JP2002071809A - Scanner, scan method and non-contact type measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a two-dimensionally scanning mechanism capable of simulta neously scanning a wide range of >=180 deg. in a horizontal direction and a wide range of >=90 deg. in a perpendicular direction. SOLUTION: A shaft 1 is rotated by a motor part and it is vertically operated by generating reciprocating movement by a linear motion generating means such as a voice coil motor or a linear motor. A beam 43 from a laser diode 41 is reflected by a reflector 20 to emit an emitted beam 44. A retroreflection beam 45 reflected by an object not shown in the figure is reflected by a reflector 21 and it is received by a photoelectric transducing element 47. An X-axis direction (the horizontal direction) is scanned by synchronizing the reflectors 20 and 21 and rotating the emitted beam 44 and the recurrent beam 45 by the shaft 1 and a Y-axis direction (the perpendicular direction) is scanned by the vertical reciprocating movement of the shaft 1. In such manner, a substantial scanning range can be scanned.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact measuring device such as a vehicle radar for detecting an object or the like in a non-contact manner and measuring a distance and a direction, and a scanning device and a scanning method used for the measuring device. More particularly, the present invention relates to a scanning device that performs a wide range of scanning in two-dimensional directions of horizontal and vertical.

[0002]

2. Description of the Related Art Conventionally, it has been proposed that this type of radar device is mounted on a vehicle and widely used for a vehicle periphery monitoring device, an inter-vehicle distance control device, and the like. Similar inventions of the present invention include (1) an apparatus equipped with a scanner for scanning a laser beam horizontally and vertically in a two-dimensional direction as disclosed in JP-A-8-313632. (2) On the other hand, as disclosed in Japanese Patent Application Laid-Open No. 8-122006, there is an apparatus that scans a laser beam in a relatively wide range only in the horizontal direction.

[0003]

However, as seen in the above (1), two mirrors having a rotation axis are arranged so that their rotation axes are orthogonal to each other, and an electromagnetic wave beam is incident from one direction. After that, in a scanner configuration having a function of transmitting the electromagnetic wave beam in a desired direction by being reflected by these two mirrors, it is impossible to scan a range of 180 ° or more even with an ideal configuration. In addition, since the second mirror actually has size restrictions, the practically scannable range is limited to several tens of degrees both horizontally and vertically.

When laser light is scanned by a reflecting mirror having an inclined angle at the rotating shaft end as shown in the above (2), a relatively wide range can be scanned in the horizontal direction. The vertical direction is a detectable area within the range of the divergence angle of the laser beam in the vertical direction, and practically has a limit of several degrees to several tens degrees.

[0005] The present invention has been made to solve the above-described problems. For example, as shown in FIG.
As in the conventional example, an apparatus that performs scanning in the horizontal direction only in a range of several tens of degrees, or as shown in FIG. 13, can scan in a relatively wide range in the horizontal direction but has a vertical direction of several degrees to tens of degrees. In a device having a detection range, an obstacle close to the own vehicle is in the range of the blind spot of the device itself, and the obstacle cannot be detected.

That is, an object of the present invention is to largely eliminate the blind spot of the apparatus itself, and to obtain a two-dimensional scanning apparatus capable of dramatically widening an electromagnetic wave scanning range from the conventional example. Further, a non-contact type measurement device using the two-dimensional scanning device is obtained. The scanning is performed in two dimensions (X
(Axial direction and Y-axis direction), and scanning is performed so that the radiation direction of the medium and the direction of receiving the medium reflected from the object are always in the same direction. An object of the present invention is to provide a two-dimensional scanning method with an improved N ratio.

[0007]

In order to radiate a medium such as an electromagnetic wave or an ultrasonic wave and receive a medium reflected from an object, the scanning apparatus according to the first aspect of the present invention determines a radiation direction and a reception direction of the medium. In the scanning device that scans within the range, while performing a primary scan in the X-axis direction based on the rotational movement of the motor,
A reciprocating motion is generated by using a linear motion generating means such as a voice coil motor or a linear motor. Based on the reciprocating motion, a secondary scan in a Y-axis direction substantially orthogonal to the X-axis direction is performed.
This enables dimensional scanning.

According to a second aspect of the present invention, in the scanning device of the first aspect, a single drive unit including a motor and a linear motion generating means is combined, and the drive unit controls one drive shaft by the rotation of the motor. The drive unit is configured to be rotated by a dynamic motion and to reciprocate the drive shaft in the axial direction by the linear motion generating means, and to perform two-dimensional scanning according to the operation of the drive shaft. .

