JP2002079197A - Ultrasonic cleaning device - Google Patents

Ultrasonic cleaning device

Info

Publication number
JP2002079197A
JP2002079197A JP2000268792A JP2000268792A JP2002079197A JP 2002079197 A JP2002079197 A JP 2002079197A JP 2000268792 A JP2000268792 A JP 2000268792A JP 2000268792 A JP2000268792 A JP 2000268792A JP 2002079197 A JP2002079197 A JP 2002079197A
Authority
JP
Japan
Prior art keywords
ultrasonic
vibration
transmitting member
vibration transmitting
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000268792A
Other languages
Japanese (ja)
Inventor
Yoshiki Hashimoto
芳樹 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP2000268792A priority Critical patent/JP2002079197A/en
Publication of JP2002079197A publication Critical patent/JP2002079197A/en
Pending legal-status Critical Current

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  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device for efficiently cleaning plural treating tanks at a low cost. SOLUTION: An object to be cleaned is cleaned with high efficiency by using the treating tank 2a where a cleaning fluid 1a is stored and a vertically long ultrasonic energy generating part 3 one end of which is invaded in the fluid 1a to transmit ultrasonic vibration to the fluid 1a in the radial direction. The part 3 can be moved from the tank 2a to other treating tanks 2b, 2c by providing a supporting mechanism 22 for hanging/supporting the part 3 so that it can be invaded in the fluid 1a and a conveying means 20 to which the mechanism 22 is fit and fixed for conveying the mechanism 22 in this ultrasonic cleaning device. As a result, the cleaning cost can be cut down.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、被洗浄物を開口し
た処理槽に受け入れて超音波洗浄する超音波洗浄装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning apparatus that receives an object to be cleaned in an open processing tank and performs ultrasonic cleaning.

【0002】[0002]

【従来の技術】従来、この種の超音波洗浄装置として、
図5に示す洗浄槽タイプのものが知られている。
2. Description of the Related Art Conventionally, as this type of ultrasonic cleaning device,
A cleaning tank type shown in FIG. 5 is known.

【0003】図示のように、超音波洗浄装置は、洗浄用
流体101を貯留すると共に被洗浄物を収容し得る処理
槽103と、処理槽103の底部に装着又は接着された
振動子105とを備えている。
As shown in the figure, an ultrasonic cleaning apparatus includes a processing tank 103 that stores a cleaning fluid 101 and can store an object to be cleaned, and a vibrator 105 attached or adhered to the bottom of the processing tank 103. Have.

【0004】前記振動子105は例えば電歪素子からな
り、図示しない発振器によって所定周波数の電圧を印加
されて作動し、この周波数の超音波振動を発し、該超音
波振動によって洗浄用流体101が励振され、該洗浄用
流体101中に浸漬されている被洗浄物(図示せず)が
洗浄される。
The vibrator 105 is made of, for example, an electrostrictive element, and operates by applying a voltage of a predetermined frequency by an oscillator (not shown) to generate ultrasonic vibration of this frequency, and the cleaning fluid 101 is excited by the ultrasonic vibration. Then, the object to be cleaned (not shown) immersed in the cleaning fluid 101 is cleaned.

【0005】[0005]

【発明が解決しようとする課題】上述した超音波洗浄装
置は、以下のような点で改善が望まれている。
The ultrasonic cleaning apparatus described above is desired to be improved in the following points.

【0006】前記超音波洗浄装置は、処理槽103の
底部に振動子105が装着され、処理槽と振動子を有す
る超音波エネルギー発生部が一体となっているものであ
る。そのため数種類の異なる洗浄用流体を使用する洗浄
工程の場合、その都度洗浄用流体を交換するか、又は、
超音波洗浄装置自体を複数使用する必要があり、作業時
間又はコストがかかる。
In the ultrasonic cleaning apparatus, a vibrator 105 is mounted on the bottom of a processing tank 103, and an ultrasonic energy generating unit having the processing tank and the vibrator is integrated. Therefore, in the case of a cleaning process using several types of different cleaning fluids, the cleaning fluid is replaced each time, or
It is necessary to use a plurality of ultrasonic cleaning devices themselves, which increases the working time or cost.

