JP2002107613A - Mirror holding device for optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To adjust the angle of a mirror member at high sensitivity by forming the bottom side outer shape of a movable mirror frame member for storing and fixing a mirror member as a cylindrical face shape, forming the inner surface of a bottom wall of a box member for storing the frame member as a cylindrical face shape corresponding to the cylindrical face shape of the outer shape, constituting the frame member and the box member so as to slide them, and setting up the center axis of the cylindrical face in a vertical direction separated from these members. SOLUTION: A mirror receiving member 170 is oscillated so as to be rotated around a rotational axis to be the curvature center axis O of the cylindrical face of the bottom part of the member 170 which is arranged on a position further upper than the upper face of a mirror member 110 together with the slant faces 181A, 182A of bottom receiving members 181, 182 and supported by the slant faces 181A, 182A. The member 170 is rotated with a large rotational radius R.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mirror holding device in an optical device such as an interferometer device which needs to adjust the position of a light reflecting mirror with high precision. The present invention relates to an improvement in a structure for holding a mirror member in a mirror housing box made of the above.

[0002]

2. Description of the Related Art Conventionally, various interferometer devices for measuring the flatness of an object surface are known. Many optical reflecting mirrors are used in the optical system of such an interferometer device for optical path deflection.

In the interferometer device, it is difficult to obtain good interference fringes unless the optical paths of the reference light and the measuring light are set with high precision. Therefore, the positioning of the light reflecting mirror disposed in the optical path is also required. It must be performed with high precision. Conventionally, the light reflecting mirror has been positioned with high accuracy by a mirror holding device as shown in FIG. 6, for example.

[0004] The mirror holding device 200 shown in FIG.
A mirror member 210 having a substantially rectangular cross section, a mirror housing box 220 for housing the mirror member 210,
The mirror holding panel 230 of the interferometer device is placed on both sides in the longitudinal direction of the storage box 220 with the position of the storage box 220 adjusted.
And a fixing means 240 for fixing to
The mirror member 210 is accommodated in the mirror accommodating box 220 with the side wall part slightly loosely fitted therein.
Mirror holding plates 222, 22 screwed to the upper edge of the mirror
The three corners of the upper surface (mirror surface) are pressed by 3 and held at that position.

On the other hand, the fixing means 240 includes box-side fixing members 224 and 22 provided on both sides of the housing box 220.
5 and the panel-side fixing members 231 and 232 attached to the panel 230 are assembled to each other, whereby the housing box 220 can be fixed to the panel 230. Further, in order to adjust the inclination, height, and the like of the mirror member 210, the box-side fixing member 2 is moved relative to the panel-side fixing member 231.
24 can be screwed and fixed while making fine adjustments in the vertical and horizontal directions.

That is, the panel-side fixing member 231 has a disc-shaped insertion member. A small-diameter portion 241 protruding from one side surface of the insertion member, and a U-shaped hole provided on the outer peripheral portion of the substrate are provided. And a pair of through holes 244. on the other hand,
The box-side fixing member 224 has a disk-shaped substrate, and a support hole 224A for rotatably supporting the small-diameter portion 241 is provided in the center of the substrate. U-shaped hole 2 at a position facing the U-shaped hole
24B, and a screw hole for screwing the fixing screw 242 is provided at a position facing the through hole 244. Further, the fixing means 240 is provided with an eccentric cam pin 243 for rotating the box-side fixing member 224. The eccentric cam pin 243 is provided at the tip of the support shaft protruding from the knob, with respect to the support shaft. It has an eccentric eccentric cam pin.

To finely adjust the inclination, height, etc. of the mirror member 210, the support shaft of the eccentric cam pin 243 is inserted into the U-shaped hole of the insertion member of the panel fixing member 231.
The small-diameter portion (eccentric portion) provided at the tip of the support shaft is inserted into the U-shaped hole 224B of the box-side fixing member 224, and the knob is operated to support the support shaft and the small-diameter portion (eccentric portion) of the eccentric cam pin 243. To rotate. Then, the box-side fixing member 224 rotates to change the inclination, height, and the like of the mirror member 210. When the inclination, the height, and the like of the mirror member 210 reach a desired position, the screw holes of the box-side fixing member 224 are formed. By tightening the fixing screw 242 screwed into the mirror member 210, the inclination, height and the like of the mirror member 210 can be fixed at a desired position.

