JP2002078215A - Charging circuit for capacitor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance reliability and efficiency. SOLUTION: In a charging circuit for a capacitor consisting of a charging power source 10 that charges a load capacitor and a charging resistor Rc connected in series between the output on the high voltage side of the charging power source 10 and a load capacitor CL, the charging resistor Rc is configured such that at least two resistors Rc1 to Rc3 are connected in parallel with each other, and each of the resistors Rc1 to Rc3 is disposed so as to be almost equal distance from a feedback conductor BUS on the low voltage side from the load capacitor CL the charging power source 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas treatment apparatus for decomposing harmful substances in exhaust gas using pulse corona discharge, a pulse laser apparatus used for various processing, and the like.
The present invention relates to a capacitor charging circuit used for a pulse power supply for driving a pulse power application device, and more particularly to a capacitor charging circuit capable of achieving high reliability and high efficiency.

[0002]

2. Description of the Related Art In recent years, pulse power using discharge has been used, such as an exhaust gas treatment apparatus for decomposing and processing harmful substances such as NOx and dioxins using pulse corona discharge, and an excimer laser apparatus for ultra-precision machining of objects. Industrial demand for devices is growing.

In this type of pulse power application device, a capacitor charging circuit for rapidly charging a load capacitor as an energy storage element to a set voltage is indispensable.

FIG. 10 is a circuit diagram showing an example of a configuration of a conventional capacitor charging circuit of this kind.

As shown in FIG. 10, the capacitor charging circuit includes a DC power supply Edc, a resonance inverter circuit including an inverter INV and a resonance capacitor Cr, a transformer Tr having the resonance inverter circuit connected to the primary side, and A charging power supply 10 of a resonance type converter circuit configured to charge a load capacitor CL, comprising a rectifier circuit REC connected to the secondary side of the transformer Tr, and between a high-voltage output of the charging power supply 10 and the load capacitor CL. A circuit including a charging resistor Rc connected in series is mainly used.

In the above-described capacitor charging circuit, a charging current having a frequency determined by the capacitance value of the resonance capacitor Cr and the leakage inductance value of the transformer Tr flows. Used at higher frequencies.

The charging resistor Rc is generally constructed by connecting a plurality of resistors Rc1 to Rc3 in parallel with each other in order to satisfy the power capacity.

[0008]

However, as described above, in the capacitor charging circuit for flowing a high-frequency charging current, the resistors Rc1 to Rc3 connected in parallel to each other are used.
If the return conductor BUS from the load capacitor CL to the charging power source 10 is not arranged so that the wiring inductance values Ls1 to Ls3 of
The current does not flow evenly to c1 to Rc3, and concentrates on some resistors.

As a result, there arises a problem that an excessive temperature rise of the resistor in which the current is concentrated is caused, thereby deteriorating the reliability of the device.

That is, for example, as shown in the structural layout of FIG. 11, when the resistors Rc1 to Rc3 and the feedback conductor BUS are respectively arranged, the wiring inductance values of the resistors Rc1 to Rc3 are Vessels Rc3, Rc
2. Since the current increases in the order of Rc1, the largest charging current flows through the resistor Rc3.

As a result, the temperature rise of the resistor Rc3 is higher than that of the other two resistors Rc2 and Rc1, and in some cases, the temperature may exceed the allowable temperature.

[0012] On the other hand, as shown in the circuit diagram of FIG. 12, the charging power supply 10 and the charging resistor Rc are often connected using a coaxial cable 20.
As seen from the above, the coaxial cable 20 is a capacitive load, and is charged at the set voltage in the same manner as the load capacitor CL.

The capacity of the coaxial cable 20 is constant per unit length, and the longer the length, the larger the total capacity value.

In the capacitor charging circuit, all the energy stored in the coaxial cable 20 is consumed by the charging resistor Rc and is lost.

Therefore, if the coaxial cable 20 is lengthened and used under the condition that the ratio of the total capacitance value of the coaxial cable 20 to the capacitance value of the load capacitor CL is large, the loss of the capacitor charging circuit increases, and the circuit efficiency increases. Is reduced.

An object of the present invention is to arrange a feedback conductor such that when a charging resistor is composed of a plurality of resistors connected in parallel to each other, the wiring inductance value of each resistor becomes equal. Another object of the present invention is to provide a capacitor charging circuit capable of equalizing charging currents flowing through respective resistors and achieving high reliability.

