JP2002090269A - Gas detection system - Google Patents
Gas detection systemInfo
- Publication number
- JP2002090269A JP2002090269A JP2000278362A JP2000278362A JP2002090269A JP 2002090269 A JP2002090269 A JP 2002090269A JP 2000278362 A JP2000278362 A JP 2000278362A JP 2000278362 A JP2000278362 A JP 2000278362A JP 2002090269 A JP2002090269 A JP 2002090269A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- branch
- suction pump
- detection system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Pipeline Systems (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、構内の採集ポイン
トから、ガスを採集して検知するガス検知システムに関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas detection system for collecting and detecting gas from a collection point on a premises.
【０００２】[0002]
【従来の技術】半導体工場などでは、有毒ガス発生の危
険性のあるポイントから管を引き、サンプルガスを測定
室に集めて、ここで有毒ガスの微量検出を行っている。
有毒ガスには、例えばＣ5Ｆ8，ＮＦ3，ＣＯ，ＨＦ，シ
ラン等がある。図２は、従来使用されているガス検知シ
ステムの概略図である。構内の各採集ポイント（例えば
キャビネット、部屋など）からサンプルガス収集用の管
１1，１2，‥‥，１n（ｎは２以上の整数）を引き、バ
ルブ２1，２2，‥‥，２nを取り付け、測定セル４に接
続している。測定セル４の先は、吸引ポンプＰに接続さ
れ、ここから図示しない、有毒ガスの分解槽につなが
れ、分解されたガスが大気に排気される。2. Description of the Related Art In a semiconductor factory or the like, a pipe is drawn from a point where there is a danger of generating toxic gas, and a sample gas is collected in a measurement room, where a trace amount of toxic gas is detected.
The toxic gas, for example, a C 5 F 8, NF 3, CO, HF, silane. FIG. 2 is a schematic view of a conventionally used gas detection system. Premises each collection point (e.g. a cabinet, room, etc.) tubes 1 1 of the sample gas collected from, 1 2, ‥‥, 1 n (n is an integer of 2 or more) pull the valve 2 1, 2 2, ‥‥ , 2 n are attached and connected to the measuring cell 4. The tip of the measurement cell 4 is connected to a suction pump P, from which it is connected to a toxic gas decomposition tank (not shown), and the decomposed gas is exhausted to the atmosphere.
【０００３】サンプルガス収集用の管１1，１2，‥‥，
１nは、構内から集められるため、それぞれが数十ｍ〜
数百ｍの長さになる。これらの長さを、図２にＬ1，
Ｌ2，‥‥，Ｌnで示している。[0003] Sample gas collection tubes 1 1 , 1 2 ,.
Since 1 n is collected from the premises, each is several tens of meters to
It is several hundred meters long. These lengths are shown in FIG. 2 as L 1 ,
L 2 , ‥‥, and L n .
【０００４】[0004]
【発明が解決しようとする課題】前記のガス検知システ
ムでは、１つの採集ポイントからサンプルガスを採取し
ようとすれば、その採集ポイントにつながる管のバルブ
を開けて、管内に残っているガスをまず全部吸引し排気
しなければならない。管内に残っているガスは、前回測
定時に採取したガスなので、測定に使えないからであ
る。管の長さは、前述したように、非常に長いので、吸
引に時間がかかる。In the above-described gas detection system, when a sample gas is to be collected from one collection point, a valve of a pipe connected to the collection point is opened, and the gas remaining in the pipe is first removed. All must be suctioned and evacuated. This is because the gas remaining in the tube is a gas collected during the previous measurement and cannot be used for the measurement. As described above, the length of the tube is very long, so that it takes time to aspirate.