[0008] A support plate 250 having an L-shaped cross section is interposed between the two panels 230 in order to reliably position the two panels 230 and to reliably position the storage box 220 therebetween. .

The tilt, height, etc. of the mirror member 210 are adjusted as described above, and the mirror member 210 is securely held. Therefore, the position of the optical path can be set with high accuracy, and the optical member of the interferometer can be used. It is extremely effective to apply the above-mentioned mirror holding device to a mirror member arranged in the system.

[0010]

However, as described above, in the optical system of the interferometer device, it is necessary to adjust the angle of the mirror member with high accuracy and high sensitivity. For example, in FIG. 6 described above, it may be necessary to move the mirror surface of the mirror member 210 so as to continuously change the inclination of the central axis in the longitudinal direction to finely adjust the reflection direction of the light beam. . In such a case, a shaft is provided on two long side walls of the mirror member 210 or the box member 220, and the shaft is rotated by a predetermined angle so that the mirror surface of the mirror member 210 is moved by a predetermined angle. It is conceivable to set it in an inclined state.

However, in order to obtain better interference fringes, it is desired that the setting of the inclination of the mirror member 210 be performed with higher sensitivity. In order to achieve higher sensitivity, for example, a long rod-shaped member is
Attached to the side wall of the rod-shaped member, centering on the free end of the rod-shaped member,
It is sufficient to swing the box member 220 with the length of the rod-shaped member as the radius of rotation. However, with this, the size of the device is increased, and the demand for a more compact device cannot be satisfied.

The present invention has been made in view of the above circumstances,
It is an object of the present invention to provide a compact mirror holding device capable of adjusting the inclination of the mirror surface of a mirror member disposed in an optical system with high accuracy and high sensitivity in an optical device such as an interferometer device.

[0013]

A mirror holding device for an optical device according to the present invention is a device for holding a mirror member having a rectangular mirror surface, which is disposed in an optical system of the optical device. The mirror surface is fixed to a movable mirror frame member having a cylindrical surface shape on the bottom surface, the upper surface of which is open, and the movable mirror frame member has an outer shape along the cylindrical shape of the movable mirror frame member. The cylindrical member is slidably accommodated in a box member having a receiving portion, and a central axis of the cylindrical surface is a position vertically displaced from the mirror member, the movable mirror frame member, and the box member. , And are arranged substantially parallel to the mirror surface of the mirror member.

In the sliding of the movable mirror frame member with respect to the box member, an insertion pin is inserted along a tangential direction of the cylindrical surface through a side wall portion of the box member located in the sliding direction. It is preferable that the movable mirror frame member is moved forward and backward by abutting the wall portion of the movable mirror frame member.

The mirror member is loosely fitted to the movable mirror frame member, and at predetermined positions on both side walls of the mirror member, the inner wall of the movable mirror frame member. It is preferable to be configured to be fixed to the portion with an adhesive.

The outer shape of the bottom of the "movable mirror frame member" does not have to be a cylindrical surface over the entire surface, and it is sufficient that the sliding portion is substantially a cylindrical surface.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a side view showing an optical system of a grazing incidence interferometer using the apparatus according to the embodiment of the present invention.

This optical system includes a coherent collimated light A
Is split into reference light B and measurement light C on the surface incident on the first prism 16, and the measurement light C is
7, the reference light B and the measurement light C
Are configured to be synthesized. The optical system includes a light source 11, a condenser lens 12, a pinhole 13, a collimator lens 14, and an optical path diameter adjusting prism 25.