Another object of the present invention is to make the ratio of the total capacitance value of the coaxial cable to the capacitance value of the load capacitor proper when the charging power supply and the charging resistor are connected by a coaxial cable. Accordingly, an object of the present invention is to provide a capacitor charging circuit capable of achieving high efficiency.

[0018]

In order to achieve the above object, according to the first aspect of the present invention, a charging power supply for charging a load capacitor is connected in series between a high-voltage output of the charging power supply and the load capacitor. In the capacitor charging circuit, the charging resistor is configured by connecting at least two or more resistors in parallel with each other, and each of the resistors is connected to a charging power source from a load capacitor. It is arranged so as to be substantially equidistant from the return conductor on the low voltage side.

Here, in particular, for example, as described in claim 2, the return conductor is constituted by at least two or more conductors, or as described in claim 3, the return conductor is a flat plate, and It is preferable that each resistor is arranged on a plane substantially parallel to the flat plate.

Therefore, in the capacitor charging circuit according to the first to third aspects of the present invention, by adopting the above-described means, the wiring inductance of each of the resistors connected in parallel to each other and constituting the charging resistor is formed. This makes it possible to equalize the values and equalize the charging current flowing through each, and prevent the partial heating from occurring without the charging current concentrating on some resistors. Can be achieved.

According to a fourth aspect of the present invention, there is provided a capacitor charging apparatus comprising: a charging power supply for charging a load capacitor; and a charging resistor connected in series between a high-voltage output of the charging power supply and the load capacitor. In the circuit, the charging resistor is constituted by connecting at least two or more resistors in parallel with each other, arranging each resistor in a coaxial cylindrical shape, and connecting a charging power source from a load capacitor to a central axis of the resistor. The return conductor on the low voltage side is arranged.

Therefore, in the capacitor charging circuit according to the present invention, the above means make the wiring inductance values of the respective resistors constituting the charging resistor connected in parallel parallel to each other. , It is possible to equalize the charging current flowing through each,
Since the charging current does not concentrate on some resistors and the occurrence of partial heating can be prevented, the reliability of the capacitor charging circuit can be improved.

Furthermore, in the invention according to claim 5, a capacitor charging system comprising a charging power source for charging a load capacitor and a charging resistor connected in series between a high-voltage output of the charging power source and the load capacitor. In the circuit, the charging resistor is configured by connecting at least two or more resistors in parallel with each other, arranging the respective resistors in a coaxial cylindrical shape, and providing a low voltage side feedback conductor from the load capacitor to the charging power source. Is composed of at least two or more conductors, and the respective return conductors are arranged coaxially cylindrical on the same axis as the respective resistors.

Therefore, in the capacitor charging circuit according to the fifth aspect of the present invention, by adopting the above-mentioned means, the wiring inductance values of the respective parallel-connected resistors constituting the charging resistor can be made uniform. , It is possible to equalize the charging current flowing through each,
Since the charging current does not concentrate on some resistors and the occurrence of partial heating can be prevented, the reliability of the capacitor charging circuit can be improved.

Still further, in the invention according to claim 6, a capacitor comprising a charging power supply for charging a load capacitor, and a charging resistor connected in series between a high-voltage output of the charging power supply and the load capacitor. In the charging circuit, the charging resistor is constituted by connecting at least two or more resistors in parallel, arranging the respective resistors in a coaxial cylindrical shape, and providing a low voltage side feedback conductor from the load capacitor to the charging power source. Are composed of cylindrical conductors, and the axes of the respective return conductors are arranged on the same axis as the respective resistors.

Therefore, in the capacitor charging circuit according to the present invention, the above means make the wiring inductance values of the resistors connected in parallel constituting the charging resistor uniform. , It is possible to equalize the charging current flowing through each,
Since the charging current does not concentrate on some resistors and the occurrence of partial heating can be prevented, the reliability of the capacitor charging circuit can be improved.

On the other hand, in the invention according to claim 7, in the capacitor charging circuit according to any one of claims 1 to 6, the value Rcn of each of the resistors connected in parallel to each other is set to , Satisfying the following relational expression.

