JP2002076072A - Test stage and probing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive, low deflection test stage and a probing device. SOLUTION: In test stage 100 in which a chuck 20 loading a specimen 1 to be tested can be moved freely along the z-axis direction, a supporting means of chuck 20 is constituted of three or more ball screws 42 comprising screw axes 43 supported to rotate freely so that the screw axes are in parallel to the z-axis direction of base board 45, and ball nuts 44 which move along the axes of screw threads with rotation of the screw axes, being practically unitized with chuck 20. Each screw axes 43 is rotated synchronously by timing pulley 46. Thereby, the deflection of loaded surface 20a of the chuck is dissolved, and the structure of the test stage is simplified and lightened.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection stage and a probe device, and more particularly, to short-circuiting or opening of an electrode pattern formed on a wafer, a glass substrate, a flexible substrate, or the like, or an electrode pattern of a semiconductor device such as an IC chip. The present invention relates to a probe device for measuring input / output characteristics of an IC chip, and an inspection stage used for the probe device.

[0002]

2. Description of the Related Art FIG. 7 shows a schematic configuration of a conventional inspection stage used in a probe apparatus of this kind. The inspection stage has a chuck 2 on which a mounting surface 2a for mounting an object 1 such as a wafer, a glass substrate, a flexible substrate, or the like is formed. The chuck 2 is provided on a θ stage 3 for rotating the chuck 2 in the θ direction. The θ stage 3 is disposed on a Z stage 4 for moving the chuck 2 in the Z axis direction. Further, the Z stage 4 is disposed on an XY stage 5 including an X stage 5x for moving the chuck 2 in the X-axis direction and a Y stage 5y for moving the chuck 2 in the Y-axis direction. ing.

On the other hand, a support plate 6 is provided above the chuck 2.
Is provided. On this support plate 6, a probe card 7 having probe needles 7a arranged to correspond to the arrangement of pads (electrodes) of a chip to be inspected (for example, an IC chip) formed on the subject 1 is provided. Have been.

In the probe apparatus having the inspection stage, for example, the subject 1 is reliably sucked and held on the mounting surface 2a of the chuck 2 by a vacuum device (not shown). In this state, the subject 1
After the above alignment is performed, the probe needle 7a of the probe card 7 and the probe needle 7a of the probe 1 are accurately aligned with the pad of the chip to be inspected (1st die) to be inspected first. Positioning with the first die is performed. Thereafter, the Z stage 4 and the XY stage 5 are driven based on an index corresponding to the chip size of the chip to be inspected of the subject 1. This allows
The subject 1 placed on the chuck 2 has X, Y, Z
The chips are sequentially moved in the axial direction, the pads of the chips to be tested come into contact with the probe needles 7a of the probe card 7, and the electrical characteristics of the chips to be tested of the sample 1 are probed by the test head 9 through the contact ring 8. You.

The Z stage 4 has chuck supporting means for movably supporting the chuck 2 along the Z-axis direction and chuck moving means for moving the chuck 2 along the Z-axis direction. ing. In the conventional Z stage 4, as the chuck supporting means, for example, as shown in FIG.
As shown in FIG. 1, a stem 12 composed of a movable shaft 10 for supporting the central portion of the chuck 2 via the θ stage 3 and a guide member 11 for slidably guiding the movable shaft 10 is used. ing.

In the conventional Z stage 4, a ball screw screwed to the movable shaft 10 of the stem 12 is used as a chuck moving means. That is, when the screw shaft 13 of the ball screw is rotated forward and reverse by the motor 14 via the drive system 15, the movable shaft 10 of the stem 12 slides along the guide hole 11 a of the guide member 11. Due to the sliding of the movable shaft 10, the chuck 2 is moved along the Z-axis direction via the θ stage 3.

[0007]

By the way, in order to accurately probe each of the chips to be inspected of the object 1 using the inspection stage, it is necessary to use pads for the chip to be inspected and the probe card. 7 probe needle 7
a must be surely contacted.