The collimated light A is split on the light beam splitting surface 16a of the first prism 16 into a measuring light C which is transmitted straight and enters the first prism 16 and a reference light B which is regularly reflected. The measurement light C passes through the first prism 16, is reflected by the mirror member 22, the surface 2 a to be measured, and the mirror member 23 in this order, and is incident on the second prism 17. On the other hand, the reference light B is specularly reflected by the mirror member 21 and the second prism 1
7 is specularly reflected by the light beam combining surface 17b, and the second light
Is combined with the measurement light C emitted from the prism 17, and an interference fringe image is projected on the screen 18 by the combined light carrying the interference fringe information.

In this optical system, a rotatable incident angle changing mirror member 22 is provided so that the angle at which the measuring light C is incident on the surface 2a to be measured can be changed. A mirror member 23 is provided as an optical path adjusting unit that adjusts the optical path so that an interference fringe is formed at a predetermined position on the interference fringe observation screen 18 in accordance with a change in the angle of incidence of the measurement light C on the test surface 2a by the measurement light 22 It is arranged.

The mirror member 22 is rotatable as shown by the arrow in the figure, thereby changing the angle of incidence on the test surface 2a. 2 when the mirror member 22 is rotated
The measurement light C is indicated by dotted lines C ′ and C ″. At this time, the test object 2 is positioned at the position indicated by the dotted line 2a ′ or 2a ″ so as to correspond to the measurement light C ′ or C ″. In the present optical system, the optical path of the reference light B is not changed because the mirror member 22 is in the optical path of the measurement light C downstream of the first prism 16.

Further, it is desirable that the member at the subsequent stage of the test surface 2a be movable as necessary in response to the change of the optical path of the measuring light C. For example, in the present embodiment, the mirror member 23 corresponds to FIG.
It is possible to rotate as shown by the arrow, and by changing the position and orientation of the mirror member in this way,
Even if the optical path of the measurement light C reflected by the test surface 2a changes due to the rotation of the mirror member 22, the measurement light C can be made incident on the second prism 17 at a predetermined incident angle. The interference fringe image formed by the combination of the measurement light C and the measurement light C can be projected without moving the screen 18.

As described above, according to the present embodiment, observation can be performed while changing the stripe sensitivity, and the interference fringe image is formed at a predetermined position on the screen 18 even when the stripe sensitivity changes. It is configured so that it can be observed by the TV camera 20.

By the way, although many mirror members are used in the optical system of the interferometer apparatus, a good interference fringe image cannot be obtained unless the position is set with high accuracy.
Therefore, the device for holding the mirror member according to the present embodiment can be securely fixed to the housing of the interferometer device in that state after performing alignment adjustment with high accuracy and high sensitivity. .

FIG. 3 is a perspective view showing a mirror holding device of the optical device according to the first embodiment of the present invention. The same members as those shown in FIG. 6 among the members shown in FIG. 3 have the same last two digits of the numbers assigned to the members. FIG. 1 is an exploded perspective view of the mirror holding device according to the first embodiment.

The mirror holding device 100 shown in FIG.
A mirror member 110 having a substantially rectangular cross section, a mirror receiving member 170 having a ship-bottom bottom 171 for accommodating the mirror member 110, and a bottom portion 17 of the mirror receiving member 170
A mirror housing box 120 having a bottom inner wall sliding with 1;
Both sides of the storage box 120 in the longitudinal direction are connected to the storage box 12.
It comprises fixing means 140 for fixing to the mirror holding panel 130 of the interferometer device in a state where the position adjustment of 0 has been performed.

In the mirror member 110, both the side wall portion and the bottom wall portion have a slight gap 17 inside the mirror receiving member 170.
3 are accommodated in a loosely fitted state, and the mirror receiving members 170 which are opposed to each other on the opposite side walls.
Are adhered and fixed to the inner wall portion with adhesives 111A and 111B.

The bottom portion 171 of the mirror receiving member 170 having a bottom shape (specifically, a cylindrical surface and a flat surface) slides by a predetermined amount in the longitudinal direction of the mirror member 110 with respect to the bottom receiving members 181 and 182. It is in a possible state.

That is, the bottom receiving members 181 and 182 are respectively fitted into concave portions 129A and 129B formed at both ends in the longitudinal direction inside the mirror housing box 120, and the bottom receiving members 181 and 182 are It has a substantially right-angled triangular cross section, and its slopes 181A and 182A have a concave shape that forms a part of a cylindrical surface.
A guide groove 1 extending in the slope inclining direction
81B and 182B are formed.