【0007】前記超音波洗浄装置は、処理槽103の
底部に振動子105が装着されているため、超音波エネ
ルギーは、処理槽の底部から上方への一方向へのみ放射
され、被洗浄物の洗浄ムラが生じやすい。
[0007] In the ultrasonic cleaning apparatus, since the vibrator 105 is mounted on the bottom of the processing tank 103, ultrasonic energy is radiated only in one direction upward from the bottom of the processing tank 103, so that the cleaning object can be cleaned. Cleaning unevenness is likely to occur.

【0008】洗浄用流体101が存在しない状態での
作動、すなわち空焚きの状態になると、出力の異常な上
昇が起こり、振動子105を処理槽103の底面に固着
している接着剤の劣化による剥離や、振動子105自体
に割れが生ずるおそれがある。
When the operation is performed in the absence of the cleaning fluid 101, that is, in the state of empty heating, an abnormal increase in output occurs, and the deterioration of the adhesive fixing the vibrator 105 to the bottom surface of the processing tank 103 is caused. Peeling or cracking of the vibrator 105 itself may occur.

【0009】そこで、本発明の目的とするところは、振
動子を有する超音波エネルギー発生部を処理槽と固定さ
せないことで、低コストで複数の処理槽を有することを
可能とし、且つ、効率のよい洗浄効果を得られる超音波
洗浄装置を提供することである。
Therefore, an object of the present invention is to make it possible to have a plurality of processing tanks at a low cost by not fixing an ultrasonic energy generating section having a vibrator to the processing tank, and to improve efficiency. An object of the present invention is to provide an ultrasonic cleaning device capable of obtaining a good cleaning effect.

【0010】[0010]

【課題を解決するための手段】本発明による超音波洗浄
装置は、洗浄用流体が貯留されて、被洗浄物の洗浄が可
能な少なくとも1以上の処理槽と、長手状で一端側が前
記洗浄用流体内に進入して半径方向に超音波振動の伝達
が可能な振動伝達部材及び前記振動伝達部材の他端と結
合して前記振動伝達部材の長手方向に超音波振動を発振
する振動子とを有する超音波エネルギー発生部と、前記
超音波エネルギー発生部が前記洗浄用流体内に進入可能
に吊り支げ支持する支持機構と、前記支持機構が取付固
定され該支持機構を搬送する搬送手段を備え、前記搬送
手段の搬送によって前記振動伝達部材は洗浄用流体内に
進入して該振動伝達部材の半径方向に超音波エネルギー
を放射して被洗浄物の洗浄を行うものである。
According to the present invention, there is provided an ultrasonic cleaning apparatus comprising: at least one processing tank in which a cleaning fluid is stored and which is capable of cleaning an object to be cleaned; A vibration transmitting member which is capable of transmitting ultrasonic vibration in the radial direction by entering into the fluid, and a vibrator which oscillates ultrasonic vibration in the longitudinal direction of the vibration transmitting member in combination with the other end of the vibration transmitting member. An ultrasonic energy generating section having a support mechanism for suspending and supporting the ultrasonic energy generating section so that the ultrasonic energy generating section can enter the cleaning fluid; and a conveying means to which the supporting mechanism is attached and fixed and which conveys the supporting mechanism. The vibration transmitting member enters the cleaning fluid by the transportation of the transportation means, and radiates ultrasonic energy in a radial direction of the vibration transmitting member to clean the object to be cleaned.

【0011】また、本発明による超音波洗浄装置の処理
槽は、上面が開口しているものである。
Further, the processing tank of the ultrasonic cleaning apparatus according to the present invention has an open upper surface.

【0012】また、本発明による超音波洗浄装置の超音
波エネルギー発生部は、前記支持機構により吊支られる
ための吊り下げ部材を有するものである。
Further, the ultrasonic energy generating section of the ultrasonic cleaning apparatus according to the present invention has a suspending member to be suspended by the support mechanism.

【0013】また、本発明による超音波洗浄装置の振動
伝達部材の長さは、前記振動子が発振する超音波振動の
半波長の整数倍に設定されているものである。
Further, the length of the vibration transmitting member of the ultrasonic cleaning apparatus according to the present invention is set to an integral multiple of a half wavelength of the ultrasonic vibration oscillated by the vibrator.