According to a third aspect of the present invention, in the scanning device according to the second aspect, the stator side of the driving unit is provided with a motor coil and a linear motion generating coil on the stator side.
On the rotor side, a permanent magnet for a motor and a permanent magnet for generating a linear motion are arranged with a drive shaft as an axis.

A scanning device according to a fourth aspect of the present invention is the scanning device according to the second or third aspect, further comprising a buffer member for regulating a stroke of a reciprocating operation by the linear motion generating means.

According to a fifth aspect of the present invention, there is provided a scanning device according to the first to fourth aspects.
The scanning device according to any one of the above, further comprising means for detecting an angular velocity of the motor, and control means for performing feedback control of the motor in accordance with a comparison between the detected angular velocity and a preset reference value. is there.

According to a sixth aspect of the present invention, there is provided a scanning device according to the first to fifth aspects.
In the scanning device according to any one of the above, a means for detecting a motion displacement of the reciprocating motion by the linear motion generating means, and the linear motion generating means according to a comparison between the detected motion displacement and a preset reference value. Control means for performing feedback control.

A non-contact measuring device according to claim 7 is a medium generating means for generating a medium such as an electromagnetic wave or an ultrasonic wave, a first reflector for reflecting the generated medium and radiating the medium in a predetermined direction;
A second reflector for reflecting the medium in which the radiating medium is reflected back to the object and receiving the medium again reflected, receiving means for sending out a received signal, and transmitting the received signal to the object in accordance with the received signal; It is provided with arithmetic means for calculating the presence / absence, the distance to the object, and the like, and two-dimensional scanning means having a driving unit and a scanning unit, wherein the driving unit rotates one drive shaft by a rotation operation of a motor and A drive unit for causing the drive shaft to reciprocate in the axial direction by means of a linear motion generating means such as a voice coil motor or a linear motor; and the scanning unit performs the first and second reflectors based on the rotation of the drive shaft. Is a scanning unit that rotates in the X-axis direction and that rotates the first and second reflectors in the Y-axis direction substantially orthogonal to the X-axis direction based on the reciprocating motion of the drive shaft. is there.

According to an eighth aspect of the present invention, in the non-contact type measuring apparatus according to the seventh aspect, the scanning unit comprises a first
A reflector is supported at one end of the drive shaft, and a second reflector is supported at the other end of the drive shaft so as to be rotatable in a direction orthogonal to the drive shaft, and in synchronization with the rotation of the drive shaft. A rotating portion which is rotatably supported by the first and second reflectors, and the rotatable portion is a scanning portion which rotatably supports each of the supported position and the separated position of the first and second reflectors; The second reflector operates so as to scan in the X-axis direction in accordance with the rotation of the drive shaft, and rotates about the support portion of the rotation portion in accordance with the reciprocation of the drive shaft. The scanner operates to scan in the Y-axis direction to enable two-dimensional scanning.

According to a ninth aspect of the present invention, there is provided a non-contact type measuring apparatus according to the seventh or eighth aspect,
One of the first and second reflectors is used as the first and second combined reflectors, and a medium mirror such as a half mirror that reflects a part of the medium and transmits the other part. A member is provided so that the path of the generating medium incident on the dual-purpose reflector is substantially the same as the path of the receiving medium reflected by the dual-purpose reflector. The medium generating means and the receiving means are arranged via a transmitting member.

According to a tenth aspect of the present invention, in order to radiate a medium such as an electromagnetic wave or an ultrasonic wave and to receive a medium reflected from an object, the scanning method scans the radiation direction and the reception direction of the medium within a predetermined range. In the method, the predetermined range is set as a two-dimensional scanning range, scanning is performed in the X-axis direction and the Y-axis direction on both the emission side and the reception side, and the scanning direction on the emission side and the scanning direction on the reception side are substantially the same. Scanning method.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is a side sectional vertical view showing the internal structure of the two-dimensional scanning mechanism of the distance measuring apparatus of the present invention. An in-vehicle distance measuring apparatus equipped with this type of scanning mechanism detects an object mounted in a vehicle and existing in a blind spot space around the own vehicle. In FIG. 1, 1 is an axis for generating a two-dimensional scanning motion, 2 is a bush, 3 is a rotor or yoke, 4 is a voice coil motor (hereinafter referred to as VCM) for generating a linear reciprocating motion for scanning in the other direction, or Linear motor (hereinafter LM)
In this example, the permanent magnet is cylindrical and has an N pole on the outside and an S pole on the inside. Reference numeral 5 denotes a permanent magnet that constitutes a magnetic circuit of a motor that generates a rotational motion for scanning in the one direction. Reference numeral 6 denotes a bearing that supports the shaft 1 that performs rotation and linear reciprocating motion. Reference numeral 7 denotes a holder that supports the bearing 6. Motor or VCM (L
M) constitute the stator side.

