JP2002124184A - Exposure device of color cathode ray tube and black matrix manufacturing method of color cdathode ray tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent damage on an loss of a black matrix film by eliminating a process of using hydrofluoric acid or acidic ammonium fluoride water solution in a method of removing stain on a skirt grounding face, and aim at improvement of durability and handling safety of a device. SOLUTION: With the exposure device 10 of the color cathode ray tube, a skirt 17 of a panel 16 is put under exposure in addition to an image display part which is normally exposed. Surplus graphite adhered on the skirt grounding face 17A and side faces is removed in a process of cleaning and removing graphite adhering together with photo resist with oxidizing agent. Therefore, the conventional process of removing surplus graphite adhering to the skirt grounding face 17A and side faces with acidic ammonium fluoride water solution, hydrofluoric acid or the like is dispense with.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color CRT exposure apparatus and a method for producing a black matrix for a color CRT.

[0002]

2. Description of the Related Art A color cathode ray tube generally has dots or stripes composed of three primary color phosphors of green, blue and red regularly arranged on the inner surface of a glass panel. The current color cathode ray tube is a so-called black matrix type having a structure in which the three primary color phosphors are filled with a light absorbing substance such as graphite in order to improve the brightness and contrast of the phosphor screen.

A phosphor screen of a black matrix type color CRT is generally formed by the following steps. (A) A photoresist is applied to the inner surface of the panel. (B) drying the photoresist film; (C) exposing the dried photoresist film via a shadow mask; (D) Unexposed portions of the photoresist film are developed and removed to form a photoresist matrix. (E) A colloidal graphite is applied on a photoresist matrix to form a graphite film. (F) drying the graphite film; (G) The matrix of the photoresist is swollen with an oxidizing agent, and the graphite deposited on the matrix together with the matrix of the photoresist are washed away with the oxidizing agent. The negative graphite of the photoresist matrix remains on the inner surface of the panel, and matrix holes or stripes of the graphite are formed. (H) Excess graphite adhering to the ground contact surface and the inner and outer surfaces of the skirt of the panel is removed with an ammonium acid fluoride aqueous solution, hydrofluoric acid or the like. (I) Filling the matrix holes or stripes of graphite formed on the inner surface of the panel with three primary colors of green, blue and red in a predetermined arrangement by a known method.

FIG. 2 shows a plan view and an XX ′ cross-sectional view of an example 30 of a conventional exposure apparatus used in the step (c) of exposing a dried photoresist film through a shadow mask. Show. A light-shielding ring 32 is provided on a table 31 of the exposure apparatus 30, and a panel 33 is mounted thereon such that a ground surface 34 </ b> A of a skirt 34 is on the light-shielding ring 32. The light 36 emitted from the high-pressure mercury lamp 35 passes through a correction lens 37 and a light control filter 38, passes through an electron beam passage hole (not shown) of a shadow mask 39, reaches a photoresist 40, and chemically reacts the photoresist 40. .

[0005] The light shielding ring 32 prevents the light 36 from hitting any place other than the image display section. The reason for this is that the area around the panel 33 where no image is displayed is covered with a graphite film to prevent unnecessary light emission. The material of the light shielding ring 32 is a metal such as iron or stainless steel.

(E) Two methods for forming a graphite film by applying colloidal graphite on a photoresist will be described. In the first method, as shown in FIG. 3, a predetermined amount of graphite 51 is injected by a graphite coating nozzle 52 into the inner surface of a panel 33 supported on a panel support 50 with the inner surface facing downward.

As a second method, as shown in FIG. 4, a predetermined amount of graphite 51 is applied to the inner surface of the panel 33 by turning the inner surface of the panel 33 supported by the panel support 60 obliquely downward. Injection is performed by the nozzle 62.

In any case, when the excess graphite 51 is discharged, the graphite 51 is placed on the ground surface 34A and the side surface of the skirt 34.
Is inevitable to adhere. After the graphite 51 is applied, the skirt 3
4 and firmly adheres to the side surface 34A and the side surface.

Thereafter, after forming the fluorescent film and the metal back, the organic components in the fluorescent film are baked and decomposed, and then the panel 33 is sealed to a funnel (not shown). At this time, if there is a flaw or dirt on the skirt contact surface 34A, a defect occurs in the panel 33-funnel seal, causing problems such as a leak failure of the color CRT and a decrease in explosion-proof property.

Therefore, in order to remove dirt (mainly graphite 51) on the skirt contact surface 34A, a 3 to 5 wt% aqueous solution of hydrofluoric acid or acidic ammonium fluoride is conventionally applied to the skirt contact surface 34A to which the graphite 51 is attached. The attached graphite 51 was dissolved and exfoliated together with the glass.

[0011]

In the conventional method for removing dirt from the ground contact surface of the skirt, the aqueous solution of hydrofluoric acid or ammonium fluoride is scattered on the inner surface of the panel on which the black matrix film is formed, and the black matrix film is damaged or lost. Sometimes. Also, these chemicals are highly corrosive,
There is a problem in the durability of the device and the safety in handling.