【0014】また、本発明による超音波洗浄装置の振動
伝達部材は、均一に縮径された先端部分と、前記先端部
分に空隙を形成するためのカバー部材を有し、前記空隙
が形成される長手方向の寸法を、前記振動子が発振する
超音波振動の波長の約1/4とするものである。
Further, the vibration transmitting member of the ultrasonic cleaning apparatus according to the present invention has a tip portion uniformly reduced in diameter and a cover member for forming a gap in the tip portion, and the gap is formed. The length in the longitudinal direction is set to about 1 / of the wavelength of the ultrasonic vibration oscillated by the vibrator.

【発明の実施の形態】次に、本発明による実施の形態
を、図1乃至図4を参照して説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment according to the present invention will be described with reference to FIGS.

【0015】図1は、本発明による第1の実施の形態と
しての超音波洗浄装置(超音波エネルギー放射装置を含
む)の縦断面図、図2は、図1に示す振動伝達部材のA
−A断面であり、放射方向を示す説明図、図3は、図1
に示す超音波洗浄装置が備える振動伝達部材の先端部分
の一部を拡大した縦断面図、図4は、超音波洗浄装置の
斜視図である。
FIG. 1 is a longitudinal sectional view of an ultrasonic cleaning device (including an ultrasonic energy radiating device) according to a first embodiment of the present invention, and FIG. 2 is a sectional view of the vibration transmitting member shown in FIG.
FIG. 3 is an explanatory view showing a radiation direction, and FIG.
Is an enlarged longitudinal sectional view of a part of a tip end portion of a vibration transmission member provided in the ultrasonic cleaning device shown in FIG. 4, and FIG. 4 is a perspective view of the ultrasonic cleaning device.

【0016】図1に示すように、本発明による超音波洗
浄装置は、超音波エネルギー発生部3と、吊り下げ部材
10及び処理槽2を備えている。
As shown in FIG. 1, the ultrasonic cleaning apparatus according to the present invention includes an ultrasonic energy generator 3, a hanging member 10, and a processing tank 2.

【0017】処理槽2は、上面が開口した箱状でなり、
純水及び薬液等の洗浄用流体を貯留するとともに、被洗
浄物を受け入れて超音波洗浄が可能な洗浄槽である。こ
の処理槽2は、超音波エネルギー発生部3と結合してい
ないため、被洗浄物の大きさや形、また洗浄用流体の種
類に応じて処理槽を変えることができるので、作業効率
の上昇又は低コスト化が可能である。
The processing tank 2 has a box shape with an open upper surface.
A cleaning tank that stores a cleaning fluid such as pure water and a chemical solution, and that can receive an object to be cleaned and perform ultrasonic cleaning. Since the processing tank 2 is not connected to the ultrasonic energy generating unit 3, the processing tank can be changed according to the size and shape of the object to be cleaned and the type of the cleaning fluid, so that the working efficiency can be increased or Cost reduction is possible.

【0018】この超音波エネルギー発生部3は、振動伝
達部材4と、振動伝達部材4に結合された振動子5を有
する。
The ultrasonic energy generator 3 has a vibration transmitting member 4 and a vibrator 5 coupled to the vibration transmitting member 4.

【0019】振動伝達部材4は、ジュラルミン等の素材
で構成され、長手状で断面形状が円形で、中実に形成さ
れている。そして、一端側が処理槽2内の洗浄用流体1
に浸るように垂直に吊支される。
The vibration transmitting member 4 is made of a material such as duralumin or the like, and is formed to be long, solid in cross section, and solid. One end side is the cleaning fluid 1 in the processing tank 2.
It is suspended vertically so that it is immersed in.

【0020】振動伝達部材4の他方の端部、すなわち図
1に示す上端部は、振動子5が固定されている。また、
図1に示すように振動伝達部材4の上端部近傍と振動子
5は、円筒状のケース12により内包されており、ケー
ス12の上部内側には冷却ファンモータ11が取付固定
されている。この冷却ファンモータ11は、振動子5の
過熱を防止するためのもので、コネクター15及びケー
ブル14を介して給電される。また、冷却ファンモータ
11が吸引するための通風孔がケース12に設けられて
いる。
A vibrator 5 is fixed to the other end of the vibration transmitting member 4, that is, the upper end shown in FIG. Also,
As shown in FIG. 1, the vicinity of the upper end of the vibration transmitting member 4 and the vibrator 5 are enclosed by a cylindrical case 12, and a cooling fan motor 11 is mounted and fixed inside the upper part of the case 12. The cooling fan motor 11 is for preventing the vibrator 5 from being overheated, and is supplied with power via a connector 15 and a cable 14. Further, a ventilation hole for suction by the cooling fan motor 11 is provided in the case 12.