Rcn ≧ √ (Lsn / CL) where Lsn is the wiring inductance of each of the resistors connected in parallel, CL is the capacitance of the load capacitor, and n is the number of paralleled resistors. In the capacitor charging circuit described above, since the resonance condition between the charging power supply and the load capacitor does not become the oscillation mode by the above means, the excessive temperature rise of the resistor due to the resonance of the charging current is prevented. Therefore, the reliability of the capacitor charging circuit can be improved.

On the other hand, in the invention according to claim 8, a capacitor charging system comprising a charging power source for charging a load capacitor and a charging resistor connected in series between a high-voltage output of the charging power source and the load capacitor. In the circuit, the charging resistor is configured by connecting at least one or more resistors in series with each other.

Therefore, in the capacitor charging circuit according to the present invention, it is possible to make the charging current flowing through each of the resistors constituting the charging resistor constant by employing the above means. Therefore, some of the resistors are not partially heated, and the reliability of the capacitor charging circuit can be improved.

According to a ninth aspect of the present invention, in the capacitor charging circuit according to any one of the first to eighth aspects, a coaxial cable is provided between the charging power source and the charging resistor. In addition, the length L of the coaxial cable is a value satisfying the following relational expression.

L ≦ CL × (1−η) / Ccab1e where CL: capacitance of load capacitor η: required specification value of energy efficiency of this capacitor charging circuit Ccab1e: capacitance per unit length of coaxial cable In particular, for example, as described in claim 10, it is preferable that the value Wrc of the total heat dissipation capacity of the charging resistor be a value satisfying the following relational expression. Wrc ≧ 0.5 × Ccab1e × L × Vout ² × f where Ccab1e: capacitance per unit length of coaxial cable L: length of coaxial cable Vout: charging voltage (= output voltage of charging power supply) f: load Therefore, in the capacitor charging circuit according to the ninth and tenth aspects of the present invention, the total capacity of the coaxial cable with respect to the capacitance value of the load capacitor is determined by the above means. By setting the ratio of the values to an appropriate value, it is possible to minimize the loss (= the amount of energy stored in the coaxial cable) generated in the coaxial cable, so that the efficiency of the capacitor charging circuit can be increased.

On the other hand, in the invention according to claim 11, in the capacitor charging circuit according to any one of claims 1 to 10, the charging power supply includes:
A resonant converter comprising a DC power supply, a resonant inverter circuit including an inverter and a resonant capacitor, a transformer having the resonant inverter circuit connected to a primary side, and a rectifying circuit connected to a secondary side of the transformer. Circuit is used.

According to a twelfth aspect of the present invention, in the capacitor charging circuit according to any one of the first to tenth aspects, the charging power supply includes:
An LC resonance type circuit composed of a DC power supply, a switch connected in series to the high voltage side of the DC power supply, a series circuit of a reactor and a diode is used.

Further, in the invention according to claim 13,
In the capacitor charging circuit according to any one of the first to tenth aspects, the charging power supply includes a DC power supply and a current limiting resistor connected in series to a high voltage side of the DC power supply. An RC charging type circuit is used.

Therefore, in the capacitor charging circuit of the invention according to the eleventh to thirteenth aspects, by adopting the above-described means, almost all charging power supply circuit systems applied to the pulse power application device can be used. Since the effects of the respective inventions corresponding to the first to tenth aspects are effective, in any of the charging power supply circuit systems,
High reliability and high efficiency of the capacitor charging circuit can be achieved.

[0037]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(First Embodiment: Corresponding to Claims 1 to 3 and Claim 11) FIG. 1 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to this embodiment, and FIG. The same elements as those in FIG. 12 to FIG. 12 are denoted by the same reference numerals, and description thereof will be omitted.

That is, in the capacitor charging circuit according to the present embodiment, as shown in FIG. 1, a charging resistor Rc is connected to at least two or more resistors (three in this example) Rc1 to Rc3 in parallel with each other. And each of the resistors Rc1 to Rc3 is connected to a charging power source 10 from a load capacitor CL.
The return conductor BUS on the low-voltage side, ie, the distance d1 between the resistors Rc1 to Rc3 and the return conductor BUS.
The arrangement is such that d3 is in the relationship d1 = d2 = d3.

As described above, the charging power supply 10 includes a DC power supply Edc, a resonance inverter circuit including an inverter INV and a resonance capacitor Cr, a transformer Tr having the resonance inverter circuit connected to the primary side, and A resonant converter circuit type charging power supply comprising a rectifier circuit REC connected to the secondary side of the transformer Tr is used.
Next, the operation of the capacitor charging circuit according to the present embodiment configured as described above will be described.