Reference numeral 8 denotes a cover forming an outer shell, 9 denotes a case forming an outer shell, 10 denotes a bobbin of a coil that forms a magnetic circuit of a VCM (LM) that generates a linear reciprocating motion for scanning in the other direction, Reference numeral 11 denotes an annular (tubular) coil wound on the bobbin 10, 12 denotes an armature of an armature constituting a magnetic circuit of a motor for generating a rotational motion for scanning in the one direction, and 13 denotes a coil wound on the iron core 12. Coil, 14
Is a Hall element, 15 is a substrate on which the Hall element 14 is mounted,
16 is a substrate holder for fixing the substrate 15, 17 is the substrate, 1
8 is a rotation axis, 19 is a link, 20 is a reflecting mirror on the light transmitting side, 2
1 is a light-receiving-side reflecting mirror, 22 is a light-transmitting-side gimbal, 23 is a light-receiving-side gimbal, 24 is a bearing that supports a rotating shaft of 18, and 25 is a female screw that fixes the light-transmitting-side gimbal 22.
6 is a counter weight, 27 is a fiber insertion portion of a position detection sensor described later, 28 is a buffer member, and 29 is a lead wire.

FIG. 2 is a vertical sectional view showing the internal structure of the two-dimensional scanning mechanism of the distance measuring apparatus of the present invention, as viewed from the rear. FIG.
In the figure, reference numeral 30 denotes an axis serving as a rotation fulcrum of the light-transmitting-side reflecting mirror 20 and the light-receiving-side reflecting mirror 21; FIG. 3 shows a second embodiment of the distance measuring apparatus according to the present invention.
It is a vertical sectional view of the link part of a three-dimensional scanning mechanism. In FIG. 3, reference numeral 32 denotes an axis serving as one rotation fulcrum of the link 19;
Reference numeral 3 denotes an axis serving as the other rotation fulcrum of the link 19.

Next, the operation will be described with reference to FIG. Here, a laser device for a vehicle that measures a distance without contact will be described. In FIG. 4, reference numeral 41 denotes a laser diode which is a light source for generating laser light; 42, a lens for converging a light beam emitted from the laser diode to a predetermined spread angle; 43, a beam shaped to a desired spread angle; Is a beam reflected by the reflecting mirror 20 on the light transmitting side and emitted to the space, and 45 is a beam 4 reaching the obstacle
Reference numeral 4 denotes a part of the beam that is reflected on the surface of the obstacle object and is retroreflected. Reference numeral 46 denotes a light receiving lens that converges the retroreflected beam by desired optical characteristics after the light is reflected by the light receiving side reflecting mirror 21. Is a photoelectric conversion element disposed at the focal point of the light emitting element.

The time required for the light beam emitted from the laser diode 41 to be reflected by an obstacle located at a distance R and partially returned to the photoelectric conversion element 47 is represented by T.
Then, it is expressed as follows: R = C · T / 2 −−−−− (1) Here, C is the speed of light. Then, the time T of the equation (1) is measured by a measuring unit (not shown) that counts from the time when the laser diode 41 emits light to the time when the photoelectric conversion element 47 receives light.

At this time, the shaft 1 constitutes a movable body as a rigid body integral with the bush 2, the rotor 3, and the permanent magnet 5 as shown in FIG. 1, and an iron core 12 facing the permanent magnet 5 around the circumference. Coil 13 wound around this iron core 12
Generates a magnetic force that generates rotational motion. The magnetization of the permanent magnet 5 is a form in which a plurality of magnetic poles are radially repeated, and in this example, the magnetic poles are magnetized every 60 degrees. The corresponding amateur iron core 12 (not shown) has a shape such that magnetic poles are generated every 40 degrees. Nine iron cores are arranged radially, and a coil 13 is wound around the core. It constitutes a three-phase armature wound on an iron core every 120 degrees.

Further, Hall elements 14 for detecting the rotational position of the permanent magnet 5 of the movable portion are arranged radially at three locations at intervals of 40 degrees in such a manner as to face the permanent magnet 5 in the circumferential direction. From the magnetic pattern output from the element 14,
A so-called DC motor that converts the iron core 12 into an electromagnet so as to always maintain a positional relationship in which an electromagnetic force for attracting or repelling the permanent magnet 5 is generated by performing sequence control for switching the timing of energizing the three-phase coils 13 is provided. The brushless DC motor is configured to detect the rotation speed of the rotor 3 to be described later, and to perform feedback control so as to always maintain a constant speed by comparison with a preset reference speed signal.

The shaft 1 that performs the rotational movement in this manner is supported by the bearing 6 and rotates the gimbals 22 and 23 and the reflecting mirrors 20 and 21 fixed to both ends of the shaft 1.
In this rotation state, a pulse beam of the laser beam from the laser diode 41 is repeatedly emitted at, for example, a predetermined interval, so that the laser beam propagates while being scanned radially around the optical path in the space of the radiation beam 44 about the axis 1. . At this time, by setting the emission time of the laser beam and the angular velocity of the axis 1 to desired states, the angular resolution of scanning by the rotational movement is determined.

In FIG. 4, the reflection mirrors 20, 2
1, a link 19 sharing the rotation fulcrum is provided with the other rotation fulcrum inside the shaft 18, and the rotational movement of the shaft 1 is extended to the gimbals 22, 23 and the reflecting mirrors 20, 21 and to the link 19 and the shaft 18. Rotate together as one.

Next, the operation of scanning in the direction orthogonal to the scanning in the rotation direction will be described with reference to FIGS. VCM
When current flows in one direction of the (LM) coil 11, the current I flowing through the winding conductor having the length L is changed by the permanent magnet 4 and the yoke 3.
Is perpendicular to the air gap flux B (θ = 9).
0 °), and an axial force F of the shaft 1 is generated,
It is expressed by the following equation. F = B · I · L sin θ (2) As one example, B = 0.5 [T] I = 0.1 [A] L = 16 [m] θ = 90 ° In the case of the set value of, a thrust of about 0.8 [N] can be obtained ignoring the influence of friction and temperature of the movable part.

When a thrust is obtained, the permanent magnet 4 which is a movable part
The yoke 3 and the yoke 3 generate a linear motion that displaces the shaft 1 which is rigid by the boss 2. Gimbales 22 and 23 are fixed to both ends of the displaced shaft 1 and displaced simultaneously,
The reflecting mirrors 20 and 21 rotatably mounted on the gimbals 22 and 23 deflect so as to incline at a set angle while operation is restricted by both fulcrums of the link 19.

By reflecting the laser beam on the deflected reflecting mirrors 20 and 21, the laser beam can be propagated upward in the plane of the paper like the radiation beam 44 and the retroreflected beam 45 in FIG. At this time, if the axis 1 is rotated as described above, the laser beam is radiated and received in a conical shape around the axis 1 while maintaining the angles in the directions of the radiation beam 44 and the retroreflected beam 45 in FIG. can do.

Further, by providing a sensor for detecting the position of the yoke 3, which will be described later, and performing feedback control based on this position signal, it is possible to arbitrarily set the direction in which the laser light is emitted. FIG. 6 illustrates the deflection direction of the laser beam when a current is applied in the other direction of the coil 11 of the VCM (LM), and shows a state in which the laser beam is scanned and propagated downward with respect to the paper surface. ing.

FIG. 7 illustrates the configuration of a sensor for detecting the rotational speed of the rotor or yoke 3 and the position of the rotor or yoke 3 in the axial direction of the shaft 1 as well. , 51 are the light receiving elements P
D and 52 are fibers for guiding a light emitting beam, 53 is a fiber for guiding a light receiving beam, 54 is an irradiation angle of the light emitting beam,
Reference numeral 5 denotes a viewing angle of the received light, which receives a part of the diffused light of the light applied to the end face of the rotor or the yoke 3, and determines the rotation reference position of the rotor or the yoke 3 from the change in the received light amount, and at the same time, the distance d from the received light amount. Is measured.

In order to detect the rotation reference position of the rotor or the yoke 3, the circular end face of the rotor or the yoke 3 is coated with a fan-shaped black thin film or painted in a relatively narrow range to suppress light reflection. Thus, a difference in the amount of reflected light from other portions can be generated. After the difference is photoelectrically converted by the light receiving element 51 into a signal component,
This signal component is led to a signal processing circuit having a relatively high impedance (not shown), and the time at the center of the change width of the signal component can be detected by processing with a differentiating circuit or the like. The time error is counted by comparing the reference time recorded in advance with the calculation means (not shown), and the amount of time error is used as a control amount to perform feedback control to determine the current to be supplied to the motor coil 13. Thus, the angular velocity of the rotational movement of the rotor or yoke 3 is arbitrarily controlled.
The coils 13 and 11 are controlled by feedback control so as to maintain mutual synchronization.

Further, in a circular end surface of the rotor or the yoke 3, a relatively thin area of a fan-shaped black thin film or a region where painting is not performed in a relatively wide range, or a surface state in which relatively strong reflection of light can be obtained. By forming
After the reflected light obtained from this is photoelectrically converted by the light receiving element 51 into a signal component, the signal component is led to a signal processing circuit having a relatively low impedance (not shown).
Accurately measuring the distance d between the end faces of the rotor or yoke 3 by digitally converting the intensity of the reflected light amount and comparing the received light intensity corresponding to an arbitrary distance d preset in a storage means (not shown). The distance d between the end faces of the rotor or the yoke 3 is feedback-controlled to an arbitrary position in a state synchronized with the rotation by the motor.

By performing feedback control of the operation of the motor and the VCM (LM) as described above, and by the structure of the above-described mechanism and optical path, two-dimensional scanning in which the laser beam is directed in one direction and a direction substantially orthogonal thereto. Can be performed in synchronization with each other.

Next, the scanning range and the scanning method will be described. FIG. 8 is a diagram showing how the scanning range is scanned. The motor rotates 360 degrees (in the X-axis direction), and the reflecting mirrors 20 and 21 are also rotated in the X-axis direction. The measurement area is 270 degrees, and the remaining 90 degrees (270 degrees to 360 degrees)
Degree) is an area where the VCM is displaced in the Y-axis direction and moves to the next scanning position. In this figure, the VCM is displaced five times in the Y-axis direction to complete one two-dimensional scan. Further, the scanning on the radiation side and the scanning on the receiving side both scan substantially the same scanning location. The beam is a fan (fan-shaped) beam of about 3 to 10 degrees, but may be a parallel beam (pencil beam).

Next, a description will be given of how high resolution can be obtained when scanning is performed by the two-dimensional scanning mechanism. FIG. 9 and FIG. 10 are timing diagrams of signal waveforms in the explanatory diagram.
First, the resolution in the X-axis direction (270 degrees) in FIG. 9 will be described. The VCM shown in FIG. 9A is obtained by the position sensor shown in FIG.
(Rotor) position is detected. The output waveform is differentiated as in (b), a zero-cross is detected as in (c), and a charge / discharge waveform is generated as in (d) using a zero-cross signal (motor rotation period T) as a trigger. ,
As shown in (e), a reset signal is generated at 270 degrees ((3/4) .T). As shown in (f), sampling and AD conversion are performed until the charge / discharge waveform is reset.

Assuming that T = 25 × 10 ⁻³ (s), the rotation angle resolution Rm is 270 degrees · 20 × 10 ⁻⁶ / ｛(3 /
4) · T｝ = 0.288 degrees AD resolution RADC = 270 degrees / (effective division number 900) =
0.3 degrees Rm and RADC are almost equal, and therefore, the resolution of rotation angle detection is 0.3 degrees depending on the resolution of the AD converter. Therefore, the minimum angular resolution can be up to 0.3 degrees, and high resolution can be obtained.

Next, the resolution in the Y-axis direction (90 degrees) in FIG. 10 will be described. Since the waveforms from (a) to (e) are the same as in FIG. 9, the description is omitted. However, since the operation time of the VCM is a time corresponding to 90 degrees, sampling as shown in (f) is performed and AD conversion is performed.

Assuming that T = 25 × 10 ⁻³ (s), the rotation angle resolution Rm = 90 degrees · 20 × 10 ⁻⁶ / ｛(1 /
4) · T｝ = 0.288 degrees AD resolution RADC = 90 degrees / (effective division number 900) =
Therefore, the resolution of the rotation angle detection is about 0.3 degree depending on the sampling period of the AD converter.

Therefore, the minimum angular resolution can be up to 0.3 degrees. However, in this case, since the fan beam having a predetermined divergence angle is scanned in the direction of 90 degrees, the divergence of the fan beam is actually increased. The angle depends on the resolution.
The divergence angle can be arbitrarily determined from the focal length of the lens and the dimensions of the light source, and is practically about 3 to 10 degrees. However, in the case of a pencil beam or the like, the minimum resolution is about 0.1 mm.
It becomes possible three times.