An object of the present invention is to provide a color CRT exposure apparatus and a black matrix manufacturing method capable of removing excess graphite without using a highly corrosive aqueous solution of hydrofluoric acid or acidic ammonium fluoride.

[0013]

In order to solve the above-mentioned problems, in the color CRT exposure apparatus of the present invention, a skirt of a panel is exposed in addition to an image display portion which is normally exposed. The photoresist remains on the exposed portions.
Therefore, the skirt ground surface and side surface also become a two-layer film of photoresist and graphite. Excess graphite adhered to the skirt ground surface and side surface is removed in the step of (g) swelling the photoresist with an oxidizing agent, and washing and removing the graphite deposited on the photoresist together with the photoresist with the oxidizing agent. Therefore, the step (h) of removing the excess graphite adhering to the ground surface and the side surface of the skirt of the panel with the aqueous solution of ammonium fluoride, hydrofluoric acid or the like is unnecessary.

According to a first aspect of the present invention, there is provided a color CRT exposure apparatus for exposing an image display portion and a skirt of a color CRT panel.

By exposing the skirt as described above, excess graphite adhering to the skirt becomes on the photoresist. (G) The photoresist is swollen with an oxidizing agent to oxidize the graphite deposited on the photoresist together with the photoresist. Excess graphite is removed in the step of washing and removing with an agent. Therefore, there is no need to remove excess graphite attached to the skirt in a separate step.
Therefore, there is no problem that the aqueous solution of hydrofluoric acid or ammonium ammonium fluoride is scattered on the inner surface of the panel and the black matrix film is damaged or disappears. In addition, it is not necessary to use these chemicals which are highly corrosive and have problems in durability and handling safety of the device.

According to a second aspect of the present invention, there is provided an exposure apparatus for a color cathode ray tube, wherein an image display portion and a skirt of a panel of the color cathode ray tube are simultaneously exposed.

Although the effects of the present invention can be obtained even if the image display portion of the panel and the skirt are exposed separately, the production efficiency is better if the exposure is performed simultaneously.

According to a third aspect of the present invention, the portion supporting the grounding surface of the skirt of the panel of the color cathode ray tube is transparent to the exposure light, and the inside of the skirt has a shape substantially similar to the grounding surface of the skirt. An exposure apparatus for a color cathode ray tube, comprising a light shielding ring.

The above configuration of the exposure apparatus makes it possible to simultaneously expose the image display section and the skirt of the panel of the color CRT.

According to a fourth aspect of the present invention, the portion supporting the ground surface of the skirt of the panel of the color cathode ray tube is transparent to the exposure light, and the inside and outside of the skirt are substantially similar to the ground surface of the skirt. An exposure apparatus for a color CRT, comprising a light-shielding ring having a shape.

By providing an outer light-shielding ring in the exposure apparatus, it is possible to prevent a decrease in exposure quality due to irregular reflection of light.

According to a fifth aspect of the present invention, there is provided a method of manufacturing a black matrix of a color cathode ray tube, which comprises exposing an image display portion and a skirt of a panel of the color cathode ray tube.

According to this manufacturing method, a step of removing excess graphite adhered to the skirt becomes unnecessary.

According to a sixth aspect of the present invention, there is provided a method for producing a black matrix of a color cathode ray tube, wherein the image display portion and the skirt of the panel of the color cathode ray tube are simultaneously exposed.

According to this manufacturing method, the image display portion and the skirt of the panel can be exposed in one step, and the production efficiency can be increased.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A color CRT exposure apparatus and a method for producing a color CRT black matrix using the same according to the present invention will be described with reference to the drawings.

FIG. 1 is a plan view and a cross section taken along line XX 'of a tenth embodiment of an exposure apparatus for a color CRT according to the present invention. The table 11 of the exposure apparatus 10 is entirely made of metal such as iron or stainless steel, but a part (the transparent portion 12) is made of a material (for example, quartz glass or transparent vinyl chloride) through which light 13 passes. The inner and outer double light-shielding rings 14 and 1 are placed on the transparent part 12 so as to partially block the transparent part 12.
5 are provided. The light-shielding rings 14 and 15 are made of iron or stainless steel, and their surfaces are blackened so that light is not reflected. The panel 16 is placed on the table 11, and at this time, the grounding surface 17A of the skirt 17 is
It is put on the position that comes between 5.

The light 13 emitted from the high-pressure mercury lamp 18 passes through the correction lens 19 and the dimming filter 20 as before, passes through the electron beam passage hole (not shown) of the shadow mask 21, and the photoresist 22 of the image display section. Reached,
The photoresist 22 is chemically reacted.

A feature of the present invention is that the light 13 passing through the transparent portion 12 hits the ground surface 17A of the skirt 17 and the side surface near the ground surface 17A, which were conventionally shielded. Conventionally, since light did not hit the ground surface 17A of the skirt 17 and the side surface in the vicinity thereof, the photoresist 22 in that portion was removed during development without a chemical reaction. Therefore, in the step (e) of applying a colloidal graphite on a photoresist matrix to form a graphite film, the graphite film was formed directly on the surface of the glass on the ground surface 17A of the skirt 17 and the side surface in the vicinity thereof.