On the other hand, the above-described mirror receiving member 170 that accommodates the mirror member 110 has the bottom 171 in a ship bottom shape as described above. That is, the bottom outer wall surface has a cylindrical convex surface shape having a radius of curvature substantially equal to the radius of curvature of the inclined surfaces 181A and 182A forming the cylindrical surface at both ends in the longitudinal direction, and has a planar shape at the central portion. .

2 which faces the storage box 120 in the longitudinal direction
In one side wall portion, insertion holes (screw holes) 124E and 125E of the set screws 136 and 137 are formed in the cylindrical tangential direction of the bottom surface 171 of the mirror receiving member 170, and the front end portion is formed by the side wall portion. Through the recess 174 in the side wall of the mirror receiving member 170. Therefore, by screwing one of the two set screws 136 and 137 in the tangential direction and loosening the other, the mirror receiving member 170
Slides on the bottom receiving members 181 and 182.

FIG. 4 is a sectional view conceptually showing this sliding operation. That is, the mirror receiving member 170
Located far above the top surface of the mirror member 110,
The bottom cylindrical surface swings around the center axis of curvature О as a rotation axis, and at this time, slides on the slopes 181A and 182A of the bottom receiving members 181 and 182 and also slopes 181A on the bottom receiving members 181 and 182. , 182A. That is, the rotation of the mirror receiving member 170 is performed with a large rotation radius R.

As described above, in this embodiment, the mirror member 110 is fixed to the mirror receiving member 170 having a bottom shape, and the bottom portion 171 having the bottom shape is provided by the bottom receiving members 181 and 182 located at the bottom of the storage box 120. Slope 181A,
By sliding with respect to the 182A and swinging with a large rotation radius around the virtual center axis O, the tilt adjustment of the mirror member 110 can be performed with high sensitivity. In this case, the sensitivity θ is R / d (where R is the radius of rotation and d is the minimum adjustable distance of the set screws 136 and 137).

In addition, two guide pins 175B (one side) standing upright at both ends in the longitudinal direction of the bottom outer wall portion of the mirror receiving member 170 are formed in guide grooves 181B, 182B formed in the center portions of the slopes 181A, 182A. Guide pin 1
75B are engaged, and the guide pin 175B is guided by the guide grooves 181B and 182B during the sliding, thereby preventing the rotation of the mirror receiving member 170 during the sliding.

Further, a holding member 123 is fixed on the upper surface edge of the housing box 120 by a screw 123A, and has a free end that urges the upper surface of the mirror receiving member 170 downward with elastic force. Accordingly, when the mirror receiving member 170 rotates by a predetermined angle or more during the swinging, the pressing operation is performed downward by the pressing member 123, so that the turning operation beyond the predetermined angle is prevented. The free end of the holding member 123 has a downwardly convex shape, and a part thereof is
Is locked by a concave portion 127 formed on the upper surface edge portion.

A screw hole (not shown) provided at a predetermined position on the bottom of the housing box 120 is provided with a vertical adjustment screw 1.
The mirror receiving member 170 is adjusted in the vertical direction by the degree of insertion of the screw 128.

On the other hand, the fixing means 140 comprises box-side fixing members 124, 12 provided on both sides of the accommodation box 120.
The housing box 120 is fixed to the panel 130 by assembling the panel box 5 with the panel-side fixing members 131 and 132 attached to the panel 130. In addition to adjusting the tilt of the mirror member 110 by the swinging operation of the mirror receiving member 170, the panel-side fixing member 1 is used to finely adjust the tilt, height, and the like of the entire housing box 120.
The box-side fixing member 124 can be screw-fixed while finely adjusting the box-side fixing member 124 in the vertical and horizontal directions. In addition,
A support plate 150 having an L-shaped cross section is interposed and fixed between the two panels 130 by screws 151 and 152 in order to surely position the storage box 120 between the two panels 130.

