JP2002090193A - Electromagnetic flowmeter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve productivity and achieve miniaturization. SOLUTION: An electromagnetic flowmeter comprises a measuring tube 11 for flowing a measurement target fluid inside it, a pair of coils 13 for generating a magnetic field, a pair of electrodes 14 for receiving electromotive force, a yoke 15 for connecting the magnetic field as a core of the pair of coils 13, an exciting circuit 16 for driving the pair of coils 13, and a detecting circuit 17 for detecting the electromotive force received by the pair of electrodes 14, wherein the magnetic field generated by the pair of coils 13 is applied by the yoke 15 in the direction perpendicular to the flow of the measurement target fluid; the electromotive force is detected by the detecting circuit 17, which is generated by a movement of the measurement target fluid in the magnetic field and received by the pair of electrodes 14; and the flow velocity of the measurement target fluid is determined by the magnitude of the electromotive force. In the electromagnetic flowmeter, the pair of coils 13 and the pair of electrodes 14 are made into flexible board patterns to prepare one flexible board 12 to be mounted on the periphery of the measuring tube 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow of a fluid to be measured by flowing a fluid to be measured through a measuring tube and driving a pair of coils by an excitation circuit to generate a magnetic field. The electromotive force generated by moving the fluid to be measured in the magnetic field in the vertical direction and received by the pair of electrodes is detected by a detection circuit, and the flow rate of the fluid to be measured is determined by the magnitude of the electromotive force. Regarding the flow meter,
In particular, the present invention relates to an electromagnetic flowmeter designed to improve productivity, reduce size, and further improve performance.

[0002]

2. Description of the Related Art Conventionally, a fluid to be measured is caused to flow inside a measuring tube, a magnetic field is applied to the fluid to be measured, and an electromotive force generated by movement of the fluid to be measured in the magnetic field is detected. 2. Description of the Related Art Electromagnetic flowmeters that determine the flow velocity of a fluid to be measured based on the magnitude of an electromotive force have been widely used.

FIG. 8 is a schematic diagram showing a configuration example of a conventional electromagnetic flow meter of this type.

[0004] In FIG. 8, an electromagnetic flowmeter has a cylindrical measuring tube 81 through which a fluid to be measured flows, and the measuring tube 81.
A pair of coils 82 installed on both outer peripheral surfaces of the
And the measuring tube 8 so as to be perpendicular to the pair of coils 82.
A pair of electrodes 83 which are installed on both outer peripheral surfaces and receive an electromotive force
A yoke 84 serving as a core of the pair of coils 82 and connecting a magnetic field; an excitation circuit 85 for driving the pair of coils 82;
A detection circuit 86 for detecting an electromotive force applied to the pair of electrodes 83
And

That is, the conventional electromagnetic flow meter is provided with a measuring pipe 8.
1, a magnetic field is generated by driving a pair of coils 82 by an excitation circuit 85 and a magnetic field generated by the pair of coils 82 is applied by a yoke 84 in a direction perpendicular to the flow of the fluid to be measured. The pair of electrodes 83 receives the electromotive force generated in the direction perpendicular to the flow and the magnetic field, and the electromotive force received by the pair of electrodes 83 is detected by the detection circuit 86. It is to calculate the flow velocity.

Here, the flow velocity of the fluid to be measured is determined by applying the measured magnetic flux density, the diameter of the measuring tube 81, and the detected electromotive force to Faraday's law of electromagnetic induction.

FIG. 9 is a conceptual diagram showing Faraday's electromagnetic induction law, which is the principle of flow velocity measurement of this type of electromagnetic flowmeter.

In FIG. 9, when a conductor passes through a magnetic field, it is generated in a direction perpendicular to the magnetic flux and the moving direction by a magnetic flux density 91 of the magnetic field, a moving speed 92 of the conductor which crosses the magnetic flux vertically, and a width 93 of the conductor. Electric power 94 is generated.

The electromotive force is e (v), the magnetic east density is B (T),
Assuming that the width of the conductor is D (cm) and the moving speed is v (cm / s), the following holds: e = B · D · v × 10 ⁻⁴ .

[0010]

However, such a conventional electromagnetic flowmeter has the following problems.

That is, the number of components is large, the shape of each component varies greatly, and the workability and accuracy of manufacturing components and assembling the electromagnetic flowmeter are not good. And the overall size becomes large.

The electromotive force 94 received by the pair of electrodes 83
Is so small that it is affected by noise,
As a result, the measurement performance decreases.