In FIG. 1, the inductance value L of the reciprocating conductor is proportional to the 1og value of the interval between the reciprocating conductors.

Therefore, as shown in FIG. 1, in the arrangement in which the distance between each of the resistors Rc1 to Rc3 and the feedback conductor BUS is equal, it is possible to make the inductance value of each of the resistors Rc1 to Rc3 constant. it can.

As a result, it is possible to equalize the charging currents flowing through each of them, and to prevent local overheating without the charging current being concentrated on some resistors, thereby improving the reliability of the capacitor charging circuit. Can be achieved.

(Modification) For example, as shown in FIG. 2, the same number of the return conductors BUS as the resistors Rc are provided, and the resistors Rc
The spacing between 1 to Rc3 and the corresponding return conductors BUS1 to BUS3 is almost equal or, as shown in FIG. 3, the return conductors BUS1 to BUS3 are flat plates, and are placed on a plane substantially parallel to the flat plates. Even when the resistors Rc1 to Rc3 are arranged, the inductance values of the resistors Rc1 to Rc3 can be kept constant, as in the arrangement shown in FIG.

As described above, in the capacitor charging circuit according to the present embodiment, when the charging resistor Rc is composed of a plurality of resistors connected in parallel with each other, the wiring inductance values of the respective resistors are equal. By arranging the feedback conductors in such a manner, it is possible to equalize the charging currents flowing through the respective resistors and achieve high reliability.

(Second Embodiment: Corresponding to Claim 4) FIG. 4 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to this embodiment, and the same elements as those in FIGS. The same reference numerals are given and the description is omitted, and only different portions will be described here.

That is, in the capacitor charging circuit according to the present embodiment, as shown in FIG. 4, a charging resistor Rc is connected to at least two or more resistors (three in this example) Rc1 to Rc3 in parallel with each other. The resistors Rc1 to Rc3 are arranged in a coaxial cylindrical shape.

Further, a low-voltage-side feedback conductor BUSS from the load capacitor CL to the charging power source 10 is arranged on the central axis of the resistors Rc1 to Rc3.

Next, also in the capacitor charging circuit according to the present embodiment configured as described above, the inductance value of each of the resistors Rc1 to Rc3 can be kept constant.

As a result, it is possible to equalize the charging current flowing through each of them, and it is possible to prevent local overheating without causing the charging current to concentrate on some resistors, thereby improving the reliability of the capacitor charging circuit. Can be achieved.

As described above, in the capacitor charging circuit according to the present embodiment, similarly to the case of the first embodiment, the case where the charging resistor Rc is constituted by a plurality of resistors connected in parallel to each other. In addition, by arranging the feedback conductors so that the wiring inductance values of the respective resistors become equal, the charging current flowing through the respective resistors can be equalized, and high reliability can be achieved.

(Third Embodiment: Claims 5 and 6)
FIG. 5 is a structural layout diagram showing a configuration example of the capacitor charging circuit according to the present embodiment, and FIGS.
The same elements as those described above are denoted by the same reference numerals, and the description thereof will be omitted.

That is, in the capacitor charging circuit according to the present embodiment, as shown in FIG. 5, a charging resistor Rc is connected to at least two or more resistors (three in this example) Rc1 to Rc3 in parallel with each other. The resistors Rc1 to Rc3 are arranged in a coaxial cylindrical shape.

Furthermore, the same number of low-voltage-side feedback conductors BUS from the load capacitor CL to the charging power source 10 as the resistors Rc are provided, and the respective feedback conductors BUS1 to BUS3 are provided on the same axis as the respective resistors Rc1 to Rc3. Are arranged in a coaxial cylindrical shape.

Next, also in the capacitor charging circuit according to the present embodiment configured as described above, the inductance value of each of the resistors Rc1 to Rc3 can be kept constant.

As a result, it is possible to equalize the charging current flowing through each of them, and it is possible to prevent local overheating without the charging current being concentrated on some resistors, thereby improving the reliability of the capacitor charging circuit. Can be achieved.

(Modification) FIG. 6 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to the present embodiment. The same elements as those in FIGS. 10 to 12 are denoted by the same reference numerals and description thereof is omitted. Here, only the different parts will be described.

