JP2002071347A - Surface property measuring apparatus and its measured value correcting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a surface property measuring apparatus, which is small-sized and light- weight and has high measurement precision and yet a large-sized body to be measured can be measured, and to provide its measured value correcting method. SOLUTION: This surface property measuring apparatus is constituted, by providing a horizontal X-axial guide and a slider which can move along the X-axis guide in an upward/ downward movable base and fitting a displacement detector, which comes into contact with the top surface of the body to be measured to the slider, and is equipped with a V-axial detector 13 which detects the height of the upward/downward movable base, a displacement detector 27 which detects Z-axial fine displacement of the surface of the body to be measured, an X-axial detector 74 which detects the X-directional displacement quantity of the center of gravity of the slider, and a controller CPU which inputs the output signals from those detectors, calculates the bending displacement quantity of the X-axial guide in the X-axial direction at the height of the X-axial guide from the height signal from the V-axial detector 13 and the displacement quantity signal from the X-axial detector 74, and regards the value obtained by subtracting the bending displacement quantity from the X-directional displacement quantity as the X-axial displacement at the measurement time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface roughness measuring instrument for measuring the surface roughness and waviness of an object to be measured, a roundness measuring instrument for measuring the roundness and cylindricity of an object to be measured, A shape measuring machine that measures three-dimensional surface shape, a three-dimensional measuring machine,
The present invention relates to a surface texture measuring device such as an image measuring device, and particularly to a large-sized surface texture measuring device or a high-accuracy surface texture measuring device capable of measuring an object to be measured having a large dimension.

[0002]

2. Description of the Related Art As is well known, in a surface texture measuring device for measuring the surface roughness, undulation, roundness, two-dimensional or three-dimensional shape and surface roughness of an object to be measured, rigidity is provided on a measuring device base. A vertical X-axis guide and a slider that can move along the X-axis guide are provided on a vertically movable table that supports a vertical V-axis column having a large vertical axis, and that is vertically movably supported with respect to the V-axis column. A micro detector that contacts the surface of the object is attached to the slider.

[0003]

In recent years, demands for precision processing of processed products have led to a demand for a large-sized surface texture measuring device capable of measuring a large-sized object to be measured or a highly accurate surface texture measuring device. However, when the surface texture measuring device is simply made large or high in accuracy, if the measurement accuracy of the same level as that of the small surface texture measuring device or even higher accuracy is to be obtained, the V-axis column, X There is a problem that the rigidity of the shaft guide and the slider must be sufficiently enhanced.

In other words, a large surface texture measuring instrument or a high-precision surface texture measuring instrument capable of measuring a large-sized object to be measured is caused by an increase in the section modulus of a V-axis column, an X-axis guide, and a slider, which is not suitable for deformation. The weight of the entire measuring instrument was abnormally heavy, and it was difficult to achieve a practical measuring instrument.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a small-sized and light-weight measuring device capable of measuring a large-sized object in view of the problems of a large-sized surface texture measuring device and a high-precision surface texture measuring device as described above. An object of the present invention is to obtain a highly accurate surface texture measuring device and a method for correcting the measured value.

[0006]

To achieve the above object, the present invention provides a column standing on a measuring machine base,
A vertically movable table supported to be vertically movable with respect to the column, a V-axis detector for detecting an amount of vertical displacement of the vertically movable table with respect to the column, and an X-axis guide horizontally provided on the vertically movable table A slider having a Z-axis detector guided along the X-axis guide and detecting a surface property of the object to be measured; an X-axis detector for measuring a displacement of the slider with respect to the X-axis guide; X axis detector and Z
A control device for correcting a detection result of at least one of the axis detectors, wherein the control device inputs an output of the V-axis detector, and moves the up-down movable from a base of the column. Height calculating means for calculating the height of the table to a reference position, and input of the output of the X-axis detector;
Horizontal displacement calculating means for calculating the horizontal displacement from the reference position of the shaft guide to the position of the center of gravity of the slider; and inputting the outputs of the height calculating means and the horizontal displacement calculating means to perform column deformation. Error amount calculating means for calculating at least one error amount in the X-axis direction and the Z-axis direction at the reference position of the upper and lower movable table, and the X-axis detector and the Z-axis detection are provided by the output of the error amount calculating means. Error amount correction means for correcting at least one detection result of the detector,
And a control device including:

