JP2002145669A - Piezoelectric porcelain composition - Google Patents

Piezoelectric porcelain composition

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Publication number
JP2002145669A
JP2002145669A JP2000341563A JP2000341563A JP2002145669A JP 2002145669 A JP2002145669 A JP 2002145669A JP 2000341563 A JP2000341563 A JP 2000341563A JP 2000341563 A JP2000341563 A JP 2000341563A JP 2002145669 A JP2002145669 A JP 2002145669A
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JP
Japan
Prior art keywords
composition
piezoelectric ceramic
coupling coefficient
added
porcelain composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000341563A
Other languages
Japanese (ja)
Inventor
Junji Kawachi
純二 河内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000341563A priority Critical patent/JP2002145669A/en
Publication of JP2002145669A publication Critical patent/JP2002145669A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a Bi2SrNb2O9 based piezoelectric porcelain composition having a high coupling coefficient Kt and a high mechanical quantity coefficient Qm. SOLUTION: This piezoelectric porcelain composition consists of a bismuth layered compound expressed by Bi2(Sr1-XMX)Nb2O9 (wherein, M is Y or La, and 0<X<=0.4). Also, Mn is added by <=1.5 wt.% (not zero) expressed in terms of MnO2.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は各種圧電デバイスに
用いられる圧電磁器組成物に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric ceramic composition used for various piezoelectric devices.

【0002】[0002]

【従来の技術】圧電磁器組成物はセラミックフィルタ、
発振子、発音体、アクチュエータ等に広く用いられてお
り、大きな圧電性を必要とすることによりチタン酸鉛P
bTiO3やチタン酸ジルコン酸鉛Pb(TiZr)O3
を主成分としたものが用いられている。
2. Description of the Related Art Piezoelectric ceramic compositions include ceramic filters,
It is widely used in oscillators, sound generators, actuators, etc., and requires large piezoelectricity.
bTiO 3 and lead zirconate titanate Pb (TiZr) O 3
Is used as the main component.

【0003】[0003]

【発明が解決しようとする課題】しかしながら近年地球
環境に関する配慮から鉛を排除した非鉛圧電磁器組成物
の開発が要望されており、ビスマス層状型ペロブスカイ
ト、非鉛I−V族ペロブスカイト、非鉛II−IV族ペロブ
スカイト等多くの研究が進められているが、実用的な圧
電特性が得られずほとんど量産されていない。
However, in recent years, there has been a demand for the development of a lead-free piezoelectric ceramic composition in which lead has been eliminated from consideration of the global environment, and bismuth layered perovskite, non-lead group IV perovskite, non-lead II Although much research has been carried out, such as group IV perovskite, practically no piezoelectric properties have been obtained and hardly mass-produced.

【0004】非鉛圧電磁器組成物として有望なものの一
つにBi2SrNb29なるビスマス層状ペロブスカイ
ト化合物がある。これはキュリー点が高いため250℃
程度の高温に耐え、周波数の温度特性も−30ppmと
実用的な値を持つ。しかし圧電性は結合係数Ktが10
%前後で鉛系圧電磁器組成物の1/5程度で、機械的品
質係数Qmも900程度であり実用に値しない。
One promising lead-free piezoelectric ceramic composition is a bismuth layered perovskite compound of Bi 2 SrNb 2 O 9 . This is 250 ° C due to high Curie point
It withstands high temperatures and has a practical frequency temperature characteristic of -30 ppm. However, the piezoelectricity has a coupling coefficient Kt of 10
%, About 1/5 of the lead-based piezoelectric ceramic composition, and the mechanical quality factor Qm is about 900, which is not practical.