As described above, according to the two-dimensional scanning mechanism of the first embodiment of the present invention, while scanning over a wide range of about 0 ° to 270 ° in the X-axis direction, the two-dimensional scanning mechanism simultaneously scans 90 ° in the orthogonal Y-axis direction. Scanning over a wide range of degrees is possible. In addition, since the scanning direction of the emitted beam and the scanning direction of the received beam always scan in substantially the same direction, the receiving sensitivity increases, and S
/ N ratio can be improved.

By mounting the two-dimensional scanning mechanism of the present invention on the non-contact measuring device, the above-described two-dimensional scanning over a wide range becomes possible, and the angular resolution in the direction of the obstacle is X.
Since the axial direction can be realized at about 3 to 10 degrees (min 0.3 degree) and the orthogonal Y-axis direction can be realized at about 1 degree or less (min 0.3 degree), obstacles existing at blind spots around the own vehicle especially at close distances Position can be accurately measured, and a device for determining whether or not the vehicle runs or passes can be realized.

Embodiment 2 FIG. 11 shows a second embodiment of the present invention, in which 60 is a laser light source, 61 is a half mirror, 62 is a lens, 63 is a scanning mirror, 64 is a light receiving element, and the scanning mirror 63 is for transmitting and receiving light. Both laser beams are reflected to constitute only one surface.

The laser light emitted from the laser light source 60 passes through the half mirror 61 and is shaped into a beam having a desired spread angle by the lens 62. Then, the two-dimensional scanning operation is performed according to the same principle as described above. Is reflected by the scanning mirror 63 that generates The object is irradiated with the laser beam emitted to the space, and a part of the retroreflected light is further
After being reflected by the lens 63.

The retroreflective laser light reflected by the half mirror disposed in the space of the convergence process forms an image at the position of the light receiving element 64 as a focal point.

Here, the laser light source 60 and the half mirror 6
When the lens 1, the lens 62, and the light receiving element 64 are formed as an integrated module, the scanning mirror can transmit and receive light at the same time, and the size of the apparatus can be reduced.

Embodiment 3 In the above embodiment, an example of the vehicle laser device equipped with the two-dimensional scanning mechanism has been described. This is an example of object detection in the air, but the two-dimensional scanning mechanism can also be widely used for detecting fish schools in the water other than the air, surveying the sea floor and underwater, searching in the ground, etc. It can be used for liquids and powders.

In the case of these various uses, three directions are required in the X-axis direction.
In some cases, scanning at 60 degrees (rotational scanning) is required. In this case, the scanning direction in the Y-axis direction is shifted little by little while scanning in the X-axis direction like scanning on a television screen, and scanning for one screen is completed. And the next one rotation or n rotations (360 degrees x n)
In this case, the scanning point on the Y axis may be returned to the initial position. This is the number of magnetic poles of the control circuit and motor, motor and VMC
It can be easily realized by changing the design in consideration of the frequency of the driving power supply.

The scanning in the X-axis direction may be made slower while the scanning in the Y-axis direction is repeated earlier.

The scanning range in the Y-axis direction is shown in FIGS.
The radiation beam 44 and the retroreflected beam 45 as shown in FIG.
Is about 90 degrees, the position of an axis 30 (FIG. 2) serving as an axis for rotating the reflecting mirrors 20 and 21 and a link 19 and a gimbal 22 serving as an action point for rotating the reflecting mirrors 20 and 21 are shown. , 23 and the position of the axis center, a scanning range of 90 degrees or more is possible. In this case, when the radiation beam 44 and the retroreflected beam 45 are obstructed by the main body of the scanning mechanism as shown in FIGS. 5 and 6, the axis 1 is lengthened and the positions of the reflecting mirrors 20 and 21 are moved up and down. What should I do? A shaft 3 serving as an axis for rotating the reflecting mirrors 20 and 21
The position of 0 (FIG. 2) may be moved to the position on the right side of FIGS. For this movement, not only the reflecting mirrors 20 and 21 but also the mechanisms of the gimbals 22 and 23 and the link 19 may be moved.

[0050]

As described above, according to the two-dimensional scanning apparatus of the present invention, a wide range of scanning from 0 ° to 360 ° in the X-axis direction is performed, and also 90 ° or more in the Y-axis direction. A wide range of scanning becomes possible.

According to the non-contact measuring device of the present invention, a wide range of scanning can be performed by mounting the two-dimensional scanning device of the present invention.

Further, according to the two-dimensional scanning method of the present invention, it is possible to perform wide-range scanning similar to the two-dimensional scanning mechanism.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing the inside of a two-dimensional scanning mechanism according to a first embodiment of the present invention.

FIG. 2 is a side sectional view showing the inside of the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 3 is a sectional view of a link portion of the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 4 is a cross-sectional front view of the measuring device equipped with the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 5 is a state diagram illustrating two-dimensional scanning (at the time of upward scanning) of the measuring device equipped with the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 6 is a state diagram illustrating two-dimensional scanning (during downward scanning) of the measuring device equipped with the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 7 is a front sectional view showing a configuration of a position sensor of the two-dimensional scanning mechanism according to the first embodiment of the present invention.

FIG. 8 is a diagram illustrating a two-dimensional scanning range and a scanning method according to the first embodiment of the present invention.

FIG. 9 is a time chart of waveforms of respective parts for explaining the resolution of scanning in the X-axis direction according to the first embodiment of the present invention.

FIG. 10 is a time chart of waveforms of respective parts for explaining the resolution of scanning in the Y-axis direction according to the first embodiment of the present invention.

FIG. 11 is a front sectional view according to a second embodiment of the present invention.

FIG. 12 is a top view showing a detectable range of a conventional example.

FIG. 13 is a side view showing a detectable range of a conventional example.

[Explanation of symbols]

1 shaft (drive shaft) 2 bush 3 rotor / yoke 4 VCM (L
M) Permanent magnet 5 Motor permanent magnet 6 Bearing 7 Holder 8 Cover 9 Case 10 VCM (L
M) Bobbin 11 VCM (LM) coil 12 Motor armature core 13 Motor armature coil 14 Light receiving circuit board 15 Board (Hall element) 16 Board holder 17 Board (lead wire) 18 Rotation axis 19 Link 20 Reflector mirror (Send) Light) 21 Reflector (receiver) 22 Gimbal (transmitter) 23 Gimbal (receiver) 24 Bearing (rotary axis) 25 Female screw 26 Counterweight 27 Fiber insertion part 28 Buffer member 29 Lead wire 30 Axis (transmitter / receiver reflector) 31 bearing (sending / receiving reflecting mirror) 31 axis (link-shaft 32) 33 axis (link-reflecting mirror) 41 laser diode 42 lens 43 beam 44 radiation beam 45 retroreflected beam 46 light receiving lens 47 photoelectric conversion element 50 light emitting element LED 51 Light receiving element PD 52 Fiber (Emission) 53 fiber (light receiving) 54 emitting the beam irradiation angle 55 receiving the viewing angle 56 displaced 60 laser light source 61 half mirror 62 lens 63 scan mirror 64 light-receiving element

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B60R 21/00 621 B60R 21/00 622B 5H605 622 622C 5H607 622A 5H621 624B 5H633 624 624D 5J070 628E 628E / 03 N G01S 7/03 7/48 A 7/48 13/93 Z 13/93 G02B 26/10 C G02B 26/10 H02K 5/04 H02K 5/04 7/14 Z 7/14 16/00 16 / 00 21/22 M 21/22 29/10 29/10 33/16 A 33/16 H02P 7/67 Z H02P 7/67 G01B 11/00 B // G01B 11/00 G01C 3/06 Z G01C 3/06 G01S 17/88 A F term (reference) 2F065 AA04 AA06 BB05 CC11 DD00 FF12 FF16 FF32 GG06 GG07 HH04 JJ01 JJ18 LL00 LL12 LL62 MM16 MM26 MM28 PP22 QQ30 UU03 UU06 2F112 AD01 BA03 CA05 DA15 DA32 GA10 2H045 AA00 AA53 AB04 AB44 BA12 DA02 5H019 AA07 BB08 BB12 CC04 CC05 DD01 FF01 5H572 AA20 BB07 BB10 BB10 DD05 DD09 DD10 EE01 EE04 BB01 BB01 BB01 BB07 CC05 CC08 CC09 CC10 DD05 DD09 EA06 EA07 EB06 EB10 5H607 AA12 BB07 BB09 BB11 BB14 BB20 BB21 BB23 CC01 CC03 CC05 CC07 CC09 DD01 DD02 FF12 HH08 5H621 BB01 BB02 BB07 BB10 GA16 JH15 GG03 BB01 GG10 JB05 5J070 AA14 AB01 AC02 AC13 AD01 AE01 AF03 AK01 AK30 5J084 AA01 AB01 AC02 AD01 BA04 BA14 BA16 BA36 BA50 BB24 BB31