However, in the conventional inspection stage, the stem 12 having the above-described configuration is used as chuck supporting means of the Z stage 4. Therefore, when the pad of the chip under test of the subject 1 is brought into contact with the probe needle 7a of the probe card 7, the mounting surface 2a of the chuck 2 is inclined (deflection), and In some cases, poor contact between the pad of the chip to be inspected of the sample 1 and the probe needle 7a of the probe card 7 occurs.

That is, in order to smoothly slide the movable shaft 10 along the guide hole 11a of the guide member 11, the stem 12 slides on the outer peripheral surface of the movable shaft 10 and the movable shaft 10. It is necessary to provide a predetermined clearance c as shown in FIG. 15 between the guide member 11 that guides freely and the inner peripheral surface of the guide hole 11a.

Therefore, in the inspection stage using such a stem 12, the mounting surface 2a of the chuck 2 is pressed by the contact between the pad of the chip to be inspected of the subject 1 and the probe needle 7a. As a result, the movable shaft 10 of the stem 12 may be inclined due to the existence of the clearance c. Then, due to the inclination of the movable shaft 10 of the stem 12, the chuck 2 is inclined as shown by a broken line in FIG. 8, and the above-described reflection occurs on the mounting surface 2a.

For this reason, in the conventional test stage of this kind, the pad of the test chip of the test object 1 and the probe needle 7 of the probe card 7
a caused poor contact, and accurate probing could not be performed.

The above-mentioned deflection tends to be more remarkable due to the increase in the size of the chuck 2 and the increase in the number of pins of the probe card 7 due to the increase in the diameter of the subject 1. For example, the subject 1 at the time of probing per pin of the probe needle 7a of the probe card 7
Assuming that the contact pressure with respect to is 10 g weight, when the probe needle 7 a is a 1000-pin probe card 7, a large pressing force of 10 kg weight is applied to the mounting surface 2 a of the chuck 2 via the subject 1. become. In addition, the deflection tends to be more remarkable when the portion near the peripheral portion of the mounting surface of the chuck 2 is pressed, the bending moment of the movable shaft 10 increases.

Further, the stem 12 is required to have a higher precision and a larger size due to the increase in the size of the chuck 2 accompanying the increase in the diameter of the subject 1, so that there is a problem that the stem 12 becomes extremely expensive. Further, in order to reduce the deflection, for example, a conventional precision Z stage in which a plurality of the stems 12 are arranged has a large weight, so that a load when the Z stage is moved in the XY direction is increased. growing. Therefore, in order to realize rapid probing using such a precise and heavy Z stage, it is necessary to use a large and expensive XY stage capable of obtaining a large acceleration. There is a problem that leads to an increase in size and cost.

The present invention has been made in view of the above problems, and it is an object of the present invention to provide an inexpensive inspection stage and a probe apparatus with less deflection.

[0015]

In order to achieve the above object, according to the present invention, there is provided a chuck having a mounting surface for mounting a test object on which a number of test chips are arrayed. Chuck supporting means for movably supporting the chuck at least along the Z-axis direction; and a chuck supported by the chuck supporting means at least Z
An inspection stage having chuck moving means for moving the chuck along the axial direction, wherein the chuck supporting means has an axis parallel to the Z-axis direction with respect to a base plate arranged to face the chuck. A screw shaft rotatably supported as described above, and a ball that is substantially integrated with the chuck while being screwed to the screw shaft, and that moves along the axis of the screw shaft when the screw shaft rotates. Nuts,
Consisting of at least three ball screws consisting of
The chuck moving means has a rotation transmitting means for synchronously rotating each screw shaft of the ball screw.

In this inspection stage, the chuck is supported by the three or more ball screws without using a stem which is a source of deflection of the mounting surface of the chuck. This eliminates the occurrence of deflection on the mounting surface of the chuck. Further, since the need for the stem is eliminated, the configuration of the inspection stage is simplified and lightened.

According to a second aspect of the present invention, in the inspection stage of the first aspect, there is provided an urging means for urging each ball nut of the ball screw in a direction approaching the base plate. It is a feature.

In this inspection stage, the backlash generated between each screw shaft of the ball screw and each ball nut is absorbed by the action of the urging means. This eliminates the occurrence of deflection of the mounting surface of the chuck due to the backlash.

According to a third aspect of the present invention, in the inspection stage of the second aspect, a journal bearing for rotatably supporting a peripheral surface of each screw shaft of the ball screw and an end surface of each screw shaft are formed on the base plate. A thrust bearing for supporting a tapered groove-shaped center hole with a ball is provided.

In this inspection stage, the end faces of the screw shafts of the ball screws supported by the base plate are supported by thrust bearings. Therefore, an increase in the load between each screw shaft of the ball screw and the base plate due to the urging of each ball nut of the ball screw toward the base plate by the urging means is prevented. You. Further, the thrust bearing has an inexpensive and simple configuration including a tapered groove-shaped center hole formed on an end face of each screw shaft of the ball screw and a ball supporting the center hole.

According to a fourth aspect of the present invention, in the inspection stage of the first, second or third aspect, the movable member integrated with each ball nut of the ball screw and the movement of the movable member in directions other than the Z-axis direction are restricted. And a movement restricting means.

In this inspection stage, the movement restricting means restricts the movement of the movable member in directions other than the Z-axis direction. This prevents the chuck from moving in the XY direction when the chuck is moved in the XY direction. Here, the movement restricting means may be constituted by, for example, three sliders that guide the outer peripheral surface of the movable member along the Z-axis direction. The slider is a member that theoretically performs the same function as the above-described stem, but since it guides the outer peripheral surface of the movable member, it can be configured much more cheaply and simply than the stem. Further, since the occurrence of deflection on the mounting surface of the chuck is prevented by the respective ball screws, the clearance generated between the slider and the movable member does not cause the occurrence of the deflection. .

According to a fifth aspect of the present invention, in the inspection stage of the first, second, third, or fourth aspect, each of the screw shafts of the ball screw is connected to each of the chips to be inspected of the object placed on the mounting surface of the chuck. Are arranged on the base plate so that the axis is located outside the formation region of the base plate.

In this test stage, the axis of each screw shaft of the ball screw is located outside the region where each test chip of the test object mounted on the mounting surface of the chuck is formed. Therefore, the pressing force applied to the mounting surface of the chuck during probing is applied to a portion inside the position where the screw shafts of the ball screw are arranged. Accordingly, a load that lifts the other screw shaft from the base plate using the principle of lever with one screw shaft as a fulcrum is not applied to the mounting surface of the chuck. Is more reliably prevented from occurring.

The invention of claim 6 is the invention of claims 1, 2, 3, 4
Or, in the inspection stage of 5, the rotation transmission means,
It is characterized in that it is constituted by each rotating body individually screwed and attached to each screw shaft of the ball screw, and a rotation transmitting member for synchronously rotating each rotating body.

In this inspection stage, each rotating body individually attached to each screw shaft of the ball screw as the rotation transmitting means is attached by screwing to the screw shaft. By loosening the mounting screws, the respective screw shafts of the ball screw can be freely rotated individually without synchronization. Thereby, the positional relationship between each screw shaft of the ball screw and each ball nut can be individually adjusted, and the horizontality of the mounting surface of the chuck can be finely adjusted. Here, a timing pulley or a gear can be used as the rotating body, and a timing belt or a gear train can be used as the rotation transmitting member.

According to a seventh aspect of the present invention, there is provided a chuck having a mounting surface on which a plurality of chips to be inspected are arrayed and formed, and the chuck is movable at least along the Z-axis direction. An inspection stage having chuck supporting means for supporting the chuck, and chuck moving means for moving the chuck supported by the chuck supporting means at least along the Z-axis direction, and mounted on the chuck of the inspection stage. While moving the placed subject and the probe card disposed so as to face the mounting surface of the chuck at least in the X, Y, and Z-axis directions, the inspection of each test chip of the subject is performed. 3. The probe device according to claim 1, wherein the probe and the probe needle of the probe card are sequentially brought into contact with each other to probe each chip to be inspected of the subject. 3, 4, 5 or 6 inspection stage of is characterized in that use.

[0028] In this probe apparatus, the inspection stage having a configuration in which the chuck is supported by three or more ball screws is used without using a stem which is a source of the deflection of the mounting surface of the chuck. Probing of the chip to be inspected of the subject is performed. This allows
The occurrence of deflection on the mounting surface of the chuck is eliminated, and the pads of the chip to be inspected and the probe needles of the probe card can be reliably brought into contact with each other, so that good probing can be performed. Become. Further, since the configuration of the inspection stage is simplified and reduced in weight, even if the chuck becomes large due to the increase in the diameter of the subject, there is no need to use a large and expensive XY stage, and inexpensive probing is performed. It becomes possible to provide a device.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of an inspection stage in which the present invention is applied to a probe device will be described. 1 and 2 show a schematic configuration of an inspection stage 100 according to the present embodiment. It has a chuck 20 on which a mounting surface 20a for mounting a test object 1 such as a wafer, a glass substrate, a flexible substrate, etc., on which a large number of test chips are arrayed is formed. This chuck 20 has its mounting surface 2
The vacuum apparatus 21 is configured to securely adsorb and hold the subject 1 mounted on the mounting surface 20a on the mounting surface 20a. The chuck 20 is provided with a θ stage 30.
It is arranged above.

The θ of the inspection stage 100 according to the present embodiment
The stage 30 is composed of a cross roller bearing, and as shown in FIGS. 1 and 2, the chuck 20 is fixed to a rotating portion 31 of the cross roller bearing. The rotating portion 31 is configured to be able to rotate the chuck 20 by a predetermined angle (for example, ± 10 degrees) in the θ direction with respect to the fixing portion 32 of the cross roller bearing.

The θ stage 30 is disposed on a Z stage 40 for moving the chuck 20 in the Z axis direction. That is, the Z stage 40 has a movable plate 41 configured to be movable in the Z-axis direction, and the fixed portion 32 of the cross roller bearing as the θ stage 30 is fixed to the movable plate 41.

On the movable plate 41, a drive motor 33 of the θ stage 30 for rotating the chuck 20 in the θ direction is provided. The rotation of the drive motor 33 is controlled by a worm 34 attached to the drive shaft.
Worm gear 35 meshing with the worm 34
Is transmitted to The rotation of the worm gear 35 is
The power is transmitted to a drive gear 36 that extends coaxially with the worm 34 below the movable plate 41. This drive gear 3
6 is engaged with a θ gear 37 integrated with the rotating part 31 of the cross roller bearing. This allows
The rotation of the drive gear 36 is transmitted through the θ gear 37 to the θ gear.
The power is transmitted to a rotating portion 31 of a cross roller bearing as the stage 30, and the chuck 20 fixed to the rotating portion 31 is rotated.

Next, the inspection stage 10 according to the present embodiment
The configuration of the Z stage 40, which is a characteristic part of No. 0, will be described. The chuck supporting means of the Z stage 40 for movably supporting the chuck 20 along the Z-axis direction includes at least three or more (six in the illustrated example) ball screws.

Each ball screw 42 includes a screw shaft 43 and a ball nut 44. Each screw shaft 43 of each ball screw 42 is rotatably supported by a base plate 45 arranged to face the chuck 20 so that its axis is parallel to the Z-axis direction. On the other hand, each ball screw 42 and each ball nut 44 are disposed on the movable plate 41 which is substantially integrated with the chuck 20 via the θ stage 30 while being screwed to each screw shaft 43. ing.

A timing pulley 46 is provided on each screw shaft 43 of each ball screw 42.
When the stepping motor 47 is driven, these timing pulleys 46 drive the stepping motor 4.
7 are synchronously rotated by a drive pulley 48 attached to the drive shaft 7 and a timing belt 49 stretched over each of the timing pulleys 46. As a result, the respective screw shafts 43 of the respective ball screws 42 are synchronously rotated in the same direction, and the respective ball nuts 4 screwed to the respective screw shafts 43 are rotated.
4 moves up and down along the axis of each screw shaft 43 in FIG. Then, the chuck 20 is mounted on the movable plate 41.
And is moved along the Z-axis direction via the θ stage 30.

The stepping motor 47 is disposed on an auxiliary plate 50 fixed to the base plate 45 so that the screw shafts 43 pass therethrough. A tension roller 51 for resiliently absorbing the slack of the timing belt 49 is disposed on the back surface of the timing belt 49 in a resilient manner. The Z stage 40 includes an X stage for moving the chuck 20 in the X-axis direction and the Z stage 40, similarly to the Z stage 4 shown in FIG.
And a Y stage for moving the X in the Y-axis direction
It is arranged on a Y stage (not shown).

The inspection stage 100 according to the present embodiment
The chuck 20 is supported by using six ball screws 42 without using the stem 12 which is a source of deflection of the chuck mounting surface as in the conventional inspection stage shown in FIG. Have been. Therefore, in the inspection stage 100, there is no play of the sliding portion such as the clearance c of the stem 12, and the occurrence of the reflection on the mounting surface 20a of the chuck 20 is eliminated. In addition, since the above-described stem 12 is not required, the configuration of the inspection stage 100 is simplified and lightened.

Here, in the inspection stage 100, it is desirable to provide an urging means for urging each ball nut 44 of the ball screw 42 in a direction approaching the base plate 45. As such an urging means, for example, a contractible coil spring 52 bridged between the movable plate 41 and the base plate 45 can be used (see FIG. 1).

The coil spring 5 as such an urging means
By providing 2, the movable plate 41 is constantly attracted to the base plate 45 by the contraction force of the coil spring 52. Thereby, the ball screw 4
The backlash generated between the respective screw shafts 43 and the ball nuts 44 is absorbed, and the occurrence of the reflection on the mounting surface 20a of the chuck 20 due to the backlash is eliminated.

In the inspection stage 100, as shown in FIG. 3, a journal bearing 53 for rotatably supporting the peripheral surface of each screw shaft 43 of each of the ball screws 42.
And a thrust bearing 55 that supports a tapered groove-shaped center hole 43a formed on the end surface of each screw shaft 43 with a ball 54 (steel ball).
3 is configured to pivotally support the lower end.

Thus, each of the ball nuts 44 of the ball screw 42 is urged by the coil spring 52 in a direction of approaching the base plate 45, so that each screw shaft 43 of the ball screw 42 and the base plate 45 The load during the period can be prevented from increasing. The thrust bearing 5
5 is formed by the center hole 43a and the ball 54.
Inexpensive and simple configuration.

The inspection stage 100 is provided with movement restricting means for restricting the movement of the movable plate 41 in directions other than the Z-axis direction, as shown in FIGS. 3 configured to slide only in the direction
The sliders 56 are provided. This slider 56
The movable portion 56a is attached to the movable plate 41, and the fixed portion 56b is attached to the auxiliary plate 50.

In the inspection stage 100, the movable plate 41 is slid only in the direction along the Z axis by each slider 56 as the movement restricting means.
Movement of the movable plate 41 in directions other than the Z-axis direction is restricted. Thereby, when the chuck 20 is moved in the XY direction,
Shaking of the chuck 20 in the XY direction is prevented.

Each of the screw shafts of the ball screw is disposed on the base plate such that the axis is located outside the region where each test chip of the subject mounted on the mounting surface of the chuck is formed. It is characterized by having.

As shown in FIG. 5, the inspection stage 100 is configured such that the axis of each of the screw shafts 43 of the ball screw 42 is aligned with each of the specimens 1 on the mounting surface 20a of the chuck 20. It is configured to be located outside the region where the chip 1a is formed. Therefore, in the inspection stage 100, the pressing force on the mounting surface of the chuck 20 during probing is applied to a portion inside the position where the screw shafts 43 of the ball screws 42 are disposed. As a result, no load acts on the mounting surface 20a of the chuck 20 so that the other screw shaft is lifted from the base plate 45 by the lever principle with one screw shaft as a fulcrum. Of the mounting surface 20a can be more reliably prevented.

Further, in this inspection stage 100, as shown in FIG. 6, the timing pulley 46 attached to each screw shaft 43 of the ball screw 42
3 is attached by screwing with a lock screw 57. Therefore, in the inspection stage 100, by loosening the lock screw 57, the respective screw shafts 43 of the ball screws 42 can be freely rotated individually without synchronization. Thereby, the ball screw 4
2, the positional relationship between each screw shaft 43 and each ball nut 44 can be individually adjusted, and the horizontality of the mounting surface 20a of the chuck 20 can be finely adjusted.

In the probe apparatus equipped with the inspection stage 100 having the above-described configuration, the generation of the reflection on the mounting surface 20a of the chuck 20 is extremely small.
Therefore, the pads of the chip 1a to be inspected of the subject 1 and the probe needles 7a of the probe card 7 can be surely brought into contact with each other, and good probing can be performed. Further, since the configuration of the inspection stage 100 is simplified and reduced in weight, it is not necessary to use a large and expensive XY stage even if the chuck 20 is enlarged with the increase in the diameter of the subject 1. An inexpensive probing device.

[0048]

According to the first to sixth aspects of the present invention, since the chuck of the inspection stage is supported by three or more ball screws, the stem as a source of the deflection of the mounting surface of the chuck is provided. Becomes unnecessary. Therefore, by probing the chip to be inspected using the inspection stage, the pad of the chip to be inspected can be reliably brought into contact with the probe needle of the probe card, and good probing can be performed. It is possible to do. In addition, since the above-mentioned stem is not required, the configuration of the above-mentioned inspection stage is simplified and lightened, so that even if the chuck becomes large due to the increase in the diameter of the subject, a large and expensive XY stage is used. No need to
There is an excellent effect that an inexpensive inspection stage can be provided.

In particular, according to the second aspect of the present invention, the backlash generated between each screw shaft of the ball screw and each ball nut is absorbed by the action of the urging means.
There is an excellent effect that the occurrence of deflection on the mounting surface of the chuck due to the backlash can be eliminated.

According to the third aspect of the present invention, the end face of each of the screw shafts of the ball screw supported on the base plate supports the center hole of the tapered groove formed on the end face with a ball. It becomes the structure supported by the bearing. Accordingly, it is possible to prevent an increase in the load between each screw shaft of the ball screw and the base due to the urging of the chuck by the urging means. Further, since the thrust bearing is constituted by a tapered groove-shaped center hole formed on the end face of each screw shaft of the ball screw and a ball supporting the center hole, the thrust bearing is inexpensively and simply constructed. There is an excellent effect that it can be done.

According to the fourth aspect of the present invention, the movement of the movable member in directions other than the Z-axis direction is restricted by the movement restricting means that slides on the movable member integrated with each ball nut of the ball screw. Accordingly, there is an excellent effect that it is possible to prevent the chuck from moving in the XY direction when the chuck is moved in the XY direction.

According to the fifth aspect of the present invention, a load is applied to the mounting surface of the chuck so that one screw shaft is used as a fulcrum and the other screw shaft is lifted off the base plate by the leverage principle. There is no such effect, and there is an excellent effect that the occurrence of deflection on the mounting surface of the chuck can be more reliably prevented.

According to the sixth aspect of the present invention, since the respective screw shafts of the ball screw can be freely rotated individually without synchronization, the positions of the respective screw shafts of the ball screw and the respective ball nuts can be adjusted. There is an excellent effect that the relationship can be adjusted individually and the horizontality of the mounting surface of the chuck can be easily finely adjusted.

According to the seventh aspect of the present invention, the probing of the chip to be inspected is performed using the inspection stage in which the chuck is supported by three or more ball screws. And the probe needle of the probe card can be surely brought into contact with each other, and good probing can be performed. In addition, since the configuration of the inspection stage is simplified and reduced in weight, even if the chuck becomes large due to the increase in the diameter of the subject, there is no need to use a large and expensive XY stage, and an inexpensive probing device is used. There is an excellent effect that can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic side view showing a configuration of an inspection stage according to an embodiment of the present invention.

FIG. 2 is a schematic plan view showing a configuration of the inspection stage.

FIG. 3 is an enlarged sectional view of a main part showing a support structure of a screw shaft end of a ball screw as chuck support means in the inspection stage.