As described above, the mirror member 110
Are adhesives 111A and 111B on opposite side walls.
The bonding position is desirably in a relatively narrow range centered around the neutral axis in the vertical and horizontal directions on both side walls of the mirror member 110. This is because bonding and fixing to the mirror housing box 120 at this position can minimize stress distortion due to temperature change.

For example, when the material for forming the mirror receiving member 170 is aluminum and the material for forming the base of the mirror member 110 is a general glass material, their linear expansion coefficients (2
(0 ° C.), the former is about 23 × 10 ⁻⁶ / K, the latter is, for example, 5 × 10 ⁻⁶ / K, and when the temperature rises, the expansion amount of the mirror receiving member 170 is much larger than the expansion amount of the mirror member 110. Therefore, the mirror member 110 is pulled back and forth, and left and right. However,
The mirror members 110 have adhesives 111A and 111A in a relatively narrow range around the neutral axis position in each side wall portion (for example, 1/4 or less of the longitudinal length of the mirror members 110).
Since the mirror member 1B is bonded and fixed to the mirror housing box 120, the mirror member 110 is hardly subjected to stress distortion that may distort the mirror surface. It is needless to say that the same effect can be obtained even when the base forming material of the mirror member 110 is a plastic material.

As the adhesives 111A and 111B, it is desirable to use an adhesive capable of absorbing minute stress and strain, for example, a silicone rubber-based adhesive.

As described above, in the present embodiment, the mirror housing box 120 housing the mirror receiving member 170 to which the mirror member 110 is adhered and fixed is fixed to the panel 130 with its position finely adjusted. It is supposed to be.

That is, as shown in FIG. 1, one box-side fixing member 124 has a central hole 124A, screw holes 124B and 124C provided on both sides of the central hole 124A, and a U-shaped opening on the lower side. And a shape hole 124D.

The one panel 130 has a position facing the center hole 124A and the screw holes 124B,
The through holes 130A and 130A
B, 130C. Further, the U-shaped hole 124D is located at a position facing the U-shaped hole 124D.
A larger diameter through hole 130D is provided.

The small-diameter portion (boss portion) of the fixing insertion member 133 having a T-shaped cross section, which is composed of a large-diameter portion and a small-diameter portion, is inserted into the through hole 124A. The boss portion is inserted into the central hole 124A of the box-side fixing member 124 so as to pass through the through hole 130A. Further, the insertion member 133 has through-holes 133B and 133C at positions facing the through-holes 130B and 130C of the panel 130 with the small-diameter portion (boss portion) inserted into the through-hole 130A and the central hole 124A. A semi-circular hole 133D opened on the lower side that is slightly larger than the U-shaped hole 124D below the U-shaped hole 124D.
Is provided.

With the small diameter portion (boss portion) of the insertion member 133 inserted in the through hole 130A and the central hole 124A, the eccentric cam pin 134 is inserted into the semicircular hole 133D.
The eccentric cam pin 134 has a large diameter portion (knob portion) 134.
A, a middle diameter portion 134B and a small diameter portion (eccentric portion) 134C provided at a position eccentric to the middle diameter portion 134B, and the middle diameter portion 134B is located in the semicircular hole 133D, The small-diameter portion (eccentric portion) 134C is located in the U-shaped hole 124D of the box-side fixing member 124.

When the large-diameter portion (knob portion) 134A is rotated while the eccentric cam pin 134 is inserted to a predetermined position, the small-diameter portion (eccentric portion) 134C is brought into contact with the large-diameter portion (eccentric portion) 134A in accordance with the rotation. The mirror housing box 120 can be moved up, down, left, and right by eccentric rotation in the letter-shaped hole 124D.

On the other hand, the box-side fixing member 125 at the other end of the mirror housing box 120 is a boss-shaped panel-side fixing member 132A.
, The reflection direction of the light beam by the mirror member 110 is adjusted with the rotation of the eccentric cam pin 134.

The reflection direction of the light beam is adjusted in this manner,
At the optimum position, two screws 135 (only one is shown) are inserted into the through holes 133B, 133C of the insertion member 133.
And into the screw holes 124B, 124C of the box side fixing member 124 through the through holes 130B, 130C of the panel 130. As a result, the mirror housing box 120 is fixed to the panel 130 at the optimum position.