Claims (10)

[Claims] 1. A scanning device that emits a medium such as an electromagnetic wave or an ultrasonic wave and scans a radiation direction and a reception direction of the medium within a predetermined range in order to receive a medium reflected from an object. A primary scan in the X-axis direction is performed based on the motion, and a reciprocating motion is generated using a linear motion generating means such as a voice coil motor or a linear motor. Based on the reciprocating motion, Y is substantially orthogonal to the X-axis direction. A scanning device, wherein secondary scanning in the axial direction is performed to enable two-dimensional scanning. 2. The scanning device according to claim 1, wherein the motor and the linear motion generating means are combined into one drive unit, and the drive unit rotates one drive shaft by the rotational motion of the motor. A drive unit for causing the drive shaft to reciprocate in the axial direction of the drive shaft by the linear motion generating means, and performing two-dimensional scanning according to the operation of the drive shaft. 3. A scanning device according to claim 2, wherein a motor coil and a linear motion generating coil are arranged on the stator side of the driving unit, and the motor side is a permanent magnet for the motor with the driving shaft as an axis. A scanning device comprising a magnet and a permanent magnet for generating linear motion arranged. 4. The scanning device according to claim 2, further comprising a buffer member for regulating a stroke of a reciprocating operation by the linear motion generating means. 5. A scanning device according to claim 1, wherein said means for detecting an angular velocity of said motor is fed back in response to a comparison between said detected angular velocity and a preset reference value. A scanning device, comprising: a control unit for controlling. 6. The scanning device according to claim 1, wherein said means for detecting a movement displacement of the reciprocating movement by said linear movement generating means comprises: Control means for feedback-controlling the linear motion generating means in accordance with the comparison. 7. A medium generating means for generating a medium such as an electromagnetic wave or an ultrasonic wave, a first reflector for reflecting the generated medium and radiating the medium in a predetermined direction, and the radiating medium is reflected back to the object and returned. A second reflector that reflects the medium again, a receiving unit that receives the reflected medium again, and sends out a reception signal, and calculates the presence or absence of the object, the distance to the object, and the like according to the reception signal Operating means, a two-dimensional scanning means having a driving unit and a scanning unit, wherein the driving unit rotates one driving shaft by a rotating operation of a motor, and drives the driving shaft by a voice coil motor, a linear motor, etc. A driving unit for reciprocating in the axial direction by a linear motion generating means, wherein the scanning unit rotates the first and second reflectors in the X-axis direction based on the rotation of the driving shaft, and Based on the reciprocating motion of the shaft, -A non-contact type measuring device, wherein the second reflector is a scanning unit which rotates in the Y-axis direction substantially orthogonal to the X-axis direction. 8. The non-contact measurement device according to claim 7, wherein the scanning unit includes the first reflector at one end of the drive shaft and the second reflector at the one end of the drive shaft.
The reflector is supported at the other end of the drive shaft so as to be rotatable in a direction perpendicular to the drive shaft, and a rotating portion is provided which rotates in synchronization with the rotation of the drive shaft. A scanning unit that rotatably supports the supported position and the separated position of the first and second reflectors in the first and second reflectors;
The reflector operates to scan in the X-axis direction in accordance with the turning operation of the drive shaft, and turns around the support portion of the turning portion in response to the reciprocating operation of the drive shaft to Y.
A non-contact measurement device that operates to scan in an axial direction and enables two-dimensional scanning. 9. The non-contact type measuring device according to claim 7, wherein one of the first and second reflectors is used as a first / second reflector, and A medium reflecting / transmitting member such as a half mirror that partially reflects and transmits the other part is provided, and a path of a generating medium incident on the dual-purpose reflector and a receiving medium reflected by the dual-purpose reflector are provided. A non-contact type measuring device, wherein the passage is substantially the same as the passage, and a medium generating unit and a receiving unit are arranged on the passage via the medium reflection / transmission member. 10. radiating a medium such as an electromagnetic wave or an ultrasonic wave;
In order to receive the medium reflected from the object, in a scanning method of scanning the radiation direction and the reception direction of the medium within a predetermined range, the predetermined range is a two-dimensional scanning range, and both the radiation side and the reception side are in the X-axis direction. A scanning method in which scanning is performed in the Y-axis direction and the scanning direction on the radiation side and the scanning direction on the reception side are substantially the same.