That is, in the capacitor charging circuit according to the present embodiment, as shown in FIG. 6, a charging resistor Rc is connected in parallel with at least two or more resistors (three in this example) Rc1 to Rc3. The resistors Rc1 to Rc3 are arranged in a coaxial cylindrical shape.

Further, the low voltage side return conductors BUS1 to BUS3 from the load capacitor CL to the charging power source 10 are constituted by cylindrical conductors, and the axes of the respective return conductors BUS1 to BUS3 are the same as the resistors Rc1 to Rc3. It has a configuration arranged above.

Next, also in the capacitor charging circuit according to the present embodiment configured as described above, the inductance value of each of the resistors Rc1 to Rc3 can be kept constant.

As a result, it is possible to equalize the charging current flowing through each of the resistors, and to prevent local overheating without causing the charging current to concentrate on some resistors, thereby improving the reliability of the capacitor charging circuit. Can be achieved.

As described above, also in the capacitor charging circuit according to the present embodiment, similarly to the first and second embodiments, the charging resistor Rc is constituted by a plurality of resistors connected in parallel with each other. In this case, by arranging the feedback conductors so that the wiring inductance values of the respective resistors are equalized, the charging current flowing through the respective resistors can be equalized, and high reliability can be achieved. .

(Fourth Embodiment: Corresponding to Claim 7) The capacitor charging circuit according to the present embodiment is the same as the capacitor charging circuit according to any of the first to third embodiments, but is connected in parallel with each other. Each resistor Rc1
The value Rcn of .about.Rc3 is a value satisfying the following relational expression.

Rcn ≧ √ (Lsn / CL) where, Lsn is the wiring inductance of each of the resistors connected in parallel, CL is the capacitance of the load capacitor, and n is the number of resistors in parallel. In the capacitor charging circuit according to the present embodiment, the resonance condition between charging power supply 10 and load capacitor CL does not become the vibration mode.

As a result, it is possible to prevent an excessive rise in the temperature of the resistors Rc1 to Rc3 due to the resonance of the charging current.
High reliability of the capacitor charging circuit can be achieved.

As described above, in the capacitor charging circuit according to the present embodiment, it is possible to prevent the temperature of the resistor from excessively rising due to the resonance of the charging current, and to improve the reliability of the capacitor charging circuit. (Fifth Embodiment: Corresponding to Claim 8) FIG. 7 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to the present embodiment, and the same elements as those in FIGS. The description is omitted here, and only different parts will be described here.

That is, in the capacitor charging circuit according to the present embodiment, as shown in FIG. 7, at least one or more (three in this example) resistors Rc1 to Rc3 are connected in series with each other. It has a configuration.

Next, in the capacitor charging circuit according to the present embodiment configured as described above, the charging current flowing through each of the resistors Rc1 to Rc3 constituting the charging resistor can be kept constant.

As a result, it is possible to improve the reliability of the capacitor charging circuit without causing partial heating of some resistors.

As described above, in the capacitor charging circuit according to the present embodiment, it is possible to increase the reliability of the capacitor charging circuit while keeping the charging current flowing through each resistor constant. (Sixth Embodiment: Corresponding to Claims 9 and 10) The capacitor charging circuit according to the present embodiment is the same as the capacitor charging circuit according to any of the first to fifth embodiments, except that A coaxial cable 20 is provided between the charging resistor Rc and the charging resistor Rc, and the length L of the coaxial cable 20 is set to a value satisfying the following relational expression.

L ≦ CL × (1−η) / Ccab1e where, CL: capacitance of load capacitor η: required specification value of energy efficiency of this capacitor charging circuit Ccab1e: capacitance per unit length of coaxial cable The value Wr of the total heat dissipation capacity of the charging resistor Rc.
It is preferable that c be a value satisfying the following relational expression. Wrc ≧ 0.5 × Ccab1e × L × Vout ² × f where Ccab1e: capacitance per unit length of coaxial cable L: length of coaxial cable Vout: charging voltage (= output voltage of charging power supply) f: load Next, in the capacitor charging circuit according to the present embodiment configured as described above, the ratio of the total capacitance value of the coaxial cable 20 to the capacitance value of the load capacitor CL is set to an appropriate value. can do.