Further, the drift of the fluid to be measured and the measuring tube 81
Measurement performance is also degraded by the attached matter inside.

An object of the present invention is to improve productivity, reduce the size,
It is another object of the present invention to provide an electromagnetic flowmeter capable of achieving higher performance.

[0015]

In order to achieve the above object, a measuring tube for flowing a fluid to be measured therein, a pair of coils for generating a magnetic field, a pair of electrodes for receiving an electromotive force, and a pair of coils A yoke that serves as a core for connecting a magnetic field, an excitation circuit that drives a pair of coils, and a detection circuit that detects an electromotive force received by a pair of electrodes. The electromotive force generated by the fluid to be measured moving in the magnetic field and applied to the pair of electrodes is detected by a detection circuit, and the flow rate of the fluid to be measured is determined by the magnitude of the electromotive force. In the invention corresponding to claim 1, one flexible substrate is formed by using a pair of coils and a pair of electrodes as a flexible substrate pattern, and mounted on the outer periphery of the measurement tube. To have.

Therefore, in the electromagnetic flowmeter according to the present invention, a pair of coils and a pair of electrodes are used as a flexible substrate pattern to form one flexible substrate, which is mounted on the outer periphery of the measuring tube. Thereby, the workability and accuracy of manufacturing the pair of coils and the pair of electrodes and assembling the electromagnetic flowmeter are improved, so that the productivity can be improved. Further, since the pair of coils is thin, the measurement unit can be downsized.

Further, in the invention corresponding to claim 2, a pair of coils, a pair of electrodes, signal lines for excitation signals and detection signals are used as a flexible substrate pattern to form one flexible substrate, and the outer periphery of the measuring tube is formed. Has been implemented.

Therefore, in the electromagnetic flowmeter according to the present invention, a pair of coils, a pair of electrodes, signal lines for excitation signals and detection signals are used as a flexible substrate pattern to form one flexible substrate. By mounting it on the outer circumference of the measuring tube, the workability and accuracy of manufacturing a pair of coils and a pair of electrodes, assembling the wiring and assembling the electromagnetic flowmeter are improved, and thus productivity can be improved. Further, since the pair of coils is thin, the measurement unit can be downsized.

Further, in the invention corresponding to claim 3, one flexible substrate is formed by using a pair of coils, a pair of electrodes, an excitation circuit, a detection circuit, and signal lines for excitation signals and detection signals as a flexible substrate pattern. And mounted on the outer circumference of the measuring tube.

Therefore, in the electromagnetic flowmeter according to the third aspect of the present invention, the pair of coils, the pair of electrodes, the excitation circuit, the detection circuit, and the signal wiring of the excitation signal and the detection signal are formed by:
By making one flexible substrate as a flexible substrate pattern and mounting it on the outer periphery of the measurement tube, the workability and accuracy of manufacturing a pair of coils and a pair of electrodes, wiring and assembling the electromagnetic flowmeter are improved, so production Performance can be improved. Further, since the pair of coils is thin, the measurement unit can be downsized. Further, since the signal wiring becomes shorter and becomes more resistant to noise, measurement performance can be improved.

Further, in the invention corresponding to claim 4, a plurality of pairs of electrodes are provided in parallel with the flow direction of the fluid to be measured, and a plurality of detection circuits are provided corresponding to the respective electrodes. Integrated processing means for integrating a plurality of detection results of the electromotive force by the detection circuit and outputting one detection result.

Therefore, in the electromagnetic flowmeter according to the invention, a plurality of electrodes are provided in parallel with the flow direction of the fluid to be measured, and a plurality of detection circuits are provided corresponding to each electrode. Installed, integrates a plurality of detection results of electromotive force by each detection circuit and outputs one detection result. That is, for example, if a plurality of detection results of electromotive force are compared and approximated, averaging is performed. By comparing multiple detection results of electric power and selecting a small number of detection results if they fluctuate significantly, the measurement accuracy is improved, and the measurement performance due to the drift of the fluid to be measured and the deposits inside the measurement tube is improved. Drops can be avoided.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a new detection system using a pair of coils, a pair of electrodes, and, if necessary, a signal wiring on a flexible substrate, and using a plurality of pairs of electrodes. Thus, a small and high-performance electromagnetic flowmeter with improved productivity is realized.

Hereinafter, embodiments of the present invention based on the above concept will be described in detail with reference to the drawings.