The mirror holding device of the interferometer device according to the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above embodiment, the shape of the bottom portion 171 of the mirror receiving member 170 is a cylindrical convex surface, but this may be a cylindrical concave surface. In this case, the bottom receiving members 181, 1
The slopes 181A, 182A of 82 are cylindrical upper convex surfaces corresponding to the cylindrical concave surfaces.

In the above embodiment, the set pins 136 and 137 are brought into contact with both side walls in order to slide the mirror receiving member 170 with respect to the bottom receiving members 181 and 182 by a predetermined distance. However, only one of the set pins 136 and 137 may be used, and the tip of the set pin may be constantly in contact with the side wall of the mirror receiving member 170 by the urging member.

Next, a mirror holding device of an optical device according to a second embodiment of the present invention will be described. FIG. 5 is an exploded perspective view showing a mirror holding device of the optical device according to the second embodiment of the present invention. Note that, among the members shown in FIG. 5, those having the same functions as the members shown in FIG. 3 have the same last two digits assigned to the members.

The mirror holding device 300 shown in FIG.
A mirror member 310 having a substantially rectangular cross section, a box-shaped mirror receiving member 370 accommodating the mirror member 310, and ship bottom-shaped bottom portions 391A and 392A attached to both long sides of the mirror receiving member 370 are provided. A pair of sliding support members 391 and 392, respectively,
A pair of bottom receiving members 3 each having a receiving surface 381A, 382A that slides with each of the bottoms 391A, 392A of the first and 392.
81, 382, a concave portion 401 provided along the longitudinal direction of the bottom surface of the mirror receiving member 370, and move vertically to enter the concave portion 401 to allow the mirror receiving member 370 to swing in the longitudinal direction. The support pin 402 is a main component.

In the mirror member 310, both the side wall portion and the bottom wall portion have a slight gap 37 inside the mirror receiving member 370.
3 are accommodated in a loosely fitted state, and the mirror receiving members 370 opposed to each other are provided on opposite side walls.
Are adhered and fixed to the inner wall portions with adhesives 311A and 311B. In this case, in order to fill the adhesives 311A and 311B in a state where the mirror member 310 is loosely fitted to a predetermined position in the mirror receiving member 370, the both sides in the longitudinal direction of the mirror receiving member 370 are filled with the adhesive. Through hole 312
Is desirably provided.

The pair of ship bottom receiving members 381 and 382 are provided.
Has a substantially right-angled triangular cross section, and its slope 381A,
382A has a concave shape that forms a part of a cylindrical surface.

On the other hand, the sliding support members 391 and 392 attached to both sides in the longitudinal direction of the mirror receiving member 370 have the bottom portions 391A and 392A of the ship bottom shape as described above, and the inclined surface 381A that forms the cylindrical surface. , 382A having a radius of curvature substantially equal to the radius of curvature of the cylindrical surface.

The bottom portions 391A, 392A of the sliding support members 391, 392 attached to both long sides of the mirror receiving member 370 have a bottom shape (specifically, a cylindrical surface).
Is the mirror member 3 with respect to the ship bottom receiving members 381 and 382.
10 are slidable by a predetermined amount in the longitudinal direction. At this time, the mirror receiving member 370 is allowed to swing in the longitudinal direction by the concave portion 401 provided on the bottom surface and the support pin 402 located in the concave portion 401.

The other structure of the mirror holding device 300 according to the second embodiment is almost the same as that of the first embodiment, and has the same operation and effect as the first embodiment. I have.

The apparatus of the present invention can be applied not only to the above-described oblique incidence interferometer apparatus but also to various interferometer apparatuses or other optical apparatuses having a mirror member similar to the above-described oblique incidence interferometer apparatus. it can.

[0059]

As described above, according to the mirror holding device of the optical device of the present invention, the bottom surface side of the movable mirror frame member for accommodating and fixing the mirror member has a cylindrical surface shape. A bottom wall inner surface of the box member accommodating the frame member has a cylindrical surface shape corresponding to the cylindrical surface shape, and the bottom outer surface of the movable mirror frame member and the bottom wall inner surface of the box member can slide. Therefore, the inclination of the mirror member can be continuously changed according to the sliding operation.