【０００５】有毒ガスの漏洩は、できるだけ短時間に検
知しなければならないため、検知に時間がかかるガス検
知システムは好ましくない。そこで、本発明は、構内の
採集ポイントから、ガスを採集して検知するガス検知シ
ステムにおいて、１つの採集ポイントあたりの検知時間
を短縮することのできるガス検知システムを実現するこ
とを目的とする。[0005] Leakage of toxic gas must be detected in as short a time as possible, so a gas detection system that takes a long time to detect is not preferred. Therefore, an object of the present invention is to realize a gas detection system that collects and detects gas from a collection point in a premises and that can reduce the detection time per collection point.
【０００６】[0006]
【課題を解決するための手段】本発明のガス検知システ
ムは、採集ポイントからガスを採集するための管を配置
し、管の途中の分岐部に分岐管を接続し、この分岐管に
第１の吸引ポンプを接続し、管の分岐部又はその先にバ
ルブを設置し、管の先を測定セルに接続し、測定セルに
第２吸引ポンプを接続していることを特徴とする。前記
の構成によれば、常時、第１の吸引ポンプを動かし、ガ
スを採集するための管の先端から分岐管を通して、採集
ガスを吸引し続ける。According to the gas detection system of the present invention, a pipe for collecting gas from a collection point is arranged, a branch pipe is connected to a branch part in the middle of the pipe, and a first pipe is connected to the branch pipe. , A valve is installed at the branch of the tube or at the end thereof, the end of the tube is connected to the measurement cell, and the second suction pump is connected to the measurement cell. According to the above configuration, the first suction pump is constantly operated to continuously suck the collected gas from the tip of the pipe for collecting gas through the branch pipe.
【０００７】この状態で、管のバルブを開けて、測定セ
ルにガスを導けば、比較的短時間で、ガスの測定をする
ことができる。本発明のガス検知システムは、複数の採
集ポイントからそれぞれガスを採集するための複数本の
管を配置し、各管の途中の分岐部に分岐管をそれぞれ接
続し、各分岐管の先を１つにまとめて第１の吸引ポンプ
に接続し、各管の分岐部又はその先にバルブを設置し、
各管の先を合流して測定セルに接続し、測定セルに第２
吸引ポンプを接続しているものであってもよい。In this state, the gas can be measured in a relatively short time by opening the valve of the pipe and introducing the gas to the measuring cell. In the gas detection system of the present invention, a plurality of pipes for collecting gas from a plurality of collection points are arranged, branch pipes are respectively connected to a branch part in the middle of each pipe, and the tip of each branch pipe is set at 1 point. All together, connected to the first suction pump, installed a valve at the branch of each tube or beyond,
The ends of each tube are joined and connected to the measuring cell, and the second
It may be connected to a suction pump.
【０００８】この構成であれば、常時、第１の吸引ポン
プを動かし、ガスを採集するための各管の先端から分岐
管を通して、採集ガスを吸引し続ける。この状態で、測
定したい採集ポイントにつながる管のバルブを開けて、
測定セルにガスを導けば、比較的短時間で、ガスの測定
をすることができる。With this configuration, the first suction pump is operated at all times, and the collected gas is continuously sucked through the branch pipe from the tip of each pipe for collecting gas. In this state, open the valve of the pipe that connects to the collection point you want to measure,
By introducing the gas into the measurement cell, the gas can be measured in a relatively short time.
【０００９】[0009]
【発明の実施の形態】以下、本発明の実施の形態を、添
付図面を参照しながら詳細に説明する。図１は、ガス検
知システムの概略図である。構内の各採集ポイントから
サンプルガス収集用の管１1，１2，‥‥，１nを引き、
先端近くにバルブ２1，２2，‥‥，２nを取り付け、測
定セル４に接続している。さらに、管１1，１2，‥‥，
１nの途中から、管３1，３2，‥‥，３nを分岐して、１
つの管３に合流させて、吸引ポンプＰ１につないでい
る。分岐部からバルブ２1，２2，‥‥，２nまでの管の
距離をＤ1，Ｄ2，‥‥，Ｄnで表す。距離Ｄ1，Ｄ2，‥
‥，Ｄnは、距離Ｌ1，Ｌ2，‥‥，Ｌnよりも、短いもの
である。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a schematic diagram of a gas detection system. From each collection point in the premises, draw the sample gas collection tubes 1 1 , 1 2 , ‥‥, 1 n ,
Valves 2 1 , 2 2 ,..., 2 n are attached near the tip and connected to the measuring cell 4. In addition, tubes 1 1 , 1 2 ,.
