JP2002057196A5 - - Google Patents
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- Publication number
- JP2002057196A5 JP2002057196A5 JP2000238654A JP2000238654A JP2002057196A5 JP 2002057196 A5 JP2002057196 A5 JP 2002057196A5 JP 2000238654 A JP2000238654 A JP 2000238654A JP 2000238654 A JP2000238654 A JP 2000238654A JP 2002057196 A5 JP2002057196 A5 JP 2002057196A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238654A JP2002057196A (en) | 2000-08-07 | 2000-08-07 | Method and device for probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000238654A JP2002057196A (en) | 2000-08-07 | 2000-08-07 | Method and device for probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002057196A JP2002057196A (en) | 2002-02-22 |
| JP2002057196A5 true JP2002057196A5 (en) | 2007-09-20 |
Family
ID=18730324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000238654A Pending JP2002057196A (en) | 2000-08-07 | 2000-08-07 | Method and device for probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002057196A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7262575B2 (en) * | 2004-12-01 | 2007-08-28 | Bio-Rad Laboratories, Inc. | Method and apparatus for precise positioning of an object with linear stepper motors |
| JP5120017B2 (en) * | 2007-05-15 | 2013-01-16 | 東京エレクトロン株式会社 | Probe device |
| JP2009147320A (en) * | 2007-11-21 | 2009-07-02 | Horiba Ltd | Inspection apparatus |
| JP5317330B2 (en) * | 2008-09-02 | 2013-10-16 | ルネサスエレクトロニクス株式会社 | Manufacturing method of semiconductor integrated circuit device |
| JP5384170B2 (en) | 2009-03-31 | 2014-01-08 | 東京エレクトロン株式会社 | Contact parameter setting method, contact parameter setting program, and recording medium on which contact parameter setting program is recorded |
| CN113030691B (en) * | 2019-12-24 | 2022-07-19 | 芯恩（青岛）集成电路有限公司 | Chip electrical test probe head alignment method, system, storage medium and terminal |
| CN113086238A (en) * | 2021-03-29 | 2021-07-09 | 中国航空制造技术研究院 | Automatic hole making and position online correction method based on reference hole position measurement |
| CN114441555A (en) * | 2022-01-14 | 2022-05-06 | 上海世禹精密机械有限公司 | Automatic solder ball array packaging and ball mounting detection system |
| CN115090917B (en) * | 2022-08-25 | 2023-01-10 | 成都飞机工业（集团）有限责任公司 | Hole making method and device, storage medium and equipment |
| CN115902327B (en) * | 2023-02-23 | 2023-05-26 | 长春光华微电子设备工程中心有限公司 | Calibration method for probe station positioning compensation and probe station |
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2000
- 2000-08-07 JP JP2000238654A patent/JP2002057196A/en active Pending