JP2002062485A - Inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection system with which a macroinspection and a microinspection may be simultaneously carried out. SOLUTION: This system includes a microscope 1, an imaging device 2 which is mounted in an eyepiece section 3 or C mount section 4 of the microscope 1 and a display device 5 which is mountable to an inspector 6, is approached with a display 7 to the eye 8 of the inspector 8 in mounting and projects the image enlarged by the microscope 1 and picked up by the imaging device 2 to a display 7. An object 14 for inspection is placed on a sample stage 10 of the microscope and the inspector 6 directly inspects the object 14 for inspection with the naked eyes. The object 14 for inspection is enlarged and inspected through this display 7.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection system applied to, for example, inspection of a circuit board or the like.

[0002]

2. Description of the Related Art Conventionally, this type of inspection requires a visual inspection (macro inspection) and a microscope inspection (micro inspection). In this case, the step of inspecting the inspection target with the naked eye and the step of inspecting the image enlarged by the microscope are separately performed. In this case, the inspection process using a microscope is performed by displaying an enlarged image using a microscope on a monitor.

[0003]

However, if each step is performed separately as described above, there is a problem that the inspection efficiency is poor. Further, when a monitor or the like is installed on a work line, there is a problem that space efficiency is poor.

Accordingly, an object of the present invention is to provide an inspection system capable of simultaneously performing a macro inspection and a micro inspection. Another object of the present invention is to provide an inspection system that can increase the space efficiency of a work line.

[0005]

In order to solve the above problems, an inspection system according to the present invention comprises a microscope, an imaging device mounted on an eyepiece or a C-mount of the microscope, and an inspection system. A display device that, when worn, has a display unit that is close to the eye of the inspector and that displays an image of the microscope that is enlarged and captured by the imaging device on the display unit, Is placed on a sample stage of the microscope, and the inspector directly inspects the inspection object with the naked eye, and inspects the inspection object by enlarging it via the display unit.

According to the present invention, for example, an inspection of minute defects or the like, that is, a micro inspection can be performed by a glasses-type display as a display device, and an actual sample is visually inspected from a gap below the glasses-type display, ie, a macro inspection. Inspection can be performed. Therefore, the macro inspection and the micro inspection can be performed simultaneously. In addition, since there is no need to install a monitor or the like, the space efficiency of the work line can be increased.

[0007]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a configuration of an inspection system according to one embodiment of the present invention.

In FIG. 1, 1 is a microscope, 2 is a microscope 1
Is a digital camera mounted on the eyepiece 3 or the C-mount 4.

Reference numeral 5 denotes a digital camera which can be mounted on the inspector 6 when the display unit 7 is close to the eye 8 of the inspector 6 and the display unit 7 is enlarged by the microscope 1 at the time of mounting. 2 is a glasses-type display for displaying an image taken by the camera 2.

The digital camera 2 has a predetermined adapter 9
Through the eyepiece 3 or C-mount 4 of the microscope 1
It is attached to.

On the upper part of the sample stage 10 of the microscope 1,
A ring-shaped lighting device 11 is arranged. This can prevent the illumination device from interfering with the inspection.

Further, image data of the digital camera 2 is taken into the personal computer 12.

In the microscope 1, the distance between the objective lens 13 and the sample stage 10 is preferably around 200 mm. Thereby, observation with the naked eye can be performed without difficulty, and the working efficiency can be improved.

In the microscope 1, the magnification of the objective lens 13 is preferably about 0.5 to 5 times. This is because workability is unreasonable at high magnification due to the combined use inspection with the naked eye.

Further, the microscope 1 preferably has a deeper depth of focus than a normal microscope. Thereby, workability can be improved.

The spectacle-type display 5 allows the inspection of the sample 14 placed on the sample stage 10 of the microscope 1 for a fine defect or the like, that is, micro-inspection. An actual inspection of the sample 14 by the naked eye, that is, a macro inspection can be performed.

FIG. 2 shows an example in which the inspection system shown in FIG. 1 is further applied. Note that the same components as those in FIG. 1 are denoted by the same reference numerals.

The microphone 20 and the earphone 21 are attached to the handle 30 of the glasses-type display 5 via, for example, a power supply unit 24. For example, the test result and data of the sample 14 by the voice of the inspector 6 are transmitted to the central control room 23 at a remote location, and an operator or a technician (not shown) waiting in the central control room 23 transmits the test information. The information on the treatment and processing of the sample 14 is fed back to the examiner by voice based on the data and the data.

Thus, between the inspector and the central control room,
Since the inspection information of the sample 14 and the treatment / processing information for the sample 14 can be quickly exchanged, the inspection work efficiency can be improved.

FIG. 3 shows an image display principle of the glasses-type display 5. This is a color LCD display 26
Is enlarged and displayed as a virtual image on the eyeball 8 of the inspector 6 by the convex lens 27 of the eyepiece optical system.
The color liquid crystal display 26 is illuminated by a point light source 25 arranged behind it. Thereby, the enlarged image by the microscope 1 can be further enlarged, and more precise inspection can be performed.

In the present embodiment, between the convex lens 27 and the eyeball 8, for example, three holograms 28 respectively corresponding to the three colors of RGB diffracted light and a concave lens 31 for vision correction are provided. An image with less aberration is obtained and can be used according to the eyesight of the inspector.

FIG. 4 shows the microscope 1 in FIGS.
An apparatus configuration for performing an inspection by an apparatus that directly sends an image obtained by the digital camera 2 to the retina of an inspector will be described. For example, light emitted from a laser light source 35 that emits laser light is incident on a light modulation element 36, and the light modulation element 36 converts an image signal from an image signal source (the personal computer shown in FIGS. It is modulated to a predetermined frequency, phase, intensity, polarization plane, and the like. The modulated laser light is incident on a horizontal polarizer 37 and a vertical polarizer 38, where the laser light is scanned horizontally and vertically by a scanning signal source 39. The scanned laser light forms an image on the retina via the optical system 40 and the crystalline lens of the eyeball 8. At this time, the inspector perceives the group of scanned laser light points as an image.

As the laser beam, for example, a He-Ne laser which does not adversely affect the eyes is used.

According to this embodiment, a clear image can be obtained regardless of the farsightedness or nearsightedness of the inspector. Further, since a display unit such as a display is not required in the apparatus, the apparatus can be reduced in size, and an eyeglass-type display is not required, so that the effect of achieving both micro-inspection and macro-inspection is further enhanced.

The present invention is not limited to the above-described embodiment, but can be variously modified.

For example, the imaging device may be a CCD camera or a CMOS camera in addition to the digital camera.

When the imaging device is a digital camera having a voice input function, the sound at the time of inspection may be recorded using the digital camera.

In the example shown in FIG.
The image information obtained by the digital camera 2 captured by the digital camera 2 may be transmitted to both the glasses-type display 5 and the central control room 23.

Further, although the display principle of the glasses-type display 5 according to the present embodiment is such that an enlarged virtual image is obtained as shown in FIG. 3, the present invention is not limited to this.

[0031]

As described above, according to the present invention,
Macro inspection and micro inspection can be performed simultaneously.
Therefore, the working efficiency is improved, and the efficiency of the process up to finding the defective portion can be improved. In addition, since there is no need to install a monitor or the like, the space efficiency of the work line can be increased.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an inspection system according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of an inspection system according to another embodiment of the present invention.

FIG. 3 is a diagram illustrating a display principle of a glasses-type display.

FIG. 4 is a diagram showing a configuration of a method of directly sending an image to a retina.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microscope 2 ... Digital camera 5 ... Glasses type display 7 ... Display part 15 ... Gap 20 ... Microphone 21 ... Earphone 23 ... Central control room 26 ... Color liquid crystal display 35 ... Laser light source 36 ... Light modulation element 37 ... Horizontal polarizer 38 ... vertical polarizer 39 ... scanning signal source 40 ... optical system

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Claims (13)

[Claims] 1. A microscope, an imaging device mounted on an eyepiece or a C-mount of the microscope, and a mountable to an inspector, wherein the display unit is close to the inspector's eyes when mounted, A display device for displaying an image of the microscope magnified and imaged by the imaging device on the display unit, wherein the test object is placed on a sample stage of the microscope, and An inspection system, wherein an object is directly inspected with the naked eye, and the inspection object is inspected while being enlarged via the display unit. 2. The inspection system according to claim 1, wherein the display device is a glasses-type display. 3. The image capturing apparatus according to claim 1, wherein the digital camera is a digital camera.
The inspection system according to claim 1, wherein the inspection system is a CD camera or a CMOS camera. 4. The inspection system according to claim 3, wherein the digital camera, CCD camera, or CMOS camera is mounted on an eyepiece unit or a C-mount unit of the microscope via a predetermined adapter. 5. The inspection system according to claim 1, further comprising a ring-shaped illumination device disposed above a sample stage of the microscope. 6. The inspection system according to claim 3, wherein image data of the digital camera, CCD camera or CMOS camera is taken into a personal computer. 7. The inspection system according to claim 1, wherein the imaging device is a digital camera with a voice input function, and the sound at the time of the inspection is recorded using the digital camera. . The inspection system according to claim 1, wherein: 8. The microscope according to claim 1, wherein the distance between the objective lens and the sample stage is about 200 mm.
The inspection system according to 1. 9. The microscope according to claim 1, wherein the magnification of the objective lens is 0.
The inspection system according to claim 1, wherein the number is about 5 to 5 times. 10. The inspection system according to claim 1, wherein the microscope has a deeper depth of focus than a normal microscope. 11. The information of the voice of the inspector is transmitted to a management room in a remote place, and the management room processes the object to be inspected based on the information of the voice of the inspector. The inspection system according to claim 1, wherein the information is fed back by voice. 12. The inspection system according to claim 1, wherein the display device includes an optical system that guides an image projected on the display unit as a virtual image into an eyeball of the inspector. 13. A laser light source; light modulating means for modulating light from the laser light source on the basis of an image signal picked up by the image pickup device; and light modulated by the light modulating means in horizontal and vertical directions. The inspection system according to claim 1, further comprising: a scanning unit configured to scan the light, and an optical system that forms an image of the scanned light on a retina of the inspector.