From the middle of the 1 n, tubes 3 1, 3 2, ‥‥, branches to 3 n, 1
And joined to a suction pump P1. Valve 2 1, 2 2 from the branching unit, ‥‥, D 1 a distance of up to 2 n tubes, D 2, ‥‥, represented by D n. Distances D 1 , D 2 , ‥
‥, Dn is a distance L 1, L 2, ‥‥, than L n, it is short.
【００１０】測定セル４は、集められた有毒ガスを定量
分析するためのセルで、周知のように、当該ガスの分析
に適した波長の光を測定セル４に通し、その受光強度を
測定して、光学的にガスを定量する。測定セル４の先
は、吸引ポンプＰ２に接続されている。吸引ポンプＰ１
の先と、吸引ポンプＰ２の先とは、合流し、ここから図
示しない、有毒ガスの分解槽につながれ、分解後、大気
に排気される。The measurement cell 4 is a cell for quantitatively analyzing the collected toxic gas. As is well known, light of a wavelength suitable for the analysis of the gas is passed through the measurement cell 4 to measure the received light intensity. And optically quantify the gas. The tip of the measurement cell 4 is connected to the suction pump P2. Suction pump P1
And the end of the suction pump P2 are joined, connected to a toxic gas decomposition tank (not shown), and exhausted to the atmosphere after decomposition.
【００１１】以上のガス検知システムの使用方法を説明
する。吸引ポンプＰ１を常時オンにしておく。従って、
各採集ポイントから吸引されるガスは、管１1，１2，‥
‥，１nの途中から、管３1，３2，‥‥，３nを通って、
吸引ポンプＰ１に吸引され、常に流れている。この状態
で、１つの採集ポイントからサンプルガスを採取しよう
とすれば、その採集ポイントにつながる管、例えば管１
1とする、のバルブ２1を開ける。すると、管３1の分岐
部まで、常時ガスが流れているので、短時間で、最新の
サンプルガスを測定セル４に導くことができる。A method of using the above gas detection system will be described. The suction pump P1 is always on. Therefore,
The gas aspirated from each collection point is supplied to tubes 1 1 , 1 2 , ‥
From the middle of ‥, 1 n , through tubes 3 1 , 3 2 , ‥‥, 3 n
It is sucked by the suction pump P1 and is always flowing. In this state, if a sample gas is to be collected from one collection point, a pipe connected to the collection point, for example, a pipe 1
1. Open the valve 21 to be 1 . Then, up to 3 1 of the bifurcation tube, because always gas is flowing in a short time, can lead to the most recent sample gas measurement cell 4.
【００１２】他の採集ポイントからもサンプルガスを採
取するには、バルブ２2，‥‥，２nを順番に開けていけ
ばよい。以上で、本発明の実施の形態を説明したが、本
発明の実施は、前記の形態に限定されるものではない。
例えば、測定セル４と吸引ポンプＰ２の配置は入れ代わ
っていてもよい。また、前記分岐部には、図示しない
が、三方バルブを設置してもよい。三方バルブを設置し
た場合、常時吸引ポンプＰ１につながる側を開けてお
き、採集ポイントからサンプルガスを採取するときは、
三方バルブの測定セル４につながる側を開ける。このと
き、吸引ポンプＰ１につながる側を閉じることとすれ
ば、測定セル４に入る流量を多くすることができる。[0012] In order to collect the sample gas from other collection points, valve 2 2, ‥‥, it should open the 2 n in order. The embodiments of the present invention have been described above, but the embodiments of the present invention are not limited to the above embodiments.