【0005】一方、セラミックフィルタや発振子として
利用する場合は電気機械結合係数Ktとともに機械的品
質係数Qmも重要な要素となる。機械的品質係数Qmは
共振周波数、反共振周波数におけるインピーダンスの比
に関係のある定数であり、使用回路での信号処理能力を
大きく左右(利得、減衰量)するものである。この機械
的品質係数Qmが大きいことは結合係数Ktの小さいこ
とを十分に補うことができる。このために結合係数Kt
のより大きい、特に機械的品質係数Qmは2000以上
を持つものが望まれていた。
On the other hand, when used as a ceramic filter or an oscillator, the mechanical quality factor Qm is an important factor in addition to the electromechanical coupling factor Kt. The mechanical quality factor Qm is a constant related to the ratio of the impedance at the resonance frequency and the anti-resonance frequency, and largely affects the signal processing capability of the circuit used (gain and attenuation). The large mechanical quality coefficient Qm can sufficiently compensate for the small coupling coefficient Kt. For this purpose, the coupling coefficient Kt
In particular, those having a mechanical quality factor Qm of 2000 or more have been desired.

【0006】本発明は上記従来の問題点を解決するもの
で、結合係数Ktとともに機械的品質係数Qmを大きく
改善し実用的な値をもつ圧電磁器組成物を提供すること
を目的とするものである。
An object of the present invention is to solve the above-mentioned conventional problems and to provide a piezoelectric ceramic composition having a practical value by greatly improving the mechanical quality factor Qm together with the coupling coefficient Kt. is there.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に本発明は以下の構成を有するものである。
To achieve the above object, the present invention has the following arrangement.

【0008】本発明の請求項1に記載の発明は、一般式
Bi2(Sr1-XX)Nb29なるビスマス層状化合物
(但しMはYもしくはLa)で表され、Xは0<X≦
0.4なる値をとり、かつMnをMnO2に換算して
1.5wt%以下(0を除く)を含有する圧電磁器組成
物であり、SrをYもしくはLaで置換するだけでは結
合係数Ktはほとんど変化は見られないがこれにMnを
添加することにより結合係数Kt、機械的品質係数Qm
ともに大きくなると言う作用効果が得られる。このとき
Xの範囲を0〜0.4(0を除く)、又Mnを1.5w
t%以下(0を除く)としたのはこれ以外の範囲では顕
著な作用効果が得られないためである。
[0008] According to a first aspect of the present invention have the general formula Bi 2 (Sr 1-X M X) Nb 2 O 9 comprising bismuth layer compound (where M is Y or La) is represented by, X is 0 <X ≦
It is a piezoelectric ceramic composition having a value of 0.4 and containing 1.5 wt% or less (excluding 0) of Mn in terms of MnO 2 , and simply replacing Sr with Y or La results in a coupling coefficient Kt. Shows little change, but by adding Mn to this, the coupling coefficient Kt and the mechanical quality factor Qm
The effect of increasing both is obtained. At this time, the range of X is 0 to 0.4 (excluding 0), and Mn is 1.5 w
The reason why the content is set to t% or less (excluding 0) is that a remarkable effect cannot be obtained in the other range.

【0009】本発明の請求項2に記載の発明は、Nbも
しくはCrのうち少なくとも一方を請求項1に記載の組
成に添加した圧電磁器組成物であり、ビスマス層状化合
物はその特性を十分引き出すには180〜200℃で分
極処理する必要があり、このため分極治工具の耐熱材質
の選定、絶縁オイルの熱分解、作業能率等量産性におい
ても課題があった。Nb(この元素は一般式構成元素で
もあり、化学量論組成よりも過剰に加える結果になる
が)もしくはCrの少なくとも一方を添加することによ
って分極処理温度を100〜140℃と大幅に下げるこ
とが可能となり量産性の良い磁器を提供することができ
る。このときNbは全重量に対し5wt%以下、Cr量
は0.5wt%以下としたのはこれ以外の範囲では磁器
の抵抗が低下して分極処理ができなくなるからである。
According to a second aspect of the present invention, there is provided a piezoelectric ceramic composition wherein at least one of Nb and Cr is added to the composition according to the first aspect. Requires a polarization treatment at 180 to 200 ° C., so that there are also problems in selection of heat-resistant materials for the polarization jig, thermal decomposition of insulating oil, and mass productivity such as work efficiency. The addition of at least one of Nb (this element is also a constituent element of the general formula and results in an excess of the stoichiometric composition) or Cr can significantly reduce the polarization treatment temperature to 100 to 140 ° C. This makes it possible to provide porcelain with good mass productivity. At this time, the Nb content is set to 5 wt% or less and the Cr content is set to 0.5 wt% or less based on the total weight, because in other ranges, the resistance of the porcelain decreases and the polarization treatment cannot be performed.