【0021】振動子5は、例えば電歪素子で、図示せぬ
発振器によりコネクタ15、及びケーブル14を介して
所定の周波数の電圧が印加されて駆動されて超音波振動
を発振する。この超音波振動は、振動伝達部材4の長手
方向に伝播される。超音波エネルギー発生部3と図示せ
ぬ発振器とを超音波エネルギー放射装置と総称する。
The vibrator 5 is, for example, an electrostrictive element, and is driven by applying a voltage of a predetermined frequency through a connector 15 and a cable 14 by an oscillator (not shown) to oscillate ultrasonic vibrations. This ultrasonic vibration is propagated in the longitudinal direction of the vibration transmitting member 4. The ultrasonic energy generator 3 and an oscillator (not shown) are collectively referred to as an ultrasonic energy radiating device.

【0022】また、振動伝達部材4は、その長さLが、
振動子5から伝播される超音波振動の半波長(λ/2)
の整数倍に設定されて共振する。本実施の形態では振動
伝達部材4の長さLは379mm、直径dは66mmと
なっている。振動子5から伝播される超音波振動の1波
長(λ)は252mmとなっており、長さL及び直径d
はそれぞれ、この1波長の約1.5倍、および1波長の
約1/4〜1/3倍になっている。
The length L of the vibration transmitting member 4 is
Half wavelength (λ / 2) of ultrasonic vibration transmitted from vibrator 5
And resonates. In the present embodiment, the length L of the vibration transmitting member 4 is 379 mm, and the diameter d is 66 mm. One wavelength (λ) of the ultrasonic vibration propagated from the vibrator 5 is 252 mm, and the length L and the diameter d
Are about 1.5 times this one wavelength and about 1 / to 3 times this one wavelength, respectively.

【0023】図2に示すように、振動伝達部材4から放
射される超音波エネルギーの方向はFで示されており、
この超音波エネルギーは、振動伝達部材4の半径方向に
放射され、全方向(360°)特性を有しており、均一
に洗浄用流体1に伝播されるため、洗浄ムラを防ぐこと
が可能である。
As shown in FIG. 2, the direction of the ultrasonic energy radiated from the vibration transmitting member 4 is indicated by F,
The ultrasonic energy is radiated in the radial direction of the vibration transmitting member 4 and has an omnidirectional (360 °) characteristic, and is uniformly transmitted to the cleaning fluid 1, so that cleaning unevenness can be prevented. is there.

【0024】また、図1及び図3に示すように、振動伝
達部材4の先端部分4eが均一に縮径されており、この
先端部分に外形が振動伝達部材4の本体部分と略同径
で、かつ、内径がこの先端部分4eよりも大きく形成さ
れたカバー部材7が固着されている。前記カバー部材7
によって振動伝達部材4の先端面、およびその近傍に空
隙6が形成されている。
As shown in FIGS. 1 and 3, the distal end portion 4e of the vibration transmitting member 4 is uniformly reduced in diameter, and the outer shape of the distal end portion 4e is substantially the same as that of the main body of the vibration transmitting member 4. A cover member 7 having an inner diameter larger than the tip portion 4e is fixed. The cover member 7
Thereby, a gap 6 is formed at the distal end face of the vibration transmitting member 4 and in the vicinity thereof.

【0025】このカバー部材7は、例えばジュラルミン
などの金属や合成樹脂を素材として形成される。
The cover member 7 is made of a metal such as duralumin or a synthetic resin.