As a result, the loss generated in the coaxial cable 20 (= the amount of energy stored in the coaxial cable 20)
Can be suppressed as low as possible, so that the efficiency of the capacitor charging circuit can be improved.

As described above, in the capacitor charging circuit according to the present embodiment, it is possible to suppress the loss generated in the coaxial cable as low as possible and to improve the efficiency of the capacitor charging circuit. (Seventh Embodiment: Corresponding to Claims 12 and 13)
The capacitor charging circuit according to the present embodiment is the same as the capacitor charging circuit according to any one of the first to sixth embodiments, except that the charging power supply 10 includes, as the charging power supply 10, a DC power supply Edc, Instead of using a resonant converter circuit type charging power supply comprising a circuit, a transformer Tr connected to the primary side of a resonant inverter circuit, and a rectifier circuit REC connected to the secondary side of the transformer Tr. As an example, as shown in FIG. 8, the charging power supply 10 includes a DC power supply Ed, a switch SW connected in series to the high voltage side of the DC power supply Ed, a series circuit of a reactor d, and a diode.
As shown in FIG. 9, a resonance type circuit is used, or an RC charging type circuit composed of a DC power supply Ed and a current limiting resistor Rd connected in series to the high voltage side of the DC power supply Ed.

Next, in the capacitor charging circuit using the charging power supply 10 according to the present embodiment configured as described above, the same operation and effect as in the above case can be obtained.

As a result, the operation of the capacitor charging circuit according to any one of the first to sixth embodiments is effective for almost all charging power supply circuit systems applied to the pulse power application device. Also in the charging power supply circuit system, high reliability and high efficiency of the capacitor charging circuit can be achieved.

As described above, in the capacitor charging circuit according to the present embodiment, the reliability of the capacitor charging circuit is improved.
High efficiency can be achieved.

[0077]

As described above, according to the capacitor charging circuit of the present invention, when the charging resistor is composed of a plurality of resistors connected in parallel with each other, the wiring inductance value of each resistor is reduced. By arranging the feedback conductors so as to be equal, the charging currents flowing through the respective resistors can be equalized, so that the capacitor charging circuit can be made highly reliable.

According to the capacitor charging circuit of the present invention, when the charging power supply and the charging resistor are connected by a coaxial cable, the ratio of the total capacitance of the coaxial cable to the capacitance of the load capacitor is adjusted to an appropriate value. Therefore, the efficiency of the capacitor charging circuit can be improved.

[Brief description of the drawings]

FIG. 1 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to a first embodiment of the present invention.

FIG. 2 is a structural layout diagram showing another configuration example of the capacitor charging circuit according to the first embodiment of the present invention.

FIG. 3 is a structural layout diagram showing another configuration example of the capacitor charging circuit according to the first embodiment of the present invention.

FIG. 4 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to a second embodiment of the present invention.

FIG. 5 is a structural layout diagram showing a configuration example of a capacitor charging circuit according to a third embodiment of the present invention.

FIG. 6 is a structural layout diagram showing another configuration example of the capacitor charging circuit according to the third embodiment of the present invention.

FIG. 7 is a circuit diagram showing a configuration example of a capacitor charging circuit according to a fifth embodiment of the present invention.

FIG. 8 is a circuit diagram showing a configuration example of another charging power supply of the capacitor charging circuit according to the seventh embodiment of the present invention.

FIG. 9 is a circuit diagram showing a configuration example of another charging power supply of the capacitor charging circuit according to the seventh embodiment of the present invention.

FIG. 10 is a circuit diagram showing a configuration example of a conventional capacitor charging circuit.

FIG. 11 is a structural layout diagram showing a configuration example of a conventional capacitor charging circuit.

FIG. 12 is a circuit diagram showing another configuration example of a conventional capacitor charging circuit.

[Explanation of symbols]

 10: charging power supply, 20: coaxial cable Edc: DC power supply, INV: inverter, Cr: resonance capacitor, Tr: transformer, REC: rectifier circuit, CL: load capacitor, Rc, Rc1 to Rc3: charging resistance, BUS, BUS1 to BUS3: feedback conductor, SW: switch, Ld: reactor, Rd: current-limiting resistance, LS1 to LS3: wiring inductance.

