method in the container for liquid hydrogen fluoride according to [1]. 5. A processing chamber in which a substrate is provided, and a container main body for storing liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride, wherein the container main body includes: A first pipe for supplying liquid hydrogen fluoride or a liquid mixture containing liquid hydrogen fluoride is connected, and a storage for detecting the storage amount of the liquid hydrogen fluoride or the liquid mixture containing liquid hydrogen fluoride in the container body In a substrate processing apparatus provided with a liquid hydrogen fluoride container provided with a liquid amount detection unit, the second pipe for replenishing liquid hydrogen fluoride or a mixed liquid containing liquid hydrogen fluoride in the container main body is provided. A substrate processing apparatus which is connected to the inside of a container main body and has an opening / closing valve which is opened and closed based on a detection result of the liquid storage amount detecting means, in the second pipe. 6. The on-off valve is an electromagnetic valve connected to the liquid storage amount detection means via a signal line, and the liquid storage amount detection means is a liquid hydrogen fluoride or a mixture containing the liquid hydrogen fluoride. When the shortage of the liquid is detected, the solenoid valve is opened upon receiving this signal, and when the storage amount detecting means detects the fullness of the liquid hydrogen fluoride or the mixed liquid containing the liquid hydrogen fluoride, the signal is received. 6. The substrate processing apparatus according to claim 5, wherein the solenoid valve is closed. 7. The liquid hydrogen fluoride container is disposed in a closed chamber having an openable and closable door, wherein the electromagnetic valve is closed when the door is opened, and the electromagnetic valve is opened. 7. The substrate processing apparatus according to claim 6, further comprising an interlock mechanism for preventing the door from being opened in the case of (1).