【0026】振動伝達部材4とカバー部材7との間に
は、振動伝達部材4の長手方向において液密部材7aが
介装されている。この液密部材7aによって、前記空隙
6の液密性が確保されている。液密部材7aは、例えば
ゴムなどの粘弾性素材を用いて形成される。この液密部
材7aはカバー部材内外の液密性を維持するだけでな
く、振動子5から振動伝達部材4に付与される長手方向
の超音波振動がカバー部材7に伝播しにくくする作用も
する。すなわち、カバー部材7を通じた洗浄用流体1へ
の振動エネルギーの伝達が抑止され、振動伝達部材4の
半径方向のエネルギーに変換される効率をさらに高めて
いる。
A liquid-tight member 7 a is interposed between the vibration transmitting member 4 and the cover member 7 in the longitudinal direction of the vibration transmitting member 4. The liquid tightness of the gap 6 is ensured by the liquid tight member 7a. The liquid-tight member 7a is formed using a viscoelastic material such as rubber. The liquid-tight member 7a not only maintains the liquid-tightness inside and outside the cover member, but also has a function of making it difficult for the longitudinal ultrasonic vibration applied to the vibration transmitting member 4 from the vibrator 5 to propagate to the cover member 7. . That is, transmission of vibration energy to the cleaning fluid 1 through the cover member 7 is suppressed, and the efficiency of the vibration transmission member 4 being converted into energy in the radial direction is further increased.

【0027】振動伝達部材4の空隙6内の空気の音響イ
ンピーダンスが洗浄用流体1の音響インピーダンスに較
べて極めて小さいことから、空隙6側には振動エネルギ
ーはほとんど伝わらない。したがって、振動子5から振
動伝達部材4に付与される長手方向の振動エネルギーは
振動伝達部材4の先端から無駄に放射されることがな
く、ほとんど全てが半径方向の超音波エネルギーに変換
されて洗浄用流体1中に効率的に放射される。すなわ
ち、高効率な洗浄効果が得られる。
Since the acoustic impedance of the air in the space 6 of the vibration transmitting member 4 is extremely smaller than the acoustic impedance of the cleaning fluid 1, almost no vibration energy is transmitted to the space 6. Therefore, the longitudinal vibration energy applied to the vibration transmitting member 4 from the vibrator 5 is not wastefully radiated from the tip of the vibration transmitting member 4, and almost all of the energy is converted into radial ultrasonic energy and cleaned. Is efficiently radiated into the working fluid 1. That is, a highly efficient cleaning effect can be obtained.

【0028】ここで、図3において記号aで示す寸法、
すなわち振動伝達部材4がカバー部材7によって空隙6
が形成される長手方向の寸法は、振動子5から印加され
る超音波振動の波長の約1/4になっている。この範囲
では振動伝達部材4に比較的大きな半径方向の振動が誘
起され、洗浄用流体1への振動エネルギーの放射効率が
さらに高められ、有効である。
Here, the dimension indicated by the symbol a in FIG.
That is, the vibration transmitting member 4 is separated from the gap 6 by the cover member 7.
Is formed in the longitudinal direction is about 1 / of the wavelength of the ultrasonic vibration applied from the vibrator 5. In this range, a relatively large radial vibration is induced in the vibration transmitting member 4, and the radiation efficiency of the vibration energy to the cleaning fluid 1 is further increased, which is effective.

【0029】吊り下げ部材10は、例えばジュラルミン
などの金属や耐荷重性の素材を用いて形成され、ケース
12に取り付けられる。
The suspension member 10 is formed of a metal such as duralumin or a load-bearing material, and is attached to the case 12.

【0030】この吊り下げ部材10を、図4に示す支持
機構22に吊支することにより、超音波エネルギー発生
部3が、図1において矢印で示すZ1方向に昇降自在と
なる。そのため、振動伝達部材4が洗浄用流体1に浸さ
れる部分dの値を最大から0まで調節可能となる。
By suspending the suspension member 10 on the support mechanism 22 shown in FIG. 4, the ultrasonic energy generating section 3 can be moved up and down in the Z1 direction shown by the arrow in FIG. Therefore, the value of the portion d in which the vibration transmitting member 4 is immersed in the cleaning fluid 1 can be adjusted from the maximum to zero.

【0031】また、振動伝達部材4は長く、それ自体が
比較的大きな音響インピーダンスを有するから、d値が
0となった状態で作動、つまり空焚きの状態となっても
出力の異常な上昇が防止される。
Further, since the vibration transmitting member 4 is long and has a relatively large acoustic impedance itself, the vibration transmitting member 4 operates in a state where the d value is 0, that is, an abnormal increase in the output even in a state of idling. Is prevented.

【0032】次に、本発明による超音波エネルギー放射
装置を備えた超音波洗浄装置について、図4を参照して
説明する。
Next, an ultrasonic cleaning apparatus provided with the ultrasonic energy emitting apparatus according to the present invention will be described with reference to FIG.