According to the present invention, the deformation (falling) of the V-axis column is calculated based on the height of the slider and the position in the X-axis direction, and based on the calculation result, at least one of the X-axis detector and the Z-axis detector is detected. Can be corrected, so that highly accurate measurement can be performed. Further, according to the present invention, the surface texture measuring device further includes a temperature detector near at least one of the X-axis detector, the Z-axis detector, and the device under test, and the control device includes the temperature detector Temperature error coefficient calculating means for obtaining a temperature error coefficient from the temperature detection output of the X-axis detector or the Z-axis detector in which the temperature detector is installed and the temperature characteristic specific to each of the device under test. The output of the temperature error coefficient calculating means,
It is preferable that the apparatus further includes an axis detector, the Z-axis detector, and a temperature error correction unit that corrects at least one detection result of the device under test.

According to the present invention, since the temperatures of the X-axis detector, the Z-axis detector and the object to be measured are individually detected and the temperature error can be corrected by the respective temperature coefficients, the measuring device is not necessarily installed in the constant temperature room. High accuracy measurement is possible without installation. Further, in the present invention, it is preferable that a reference position of the vertical movable base is a position of a center of gravity of the slider. According to the present invention, determination of the reference position is easy, and error correction is easy. Further, according to the present invention, the reference position of the vertical movable table is
It is preferable that the slider be a contact point of the Z-axis detector with an object to be measured. According to the present invention, an error in the stylus tip position of the Z-axis detector can be calculated, so that more accurate correction can be performed.

Further, according to the present invention, the error amount calculating means includes:
Further, based on the horizontal length from the position of the center of gravity of the slider to the tip of the Z-axis detector, an error amount in the X-axis direction and the Z-axis direction at the reference position of the vertical movable table due to column deformation is calculated. Is preferred. According to the present invention, the error can be corrected in accordance with the extension length of the Z-axis detector, so that a more accurate correction can be performed. Further, according to the present invention, the surface texture measuring device further includes at least one structure temperature detector in the vicinity of the structure of the surface texture measuring device, and the control device is configured to detect the temperature of the structure temperature detecting detector. A structure error amount calculating means for calculating at least one error amount in the X-axis direction, the Z-axis direction, and the V-axis direction at a reference position of the vertical movable table from the output and the deformation amount of the structure due to temperature; It is preferable that the apparatus further includes a structure error amount correcting unit that corrects at least one detection result of the X-axis detector, the Z-axis detector, and the V-axis detector based on an output of the structure error amount calculating unit. .
According to the present invention, since the deformation of the structure of the measuring device due to the temperature can be corrected, more accurate measurement can be performed.

Further, according to the present invention, a column erected on a measuring instrument base, a vertically movable table supported to be vertically movable with respect to the column, and a vertical displacement of the vertically movable table with respect to the column are detected. A V-axis detector, an X-axis guide horizontally provided on the vertically movable table, and a slider having a Z-axis detector guided along the X-axis guide and detecting a surface property of the measured object; An X-axis detector for measuring an amount of displacement of the slider with respect to the X-axis guide, wherein the height from the base of the column to the reference position of the vertical movable table determined by the V-axis detector is determined. And the amount of horizontal displacement from the reference position of the X-axis guide to the position of the center of gravity of the slider determined by the X-axis detector, the X-axis direction at the reference position of the vertical movable table due to column deformation. And an error calculating step of calculating an error amount in the Z-axis direction; and an error correcting step of correcting at least one of the X-axis detector and the Z-axis detector based on the error amount obtained in the error calculating step. And characterized in that:

According to the present invention, the deformation (falling) of the V-axis column is calculated based on the height of the slider and the position in the X-axis direction, and the detection result of at least one of the X-axis detector and the Z-axis detector is calculated based on the calculated result. Can provide a way to compensate for
Highly accurate measurement is possible. Further, the present invention relates to the aforementioned X
A temperature detector output from a temperature detector provided in the vicinity of at least one of the axis detector, the Z-axis detector, and the device under test, and the X-axis detector or the Z in which the temperature detector is installed. A temperature error coefficient calculation step of obtaining a temperature error coefficient from the axis detector or the temperature characteristic of each of the DUTs, and the X-axis detector by the temperature error coefficient obtained in the temperature error coefficient calculation step. The Z
It is preferable that the method further includes a temperature error correction step of correcting at least one detection result of the object to be measured by the axis detector.