For example, the arrangement of the measurement cell 4 and the suction pump P2 may be interchanged. Although not shown, a three-way valve may be provided at the branch portion. When a three-way valve is installed, always open the side connected to the suction pump P1 and when collecting the sample gas from the collection point,
The side connected to the measuring cell 4 of the three-way valve is opened. At this time, if the side connected to the suction pump P1 is closed, the flow rate entering the measurement cell 4 can be increased.
【００１３】三方バルブを設置した場合、バルブ２1，
２2，‥‥，２nの機能を三方バルブで行うことができる
ので、バルブ２1，２2，‥‥，２nを省略することもで
きる。その他、本発明の範囲内で種々の変更を施すこと
が可能である。When a three-way valve is installed, the valves 2 1 ,
Since the functions of 2 2 , ‥‥, 2 n can be performed by a three-way valve, the valves 2 1 , 2 2 , ‥‥, 2 n can be omitted. In addition, various changes can be made within the scope of the present invention.
【００１４】[0014]
【発明の効果】以上のように本発明のガス検知システム
によれば、構内複数カ所の採集ポイントから、ガスを採
集して検知する場合、１つの採集ポイントあたりの検知
時間を短縮することができる。As described above, according to the gas detection system of the present invention, when gas is collected and detected from a plurality of collection points in the premises, the detection time per one collection point can be reduced. .
【図１】本発明の実施形態に係るガス検知システムの概
略図である。FIG. 1 is a schematic diagram of a gas detection system according to an embodiment of the present invention.
【図２】従来使用されているガス検知システムの概略図
である。FIG. 2 is a schematic diagram of a conventionally used gas detection system.
１1，１2，‥‥，１n サンプルガス収集用の管 ２1，２2，‥‥，２n バルブ ３1，３2，‥‥，３n 分岐管 ４ 測定セル Ｐ１ 吸引ポンプ Ｐ２ 吸引ポンプ1 1, 1 2, ‥‥, 1 n sample tube 2 1 for gas collection, 2 2, ‥‥, 2 n valves 3 1, 3 2, ‥‥, 3 n branch pipe 4 measuring cell P1 suction pump P2 suction pump
Claims (2)
を配置し、 管の途中の分岐部に分岐管を接続し、この分岐管に第１
の吸引ポンプを接続し、 管の分岐部又はその先にバルブを設置し、管の先を測定
セルに接続し、 測定セルに第２吸引ポンプを接続していることを特徴と
するガス検知システム。A pipe for collecting gas from a collection point is arranged, a branch pipe is connected to a branch part in the middle of the pipe, and a first pipe is connected to the branch pipe.
A gas detection system, comprising connecting a suction pump of the type described above, installing a valve at a branch portion of the pipe or at the tip thereof, connecting the tip of the pipe to a measurement cell, and connecting a second suction pump to the measurement cell. .