【0033】図4に示すように、超音波洗浄装置は搬送
手段20を備えており、この搬送手段20は、水平方向
(矢印Hで示す)に移動自在な可動ベース21と、この
可動ベース21を移動させるベース駆動手段(図示せ
ず)とを有している。この可動ベース21には図示しな
い昇降部材駆動手段によって昇降される昇降部材として
の可動ポール23が昇降自在(矢印Z2で示す)に設け
られている。
As shown in FIG. 4, the ultrasonic cleaning apparatus includes a transfer means 20. The transfer means 20 includes a movable base 21 movable in a horizontal direction (indicated by an arrow H), and a movable base 21. And a base driving means (not shown) for moving. The movable base 21 is provided with a movable pole 23 as an elevating member which is moved up and down by an elevating member driving means (not shown) so as to be able to move up and down (indicated by an arrow Z2).

【0034】また、支持機構22は、基体部22aとア
ーム部材22bからなり、基体部22aが可動ポール2
3に取付固定されている。
The support mechanism 22 comprises a base 22a and an arm member 22b.
3 is attached and fixed.

【0035】図4に示すように、超音波エネルギー発生
部3は、吊り下げ部材10が支持機構22の一対のアー
ム部材22bに掛けられて垂下されており、可動ポール
23による昇降動作により、処理槽2a中における高さ
の調整が自在であり、また、処理槽から取り出すことが
できる。
As shown in FIG. 4, the ultrasonic energy generator 3 has a hanging member 10 hung on a pair of arm members 22b of a support mechanism 22 and is suspended. The height in the tank 2a can be freely adjusted, and can be taken out of the processing tank.

【0036】この超音波エネルギー発生部3は、上述の
可動ポール23による昇降及び搬送手段20による水平
方向への移動により、二点鎖線で示すように、処理槽2
aから処理槽2b、処理槽2cへと処理槽を換えて洗浄
処理を行うことができる。
The ultrasonic energy generating section 3 is moved up and down by the movable pole 23 and moved in the horizontal direction by the transfer means 20, as shown by a two-dot chain line.
The cleaning process can be performed by changing the processing tank from a to the processing tank 2b and the processing tank 2c.

【0037】[0037]

【発明の効果】以上説明したように、本発明による超音
波洗浄装置は、振動子を有する超音波エネルギー発生部
を処理槽と固定せず、吊り下げ支持することによって、
低コストで複数の処理槽を有することが可能であり、ま
た、超音波エネルギーは、全方向(360°)特性を有
しており、被洗浄物に均一に、且つ、効率的に放射され
る。
As described above, the ultrasonic cleaning apparatus according to the present invention has a structure in which the ultrasonic energy generating section having the vibrator is suspended and supported without being fixed to the processing tank.
It is possible to have a plurality of processing tanks at low cost, and the ultrasonic energy has an omnidirectional (360 °) characteristic and is uniformly and efficiently radiated to the object to be cleaned. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明の第1の実施の形態としての超
音波洗浄装置の縦断面図である。
FIG. 1 is a longitudinal sectional view of an ultrasonic cleaning apparatus as a first embodiment of the present invention.

【図2】図2は、図1に関するA−A矢視図である。FIG. 2 is a view on arrow AA of FIG. 1;

【図3】図3は、図1に示す超音波洗浄装置が備える振
動伝達部材4の一部を拡大した縦断面図である。
FIG. 3 is an enlarged longitudinal sectional view of a part of a vibration transmitting member 4 provided in the ultrasonic cleaning apparatus shown in FIG.

【図4】図4は、本発明の第2の実施の形態としての超
音波洗浄装置の斜視図である。
FIG. 4 is a perspective view of an ultrasonic cleaning apparatus according to a second embodiment of the present invention.

【図5】図5は、従来の超音波洗浄装置の縦断面図であ
る。
FIG. 5 is a longitudinal sectional view of a conventional ultrasonic cleaning device.

