JP2002129273A - Ferromagnetic shape memory alloy and actuator using the same - Google Patents

Ferromagnetic shape memory alloy and actuator using the same

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Publication number
JP2002129273A
JP2002129273A JP2000290220A JP2000290220A JP2002129273A JP 2002129273 A JP2002129273 A JP 2002129273A JP 2000290220 A JP2000290220 A JP 2000290220A JP 2000290220 A JP2000290220 A JP 2000290220A JP 2002129273 A JP2002129273 A JP 2002129273A
Authority
JP
Japan
Prior art keywords
shape memory
atomic
phase
memory alloy
ferromagnetic shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000290220A
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Japanese (ja)
Other versions
JP3425935B2 (en
Inventor
Masanari Oikawa
勝成 及川
Wolf Lars
ウルフ ラルス
Kiyohito Ishida
清仁 石田
Ryosuke Kainuma
亮介 貝沼
Fumihiko Motojima
文彦 源島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
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Priority to JP2000290220A priority Critical patent/JP3425935B2/en
Priority to PCT/JP2001/006864 priority patent/WO2002014565A1/en
Publication of JP2002129273A publication Critical patent/JP2002129273A/en
Application granted granted Critical
Publication of JP3425935B2 publication Critical patent/JP3425935B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/0302—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity characterised by unspecified or heterogeneous hardness or specially adapted for magnetic hardness transitions
    • H01F1/0306—Metals or alloys, e.g. LAVES phase alloys of the MgCu2-type

Abstract

PROBLEM TO BE SOLVED: To provide a ferromagnetic shape memory alloy excellent in ductility, having ferromagnetic properties and martensitic transformation, and to provide an actuator using the same. SOLUTION: This ferromagnetic shape memory alloy has a composition containing, by atom, 5 to 70% Co, 5 to 70% Ni and 5 to 50% Al, and the balance inevitable impurities and has a single phase structure composed of a βphase with a B2 structure or a dual phase structure composed of a γ phase with an fcc structure and a β phase with a B2 structure.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、延性に優れ、強磁
性を有し、かつマルテンサイト変態を生じる強磁性形状
記憶合金、およびそれを用いたアクチュエーターに関す
る。TECHNICAL FIELD The present invention relates to a ferromagnetic shape memory alloy which has excellent ductility, has ferromagnetism, and generates martensitic transformation, and an actuator using the same.

【０００２】[0002]

【従来の技術】機械構造物を構成する部品のうち、変
形，移動あるいは応力を発生する機能性部品はアクチュ
エーターと呼ばれる。アクチュエーターの材料として
は、圧電材料，磁歪材料，電気粘性流体，形状記憶合金
等がある。いずれの材料も、アクチュエーターの機能は
結晶構造の相変態現象を伴って発現し、物理化学的特性
値や力学的エネルギーの変換作用が関わっている。2. Description of the Related Art Among components constituting a mechanical structure, a functional component that generates deformation, movement, or stress is called an actuator. Actuator materials include piezoelectric materials, magnetostrictive materials, electrorheological fluids, shape memory alloys, and the like. In any of the materials, the function of the actuator is expressed by a phase transformation phenomenon of the crystal structure, and the action of converting physicochemical characteristics and mechanical energy is involved.

【０００３】アクチュエーター用材料のうち、形状記憶
合金は、冷却によるマルテンサイト変態と、加熱による
その逆変態機構を利用するものである。すなわち高温相
であるオーステナイト状態で形状を拘束して熱処理する
ことによって合金に形状を記憶させ、低温相であるマル
テンサイト状態で変形した後、加熱するとオーステナイ
トに戻る逆変態を生じて元の形状に戻るのである。[0003] Among actuator materials, shape memory alloys utilize a martensitic transformation by cooling and a reverse transformation mechanism by heating. In other words, the alloy is made to memorize the shape by restraining the shape in the austenite state, which is the high-temperature phase, and then heat-treated. Return.

【０００４】一般に、冷却時の変態温度よりも加熱時の
変態温度の方が高く、その温度差を温度ヒステリシスと
いう。温度ヒステリシスが小さい場合を熱弾性マルテン
サイト変態といい、約５％にも及ぶ大きな形状回復歪が
得られる。しかし熱弾性マルテンサイト変態を利用する
形状記憶合金は、温度変化によって形状記憶効果を発現
させるのであるから加熱と冷却が必要であるが、冷却過
程は熱放散で律速されるため、形状記憶効果の応答速度
が遅い。したがって形状記憶効果を繰り返し発現させる
アクチュエーターには利用し難いという問題があった。[0004] Generally, the transformation temperature during heating is higher than the transformation temperature during cooling, and the temperature difference is called temperature hysteresis. The case where the temperature hysteresis is small is called thermoelastic martensitic transformation, and a large shape recovery strain of about 5% can be obtained. However, shape memory alloys utilizing thermoelastic martensitic transformation require heating and cooling because they exhibit a shape memory effect due to temperature changes.However, the cooling process is limited by heat dissipation, so the shape memory effect is not Response speed is slow. Therefore, there is a problem that it is difficult to use the actuator for repeatedly exhibiting the shape memory effect.

【０００５】そこで近年、新しいアクチュエーター用材
料として強磁性形状記憶合金が注目されている。強磁性
形状記憶合金は、温度変化ではなく、外的に磁気エネル
ギーを付加して、磁気誘起マルテンサイト変態を生じさ
せ、形状記憶効果の応答性を高めようとするものであ
る。あるいはマルテンサイト相状態で磁場を加えると、
双晶の移動で歪みを生じる。この歪みをアクチュエータ
ーとして応用しようとするものである。[0005] In recent years, ferromagnetic shape memory alloys have attracted attention as a new actuator material. The ferromagnetic shape memory alloy is intended not to change the temperature but to add magnetic energy externally to cause a magnetically induced martensitic transformation to enhance the response of the shape memory effect. Or when a magnetic field is applied in the martensitic phase,
Distortion occurs due to twin movement. This strain is intended to be applied as an actuator.

【０００６】特開平11-269611 号公報には、鉄基磁性形
状記憶合金およびその製造方法が開示されている。この
技術は、Pd含有量が27〜32原子％のFe−Pd系合金、ある
いはPt含有量が23〜30原子％のFe−Pt系合金を基本とす
る鉄基磁性形状記憶合金に磁気エネルギーを付与して磁
気誘起マルテンサイト変態を発現させることによって、
形状記憶現象を発現させようとするものである。しかし
この技術では、材料の延性が低いので機械部品として複
雑かつ精密な形状を付与するのが困難であり、しかも原
料価格が高いため経済的にも不利であった。Japanese Patent Application Laid-Open No. 11-269611 discloses an iron-based magnetic shape memory alloy and a method for producing the same. This technology applies magnetic energy to an iron-based magnetic shape memory alloy based on an Fe-Pd-based alloy having a Pd content of 27 to 32 atomic% or an Fe-Pt-based alloy having a Pt content of 23 to 30 atomic%. By imparting and expressing magnetically induced martensitic transformation,
It is intended to develop a shape memory phenomenon. However, in this technique, it is difficult to give a complicated and precise shape as a mechanical part because the material has low ductility, and it is economically disadvantageous because the raw material price is high.

【０００７】特開平5-311287号公報には、強磁性Cu系形
状記憶材料とその製造方法が開示されている。この技術
は、Cu−Al−Mn合金粉末体を加圧して固化成形した後、
焼結および加工して、形状記憶現象を電気的スイッチン
グ装置や温度感知センサーに利用しようとするものであ
る。しかしこの技術では、粉末材料を加圧成形して焼結
した後、加工するため機械部品として複雑かつ精密な形
状を付与するのが困難であった。Japanese Patent Application Laid-Open No. Hei 5-311287 discloses a ferromagnetic Cu-based shape memory material and a method for producing the same. This technology, after pressing and solidifying the Cu-Al-Mn alloy powder body,
Sintering and processing are intended to utilize the shape memory phenomenon in electrical switching devices and temperature sensing sensors. However, according to this technique, it is difficult to impart a complicated and precise shape as a mechanical part because the powder material is pressed and sintered and then processed.

【０００８】米国特許5,958,154 号公報には、Ni−Mn−
Ga系合金のアクチュエーター用材料に磁場を付与して形
状記憶現象を発現させる技術が開示されている。しかし
この技術では、材料の延性が低いので機械部品として複
雑かつ精密な形状を付与するのが困難であり、しかも繰
り返し特性が悪いという問題があった。US Pat. No. 5,958,154 discloses that Ni-Mn-
A technique has been disclosed in which a magnetic field is applied to a Ga-based alloy actuator material to exert a shape memory phenomenon. However, in this technique, there is a problem that it is difficult to give a complicated and precise shape as a mechanical part because the ductility of the material is low, and the repetition characteristics are poor.

【０００９】[0009]

【発明が解決しようとする課題】本発明は上記のような
問題を解消し、延性に優れ、強磁性を有し、かつマルテ
ンサイト変態を生じる強磁性形状記憶合金、およびそれ
を用いたアクチュエーターを提供することを目的とす
る。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and provides a ferromagnetic shape memory alloy which is excellent in ductility, has ferromagnetism and causes martensitic transformation, and an actuator using the same. The purpose is to provide.

【００１０】[0010]

【課題を解決するための手段】本発明は、Coを５〜70原
子％、Niを５〜70原子％、Alを５〜50原子％含有し、残
部が不可避的不純物からなる組成と、Ｂ２構造（いわゆ
るCeCl構造）のβ相からなる単相組織、または延性のあ
るｆｃｃ構造のγ相とＢ２構造のβ相からなる２相組織
とを有する強磁性形状記憶合金である。According to the present invention, there is provided a composition comprising 5 to 70 atomic% of Co, 5 to 70 atomic% of Ni, 5 to 50 atomic% of Al and the balance consisting of unavoidable impurities. It is a ferromagnetic shape memory alloy having a single phase structure composed of a β phase having a structure (so-called CeCl structure) or a two phase structure composed of a γ phase having a ductile fcc structure and a β phase having a B2 structure.

【００１１】前記した発明においては、第１の好適態様
として、前記組成に加えて、Feを0.001〜30原子％およ
び／またはMnを 0.001〜30原子％含有することが好まし
い。また第２の好適態様として、前記組成に加えて、G
a、InおよびSiのうちの１種を 0.001〜50原子％または
２種以上を合計 0.001〜50原子％含有することが好まし
い。In the above-mentioned invention, as a first preferred embodiment, it is preferable that 0.001 to 30 atomic% of Fe and / or 0.001 to 30 atomic% of Mn are contained in addition to the above composition. Further, as a second preferred embodiment, in addition to the composition, G
It is preferred that one of a, In and Si is contained in an amount of 0.001 to 50 atomic% or a total of two or more is 0.001 to 50 atomic%.

【００１２】また第３の好適態様として、前記組成に加
えて、Ｂを0.0005〜0.01原子％、Mgを0.0005〜0.01原子
％、Ｃを0.0005〜0.01原子％およびＰを0.0005〜0.01原
子％のうちの１種または２種以上含有することが好まし
い。また第４の好適態様として、前記組成に加えて、P
t，Pd，Au，Ag，Nb，Ｖ，Ti，Cr，Zr，Cu，ＷおよびMo
のうちの１種を 0.001〜10原子％または２種以上を合計
0.001〜10原子％含有することが好ましい。In a third preferred embodiment, in addition to the above composition, B is 0.0005 to 0.01 atomic%, Mg is 0.0005 to 0.01 atomic%, C is 0.0005 to 0.01 atomic%, and P is 0.0005 to 0.01 atomic%. It is preferable to contain one or more of these. As a fourth preferred embodiment, in addition to the composition, P
t, Pd, Au, Ag, Nb, V, Ti, Cr, Zr, Cu, W and Mo
0.001 to 10% by atom or one or more of them
It is preferable to contain 0.001 to 10 atomic%.

【００１３】また第５の好適態様として、前記単相組織
が単結晶であることが好ましい。また第６の好適態様と
して、前記２相組織のγ相の体積分率が0.01〜80体積％
の範囲を満足することが好ましい。また本発明は、前記
した強磁性形状記憶合金からなる部材と、その部材に対
向する位置に配設され部材を吸着する磁石とを有するア
クチュエーターである。In a fifth preferred aspect, the single phase structure is preferably a single crystal. As a sixth preferred embodiment, the volume fraction of the γ phase in the two-phase structure is 0.01 to 80% by volume.
It is preferable to satisfy the following range. Further, the present invention is an actuator having a member made of the above-described ferromagnetic shape memory alloy, and a magnet disposed at a position facing the member and attracting the member.

【００１４】また本発明は、前記した強磁性形状記憶合
金からなる部材と、その部材の一部を加熱する加熱装置
と、加熱装置によってマルテンサイト変態温度以上に加
熱された部分とマルテンサイト変態温度より低温部分の
境界部に生じる透磁率の変化によって部材に動力を付与
する磁石とを有するアクチュエーターである。前記した
発明においては、好適態様として、加熱装置がレーザー
ビーム発振器であることが好ましい。The present invention also provides a member made of the above-described ferromagnetic shape memory alloy, a heating device for heating a part of the member, a portion heated by the heating device to a temperature higher than the martensite transformation temperature, and a martensite transformation temperature. An actuator having a magnet that gives power to a member by a change in magnetic permeability generated at a boundary portion of a lower temperature portion. In the above-described invention, as a preferred embodiment, it is preferable that the heating device is a laser beam oscillator.

【００１５】また本発明は、前記した強磁性形状記憶合
金からなる部材と、その部材の透磁率および／または磁
化率を測定する測定装置と、測定装置の測定値を入力信
号として演算処理する演算装置と、演算装置からの出力
信号に応じて作動する装置とを有するアクチュエーター
である。Further, the present invention provides a member made of the above-described ferromagnetic shape memory alloy, a measuring device for measuring the magnetic permeability and / or the magnetic susceptibility of the member, and an arithmetic operation for processing a measured value of the measuring device as an input signal. An actuator having a device and a device that operates in response to an output signal from a computing device.

【００１６】[0016]

【発明の実施の形態】まず本発明の強磁性形状記憶合金
の組成について説明する。本発明の強磁性形状記憶合金
は、Coを５〜70原子％，Niを５〜70原子％，Alを５〜50
原子％含有し、残部が不可避的不純物からなる。さらに
Feを 0.001〜30原子％，Mnを 0.001〜30原子％，Gaを
0.001〜50原子％，Inを 0.001〜50原子％，Siを 0.001
〜50原子％，Ｂを0.0005〜0.01原子％，Mgを0.0005〜0.
01原子％，Ｃを0.0005〜0.01原子％，Ｐを0.0005〜0.01
原子％含有することが好ましい。また、Pt，Pd，Au，A
g，Nb，Ｖ，Ti，Cr，Zr，Cu，ＷおよびMoのうちの１種
を 0.001〜10原子％または２種以上を合計 0.001〜10原
子％含有することが好ましい。DESCRIPTION OF THE PREFERRED EMBODIMENTS First, the composition of the ferromagnetic shape memory alloy of the present invention will be described. The ferromagnetic shape memory alloy of the present invention comprises 5 to 70 atomic% of Co, 5 to 70 atomic% of Ni, and 5 to 50 atomic% of Al.
Atomic%, the balance being unavoidable impurities. further
0.001-30 atomic% of Fe, 0.001-30 atomic% of Mn, Ga
0.001 to 50 atomic%, In 0.001 to 50 atomic%, Si 0.001
5050 at.%, B 0.0005 to 0.01 at.%, Mg 0.0005 to 0.
01 atomic%, C 0.0005-0.01 atomic%, P 0.0005-0.01
It is preferable to contain the atom%. Pt, Pd, Au, A
It is preferable that one of g, Nb, V, Ti, Cr, Zr, Cu, W and Mo be contained in an amount of 0.001 to 10 atomic% or a total of two or more of 0.001 to 10 atomic%.

【００１７】Coは、NiやAlとともに形状記憶特性および
磁気特性を向上させる元素である。しかし、Co含有量が
５原子％未満では強磁性を消失する。また、Co含有量が
70原子％を超えると形状記憶効果は発現しない。したが
って、Co含有量は５〜70原子％の範囲を満足する必要が
ある。Niは、CoやAlとともに形状記憶特性を向上させる
元素である。しかし、Ni含有量が５原子％未満またはNi
含有量が70原子％を超えると形状記憶効果は発現しな
い。したがって、Ni含有量は５〜70原子％の範囲を満足
する必要がある。Co is an element that improves shape memory characteristics and magnetic characteristics together with Ni and Al. However, when the Co content is less than 5 atomic%, the ferromagnetism disappears. Also, the Co content
If it exceeds 70 atomic%, no shape memory effect is exhibited. Therefore, the Co content needs to satisfy the range of 5 to 70 atomic%. Ni is an element that improves shape memory characteristics together with Co and Al. However, Ni content is less than 5 atomic% or Ni content
If the content exceeds 70 atomic%, no shape memory effect is exhibited. Therefore, the Ni content needs to satisfy the range of 5 to 70 atomic%.