集するための複数本の管を配置し、 各管の途中の分岐部に分岐管をそれぞれ接続し、各分岐
管の先を１つにまとめて第１の吸引ポンプに接続し、 各管の分岐部又はその先にバルブを設置し、各管の先を
合流して測定セルに接続し、 測定セルに第２吸引ポンプを接続していることを特徴と
するガス検知システム。2. A plurality of pipes for collecting gas from a plurality of collecting points are respectively arranged, branch pipes are respectively connected to a branch portion in the middle of each pipe, and tips of the branch pipes are integrated into one. Connected to the first suction pump, a valve is installed at the branch of each tube or at the end thereof, the ends of each tube are merged and connected to the measurement cell, and the second suction pump is connected to the measurement cell. A gas detection system, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000278362A JP2002090269A (en) | 2000-09-13 | 2000-09-13 | Gas detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000278362A JP2002090269A (en) | 2000-09-13 | 2000-09-13 | Gas detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002090269A true JP2002090269A (en) | 2002-03-27 |
Family
ID=18763539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000278362A Pending JP2002090269A (en) | 2000-09-13 | 2000-09-13 | Gas detection system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002090269A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005156306A (en) * | 2003-11-25 | 2005-06-16 | Horiba Ltd | Passage changeover type analyzer and measuring device using it |
| JP2007248114A (en) * | 2006-03-14 | 2007-09-27 | Hitachi High-Tech Control Systems Corp | Gas analyzer |
| CN103969403A (en) * | 2014-05-09 | 2014-08-06 | 哈尔滨工程大学 | Method for measuring uniformity of ammonia gas concentration in SCR (silicon controller rectifier) system pipeline |
| CN105865860A (en) * | 2016-05-31 | 2016-08-17 | 邢红涛 | Flue gas detection device used for SCR (Selective Catalytic Reduction) denitration process |
| US20190166861A1 (en) * | 2016-12-05 | 2019-06-06 | Pace International, Llc | Method and system for the treatment of agricultural products |
| CN112504775A (en) * | 2021-01-04 | 2021-03-16 | 中交国通公路工程技术有限公司 | CO gas content detection equipment |
| CN113125653A (en) * | 2021-04-21 | 2021-07-16 | 林国伟 | Indoor air detection device |
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| JPS60200145A (en) * | 1984-03-26 | 1985-10-09 | Hitachi Ltd | Remote measuring apparatus of cleanliness for clean room |
| JPS62181770A (en) * | 1986-02-07 | 1987-08-10 | Kizakura Syuzo Kk | Apparatus for collecting and analyzing fermentation gas |
| JPS62178348U (en) * | 1986-05-02 | 1987-11-12 | ||
| JPS6319237U (en) * | 1986-07-18 | 1988-02-08 |
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| JPS58154638A (en) * | 1982-03-09 | 1983-09-14 | Matsushita Electric Ind Co Ltd | Sampling apparatus of air |
| JPS60200145A (en) * | 1984-03-26 | 1985-10-09 | Hitachi Ltd | Remote measuring apparatus of cleanliness for clean room |
| JPS62181770A (en) * | 1986-02-07 | 1987-08-10 | Kizakura Syuzo Kk | Apparatus for collecting and analyzing fermentation gas |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005156306A (en) * | 2003-11-25 | 2005-06-16 | Horiba Ltd | Passage changeover type analyzer and measuring device using it |
| JP2007248114A (en) * | 2006-03-14 | 2007-09-27 | Hitachi High-Tech Control Systems Corp | Gas analyzer |
| CN103969403A (en) * | 2014-05-09 | 2014-08-06 | 哈尔滨工程大学 | Method for measuring uniformity of ammonia gas concentration in SCR (silicon controller rectifier) system pipeline |
| CN103969403B (en) * | 2014-05-09 | 2015-07-22 | 哈尔滨工程大学 | Method for measuring uniformity of ammonia gas concentration in SCR (silicon controller rectifier) system pipeline |
| CN105865860A (en) * | 2016-05-31 | 2016-08-17 | 邢红涛 | Flue gas detection device used for SCR (Selective Catalytic Reduction) denitration process |
| CN105865860B (en) * | 2016-05-31 | 2019-10-25 | 邢红涛 | Flue gas inspection device for SCR denitration process |
| US20190166861A1 (en) * | 2016-12-05 | 2019-06-06 | Pace International, Llc | Method and system for the treatment of agricultural products |
| US11779029B2 (en) * | 2016-12-05 | 2023-10-10 | Pace International Llc | Method and system for the treatment of agricultural products |
| CN112504775A (en) * | 2021-01-04 | 2021-03-16 | 中交国通公路工程技术有限公司 | CO gas content detection equipment |
| CN112504775B (en) * | 2021-01-04 | 2023-09-26 | 中交国通公路工程技术有限公司 | CO gas content detection equipment |
| CN113125653A (en) * | 2021-04-21 | 2021-07-16 | 林国伟 | Indoor air detection device |
| CN113125653B (en) * | 2021-04-21 | 2023-08-15 | 林国伟 | Indoor air detection device |
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