According to the present invention, it is possible to provide a method of individually detecting the temperatures of the X-axis detector, the Z-axis detector, and the object to be measured, and correcting the measured values by the respective temperature coefficients. Thus, it is possible to provide a highly accurate measurement value correction method without installing a measuring device. Further, in the present invention, it is preferable that a reference position of the vertical movable base is a position of a center of gravity of the slider. According to the present invention, the reference position can be easily determined, and the measurement value correction method can be simplified. Further, in the present invention, it is preferable that a reference position of the vertical movable base is a contact point of the Z-axis detector of the slider with an object to be measured. According to the present invention, the error in the position of the stylus tip of the Z-axis detector can be calculated, so that the measurement value correction method can be made more accurate.

Further, in the present invention, the error detecting step may further comprise: a reference position of the upper and lower movable bases by column deformation based on the horizontal length from the position of the center of gravity of the slider to the tip of the Z-axis detector. It is preferable to calculate the error amount in the X-axis direction and the Z-axis direction in. According to the present invention, it is possible to provide a measurement value correction method according to the extension length of the Z-axis detector, so that more accurate correction can be performed. Further, the present invention, the temperature detection output from at least one structure temperature detector provided in the vicinity of the structure of the surface texture measuring device, from the amount of deformation due to the temperature of the structure, the vertical movable table A structural error amount calculating step of obtaining at least one error amount in the X-axis direction, the Z-axis direction, and the V-axis direction at a reference position; and the X-axis detection is performed by the error amount obtained in the structural error amount calculating step. A structural error correction step of correcting at least one detection result of the detector, the Z-axis detector, and the V-axis detector;
It is preferable to further include According to the present invention, since the deformation of the structure of the surface texture measuring device due to the temperature can be corrected, it is possible to provide a more accurate measurement value correction method.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of a surface texture measuring instrument of the present invention for measuring a two-dimensional shape of a large object to be measured will be described below with reference to the drawings. As shown in FIG. 1, the surface texture measuring device according to the present invention is obtained by positioning an object to be measured on a table B on the surface of a measuring device base A and bringing the tip of a detector C into contact with the surface of the object to be measured. Used to measure two-dimensional shapes and surface roughness.

A highly rigid V-axis column D extending in the vertical direction is installed at the rear portion on the right side of the measuring machine base A. In the case shown in the figure, the V-shape column D is made of a ceramic rod having a large Young's modulus and a rectangular cross section. The V-axis column D supports a vertically movable table E which is vertically moved by a V-axis drive motor (not shown) or a V-axis manual knob 1 shown in FIG. That is, as can be understood from FIG. 4, the vertical movable base E is a rectangular frame-shaped slide portion 2 surrounding the V-axis column D and a movable base frame 3 projecting substantially forward of the V-axis column D.
The movable base frame 3 incorporates a drive mechanism to be described later that drives the detector having the detector C in the X-axis direction (the left-right direction in FIG. 1).

The slide portion 2 of the vertical movable base E has a plurality of turquites 4 and 5 which are in sliding contact with the front surface and the left side surface of the V-axis column D which is a reference guide surface. Push units 7, 8 for pressing the turquites 4, 5 against the corresponding reference guide surfaces are attached to the notch (not shown). These push units 7 and 8 are provided with mounting bushes 7a and 8a which are screwed and fixed to the slide portion 2. Inside the mounting bushes 7a and 8a, pressing heads 7b and 8b are pressed against the surface of the V-axis column D. Springs 7c and 8c are built in. Also, in the vertical accommodation groove 9 formed at the center of the front surface of the V-axis column D,
A vertical V-axis feed screw 10 that is rotated and driven by the V-axis drive motor is positioned, and a bracket 11a of a feed nut 11 screwed to an intermediate portion of the V-axis feed screw 10 is firmly attached to the slide portion 2. Fixed.

In order to detect the vertical position of the vertical movable table E, a reflective scale 12 extending in the vertical direction (vertical direction) is fixed to the left side surface of the V-axis column D. A V-axis detection head (V-axis detector 13) having a light emitting unit and a light receiving unit is fixed to the inner surface of the slide unit 2 facing the. The weight of the vertical movable base E including a drive mechanism described later is balanced by the force of retainer springs 15 and 16 fitted to a pair of guide rods 14 provided on the front side of the V-axis column D, and the vertical movable base E is moved. The large bending moment in the front-back direction due to the weight of the V-axis column D
Is prevented from joining.