However, according to the exposure apparatus 10 of the present invention and the method of manufacturing a black matrix using the same, the light 13 impinges on the ground surface 17A of the skirt 17 and the side surface in the vicinity thereof.
The photoresist 22 in that portion reacts chemically and is not removed during development. Therefore, in the step (e) of applying a colloidal graphite on a photoresist matrix to form a graphite film, the graphite film is formed on the photoresist 22 on the grounding surface 17A of the skirt 17 and the side surface in the vicinity thereof, and the graphite film is formed on the glass. Then, a two-layer film of a photoresist-graphite film is formed.

The photoresist-graphite film double-layer film on the glass is formed by (g) a step of swelling the photoresist with an oxidizing agent and washing and removing the graphite deposited on the photoresist together with the photoresist with an oxidizing agent. Washed and removed. Therefore, (h) the step of removing excess graphite adhered to the ground surface and the inner and outer surfaces of the skirt of the panel with an aqueous solution of ammonium fluoride, hydrofluoric acid or the like becomes unnecessary.

However, since the light 13 does not hit the area around the panel 16 where no image is displayed due to the inner light shielding ring 14, the photoresist 22 is removed at the time of development, and a graphite film is formed directly on the glass. This graphite film remains in the process of (g) swelling the photoresist with an oxidizing agent and washing the graphite deposited on the photoresist with the oxidizing agent together with the photoresist in the same manner as in the prior art. Is covered with a graphite film and does not emit unnecessary light.

Although the outer light-shielding ring 15 is not always necessary, if the light 13 is irregularly reflected on the table 11 of the exposure apparatus 10, a graphite film will be formed on an undesired portion. In order to prevent this, it is better to provide an outer light-shielding ring 15 to prevent irregular reflection of light.

[0034]

According to the color CRT exposure apparatus of the present invention and the method of manufacturing a color CRT black matrix using the same, the panel skirt is also exposed in addition to the normally exposed image display section. The photoresist remains on the exposed portions. Therefore, the skirt ground surface and side surface also become a two-layer film of photoresist and graphite. Excess graphite adhering to the skirt ground surface and the side surface is removed in a step of swelling the photoresist with an oxidizing agent, and washing and removing the graphite deposited on the photoresist and the oxidizing agent with the oxidizing agent.
This eliminates the need for a conventional step of removing excess graphite adhered to the ground surface and side surfaces of the panel skirt with an aqueous solution of ammonium ammonium fluoride, hydrofluoric acid, or the like. Accordingly, in the method for producing a black matrix of a color cathode ray tube according to the present invention, the process is shortened, and the problem that the aqueous solution of hydrofluoric acid or ammonium fluoride is scattered on the inner surface of the panel and the black matrix film is damaged or lost does not occur. Further, it is not necessary to use these chemicals, which are highly corrosive and have problems in durability and handling safety of the device.

[Brief description of the drawings]

FIG. 1 is a plan view and an XX ′ cross-sectional view of an exposure apparatus according to a tenth embodiment of the present invention.

FIG. 2 is a plan view of an example 30 of a conventional exposure apparatus, and FIG.
X 'sectional view

FIG. 3 is an explanatory view of a first method of forming a graphite film by applying colloidal graphite on a photoresist.

FIG. 4 is an explanatory view of a second method of forming a graphite film by applying colloidal graphite on a photoresist.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Exposure apparatus 11 Table 12 Transparent part 13 Light 14 and 15 Light blocking ring 16 Panel 17 Skirt 17A Skirt ground plane 18 High pressure mercury lamp 19 Correction lens 20 Light control filter 21 Shadow mask 22 Photo resist 30 Exposure device 31 Table 32 Light blocking ring 33 Panel 34 Skirt 34A Skirt ground plane 35 High pressure mercury lamp 36 Light 37 Correction lens 38 Dimming filter 39 Shadow mask 40 Photoresist 50 Panel support 51 Graphite 52 Graphite application nozzle 60 Panel support 62 Graphite application nozzle

Claims (6)

[Claims] 1. An exposure apparatus for a color cathode ray tube, which exposes an image display portion and a skirt of a panel of the color cathode ray tube. 2. An exposure apparatus for a color cathode ray tube, wherein an image display portion and a skirt of a panel of the color cathode ray tube are simultaneously exposed. 3. A portion of the panel of the color cathode ray tube which supports the grounding surface of the skirt is transparent to the exposure light, and has a light shielding ring inside the skirt having a shape substantially similar to the grounding surface of the skirt. Characteristic color CRT exposure equipment. 4. A portion of the panel of the color cathode ray tube which supports the ground plane of the skirt is transparent to exposure light, and has a light shielding ring on the inside and outside of the skirt having a shape substantially similar to the ground plane of the skirt. An exposure apparatus for a color CRT. 5. A method for manufacturing a black matrix of a color cathode ray tube, comprising exposing an image display portion and a skirt of a panel of the color cathode ray tube. 6. A method of manufacturing a color CRT black matrix, comprising simultaneously exposing an image display portion and a skirt of a color CRT panel.