【0010】本発明の請求項3に記載の発明は、過剰に
添加するNbをNb25に換算して5wt%以下の量を
請求項1の組成に添加したものであり、その最適添加量
を規定したものである。
According to a third aspect of the present invention, the amount of Nb added in excess of 5 wt% in terms of Nb 2 O 5 is added to the composition of the first aspect. It specifies the amount.

【0011】本発明の請求項4に記載の発明は、添加す
るCrをCr23に換算して0.5wt%以下の量を請
求項1の組成に添加したものであり、その最適添加量を
規定したものである。
According to a fourth aspect of the present invention, the amount of Cr to be added is 0.5 wt% or less in terms of Cr 2 O 3 added to the composition of the first aspect. It specifies the amount.

【0012】[0012]

【発明の実施の形態】(実施の形態1)まず、出発原料
としてBi23,SrCO3,Nb25,Cr23,Y2
3,La23を(表1)(表2)に示す組成となるよ
うに秤量し、ボールミルを用いて16時間湿式混合処理
し乾燥を行った。
(Embodiment 1) First, Bi 2 O 3 , SrCO 3 , Nb 2 O 5 , Cr 2 O 3 , Y 2 are used as starting materials.
O 3 and La 2 O 3 were weighed so as to have the compositions shown in (Table 1) and (Table 2), and were wet-mixed using a ball mill for 16 hours and dried.

【0013】次に、乾燥した混合原料を800〜100
0℃の温度で2時間仮焼後、再びボールミルを用いて1
6時間湿式粉砕し乾燥を行って圧電材料を作製した。
[0013] Next, the dried mixed raw material is
After calcination at a temperature of 0 ° C. for 2 hours, use a ball mill again for 1 hour.
A piezoelectric material was produced by wet grinding and drying for 6 hours.

【0014】次いで、圧電材料に対しバインダーとして
5%ポリビニルアルコール溶液を8〜12wt%加えて
造粒した後、150MPaの圧力で直径20mm、厚さ
1.5mmの円板状に成形した後、これを1050〜1
250℃の温度で焼成を行い圧電素子の焼結体を作製し
た。
Next, 8% to 12% by weight of a 5% polyvinyl alcohol solution as a binder is added to the piezoelectric material, and the resultant is granulated. To 1550 to 1
Sintering was performed at a temperature of 250 ° C. to produce a sintered body of a piezoelectric element.

【0015】得られた焼結体を厚さ0.5mmに平面研
磨した後、両面に銀電極ペーストを塗布、乾燥を行い、
700℃の温度で焼付を行った。
After the obtained sintered body is polished to a thickness of 0.5 mm, a silver electrode paste is applied to both sides and dried.
Baking was performed at a temperature of 700 ° C.

【0016】次に、100℃から200℃まで20℃刻
みで上げた各温度のシリコンオイル中で3.5KVの直
流電圧(7KV/mm)を印加し分極を行った後、各試
料の結合係数Ktおよび機械的品質係数Qmを測定し
た。その後に飽和分極処理温度と考えられる試料を選定
しその結果を(表1)(表2)に示した。
Next, after a DC voltage of 3.5 KV (7 KV / mm) is applied in silicon oil at each temperature raised from 100 ° C. to 200 ° C. in steps of 20 ° C. to perform polarization, the coupling coefficient of each sample is increased. Kt and mechanical quality factor Qm were measured. Thereafter, a sample considered to be the saturation polarization treatment temperature was selected, and the results are shown in (Table 1) and (Table 2).