In addition, since the central axis of the cylindrical surface is set at a position vertically deviated from the mirror member, the movable mirror frame member and the box member, the rotation when the movable mirror frame member is swung is performed. The radius can be increased, and the angle adjustment of the mirror member can be performed with high sensitivity with almost no distortion of the mirror.

Further, since the rotation center axis is a virtual center and no member such as a connecting rod is actually disposed between the rotation center axis and the mirror member, the apparatus can be made compact. Can be achieved.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a partial configuration of a mirror holding device of an optical device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a configuration of an optical system of an oblique incidence interferometer device equipped with a mirror holding device according to Embodiments 1 and 2 of the present invention.

FIG. 3 is an exploded perspective view showing a structure for attaching the mirror holding device according to the first embodiment of the present invention to a panel.

FIG. 4 is a conceptual diagram for explaining the operation of the embodiment device of the present invention.

FIG. 5 is an exploded perspective view showing a partial configuration of a mirror holding device of the optical device according to the second embodiment of the present invention.

FIG. 6 is a view similar to FIG.

[Explanation of symbols]

2a surface to be measured 11 light source 12 condenser lens 13 pinhole 14 collimator lens 16 first prism 16a light beam splitting surface 17 second prism 17b light beam combining surface 18 screen 20 TV camera 21, 22, 23, 110, 210 mirror member 100 mirror holding device 111A, 111B adhesive 112, 130A, 130B, 130C, 130D, 1
33B, 133C Through-hole 120 Mirror accommodation box 123 Press member 123A, 135, 151, 152 Screw 124, 125, 131, 132, 132A Fixing member 124A Central hole 124B, 124C Screw hole 124D U-shaped hole 124E Set screw insertion hole ( 127, 174 recess 128 adjusting screw 129A, 129B convex 130 (mirror holding) panel 133 insertion member 133D semicircular hole 134 eccentric cam pin 134A large diameter portion of eccentric cam pin 134B medium diameter portion of eccentric cam pin 134C Small diameter portion (eccentric portion) of eccentric cam pin 136, 137 Set screw 140 Fixing means 150 Support plate 170 Mirror receiving member 171 Bottom portion 173 Gap 175B Guide pin 181, 182 Bottom receiving member 181A, 182A Slope 181B, 182B Gas Groove 300 mirror holding device 310 mirror member 311A, 311B adhesive 312 through hole 370 mirror receiving member 381, 382 ship bottom receiving member 381A, 382A receiving surface 391, 392 sliding support member 391A, 392A bottom 401 concave portion 402 support pin A possible Interfering light beam (collimated light) B Coherent light beam (reference light) C Coherent light beam (measuring light)

Claims (3)

[Claims] 1. A device for holding a mirror member having a rectangular mirror surface disposed in an optical system of an optical apparatus, wherein the mirror member has a cylindrical surface shape on a bottom surface side with an open top surface. The movable mirror frame member is slidably housed in a box member having a receiving portion having an outer shape along the cylindrical shape of the movable mirror frame member. The central axis of the cylindrical surface is a position vertically deviated from the mirror member, the movable mirror frame member and the box member, and is disposed substantially parallel to the mirror surface of the mirror member. A mirror holding device for an optical device, characterized in that: 2. The sliding of the movable mirror frame member with respect to the box member includes inserting an insertion pin along a tangential direction of the cylindrical surface through a side wall portion of the box member positioned in the sliding direction. 2. A mirror holding device for an optical device according to claim 1, wherein said mirror holding device is moved forward and backward by abutting against a wall of said movable mirror frame member. 3. An inner wall of the movable mirror frame member, wherein the mirror member is in a loosely fitted state with respect to the movable mirror frame member, and at a predetermined position on opposite side walls of the mirror member. 3. The mirror holding device for an optical device according to claim 1, wherein the mirror is fixed to the portion with an adhesive.