(First Embodiment) FIG. 1 is a schematic diagram showing a configuration example of an electromagnetic flow meter according to the present embodiment.

That is, the electromagnetic flow meter according to the present embodiment
As shown in FIG. 1, a measuring tube 1 through which a fluid to be measured flows.
1, a pair of coils 13 for generating a magnetic field, a pair of electrodes 14 for receiving an electromotive force, a yoke 15 serving as a core of the pair of coils 13 and connecting the magnetic field, an excitation circuit 16 for driving the pair of coils 13, And a detection circuit 17 for detecting an electromotive force received by the electrode 14 of the pair.
The magnetic field generated by 3 is applied in the direction perpendicular to the flow of the fluid to be measured by the yoke 15, and the electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes 14 is detected by the detection circuit 17. Then, the flow velocity of the fluid to be measured is determined based on the magnitude of the electromotive force.

Here, particularly in the present embodiment, the measuring tube 3
1, a flexible substrate 12 is provided on the outer periphery, the flexible substrate 12 forms a pattern of a pair of coils 13 and a pair of electrodes 14, a yoke 15 connects the magnetic fields of the pair of coils 13, and an excitation circuit 16 and a detection circuit 17. The signal lines for the excitation signal and the detection signal are connected by signal lines.

That is, a feature of the present embodiment is that one flexible substrate 12 is formed by using a pair of coils 13 and a pair of electrodes 14 as a flexible substrate pattern and mounted on the outer periphery of the measuring tube 31. It is in.

FIG. 2 is a developed view showing a configuration example of a flexible board in the electromagnetic flow meter according to the present embodiment.

In FIG. 2, the flexible substrate 21 is
A pattern of a pair of coils 22 and a pair of electrodes 23 is formed, and the pair of coils 22 are connected by a signal wiring pattern in the flexible substrate 21.

Next, in the electromagnetic flowmeter according to the present embodiment configured as described above, one flexible substrate 12 is formed by using a pair of coils 13 and a pair of electrodes 14 as a flexible substrate pattern, and measurement is performed. Since the pair of coils 13 and the pair of electrodes 14 form one flexible substrate 12 by being mounted on the outer periphery of the tube 11, the operations of manufacturing the pair of coils 13 and the pair of electrodes 14 and assembling the electromagnetic flowmeter are performed. Since the performance and accuracy are improved, productivity can be improved.

Further, since the pair of coils 13 becomes thin,
The measurement unit can be downsized.

As described above, in the electromagnetic flow meter according to the present embodiment, the pair of coils 13 and the pair of electrodes 14
Since one flexible substrate 12 is mounted on the outer periphery of the measurement tube 11, it is possible to improve productivity and reduce the size.

(Second Embodiment) FIG. 3 is a schematic diagram showing a configuration example of an electromagnetic flow meter according to the present embodiment.

That is, the electromagnetic flow meter of this embodiment is
As shown in FIG. 3, a measuring tube 3 in which a fluid to be measured flows.
1, a pair of coils 33 for generating a magnetic field, a pair of electrodes 34 for receiving an electromotive force, a yoke 35 serving as a core of the pair of coils 33 and connecting the magnetic field, an excitation circuit 36 for driving the pair of coils 33, And a detection circuit 37 for detecting an electromotive force received by the electrode 34 of the pair of coils 3.
The magnetic field generated by 3 is applied in a direction perpendicular to the flow of the fluid to be measured by the yoke 35, and the electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes 34 is detected by the detection circuit 37. Then, the flow velocity of the fluid to be measured is determined based on the magnitude of the electromotive force.

Here, particularly in the present embodiment, the measuring tube 3
A flexible substrate 32 is provided on the outer periphery of the first substrate 1. The flexible substrate 32 forms a pattern of a pair of coils 33, a pair of electrodes 34, and a signal wiring, and a yoke 35 connects the magnetic fields of the pair of coils 33. Detection circuit 3
The signal wirings for the excitation signal and the detection signal of No. 7 are connected by a flexible substrate 32.

That is, this embodiment is characterized in that a pair of coils 33, a pair of electrodes 34, signal lines for excitation signals and detection signals are used as a flexible substrate pattern to form one flexible substrate 32, and a measuring tube is formed. 31.

FIG. 4 is a developed view showing a configuration example of a flexible board in the electromagnetic flow meter according to the present embodiment.

In FIG. 4, the flexible substrate 41 is
A pattern of a pair of coils 42 and a pair of electrodes 43 is formed, and the pair of coils 42 are connected by a signal wiring pattern in the flexible substrate 41.