FIG. 4 is a schematic perspective view of a main part showing a configuration of a slider as a movement restricting means for restricting movement of the movable member integrated with the ball nut of the ball screw in a direction other than the Z-axis direction.

FIG. 5 is a schematic plan view of a main part for explaining a positional relationship between a formation area of each chip to be inspected of a subject mounted on a mounting surface of a chuck of the inspection stage and a screw shaft of the ball screw;

FIG. 6 is a schematic side view of a main part for describing a mounting structure of a screw shaft pulley as a rotating body for rotating the screw shaft of the ball screw to the screw shaft.

FIG. 7 is a schematic side view showing a configuration of an inspection stage in a conventional probe device.

FIG. 8 is a schematic sectional view showing a configuration of chuck supporting means used in the conventional inspection stage.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 object 1a chip to be inspected 5 XY stage 7 probe card 7a probe needle 20 chuck 20a chuck mounting surface 30 θ stage 33 θ stage drive motor 40 Z stage 41 movable plate 42 ball screw 43 screw shaft 43a center hole 44 ball nut 45 Base plate 46 Timing pulley 47 Stepping motor 48 Drive pulley 49 Timing belt 50 Auxiliary plate 51 Tension roller 52 Coil spring 53 Journal bearing 54 Ball 55 Thrust bearing 56 Slider 57 Lock screw

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G003 AA10 AG04 AG08 AG11 AG12 AG16 AH05 2G011 AC14 AE03 2G032 AE04 4M106 AA01 BA01 CA01 CA16 DD30 DJ04 DJ05 DJ06 DJ07 5F031 CA02 HA57 LA12 MA33

Claims (7)

[Claims] 1. A chuck having a mounting surface for mounting a test object on which a number of test chips are arrayed and formed, and a chuck for supporting the chuck so as to be movable at least along the Z-axis direction. A chuck supporting means, and a chuck moving means for moving the chuck supported by the chuck supporting means at least along the Z-axis direction, wherein the chuck supporting means is opposed to the chuck. A screw shaft rotatably supported so that the axis is parallel to the Z-axis direction with respect to the base plate disposed at the base plate, and substantially integrated with the chuck while being screwed to the screw shaft And a ball nut that moves along the axis of the screw shaft by rotation of the screw shaft. Inspection stage, characterized in that it has a rotation transmission means for rotating synchronously each screw shaft of the ball screw. 2. The inspection stage according to claim 1, further comprising an urging means for urging each ball nut of said ball screw in a direction approaching said base plate. . 3. The inspection stage according to claim 2, wherein the base plate has a journal bearing rotatably supporting the peripheral surface of each screw shaft of the ball screw, and a tapered groove-shaped center formed on an end surface of each screw shaft. An inspection stage comprising a thrust bearing that supports a hole with a ball. 4. The inspection stage according to claim 1, 2 or 3, wherein a movable member integrated with each ball nut of the ball screw, and a movement restricting means for restricting the movement of the movable member in directions other than the Z-axis direction. An inspection stage comprising: 5. The inspection stage according to claim 1, wherein each of the screw shafts of the ball screw is larger than a formation area of each of the chips to be inspected of the object mounted on the mounting surface of the chuck. An inspection stage, wherein the inspection stage is disposed on the base plate such that an axis is positioned outside. 6. The inspection stage according to claim 1, wherein each of the rotation transmitting means is individually screwed and attached to each of the screw shafts of the ball screw. An inspection stage comprising a rotation transmitting member for synchronously rotating a rotating body. 7. A chuck provided with a mounting surface for mounting a subject on which a large number of test chips are arrayed, and a chuck for movably supporting the chuck at least along the Z-axis direction. An inspection stage having chuck supporting means and chuck moving means for moving the chuck supported by the chuck supporting means at least along the Z-axis direction, and an object mounted on the chuck of the inspection stage And a probe card disposed so as to face the mounting surface of the chuck, at least in the X, Y, and Z-axis directions while relatively moving the pad and the probe card of each chip to be inspected of the subject. Contact the probe needle sequentially,
7. A probe device for probing each chip to be inspected of the subject, wherein the inspection stage according to claim 1, 2, 3, 4, 5, or 6 is used as the inspection stage.