【００１８】Alは、CoやNiとともに形状記憶特性および
磁気特性を向上させる元素である。しかし、Al含有量が
５原子％未満またはAl含有量が50原子％を超えると形状
記憶効果は発現しない。したがって、Al含有量は５〜50
原子％の範囲を満足する必要がある。Feは、Ｂ２構造
（いわゆるCeCl構造）のβ相の存在領域を広げる元素で
あり、またＢ２構造のβ相を主とする基地組織がマルテ
ンサイト変態を生じる温度（以下、マルテンサイト変態
温度という）および磁気特性が常磁性から強磁性に転移
する温度（以下、キュリー温度という）を変化させる元
素である。しかし、Fe含有量が 0.001原子％未満ではＢ
２構造のβ相の存在領域を広げる効果が発揮されない。
また、Fe含有量が30原子％を超えるとＢ２構造のβ相の
存在領域を広げる効果が飽和する。したがって、Fe含有
量は 0.001〜30原子％の範囲を満足するのが好ましい。Al is an element that improves shape memory characteristics and magnetic characteristics together with Co and Ni. However, when the Al content is less than 5 atomic% or the Al content exceeds 50 atomic%, the shape memory effect is not exhibited. Therefore, the Al content is 5 to 50
It is necessary to satisfy the range of atomic%. Fe is an element that expands the existence region of a β phase having a B2 structure (a so-called CeCl structure), and a temperature at which a base structure mainly composed of a β phase having a B2 structure causes martensitic transformation (hereinafter, referred to as a martensitic transformation temperature). And an element that changes the temperature at which the magnetic properties change from paramagnetic to ferromagnetic (hereinafter referred to as the Curie temperature). However, if the Fe content is less than 0.001 atomic%, B
The effect of expanding the existing region of the two-structure β phase is not exhibited.
If the Fe content exceeds 30 atomic%, the effect of expanding the region where the β phase having the B2 structure is present is saturated. Therefore, the Fe content preferably satisfies the range of 0.001 to 30 atomic%.

【００１９】Mnは、Ｂ２構造のβ相の生成を促進する元
素であり、またマルテンサイト変態温度およびキュリー
温度を変化させる元素である。しかし、Mn含有量が 0.0
01原子％未満ではＢ２構造のβ相の存在領域を広げる効
果が発揮されない。また、Mn含有量が30原子％を超える
とＢ２構造のβ相の存在領域を広げる効果が飽和する。
したがって、Mn含有量は 0.001〜30原子％の範囲を満足
するのが好ましい。Mn is an element that promotes the formation of a β phase having a B2 structure and an element that changes the martensitic transformation temperature and the Curie temperature. However, when the Mn content is 0.0
If it is less than 01 atomic%, the effect of expanding the region where the β phase having the B2 structure is present cannot be exhibited. If the Mn content exceeds 30 atomic%, the effect of expanding the region where the β phase having the B2 structure is present is saturated.
Therefore, the Mn content preferably satisfies the range of 0.001 to 30 atomic%.

【００２０】Gaは、InやSiとともに、マルテンサイト変
態温度およびキュリー温度を変化させる元素であり、In
とSiとの相乗効果によって、マルテンサイト変態温度お
よびキュリー温度を−200 〜 200℃の範囲で自在に制御
できる。しかし、Ga含有量が0.001原子％未満ではマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。また、Ga含有量が50原子％を超えてもマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。したがって、Ga含有量は 0.001〜50原子％
の範囲を満足するのが好ましい。Ga is an element that changes the martensitic transformation temperature and the Curie temperature together with In and Si.
The martensitic transformation temperature and the Curie temperature can be freely controlled in the range of -200 to 200 ° C by the synergistic effect of Si and Si. However, when the Ga content is less than 0.001 atomic%, the effects of controlling the martensitic transformation temperature and the Curie temperature are not exhibited. Further, even if the Ga content exceeds 50 atomic%, the effect of controlling the martensitic transformation temperature and the Curie temperature is not exhibited. Therefore, the Ga content is 0.001-50 atomic%.
It is preferable to satisfy the following range.

【００２１】Inは、GaやSiとともに、マルテンサイト変
態温度およびキュリー温度を変化させる元素であり、Ga
とSiとの相乗効果によって、マルテンサイト変態温度お
よびキュリー温度を−200 〜 200℃の範囲で自在に制御
できる。しかし、In含有量が0.001原子％未満ではマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。また、In含有量が50原子％を超えてもマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。したがって、In含有量は 0.001〜50原子％
の範囲を満足するのが好ましい。In is an element that changes the martensitic transformation temperature and the Curie temperature together with Ga and Si.
The martensitic transformation temperature and the Curie temperature can be freely controlled in the range of -200 to 200 ° C by the synergistic effect of Si and Si. However, when the In content is less than 0.001 atomic%, the control effects of the martensitic transformation temperature and the Curie temperature are not exhibited. Further, even if the In content exceeds 50 atomic%, the effect of controlling the martensitic transformation temperature and the Curie temperature is not exhibited. Therefore, the In content is 0.001 to 50 atomic%.
It is preferable to satisfy the following range.

【００２２】Siは、GaやInとともに、マルテンサイト変
態温度およびキュリー温度を変化させる元素であり、Ga
とInとの相乗効果によって、マルテンサイト変態温度お
よびキュリー温度を−200 〜 200℃の範囲で自在に制御
できる。しかし、Si含有量が0.001原子％未満ではマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。また、Si含有量が50原子％を超えてもマル
テンサイト変態温度およびキュリー温度の制御効果が発
揮されない。したがって、Si含有量は 0.001〜50原子％
の範囲を満足するのが好ましい。Si is an element that changes the martensitic transformation temperature and Curie temperature together with Ga and In.
The martensitic transformation temperature and Curie temperature can be freely controlled in the range of -200 to 200 ° C by the synergistic effect of In and In. However, when the Si content is less than 0.001 atomic%, the effects of controlling the martensitic transformation temperature and the Curie temperature are not exhibited. Further, even if the Si content exceeds 50 atomic%, the effect of controlling the martensitic transformation temperature and the Curie temperature is not exhibited. Therefore, the Si content is 0.001 to 50 atomic%.
It is preferable to satisfy the following range.

【００２３】Ｂは、Mg，ＣやＰとともに、組織を微細化
し、材料の延性および形状記憶特性を向上させる元素で
ある。しかし、Ｂ含有量が0.0005原子％未満では組織の
微細化および材料の延性向上の効果が発揮されない。ま
た、Ｂ含有量が0.01原子％を超えると微細化および延性
向上の効果が飽和する。したがって、Ｂ含有量は0.0005
〜0.01原子％の範囲を満足するのが好ましい。B, together with Mg, C and P, is an element that refines the structure and improves the ductility and shape memory characteristics of the material. However, if the B content is less than 0.0005 atomic%, the effects of making the structure finer and improving the ductility of the material are not exhibited. If the B content exceeds 0.01 atomic%, the effects of miniaturization and improvement of ductility are saturated. Therefore, the B content is 0.0005
It preferably satisfies the range of 0.01 atomic%.

【００２４】Mgは、Ｂ，ＣやＰとともに、組織を微細化
し、材料の延性および形状記憶特性を向上させる元素で
ある。しかし、Mg含有量が0.0005原子％未満では組織の
微細化および延性向上の効果が発揮されない。また、Mg
含有量が0.01原子％を超えると微細化および延性向上の
効果が飽和する。したがって、Mg含有量は0.0005〜0.01
原子％の範囲を満足するのが好ましい。Mg, together with B, C and P, is an element that refines the structure and improves the ductility and shape memory characteristics of the material. However, when the Mg content is less than 0.0005 atomic%, the effects of making the structure finer and improving the ductility are not exhibited. Also, Mg
If the content exceeds 0.01 atomic%, the effect of miniaturization and improvement of ductility saturates. Therefore, Mg content is 0.0005-0.01
It is preferable to satisfy the range of atomic%.

【００２５】Ｃは、Ｂ，MgやＰとともに、組織を微細化
し、材料の延性および形状記憶特性を向上させる元素で
ある。しかし、Ｃ含有量が0.0005原子％未満では組織の
微細化および材料の延性向上の効果が発揮されない。ま
た、Ｃ含有量が0.01原子％を超えると微細化および延性
向上の効果が飽和する。したがって、Ｃ含有量は0.0005
〜0.01原子％の範囲を満足するのが好ましい。C, together with B, Mg and P, is an element that refines the structure and improves the ductility and shape memory characteristics of the material. However, if the C content is less than 0.0005 atomic%, the effects of making the structure finer and improving the ductility of the material are not exhibited. If the C content exceeds 0.01 atomic%, the effects of miniaturization and improvement of ductility are saturated. Therefore, the C content is 0.0005
It preferably satisfies the range of 0.01 atomic%.