FIGS. 3 and 4 show details of a drive mechanism for feeding the detector C in the X-axis direction (left-right direction in FIG. 3). X-axis guide 17 serving as a measurement guide extended in the direction
Are fixed, and in the case of the illustrated embodiment, the X-axis guide 17 has a high workability such as alumina ceramic,
It is made of a ceramic rod having a rectangular section with a large Young's modulus.

As can be understood from FIG. 4, a slider 18 which is manufactured as a rectangular frame surrounding the X-axis guide 17 and serves as a measurement slider is movable along the X-axis guide 17 in the X-axis direction (left-right direction). Supported. The slider 18 is provided with a plurality of turquites 21, 22, 23 which are in sliding contact with the upper surface and the rear surface of the X-axis guide 17, which is a reference guide surface. Push units 24, 25 for pressing the 22, 23 against the corresponding reference guide surface are attached. Each of the push units 24 and 25 has a mounting bush that is screwed and fixed in the same manner as the push units 7 and 8 described above for the slide portion 2, and a pressing head is provided inside the mounting bush on the surface of the X-axis guide 17. This is a structure in which a pressing spring for pressing is built-in.

A box-shaped detector mounting portion 26 is hung below the slider 18 described above.
6 includes a displacement detector 27 for converting a minute vertical displacement (Z-axis displacement) of the tip of the attached detector C into an electric signal.
(FIG. 2) is built in. As shown in FIG. 3, an X-axis feed screw 31 extending in a direction parallel to the X-axis guide 17 has a pair of bearings 32, 3 on the left and right side walls of the movable base frame 3.
3 and rotatably supported by the X-axis feed screw 31.
Can be manually rotated by an X-axis manual knob 34 fixed to the shaft end.

The X-axis feed screw 31 is driven by an X-axis drive motor 35 shown in FIG. 4 by a main pulley 36 provided on the drive shaft of the X-axis drive motor 35 and a driven pulley 37 at the shaft end of the X-axis feed screw 31. , Can be rotationally driven via a V-belt 38 hung between these driven pulley 36 and driven pulley 37. The X-axis feed screw 31 has an X
A ball nut 41 containing a large number of balls circulating in the thread groove of the shaft feed screw 31 is screwed into the ball nut 41, and the rotational motion of the X-axis feed screw 31 is converted into a left-right feed motion by the ball nut 41. .

As shown in FIG. 4, the movable base frame 3
A rigid guide 42 having a rectangular cross section which extends in a direction parallel to the X-axis feed screw 31 and serves as a drive guide is provided on the front surface of the rear side wall.
The U-shaped portion of the U-shaped retainer 43 fixed to the ball nut 41 is fitted to the rigid guide 42 made of ceramic having a large Young's modulus in a rod shape, and the ball accompanying the rotation of the X-axis feed screw 31 is fixed. The co-rotational movement of the nut 41 in the vertical direction is suppressed.

On the other hand, a top surface groove 44 extending in the longitudinal direction of the X-axis guide 17 is formed on the top surface of the X-axis guide 17 facing the ball nut 41, and a base is fixed to the left and right ends of the slider 18. The lower end mounting portions 45a, 46a of the pair of mounting brackets 45, 46 are inserted into the top surface groove 44, and between the lower end mounting portions 45a, 46a, both ends of a straight piano wire piece 51 extending in the X-axis direction. The part is fixed. That is, since the piano wire 51 has a large pit tension in the length direction and is easily deformed by a load in a direction perpendicular to the length direction, the piano wire 51 has a property of The co-rotational movement of the ball nut 41 generated in a plane perpendicular to the plane can be absorbed. A connecting block 52 is fixed to the lower part of the U-shaped retainer 43 with mounting screws 53 and 54. A lower end 61b of a vertical connecting pin 61 for fixing a base end 61a to the connecting block 52 is connected to the piano. It is fixed to the middle part of the wire piece 51.

The connecting position of the connecting pin 61 to the piano wire 51 is determined by the position of the slider 18 including the detector mounting portion 26.
Is selected in the X-axis direction and the lower end thereof is fixed to the intermediate portion of the piano wire piece 51. Therefore, when the ball nut 41 moves, a weight moment around the center of gravity acts on the slider 18, that is, the same weight moment Thus, the posture of the slider 18 moved along the X-axis feed screw 31 can be prevented from becoming unstable. As shown in FIG. 6, when the slider 18 is located at the center of the X-axis guide 17 in the longitudinal direction, the cross-sectional center α of the V-axis column D and the center of gravity G of the slider 18 coincide with each other. It is defined as follows.

That is, according to the present invention, when the slider 18 is moved by x in the left-right direction from the center of the X-axis guide 17 (or the cross-sectional center α of the V-axis column D), the V-axis column D can be considered as a cantilever. The weight W of the slider 18
A bending moment M acting as x displacement in the X-axis direction acts, and the bending moment M causes the V-axis column D to deform to the state shown by the two-dot chain line. , Measuring instrument base A which is a fixed point
This means that the position of the center of gravity G of the slider 18 in the X-axis direction actually has a value of “x + δx”.

The exact position of the slider 18 with respect to the X-axis guide 17 can be detected by a laser hologram unit provided between the X-axis guide 17 and the slider 18. That is, this laser hologram unit has an X-axis direction transparent hologram scale 71 fixed to the lower part of the front surface of the X-axis guide 17, and a U-shaped block fixed to the lower wall of the slider 18 so as to face the transparent hologram scale 71. Reference numeral 72 denotes a laser element 7 sandwiching the lower part of the transparent hologram scale 71.
3 and the diffraction light receiving element (X-axis detector 74) are supported.

Since the surface texture measuring device according to the illustrated embodiment has the above-described configuration, it can be detected on the surface of the object to be measured on the table B by adjusting the vertical position of the vertical movable base E with respect to the V-axis column D. The tip of the detector C is brought into contact with the detector C while moving the slider 18 in the X-axis direction.
By detecting the axial displacement, it is possible to measure the surface properties such as the two-dimensional surface shape or surface roughness of the measured object.

That is, the position of the vertical movable table E along the vertical V-axis column D, that is, the vertical height of the slider 18 is known by the reflection type detector (V-axis detector 13) of the slide portion 2. The displacement of the slider 18 in the X-axis direction, that is, the X-axis displacement of the detector C is determined by the diffraction light receiving element (X-axis detector 74).
You can know exactly. Therefore, the slider 18
By observing the minute displacement of the detector C in the Z-axis direction with respect to the X-axis displacement, the surface shape and the surface roughness of the object to be measured can be measured.

FIG. 2 is a block diagram of a signal system of the surface texture measuring device according to the present invention. The above-described V-axis detector 13, displacement detector (Z-axis detector) 27, and X-axis detector 7 are shown.
Each output signal of 4 is input to a control device CPU constituted by a microcomputer or the like, and the control device CPU performs an operation according to a measurement purpose.

FIG. 8 shows a detailed block diagram of the control unit CPU. The height calculating means 101 is a V-axis detector 13
, The height v from the base of the V-axis column D (the surface position of the measuring instrument base A) to the reference position of the vertical movable base E (the center of gravity G of the slider 18) is calculated. The horizontal displacement calculating means 102 calculates the X-axis guide 17 from the output of the X-axis detector.
The horizontal displacement x of the center of gravity G of the slider 18 with respect to the reference position (the cross-sectional center α of the V-axis column D) is calculated. The error amount calculation means 103 calculates the deflection amount δx of the center of gravity G of the slider 18 in the X-axis direction due to the bending deformation of the V-axis column D from the height v and the horizontal displacement amount x using the following equation.

Δx = W · x · v^Two / (2E · I) where, W: weight of slider 18 (kg), E: V-axis coupler
Young's modulus of mud D (N / mm ^Two ), I: Section 2 of V-axis column D
In the second moment, since these are all known quantities, the error
The quantity δx can be calculated immediately. The error amount calculating means 103
In addition, the slide in the Z-axis direction caused by the bending deformation of the V-axis column D
The shake amount δz of the center of gravity G of the ida 18 is represented by δz = v−v × CO
It is calculated by the equation of Sγ. Where γ is the V-axis column D
And there is a relationship of SINγ = δx / v.

Thereafter, the error correction means 104 corrects the detection value of each axis by subtracting the error amount δx from the output of the X-axis detector 74 and further subtracting the error amount δz from the output of the displacement detector 27. . However, the sign of the error amount δx changes depending on whether the center of gravity G of the slider 18 is on the left side or on the right side of the sectional center α of the V-axis column D. In the above description, a simple method of correcting each axis based on the amount of error at the position of the center of gravity G of the slider 18 has been described. However, if more precise error correction is required, the reference position of the vertical movable base E Is used as the point of contact of the detector C attached to the slider 18 with the workpiece. Further, since the X-axis guide 17 is tilted by the angle indicated by γ due to the bending deformation of the V-axis column D, if the horizontal position (X-axis position) of the tip of the detector C needs to be obtained more accurately, the X-axis Error δ from detector output
After subtracting x, the horizontal length from the position of the center of gravity G to the tip of the detector C is added, and the result is multiplied by COSγ to perform angle correction. The same angle correction can be performed on the Z axis.

The calculation result by the control unit CPU is as follows.
V-axis position of the vertical movable base E, X-axis position of the slider 18,
It is displayed on the display 81 as a digital amount such as a minute displacement (in the Z-axis direction). Apart from the display 81, a computer for analyzing the measurement data and a CRT display capable of displaying the processing results in a graph are used. In some cases.

FIG. 7 shows the relationship between the correction value .delta.x in the illustrated surface texture measuring device and the position of the slider 18 in the X-axis direction. The weight W of the slider 18 in the illustrated surface texture measuring device is 4.5 kg, V
Young's modulus E of shaft column D = 225,000N / mm ² , V-axis column D
Is the second moment of area I = 1E + 07 mm ⁴ . As can be understood from FIG. 7, the greater the height of adjustment of the vertical movable table E with respect to the V-axis column D,
The greater the weight and the X-axis displacement x, the greater the amount of error δx, so for accurate measurement of a large-sized DUT,
It can be seen that it is more advantageous to calculate the correction value δx to determine the X-axis position without sacrificing the rigidity of the V-axis column D to some extent without increasing the weight of the measuring machine due to the increased rigidity of the V-axis column D.

FIG. 9 is different from the first embodiment in that a temperature detector is provided, and a temperature error coefficient calculating means and a temperature error correcting means are provided in the control unit CPU. This is for correcting expansion and contraction due to temperature. In the figure, a temperature detector 1 is arranged near a hologram scale 71 of an X-axis detector 74, and a temperature detector 2 is a displacement detector 2
7, the temperature detector 3 is disposed near the object to be measured, whereby the temperatures of the X-axis detector 74, the displacement detector 27, and the object to be measured are detected.

These temperature detection results are input to temperature error coefficient calculating means provided in the control unit CPU. Here, since the temperature error amount is usually 20 degrees Celsius as a standard temperature, a temperature difference Tw = Tc-20 with respect to 20 degrees Celsius is obtained, and the temperature difference amount is obtained by multiplying the difference by a linear expansion coefficient β. That is, when the temperature near the hologram scale 71 of the X-axis detector 74 is T1 and the linear expansion coefficient of the hologram scale 71 is β1, the temperature error coefficient θ1 for the X-axis detector 74 is θ1 = β1 × (T1 -2
0). The temperature error coefficient thus obtained is input to the temperature error correction means 114, and the temperature error of each axis or the DUT is corrected.

In the case of the X-axis detector 74, the detected temperature-corrected amount Xc is expressed by the following equation: Xc = X ×
It is obtained as (1−θ1). The displacement detector 27 can be similarly calculated except that the linear expansion coefficient of the displacement detector 27 is β2. Also, for the DUT,
The same calculation can be performed except that the coefficient of linear expansion of the device under test is β3. However, the coefficient of linear expansion β3 of the device under test needs to be set for each device under test to be measured. More specifically, it is preferable that each of the objects to be measured has a coefficient of linear expansion corresponding to various materials such as iron and aluminum. In addition, depending on the degree of the influence of temperature,
For example, it is possible to perform temperature correction only on the X-axis detector, and selection of a temperature correction target is arbitrary.

As described above, the temperature of each axis detector is individually measured as necessary, and the temperature is corrected, whereby an accurate detection amount in terms of an industrial standard condition of 20 degrees Celsius can be obtained. Further, by performing the temperature correction of the device under test, it is possible to obtain a more accurate surface property of the device under test converted to 20 degrees Celsius. Further, in the present embodiment, the error amount δx and the shake amount δz are obtained by a calculation formula using the horizontal displacement amount x and the height v as parameters. However, the present invention is not limited to this. The error amount δx and the shake amount δz are obtained in advance by actual measurement, an error data table based on the data is created, and the error amount δx and the shake amount δz are obtained by referring to the error data table. Then, the measurement value correction (error amount correction) can be performed faster and more accurately.

Further, a table or a V
A temperature detector is provided in the vicinity of the measuring machine structure such as the shaft column, and the deformation amount of the measuring machine structure such as the V-axis column is obtained from the temperature detection result to obtain the X-axis detection amount, the Z-axis detection amount, and the V-axis. The detection amount may be corrected. Specifically, if the temperature detection result and the deformation amount of the measuring machine structure are obtained in advance by actual measurement and the like and a temperature deformation data table is created, the deformation amount of the structure can be easily obtained from the temperature of the structure. Can be. The deformation amount obtained from this temperature deformation data table,
Since the errors in the X-axis direction, the Z-axis direction, and the V-axis direction at the reference position of the upper and lower movable tables are obtained from the V-axis detection amount, the X-axis detection amount, the Z-axis detection amount, and the V-axis detection amount are corrected. Highly accurate measurement results can be obtained. This makes it possible to correct the deformation of the structure of the measuring instrument due to the temperature.

[0040]

As is apparent from the above description, according to the present invention, a correction value is calculated according to the height of the vertical movable base and the displacement of the slider in the X-axis direction, and the actual X-axis is calculated from the correction value. Since the displacement is obtained, it is possible to obtain a relatively lightweight surface texture measuring device or a highly accurate surface texture measuring device that can be used for a large-sized object to be measured. In addition, a temperature detector is placed on each axis detector and the object to be measured, and the temperature of each is measured and the detected value is corrected. Properties can be determined.

[Brief description of the drawings]

FIG. 1 is a front view of a surface texture measuring device according to the present invention.

FIG. 2 is a block diagram of the surface texture measuring device.

FIG. 3 is an enlarged sectional view of a main part of the surface texture measuring device.

FIG. 4 is an enlarged sectional view of a main part of the surface texture measuring device, taken along line 4-4 in FIG. 1;

FIG. 5 is an exploded enlarged perspective view of a main part of the surface texture measuring device.

FIG. 6 is a deformation model of a V-axis column of the surface texture measuring device.

FIG. 7 is an X-axis position correction graph based on the V-axis column deformation.

FIG. 8 is a detailed block diagram of a control device CPU.

FIG. 9 is a detailed block diagram of a control device CPU according to another embodiment.

[Explanation of symbols]

 A Measuring machine base B Table C Detector D V axis column E Vertical movable base 2 Slide section 3 Movable frame 13 V axis detector 17 X axis guide 18 Slider 26 Detector mounting part 27 Displacement detector 41 Ball nut 42 Rigid guide 43 U-shaped retainer 51 Piano wire piece 61 Connecting pin 74 X-axis detector

Continued on the front page F term (reference) 2F069 AA56 AA57 AA60 AA61 DD27 EE02 EE23 GG01 GG06 GG07 GG11 GG62 MM13 MM26 MM31

Claims (12)

[Claims] 1. A column erected on a base of a measuring instrument, a vertically movable table supported to be vertically movable with respect to the column, and a V-axis detection for detecting a vertical displacement of the vertically movable table with respect to the column. A slider having an X-axis guide horizontally provided on the vertically movable table, a Z-axis detector guided along the X-axis guide, and detecting a surface property of an object to be measured; and the X-axis. An X-axis detector that measures an amount of displacement of the slider with respect to a guide, and a control device that corrects a detection result of at least one of the X-axis detector and the Z-axis detector. The control device receives an output of the V-axis detector, and calculates a height from a base of the column to a reference position of the up-down movable table; and inputs an output of the X-axis detector. And the reference position of the X-axis guide. A horizontal displacement amount calculating means for calculating a horizontal displacement amount from the slider to the center of gravity of the slider; and an input of the outputs of the height calculating means and the horizontal displacement amount calculating means, and the vertical movable table by column deformation. Error amount calculating means for calculating at least one error amount in the X-axis direction and the Z-axis direction at the reference position, and at least one of the X-axis detector and the Z-axis detector based on an output of the error amount calculating means. A surface texture measuring device comprising: a control device including: an error amount correcting unit that corrects a detection result. 2. The surface texture measuring device further includes a temperature detector near at least one of the X-axis detector, the Z-axis detector, the V-axis detector, and the device under test, From the temperature detection output of the temperature detector, from the temperature characteristic of each of the X-axis detector or the Z-axis detector or the V-axis detector or the device under test where the temperature detector is installed, Temperature error coefficient calculation means for obtaining a temperature error coefficient; and at least one detection result of the X-axis detector, the Z-axis detector, the V-axis detector, and the device under test, based on an output of the temperature error coefficient calculation means. 2. The surface texture measuring device according to claim 1, further comprising a temperature error correction unit that corrects the temperature error. 3. The surface texture measuring device according to claim 1, wherein the reference position of the vertical movable table is a position of a center of gravity of the slider. 4. The surface texture measuring device according to claim 1, wherein the reference position of the vertical movable base is a contact point of the slider with a workpiece to be measured by a Z-axis detector. . 5. The apparatus according to claim 1, wherein said error amount calculating means further comprises: an X-axis at a reference position of said vertical movable base by column deformation based on a horizontal length from a position of a center of gravity of said slider to a tip of said Z-axis detector. The surface texture measuring device according to any one of claims 1 to 4, wherein an error amount between the axial direction and the Z-axis direction is calculated. 6. The surface texture measuring device further includes at least one structure temperature detector in the vicinity of a structure of the surface texture measuring device, and the control device includes: a temperature detector configured to detect a temperature of the structure temperature detector. A structure error amount calculating means for calculating at least one error amount in the X-axis direction, the Z-axis direction, and the V-axis direction at a reference position of the vertical movable table from the output and the deformation amount of the structure due to temperature; A structural error correction unit configured to correct at least one detection result of the X-axis detector, the Z-axis detector, and the V-axis detector based on an output of the structural error calculating unit. The surface texture measuring device according to any one of claims 1 to 5, characterized in that: 7. A column erected on a base of a measuring instrument, a vertically movable table supported to be vertically movable with respect to the column, and a V-axis detection for detecting a vertical displacement of the vertically movable table with respect to the column. A slider having an X-axis guide horizontally provided on the vertically movable table, a Z-axis detector guided along the X-axis guide, and detecting a surface property of an object to be measured; and the X-axis. An X-axis detector for measuring an amount of displacement of the slider with respect to a guide; and a surface texture measuring device comprising: a height from a base of the column to a reference position of the up-down movable table obtained by the V-axis detector; From the horizontal displacement from the reference position of the X-axis guide to the position of the center of gravity of the slider determined by the X-axis detector, the X-axis direction and Z at the reference position of the vertical movable table due to column deformation
An error calculation step of calculating an error amount in the axial direction; and an error correction step of correcting at least one of the X-axis detector and the Z-axis detector based on the error amount obtained in the error calculation step. A method for correcting a measured value of a surface texture measuring device, comprising: 8. A temperature detector output from a temperature detector provided near at least one of the X-axis detector, the Z-axis detector, the V-axis detector, and the device under test, and the temperature detection A temperature error coefficient calculating step for obtaining a temperature error coefficient from the X-axis detector, the Z-axis detector, the V-axis detector, or the temperature characteristic of each of the devices under test, wherein the temperature is set; A temperature error correction step of correcting at least one detection result of the X-axis detector, the Z-axis detector, the V-axis detector, and the device under test by the temperature error coefficient obtained in the error coefficient calculation step; The method for correcting a measured value of a surface texture measuring instrument according to claim 7, further comprising: 9. The method according to claim 7, wherein the reference position of the vertical movable base is a position of a center of gravity of the slider. 10. The surface texture measuring apparatus according to claim 7, wherein the reference position of the vertical movable table is a contact point of the slider with the object to be measured of the Z-axis detector. Method of correcting measured values. 11. The method according to claim 11, wherein the error detecting step further comprises: an X-axis at a reference position of the upper and lower movable base by a column deformation based on the horizontal length from the position of the center of gravity of the slider to the tip of the Z-axis detector. 11. An error amount between the direction and the Z-axis direction is calculated.
The method for correcting a measured value of the surface texture measuring device according to any one of the above. 12. A temperature detection output from at least one structure temperature detector provided near a structure of the surface texture measuring device, and a deformation amount of the structure due to temperature,
A structural error amount calculating step for obtaining at least one error amount in the X-axis direction, the Z-axis direction, and the V-axis direction at a reference position of the upper and lower movable table; and an error amount obtained in the structural body error amount calculating step. 8. A structure error amount correcting step of correcting at least one detection result of the X-axis detector, the Z-axis detector, and the V-axis detector. 12. The method for correcting a measured value of the surface texture measuring device according to any one of items 11 to 11.