The flexible substrate 41 is formed by integrating signal lines of the excitation signal and the detection signal of the excitation circuit 36 and the detection circuit 37 and extended to the outside by the flexible substrate 41.

Next, in the electromagnetic flow meter according to the present embodiment configured as described above, the pair of coils 33, the pair of electrodes 34, the signal wiring of the excitation signal and the detection signal are
By forming one flexible substrate 32 as a flexible substrate pattern and mounting it on the outer periphery of the measurement tube 31, the pair of coils 33, the pair of electrodes 34, and the signal wiring become one flexible substrate 32, Since the workability and accuracy of the manufacture, the wiring, and the assembly of the electromagnetic flowmeter of the pair of coils 33 and the pair of electrodes 34 are improved, the productivity can be improved.

Further, since the pair of coils 33 becomes thin,
The measurement unit can be downsized.

As described above, in the electromagnetic flow meter according to the present embodiment, the pair of coils 33, the pair of electrodes 34, the signal wiring of the excitation signal and the detection signal are connected to the outer periphery of the measuring tube 31 as one flexible substrate 32. , The productivity can be improved and the size can be reduced.

(Third Embodiment) FIG. 5 is a schematic diagram showing a configuration example of an electromagnetic flow meter according to the present embodiment.

That is, the electromagnetic flow meter according to the present embodiment
As shown in FIG. 5, a measuring pipe 5 for flowing a fluid to be measured therein.
1, a pair of coils 53 for generating a magnetic field, a pair of electrodes 54 for receiving an electromotive force, a yoke 55 serving as a core of the pair of coils 53 and connecting the magnetic field, an excitation circuit 56 for driving the pair of coils 53, And a detection circuit 57 for detecting the electromotive force received by the
3 is applied in a direction perpendicular to the flow of the fluid to be measured by the yoke 55, and the detection circuit 57 detects the electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes 54. Then, the flow velocity of the fluid to be measured is determined based on the magnitude of the electromotive force.

Here, particularly in the present embodiment, the measuring tube 5
A flexible substrate 52 is provided on the outer periphery of the first substrate 1, and the flexible substrate 52 forms a pair of coils 53, a pair of electrodes 54, an excitation circuit 56, a detection circuit 57, and a signal wiring pattern. Connect the magnetic field,
Signal lines for the excitation signal and the detection signal of the excitation circuit 56 and the detection circuit 57 are connected by the flexible substrate 52.

That is, this embodiment is characterized in that a pair of coils 53, a pair of electrodes 54, an excitation circuit 56, a detection circuit 57, and signal lines for excitation signals and detection signals are formed into a flexible substrate pattern to form one flexible board. Substrate 52
And is mounted on the outer periphery of the measuring tube 51.

FIG. 6 is a developed view showing a configuration example of a flexible board in the electromagnetic flow meter according to the present embodiment.

In FIG. 6, the flexible substrate 61 is
A pair of coils 62, a pair of electrodes 63, an excitation circuit 64, a detection circuit 65, and a signal wiring pattern are formed, and the pair of coils 62 are connected by a signal wiring pattern in the flexible substrate 61.

The flexible substrate 61 is formed by integrating the excitation input of the excitation circuit 64 and the signal output of the detection output of the detection circuit 65, and extended to the outside by the flexible substrate 61.

Next, in the electromagnetic flowmeter according to the present embodiment configured as described above, the pair of coils 53, the pair of electrodes 54, the excitation circuit 56, the detection circuit 57, the signal wiring of the excitation signal and the detection signal, Is formed into a flexible substrate pattern, and one flexible substrate 52 is formed and mounted on the outer periphery of the measurement tube 51.
3 and a pair of electrodes 54, an excitation circuit 56, a detection circuit 57, and a signal wiring form a single flexible substrate 52, so that the production of the pair of coils 53 and the pair of electrodes 54, the wiring, and the workability of assembling the electromagnetic flowmeter are improved. Since the accuracy is improved, productivity can be improved. Further, since the pair of coils 53 becomes thin, the measurement unit can be downsized.

Further, since the signal wiring becomes shorter and becomes more resistant to noise, measurement performance can be improved.

As described above, in the electromagnetic flow meter according to the present embodiment, the pair of coils 53, the pair of electrodes 54, the excitation circuit 56, the detection circuit 57, and the signal wiring of the excitation signal and the detection signal are connected to one flexible Since the substrate 52 is mounted on the outer periphery of the measurement tube 51, it is possible to improve productivity, reduce the size, and achieve higher performance.