【符号の説明】[Explanation of symbols]

1 洗浄用流体 2 処理槽 3 超音波エネルギー発生部 4 振動伝達部材 4e 先端部 5 振動子 6 空隙 7 カバー部材 7a 液密部材 10 吊り下げ部材 12 ケース 20 搬送手段 22 支持機構 22a 基体部 22b アーム部材 DESCRIPTION OF SYMBOLS 1 Cleaning fluid 2 Processing tank 3 Ultrasonic energy generation part 4 Vibration transmission member 4e Tip part 5 Vibrator 6 Air gap 7 Cover member 7a Liquid tight member 10 Hanging member 12 Case 20 Transport means 22 Supporting mechanism 22a Base part 22b Arm member

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 洗浄用流体が貯留されて、被洗浄物の洗
浄が可能な少なくとも1以上の処理槽と、 長手状で一端側が前記洗浄用流体内に進入して半径方向
に超音波振動の伝達が可能な振動伝達部材及び前記振動
伝達部材の他端と結合して前記振動伝達部材の長手方向
に超音波振動を発振する振動子とを有する超音波エネル
ギー発生部と、 前記超音波エネルギー発生部が前記洗浄用流体内に進入
可能に吊り支げ支持する支持機構と、 前記支持機構が取付固定され該支持機構を搬送する搬送
手段を備え、 前記搬送手段の搬送によって前記振動伝達部材は洗浄用
流体内に進入して該振動伝達部材の半径方向に超音波エ
ネルギーを放射して被洗浄物の洗浄を行うことを特徴と
する超音波洗浄装置。
A cleaning fluid is stored therein, and at least one or more processing tanks capable of cleaning an object to be cleaned, and a longitudinal one end of which enters the cleaning fluid to generate ultrasonic vibrations in a radial direction. An ultrasonic energy generating unit having a vibration transmitting member capable of transmitting and an oscillator coupled to the other end of the vibration transmitting member and oscillating ultrasonic vibration in a longitudinal direction of the vibration transmitting member; A support mechanism for suspending and supporting the unit so as to be able to enter the cleaning fluid; and a transport unit to which the support mechanism is attached and fixed, and transports the support mechanism. An ultrasonic cleaning apparatus characterized in that it enters a working fluid and radiates ultrasonic energy in a radial direction of the vibration transmitting member to clean an object to be cleaned.
【請求項2】 前記処理槽は上面が開口していることを
特徴とする請求項1記載の超音波洗浄装置。
2. The ultrasonic cleaning apparatus according to claim 1, wherein an upper surface of said processing tank is open.
【請求項3】 超音波エネルギー発生部は、前記支持機
構により吊支られるための吊り下げ部材を有することを
特徴とする請求項1記載の超音波洗浄装置。
3. The ultrasonic cleaning apparatus according to claim 1, wherein the ultrasonic energy generating section has a suspending member for being suspended by the support mechanism.
【請求項4】 前記振動伝達部材の長さは、前記振動子
が発振する超音波振動の半波長の整数倍に設定されてい
ることを特徴とする請求項1記載の超音波洗浄装置。
4. The ultrasonic cleaning apparatus according to claim 1, wherein a length of said vibration transmitting member is set to an integral multiple of a half wavelength of ultrasonic vibration oscillated by said vibrator.
【請求項5】 前記振動伝達部材は、均一に縮径された
先端部分と、前記先端部分に空隙を形成するためのカバ
ー部材を有し、前記空隙が形成される長手方向の寸法
を、前記振動子が発振する超音波振動の波長の約1/4
とすることを特徴とする請求項1記載の超音波洗浄装
置。
5. The vibration transmitting member has a tip portion uniformly reduced in diameter, and a cover member for forming a gap in the tip portion, and the dimension in the longitudinal direction in which the gap is formed is set to the length. About 1/4 of the wavelength of ultrasonic vibration oscillated by the vibrator
The ultrasonic cleaning apparatus according to claim 1, wherein:
JP2000268792A 2000-09-05 2000-09-05 Ultrasonic cleaning device Pending JP2002079197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000268792A JP2002079197A (en) 2000-09-05 2000-09-05 Ultrasonic cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000268792A JP2002079197A (en) 2000-09-05 2000-09-05 Ultrasonic cleaning device

Publications (1)

Publication Number Publication Date
JP2002079197A true JP2002079197A (en) 2002-03-19

Family

ID=18755516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000268792A Pending JP2002079197A (en) 2000-09-05 2000-09-05 Ultrasonic cleaning device

Country Status (1)

Country Link
JP (1) JP2002079197A (en)

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