【００２６】Ｐは、Ｂ，MgやＣとともに、組織を微細化
し、材料の延性および形状記憶特性を向上させる元素で
ある。しかし、Ｐ含有量が0.0005原子％未満では組織の
微細化および材料の延性向上の効果が発揮されない。ま
た、Ｐ含有量が0.01原子％を超えると微細化および延性
向上の効果が飽和する。したがって、Ｐ含有量は0.0005
〜0.01原子％の範囲を満足するのが好ましい。P, together with B, Mg and C, is an element that refines the structure and improves the ductility and shape memory characteristics of the material. However, if the P content is less than 0.0005 atomic%, the effects of miniaturizing the structure and improving the ductility of the material are not exhibited. If the P content exceeds 0.01 atomic%, the effects of miniaturization and improvement of ductility are saturated. Therefore, the P content is 0.0005
It preferably satisfies the range of 0.01 atomic%.

【００２７】Pt，Pd，Au，Ag，Nb，Ｖ，Ti，Cr，Zr，C
u，ＷおよびMoは、いずれもマルテンサイト変態温度や
キュリー温度を変化させるだけでなく、組織を微細化
し、材料の延性を向上させる元素である。しかし、これ
らの元素が 0.001原子％未満では組織の微細化および材
料の延性向上の効果が発揮されない。また、これらの元
素が10原子％を超えると微細化および延性の向上効果が
飽和する。したがって、これらの元素を１種添加する場
合は、その含有量は 0.001〜10原子％の範囲を満足し、
２種以上添加する場合は、その含有量は合計 0.001〜10
原子％の範囲を満足するのが好ましい。Pt, Pd, Au, Ag, Nb, V, Ti, Cr, Zr, C
u, W and Mo are elements that not only change the martensitic transformation temperature and Curie temperature, but also refine the structure and improve the ductility of the material. However, when these elements are less than 0.001 atomic%, the effects of making the structure finer and improving the ductility of the material are not exhibited. On the other hand, when these elements exceed 10 atomic%, the effects of miniaturization and improvement of ductility are saturated. Therefore, when one of these elements is added, its content satisfies the range of 0.001 to 10 atomic%,
When two or more kinds are added, the total content is 0.001 to 10
It is preferable to satisfy the range of atomic%.

【００２８】次に本発明の強磁性形状記憶合金の組織に
ついて説明する。本発明の強磁性形状記憶合金は、Ｂ２
構造（いわゆるCeCl構造）のβ相からなる単相組織を有
するか、またはｆｃｃ構造のγ相とＢ２構造のβ相から
なる２相組織を有する。単相組織を有する場合は、単結
晶であっても良いし、あるいは多結晶であっても良い。
ただし単結晶の方が、形状記憶特性や磁気特性が優れて
いるので好ましい。本発明においては、単結晶を得る方
法は特定の方法に限定せず、チョクラルスキー法等の従
来から知られている方法を用いれば良い。Next, the structure of the ferromagnetic shape memory alloy of the present invention will be described. The ferromagnetic shape memory alloy of the present invention has a B2
It has a single phase structure composed of a β phase having a structure (a so-called CeCl structure), or has a two phase structure composed of a γ phase having an fcc structure and a β phase having a B2 structure. When it has a single phase structure, it may be a single crystal or a polycrystal.
However, a single crystal is preferable because it has excellent shape memory characteristics and magnetic characteristics. In the present invention, the method for obtaining a single crystal is not limited to a specific method, and a conventionally known method such as the Czochralski method may be used.

【００２９】２相組織は、単相組織に比べて延性，形状
記憶特性および磁気特性が著しく向上するので一層好ま
しい。ただしγ相の体積分率が0.01体積％未満では形状
記憶特性や磁気特性の向上効果が発揮されない。また、
γ相の体積分率が80体積％を超えると形状記憶特性や磁
気特性の向上効果が飽和する。したがって、γ相の体積
分率は0.01〜80体積％の範囲を満足するのが好ましい。The two-phase structure is more preferable because the ductility, shape memory characteristics and magnetic characteristics are remarkably improved as compared with the single-phase structure. However, when the volume fraction of the γ phase is less than 0.01% by volume, the effect of improving the shape memory characteristics and the magnetic characteristics is not exhibited. Also,
When the volume fraction of the γ phase exceeds 80% by volume, the effect of improving the shape memory characteristics and the magnetic characteristics is saturated. Therefore, the volume fraction of the γ phase preferably satisfies the range of 0.01 to 80% by volume.

【００３０】本発明の強磁性形状記憶合金を製造する場
合は、溶湯を凝固させて 500〜1400℃で熱処理を行なっ
た後、焼入れを行なう。こうしてβ相とγ相との２相組
織が得られるので、その後、所定の形状に加工する際に
優れた延性を発揮するのである。焼入れした後、さらに
冷間圧延または熱間圧延を行なって板材とした後、所定
の形状に加工し、 500〜1400℃で再結晶熱処理を行なう
ことによって、形状記憶機能を付与されたＢ２構造のβ
相からなる単相組織の強磁性形状記憶合金が得られる。When producing the ferromagnetic shape memory alloy of the present invention, the molten metal is solidified, heat-treated at 500 to 1400 ° C., and then quenched. In this way, a two-phase structure of β-phase and γ-phase is obtained, so that when it is processed into a predetermined shape, excellent ductility is exhibited. After quenching, after further performing cold rolling or hot rolling to obtain a sheet material, it is processed into a predetermined shape, and subjected to a recrystallization heat treatment at 500 to 1400 ° C., thereby providing a B2 structure having a shape memory function. β
A ferromagnetic shape memory alloy having a single-phase structure composed of phases is obtained.

【００３１】この単相組織の強磁性形状記憶合金を、さ
らに 500〜1400℃で熱処理してβ相の結晶粒界にγ相を
優先的に析出させることによって、形状記憶機能を付与
されたＢ２構造のβ相と延性に優れたｆｃｃ構造のγ相
からなる２相組織の強磁性形状記憶合金が得られる。次
に、本発明の強磁性形状記憶合金が一部の組成では、マ
ルテンサイト相では強磁性を有し、オーステナイト相で
は常磁性である。そのことを利用して、種々の機能を発
揮するアクチュエーターについて説明する。β相の組成
は、Al含有量が27〜32原子％、Ni含有量が35〜38原子％
であることが好ましい。The ferromagnetic shape memory alloy having a single phase structure is further heat-treated at 500 to 1400 ° C. to preferentially precipitate a γ phase at a β phase crystal grain boundary, thereby providing a B2 having a shape memory function. A ferromagnetic shape memory alloy having a two-phase structure consisting of a β phase having a structure and a γ phase having an excellent ductility is obtained. Next, in some compositions, the ferromagnetic shape memory alloy of the present invention has ferromagnetism in the martensite phase and paramagnetism in the austenite phase. By utilizing this fact, actuators that exhibit various functions will be described. The composition of the β phase is such that the Al content is 27-32 atomic% and the Ni content is 35-38 atomic%.
It is preferable that

【００３２】本発明のアクチュエーターは、本発明の強
磁性形状記憶合金からなる部材（以下、形状記憶部材と
いう）と、その形状記憶部材がβ相で強磁性を有する状
態にあるときに吸着する磁石とを有する。つまり、形状
記憶部材が、マルテンサイト変態温度より低い温度（す
なわちマルテンサイト相の状態）のときに磁石に吸着さ
れ、マルテンサイト温度より高い温度（すなわちオース
テナイト相の状態）のときに磁石から離脱することによ
って機能を発揮する。The actuator of the present invention comprises a member made of the ferromagnetic shape memory alloy of the present invention (hereinafter referred to as a shape memory member) and a magnet which is attracted when the shape memory member has a β phase and has ferromagnetism. And That is, the shape memory member is attracted to the magnet when the temperature is lower than the martensitic transformation temperature (that is, the state of the martensite phase), and is released from the magnet when the temperature is higher than the martensite temperature (that is, the state of the austenite phase). It performs its function by doing.

【００３３】たとえば図１に形状記憶部材１と磁石４と
を有するアクチュエーターの例を示す。図１(a) に示す
ような形状を記憶させた形状記憶部材１を、導線２の先
端に取り付ける。他方の導線３の先端には磁石４を装着
する。図１(a) の状態で形状記憶部材１の温度がマルテ
ンサイト変態温度より低下すると、形状記憶部材１は強
磁性を有するマルテンサイト相となり、磁石４に吸着さ
れる。図１(b) は、形状記憶部材１が磁石４に吸着され
た状態を示す。図１(b) の状態で導線２から３へ（ある
いは導線３から２へ）通電すると、形状記憶部材１の温
度が上昇する。形状記憶部材１の温度がマルテンサイト
変態温度より上昇すると、形状記憶部材１は常磁性のオ
ーステナイト相となり、磁石４から離脱する。こうして
温度の変化によって電流をオンオフできるスイッチとし
て機能する。For example, FIG. 1 shows an example of an actuator having a shape memory member 1 and a magnet 4. A shape memory member 1 storing a shape as shown in FIG. A magnet 4 is attached to the tip of the other conductor 3. When the temperature of the shape memory member 1 falls below the martensite transformation temperature in the state of FIG. 1A, the shape memory member 1 becomes a ferromagnetic martensite phase and is attracted to the magnet 4. FIG. 1B shows a state where the shape memory member 1 is attracted to the magnet 4. When power is supplied from the conductors 2 to 3 (or from the conductors 3 to 2) in the state of FIG. 1B, the temperature of the shape memory member 1 increases. When the temperature of the shape memory member 1 rises above the martensitic transformation temperature, the shape memory member 1 becomes a paramagnetic austenite phase and separates from the magnet 4. In this manner, the switch functions as a switch capable of turning on and off the current by a change in temperature.

【００３４】なお図１には、マルテンサイト変態温度よ
り低い温度で電流を流し、高い温度で電流を遮断する例
について示したが、磁石４の配置を変更すれば、マルテ
ンサイト変態温度より低い温度で電流を遮断し、高い温
度で電流を流すことも可能である。磁石４は、強磁性を
有するマルテンサイト相となった形状記憶部材１を吸着
するものであるから、永久磁石あるいは電磁石、どちら
でも使用できる。FIG. 1 shows an example in which a current is passed at a temperature lower than the martensitic transformation temperature and the current is cut off at a higher temperature. It is also possible to cut off the current at a high temperature and to flow the current at a high temperature. Since the magnet 4 attracts the shape memory member 1 in the martensitic phase having ferromagnetism, either a permanent magnet or an electromagnet can be used.

【００３５】また、形状記憶部材１と磁石４とを有する
アクチュエーターの他の例を図２に示す。図２(a) に示
すような形状を記憶させた形状記憶部材１と磁石４とを
配管５内に配設し、配管５内に流体６を流す。図２(a)
の状態で形状記憶部材１の温度がマルテンサイト変態温
度より低下すると、形状記憶部材１は強磁性を有するマ
ルテンサイト相となり、磁石４に吸着される。図２(b)
は、形状記憶部材１が磁石４に吸着された状態を示す。
図２(b) の状態で形状記憶部材１の温度がマルテンサイ
ト変態温度より上昇すると、形状記憶部材１は常磁性の
オーステナイト相となり、磁石４から離脱する。その結
果、形状記憶部材１は、図２(a) に示す状態になる。こ
うして温度の変化によって流体６を流したり遮断したり
できる弁として機能する。Another example of an actuator having the shape memory member 1 and the magnet 4 is shown in FIG. A shape memory member 1 storing a shape as shown in FIG. 2A and a magnet 4 are arranged in a pipe 5, and a fluid 6 flows through the pipe 5. Fig. 2 (a)
When the temperature of the shape memory member 1 falls below the martensite transformation temperature in the state described above, the shape memory member 1 becomes a martensite phase having ferromagnetism and is attracted to the magnet 4. Fig. 2 (b)
Shows a state where the shape memory member 1 is attracted to the magnet 4.
When the temperature of the shape memory member 1 rises above the martensitic transformation temperature in the state of FIG. 2B, the shape memory member 1 becomes a paramagnetic austenite phase and separates from the magnet 4. As a result, the shape memory member 1 is in the state shown in FIG. Thus, it functions as a valve capable of flowing or shutting off the fluid 6 according to a change in temperature.

【００３６】なお図２には、マルテンサイト変態温度よ
り高い温度で流体６を流し、低い温度で流体６を遮断す
る例について示したが、磁石４の配置を変更すれば、マ
ルテンサイト変態温度より高い温度で流体６を遮断し、
低い温度で流体６を流すことも可能である。磁石４は、
強磁性を有するマルテンサイト相となった形状記憶部材
１を吸着するものであるから、永久磁石あるいは電磁
石、どちらでも使用できる。ただし磁石４として永久磁
石を使用する場合は、流体６の温度変化によって流体６
を流したり遮断したりできる弁として機能する。磁石４
として電磁石を使用する場合は、流体６の温度が一定で
あっても、電磁石に電流を流して温度を変化させること
によって流体６を流したり遮断したりできる弁として機
能する。FIG. 2 shows an example in which the fluid 6 flows at a temperature higher than the martensitic transformation temperature and shuts off the fluid 6 at a lower temperature. Shut off fluid 6 at high temperature,
It is also possible to flow the fluid 6 at a low temperature. The magnet 4
Since it absorbs the shape memory member 1 in the martensite phase having ferromagnetism, either a permanent magnet or an electromagnet can be used. However, when a permanent magnet is used as the magnet 4, the fluid 6 changes depending on the temperature change of the fluid 6.
It functions as a valve that can flow and shut off. Magnet 4
When an electromagnet is used as a valve, even if the temperature of the fluid 6 is constant, it functions as a valve that allows the fluid 6 to flow or cut off by changing the temperature by passing a current through the electromagnet.

【００３７】また弁として機能するアクチュエーターの
他の例を図５に示す。図５(a) に示すような形状を記憶
させた形状記憶部材１と磁石４とを配管５内に配設し、
配管５内に流体６を流す。形状記憶部材１には、図５
(c) に平面図を示すように、流通孔14が設けられている
が、図５(a) の状態では弁は閉じている。図５(a) の状
態で形状記憶部材１の温度がマルテンサイト変態温度よ
り低下すると、形状記憶部材１は強磁性を有するマルテ
ンサイト相となり、磁石４に吸着される。Another example of an actuator functioning as a valve is shown in FIG. A shape memory member 1 storing a shape as shown in FIG. 5 (a) and a magnet 4 are arranged in a pipe 5,
The fluid 6 flows through the pipe 5. As shown in FIG.
As shown in the plan view of FIG. 5C, a flow hole 14 is provided, but in the state of FIG. 5A, the valve is closed. When the temperature of the shape memory member 1 falls below the martensite transformation temperature in the state shown in FIG. 5A, the shape memory member 1 becomes a ferromagnetic martensite phase and is attracted to the magnet 4.

【００３８】図５(b) は、形状記憶部材１が磁石４に吸
着された状態を示す。磁石４は支持棒13によって支持さ
れており、支持棒13の間隙を流体６が流通できるので、
図５(b) の状態では、形状記憶部材１に設けられた流通
孔14を通って流体６が流通できる。図５(b) の状態で形
状記憶部材１の温度がマルテンサイト変態温度より上昇
すると、形状記憶部材１は常磁性のオーステナイト相と
なり、磁石４から離脱する。その結果、形状記憶部材１
は図５(a) に示す状態になる。こうして温度の変化によ
って流体６を流したり遮断したりできる弁として機能す
る。FIG. 5B shows a state where the shape memory member 1 is attracted to the magnet 4. Since the magnet 4 is supported by the support rod 13 and the fluid 6 can flow through the gap between the support rods 13,
In the state of FIG. 5B, the fluid 6 can flow through the flow holes 14 provided in the shape memory member 1. When the temperature of the shape memory member 1 rises above the martensite transformation temperature in the state of FIG. 5B, the shape memory member 1 becomes a paramagnetic austenite phase and separates from the magnet 4. As a result, the shape memory member 1
Is in the state shown in FIG. Thus, it functions as a valve capable of flowing or shutting off the fluid 6 according to a change in temperature.

【００３９】なお図５には、マルテンサイト変態温度よ
り低い温度で流体６を流し、高い温度で流体６を遮断す
る例について示したが、磁石４の配置を変更すれば、マ
ルテンサイ変態温度より低い温度で流体６を遮断し、高
い温度で流体６を流すことも可能である。磁石４は、強
磁性を有するマルテンサイト相となった形状記憶部材１
を吸着するものであるから、永久磁石あるいは電磁石、
どちらでも使用できる。FIG. 5 shows an example in which the fluid 6 flows at a temperature lower than the martensitic transformation temperature and shuts off the fluid 6 at a higher temperature. However, if the arrangement of the magnets 4 is changed, the temperature is lower than the martensite transformation temperature. It is also possible to shut off the fluid 6 at a temperature and to flow the fluid 6 at a higher temperature. The magnet 4 is a shape memory member 1 having a ferromagnetic martensite phase.
Is a permanent magnet or electromagnet,
Either can be used.

【００４０】ただし磁石４として永久磁石を使用する場
合は、流体６の温度変化によって流体６を流したり遮断
したりできる弁として機能する。磁石４として電磁石を
使用する場合は、流体６の温度が一定であっても、電磁
石に電流を流して温度を変化させることによって流体６
を流したり遮断したりできる弁として機能する。図５
(c) には、形状記憶部材１に流通孔14を６ケ設ける例を
示したが、本発明においては、流通孔14の数は限定しな
い。流体６の性状（たとえば粘度等）に応じて適宜選択
すれば良い。However, when a permanent magnet is used as the magnet 4, it functions as a valve that can flow or shut off the fluid 6 depending on a change in the temperature of the fluid 6. When an electromagnet is used as the magnet 4, even if the temperature of the fluid 6 is constant, a current is applied to the electromagnet to change the temperature.
It functions as a valve that can flow and shut off. FIG.
(c) shows an example in which six flow holes 14 are provided in the shape memory member 1, but the number of flow holes 14 is not limited in the present invention. What is necessary is just to select suitably according to the property (for example, viscosity etc.) of the fluid 6.

【００４１】また本発明の他のアクチュエーターは、形
状記憶部材と、その形状記憶部材の一部を加熱する加熱
装置と、加熱装置によってマルテンサイト変態温度以上
に加熱された部分および加熱されない部分（すなわちマ
ルテンサイト変態温度より低温部分）の境界部に生じる
透磁率の変化によって形状記憶部材に動力を付与する磁
石を有する。つまり、強磁性を有するマルテンサイト相
の状態にある形状記憶部材の一部を加熱して、加熱され
た部分の温度がマルテンサイト変態温度より高くなる
と、その加熱された部分は常磁性のオーステナイト相と
なる。こうしてマルテンサイト相とオーステナイト相と
の境界部の透磁率が変化した部位に磁力を及ぼす位置に
磁石を配設することによって、形状記憶部材に動力を付
与する動力源として機能する。Another actuator of the present invention comprises a shape memory member, a heating device for heating a part of the shape memory member, a portion heated by the heating device to a temperature higher than the martensitic transformation temperature and a portion not heated (ie, The magnet has a magnet that gives power to the shape memory member by a change in magnetic permeability generated at a boundary portion of a portion lower than the martensite transformation temperature). In other words, when a part of the shape memory member in the martensitic phase having ferromagnetism is heated and the temperature of the heated part becomes higher than the martensitic transformation temperature, the heated part becomes a paramagnetic austenite phase. Becomes By arranging the magnet at the position where the magnetic force is applied to the portion where the magnetic permeability changes at the boundary between the martensite phase and the austenite phase, it functions as a power source for applying power to the shape memory member.

【００４２】なお加熱装置としてレーザービーム発信器
を使用すると加熱温度を精度よく制御でき、しかも限定
された領域を加熱できるので好ましい。たとえば図３に
示すように、リング状の形状記憶部材１を回転軸10の周
りを回転可能に配設し、形状記憶部材１の一部分に磁力
を及ぼす位置に磁石４を配設する。磁石４には加熱孔９
が設けられ、レーザービーム発信器７から発信されたレ
ーザービーム８が加熱孔９を通って形状記憶部材１を加
熱する。形状記憶部材１が加熱されてマルテンサイト変
態温度より高くなった部分は常磁性のオーステナイト相
であり、その他の部分は強磁性のマルテンサイト相であ
る。こうしてマルテンサイト相とオーステナイト相との
境界部に生じる透磁率の変化によって、形状記憶部材１
は磁石４から動力を付与され、回転軸10の周りを回転し
てモーターとして機能する。It is preferable to use a laser beam transmitter as the heating device because the heating temperature can be controlled with high accuracy and a limited area can be heated. For example, as shown in FIG. 3, a ring-shaped shape memory member 1 is disposed rotatably around a rotation axis 10, and a magnet 4 is disposed at a position where a magnetic force is applied to a part of the shape memory member 1. Heating hole 9 in magnet 4
Is provided, and the laser beam 8 emitted from the laser beam transmitter 7 passes through the heating hole 9 to heat the shape memory member 1. The part where the shape memory member 1 is heated to become higher than the martensite transformation temperature is a paramagnetic austenite phase, and the other part is a ferromagnetic martensite phase. Thus, the change in the magnetic permeability occurring at the boundary between the martensite phase and the austenite phase causes the shape memory member 1
Is powered by the magnet 4 and rotates around the rotation axis 10 to function as a motor.

【００４３】磁石４は、マルテンサイト変態温度以上に
加熱された部分（すなわち非磁性母相）とマルテンサイ
ト変態温度より低温部分（すなわち強磁性マルテンサイ
ト相）との境界部に生じる透磁率の変化によって形状記
憶部材１に動力を付与するものであるから、永久磁石あ
るいは電磁石、どちらでも使用できる。また本発明の他
のアクチュエーターは、透磁率および／または磁化率の
測定装置を配設する。その測定装置は、形状記憶部材の
温度変化や応力によるマルテンサイト変態あるいはその
逆変態が生じたときの透磁率や磁化率の変化を測定して
演算装置に伝達する。演算装置は、測定装置から伝達さ
れた測定値を入力信号として演算処理し、得られた結果
を出力信号として、その出力信号に応じて作動する装置
に伝達する。The magnet 4 has a change in magnetic permeability generated at a boundary between a portion heated above the martensite transformation temperature (ie, a non-magnetic matrix phase) and a portion lower than the martensite transformation temperature (ie, a ferromagnetic martensite phase). Since power is applied to the shape memory member 1 by using a permanent magnet or an electromagnet, either of them can be used. In another actuator of the present invention, a device for measuring magnetic permeability and / or magnetic susceptibility is provided. The measuring device measures a change in magnetic permeability and magnetic susceptibility when a martensitic transformation or a reverse transformation occurs due to a temperature change or a stress of the shape memory member, and transmits the measured change to a computing device. The arithmetic unit performs arithmetic processing on the measured value transmitted from the measuring device as an input signal, and transmits the obtained result as an output signal to a device that operates according to the output signal.

【００４４】たとえば、組成を変えることによってマル
テンサイト変態温度を変化させた複数種類の形状記憶部
材を並設し、各形状記憶部材の透磁率を測定する。並設
された形状記憶部材のうち、温度変化や応力に誘起され
たマルテンサイト変態あるいはその逆変態によって一部
の形状記憶部材の透磁率が変化すると、その透磁率が変
化した形状記憶部材を識別して、該当する形状記憶部材
のマルテンサイト変態温度を表示する。こうして温度セ
ンサーあるいは歪センサーとして機能する。For example, a plurality of types of shape memory members in which the martensite transformation temperature is changed by changing the composition are juxtaposed, and the magnetic permeability of each shape memory member is measured. When the permeability of some shape memory members changes due to martensitic transformation induced by temperature change or stress or the reverse transformation, the shape memory members whose permeability changes have been identified among the juxtaposed shape memory members. Then, the martensitic transformation temperature of the corresponding shape memory member is displayed. Thus, it functions as a temperature sensor or a strain sensor.

【００４５】[0045]

【実施例】表１に示す成分の合金を溶製した後、凝固さ
せて、 500〜1400℃で熱処理を行ない、さらに焼入れお
よび冷間圧延を施した後、所定の大きさの板材を切り出
して 500〜1400℃で再結晶化熱処理を行ない、形状記憶
機能を付与された多結晶のβ相（Ｂ２構造）の強磁性形
状記憶合金を製造した。これを発明例１および発明例２
とする。EXAMPLE An alloy having the composition shown in Table 1 was melted, solidified, heat-treated at 500-1400 ° C., quenched and cold-rolled, and a sheet material having a predetermined size was cut out. A recrystallization heat treatment was performed at 500 to 1400 ° C. to produce a polycrystalline β-phase (B2 structure) ferromagnetic shape memory alloy having a shape memory function. This is referred to as Invention Example 1 and Invention Example 2
And

【００４６】発明例３および発明例４は、発明例１，発
明例２と同様の方法で多結晶のβ相を生成させた後、さ
らに歪み焼なましによって単結晶のβ相（Ｂ２構造）の
強磁性形状記憶合金を製造した例である。発明例５およ
び発明例６は、発明例１，発明例２と同様の方法で多結
晶のβ相を生成させた後、さらに 500〜1350℃で熱処理
してβ相の結晶粒界にγ相を析出させて、形状記憶機能
を付与されたＢ２構造のβ相と延性に優れたｆｃｃ構造
のγ相との２相組織の強磁性形状記憶合金を製造した例
である。発明例５のγ相の体積分率は10体積％であり、
発明例６のγ相の体積分率は40体積％であった。Inventive Example 3 and Inventive Example 4 produce a polycrystalline β phase in the same manner as in Inventive Example 1 and Inventive Example 2 and then perform single crystal β phase (B2 structure) by strain annealing. This is an example of manufacturing a ferromagnetic shape memory alloy of the present invention. Inventive Example 5 and Inventive Example 6 produce a polycrystalline β phase in the same manner as Inventive Example 1 and Inventive Example 2, and then heat-treated at 500 to 1350 ° C. to form a γ phase This is an example of producing a ferromagnetic shape memory alloy having a two-phase structure of a β phase having a B2 structure provided with a shape memory function and a γ phase having an fcc structure having excellent ductility by precipitating. The volume fraction of the γ phase of Invention Example 5 is 10% by volume,
The volume fraction of the γ phase of Inventive Example 6 was 40% by volume.

【００４７】比較例１はCoの含有量が本発明の範囲を外
れる例であり、比較例２はNiの含有量が本発明の範囲を
外れる例であり、比較例３はAlの含有量が本発明の範囲
を外れる例である。比較例１は、発明例１，発明例２と
同様の方法で多結晶β相を生成させた。比較例２は、発
明例３，発明例４と同様の方法で単結晶β相を生成させ
た。比較例３は、発明例５，発明例６と同様の方法でγ
相とβ相との２相組織を生成させた。比較例３のγ相の
体積分率は90体積％であった。Comparative Example 1 is an example in which the content of Co is out of the range of the present invention, Comparative Example 2 is an example in which the content of Ni is out of the range of the present invention, and Comparative Example 3 is an example in which the content of Al is out of the range of the present invention. This is an example outside the scope of the present invention. In Comparative Example 1, a polycrystalline β phase was produced in the same manner as in Inventive Examples 1 and 2. In Comparative Example 2, a single crystal β phase was produced in the same manner as in Inventive Examples 3 and 4. Comparative Example 3 was performed in the same manner as in Inventive Examples 5 and 6, and
A biphasic structure of a phase and a β phase was generated. The volume fraction of the γ phase in Comparative Example 3 was 90% by volume.

【００４８】[0048]

【表１】 [Table 1]

【００４９】発明例１〜６および比較例１〜３について
形状記憶特性および磁歪特性を調査した。また冷間圧延
率についても調査した。その結果を表２に示す。形状記
憶特性は、50mm×５mm×0.3mm の帯状の試験片を切り出
し、曲げ試験を行なって５％曲げ歪を加えたときの回復
率を測定した。磁歪特性は、単結晶β相である発明例３
〜４および比較例２については、図１に示すように、寸
法５mm×５mm×５mmの試験片を切り出し、（１１０）面
にストレンゲージ２を装着して、強さ30Ａ／ｍの磁界Ｈ
を［００１］方向に印加して、歪み量を測定した。β相
とγ相との２相組織である発明例５，６および比較例３
については、30mm×10mm×１mmの帯状の試験片を用い、
圧延方向に平行な向きに磁場を加えたときの圧延方向の
歪み量を測定した。Shape memory characteristics and magnetostriction characteristics of Inventive Examples 1 to 6 and Comparative Examples 1 to 3 were investigated. The cold rolling reduction was also investigated. Table 2 shows the results. The shape memory characteristics were obtained by cutting a strip of 50 mm × 5 mm × 0.3 mm and performing a bending test to measure a recovery rate when a 5% bending strain was applied. Inventive Example 3 in which the magnetostrictive property is a single crystal β phase
As shown in FIG. 1, a test piece having a size of 5 mm × 5 mm × 5 mm was cut out, a strain gauge 2 was attached to the (110) plane, and a magnetic field H having a strength of 30 A / m was obtained.
Was applied in the [001] direction, and the amount of strain was measured. Invention Examples 5, 6 and Comparative Example 3 having a two-phase structure of β phase and γ phase
About, using a 30 mm × 10 mm × 1 mm strip-shaped test piece,
The amount of strain in the rolling direction when a magnetic field was applied in a direction parallel to the rolling direction was measured.

【００５０】なお形状記憶特性の回復率（％）は下記の
(1)式で算出される値であり、磁歪特性（％）は下記の
(2)式で算出される値であり、冷間圧延率（％）は下記
の (3)式で算出される値である。 形状記憶特性の回復率（％） ＝ 100×｛（εd −εr ）／εd ｝ ・・・ (1) εd ：変形させた後の表面歪み εr ：回復させた時の表面歪み 磁歪特性（％）＝ 100×｛（Ｌ2 −Ｌ1 ）／Ｌ1 ｝ ・・・ (2) Ｌ1 ：磁場印加前の長さ（mm） Ｌ2 ：磁場印加後の長さ（mm） 冷間圧延率（％）＝ 100×｛（ｔ1 −ｔ2 ）／ｔ1 ｝ ・・・ (3) ｔ1 ：冷間圧延前の厚さ（mm） ｔ2 ：冷間圧延後の厚さ（mm）The recovery rate (%) of the shape memory characteristic is as follows.
It is a value calculated by the equation (1), and the magnetostriction characteristic (%) is
This is a value calculated by the formula (2), and the cold rolling reduction (%) is a value calculated by the following formula (3). Recovery rate of shape memory characteristics (%) = 100 × ｛(ε d −ε r ) / ε d・ ・ ・ (1) ε d : surface strain after deformation ε r : surface strain when recovered Magnetostrictive property (%) = 100 × {(L 2 −L 1 ) / L 1 } (2) L 1 : length before application of magnetic field (mm) L 2 : length after application of magnetic field (mm) Cold rolling ratio (%) = 100 × {(t 1 −t 2 ) / t 1 } (3) t 1 : thickness before cold rolling (mm) t 2 : thickness after cold rolling Sa (mm)

【００５１】[0051]

【表２】 [Table 2]

【００５２】表２から明らかなように、発明例１〜６と
比較例１〜３を比べると、発明例の方が、形状記憶特性
の回復率，磁歪特性および冷間圧延率に優れた形状記憶
合金を得ることができた。また発明例１〜６のうち、単
結晶β相の単相組織（発明例３，４）やβ相とγ相との
２相組織（発明例５，６）にすることによって、多結晶
β相の単相組織（発明例１，２）に比べて、形状記憶特
性の回復率，磁歪特性および冷間圧延率が一層優れた強
磁性形状記憶合金を得ることができた。As is clear from Table 2, when Examples 1 to 6 and Comparative Examples 1 to 3 are compared, the shape of the invention example is more excellent in the recovery rate of the shape memory characteristic, the magnetostriction characteristic and the cold rolling reduction. A memory alloy was obtained. Further, among the invention examples 1 to 6, the single-crystal structure of the single crystal β phase (invention examples 3 and 4) or the two-phase structure of β phase and γ phase (invention examples 5 and 6) make Compared with the single-phase structure of the phase (Inventive Examples 1 and 2), it was possible to obtain a ferromagnetic shape memory alloy having more excellent recovery rate of shape memory property, magnetostriction property and cold rolling reduction.

【００５３】また、特に加工性能に優れた（すなわち冷
間圧延率の高い）発明例６や、形状記憶特性の回復率お
よび磁歪特性に優れた発明例５のように、添加元素の種
類と添加量を適切に選択することによって、目的や用途
に応じた性能を有する強磁性形状記憶合金を得ることが
可能である。Further, as in Invention Example 6 which is particularly excellent in working performance (that is, high in cold rolling ratio) and Invention Example 5 which is excellent in recovery rate of shape memory characteristics and magnetostriction characteristics, the kind of additive element and By appropriately selecting the amount, it is possible to obtain a ferromagnetic shape memory alloy having performance according to the purpose and application.

【００５４】[0054]

【発明の効果】本発明では、延性に優れ、強磁性を有
し、かつマルテンサイト変態を生じる強磁性形状記憶合
金を得ることができ、さらにその強磁性形状記憶合金の
特性を利用して機能を効果的に発揮するアクチュエータ
ーを製造することができる。According to the present invention, a ferromagnetic shape memory alloy having excellent ductility, having ferromagnetism and causing martensitic transformation can be obtained, and a function utilizing the characteristics of the ferromagnetic shape memory alloy can be obtained. Can be manufactured effectively.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明のアクチュエーターの例を示す配置図で
あり、(a) は形状記憶部材が磁石から離脱した状態を示
す配置図、(b) は形状記憶部材が磁石に吸着された状態
を示す配置図である。FIG. 1 is a layout diagram showing an example of an actuator according to the present invention, wherein (a) is a layout diagram showing a state in which a shape memory member is separated from a magnet, and (b) is a layout diagram showing a state in which the shape memory member is attracted to a magnet. FIG.

【図２】本発明のアクチュエーターの他の例を示す断面
図であり、(a) は形状記憶部材が磁石から離脱した状態
を示す断面図、(b) は形状記憶部材が磁石に吸着された
状態を示す断面図である。FIGS. 2A and 2B are cross-sectional views illustrating another example of the actuator of the present invention, in which FIG. 2A is a cross-sectional view illustrating a state in which a shape memory member is separated from a magnet, and FIG. It is sectional drawing which shows a state.

【図３】本発明のアクチュエーターの他の例を示す斜視
図である。FIG. 3 is a perspective view showing another example of the actuator of the present invention.

【図４】試験片の方位と磁界の方向を示す斜視図であ
る。FIG. 4 is a perspective view showing the orientation of a test piece and the direction of a magnetic field.

【図５】本発明のアクチュエーターの他の例を示す断面
図であり、(a) は形状記憶部材が磁石から離脱した状態
を示す断面図、(b) は形状記憶部材が磁石に吸着された
状態を示す断面図、(c) は形状記憶部材の平面図であ
る。5A and 5B are cross-sectional views illustrating another example of the actuator of the present invention, in which FIG. 5A is a cross-sectional view illustrating a state where a shape memory member is separated from a magnet, and FIG. FIG. 4 is a cross-sectional view showing the state, and FIG. 4C is a plan view of the shape memory member.

【符号の説明】[Explanation of symbols]

１ 形状記憶部材 ２ 導線 ３ 導線 ４ 磁石 ５ 配管 ６ 流体 ７ レーザービーム発振器 ８ レーザービーム ９ 加熱孔 10 回転軸 11 試験片 12 ストレンゲージ 13 支持棒 14 流通孔 DESCRIPTION OF SYMBOLS 1 Shape memory member 2 Conductor 3 Conductor 4 Magnet 5 Piping 6 Fluid 7 Laser beam oscillator 8 Laser beam 9 Heating hole 10 Rotating axis 11 Test piece 12 Strain gauge 13 Support rod 14 Flow hole

───────────────────────────────────────────────────── フロントページの続き (72)発明者 及川 勝成 宮城県柴田郡柴田町西船迫４−１−34 (72)発明者 ラルス ウルフ 宮城県仙台市青葉区一番町１−15−41− 503 (72)発明者 石田 清仁 宮城県仙台市青葉区上杉３−５−20 (72)発明者 貝沼 亮介 宮城県名取市手倉田字堰根172−15 (72)発明者 源島 文彦 宮城県仙台市青葉区国見３−11−８ コー ポかしの木102 Ｆターム(参考） 5E041 AA14 AA17 AA19 BD05 CA10 NN17  ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Katsunari Oikawa 4-1-34 Nishifunako, Shibata-cho, Shibata-gun, Miyagi Prefecture (72) Inventor Rals Wolf 1-15-41-503, Ichibancho, Aoba-ku, Sendai-shi, Miyagi-503 (72) Inventor Kiyohito Ishida 3-5-20 Uesugi, Aoba-ku, Aoba-ku, Sendai, Miyagi (72) Inventor Ryosuke Kainuma 172-15 Teine, Tekurata-shi, Natori, Miyagi Prefecture (72) Inventor, Fumihiko Genjima Sendai, Miyagi 3-11-8 Kunimi, Aoba-ku Corp. Scarecrow 102 F-term (reference) 5E041 AA14 AA17 AA19 BD05 CA10 NN17

Claims (11)

【特許請求の範囲】[Claims] 【請求項１】 Coを５〜70原子％、Niを５〜70原子％、
Alを５〜50原子％含有し、残部が不可避的不純物からな
る組成と、Ｂ２構造のβ相からなる単相組織またはγ相
とＢ２構造のβ相からなる２相組織とを有することを特
徴とする強磁性形状記憶合金。1 to 5 atomic% of Co, 5 to 70 atomic% of Ni,
It is characterized by having a composition containing 5 to 50 atomic% of Al and the balance consisting of unavoidable impurities, and a single-phase structure composed of a B2 structure β phase or a two-phase structure composed of a γ phase and a B2 structure β phase. Ferromagnetic shape memory alloy. 【請求項２】 前記組成に加えて、Feを 0.001〜30原子
％および／またはMnを 0.001〜30原子％含有することを
特徴とする請求項１に記載の強磁性形状記憶合金。2. The ferromagnetic shape memory alloy according to claim 1, further comprising 0.001 to 30 atomic% of Fe and / or 0.001 to 30 atomic% of Mn in addition to the composition. 【請求項３】 前記組成に加えて、Ga、InおよびSiのう
ちの１種を 0.001〜50原子％または２種以上を合計 0.0
01〜50原子％含有することを特徴とする請求項１または
２に記載の強磁性形状記憶合金。3. In addition to the above composition, one of Ga, In, and Si is 0.001 to 50 at% or a total of two or more is 0.0
The ferromagnetic shape memory alloy according to claim 1, wherein the ferromagnetic shape memory alloy is contained in an amount of 01 to 50 atomic%. 【請求項４】 前記組成に加えて、Ｂを0.0005〜0.01原
子％、Mgを0.0005〜0.01原子％、Ｃを0.0005〜0.01原子
％およびＰを0.0005〜0.01原子％のうちの１種または２
種以上含有することを特徴とする請求項１、２または３
に記載の強磁性形状記憶合金。4. In addition to the above composition, one or two of 0.0005 to 0.01 atomic% of B, 0.0005 to 0.01 atomic% of Mg, 0.0005 to 0.01 atomic% of C, and 0.0005 to 0.01 atomic% of P.
4. The composition according to claim 1, wherein the content is at least one species.
2. The ferromagnetic shape memory alloy according to item 1. 【請求項５】 前記組成に加えて、Pt、Pd、Au、Ag、N
b、Ｖ、Ti、Cr、Zr、Cu、ＷおよびMoのうちの１種を 0.
001〜10原子％または２種以上を合計 0.001〜10原子％
含有することを特徴とする請求項１、２、３または４に
記載の強磁性形状記憶合金。5. In addition to the above composition, Pt, Pd, Au, Ag, N
b, V, Ti, Cr, Zr, Cu, W, and Mo.
001 to 10 atomic% or a total of two or more types 0.001 to 10 atomic%
5. The ferromagnetic shape memory alloy according to claim 1, wherein the ferromagnetic shape memory alloy is contained. 【請求項６】 前記単相組織が単結晶であることを特徴
とする請求項１、２または３に記載の強磁性形状記憶合
金。6. The ferromagnetic shape memory alloy according to claim 1, wherein the single phase structure is a single crystal. 【請求項７】 前記２相組織のγ相の体積分率が0.01〜
80体積％の範囲を満足することを特徴とする請求項１、
２、３、４または５に記載の強磁性形状記憶合金。7. The volume fraction of the γ phase of the two-phase structure is 0.01 to
Claim 1 characterized by satisfying the range of 80% by volume.
6. The ferromagnetic shape memory alloy according to 2, 3, 4 or 5. 【請求項８】 請求項１、２、３、４、５、６または７
に記載の強磁性形状記憶合金からなる部材と、前記部材
に対向する位置に配設され前記部材を吸着する磁石とを
有することを特徴とするアクチュエーター。8. The method of claim 1, 2, 3, 4, 5, 6, or 7.
7. An actuator, comprising: a member made of the ferromagnetic shape memory alloy according to 1); and a magnet disposed at a position facing the member and adsorbing the member. 【請求項９】 請求項１、２、３、４、５、６または７
に記載の強磁性形状記憶合金からなる部材と、前記部材
の一部を加熱する加熱装置と、前記加熱装置によってマ
ルテンサイト変態温度以上に加熱された部分およびマル
テンサイト変態温度より低温部分の境界部に生じる透磁
率の変化によって前記部材に動力を付与する磁石とを有
することを特徴とするアクチュエーター。9. The method of claim 1, 2, 3, 4, 5, 6, or 7.
A member made of a ferromagnetic shape memory alloy according to claim 1, a heating device for heating a part of the member, and a boundary portion between a portion heated by the heating device at a temperature higher than the martensite transformation temperature and a portion lower than the martensite transformation temperature. And a magnet for applying power to the member by a change in magnetic permeability generated in the actuator. 【請求項10】 前記加熱装置がレーザービーム発振器で
あることを特徴とする請求項９に記載のアクチュエータ
ー。10. The actuator according to claim 9, wherein the heating device is a laser beam oscillator. 【請求項11】 請求項１、２、３、４、５、６または７
に記載の強磁性形状記憶合金からなる部材と、前記部材
の透磁率および／または磁化率を測定する測定装置と、
前記測定装置の測定値を入力信号として演算処理する演
算装置と、前記演算装置からの出力信号に応じて作動す
る装置とを有することを特徴とするアクチュエーター。11. The method of claim 1, 2, 3, 4, 5, 6, or 7.
A member made of the ferromagnetic shape memory alloy according to the above, and a measuring device for measuring the magnetic permeability and / or magnetic susceptibility of the member,
An actuator, comprising: a calculation device that performs a calculation process using a measurement value of the measurement device as an input signal; and a device that operates according to an output signal from the calculation device.
JP2000290220A 2000-08-14 2000-09-25 Ferromagnetic shape memory alloy Expired - Lifetime JP3425935B2 (en)

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