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】尚、結合係数Ktおよび機械的品質係数Q
mは電子材料工業会標準規格であるEMAS−6100
(圧電セラミック振動子の電気的試験方法)に基づき測
定、算出した。又、各試料の値を選定するにあたって
は、100℃から200℃の間の6点で測定した試料の
うち結合係数Ktが最大となる点を基準として5%以上
結合係数Ktが低下しない範囲での一番低い分極処理温
度の値をもって飽和分極処理温度とし、この点における
ときの値を表に記載してある。
The coupling coefficient Kt and the mechanical quality factor Q
“m” is ESMA-6100 which is a standard of the Electronic Materials Industry Association.
(Electrical test method of piezoelectric ceramic vibrator) was measured and calculated. In addition, when selecting the value of each sample, the sample was measured at six points between 100 ° C. and 200 ° C. in a range where the coupling coefficient Kt did not decrease by 5% or more based on the point where the coupling coefficient Kt became the maximum. The value of the lowest polarization treatment temperature is defined as the saturation polarization treatment temperature, and the value at this point is described in the table.

【0020】(表1)はビスマス層状化合物をYもしく
はLaで置換した本発明の基本組成とその特性値であ
り、(表2)は本発明の組成に、過剰なNbもしくはC
rを添加した組成とその特性値である。
Table 1 shows the basic composition of the present invention in which the bismuth layered compound is substituted with Y or La and the characteristic values thereof, and Table 2 shows that the composition of the present invention contains an excess of Nb or C.
The composition and the characteristic value to which r was added.

【0021】(表1)に示すように従来の組成(試料番
号1)は結合係数Ktが12%、機械的品質係数Qmが
900程度でありセラミックフィルタや発振子として利
用するには使用する回路が複雑なものとなるため実質的
に困難であった。これに対してSrをYもしくはLaで
置換したもの(試料番号3,4,5,8,9,10,1
5,16,17,20,21,22)は結合係数Ktが
13〜20%に向上すると同時に、機械的品質係数Qm
は2000〜8000と大幅に上昇することがわかる。
これによって実用的な圧電磁器組成物となる。
As shown in Table 1, the conventional composition (Sample No. 1) has a coupling coefficient Kt of about 12% and a mechanical quality coefficient Qm of about 900, and is used for a ceramic filter or an oscillator. Has been practically difficult due to the complexity. On the other hand, Sr was replaced with Y or La (sample numbers 3, 4, 5, 8, 9, 10, 1).
5,16,17,20,21,22) improve the coupling coefficient Kt to 13 to 20% and at the same time, improve the mechanical quality factor Qm.
It can be seen that the value greatly increases to 2000 to 8000.
This results in a practical piezoelectric ceramic composition.

【0022】ここでYもしくはLaが0.4を越えると
(試料番号12,13,24,25)、あるいはMnが
2wt%を越えると(試料番号6,11,18,2
3)、機械的品質係数Qmは1000〜1500と従来
組成よりも大きい値はとるが、結合係数Ktが小さくな
り両方を加味すると実用的な効果はなくなる。又、Mn
が添加されない場合(試料番号2,14)も従来組成と
ほぼ同レベルであり効果は見られない。
Here, when Y or La exceeds 0.4 (sample numbers 12, 13, 24, 25), or when Mn exceeds 2 wt% (sample numbers 6, 11, 18, 2).
3) Although the mechanical quality factor Qm is 1000 to 1500, which is larger than that of the conventional composition, the practical effect is lost if the coupling coefficient Kt is reduced and both are taken into account. Also, Mn
Is not added (Sample Nos. 2 and 14), the level is almost the same as the conventional composition, and no effect is observed.

【0023】(表2)に示すように、本発明の組成に更
に過剰なNb(試料番号26,27,28,35,3
6,37)もしくはCr(試料番号30,31,32,
39,40,41)を添加したものは結合係数Kt及び
機械的品質係数Qmを高いレベルに維持したまま分極処
理温度を100〜140℃と大幅に下げることができ
る。これを添加することによって量産処理容易な圧電磁
器組成物となる。このことはNb,Crを同時に添加し
ても(試料番号34)その有用な効果は変わらない。
As shown in Table 2, the composition of the present invention further contained excess Nb (Sample Nos. 26, 27, 28, 35, 3).
6, 37) or Cr (sample numbers 30, 31, 32,
39, 40, 41) can significantly lower the polarization treatment temperature to 100 to 140 ° C. while maintaining the coupling coefficient Kt and the mechanical quality factor Qm at high levels. By adding this, a piezoelectric ceramic composition which can be easily mass-produced is obtained. This means that even if Nb and Cr are added simultaneously (Sample No. 34), the useful effect does not change.

【0024】このときNb量が5wt%を越えると(試
料番号29,38)磁器の焼結が困難となり、またCr
が0.5wt%を越えると(試料番号33,42)絶縁
抵抗が限界を越えて低下するために分極処理ができなく
なる。
At this time, if the Nb content exceeds 5 wt% (sample Nos. 29 and 38), sintering of the porcelain becomes difficult,
Exceeds 0.5 wt% (Sample Nos. 33 and 42), the insulation resistance is reduced beyond the limit, so that the polarization treatment cannot be performed.

【0025】[0025]

【発明の効果】以上のようにBi2(Sr1-XX)Nb2
9(MはYもしくはLaで、0<X≦0.4)にMn
を添加(1.5wt%以下)した組成は結合係数Kt、
機械的品質係数Qmともに大きい優れた圧電磁器組成物
であることがわかる。またこの組成に過剰なNb(5w
t%以下)もしくはCr(0.5wt%以下)を添加す
ることにより分極処理温度が低下して量産しやすい圧電
磁器組成物に仕上がる。
As described above, according to the present invention Bi 2 (Sr 1-X M X) Nb 2
O 9 (M is Y or La, 0 <X ≦ 0.4) Mn
Is added (1.5 wt% or less), the coupling coefficient Kt,
It can be seen that this is an excellent piezoelectric ceramic composition having a large mechanical quality factor Qm. In addition, excessive Nb (5w
(t% or less) or Cr (0.5 wt% or less) lowers the polarization treatment temperature to produce a piezoelectric ceramic composition which can be easily mass-produced.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 一般式がBi2(Sr1-XX)Nb29
で表されるビスマス層状化合物を主成分とし(但しMは
YもしくはLaで、0<X≦0.4)、且つMnをMn
2に換算して1.5wt%以下(0を除く)の量を含
有する圧電磁器組成物。
1. A general formula Bi 2 (Sr 1-X M X) Nb 2 O 9
(Where M is Y or La, 0 <X ≦ 0.4), and Mn is Mn.
O 2 in terms of less 1.5 wt% piezoelectric ceramic composition containing an amount of (excluding 0).
【請求項2】 NbもしくはCrのうち少なくとも一方
を添加した請求項1に記載の圧電磁器組成物。
2. The piezoelectric ceramic composition according to claim 1, wherein at least one of Nb and Cr is added.
【請求項3】 Nbの量がNb25に換算して5wt%
以下である請求項1に記載の圧電磁器組成物。
3. The amount of Nb is 5 wt% in terms of Nb 2 O 5.
The piezoelectric ceramic composition according to claim 1, which is:
【請求項4】 Crの量がCr23に換算して0.5w
t%以下である請求項1に記載の圧電磁器組成物。
4. The amount of Cr is 0.5 w in terms of Cr 2 O 3.
The piezoelectric ceramic composition according to claim 1, which is at most t%.
JP2000341563A 2000-11-09 2000-11-09 Piezoelectric porcelain composition Pending JP2002145669A (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000341563A JP2002145669A (en) 2000-11-09 2000-11-09 Piezoelectric porcelain composition

Publications (1)

Publication Number Publication Date
JP2002145669A true JP2002145669A (en) 2002-05-22

Family

ID=18816287

Family Applications (1)

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Country Status (1)

Country Link
JP (1) JP2002145669A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6764609B2 (en) * 2001-10-11 2004-07-20 Matsushita Electric Industrial Co., Ltd. Piezoelectric ceramic composition and piezoelectric element using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6764609B2 (en) * 2001-10-11 2004-07-20 Matsushita Electric Industrial Co., Ltd. Piezoelectric ceramic composition and piezoelectric element using the same

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