(Fourth Embodiment) FIG. 7 is a schematic diagram showing a configuration example of an electromagnetic flow meter according to the present embodiment.

That is, the electromagnetic flow meter according to the present embodiment
As shown in FIG. 7, a measuring pipe 7 through which a fluid to be measured flows is provided.
1, a pair of coils 72 for generating a magnetic field, a pair of electrodes 73 for receiving an electromotive force, a yoke 74 serving as a core of the pair of coils 72 and connecting the magnetic field, an excitation circuit 75 for driving the pair of coils 72, And a detection circuit 76 for detecting an electromotive force received by the electrode 73 of the pair.
2 is applied in a direction perpendicular to the flow of the fluid to be measured by the yoke 74, and the electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes 73 is detected by the detection circuit 76. Then, the flow velocity of the fluid to be measured is determined based on the magnitude of the electromotive force.

Here, in the present embodiment, in particular, a pair of coils 72 is installed on both outer peripheral surfaces of the measuring tube 71, and on both outer peripheral surfaces of the measuring tube 71 so as to be perpendicular to the pair of coils 72.
A plurality of pairs of electrodes 73 are provided, a yoke 74 connects the magnetic fields of the pair of coils 72, one excitation circuit 75 drives the pair of coils 72, and a plurality of detection circuits 76 receive a pair of electrodes 73 received by each pair of electrodes 73. The power is detected, and the integration processing unit 77 integrates a plurality of detection results into one detection output.

That is, a feature of the present embodiment is that a plurality of pairs of electrodes 73 are provided in parallel with the flow direction of the fluid to be measured, and a plurality of detection circuits 76 are provided corresponding to each electrode 73. The present invention is characterized in that an integrated processing unit 77 that integrates a plurality of detection results of electromotive force by each detection circuit 76 and outputs one detection result is provided.

Next, in the electromagnetic flow meter according to the present embodiment configured as described above, a pair of electrodes 73 are used.
A plurality of detection circuits 76 are provided in parallel with the flow direction of the fluid to be measured, and a plurality of detection circuits 76 are provided corresponding to the respective electrodes 73. And output a single detection result, that is, for example, if a plurality of electromotive force detection results are compared and approximated, then averaged, and a plurality of electromotive force detection results are compared to obtain a small number of detection results. By not selecting the measurement target when it greatly fluctuates, it is possible to improve the measurement accuracy and to prevent the measurement performance from deteriorating due to the drift of the fluid to be measured and the deposits inside the measurement tube.

As described above, in the electromagnetic flow meter according to the present embodiment, a plurality of pairs of electrodes 73 are provided on the outer circumference of the measuring tube 71 in parallel with the flow direction of the fluid to be measured. The power is detected by the plurality of detection circuits 76, and the plurality of detection results are integrated by the integration processing unit 77 for comparison extraction or averaging, so that high performance can be achieved.

[0060]

As described above, according to the electromagnetic flow meter of the present invention, it is possible to improve the productivity, reduce the size, and further improve the performance.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment of an electromagnetic flow meter according to the present invention.

FIG. 2 is a development view showing a configuration example of a flexible substrate in the electromagnetic flow meter according to the first embodiment.

FIG. 3 is a schematic diagram showing a second embodiment of the electromagnetic flow meter according to the present invention.

FIG. 4 is a development view showing a configuration example of a flexible substrate in the electromagnetic flow meter according to the second embodiment.

FIG. 5 is a schematic diagram showing a third embodiment of the electromagnetic flow meter according to the present invention.

FIG. 6 is a development view showing a configuration example of a flexible board in the electromagnetic flow meter according to the third embodiment.

FIG. 7 is a schematic diagram showing a fourth embodiment of the electromagnetic flow meter according to the present invention.

FIG. 8 is a schematic diagram showing a configuration example of a conventional electromagnetic flow meter.