Claims (13)

[Claims] A charging power supply for charging a load capacitor;
In a capacitor charging circuit including a charging resistor connected in series between a high-voltage output of the charging power supply and a load capacitor, the charging resistor includes at least two or more resistors connected in parallel with each other. And a capacitor charging circuit, wherein the respective resistors are arranged at substantially equal intervals with respect to a low-voltage-side feedback conductor from the load capacitor to the charging power supply. 2. The capacitor charging circuit according to claim 1, wherein the feedback conductor is constituted by at least two or more conductors. 3. The capacitor charging circuit according to claim 1, wherein the feedback conductor is a flat plate, and the resistors are arranged on a plane substantially parallel to the flat plate. . 4. A charging power supply for charging a load capacitor,
In a capacitor charging circuit including a charging resistor connected in series between a high-voltage output of the charging power supply and a load capacitor, the charging resistor includes at least two or more resistors connected in parallel with each other. A capacitor, wherein the respective resistors are arranged in a coaxial cylindrical shape, and a low-voltage-side feedback conductor from the load capacitor to the charging power source is arranged on the center axis of the resistor. Charging circuit. 5. A charging power supply for charging a load capacitor,
In a capacitor charging circuit including a charging resistor connected in series between a high-voltage output of the charging power supply and a load capacitor, the charging resistor includes at least two or more resistors connected in parallel with each other. And the respective resistors are arranged in a coaxial cylindrical shape, and the low voltage side return conductor from the load capacitor to the charging power supply is configured by at least two or more conductors. A capacitor charging circuit, which is arranged coaxially cylindrically on the same axis as the respective resistors. 6. A charging power supply for charging a load capacitor,
In a capacitor charging circuit including a charging resistor connected in series between a high-voltage output of the charging power supply and a load capacitor, the charging resistor is configured by connecting at least two or more resistors in parallel. In addition, the respective resistors are arranged in a coaxial cylindrical shape, and a low-voltage-side return conductor from the load capacitor to the charging power supply is constituted by a cylindrical conductor, and the axis of the respective return conductor is set to each of the respective conductors. A capacitor charging circuit, which is arranged on the same axis as a resistor. 7. The method according to claim 1, wherein
In the capacitor charging circuit described in the paragraph, the value Rcn of each of the resistors connected in parallel with each other
Is a value satisfying the following relational expression. Rcn ≧ √ (Lsn / CL) where Lsn: wiring inductance of each resistor connected in parallel CL: capacitance of load capacitor n: number of parallel resistors 8. A charging power supply for charging a load capacitor,
In a capacitor charging circuit comprising a charging resistor connected in series between a high-voltage output of the charging power supply and a load capacitor, the charging resistor includes at least one or more resistors connected in series to each other. A capacitor charging circuit, comprising: 9. The method according to claim 1, wherein
Wherein a coaxial cable is provided between the charging power source and the charging resistor, and the length L of the coaxial cable has a value satisfying the following relational expression. Capacitor charging circuit. L ≦ CL × (1−η) / Ccab1e where, CL: capacitance of load capacitor η: required specification value of energy efficiency of this capacitor charging circuit Ccab1e: capacitance per unit length of coaxial cable 10. The capacitor charging circuit according to claim 9, wherein the value Wrc of the total heat dissipation capacity of the charging resistor is a value satisfying the following relational expression. Wrc ≧ 0.5 × Ccab1e × L × Vout ² × f where Ccab1e: capacitance per unit length of coaxial cable L: length of coaxial cable Vout: charging voltage (= output voltage of charging power supply) f: load Number of charge / discharge cycles per second for capacitors 11. The capacitor charging circuit according to claim 1, wherein the charging power supply includes a DC power supply, a resonance inverter circuit including an inverter and a resonance capacitor, and the resonance power supply. A capacitor charging circuit using a resonance type converter circuit including an inverter circuit connected to a primary side of a transformer and a rectifier circuit connected to a secondary side of the transformer. 12. The capacitor charging circuit according to claim 1, wherein the charging power supply includes a DC power supply, a switch connected in series to a high voltage side of the DC power supply, and a reactor. A capacitor charging circuit characterized by using an LC resonance type circuit composed of a series circuit of a capacitor and a diode. 13. The capacitor charging circuit according to claim 1, wherein the charging power supply includes: a DC power supply; and a current-limiting resistor connected in series to a high voltage side of the DC power supply. A capacitor charging circuit characterized by using an RC charging type circuit comprising: