JP2002139515A - Electric characteristic detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric characteristic detector capable of correctly measuring the electric characteristic of an electronic device without static breakdown of a work to be detected which is brought into contact with an electrode probe or the electronic device electrically connected to the work. SOLUTION: In the electrode probe P1, a first contact part 1 formed of a good conductor is brought into contact with a conductive pattern h5 after a second contact part 2 formed of a highly electric-resistant material is brought into contact with the conductive pattern h5 by slidably moving a substrate h4 having the conductive pattern h5 formed thereon as the work to be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detecting device for detecting electric characteristics, and more particularly, to detecting electric characteristics of an electronic device having a fine structure such as a thin film magnetic head and which is weak against static electricity and inrush current. Electrical characteristic detecting device.

[0002]

2. Description of the Related Art In a conventional electric characteristic detecting device such as a digital multimeter, a rod-shaped electrode probe is connected to the tip of a conductive cable which is pulled out from a main body having a built-in electric measuring instrument and coated with an insulating material. The probe is made of a good conductor such as brass plated with nickel and plated with gold, and the electrical characteristics of the object are detected by directly contacting the electrode probe with the terminal of the object.

[0003]

However, the conventional electric characteristic detecting device has a structure in which a measuring cable having an insulating film easily accumulates electric charges, and furthermore, the electrode probe is electrically floated from the power supply ground of the main body. In this state, the electrode probe tends to have a potential with respect to the power supply ground. If the electrode probe or the object to be detected is charged, the electrode probe is made of a good conductor, and the contact between the electrode probe and the terminal of the object to be measured during the measurement causes the charged charge Q to be detected. Move instantaneously (several nanoseconds) between the object and the electrode probe. When the charge Q moves instantaneously in this manner, the charge Q
Is very small, the current I = Δ
Q / ΔT can be a large current. When the object to be detected is connected to an electronic device having a fine structure (for example, a thin film magnetic head) due to the large current, there is a problem that the electronic device is electrostatically damaged.

Conventionally, an object to be measured or a device for detecting electrical characteristics has been subjected to static elimination or the like by using an ionizer in order to prevent electrification. However, it is costly and management becomes complicated. There was a problem. SUMMARY OF THE INVENTION An object of the present invention is to provide an electrical characteristic detection device capable of accurately detecting an electrical characteristic of an electronic device without causing electrostatic damage to the electronic device.

[0005]

According to the electric characteristic detecting apparatus of the present invention, the electrode probe comprises a first contact portion made of a good conductor and a conductor having an electric resistance higher than that of the first contact portion. A second contact portion, wherein the first and second contact portions are in a state of being electrically connected, and the object to be detected is slid with respect to the electrode probe. After the second contact portion contacts the detection target, the first contact portion contacts the detection target.

[0006] The electrical characteristic detecting device of the present invention is characterized in that the first,
The second contact portions are adjacent to each other to form an arcuate surface, and the first and second contact portions are in contact with the contacted object.
It is rotatable on the object to be measured.

[0007] In the electrical characteristic detecting device of the present invention, the electrode probe has a substantially cylindrical shaft portion, and is held at the base by the shaft portion.

[0008] In the electrical characteristic detecting device of the present invention, in the initial state, the second contact portion faces the sliding movement surface of the detection object.

In the electrical characteristic detecting apparatus according to the present invention, the rotation of the electrode probe is stopped while the first contact portion is in contact with the object to be detected.

[0010] In the electrical characteristic detecting apparatus according to the present invention, the rotation of the electrode probe is stopped by bringing an engaging portion provided integrally with the electrode probe into contact with the base.

In the electrical characteristic detecting device according to the present invention, a spring member for returning the electrode probe to the initial position is provided between the electrode probe and the base.

The electrical characteristic detecting device of the present invention is characterized in that the first,
The plurality of electrode probes having the second contact portion are arranged coaxially.

In the electrical characteristic detecting device according to the present invention, the first contact portion and the second contact portion are arranged at a predetermined interval in a sliding movement direction of the detection object.

The electric characteristic detecting device of the present invention is characterized in that the first,
The second contact portion is formed of a leaf spring having elasticity in a direction substantially perpendicular to the sliding movement direction of the detection object.

[0015] The electrical characteristic detecting apparatus of the present invention is characterized in that:
The second contact portion is disposed so as to overlap in a direction perpendicular to a sliding movement direction of the detection object.

In the electrical characteristic detecting apparatus according to the present invention, the plurality of electrode probes are arranged side by side across the sliding movement direction of the object.

In the electrical characteristic detecting device according to the present invention, the second contact portion has a surface resistance of 10 ^{6 to} 10 ¹² Ω / □.

In the electrical characteristic detecting device according to the present invention, the second contact portion is made of a conductive plastic.

In the electrical characteristic detecting device according to the present invention, the second contact portion is made of a conductive ceramic.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the drawings of the electric characteristic detecting device of the present invention, FIG. 1 is an explanatory diagram showing a main part of the first embodiment of the electric characteristic detecting device of the present invention, and FIG. FIG.
FIG. 3 is a sectional view taken along line 2-2 of FIG. 3, FIG. 3 is an explanatory view showing a manufacturing method of the electric characteristic detecting device according to the first embodiment of the present invention, and FIG. FIG. 5 is an explanatory view showing an example of an object to be detected by the electrical characteristic detecting device of the present invention, and FIGS.
FIG. 3 is an explanatory diagram showing the operation of the first embodiment of the electrical characteristic detecting device of the present invention.

FIG. 8 shows a second example of the electric characteristic detecting apparatus according to the present invention.
FIG. 9 is a sectional view taken along line 9-9 in FIG. 8, and FIG. 10 is a third view of the electrical characteristic detecting device of the present invention.
FIG. 11 is an explanatory view showing the embodiment of FIG.
It is sectional drawing in 11 lines.

FIG. 12 is an explanatory view showing a fourth embodiment of the electric characteristic detecting apparatus of the present invention. FIGS. 13 and 14 show the operation of the fourth embodiment of the electric characteristic detecting apparatus of the present invention. FIG. 15 is an explanatory diagram showing a fifth embodiment of the electrical characteristic detecting device of the present invention.

The first embodiment of the electric characteristic detecting device of the present invention will be described with reference to FIGS. 2 to 7. The electrode probe P1 has a columnar shape, and the first and second contact portions 1 are provided at the tip. 2, a first contact portion 1 made of a good conductor and a second contact portion 2 made of a high-resistance material are in electrical contact with each other. ing.

The outer circumference of the disk-shaped contact portion C1 is an arc-shaped surface composed of the first and second contact portions 1 and 2, and the shaft portion 7 of the electrode probe P1 is The first and second contact portions 1 and 2 extend from C1 and have the same diameter as the contact portion C1 and are formed in a columnar shape integrally formed with the contact portion C1.

The rod portion 7 of the electrode probe P1 is provided with a bar-shaped convex portion 4 and a bar-shaped locking portion 6 in order from the contact portion C1 side. , First contact portion 1
And is located on the opposite side to the second contact portion 2 via the center axis of the electrode probe P1. In addition,
The protrusion 4 and the locking portion 6, which are formed separately from the shaft 7, are attached to the shaft 7.
May be fixed.

The first contact portion 1 is made of a good conductor, for example, brass or the like, which is plated with nickel and plated with gold, and the second contact portion 2 is made of a high-resistance material. Is made of a conductive plastic or a conductive ceramic having a density of 10 ⁶ to 10 ¹² Ω / □. As an example of the conductive plastic, a conductive polymer such as polyacetylene, a metal powder or a conductive filler such as a metal-plated inorganic substance is used. Or a conductive polymer comprising a mixture of polyethylene oxide and LiClO ₄ ,
Examples of conductive ceramics include ZrO ₂ —Y ₂ O ₃ and Bi ₂
O ₃ -Y ₂ O _3, etc. there is.

In the manufacture of such an electrode probe P1, as shown in FIG. 3, the first contact portion 1 and a member constituting a part of the shaft portion 7 are notched in a fan shape from a cylindrical central axis. A notch is formed, and the second contact portion 2 having a columnar shape having a fan-shaped cross section is fitted into the notch, and is fixed with a conductive adhesive.

The base 3 for holding the electrode probe P has a cylindrical shape made of a conductive material, has a cavity 3b for accommodating the electrode probe P inside, and has a cavity 3b.
Is open at the tip of the base 3.

The distal end of the base 3 is cut out from the cavity 3b toward the outer periphery of the base 3, and has a fan-shaped recess 3c connected to the cavity 3b, and is located at both ends of the recess 3c. And a pair of inner wall surfaces 3 facing each other in the circumferential direction of the base 3.
a is formed.

The electrode probe P1 has the shaft portion 7 housed in the hollow portion 3b of the base 3 and is held rotatably with respect to the base 3. The shaft portion 7 is moved from the contact portion C1 to the projection 4
Up to the outside protruding from the tip of the base 3, and the locking portion 6
It is located between a pair of inner walls 3a in a concave portion 3c provided in the base 3.

The electrode probe P1 and the base 3 are connected between the projection 4 and the base 3 of the electrode probe P1 by a spring member 5 made of a conductor, and the first contact portion 1 is connected to the spring member 5 and the base. 3 and electrically connected to a circuit for detecting electrical characteristics. The spring member 5 also has a role of returning the electrode probe P1 to the initial position.

The base 3 and the electrode probe P1 held by the base 3 are housed in a case A as shown in FIG. In the case A, an opening A2 is formed in a front surface A1, and a plurality of columnar rotating bodies 8 are juxtaposed inside the case A, and a plane that connects the upper ends of the rotating bodies 8 is a slide moving surface. F is formed.

The base 3 housed inside the case A,
The electrode probe P1 held by the base 3 has the base 3 fixed to the case A such that the electrode probe P1 faces the slide moving surface F. Such an electrode probe P1
The rotating body 8 rotates in a symmetrical direction with respect to the slide moving surface F.

The electrode probe P1 has a state in which the second contact portion 2 faces the slide moving surface F in an initial state in which no force in the rotation direction of the electrode probe P1 acts on the spring member 5, and the shaft portion. The locking portion 8 provided on 7
It is in a state where it is located substantially at the center of the pair of inner wall surfaces 3a provided on the base 3.

Hereinafter, the case of detecting the electrical characteristics of the thin-film magnetic head h as shown in FIG. 5, for example, using such an electrical characteristic detecting device will be described with reference to FIGS. The thin-film magnetic head h includes a gimbal h1 and a gimbal h
1 and a wiring portion h3 electrically connected to the head element h2.
Is drawn out from above the gimbal h2 and connected to the conductive pattern h5 formed on the substrate h4.

In the reproducing / recording thin-film magnetic head h, one pair of positive and negative wiring portions h3 is required for reproduction and recording, respectively, and the total number of conductive patterns h5 is four.

In order to detect the electrical characteristics of the thin-film magnetic head h, a conductive pattern h5 formed on a substrate h4 as an object to be detected is brought into contact with an electrode probe P1. The detection method is as follows. First, the substrate h on which the conductive pattern h5 is formed
When the board 4 is inserted through the insertion opening of the case A, the board h4 comes into contact with the upper end of the rotating body 8 and the rotating body 8 rotates, so that the board h4 slides smoothly on the slide moving surface F.

Then, as shown in FIG. 6, the electrode probe P1 first has a conductive pattern h at the second contact portion 2.
Contact 5 At this time, even if the electrode probe P1 and the conductive pattern h5 are charged, the electric charge between the electrode probe P1 and the conductive pattern h5 is transferred through the second contact portion 2 made of a high-resistance material to the second conductive material h5. 1 moves to the side of the contact portion 1, the electric charge moves slowly at the second contact portion 2 and the wiring portion h 3 via the conductive pattern h 5.
A large current does not flow through the head element h2. Therefore, the thin film magnetic head h is not destroyed by a large current.

After the charge transfer between the electrode probe P1 and the conductive pattern h5 is completed and the electrode probe P1 and the conductive pattern h5 have the same potential, when the substrate h4 is further inserted, the first and second electrode probes P1 are moved. As shown in FIG. 7, the contact portion C1 including the contact portions 1 and 2 rotates on the conductive pattern h5 with the substrate h4 sandwiched between the rotating body 8 and the contact portion C1. The contact part 1 comes into contact with the conductive pattern 5.

As described above, the contact portion C of the electrode probe P1
1 is a disk-shaped member, and the first and second contact portions 1 and 2 forming an arc-shaped surface which is an outer peripheral circle of the contact portion C1 come into contact with the conductive pattern h5 and rotate smoothly, so that the conductive portion h1 is electrically conductive. The pattern h5 is hardly damaged by the contact with the first and second contact portions 1 and 2.

With the rotation of the electrode probe P1, the spring member 5 extends, and the locking portion 6 provided on the electrode probe P1 is extended.
However, when it comes into contact with one inner wall 3a of the concave portion 3c provided in the base 3, the rotation of the electrode probe P1 stops. On the way, the electrode probe P1 is in contact with the conductive pattern h5 at the first contact portion 1.

As described above, the first contact portion 1 made of a good conductor of the electrode probe P1 is brought into contact with the conductive pattern h5, and the first contact portion 1 is stopped on the conductive pattern h5. The electrical characteristics of the thin-film magnetic head h are detected by a detection circuit (not shown) connected to the first contact portion 1.

In such detection, the internal resistance is small and
In addition, the electrical characteristics of the thin-film magnetic head h can be accurately detected in a stable state.

After the detection of the electrical characteristics of the thin-film magnetic head h is completed, when the substrate h4 on which the conductive pattern h5 is formed is pulled out of the case A, the electrode probe P1 returns to the initial position due to the elasticity of the spring member 5. Again, the second contact portion 2 faces the slide moving surface F of the substrate h4. Therefore,
When the electrical characteristics are subsequently detected, the conductive pattern h5 inserted into the case A first has the second contact 2
Comes into contact.

Next, a second embodiment of the present invention will be described with reference to FIGS. In the electrode probe P2 according to the second embodiment, the first contact portion 1 made of a good conductor is used.
1 and a contact portion C2 constituted by a second contact portion 12 made of a high-resistance material are disk-shaped, like the contact portion C1 in the electrode probe P1 of the first embodiment.

The shaft portion 17 of the electrode probe P2 is made of a good conductor and is formed in a cylindrical shape having a smaller diameter than the contact portion C2.
The shaft portion 17 is fixed to the contact portion C2 such that the center of the shaft portion 17 coincides with the center of the contact portion C2.
1 is electrically connected directly. The shaft 17 is
The same material as the first contact portion 11 of the electrode probe P2 may be used.

Further, the shaft portion 17 is provided with a bar-shaped convex portion 14 and a bar-shaped locking portion 16 in order from the contact portion C2 side, and the convex portion 14 and the locking portion 16 are provided on the electrode probe P2. It is located on the side opposite to the second contact portion 12 via the central axis.

The base 13 holding the electrode probe P2 is
It has the same shape as the base 3 of the first embodiment, and the shaft 1
A cavity 13b for accommodating the cavity 7, a fan-shaped recess 13c connected to the cavity 13b, and a pair of inner wall surfaces 13a located at both ends of the recess 13c are formed.

In the electrode probe P2, similarly to the first embodiment, the shaft portion 17 is housed in the hollow portion 13b of the base portion 13, and a conductive material is provided between the convex portion 14 and the base portion 13 of the electrode probe P2. The first contact portion 11 is connected to the shaft portion 17, the spring member 15, and the base portion 13.
Is electrically connected to a circuit for detecting electric characteristics.

The base 13 is attached to the case A in the same manner as the base 3 of the first embodiment. The operation of the electrode probe P2 and the like and the method of detecting electrical characteristics are described in the first section.
This is the same as the embodiment.

In such a second embodiment, the shaft 1
Since the diameter 7 is small, the size of the base 13 can be reduced, and a small and lightweight electrical characteristic detecting device can be obtained.

Since the conductive pattern h5 electrically connected to the thin-film magnetic head h is a pair of positive and negative, the base 3 (or 13) is formed as in the first and second embodiments. In the electrical characteristic detecting device holding one electrode probe P1 (or P2), a pair of electrode probes P
The electric characteristics of the thin-film magnetic head h are detected by arranging the base 3 (or 13) such that 1 (or P2) is in contact with a pair of positive and negative conductive patterns.

Next, a third embodiment of the present invention will be described with reference to FIG.
0 and FIG. The third embodiment of the present invention has a plurality of electrode probes P3, P4, P5.

The first electrode probe P3 is similar to the electrode probe P2 of the second embodiment in that the first contact portion C3 in the form of a disc has a first contact portion 21 made of a good conductor and a high contact portion. A second contact portion 22 made of a resistance material is formed, and a columnar first shaft portion 29 made of a good conductor is fixed to the contact portion C3. As in the second embodiment, the first shaft portion 29 is provided with a convex portion 34 and a locking portion 36. In the first electrode probe P3, the first contact portion 21 is electrically connected to an electric characteristic detecting circuit via the first shaft portion 29.

As in the first electrode probe P3, the second electrode probe P4 has a disk-shaped second contact portion C4.
The first contact portion 31 made of a good conductor and the second contact portion 32 made of a high-resistance material are provided. The second contact portion C4 has a second shaft portion 39 made of a good conductor. Fixed. Similarly to the first shaft portion 29, the second shaft portion 39 is provided with a protrusion 34 and a locking portion 36. In the second electrode probe P4, the first contact portion 31 is connected to the second shaft portion 39.
Is electrically connected to a circuit for detecting electric characteristics.

The second electrode probe P4 has a circular through hole T1 penetrating the center of the second contact portion C4 and a circular through hole T1.
1 and a pair of inner wall surfaces 3a which are opposed to each other in the circumferential direction of the second contact portion C4 are formed at both end portions of the concave portion U1.

Further, the second shaft portion 39 has a second contact portion C
4, the opening diameter of the second shaft portion 39 is equal to the diameter of the through hole T1 of the second contact portion C4,
The second shaft portion 39 has an opening formed in the through hole T of the second contact portion C4.
It is fixed to the second contact portion C4 so as to coincide with 1. In addition, a cylinder 71 made of an insulating material is inserted into the second shaft portion 39.

The second electrode probe P4 and the first
Of the first electrode probe P3 is the first electrode probe P3.
Is inserted through the through-hole T1 provided in the second contact portion C4 of the second electrode probe P4 and the second shaft portion 39, and is disposed coaxially. Further, the first shaft portion 29 of the first electrode probe P3 is electrically insulated from the second electrode probe P4 by the cylinder 71.

At this time, the first electrode probe P3 and the second
The electrode probe P4 of each of the first contact portions 21,
The second contact portions 22 and 32 are disposed so as to oppose each other in the axial direction, while the first contacts 31 oppose each other in the axial direction.

The convex portion 34 provided on the first shaft portion 29 of the first electrode probe P3 is
3 and the second electrode probe P4
Between the first contact portions 31 in the locking portion 36
Is located between a pair of inner walls S1 provided at the second contact portion C4 of the second electrode probe P4.

An insulating spring made of a non-conductive material is provided between the first contact portion 31 of the second electrode probe P4 and the convex portion 34 provided on the first shaft portion 29 of the first electrode probe P3. They are connected by a member 35.

In the third electrode probe P5, similarly to the second electrode probe P4, the third contact portion C5 has a first contact portion 41 made of a good conductor and a second contact portion made of a high-resistance material. And the third portion 42.
The contact portion C5 of the third contact portion C5 is made of a good conductor.
A cylindrical third shaft portion 49 having a diameter smaller than 5 is fixed, and the third shaft portion 49 is provided with a convex portion 54 and a locking portion 56.

In the third electrode probe P5, the diameter of the through hole T2 passing through the center of the third contact portion C5 is larger than the outer diameter of the second shaft portion 39. Further, the third contact portion C5 is
Similarly to the second contact portion C5 of the second electrode probe P4, a fan-shaped concave portion U2 connected to the through hole T2 and the concave portion U2
A pair of inner walls S2 are formed at both ends of the third electrode probe P5 and are opposed to each other in the circumferential direction of the third electrode probe P5.

The opening diameter of the third shaft portion 49 is formed larger than the outer diameter of the second shaft portion 39, and the third shaft portion 4
9 is fixed to the third contact portion C5 such that the opening coincides with the through hole T2 of the third contact portion C5. A cylinder 72 made of an insulating material is inserted into the third shaft 49.

The third electrode probe P5 and the second
Is the second electrode probe P4.
Of the third electrode probe P5 and the second electrode probe are inserted through the through-hole T2 provided in the third contact portion C5 of the third electrode probe P5 and the third shaft portion 49. P
4 is arranged coaxially. Further, the second shaft portion 39 of the second electrode probe P4 is electrically insulated from the third electrode probe P5 by the cylinder 72.

At this time, the second electrode probe P4 and the third
The electrode probe P5 of each of the first contact portions 31,
41 are arranged so as to oppose each other, and the second contact portions 32 and 42 are opposing each other.

The projection 44 provided on the second shaft 39 of the second electrode probe P4 is
4, the first contact portion 31 and the third electrode probe P5
Interposed between the first contact portions 41 in the
Is located substantially at the center between a pair of inner walls S2 provided at the third contact portion C5 of the third electrode probe P5.

An insulating spring made of a non-conductive material is provided between the first contact portion 41 of the third electrode probe P5 and the convex portion 44 provided on the second shaft portion 39 of the second electrode portion P4. They are connected by a member 45.

The base 53 holding the electrode probes P3, P4, P5 has the same shape as the base 3 of the first embodiment, and has a cavity 53b for accommodating the third shaft 49.
And a fan-shaped concave portion 53c connected to the hollow portion 53b, and a pair of inner wall surfaces 3a facing each other in the circumferential direction of the base portion 3 are formed at both ends of the concave portion 53c.

The third shaft portion 49 is provided with the hollow portion 53 of the base portion 53.
b, the base 54 and the projection 54 provided on the third shaft 49 of the third electrode probe P5 are connected by a conductive spring member 55 made of a conductive material.

In the third electrode probe P5, the first contact portion 41 has a third shaft portion 49, a conductive spring member 55, and a base portion 53.
Is electrically connected to a circuit for detecting electric characteristics. The conductive spring member 55 also serves to return the third electrode probe P5 to the initial position.

The base 53 is attached to the case A in the same manner as the base 3 of the first embodiment. Electrode probe P3,
The operation of P4 and P5 and the method of detecting the electrical characteristics are such that the electrode probes P3, P4 and P5 are simultaneously contacted with a plurality of conductive patterns h5.
This is the same as the embodiment.

The rotation of the electrode probes P3, P4, P5
When the locking portion 56 of the third electrode probe P5 comes into contact with the inner wall surface 53a of the base 53, first, the third electrode probe P5
The rotation of No. 5 stops. Then, the second electrode probe P4
Is in contact with the inner wall S2 provided at the third contact portion C5 of the third electrode probe P5, and the rotation of the second electrode probe P4 is stopped. Subsequently, the locking portion 36 of the first electrode probe P3 comes into contact with the inner wall S1 provided at the second contact portion C4 of the second electrode probe P4, and
Of the electrode probe P3 stops.

After the detection of the electrical characteristics of the thin-film magnetic head h is completed, the substrate h4 on which the conductive pattern h5 is formed is pulled out of the case A.
Return to the initial position by the elasticity of the conductive spring member 55,
In conjunction therewith, the first and second electrode probes P3, P4
Also return to the initial position due to the elasticity of the insulating spring members 35 and 45, respectively. Therefore, the conductive pattern h inserted in the case A is also detected when the electrical characteristics are continuously detected.
5 comes first into contact with the second contact portions 22, 32, 42.

In FIG. 10, three electrode probes are shown, but the second electrode probe P4 may not be provided. At this time, the first and third electrode probes P3 and P5 are connected to a pair of positive and negative conductive patterns h corresponding to reproduction or recording.
5, the electrical characteristics for reproduction or recording of the thin-film magnetic head h can be detected.

Further, in FIG. 10, one second electrode probe P4 is provided between the first and third electrode probes P3 and P5, but between the first and third electrode probes P3 and P5. The second electrode probe P4 and the second electrode probe P
A fourth electrode probe similar to the fourth electrode probe may be provided.

As described above, when the four electrode probes are provided, the thin-film magnetic head h is for reproduction / recording, and the substrate h4
A pair of conductive patterns h corresponding to reproduction and recording
5 are formed, the respective conductive patterns h5
The electrical characteristics can be simultaneously detected for both reproduction and recording of the thin-film magnetic head h by bringing the electrode probe into contact with the electrode probe.

In the electrical characteristic detecting apparatus according to the third embodiment, since the plurality of electrode probes P3, P4, and P5 are provided coaxially, the electrode probes P3, P4,
The area occupied by the P5 and the base 53 is small, so that a small electrical characteristic detecting device can be obtained.

In FIG. 10, the first, second, and third electrodes of the first, second, and third electrode probes P3, P4, and P5 are respectively shown.
Although the third contact portions C3, C4, and C5 have the same diameter, they do not necessarily have to have the same diameter.
First, second, and third depending on the shape of the substrate h4 and the like on which
The diameters of the contact portions C3, C4, C5 may be changed.

Next, a fourth embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIGS. The electrode probe P6 according to the fourth embodiment of the present invention includes a first contact portion 61 made of a good conductor and a second contact portion 6 made of a high-resistance material.
And 2.

The first contact portion 61 is made of a thin metal plate having a spring property, and has a contact portion 61b formed by bending a tip and an inclined portion 61c provided at the bent portion.
And

The second contact portion 62 is made of a high-resistance material such as conductive plastic or conductive ceramic, and has a base portion 62a made of a thin plate spring having a spring property and a base portion 6a.
2a, and a contact portion 62b that protrudes substantially perpendicularly from the front end of the contact portion 2a.

The shape of the second contact portion 62 is easy to manufacture when the second contact portion 62 is a molded product of conductive plastic or conductive ceramic, and other shapes can be applied. It is.

The first and second contact portions 61, 6
Reference numeral 2 denotes an electrical connection in which the base 61a of the first contact portion 61 is superposed on the surface of the base 62a of the second contact portion 62 on which the contact portion 61b is provided.

The contact portions 61b, 62b of the first and second contact portions 61, 62 project in the same direction, and the contact portion 61b of the first contact portion 61 is connected to the second contact portion 62. It is located behind the contact portion 62b and is arranged at a predetermined interval from the contact portion 62b of the second contact portion 62.

The electrode probe P6 is housed in a case A as shown in FIG. 4 and has a contact portion 61b of the first contact portion 61 and a second contact portion 6 like the first embodiment.
The second contact portion 62b is disposed so as to face the slide movement surface F, and the contact portion 62b of the second contact portion 62 and the contact portion 62b of the first contact portion 61 are sequentially arranged from the insertion opening A2 side of the case A. The contact portion 61b is located.

When detecting the electrical characteristics of the thin-film magnetic head h as shown in FIG.
Is inserted into the insertion opening A2 of the case A, first, the electrode probe P6 makes the second contact portion 62
But rides on the substrate h4 by the spring property of the base 62a,
The contact portion 62b contacts the base conductive pattern h5. At this time, the contact portion 62b of the second contact portion 62 is
Due to the spring property of a, it comes into contact with the conductive pattern h5 with an appropriate pressure.

At this time, even if the electrode probe P6 and the conductive pattern h5 are charged, the electric charge moves from the second contact portion 62 to the first contact portion 61, so that the electric charge moves to the second contact portion. In the portion 62, the current becomes slow, a large current does not flow through the thin-film magnetic head h via the conductive pattern h5, and the thin-film magnetic head h is not electrostatically damaged.

After the electric charge transfer between the electrode probe P6 and the conductive pattern h5 is completed and the potential of the electrode probe P6 and the conductive pattern h5 become the same, when the substrate h4 is further inserted, the first contact portion 61 is inclined. The contact portion 61b comes in contact with the base conductive pattern h5 while riding on the substrate h4 from the portion 61c. At this time, the contact portion 61b of the first contact portion 61
Abuts on the conductive pattern h5 with an appropriate pressure due to the spring property of the base 61a.

The detection of the electrical characteristics of the thin-film magnetic head h is performed as follows.
This is performed by a detection circuit (not shown) connected to the first contact portion 61 in a state where the first contact portion 1 made of a good conductor is electrically connected to the conductive pattern h5. In the detection of such electric characteristics, the internal resistance is small and the electric characteristics of the thin-film magnetic head h can be accurately detected.

In the fourth embodiment, since the structure is simple, it is possible to provide an electrical characteristic detecting device which can be easily manufactured.

The fifth embodiment shown in FIG.
The electrode probes P6 of the fourth embodiment are arranged side by side so as to cross the sliding direction of the substrate h4 on which the conductive pattern h5 is formed. In the fifth embodiment,
The detection of the electrical characteristics by the plurality of conductive patterns h5 can be performed simultaneously.

In the process of manufacturing an electronic device such as a thin-film magnetic head, it is possible to inspect the continuity state of the wiring portion drawn out from the element portion by using the electrical characteristic detecting devices of the first to fifth embodiments. it can.

Further, the electrical characteristic detecting devices of the first to fifth embodiments can be applied to a connector. At this time, the first and second contact portions of the electrode probe serve as contact portions of a connector, and the first contact portion comes into contact with a conductive pattern that is a terminal portion of a wiring and is stationary with respect to the conductive pattern. It is kept in a state.

[0095]

According to the electric characteristic detecting apparatus of the present invention, the electrode probe is composed of a first contact made of a good conductor and a second contact made of a conductor having a higher electric resistance than the first contact. A contact portion, wherein the first and second contact portions are in an electrically connected state, and slide the object to be detected with respect to the electrode probe to thereby form the second contact portion. After the portion contacts the object, the first contact portion contacts the object. In such an electrical characteristic measuring apparatus, even if the electrode probe or the object to be detected is charged, the electric charge between the electrode probe and the object to be detected is transferred to the good conductor through the second contact portion made of a high-resistance material. , The electric charge moves slowly at the second contact portion, so that a large current does not flow through the detected object, and the detected object and the detected object are electrically connected to each other. Electrostatic destruction of electronic devices to be electrically connected can be prevented. In addition, after the charge transfer is completed, the first contact portion and the object are electrically connected to each other, and the object and the electronic device electrically connected to the object are electrically connected with a low internal resistance. Electrical characteristics can be accurately detected.

Further, since the object to be detected is slid, the first contact portion comes into contact with the object after the second contact portion comes into contact with the object to be detected. Yes, and can be easily detected.

The electric characteristic detecting device of the present invention has an arc-shaped surface comprising the first contact portion and the second contact portion, and the first and second contact portions are provided in contact with the object to be detected. The contact allows rotation on the detection object. In such an electrical characteristic detecting device, the first and second contact portions move smoothly while rotating on the object to be detected, so that the object to be measured is first and second.
Hardly damaged by contact with the contact part of

[0098] In the electrical characteristic detecting device of the present invention, the electrode probe has a substantially cylindrical shaft portion, and is held at the base by the shaft portion. In such an electrical characteristic detection device, it is easy to hold the shaft that rotates with the rotation of the first and second contact portions.

In the electrical characteristic detecting device according to the present invention, in the initial state, the second contact portion faces the sliding movement surface of the detection object. In such an electrical characteristic detecting device,
Even when the detection of the electrical characteristics is performed continuously, since the second contact portion first comes into contact with the detection target, the detection target,
Electrostatic damage of an electronic device electrically connected to the object can be more reliably prevented.

In the electrical characteristic detecting device according to the present invention, the rotation of the electrode probe is stopped while the first contact portion is in contact with the object to be detected. In such an electrical characteristic detection device, the first contact portion made of a good conductor is fixed on the object to be detected, and the first contact portion detects the electrical characteristic in a state where the contact with the object to be detected is stable. Since the detection can be performed, the electrical characteristics of the object to be detected and the electronic device electrically connected to the object can be detected more accurately.

In the electrical characteristic detecting device according to the present invention, the locking portion provided integrally with the electrode probe is brought into contact with the base portion to stop the rotation of the electrode probe. In such an electrical characteristic detection device, the rotation of the electrode probe can be reliably stopped, and the structure for stopping the electrode probe is simple, so that the manufacturing is easy.

In the electrical characteristic detecting device of the present invention, a spring member for returning the electrode probe to the initial position is provided between the electrode probe and the base. In such an electrical characteristic detecting device, it can be realized with a simple structure that in the initial state, the second contact portion faces the sliding movement surface of the detection target.

The electrical characteristic detecting device according to the present invention includes the first,
The plurality of electrode probes having the second contact portion are arranged coaxially. In such an electrical characteristic detection device, since the electrode probe contacts each of the plurality of detected objects, it is possible to detect the electrical characteristics of the electronic device electrically connected to the detected objects by the plurality of detected objects. it can. Further, since the electrode probes are arranged coaxially, the area occupied by the electrode probes and the base is small, and a small electrical characteristic detecting device can be obtained.

In the electrical characteristic detecting device according to the present invention, the first contact portion and the second contact portion are arranged at a predetermined interval in a sliding movement direction of the detection object. In such an electrical characteristic detecting device, the structure in which the second contact portion contacts the object to be detected and then the first contact portion contacts the object to be detected is simple and easy to manufacture.

The electric characteristic detecting device according to the present invention includes the first,
The second contact portion is formed of a leaf spring having elasticity in a direction substantially perpendicular to the sliding movement direction of the detection object. In such an electrical characteristic detecting device, the first and second contact portions come into contact with the object to be detected at an appropriate pressure due to the spring property, and the object to be detected surely contacts the first and second contact portions. Contact
A highly reliable electrical characteristic detection device can be provided.

The electric characteristic detecting device according to the present invention includes the first,
The second contact portion is disposed so as to overlap in a direction perpendicular to a sliding movement direction of the detection object. In such an electrical characteristic detecting device, the area occupied by the first and second contact portions in the sliding movement direction of the detection object is small,
It can be small.

In the electrical characteristic detecting apparatus according to the present invention, the plurality of electrode probes are arranged side by side across the sliding direction of the object. In such an electrical characteristic detection device, since the electrode probe is in contact with each of the plurality of detected objects, the plurality of detected objects detect the electrical characteristics of the electronic device electrically connected to the detected objects. be able to.

In the electrical characteristic detecting device according to the present invention, the second contact portion has a surface resistance of 10 ^{6 to} 10 ¹² Ω / □.
In such an electrical characteristic detecting device, when the second contact portion comes into contact with the object, the electric current due to the charge transfer between the object and the electrode probe is made smaller, and the electric connection is made with the object. The electronic device can be more reliably prevented from being electrostatically damaged.

In the electrical characteristic detecting device of the present invention, the second contact portion is made of a conductive plastic. In such an electrical characteristic detecting device, the second contact portion is made of a conductive plastic so that, for example, even if a surfactant or moisture is adhered to the surface of the insulating material, the surface resistance can be 10 ^{6 to} 10 ^A stable surface resistance value can be obtained as compared with ¹² Ω / □.

In the electrical characteristic detecting device according to the present invention, the second contact portion is made of a conductive ceramic. In such an electrical characteristic detecting device, by forming the second contact portion from conductive ceramics, for example, even if a surfactant or moisture is adhered to the surface of the insulating material, the surface resistance becomes 10 ^{6 to} 10 ^A stable surface resistance value can be obtained as compared with ¹² Ω / □.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a main part of a first embodiment of an electric characteristic detecting device of the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG. 1;

FIG. 3 is an explanatory view showing a method of manufacturing the electric characteristic detecting device according to the first embodiment of the present invention.

FIG. 4 is an overall schematic diagram of a first embodiment of the electrical characteristic detecting device of the present invention.

FIG. 5 is an explanatory view showing an example of an object to be detected by the electrical characteristic detecting device of the present invention.

FIG. 6 is an explanatory diagram showing the operation of the first embodiment of the electrical characteristic detecting device of the present invention.

FIG. 7 is an explanatory diagram showing the operation of the first embodiment of the electrical characteristic detecting device of the present invention.

FIG. 8 is an explanatory view showing a second embodiment of the electrical characteristic detecting device of the present invention.

FIG. 9 is a sectional view taken along line 9-9 in FIG. 8;

FIG. 10 is an explanatory view showing a third embodiment of the electrical characteristic detecting device of the present invention.

FIG. 11 is a sectional view taken along line 11-11 of FIG. 10;

FIG. 12 is an explanatory view showing a fourth embodiment of the electrical characteristic detecting device of the present invention.

FIG. 13 is an explanatory diagram showing the operation of the fourth embodiment of the electrical characteristic detecting device of the present invention.

FIG. 14 is an explanatory diagram showing the operation of the fourth embodiment of the electrical characteristic detecting device of the present invention.

FIG. 15 is an explanatory view showing a fifth embodiment of the electrical characteristic detecting device of the present invention.

[Explanation of symbols]

 A Case F Sliding movement surface of object to be detected C1, C2 Contact part C3, C4, C5 First, second, third contact part S1, S2 Inner wall surface T1, T2 Through hole P1, P2 Electrode probe P3, P4, P5 First, second, and third electrode probes U1, U2 recessed part h thin-film magnetic head h2 head element h3 wiring part h4 substrate h5 conductive pattern (detected object) 1, 11, 21, 31, 41, 61 first Contact part 2, 12, 22, 32, 42, 62 Second contact part 3, 13, 53 Base 3a, 13a, 53a Inner wall surface 3b, 13b 53b Hollow part 3c, 13c, 53c Concave part 4, 14, 34, 44 , 54 Convex part 5, 15 Spring member 35, 45 Insulating spring member 55 Conductive spring member 6, 16, 36, 46, 56 Locking part 7, 17 Shaft part 8 Rotating body 29 First shaft part 39 Second shaft Part 4 The third shaft portion

Claims (15)

[Claims] The electrode probe is made of a first conductive material.
And a second contact portion made of a conductor having higher electric resistance than the first contact portion, wherein the first and second contact portions are electrically connected. Wherein the object to be detected is slid with respect to the electrode probe so that the first contact portion contacts the object after the second contact portion contacts the object to be detected. An electrical characteristic detecting device characterized in that: 2. An object according to claim 1, further comprising an arc-shaped surface comprising said first contact portion and said second contact portion, wherein said first and second contact portions are brought into contact with said object by contacting said object. 2. The electrical characteristic detecting device according to claim 1, wherein the device is rotatable. 3. The electrical characteristic detecting device according to claim 1, wherein said electrode probe has a substantially cylindrical shaft portion, and is held at a base by said shaft portion. 4. The electrical characteristic detecting device according to claim 1, wherein in an initial state, the second contact portion faces a sliding movement surface of the object. . 5. The apparatus according to claim 2, wherein the rotation of the electrode probe is stopped while the first contact portion is in contact with the object to be detected. Electrical characteristic detecting device. 6. The electric characteristic according to claim 6, wherein a locking portion provided integrally with said electrode probe is brought into contact with said base portion to stop rotation of said electrode probe. Detection device. 7. Between the electrode probe and the base,
The electrical characteristic detecting device according to claim 4, further comprising a spring member that returns the electrode probe to the initial position. 8. The electrical characteristic detecting device according to claim 2, wherein the plurality of electrode probes having the first and second contact portions are arranged coaxially. . 9. The electric characteristic detection device according to claim 1, wherein the first contact portion and the second contact portion are arranged at a predetermined interval in a sliding direction of the object. apparatus. 10. The electric device according to claim 9, wherein the first and second contact portions are formed of a leaf spring having elasticity in a direction substantially perpendicular to a sliding movement direction of the detection object. Characteristic detection device. 11. The electrical characteristic detection device according to claim 9, wherein the first and second contact portions are arranged so as to be overlapped with each other in a direction perpendicular to a sliding movement direction of the detection object. apparatus. 12. The electrical characteristic detecting device according to claim 9, wherein a plurality of said electrode probes are arranged side by side across a sliding movement direction of said detected object. 13. The surface resistance of the second contact portion is 10
The electrical characteristic detecting device according to claim 1, wherein the electrical characteristic is ^{6 to} 10 ¹² Ω / □. 14. The electrical characteristic detecting device according to claim 13, wherein the second contact portion is made of a conductive plastic. 15. The electric characteristic detecting device according to claim 13, wherein the second contact portion is made of a conductive ceramic.