FIG. 9 is a conceptual diagram showing Faraday's electromagnetic induction law, which is a flow velocity measurement principle of a conventional electromagnetic flowmeter.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Measuring tube 12 ... Flexible board 13 ... Coil 14 ... Electrode 15 ... Yoke 16 ... Excitation circuit 17 ... Detection circuit 21 ... Flexible board 22 ... Coil 23 ... Electrode 31 ... Measuring tube 32 ... Flexible board 33 ... Coil 34 ... Electrode 35 ... Yoke 36 ... Excitation circuit 37 ... Detection circuit 41 ... Flexible substrate 42 ... Coil 43 ... Electrode 51 ... Measurement tube 52 ... Flexible substrate 53 ... Coil 54 ... Electrode 55 ... Yoke 56 ... Excitation circuit 57 ... Detection circuit 61 ... Flexible substrate 62 ... coil 63 ... electrode 64 ... excitation circuit 65 ... detection circuit 71 ... measurement tube 72 ... coil 73 ... electrode 74 ... yoke 75 ... excitation circuit 76 ... detection circuit 77 ... integration processing unit 81 ... measurement tube 82 ... coil 83 ... electrode 84 ... Yoke 85 ... Excitation circuit 86 ... Detection circuit 91 ... Flux density 92 ... Moving speed Degree 93: Conductor width 94: Electromotive force.

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Takuya Iijima 1 Toshiba-cho, Fuchu-shi, Tokyo F-term in Fuchu Works, Toshiba Corporation (reference) 2F035 BB02 BB07 BC03 BE05 CB10 GA02

Claims (4)

[Claims] A measuring tube for flowing a fluid to be measured therein; a pair of coils for generating a magnetic field; a pair of electrodes for receiving an electromotive force; a yoke serving as a core of the pair of coils and connecting the magnetic field; An excitation circuit for driving a coil, and a detection circuit for detecting an electromotive force received by the pair of electrodes, a magnetic field generated by the pair of coils is applied by the yoke in a direction perpendicular to the flow of the fluid to be measured, The electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes is detected by the detection circuit, and the flow rate of the fluid to be measured is determined based on the magnitude of the electromotive force. In the flowmeter, the pair of coils and the pair of electrodes, a flexible substrate pattern to create one flexible substrate,
An electromagnetic flowmeter mounted on the outer circumference of the measurement tube. 2. A measurement tube through which a fluid to be measured flows, a pair of coils for generating a magnetic field, a pair of electrodes for receiving an electromotive force, a yoke serving as a core of the pair of coils and connecting the magnetic field, An excitation circuit for driving a coil, and a detection circuit for detecting an electromotive force received by the pair of electrodes, a magnetic field generated by the pair of coils is applied by the yoke in a direction perpendicular to the flow of the fluid to be measured, The electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes is detected by the detection circuit, and the flow rate of the fluid to be measured is determined based on the magnitude of the electromotive force. In the flow meter, the pair of coils, the pair of electrodes, and the signal wiring of the excitation signal and the detection signal are used as a flexible substrate pattern to form one flexible substrate. Electromagnetic flow meter, characterized by comprising mounted on the outer periphery of the measuring tube. A measuring tube for flowing a fluid to be measured therein; a pair of coils for generating a magnetic field; a pair of electrodes for receiving an electromotive force; a yoke serving as a core of the pair of coils and connecting the magnetic field; An excitation circuit for driving a coil, and a detection circuit for detecting an electromotive force received by the pair of electrodes, a magnetic field generated by the pair of coils is applied by the yoke in a direction perpendicular to the flow of the fluid to be measured, The electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes is detected by the detection circuit, and the flow rate of the fluid to be measured is determined based on the magnitude of the electromotive force. In the flow meter, the pair of coils, the pair of electrodes, the excitation circuit, the detection circuit, and signal wiring of an excitation signal and a detection signal,
An electromagnetic flowmeter, wherein one flexible substrate is formed as a flexible substrate pattern and mounted on the outer periphery of the measurement tube. A measuring tube for flowing a fluid to be measured therein; a pair of coils for generating a magnetic field; a pair of electrodes for receiving an electromotive force; a yoke serving as a core of the pair of coils and connecting the magnetic field; An excitation circuit for driving a coil, and a detection circuit for detecting an electromotive force received by the pair of electrodes, a magnetic field generated by the pair of coils is applied by the yoke in a direction perpendicular to the flow of the fluid to be measured, The electromotive force generated by the movement of the fluid to be measured in the magnetic field and received by the pair of electrodes is detected by the detection circuit, and the flow rate of the fluid to be measured is determined based on the magnitude of the electromotive force. In the flow meter, a plurality of the pair of electrodes are provided in parallel with a flow direction of the fluid to be measured, and a plurality of the detection circuits are provided in correspondence with the respective electrodes. An electromagnetic flowmeter comprising integrated processing means for integrating a plurality of detection results of electromotive force by the detection circuit and outputting one detection result.